JPH07785Y2 - Piezoelectric valve - Google Patents
Piezoelectric valveInfo
- Publication number
- JPH07785Y2 JPH07785Y2 JP1988112937U JP11293788U JPH07785Y2 JP H07785 Y2 JPH07785 Y2 JP H07785Y2 JP 1988112937 U JP1988112937 U JP 1988112937U JP 11293788 U JP11293788 U JP 11293788U JP H07785 Y2 JPH07785 Y2 JP H07785Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- support plate
- drive member
- valve body
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Description
【考案の詳細な説明】 ［産業上の利用分野］ 本考案は、電圧の印加により歪みを生じる圧電素子を利
用して弁座を開閉する圧電バルブに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a piezoelectric valve that opens and closes a valve seat by using a piezoelectric element that is distorted by application of a voltage.
［従来の技術］ 電圧の印加により歪みを生じる圧電素子を利用して弁座
を開閉するようにした圧電バルブは、例えば実開昭61-1
52872号公報によって既に知られている。[Prior Art] A piezoelectric valve that opens and closes a valve seat by using a piezoelectric element that is distorted by the application of a voltage is disclosed in, for example, Shokai Sho 61-1.
It is already known from the 52872 publication.
しかしながら、この種の圧電バルブは、一般に、プレー
ト状の支持板に上記圧電素子を取り付けると共に、弁座
を開閉する弁体を取付け、電圧の印加により上記支持板
を撓ませて弁座を開閉するものであるため、幅のある支
持板が邪魔になって流体の円滑な流れが阻害されたり、
逆に、支持板が撓む際に流体の流れによる影響を受け、
弁座の開閉が速やかに行われにくい等の欠点があった。However, in this type of piezoelectric valve, generally, the piezoelectric element is attached to a plate-like support plate, a valve body for opening and closing a valve seat is attached, and the support plate is bent by applying a voltage to open and close the valve seat. Since it is a thing, the wide support plate interferes with the smooth flow of the fluid,
Conversely, when the support plate bends, it is affected by the flow of fluid,
There was a defect that it was difficult to open and close the valve seat quickly.
［考案が解決しようとする課題］ 本考案が解決しようとする課題は、圧電素子を利用して
弁座を開閉する圧電バルブにおいて、上記幅広の支持板
が流体の流れに及ぼす影響を排除して流体の円滑な流れ
を確保すると共に、該支持板が流体の流れにより受ける
影響を少なくして弁座の開閉を円滑ならしめることにあ
る。[Problem to be Solved by the Invention] A problem to be solved by the present invention is to eliminate the influence of the wide support plate on the fluid flow in a piezoelectric valve that opens and closes a valve seat by using a piezoelectric element. The purpose is to ensure a smooth flow of fluid and reduce the influence of the flow of fluid on the support plate so that the valve seat can be opened and closed smoothly.
［課題を解決するための手段］ 上記課題を解決するために、本考案によれば、相対向す
る弁座を備えた弁室内に、電圧の印加により撓んでこれ
らの弁座を開閉する駆動部材を、端部を定位置に保持さ
せた状態で上記弁座間に位置するように配設してなる圧
電バルブにおいて、上記駆動部材が、可撓性ある支持板
と、該支持板の両面に貼着されて電圧の印加により歪み
を生じる圧電素子と、上記支持板に取付けられた弁座開
閉のための弁体とからなっていて、上記支持板における
弁体の回りの部分に、流体を駆動部材の表裏面側に流通
させるための複数の通孔が、上記弁体に対して略対称に
開設されたものが提供される。[Means for Solving the Problems] In order to solve the above problems, according to the present invention, a drive member that is bent by the application of a voltage to open and close these valve seats in a valve chamber having valve seats facing each other. In a piezoelectric valve in which the ends are held in a fixed position so as to be positioned between the valve seats, the drive member is attached to a flexible support plate and both surfaces of the support plate. It is composed of a piezoelectric element that is attached to generate distortion when a voltage is applied, and a valve body attached to the support plate for opening and closing a valve seat, and drives fluid to a portion of the support plate around the valve body. There is provided a member having a plurality of through holes for allowing the members to flow to the front and back sides of the member, the holes being substantially symmetrical with respect to the valve body.
［作用］ 電圧の印加により駆動部材が撓むと、弁体が弁座を開放
して圧力流体が弁室を流れる。[Operation] When the drive member bends due to the application of voltage, the valve body opens the valve seat and the pressure fluid flows in the valve chamber.
