JPH0780724A - Electric discharge machining device for nonconductive material - Google Patents
Electric discharge machining device for nonconductive materialInfo
- Publication number
- JPH0780724A JPH0780724A JP22865993A JP22865993A JPH0780724A JP H0780724 A JPH0780724 A JP H0780724A JP 22865993 A JP22865993 A JP 22865993A JP 22865993 A JP22865993 A JP 22865993A JP H0780724 A JPH0780724 A JP H0780724A
- Authority
- JP
- Japan
- Prior art keywords
- tool electrode
- conductive material
- light
- electrode
- intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、非導電性材料を加工す
る放電加工装置に係り、詳しくは、電解質溶液中に発生
した放電を利用して非導電性材料を加工する放電加工装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric discharge machine for processing a non-conductive material, and more particularly to an electric discharge machine for processing a non-conductive material by utilizing an electric discharge generated in an electrolyte solution.
【０００２】[0002]
【従来の技術】電解質溶液中の放電による非導電性材料
の加工は、電解質溶液中で工具電極と対電極との間に電
圧を印加し、この工具電極の先端を非導電性材料に接近
させるとこれら工具電極と非導電性材料との間で放電が
発生し、この放電に伴って工具電極近傍に発生する放電
エネルギーが電解質溶液による非導電性材料の溶融又は
熱化学的な除去等を加速することで行われると考えられ
ている（参考文献としては、谷口信夫「精密機械」，２
９−１０（１９６３）７９８及び土屋八郎「機械技
術」，３２−１２（１９８４）７７がある）。そして、
所望の加工を行うためには、非導電性材料の溶融又は熱
化学的な除去等による加工の進行に合わせて、工具電極
と非導電性材料との間の相対位置が一定の間隔になるよ
うに制御しつつ工具電極を非導電性材料の加工面に向か
って送る必要がある。2. Description of the Related Art To process a non-conductive material by discharging in an electrolyte solution, a voltage is applied between a tool electrode and a counter electrode in the electrolyte solution to bring the tip of the tool electrode close to the non-conductive material. A discharge is generated between the tool electrode and the non-conductive material, and the discharge energy generated in the vicinity of the tool electrode due to this discharge accelerates the melting or thermochemical removal of the non-conductive material by the electrolyte solution. (Refer to Nobuo Taniguchi "Precision Machinery", 2
9-10 (1963) 798 and Hachiro Tsuchiya “Machine Technology”, 32-12 (1984) 77). And
In order to carry out the desired processing, the relative position between the tool electrode and the non-conductive material should be a constant distance as the processing progresses, such as melting or thermochemical removal of the non-conductive material. It is necessary to feed the tool electrode toward the machined surface of the non-conductive material while controlling it.
【０００３】参考までに、導電性材料に放電による加工
を行う場合には、絶縁性溶液に浸漬された導電性材料と
工具電極とを電源を介して接続することで、導電性材料
と工具電極との間に放電を発生し、また、その時に導電
性材料と工具電極との間に流れる電流の大きさが、工具
電極と導電性材料との間の距離がある程度離れている場
合には安定な放電が行われるので小さく、前記距離が極
めて接近している場合には火花若しくはアーク状態の放
電が行われるので極めて大きくなる特性を利用して、上
記電流の大きさが大きくなったら適当な大きさになるま
で工具電極を導電性材料から遠ざけることで、工具電極
と導電性材料とを常に非接触の状態に保ちながら工具電
極と導電性材料との間の相対位置を制御し、所望の加工
を行うことができる。しかしながら、非導電性材料を放
電加工する場合には、電流は非導電性材料と工具電極と
の間ではなく対電極と工具電極との間に流れるため、そ
の変化が非導電性材料と工具電極との間の距離の変化に
対応しないので、上記のように電流の大きさをもとに工
具電極と非導電性材料との間の相対位置を制御しつつ工
具電極を非導電性材料の加工面に向かって送ることはで
きない。For reference, when machining a conductive material by electric discharge, the conductive material dipped in an insulating solution and the tool electrode are connected via a power source so that the conductive material and the tool electrode are connected. Is generated between the conductive material and the tool electrode, and the magnitude of the current flowing between the conductive material and the tool electrode is stable when the distance between the tool electrode and the conductive material is large to some extent. Since the discharge is small, it is small, and when the distance is very close, a spark or arc is discharged, which is extremely large. By moving the tool electrode away from the conductive material until it reaches the end, the relative position between the tool electrode and the conductive material is controlled while keeping the tool electrode and the conductive material in a non-contact state, and the desired processing is performed. Can do . However, when EDM is performed on a non-conductive material, the current flows between the counter electrode and the tool electrode, not between the non-conductive material and the tool electrode. Since it does not correspond to the change in the distance between the tool electrode and the non-conductive material, it controls the relative position between the tool electrode and the non-conductive material based on the magnitude of the current as described above. You cannot send it to the face.
