JPH077035A - Wire bonder - Google Patents

Wire bonder

Info

Publication number
JPH077035A
JPH077035A JP5147338A JP14733893A JPH077035A JP H077035 A JPH077035 A JP H077035A JP 5147338 A JP5147338 A JP 5147338A JP 14733893 A JP14733893 A JP 14733893A JP H077035 A JPH077035 A JP H077035A
Authority
JP
Japan
Prior art keywords
stator
horn
main body
wire bonder
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5147338A
Other languages
Japanese (ja)
Inventor
Hidehiko Takada
秀彦 高田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5147338A priority Critical patent/JPH077035A/en
Publication of JPH077035A publication Critical patent/JPH077035A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
    • H01L2224/7835—Stable and mobile yokes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/788—Means for moving parts
    • H01L2224/78821—Upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
    • H01L2224/78822—Rotational mechanism
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE:To provide a wire bonder which can be assembled with ease and high accuracy by using a linear motor as a drive means which rocks a horn vertically. CONSTITUTION:A horn 3 and a rotor yoke 11 and a bearing holder are integrally mounted on a rotary shaft of the horn 3, thereby constituting drive unit 1 while a stator 26 is integrally mounted on a main body 21, thereby constituting a drive unit 2. A recessed part 22 is formed on the front surface of a side wall of the main body 21. Bearing holders 7a and 7b are fitted in the recessed part by using an attraction force of a magnet 12 and the stator 26, which allows the magnet 12 of the rotor yoke 11 to be opposed to the front surface of the stator 26 and the drive unit 1 to be mounted to the main body unit 2 with this attraction force. This construction makes it possible to assemble a wire bonder with ease and accuracy.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、チップの電極とリード
フレームなどの電極をワイヤで接続するワイヤボンダに
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire bonder for connecting an electrode of a chip and an electrode such as a lead frame with a wire.

【０００２】[0002]

【従来の技術】ワイヤボンダは、ホーンの先端部に保持
されたツールに金線などの細いワイヤを挿通し、ホーン
を回転軸を中心に上下方向に揺動させながら、チップの
電極とリードフレームやプリント基板などの電極をワイ
ヤにより接続するようになっている。2. Description of the Related Art A wire bonder inserts a thin wire such as a gold wire into a tool held at the tip of a horn and swings the horn up and down around a rotation axis to allow the chip electrode and lead frame and The electrodes of the printed circuit board and the like are connected by wires.

【０００３】また従来のワイヤボンダにおいて、ホーン
を上下方向に揺動させるための駆動手段は、一般にカム
やモータなどが用いられていた。In the conventional wire bonder, a cam or a motor is generally used as a driving means for swinging the horn in the vertical direction.

【０００４】[0004]

【発明が解決しようとする課題】ところで近年は、ワイ
ヤボンディング作業の高速性が益々要求されてきている
が、カムを使用する従来の駆動手段では、動作の高速化
に限界があった。そこでホーンを上下方向に揺動させる
ための駆動手段として、リニヤモータを使用することが
考えられる。リニヤモータは、ステータに巻回されたコ
イルに流す電流を制御することにより、ロータヨークの
速度制御を行うものであり、従来のカムやモータに替え
てリニヤモータをワイヤボンダに適用すれば、ホーンを
より高速度で揺動させることが可能となるだけでなく、
全体構造を簡単軽量化でき、更にはホーンの揺動にとも
なって発生する騒音（機械的カチカチ音）も著しく低減
できる。By the way, in recent years, there has been an increasing demand for high-speed wire bonding work, but the conventional driving means using a cam has a limitation in speeding up the operation. Therefore, it is conceivable to use a linear motor as a driving means for swinging the horn in the vertical direction. The linear motor controls the speed of the rotor yoke by controlling the current flowing in the coil wound around the stator.If the linear motor is applied to the wire bonder instead of the conventional cam or motor, the horn will operate at a higher speed. Not only can it be rocked with,
The overall structure can be simplified and made lighter, and the noise (mechanical clicking noise) generated by the swing of the horn can be significantly reduced.

【０００５】しかしながらリニヤモータを採用した場
合、ワイヤボンダの組立て時に、ロータヨークのマグネ
ットとステータの間に強い磁気吸引力が発生し、この磁
気吸引力のためにロータヨークとステータが互いに強く
吸引し合い、軸受部分の組み付けなどがきわめて困難と
なる。However, when the linear motor is adopted, a strong magnetic attraction force is generated between the magnet of the rotor yoke and the stator at the time of assembling the wire bonder, and this magnetic attraction force causes the rotor yoke and the stator to strongly attract each other, resulting in a bearing portion. It becomes extremely difficult to assemble.

【０００６】そこで本発明は、全体の組み付けを簡単か
つ正確に行えるリニヤモータを備えたワイヤボンダを提
供することを目的とする。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a wire bonder having a linear motor that can be assembled easily and accurately as a whole.

