JPH0770599A - Dewatering solvent containing fluorinated alcohol - Google Patents
Dewatering solvent containing fluorinated alcoholInfo
- Publication number
- JPH0770599A JPH0770599A JP13259793A JP13259793A JPH0770599A JP H0770599 A JPH0770599 A JP H0770599A JP 13259793 A JP13259793 A JP 13259793A JP 13259793 A JP13259793 A JP 13259793A JP H0770599 A JPH0770599 A JP H0770599A
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- dichloro
- fluorinated alcohol
- draining
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Eyeglasses (AREA)
- Extraction Or Liquid Replacement (AREA)
- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、精密機器、光学機器、
電子機器等の洗浄に使用する水切り溶剤に関する。BACKGROUND OF THE INVENTION The present invention relates to precision instruments, optical instruments,
The present invention relates to a draining solvent used for cleaning electronic devices and the like.
【０００２】[0002]
【従来の技術】光学レンズ、電子部品などの精密機器等
は水で洗浄した後、付着した水分を除去する必要がある
（以下、この操作を「水切り」という。）。例えば、こ
の水切り方法の１つに、被洗浄物を有機溶剤に浸漬し水
との濡れ性または比重差を利用して、付着水を物品表面
より剥離し、浮上させ分離する方法がある。この方法で
は有機溶剤として通常１，１，２−トリフルオロ−１，
２，２−トリクロロエタン（以下、「ＣＦＣ−１１３」
という。）や１，１，１−トリクロロエタン等のハロゲ
ン化炭化水素が使用されるが、この様な溶剤単独では水
の脱離効果が不十分なため各種の界面活性剤を添加して
使用されることが多い。しかしながら、界面活性剤は不
揮発性であるために水切り後物品表面に一部残存すると
いう難点がある。2. Description of the Prior Art Precision equipment such as optical lenses and electronic parts must be washed with water and then removed from adhering water (hereinafter, this operation is referred to as "draining"). For example, as one of the water draining methods, there is a method of immersing an object to be cleaned in an organic solvent and utilizing the wettability with water or the difference in specific gravity to separate the adhered water from the surface of the article and float it to separate it. In this method, 1,1,2-trifluoro-1, usually as an organic solvent,
2,2-Trichloroethane (hereinafter, "CFC-113")
Say. ) And 1,1,1-trichloroethane and other halogenated hydrocarbons are used. However, such a solvent alone is insufficient in the desorption effect of water, so various surfactants should be added before use. There are many. However, since the surfactant is non-volatile, it has a drawback that it partially remains on the surface of the article after draining.
【０００３】また、ハロゲン化炭化水素に、エチルアル
コールや２，２，２−トリフルオロエタノールを添加し
たものも提案されているが、これらはいずれも可燃性で
あり、界面活性剤を添加したものに較べ、水切り能力が
低くこれを実用化するには種々の問題があった。Further, it has been proposed that ethyl alcohol or 2,2,2-trifluoroethanol is added to a halogenated hydrocarbon, but all of these are flammable and a surfactant is added. Compared with the above, the drainage capacity was low and there were various problems in putting it to practical use.
【０００４】さらに、不燃性のフッ素化アルコールであ
る２，２，３，３，３−ペンタフルオロプロパノールを
単独で水切り剤として用いる方法も提案されているが、
沸点が高く乾燥操作に問題があった。Further, a method of using 2,2,3,3,3-pentafluoropropanol, which is a non-flammable fluorinated alcohol, alone as a draining agent has been proposed.
The boiling point was high and there was a problem in the drying operation.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、界面活性剤
などの非揮発性物質による被洗浄物の汚染や、被洗浄物
の乾燥に時間がかかるという問題のない水切り溶剤を提
供することを目的とする。DISCLOSURE OF THE INVENTION The present invention provides a draining solvent which is free from problems such as contamination of an object to be cleaned with a non-volatile substance such as a surfactant, and drying of the object to be cleaned. To aim.