この場合、圧力流体が、支持板における弁体の回りに略
対称に開設した複数の通孔を通じて駆動部材の表裏面側
に自由に流れることにより、弁室内における流体の流れ
がスムーズになり、また、弁体周囲の流体圧が平均化さ
れると共に、駆動部材が撓む際に流体による影響を受け
にくくなるため、弁体の変移が円滑かつ迅速となって弁
座の開閉が速やかに行われる。In this case, the pressure fluid freely flows to the front and back sides of the drive member through a plurality of through holes that are opened substantially symmetrically around the valve body in the support plate, so that the fluid flow in the valve chamber becomes smooth, and , The fluid pressure around the valve body is averaged, and the influence of the fluid is less likely to occur when the drive member bends, so that the valve body moves smoothly and quickly, and the valve seat opens and closes quickly. .
また、複数の通孔の形成によって支持板における弁体取
付部分の弾性力が大きくなるので、弁体による弁座のシ
ール性が向上し、かつ弁体の摩耗が小さい。In addition, since the elastic force of the valve body mounting portion of the support plate is increased by forming the plurality of through holes, the sealability of the valve seat by the valve body is improved and the wear of the valve body is small.
さらに、上記通孔が圧電素子に直接設けられていないた
め、該圧電素子の変形が均一化されて寿命が長く、かつ
加工及び絶縁劣化の防止が容易である。Further, since the through hole is not directly provided in the piezoelectric element, the deformation of the piezoelectric element is made uniform, the life is long, and it is easy to prevent working and insulation deterioration.
［実施例］ 第１図及び第２図は本考案の第１実施例を示し、この圧
電バルブは、弁本体１内に弁座11,12を開閉するための
駆動部材２を備えている。[Embodiment] FIGS. 1 and 2 show a first embodiment of the present invention. This piezoelectric valve has a drive member 2 for opening and closing valve seats 11 and 12 in a valve body 1.
上記弁本体１は、隔壁４によって２個の凹室を形成した
本体部材1a,1bを、適宜の手段で接合一体化し、これら
の凹室により弁室５と給電室６を形成している。In the valve body 1, the body members 1a and 1b having two concave chambers formed by the partition wall 4 are joined and integrated by an appropriate means, and the concave chambers form the valve chamber 5 and the power feeding chamber 6.
弁本体１は、弁室５に通ずる入力ポート７、出力ポート
８及び排出ポート９を備え、入力ポート７に螺着した弁
座体10の先端と排出ポート９の先端とに、それぞれ弁室
５内に開口する弁座11及び12を相対向するように形設
し、弁座体10を本体部材1aに対して進退できることによ
って、弁座11と12との間の距離を調整することができる
ようにしている。The valve body 1 has an input port 7, an output port 8 and a discharge port 9 which communicate with the valve chamber 5, and the valve chamber 5 is provided at the tip of the valve seat body 10 and the tip of the discharge port 9 which are screwed to the input port 7, respectively. By forming the valve seats 11 and 12 opening inward so as to face each other and allowing the valve seat body 10 to move back and forth with respect to the main body member 1a, the distance between the valve seats 11 and 12 can be adjusted. I am trying.
本体部材1a,1bにおける隔壁4,4間には、板状の駆動部材
２の基端近くが気密に嵌着され、弁室５を横切って延び
る該駆動部材２の先端部の、上記弁座11と12との間に位
置する部分に、これらの弁座11及び12を開閉する弁体14
が固着されている。Between the partition walls 4 and 4 of the body members 1a and 1b, the plate-like drive member 2 is hermetically fitted near the base end thereof, and the valve seat of the tip end of the drive member 2 extending across the valve chamber 5 is formed. A valve element 14 for opening and closing these valve seats 11 and 12 is provided in a portion located between 11 and 12.
Is stuck.
上記駆動部材２は、電極を構成する可撓性の支持板15の
両面に、電圧の印加極性によって互いに伸縮する圧電素
子16,16を貼合わせることにより構成され、支持板15に
おける弁体14の回りの部分には、弁室５内の圧力流体を
通過させるための複数の通孔17が、弁体14に対して略対
称に開設されており、所定の極性の電圧を印加すると一
方向に撓み、これと逆極性の電圧を印加するか或いは電
圧の印加を解除すると上記と反対方向に撓むものであ
る。The drive member 2 is configured by bonding piezoelectric elements 16 and 16 that expand and contract with each other according to the applied polarity of a voltage to both surfaces of a flexible support plate 15 that constitutes an electrode. A plurality of through holes 17 for allowing the pressure fluid in the valve chamber 5 to pass therethrough are formed in the surrounding portion in a substantially symmetrical manner with respect to the valve body 14, and when a voltage of a predetermined polarity is applied, it is unidirectional. Bending, when a voltage of the opposite polarity to this is applied or the application of the voltage is released, it bends in the opposite direction.