【０００４】そこで、図３に示すように、茨城県工業技
術センター研究報告第１６号の「電解液中放電による穴
加工の試験（第一報）」では、工具電極３（加工電極）
の上部に加工用ウェイト１３を配設し、これによって工
具電極３に常時荷重を作用させ、加工の進行に追従して
この工具電極３が移動するように構成しており、その移
動量を測定することで加工量を認識し、所望の加工を行
うようにしている。Therefore, as shown in FIG. 3, in the Ibaraki Prefectural Industrial Technology Center, Research Report No. 16, "Test of Hole Machining by Discharge in Electrolyte (First Report)", the tool electrode 3 (machining electrode) was used.
A machining weight 13 is disposed on the upper part of the tool so that a load is constantly applied to the tool electrode 3 so that the tool electrode 3 moves in accordance with the progress of machining, and the amount of movement is measured. By doing so, the amount of processing is recognized and desired processing is performed.
【０００５】しかしながら、上記のように加工用ウェイ
トを用いて工具電極３に常時荷重をかけて、工具電極３
を連動させる構成では、加工時にこの工具電極３の先端
が非導電性材料２に接触し、また、加工時に発生する泡
により振動し、この結果工具電極３の先端は変形し易
く、その寿命が短く、また、加工中に変形が発生した時
には所望の加工が行えなくなる等の問題がある。そし
て、このような問題は微細な加工を行うために工具電極
３の先端を細くすればするほど顕著に現れる。However, as described above, the tool weight is always applied to the tool electrode 3 by using the machining weight, and the tool electrode 3 is loaded.
In the configuration in which the tool electrode 3 is interlocked with each other, the tip of the tool electrode 3 comes into contact with the non-conductive material 2 during machining and is vibrated by bubbles generated during machining. It is short and there is a problem that desired processing cannot be performed when deformation occurs during processing. Then, such a problem becomes more remarkable as the tip of the tool electrode 3 is made thinner in order to perform fine processing.
【０００６】[0006]
【発明が解決しようとする課題】そこで、本発明者ら
は、このように非導電性材料を加工する放電加工装置に
おける問題点を解決すべく鋭意研究を重ねた結果、放電
によって発生する放電プラズマ光から非導電性材料に起
因して発光する特定の波長の光の強度を選択的に検出
し、その光の強度に応じて工具電極と非導電性材料との
間の相対位置を制御しつつ工具電極を駆動することによ
り、工具電極と非導電性材料との間を常に非接触の状態
に保つようにその間の相対位置を制御できることを見出
し、本発明を完成した。Therefore, as a result of intensive research conducted by the present inventors to solve the problems in the electric discharge machining apparatus for processing a non-conductive material, the discharge plasma generated by electric discharge While selectively detecting the intensity of light of a specific wavelength emitted from the light due to the non-conductive material and controlling the relative position between the tool electrode and the non-conductive material according to the intensity of the light The present invention has been completed by finding that the relative position between the tool electrode and the non-conductive material can be controlled by driving the tool electrode so that the tool electrode and the non-conductive material are always kept in non-contact with each other.