【０００６】[0006]
【課題を解決するための手段】本発明者らは、上記の如
き現状に鑑み研究を重ねた結果、２，２，３，３，３−
ペンタフルオロプロパノールはＣＦＣ−１１３などの塩
素化フッ素化炭化水素に比べ蒸発潜熱が大きい点に着目
し、蒸発潜熱の小さいフッ素化アルコールを主成分とし
て用い、これにハロゲン化炭化水素を混合することによ
り、水切り能が高く、乾燥が容易であり、かつ地球環境
への影響の小さい水切り溶剤が得られることをを見いだ
し、本発明を完成するに至った。DISCLOSURE OF THE INVENTION As a result of repeated studies in view of the above-mentioned present conditions, the present inventors have found that 2,2,3,3,3-
Paying attention to the fact that pentafluoropropanol has a larger latent heat of vaporization than chlorinated fluorinated hydrocarbons such as CFC-113. By using fluorinated alcohol, which has a low latent heat of vaporization, as the main component, and mixing it with a halogenated hydrocarbon. It was found that a water-removing solvent having a high water-removing ability, being easy to dry and having a small influence on the global environment can be obtained, and thus completed the present invention.
【０００７】すなわち、本発明は、１，１，１，３，
３，４，４，４−オクタフルオロブタン−２−オール、
２−トリフルオロメチル−１，１，１，３，３，３−ヘ
キサフルオロプロパン−２−オール、２−トリフルオロ
メチル−１，１，１−トリフルオロプロパン−２−オー
ルのいずれか少なくとも１種のフッ素化アルコール５０
〜９５重量％と、さらに、ハロゲン化炭化水素５〜５０
重量％を混合して使用することを特徴とするフッ素化ア
ルコール含有水切り溶剤である。That is, the present invention is 1, 1, 1, 3,
3,4,4,4-octafluorobutan-2-ol,
At least one of 2-trifluoromethyl-1,1,1,3,3,3-hexafluoropropan-2-ol and 2-trifluoromethyl-1,1,1-trifluoropropan-2-ol Seed fluorinated alcohol 50
.About.95% by weight, and further 5 to 50 halogenated hydrocarbons.
It is a draining solvent containing a fluorinated alcohol, which is used by mixing in a weight percentage.
【０００８】本発明で使用されるフッ素化アルコールは
１，１，１，３，３，４，４，４−オクタフルオロブタ
ン−２−オール［分子式：ＣＦ3ＣＨ（ＯＨ）ＣＦ2ＣＦ
3］、２−トリフルオロメチル−１，１，１，３，３，
３−ヘキサフルオロプロパン−２−オール［分子式：
（ＣＦ3）3ＣＯＨ］、２−トリフルオロメチル−１，
１，１−トリフルオロプロパン−２−オール［分子式：
（ＣＦ3）2（ＣＨ3）ＣＯＨ］であり、これらは単独で
もあるいは２種類以上の混合物としても使用できる。本
発明で用いるフッ素化アルコールの代表的な物性値を表
１に示す。いずれも引火点を持たない化合物である。比
較のため２，２，３，３，３−ペンタフルオロプロパノ
ールの対応する物性値を表１に併せて示す。The fluorinated alcohol used in the present invention is 1,1,1,3,3,4,4,4-octafluorobutan-2-ol [molecular formula: CF 3 CH (OH) CF 2 CF].
3 ], 2-trifluoromethyl-1,1,1,3,3,3
3-hexafluoropropan-2-ol [molecular formula:
(CF 3 ) 3 COH], 2-trifluoromethyl-1,
1,1-trifluoropropan-2-ol [molecular formula:
(CF 3 ) 2 (CH 3 ) COH], which can be used alone or as a mixture of two or more kinds. Table 1 shows typical physical property values of the fluorinated alcohol used in the present invention. All are compounds that do not have a flash point. For comparison, Table 1 also shows the corresponding physical property values of 2,2,3,3,3-pentafluoropropanol.