第１図中の符号18は、駆動部材２に電圧を印加するため
の給電線である。Reference numeral 18 in FIG. 1 is a power supply line for applying a voltage to the driving member 2.
上記第１実施例は、弁体14が弁座11を閉鎖している第１
図の状態において、駆動部材２に所定の極性の電圧を印
加すると、該駆動部材２が図における上方に撓んで弁座
11を開放するとともに弁座12を閉鎖するので、入力ポー
ト７の圧力流体が弁室５を通って出力ポート８に流出す
る。また、上記電圧の印加を解除するか、或いは上記と
逆極性の電圧を印加すると、弁体14が第１図の状態に復
帰して、出力ポート８の流体が弁室５を通って排出ポー
ト９に流出する。In the first embodiment, the valve body 14 closes the valve seat 11.
In the state of the drawing, when a voltage of a predetermined polarity is applied to the driving member 2, the driving member 2 bends upward in the drawing and the valve seat
Since 11 is opened and the valve seat 12 is closed, the pressure fluid in the input port 7 flows out to the output port 8 through the valve chamber 5. When the above voltage is released or a voltage of the opposite polarity is applied, the valve body 14 returns to the state shown in FIG. 1 and the fluid in the output port 8 passes through the valve chamber 5 and the discharge port. Runs out to 9.
この場合、支持板15における弁体14の回りの部分に複数
の通孔17が弁体14に対して略対称に開設され、これらの
通孔17を通じて流体が駆動部材２の表裏方向に自由に流
通できるため、弁室５内の流体の流れがスムーズにな
り、しかも、弁体14の周囲の流体圧が平均化されると共
に、駆動部材２が撓む際に流体による影響を受けにくく
なるため、弁体14の変移が円滑かつ迅速となって弁座1
1,12の開閉動作が速やかに行われる。In this case, a plurality of through holes 17 are provided in a portion of the support plate 15 around the valve body 14 substantially symmetrically with respect to the valve body 14, and the fluid can freely flow through the through holes 17 in the front-back direction of the drive member 2. Since the fluid can be circulated, the flow of the fluid in the valve chamber 5 becomes smooth, the fluid pressure around the valve body 14 is averaged, and the fluid is less affected by the fluid when the drive member 2 is bent. The valve seat 14 can be smoothly and quickly moved to the valve seat 1
Opening and closing operations of 1 and 12 are performed promptly.
さらに、上記通孔17の形成により、支持板15の弁体14を
支持する部分の弾性力が大きくなるため、該弁体14によ
る弁座11,12のシール性が向上するとともに、弁体14の
摩耗が小さくなる。Furthermore, since the through hole 17 is formed, the elastic force of the portion of the support plate 15 that supports the valve element 14 is increased, so that the sealing performance of the valve seats 11 and 12 by the valve element 14 is improved and the valve element 14 is also improved. Wear is reduced.
第３図A,Bは、上記第１実施例における駆動部材２の変
形例を示すもので、この駆動部材２を構成する支持板15
a,15bには、その先端部に設けた弁体14を取り囲む位置
に、第２図とは別形状の通孔17a,17bが、弁体14に対し
て略対称に開設されている。FIGS. 3A and 3B show a modified example of the driving member 2 in the first embodiment, and the supporting plate 15 constituting the driving member 2 is shown.
Through holes 17a and 17b, which are different in shape from those of FIG. 2, are formed in the a and 15b at positions surrounding the valve body 14 provided at the distal ends thereof in a substantially symmetrical manner with respect to the valve body 14.
第４図及び第５図は、駆動部材22を両端支持とした本考
案の第２実施例を示し、この第２実施例における弁本体
21は、２個の隔壁4,4によって区画された弁室５と給電
室６とを備え、駆動部材22は、両端近くが隔壁4,4間に
気密に装着され、その中心部分に弁座11,12を開閉する
弁体14を有し、支持板15における弁体14の回りの部分
に、複数の通孔17が弁体14に対して略対称に開設されて
いる。FIGS. 4 and 5 show a second embodiment of the present invention in which the drive member 22 is supported at both ends, and the valve body in this second embodiment is shown.
The reference numeral 21 includes a valve chamber 5 and a power supply chamber 6 which are partitioned by two partition walls 4, 4, and the drive member 22 is hermetically mounted between the partition walls 4, 4 near both ends thereof, and has a valve seat at the center thereof. A valve body 14 for opening and closing 11, 12 is provided, and a plurality of through holes 17 are opened substantially symmetrically with respect to the valve body 14 in a portion of the support plate 15 around the valve body 14.