【０００７】従って、本発明の目的は、使用する工具電
極の寿命が長く、非導電性材料に微細な加工を安定して
行うことができる放電加工装置を供給することにある。Therefore, an object of the present invention is to provide an electric discharge machine which has a long tool electrode life and can stably perform fine machining on a non-conductive material.
【０００８】[0008]
【課題を解決するための手段】すなわち、本発明は、電
解質溶液中で工具電極と対電極とを電気的に接続し、こ
の電解質溶液中に浸漬された非導電性材料に上記工具電
極の先端を接近させ、この工具電極周りに発生する放電
により上記非導電性材料を加工する放電加工装置であ
り、非導電性材料の加工時に放電によって発生する放電
プラズマ光から非導電性材料に起因して発光する特定の
波長の光の強度を選択的に検出する光検出手段と、その
光の強度に応じて工具電極と非導電性材料との間の相対
位置を制御しつつこの工具電極を駆動する駆動手段とを
具備する非導電性材料の放電加工装置である。That is, according to the present invention, a tool electrode and a counter electrode are electrically connected in an electrolyte solution, and the tip of the tool electrode is attached to a non-conductive material immersed in the electrolyte solution. Is an electric discharge machining device for machining the non-conductive material by the electric discharge generated around the tool electrode, which is caused by the non-conductive material from the discharge plasma light generated by the electric discharge when machining the non-conductive material. A light detecting means for selectively detecting the intensity of light of a specific wavelength to be emitted, and driving the tool electrode while controlling the relative position between the tool electrode and the non-conductive material according to the intensity of the light. An electric discharge machining apparatus for a non-conductive material, comprising a driving means.
【０００９】本発明で使用する電解質溶液は、工具電極
と対電極と非導電性材料とが浸漬され、工具電極と対電
極との間の通電を確保しながら工具電極と非導電性材料
との間に放電を生ぜしめることができるものであればよ
く、例えば水酸化ナトリウム、水酸化カリウム、硝酸カ
リウム、塩化ナトリウム、硝酸ナトリウム、塩化アンモ
ニウムが挙げられる。そして、光検出手段が検出する放
電プラズマ光は電解質溶液由来のものではなく非導電性
材料由来のものである必要があるので、非導電性材料特
有の元素を含まないものであるのかよく、例えば、非導
電性材料がアルミナである場合にはアルミニウム元素を
含まない電解質溶液、例えば水酸化ナトリウム水溶液等
が好適である。In the electrolyte solution used in the present invention, the tool electrode, the counter electrode, and the non-conductive material are immersed, and the tool electrode and the non-conductive material are separated from each other while ensuring the electric conduction between the tool electrode and the counter electrode. Any material can be used as long as it can generate a discharge in between, and examples thereof include sodium hydroxide, potassium hydroxide, potassium nitrate, sodium chloride, sodium nitrate, and ammonium chloride. Then, since the discharge plasma light detected by the light detecting means needs to be derived from the non-conductive material, not from the electrolyte solution, it may be one that does not contain an element specific to the non-conductive material, for example, When the non-conductive material is alumina, an electrolyte solution containing no aluminum element, such as an aqueous solution of sodium hydroxide, is suitable.
【００１０】電解質溶液に浸漬される工具電極及び対電
極は、放電に必要な電圧を印加するための電源を介して
接続され、電解質溶液中で腐食しにくいものを使用す
る。更に、工具電極は、駆動手段によって非導電性材料
の加工したい位置近傍にその先端を配設され、その表面
の泡を介して電解質溶液との間で放電を行うことになる
ので、その先端の形状と大きさは、非導電性材料に施し
たい加工溝の形状でその大きさより少し小さい大きさ、
例えば加工溝の穴径を０．４ｍｍにするには工具電極の
直径を０．３ｍｍに形成する。The tool electrode and the counter electrode immersed in the electrolyte solution are connected through a power source for applying a voltage required for discharge, and those which are not easily corroded in the electrolyte solution are used. Further, the tip of the tool electrode is disposed in the vicinity of the position where the non-conductive material is desired to be processed by the driving means, and discharge is performed between the tool electrode and the electrolytic solution through the bubbles on the surface of the tool electrode. The shape and size is the shape of the processed groove that you want to give to the non-conductive material, which is a little smaller than that size,
For example, to make the hole diameter of the processing groove 0.4 mm, the diameter of the tool electrode is 0.3 mm.