【０００９】[0009]
【表１】 [Table 1]
【００１０】本発明で用いられるハロゲン化炭化水素
は、本発明のフッ素化アルコールと混和する化合物であ
れば使用できるが、地球環境影響を考慮し対流圏での分
解を可能とするため、分子内に少なくとも１個以上の水
素原子を有し、かつフッ素化アルコールとの溶解性が良
いフッ素化炭化水素を使用することが好ましい。このよ
うな特徴を有するフッ素化炭化水素として、例えば、
１，２−ジクロロ−１，２，２−トリフルオロエタン、
１，２−ジクロロ−１，１−ジフルオロエタン、１−ク
ロロ−２，２，２−トリフルオロエタン、１，１−ジク
ロロ−２，２，２−トリフルオロエタン、１，１−ジク
ロロ−１−フルオロエタン、１，１，２，２，３−ペン
タフルオロプロパン、２−クロロ−１，１，１，３，
３，３−ヘキサフルオロプロパン、１−クロロ−１，
１，２，３，３，３−ヘキサフルオロプロパン、１−ク
ロロ−２，２，３，３−テトラフルオロプロパン、１，
１−ジクロロ−２，２，３，３，３−ペンタフルオロプ
ロパン、１，３−ジクロロ−１，２，２，３，３−ペン
タフルオロプロパン，１，２−ジクロロ−１，１，３，
３，３−ペンタフルオロプロパン、１，２−ジクロロ−
１，２，３，３，３−ペンタフルオロプロパン、１，２
−ジクロロ−１，３，３，３−テトラフルオロプロパ
ン、１，２−ジクロロ−３，３，３−トリフルオロプロ
パン，２，３−ジクロロ−１，１，１，４，４，４−ヘ
キサフルオロブタン、２−クロロ−１，１，１，３，
３，３−ヘキサフルオロブタン、２−メチル−１，２−
ジクロロ−１，１，３，３，３−ペンタフルオロプロパ
ン、１，１，１，３，３，３−ヘキサフルオロブタン、
２−トリフルオロメチル−１，１，１−トリフルオロプ
ロパン、１，１，２，２−テトラフルオロシクロブタ
ン、１−クロロ−２，２，３，３−テトラフルオロシク
ロブタン、１−クロロ−２，２，３，３，４，４−シク
ロブタン、１，１，２，２，３，３，４，４−オクタフ
ルオロブタン、１，１，１，２，３，４，４，４−オク
タフルオロブタン、１，１，２，２，３，３，４，４，
５，５，５−ウンデカフルオロペンタン、２，２−ジフ
ルオロペンタン、等が挙げられる。特に、本発明のフッ
素化アルコールの沸点範囲に近い、１−クロロ−２，
２，３，３−テトラフルオロプロパン（Ｒ２４４ｃａ、
沸点 ５４℃）、１，１−ジクロロ−２，２，３，３，
３−ペンタフルオロプロパン（Ｒ２２５ｃａ、沸点 ５
１℃）、１，３−ジクロロ−１，２，２，３，３−ペン
タフルオロプロパン（Ｒ２２５ｃｂ、沸点５６℃），
１，２−ジクロロ−１，１，３，３，３−ペンタフルオ
ロプロパン（Ｒ２２５ｄａ、沸点 ５１℃）、１，２−
ジクロロ−１，２，３，３，３−ペンタフルオロプロパ
ン（Ｒ２２５ｂａ、沸点 ５２℃）、１，２−ジクロロ
−１，３，３，３−テトラフルオロプロパン（Ｒ２３４
ｄａ、沸点 ７０℃）、１，２−ジクロロ−３，３，３
−トリフルオロプロパン（Ｒ２４３ｄａ、沸点 ７７
℃）を使用することが好ましい。The halogenated hydrocarbon used in the present invention can be used as long as it is a compound that is miscible with the fluorinated alcohol of the present invention. It is preferable to use a fluorinated hydrocarbon having at least one hydrogen atom and having good solubility in the fluorinated alcohol. As the fluorinated hydrocarbon having such characteristics, for example,
1,2-dichloro-1,2,2-trifluoroethane,
1,2-dichloro-1,1-difluoroethane, 1-chloro-2,2,2-trifluoroethane, 1,1-dichloro-2,2,2-trifluoroethane, 1,1-dichloro-1- Fluoroethane, 1,1,2,2,3-pentafluoropropane, 2-chloro-1,1,1,3
3,3-hexafluoropropane, 1-chloro-1,
1,2,3,3,3-hexafluoropropane, 1-chloro-2,2,3,3-tetrafluoropropane, 1,
1-dichloro-2,2,3,3,3-pentafluoropropane, 1,3-dichloro-1,2,2,3,3-pentafluoropropane, 1,2-dichloro-1,1,3,
3,3-pentafluoropropane, 1,2-dichloro-
1,2,3,3,3-pentafluoropropane, 1,2
-Dichloro-1,3,3,3-tetrafluoropropane, 1,2-dichloro-3,3,3-trifluoropropane, 2,3-dichloro-1,1,1,4,4,4-hexa Fluorobutane, 2-chloro-1,1,1,3
3,3-hexafluorobutane, 2-methyl-1,2-
Dichloro-1,1,3,3,3-pentafluoropropane, 1,1,1,3,3,3-hexafluorobutane,
2-trifluoromethyl-1,1,1-trifluoropropane, 1,1,2,2-tetrafluorocyclobutane, 1-chloro-2,2,3,3-tetrafluorocyclobutane, 1-chloro-2, 2,3,3,4,4-cyclobutane, 1,1,2,2,3,3,4,4-octafluorobutane, 1,1,1,2,3,4,4,4-octafluoro Butane, 1,1,2,2,3,3,4,4