第２実施例の他の構成及び作用は第１実施例と同じであ
るから、図中主要な部分に同一の符号を付して、詳細な
説明は省略する。Since the other structure and operation of the second embodiment are the same as those of the first embodiment, the same reference numerals are given to the main parts in the drawing, and detailed description will be omitted.
第６図A,Bは、第２実施例における駆動部材22の変形例
を示すもので、この駆動部材22は、支持板15における弁
体14の回りの部分に、第５図とは別形状の通孔17a,17b
が、弁体14に対して略対称に開設されている。6A and 6B show a modified example of the drive member 22 in the second embodiment. The drive member 22 has a shape different from that shown in FIG. Through holes 17a, 17b
However, they are opened substantially symmetrically with respect to the valve body 14.
第７図及び第８図は、本考案の圧電バルブにおいて使用
される駆動部材25の異なる構成例を示すもので、この駆
動部材25は、弁室５内における露出部分の全表面が、通
孔17の孔壁をも含んで絶縁性シール部材26により被覆さ
れ、弁体27もこの絶縁性シール部材26で形成されてい
る。7 and 8 show different examples of the structure of the driving member 25 used in the piezoelectric valve of the present invention. In this driving member 25, the entire surface of the exposed portion in the valve chamber 5 has a through hole. The hole wall of 17 is also covered by the insulating seal member 26, and the valve body 27 is also formed of this insulating seal member 26.
上述した駆動部材25は、外表面が絶縁性シール部材26で
被覆されているので、圧力流体が導電性流体または水分
を含む気体である場合に好適に使用することができる。Since the outer surface of the driving member 25 described above is covered with the insulating seal member 26, it can be suitably used when the pressure fluid is a conductive fluid or a gas containing water.
なお、上述の各実施例において、入力ポート７と排出ポ
ート９を逆にすることもできる。In addition, in each of the above-described embodiments, the input port 7 and the discharge port 9 may be reversed.
［考案の効果］ 本考案の圧電バルブによれば、駆動部材を構成する支持
板の弁体と取り囲む位置に、複数の通孔を該弁体に対し
て略対称に開設したので、これらの通孔を通じて駆動部
材の表裏面側に流体が自由に流れることにより、弁室内
における流体の流れがスムーズになり、しかも、弁体周
囲の流体圧が平均化されると共に、駆動部材が撓む際に
流体による影響を受けにくくなるため、弁体の変移が円
滑かつ迅速となって弁座の開閉が速やかに行われる。[Advantages of the Invention] According to the piezoelectric valve of the present invention, a plurality of through holes are formed substantially symmetrically with respect to the valve body in the position surrounding the valve body of the support plate forming the drive member. By allowing the fluid to freely flow through the holes to the front and back sides of the drive member, the flow of the fluid in the valve chamber becomes smooth, and moreover, the fluid pressure around the valve body is averaged and when the drive member bends. Since it is less likely to be affected by the fluid, the valve body can be smoothly and quickly displaced, and the valve seat can be quickly opened and closed.
また、複数の通孔の形成によって支持板における弁体取
付部分の弾性力が大きくなるので、弁体におる弁座のシ
ール性が向上し、かつ該弁体の摩耗も小さくなる。In addition, since the elastic force of the valve body mounting portion of the support plate is increased by forming the plurality of through holes, the sealability of the valve seat in the valve body is improved and the wear of the valve body is reduced.
さらに、上記通孔を支持板に形成することにより、圧電
素子に直接設ける必要がないため、該圧電素子の変形を
均一化して寿命を長くすることができるばかりでなく、
その加工及び絶縁劣化の防止を容易に行うことができ
る。Furthermore, by forming the through hole in the support plate, it is not necessary to directly provide the piezoelectric element, so that not only the deformation of the piezoelectric element can be made uniform and the life can be extended, but also
The processing and the prevention of insulation deterioration can be easily performed.