【００１１】非導電性材料は、放電加工された時にプラ
スマ光を発するものであるならば何でもよく、例えばア
ルミナ等のセラミック材料が挙げられる。The non-conductive material may be any material as long as it emits plasma light when it is electric discharge machined, and examples thereof include ceramic materials such as alumina.
【００１２】上記のように構成された放電加工装置は、
工具電極と電解質溶液との間に放電を起こし、その放電
に伴って生じるエネルギーにより非導電性材料を溶融し
たり熱化学的に除去したりする。また、工具電極におい
て放電が行われているときにその周辺に存在する元素は
励起されそれに特有な波長の光を放つので、加工が行わ
れていない場合には、電解質溶液中で電離しているイオ
ンの放電プラズマ光が発せられ、加工が行われている場
合には、それらに加えて溶融等された非導電性材料の金
属元素の放電プラズマ光が発せられる。それ故、加工が
行われていない場合には、光検出手段が検出する放電プ
ラズマ光はなく、加工が行われている場合には、光検出
手段は放電プラズマ光を検出する。そして、非導電性材
料の加工量が大きいほど、それだけ加工により削りとら
れて工具電極近傍に分布する非導電性材料の金属元素量
が増えるので、検出される放電プラズマ光は強くなる。The electric discharge machine configured as described above is
An electric discharge is generated between the tool electrode and the electrolyte solution, and the energy generated by the electric discharge melts or non-thermochemically removes the non-conductive material. In addition, since the elements existing in the periphery of the tool electrode when excited are excited and emit light of a wavelength peculiar thereto, when no machining is performed, they are ionized in the electrolyte solution. When ion discharge plasma light is emitted and processing is performed, discharge plasma light of a metal element of a non-conductive material that is melted or the like is emitted in addition to them. Therefore, when the processing is not performed, there is no discharge plasma light detected by the light detection means, and when the processing is performed, the light detection means detects the discharge plasma light. Then, the larger the processing amount of the non-conductive material is, the more the metal element amount of the non-conductive material that is scraped off by the processing and distributed in the vicinity of the tool electrode is increased, so that the detected discharge plasma light becomes stronger.
【００１３】光検出手段は、非導電性材料に起因するプ
ラズマ光の強度を測定しその結果を出力するものであ
り、例えば、工具電極近傍の放電プラズマ光をサンプリ
ングする光ファイバーと、それが接続される光検出部材
とで構成される。光ファイバーは、非導電性材料に起因
するプラズマ光を伝送することができればよく、例え
ば、非導電性材料にアルミナを使用したときには、アル
ミニウムのプラズマ光波長は約３９６ｎｍなので、透過
する光の帯域が１９０ｎｍ〜１０００ｎｍである石英性
の光ファイバーを使用することができる。光検出部材
は、光ファイバーにより伝送された放電プラズマ光を波
長ごとに分光し、そこから非導電性材料に起因するプラ
ズマ光の強度を測定し、更に、その結果を出力するため
に設けられ、例えば、回折格子、プリズム、光学フィル
ター等で放電プラズマ光を波長ごとに分光し、非導電性
材料に起因するプラズマ光を測定できる位置に配設され
た光増倍管、光電池、光電セル、光電管等でその光の強
度を測定し、そして、それをデジタル式電流計でデジタ
ル信号に変換したりすることで実現できる。The light detecting means measures the intensity of the plasma light due to the non-conductive material and outputs the result. For example, an optical fiber for sampling the discharge plasma light in the vicinity of the tool electrode is connected to the optical fiber. And a photo-detecting member. The optical fiber only needs to be able to transmit the plasma light originating from the non-conductive material. For example, when alumina is used as the non-conductive material, the plasma light wavelength of aluminum is about 396 nm, so that the band of transmitted light is 190 nm. Quartz optical fibers that are ~ 1000 nm can be used. The light detection member is provided to disperse the discharge plasma light transmitted by the optical fiber for each wavelength, measure the intensity of the plasma light caused by the non-conductive material therefrom, and further to output the result, for example, , A photomultiplier tube, a photocell, a phototube, etc. arranged at a position where the discharge plasma light is spectrally separated by wavelength with a diffraction grating, a prism, an optical filter, etc., and plasma light caused by a non-conductive material can be measured. It can be realized by measuring the intensity of the light with, and converting it into a digital signal with a digital ammeter.