【０００７】[0007]

【課題を解決するための手段】このために本発明は、ホ
ーンとロータヨークとベアリング部をホーンの回転軸に
一体的に組み付けて駆動部ユニットとし、またステータ
を本体部に一体的に組み付けて本体部ユニットとしてい
る。To this end, according to the present invention, a horn, a rotor yoke, and a bearing portion are integrally assembled to a rotary shaft of the horn to form a drive unit, and a stator is integrally assembled to a main body portion. Partial unit.

【０００８】そして本体部に凹入部を形成し、マグネッ
トとステータの磁気吸引力を利用してこの凹入部にベア
リング部を嵌合させることにより、ロータヨークのマグ
ネットをステータの前面に対向させて駆動部ユニットを
本体ユニットに組み付けることにより、ワイヤボンダを
組み立てるようにしている。A recess is formed in the main body, and the magnetic attraction of the magnet and the stator is used to fit the bearing into the recess, so that the magnet of the rotor yoke faces the front surface of the stator. The wire bonder is assembled by assembling the unit with the main unit.

【０００９】[0009]

【作用】上記構成によれば、ロータヨークのマグネット
とステータの磁気吸引力を利用しながら、駆動部ユニッ
トのベアリング部を本体部ユニットの凹入部に嵌合させ
ることにより、ワイヤボンダを簡単にしかも精度よく組
み立てることができる。According to the above structure, the wire bonder can be easily and accurately fitted by fitting the bearing of the drive unit into the recess of the main unit while utilizing the magnetic attraction of the magnet of the rotor yoke and the magnetic force of the stator. Can be assembled.

【００１０】[0010]

【実施例】次に、図面を参照しながら本発明の実施例を
説明する。Embodiments of the present invention will now be described with reference to the drawings.

【００１１】図１は本発明の一実施例におけるワイヤボ
ンダの組み立て前の側面図、図２は本発明の一実施例に
おける組み立て後の側面図である。このワイヤボンダ
は、駆動部ユニット１と本体部ユニット２から成ってお
り、図２に示すように、駆動部ユニット１を本体部ユニ
ット２に装着して組み立てられる。FIG. 1 is a side view of a wire bonder in one embodiment of the present invention before assembly, and FIG. 2 is a side view of the wire bonder in one embodiment of the present invention after assembly. This wire bonder comprises a drive unit 1 and a main unit 2, and is assembled by mounting the drive unit 1 on the main unit 2 as shown in FIG.

【００１２】次に、図３を参照しながら、駆動部ユニッ
ト１の構造を説明する。図３は本発明の一実施例におけ
るワイヤボンダの駆動部ユニット１の分解図であって、
３はホーンであり、その先端部にはツール４が保持され
ている。ワイヤボンディング時には、このツール４にワ
イヤが挿通される。ホーン３の基端部は、箱型のホーン
ホルダー５に保持されている。図示しないが、このホー
ンホルダー５の内部には、ホーン３を超音波振動させる
ための振動素子などが内蔵されている。Next, the structure of the drive unit 1 will be described with reference to FIG. FIG. 3 is an exploded view of the drive unit 1 of the wire bonder according to the embodiment of the present invention.
Reference numeral 3 is a horn, and a tool 4 is held at its tip. At the time of wire bonding, the wire is inserted through the tool 4. The base end of the horn 3 is held by a box-shaped horn holder 5. Although not shown, a vibration element for ultrasonically vibrating the horn 3 is built in the horn holder 5.

【００１３】６は水平な回転軸であって、ホーンホルダ
ー５を貫通しており、ホーン３はホーンホルダー５を介
して回転軸６に一体的に組み付けられている。７ａ，７
ｂはベアリングホルダーであって、その形状は円筒形で
あり、端部にはフランジ８が設けられている。フランジ
８にはねじ孔９が形成されている。１０ａ，１０ｂはベ
アリングであって、ベアリングホルダー７ａ，７ｂの内
部に収納され、回転軸６の両端部を軸支する。このベア
リングホルダー７ａ，７ｂとベアリング１０ａ，１０ｂ
とにより、ベアリング部が構成される。１１はロータヨ
ークであって、その側面形状は扇形であり、その背面に
はマグネット１２が複数個装着されている。ロータヨー
ク１１の根元部は回転軸６に装着されている。以上の構
成部品を回転軸６に一体的に組み付けることにより、駆
動部ユニット１が構成される。Reference numeral 6 denotes a horizontal rotary shaft which penetrates the horn holder 5, and the horn 3 is integrally assembled to the rotary shaft 6 via the horn holder 5. 7a, 7
Reference numeral b is a bearing holder, which has a cylindrical shape and is provided with a flange 8 at its end. A screw hole 9 is formed in the flange 8. Bearings 10a and 10b are housed inside the bearing holders 7a and 7b, and support both ends of the rotary shaft 6 as shafts. This bearing holder 7a, 7b and bearing 10a, 10b
A bearing portion is constituted by and. Reference numeral 11 denotes a rotor yoke, the side surface of which is fan-shaped, and a plurality of magnets 12 are mounted on the back surface thereof. The root portion of the rotor yoke 11 is attached to the rotary shaft 6. The drive unit 1 is configured by integrally assembling the above-described components to the rotary shaft 6.