5,5,5-undecafluoropentane, 2,2-difluoropentane and the like can be mentioned. Particularly, 1-chloro-2, which is close to the boiling point range of the fluorinated alcohol of the present invention,
2,3,3-tetrafluoropropane (R244ca,
Boiling point 54 ° C), 1,1-dichloro-2,2,3,3,3
3-pentafluoropropane (R225ca, boiling point 5
1 ° C.), 1,3-dichloro-1,2,2,3,3-pentafluoropropane (R225cb, boiling point 56 ° C.),
1,2-dichloro-1,1,3,3,3-pentafluoropropane (R225da, boiling point 51 ° C.), 1,2-
Dichloro-1,2,3,3,3-pentafluoropropane (R225ba, boiling point 52 ° C), 1,2-dichloro-1,3,3,3-tetrafluoropropane (R234
da, boiling point 70 ° C), 1,2-dichloro-3,3,3
-Trifluoropropane (R243da, boiling point 77
C.) is preferably used.
【００１１】本発明で用いられるハロゲン化炭化水素
は、それぞれ単独で用いてもあるいは２種以上組み合わ
せても使用でき、これら単独或いは混合して用いられる
ハロゲン化炭化水素の水切り溶剤中の含有量は好ましく
は５〜５０重量％である。ハロゲン化炭化水素が５重量
％以下では、水切り溶剤に含まれる水分濃度が高くなり
ハロゲン化炭化水素の安定性に欠ける場合があり、一
方、５０重量％以上では水切りされた水の上昇に時間が
かかり好ましくない。また、製造法上の理由から例示し
た化合物の異性体が包含される場合も使用して差し支え
ない。The halogenated hydrocarbons used in the present invention can be used alone or in combination of two or more kinds. The content of the halogenated hydrocarbons used alone or in combination in the draining solvent is It is preferably 5 to 50% by weight. When the content of the halogenated hydrocarbon is 5% by weight or less, the water concentration contained in the draining solvent may be high and the stability of the halogenated hydrocarbon may be insufficient. On the other hand, when the content of the halogenated hydrocarbon is 50% by weight or more, it takes time to rise the drained water. It is not preferable. Also, it may be used when the isomers of the exemplified compounds are included for the reason of the production method.
【００１２】本発明のフッ素化アルコール含有水切り溶
剤は、一般に次のように使用される。水切り工程では緩
やかな一定方向の流れを持ち、槽から溢流している水切
り溶剤中に水の付着した物品を浸漬し、水を分離し、浮
上させる。浮上した水は水切り溶剤の溢流と共に槽から
流出させる。流出した水と水切り溶剤は水分離槽に導
き、水分離槽の上部から水を、下部から水切り溶剤を抜
き出す。更に乾燥工程では、水切り後の物品を加熱した
溶剤蒸気中に曝し、その蒸気の熱エネルギーで物品表面
を乾燥させる。The draining solvent containing a fluorinated alcohol of the present invention is generally used as follows. In the draining process, the article with water adheres to the draining solvent overflowing from the tank, which has a gentle constant flow, separates the water, and floats it. The floated water is discharged from the tank together with the overflow of the draining solvent. The water and draining solvent that have flowed out are led to a water separation tank, and water is drained from the upper part and the draining solvent from the lower part of the water separation tank. Further, in the drying step, the drained article is exposed to heated solvent vapor, and the thermal energy of the vapor dries the article surface.