【００１４】駆動手段は、工具電極と非導電性材料との
間の間隔を放電加工できる間隔に維持するために、光検
出手段からの上記出力に応じてそれらの相対位置を制御
しつつ工具電極を駆動するものであり、例えば、工具電
極の移動量を決める制御部材と、その移動量に応じて実
際に工具電極を駆動する駆動部材とで構成できる。制御
部材は、上記の光検出手段からの出力の他に非導電性材
料の加工情報等を基に工具電極と非導電性材料との間の
相対位置を制御するために工具電極の移動量を決めるも
のであり、例えば、バリスタとリレースイッチ等からな
る回路部材やパソコン等を使用し、光強度が弱く更に加
工を続ける場合には工具電極を非導電性材料側に送るよ
うに指示し、光強度が弱くまた加工を必要としない場合
には工具電極を非導電性材料から遠ざけるように指示
し、光強度が強い場合にはその位置に工具電極を保持す
るように指示することで工具電極の制御を行う。駆動部
材は、制御部材からの情報に応じて実際に工具電極を駆
動してその位置を決めるものであり、工具電極の位置を
決めるために駆動できる最小の駆動量が非導電性材料の
最小加工精度に関係するので、要求される最小加工精度
に応じて適当な位置決めができるものを選ぶ。The driving means controls the relative positions of the tool electrode and the non-conductive material in accordance with the output from the light detecting means while maintaining the distance between the tool electrode and the non-conductive material at a distance at which the electric discharge machining can be performed. For example, and can be configured by a control member that determines the movement amount of the tool electrode and a drive member that actually drives the tool electrode according to the movement amount. The control member controls the movement amount of the tool electrode in order to control the relative position between the tool electrode and the non-conductive material based on the processing information of the non-conductive material in addition to the output from the light detection means. For example, if a circuit member consisting of a varistor and a relay switch, a personal computer, etc. is used and the light intensity is weak and further processing is instructed, it is instructed to send the tool electrode to the non-conductive material side. When the intensity is weak and no machining is required, the tool electrode is instructed to move away from the non-conductive material, and when the light intensity is high, the tool electrode is held at that position by instructing the tool electrode to move. Take control. The drive member actually drives the tool electrode according to the information from the control member to determine its position, and the minimum drive amount that can be driven to determine the position of the tool electrode is the minimum machining of non-conductive material. Since it is related to accuracy, select one that can be positioned appropriately according to the required minimum processing accuracy.
【００１５】[0015]
【作用】本発明においては、放電によって発生する放電
プラズマ光から非導電性材料に起因して発光する特定の
波長の光の強度を選択的に検出し、その光の強度に応じ
て工具電極と非導電性材料との間の相対位置を制御しつ
つ工具電極を駆動することで、工具電極と被加工物との
接触を防ぎながら工具電極と導電性材料との間の相対位
置を制御し加工を行うことができる。In the present invention, the intensity of the light of a specific wavelength emitted due to the non-conductive material is selectively detected from the discharge plasma light generated by the discharge, and the tool electrode and the tool electrode are detected according to the intensity of the light. By driving the tool electrode while controlling the relative position between the non-conductive material and the tool electrode, the relative position between the tool electrode and the conductive material is controlled and processed while preventing contact between the tool electrode and the workpiece. It can be performed.
【００１６】[0016]
【実施例】以下、添付図面を参照しながら本発明の実施
例を説明する。Embodiments of the present invention will be described below with reference to the accompanying drawings.