第１図は本考案の第１実施例を示す縦断面図、第２図は
第１図に示す駆動部材の平面図、第３図A,Bは第１実施
例における駆動部材の変形例を示す要部平面図、第４図
は本考案の第２実施例を示す縦断面図、第５図は第４図
に示す駆動部材の平面図、第６図A,Bは第２実施例にお
ける駆動部材の変形例を示す要部平面図、第７図は本考
案の圧電バルブにおいて使用される駆動部材の異なる構
成例を示す平面図、第８図は第７図のＡ−Ａ断面図であ
る。 2,22,25……駆動部材、５……弁室 11,12……弁座、14,27……弁体 15,15a,15b……支持板、16……圧電素子 17,17a,17b……通孔FIG. 1 is a longitudinal sectional view showing a first embodiment of the present invention, FIG. 2 is a plan view of the drive member shown in FIG. 1, and FIGS. 3A and 3B are modified examples of the drive member in the first embodiment. FIG. 4 is a plan view of a main portion shown in FIG. 4, FIG. 4 is a longitudinal sectional view showing a second embodiment of the present invention, FIG. 5 is a plan view of a driving member shown in FIG. 4, and FIGS. FIG. 7 is a plan view showing a modified example of the drive member, FIG. 7 is a plan view showing a different configuration example of the drive member used in the piezoelectric valve of the present invention, and FIG. 8 is a sectional view taken along line AA of FIG. is there. 2,22,25 …… Drive member, 5 …… Valve chamber 11,12 …… Valve seat, 14,27 …… Valve body 15,15a, 15b …… Support plate, 16 …… Piezoelectric element 17,17a, 17b ...... Through hole
Claims (1)
印加により撓んでこれらの弁座を開閉する駆動部材を、
端部を定位置に保持させた状態で上記弁座間に位置する
ように配設してなる圧電バルブにおいて、 上記駆動部材が、可撓性ある支持板と、該支持板の両面
に貼着されて電圧の印加により歪みを生じる圧電素子
と、上記支持板に取付けられた弁座開閉のための弁体と
からなっていて、上記支持板における弁体の回りの部分
に、流体を駆動部材の表裏面側に流通させるための複数
の通孔が、上記弁体に対して略対称に開設されている、 ことを特徴とする圧電バルブ。1. A drive member, which bends when a voltage is applied and opens and closes these valve seats, in a valve chamber having valve seats facing each other.
In a piezoelectric valve arranged so as to be located between the valve seats with the end portions held in a fixed position, the drive member is attached to a flexible support plate and both surfaces of the support plate. A piezoelectric element that is distorted by the application of a voltage and a valve element for opening and closing the valve seat attached to the support plate, and the fluid is applied to the portion of the support plate around the valve element of the drive member. A piezoelectric valve, wherein a plurality of through-holes for circulating the front and back sides are opened substantially symmetrically with respect to the valve body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988112937U JPH07785Y2 (en) | 1988-08-29 | 1988-08-29 | Piezoelectric valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988112937U JPH07785Y2 (en) | 1988-08-29 | 1988-08-29 | Piezoelectric valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0233979U JPH0233979U (en) | 1990-03-05 |
| JPH07785Y2 true JPH07785Y2 (en) | 1995-01-11 |
Family
ID=31352332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988112937U Expired - Lifetime JPH07785Y2 (en) | 1988-08-29 | 1988-08-29 | Piezoelectric valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07785Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140333703A1 (en) * | 2013-05-10 | 2014-11-13 | Matthews Resources, Inc. | Cantilevered Micro-Valve and Inkjet Printer Using Said Valve |
| JP6937417B1 (en) * | 2020-10-07 | 2021-09-22 | 株式会社Taiyo | Fluid control valve |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60192178A (en) * | 1984-03-09 | 1985-09-30 | Hitachi Ltd | Flow control valve |
-
1988
- 1988-08-29 JP JP1988112937U patent/JPH07785Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0233979U (en) | 1990-03-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5785508A (en) | Pump with reduced clamping pressure effect on flap valve | |
| HU223020B1 (en) | Piezovalve | |
| KR960031858A (en) | Diaphragm valve | |
| JPH0746019B2 (en) | Hermetic gasket | |
| WO2008029699A1 (en) | Sealing structure for fluid pressure device | |
| JPH07785Y2 (en) | Piezoelectric valve | |
| US20070065310A1 (en) | Diaphragm pump | |
| KR100255133B1 (en) | Check valve having bilateral way | |
| JPH0220874B2 (en) | ||
| JPH0247335Y2 (en) | ||
| JPH0325465Y2 (en) | ||
| JPH031665Y2 (en) | ||
| KR20150000765A (en) | Structure for preventing leakage cutting oil of machine tool | |
| KR20220027962A (en) | Piezoelectric valve and method for manufacturing the same | |
| JPS6221180Y2 (en) | ||
| JPH0276273U (en) | ||
| JPH0331891Y2 (en) | ||
| JPS62171570A (en) | Closing valve | |
| JPH0624615Y2 (en) | Poppet type directional valve | |
| US11629793B2 (en) | Valve | |
| JPH0452539Y2 (en) | ||
| JPH0224963Y2 (en) | ||
| JPH0637249Y2 (en) | Direction switching valve | |
| JPH0356342B2 (en) | ||
| JPH0313658Y2 (en) |