【００１３】これらの水切り工程と乾燥工程は、通常一
連の連続装置で行われお互いに液の混合または混入の起
こる場合が多い、即ち乾燥工程の溶剤蒸気が凝縮して水
切り工程に導入されたり、水切り工程の水切り溶剤が乾
燥工程の溶剤として補給されることが多い。従って水切
り工程で使用される水切り溶剤と乾燥工程で用いられる
溶剤は実質的に同一か極めて組成の近似した物であるこ
とが望ましい。These draining process and drying process are usually carried out in a series of continuous devices, and liquids are often mixed or mixed with each other, that is, solvent vapor in the drying process is condensed and introduced into the draining process. The draining solvent in the draining process is often replenished as the solvent in the drying process. Therefore, it is desirable that the draining solvent used in the draining step and the solvent used in the drying step have substantially the same or very similar composition.
【００１４】更に水切り工程及び乾燥工程に供せられる
物品の材質はとくに限定する必要はないが、例えば、ガ
ラス、セラミックス、鉄、アルミニウム亜鉛、銅、真鍮
その他各種合金が挙げられる。これらの物品に対して腐
食を防止したり溶剤の分解を抑止する目的で本発明のフ
ッ素化アルコール含有水切り溶剤に各種の安定剤、例え
ばニトロメタン等のニトロアルカン類、１，４−ジオキ
サン等の環状エーテル類、１，２−ブチレンオキシド−
エポキシアルカン類、ベンゾトリアゾール類、エチレン
ジアミン等のアミン類を加えることができる。Further, the material of the article to be subjected to the draining step and the drying step is not particularly limited, but examples thereof include glass, ceramics, iron, aluminum zinc, copper, brass and various alloys. Various stabilizers such as nitroalkanes such as nitromethane and cyclic compounds such as 1,4-dioxane are added to the fluorinated alcohol-containing draining solvent of the present invention for the purpose of preventing corrosion of these articles and suppressing decomposition of the solvent. Ethers, 1,2-butylene oxide-
Amines such as epoxy alkanes, benzotriazoles, and ethylenediamine can be added.
【００１５】以下に実施例を挙げ、本発明を更に具体的
に説明する。The present invention will be described in more detail with reference to the following examples.
【００１６】[0016]
〔水切り試験〕内径２１ｍｍのガラス製５０ｃｃメスシ
リンダーにパテントブルーで着色した水５ｃｃを入れ、
その上から直径３ｍｍのガラスビーズ２０ｇ（約１４ｃ
ｃ）を静かに入れる。５分間静置した後、水切り溶剤２
０ｃｃを注ぎ込み、水切り溶剤の上部に着色水が１．５
ｃｃ上昇するまでの時間を測定した。所要時間が短いと
水切り能が高いと評価できる。[Draining test] 5 cc of water colored with patent blue was put in a glass 50 cc measuring cylinder having an inner diameter of 21 mm,
20g of glass beads (about 14c)
Insert c) gently. After standing for 5 minutes, drain the solvent 2
Pour 0 cc of water and drain 1.5% of colored water on top of the solvent.
The time to rise in cc was measured. If the required time is short, it can be evaluated that the drainage capacity is high.
【００１７】実施例１〜４ ハロゲン化炭化水素としてＲ２２５ｃａ及びＲ２２５ｃ
ｂの混合物（組成比Ｒ２２５ｃａ／Ｒ２２５ｃｂ＝１／
１）を使用し、これにフッ素化アルコールを表２に示す
割合で混合したフッ素化アルコール含有水切り溶剤につ
いて〔水切り試験〕を行った。その結果を表２に示す。Examples 1 to 4 R225ca and R225c as halogenated hydrocarbons
b mixture (composition ratio R225ca / R225cb = 1 /
1) was used, and a fluorinated alcohol-containing draining solvent prepared by mixing fluorinated alcohol in the proportion shown in Table 2 was subjected to a [draining test]. The results are shown in Table 2.