【００１７】放電加工装置は、図１に示すように、ロジ
ウム１３ｗｔ％を含有する白金製で直径０．２ｍｍであ
る工具電極３と、白金製で大きさが１×１．５×０．１
ｍｍである板状の対電極４と、それらを接続する交流
（５０Ｈｚ）の交流電源６と、水酸化ナトリウム２ｍｏ
ｌ／ｄｍ3を含む電解質溶液５を入れたテフロン（商品
名）製の加工槽１と、工具電極３の最小送り量が１μｍ
である駆動手段８と、放電プラズマ光から非導電性材料
２に起因する発光の量を選択的に検出する光検出手段７
とで構成した。そして、工具電極３と対電極４とは厚さ
０．６３５ｍｍの９６％アルミナ製の板状の非導電性材
料２と共に電解質溶液５中に浸し、工具電極３と非導電
性材料２とは１ｍｍの間隔を開けて対向配置した。な
お、非導電性材料２はその上面が液面から２ｍｍの深さ
となるように配置した。As shown in FIG. 1, the electric discharge machine comprises a tool electrode 3 made of platinum containing 13 wt% of rhodium and having a diameter of 0.2 mm, and a size made of platinum of 1 × 1.5 × 0.1.
mm plate-shaped counter electrode 4, an AC (50 Hz) AC power source 6 connecting them, and sodium hydroxide 2 mo
The minimum feed amount of the processing electrode 1 made of Teflon (trade name) containing the electrolyte solution 5 containing 1 / dm 3 and the tool electrode 3 is 1 μm.
Drive means 8 and light detecting means 7 for selectively detecting the amount of light emission caused by the non-conductive material 2 from the discharge plasma light.
It consisted of and. Then, the tool electrode 3 and the counter electrode 4 are immersed in an electrolyte solution 5 together with a plate-shaped non-conductive material 2 made of 96% alumina having a thickness of 0.635 mm, and the tool electrode 3 and the non-conductive material 2 are 1 mm. Are placed facing each other with a space therebetween. The non-conductive material 2 was arranged so that the upper surface thereof had a depth of 2 mm from the liquid surface.
【００１８】更に、光検出手段７は、放電による放電プ
ラズマ光を分光部材７ａまで搬送する石英製の光ファイ
バー７ｄと、放電プラズマ光からアルミニウムの波長の
プラズマ光を分光して抽出する回折格子７ａと、分光抽
出されたプラズマ光の強度を検出する光増倍管７ｂと、
検出したプラズマ光の強度をデジタル信号に変換しそれ
をＧＰ−ＩＢ通信で出力するデジタル式電流計光強度信
号出力部材７ｃとで構成した。なお、光増倍管７ｂは回
折格子７ａがアルミニウムの波長３９６ｎｍのプラズマ
光を分光する方向に配置した。Further, the light detecting means 7 includes an optical fiber 7d made of quartz for conveying the discharge plasma light due to the discharge to the spectroscopic member 7a, and a diffraction grating 7a for separating and extracting the plasma light having the wavelength of aluminum from the discharge plasma light. A photomultiplier tube 7b for detecting the intensity of spectrally extracted plasma light,
It is composed of a digital ammeter light intensity signal output member 7c which converts the detected intensity of the plasma light into a digital signal and outputs it by GP-IB communication. The photomultiplier tube 7b was arranged in the direction in which the diffraction grating 7a disperses aluminum plasma light having a wavelength of 396 nm.
【００１９】駆動手段８は、光検出手段７の上記ＧＰ−
ＩＢ通信出力信号等に応じて工具電極３と非導電性材料
２との間の相対位置を制御する信号を出力するパソコン
８ｂと、その制御信号によって工具電極３と非導電性材
料２との間の相対位置を制御しつつ工具電極３を駆動す
る駆動部材８ａとで構成した。The driving means 8 is the GP-of the light detecting means 7.
A personal computer 8b that outputs a signal for controlling the relative position between the tool electrode 3 and the non-conductive material 2 in accordance with an IB communication output signal and the like, and between the tool electrode 3 and the non-conductive material 2 by the control signal. And a drive member 8a for driving the tool electrode 3 while controlling the relative position thereof.