【００１８】比較例１〜３ ＣＦＣ−１１３にエチルアルコール８重量％を添加した
もの（比較例１）、２，２，３，３，３−ペンタフルオ
ロプロパノールのみ（比較例２）、及びＲ２２５ｃａ及
びＲ２２５ｃｂの混合物（組成比Ｒ２２５ｃａ／Ｒ２２
５ｃｂ＝１／１）のみ（比較例３）について〔水切り試
験〕を行った。その結果を表２に示す。Comparative Examples 1 to 3 CFC-113 to which 8% by weight of ethyl alcohol was added (Comparative Example 1), 2,2,3,3,3-pentafluoropropanol only (Comparative Example 2), and R225ca and R225cb mixture (composition ratio R225ca / R22
[Water draining test] was conducted only for 5cb = 1/1 (Comparative Example 3). The results are shown in Table 2.
【００１９】[0019]
【表２】 [Table 2]
【００２０】[0020]
【発明の効果】本発明のフッ素化アルコール含有水切り
溶剤は、不燃性でまたオゾン層破壊或いは温暖化などの
地球環境に及ぼす影響が小さく、かつ水切り能が高く、
低沸点であることから、乾燥工程ではその乾燥時間が短
くなり全体の処理時間を短縮することができるという効
果を奏する。The fluorinated alcohol-containing draining solvent of the present invention is nonflammable, has a small effect on the global environment such as ozone depletion or global warming, and has a high draining ability.
Since it has a low boiling point, the drying time is shortened in the drying step, and the overall processing time can be shortened.
───────────────────────────────────────────────────── フロントページの続き (71)出願人 000003300 東ソー株式会社 山口県新南陽市開成町4560番地 (71)出願人 000002200 セントラル硝子株式会社 山口県宇部市大字沖宇部5253番地 (74)上記４名の代理人 弁理士 坂本 栄一 (72)発明者 関屋 章 茨城県つくば市東１丁目１番地 工業技術 院物質工学工業技術研究所内 (72)発明者 後藤 嘉彦 茨城県つくば市竹園２丁目16番地の30 (72)発明者 須賀 淳雄 茨城県つくば市竹園２丁目14番地の１ (72)発明者 高橋 満 茨城県土浦市富士崎１丁目18番地の７ ─────────────────────────────────────────────────── ─── Continuation of the front page (71) Applicant 000003300 Tosoh Co., Ltd. 4560 Kaisei-cho, Shinnanyo-shi, Yamaguchi Prefecture (71) Applicant 000002200 Central Glass Co., Ltd. 5253 Oki-Ube, Ube-shi, Yamaguchi Prefecture (74) 4 people above Attorney attorney Eiichi Sakamoto (72) Inventor Akira Sekiya 1-1, Higashi, Tsukuba, Ibaraki Prefecture Institute of Industrial Science and Technology (72) Inventor Yoshihiko Goto 2-16, Takezono, Tsukuba, Ibaraki 30 ( 72) Inventor Atsue Suga, 2-14-14 Takezono, Tsukuba, Ibaraki Prefecture (72) Inventor Mitsuru Takahashi, 7-18-1, Fujisaki, Tsuchiura, Ibaraki Prefecture
Claims (2)
素とからなる溶剤であって、該溶剤が、１，１，１，
３，３，４，４，４−オクタフルオロブタン−２−オー
ル、２−トリフルオロメチル−１，１，１，３，３，３
−ヘキサフルオロプロパン−２−オールおよび２−トリ
フルオロメチル−１，１，１−トリフルオロプロパン−
２−オールから選ばれた１種以上のフッ素化アルコール
を５０〜９５重量％含有することを特徴とするフッ素化
アルコール含有水切り溶剤。1. A solvent comprising a fluorinated alcohol and a halogenated hydrocarbon, wherein the solvent is 1,1,1,1.
3,3,4,4,4-octafluorobutan-2-ol, 2-trifluoromethyl-1,1,1,3,3,3
-Hexafluoropropan-2-ol and 2-trifluoromethyl-1,1,1-trifluoropropane-
A draining solvent containing a fluorinated alcohol, characterized by containing 50 to 95% by weight of one or more fluorinated alcohols selected from 2-ol.
２，２，３，３−テトラフルオロプロパン、１，１−ジ
クロロ−２，２，３，３，３−ペンタフルオロプロパ
ン、１，３−ジクロロ−１，２，２，３，３−ペンタフ
ルオロプロパン，１，２−ジクロロ−１，１，３，３，
３−ペンタフルオロプロパン、１，２−ジクロロ−１，
２，３，３，３−ペンタフルオロプロパン、１，２−ジ
クロロ−１，３，３，３−テトラフルオロプロパンおよ
び１，２−ジクロロ−３，３，３−トリフルオロプロパ
ンから選ばれた１種以上のハロゲン化炭化水素であるこ
とを特徴とする請求項１記載のフッ素化アルコール含有
水切り溶剤。2. The halogenated hydrocarbon is 1-chloro-
2,2,3,3-tetrafluoropropane, 1,1-dichloro-2,2,3,3,3-pentafluoropropane, 1,3-dichloro-1,2,2,3,3-pentafluoro Propane, 1,2-dichloro-1,1,3,3,3
3-pentafluoropropane, 1,2-dichloro-1,
1 selected from 2,3,3,3-pentafluoropropane, 1,2-dichloro-1,3,3,3-tetrafluoropropane and 1,2-dichloro-3,3,3-trifluoropropane The fluorinated alcohol-containing drainage solvent according to claim 1, which is one or more halogenated hydrocarbons.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13259793A JP2572524B2 (en) | 1993-05-10 | 1993-05-10 | Draining solvent containing fluorinated alcohol |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13259793A JP2572524B2 (en) | 1993-05-10 | 1993-05-10 | Draining solvent containing fluorinated alcohol |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0770599A true JPH0770599A (en) | 1995-03-14 |
| JP2572524B2 JP2572524B2 (en) | 1997-01-16 |
Family
ID=15085065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13259793A Expired - Lifetime JP2572524B2 (en) | 1993-05-10 | 1993-05-10 | Draining solvent containing fluorinated alcohol |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2572524B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5877657A (en) * | 1996-11-29 | 1999-03-02 | Ricoh Company, Ltd. | PLL clock generator having trimmable frequency dividers |
| EP1900801A1 (en) | 2006-09-14 | 2008-03-19 | FUJIFILM Corporation | Substrate water-removing agent, and water-removing method and drying method employing same |
| EP2905803A1 (en) | 2014-02-06 | 2015-08-12 | Shin-Etsu Chemical Co., Ltd. | Method for cleaning and drying semiconductor substrate |
| EP3396702A1 (en) | 2017-04-27 | 2018-10-31 | Shin-Etsu Chemical Co., Ltd. | Method of cleaning and drying semiconductor substrate |
-
1993
- 1993-05-10 JP JP13259793A patent/JP2572524B2/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5877657A (en) * | 1996-11-29 | 1999-03-02 | Ricoh Company, Ltd. | PLL clock generator having trimmable frequency dividers |
| EP1900801A1 (en) | 2006-09-14 | 2008-03-19 | FUJIFILM Corporation | Substrate water-removing agent, and water-removing method and drying method employing same |
| EP2905803A1 (en) | 2014-02-06 | 2015-08-12 | Shin-Etsu Chemical Co., Ltd. | Method for cleaning and drying semiconductor substrate |
| KR20150093098A (en) | 2014-02-06 | 2015-08-17 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Method for cleaning and drying semiconductor substrate |
| US9524863B2 (en) | 2014-02-06 | 2016-12-20 | Shin-Etsu Chemical Co., Ltd. | Method for cleaning and drying semiconductor substrate |
| EP3396702A1 (en) | 2017-04-27 | 2018-10-31 | Shin-Etsu Chemical Co., Ltd. | Method of cleaning and drying semiconductor substrate |
| KR20180120606A (en) | 2017-04-27 | 2018-11-06 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Method of cleaning and drying semiconductor substrate |
| US10811247B2 (en) | 2017-04-27 | 2020-10-20 | Shin-Etsu Chemical Co., Ltd. | Method of cleaning and drying semiconductor substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2572524B2 (en) | 1997-01-16 |
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