【００２０】次に、アルミナ２に穴を開ける場合につい
て、図２に示すパソコン８ｂによる制御フローチャート
を適宜参照しながら説明する。Next, the case of making a hole in the alumina 2 will be described with reference to the control flow chart by the personal computer 8b shown in FIG.
【００２１】加工を始める前に、工具電極３が加工中に
アルミナ２に接触しないように、放電に伴うプラズマ光
の最大値（以下、しきい電流値とよぶ）をパソコン８ｂ
に設定するようにした。ここでは、工具電極３と対電極
４との間に７０Ｖｒｍｓの電圧を印加して工具電極３の
先端に放電を起こし、そのときに光検出手段７で放電プ
ラズマ光の強度の２ｍｓ毎の平均値を１００回出力し、
その中の最大値を１０倍した値をしきい電流値としてパ
ソコン８ｂに設定した。次に、光検出手段７で放電プラ
ズマ光の強度の２ｍｓ毎の平均値（以下、平均光電流値
とよぶ）を測定しながら加工を行った。このとき、平均
光電流値としきい電流値とを比較し、しきい電流値の方
が大きい場合には、駆動部材８ａを駆動して工具電極３
を１μｍアルミナ２側に移動し、しきい光電流の方が小
さい場合は、平均光電流値がしきい電流値以下に減少す
るまで駆動部材８ａを停止した。そして、工具電極３の
全移動量が３ｍｍとなった時点で加工を終了した。Before starting the machining, the maximum value of the plasma light (hereinafter referred to as the threshold current value) accompanying the discharge is set on the personal computer 8b so that the tool electrode 3 does not come into contact with the alumina 2 during the machining.
I set it to. Here, a voltage of 70 Vrms is applied between the tool electrode 3 and the counter electrode 4 to cause discharge at the tip of the tool electrode 3, and at that time, the average value of the intensity of the discharge plasma light by the light detection means 7 every 2 ms. Is output 100 times,
The value obtained by multiplying the maximum value by 10 times was set as the threshold current value in the personal computer 8b. Next, processing was performed while measuring the average value of the intensity of the discharge plasma light every 2 ms (hereinafter referred to as the average photocurrent value) by the light detection means 7. At this time, the average photocurrent value and the threshold current value are compared, and when the threshold current value is larger, the driving member 8a is driven to drive the tool electrode 3
Was moved to the 1 μm alumina 2 side, and when the threshold photocurrent was smaller, the driving member 8a was stopped until the average photocurrent value decreased below the threshold current value. Then, when the total movement amount of the tool electrode 3 became 3 mm, the processing was finished.
【００２２】このようにしてアルミナ２を加工したとこ
ろ、工具電極３とアルミナ２とは接触することがなく工
具電極３には変形が生じなかった。また、形成された穴
は所望の微細な形状となっていた。When the alumina 2 was processed in this way, the tool electrode 3 and the alumina 2 did not come into contact with each other and the tool electrode 3 was not deformed. Moreover, the formed hole had a desired fine shape.
【００２３】[0023]
【発明の効果】本発明の非導電性材料を加工する放電加
工装置によれば、工具電極は非導電性材料と非接触に保
ってそれらの相対位置を制御することができるので、工
具電極はその先端を細くしても変形や破損が生じないの
で長く使用でき、また、微細な加工を安定して行うこと
ができる。According to the electric discharge machine for machining a non-conductive material of the present invention, the tool electrode can be kept in non-contact with the non-conductive material and the relative position thereof can be controlled. Even if its tip is thinned, it is not deformed or damaged, so that it can be used for a long time, and fine processing can be stably performed.
【図１】 本発明の放電加工装置に係る実施例の構成図
を示す。FIG. 1 shows a block diagram of an embodiment of an electric discharge machine of the present invention.
【図２】 図１に示した制御部材８ｂのフローチャート
を示す。2 shows a flow chart of the control member 8b shown in FIG.
【図３】 従来の放電加工装置の構成図を示す。FIG. 3 shows a configuration diagram of a conventional electric discharge machine.
５：電解質溶液、３：工具電極、４：対電極、２：非導
電性材料、７：光検出手段、８：駆動手段。5: electrolyte solution, 3: tool electrode, 4: counter electrode, 2: non-conductive material, 7: light detecting means, 8: driving means.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 根橋 紀之 神奈川県海老名市本郷2274番地、富士ゼロ ックス株式会社内 (72)発明者 安藤 力 神奈川県海老名市本郷2274番地、富士ゼロ ックス株式会社内 (72)発明者 川俣 進一 神奈川県海老名市本郷2274番地、富士ゼロ ックス株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Noriyuki Nebashi 2274 Hongo, Ebina City, Kanagawa Prefecture, Fuji Xerox Co., Ltd. (72) Inventor Riki Ando 2274, Hongo Ebina City, Kanagawa Prefecture, Fuji Xerox Co., Ltd. 72) Inventor Shinichi Kawamata, Fuji Xerox Co., Ltd., 2274 Hongo, Ebina City, Kanagawa Prefecture
Claims (1)
気的に接続し、この電解質溶液中に浸漬された非導電性
材料に上記工具電極の先端を接近させ、この工具電極周
りに発生する放電により上記非導電性材料を加工する放
電加工装置であり、非導電性材料の加工時に放電によっ
て発生する放電プラズマ光から非導電性材料に起因して
発光する特定の波長の光の強度を選択的に検出する光検
出手段と、その光の強度に応じて工具電極と非導電性材
料との間の相対位置を制御しつつこの工具電極を駆動す
る駆動手段とを具備することを特徴とする非導電性材料
の放電加工装置。1. A tool electrode and a counter electrode are electrically connected in an electrolyte solution, the tip of the tool electrode is brought close to a non-conductive material immersed in the electrolyte solution, and generated around the tool electrode. Is an electric discharge machining apparatus for machining the non-conductive material by electric discharge, and the intensity of light of a specific wavelength emitted from the non-conductive material from the discharge plasma light generated by electric discharge during machining of the non-conductive material And a driving means for driving the tool electrode while controlling the relative position between the tool electrode and the non-conductive material according to the intensity of the light. EDM equipment for non-conductive materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22865993A JPH0780724A (en) | 1993-09-14 | 1993-09-14 | Electric discharge machining device for nonconductive material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22865993A JPH0780724A (en) | 1993-09-14 | 1993-09-14 | Electric discharge machining device for nonconductive material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0780724A true JPH0780724A (en) | 1995-03-28 |
Family
ID=16879804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22865993A Pending JPH0780724A (en) | 1993-09-14 | 1993-09-14 | Electric discharge machining device for nonconductive material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0780724A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008096454A1 (en) * | 2007-02-09 | 2008-08-14 | Toyohashi University Of Technology | Pt rh based plasma generation electrode, plasma generation apparatus and plasma processing system |
| JPWO2008096881A1 (en) * | 2007-02-09 | 2010-05-27 | 国立大学法人豊橋技術科学大学 | Pt / Rh electrode for plasma generation, plasma generation apparatus, and plasma processing apparatus |
-
1993
- 1993-09-14 JP JP22865993A patent/JPH0780724A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008096454A1 (en) * | 2007-02-09 | 2008-08-14 | Toyohashi University Of Technology | Pt rh based plasma generation electrode, plasma generation apparatus and plasma processing system |
| WO2008096881A1 (en) * | 2007-02-09 | 2008-08-14 | Toyohashi University Of Technology | Plasma producing pt/rh electrode, plasma producing apparatus, and plasma processing apparatus |
| JPWO2008096881A1 (en) * | 2007-02-09 | 2010-05-27 | 国立大学法人豊橋技術科学大学 | Pt / Rh electrode for plasma generation, plasma generation apparatus, and plasma processing apparatus |
| JP5368114B2 (en) * | 2007-02-09 | 2013-12-18 | 国立大学法人豊橋技術科学大学 | Pt / Rh electrode for plasma generation, plasma generation apparatus, and plasma processing apparatus |
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