【００１４】次に本体部ユニット２を説明する。図４は
本発明の一実施例におけるワイヤボンダの本体部ユニッ
ト２の主体となる本体部２１の斜視図である。この本体
部２１は箱型であって、前面は大きく開口する開口部２
５になっている。側壁の前面やや下部には凹入部２２が
半円状に切欠形成されており、凹入部２２の周囲にはね
じ孔２３が形成されている。また側壁の後部にもねじ孔
２４が形成されている。Next, the main body unit 2 will be described. FIG. 4 is a perspective view of the main body portion 21 that is the main body of the main body portion unit 2 of the wire bonder in the embodiment of the present invention. The main body 21 has a box shape, and an opening 2 having a large front opening.
It is 5. A recess 22 is formed in a semicircular shape in the front surface of the side wall and slightly below, and a screw hole 23 is formed around the recess 22. A screw hole 24 is also formed in the rear portion of the side wall.

【００１５】図３において、２６は本体部２１の内部に
組み付けられるステータであり、その脚部２７にはコイ
ル２８が巻回されている。このステータ２６は、図１に
示すように本体部２１の内部に収納され、ねじ孔２４と
ねじ孔２９にねじ３０をねじ込むことにより、本体部２
１に組み付けられて本体部ユニット２が構成される。In FIG. 3, reference numeral 26 is a stator assembled inside the main body portion 21, and a coil 28 is wound around a leg portion 27 of the stator. The stator 26 is housed inside the main body 21 as shown in FIG. 1, and the screws 30 are screwed into the screw holes 24 and the screw holes 29.
1 is assembled to form a main body unit 2.

【００１６】駆動部ユニット１は、ベアリングホルダー
７ａ，７ｂを本体部２１の凹入部２２に嵌合し、ねじ孔
２９、２３にビス３１をねじ込むことにより、本体部ユ
ニット２に組み付けられて、図２に示すようにワイヤボ
ンダが完成する。この場合、駆動部ユニット１を手に保
持して、図１において矢印にて示すようにベアリングホ
ルダー７ａ，７ｂを凹入部２２に嵌合させる際には、マ
グネット１２とステータ２６の間に強い磁気吸引力が発
生し、この磁気吸引力によりベアリングホルダー７ａ，
７ｂは難なくかつしっかりと凹入部２２に嵌合するの
で、簡単にワイヤボンダを組み立てることができ、また
その状態で、マグネット１２はステータ２６の前面に対
向する。ここで、ベアリングホルダー７ａ，７ｂ、ロー
タヨーク１１、ステータ２６、凹入部２２などの成形精
度を出しておけば、マグネット１２とステータ２６の前
面とのギャップＧを正しく保持して高い組み付け精度を
得ることができる。The drive unit 1 is assembled to the main unit 2 by fitting the bearing holders 7a and 7b into the recess 22 of the main unit 21 and screwing the screws 31 into the screw holes 29 and 23. A wire bonder is completed as shown in FIG. In this case, when the drive unit 1 is held by hand and the bearing holders 7a and 7b are fitted into the recessed portion 22 as shown by the arrow in FIG. 1, a strong magnetic force is generated between the magnet 12 and the stator 26. An attractive force is generated, and this magnetic attractive force causes the bearing holder 7a,
Since the wire 7b fits into the recessed portion 22 firmly and securely, the wire bonder can be easily assembled, and in this state, the magnet 12 faces the front surface of the stator 26. Here, if the molding accuracy of the bearing holders 7a and 7b, the rotor yoke 11, the stator 26, the recessed portion 22 and the like is taken out, the gap G between the magnet 12 and the front surface of the stator 26 can be correctly maintained and high assembly accuracy can be obtained. You can

【００１７】ロータヨーク１１とステータ２６から成る
リニヤモータによれば、ホーン３を回転軸６を中心に高
速度で上下方向に揺動させることが可能となり、ワイヤ
ボンディングを高速度で行うことができる。またリニヤ
モータは構造が簡単でしかも軽量であり、したがってこ
のワイヤボンダを移動テーブル（図外）に保持させても
移動テーブルの負荷は小さく、したがって移動テーブル
によりワイヤボンダをより高速度で水平移動させなが
ら、ワイヤボンディング作業を行うことができ、この点
からもワイヤボンディングの高速化が可能となる。According to the linear motor composed of the rotor yoke 11 and the stator 26, the horn 3 can be swung in the vertical direction at a high speed around the rotary shaft 6, and the wire bonding can be performed at a high speed. In addition, the linear motor has a simple structure and is light in weight. Therefore, even if the wire bonder is held on the moving table (not shown), the load on the moving table is small. Therefore, the moving table moves the wire bonder horizontally at a higher speed, Bonding work can be performed, and also from this point, the speed of wire bonding can be increased.

【００１８】[0018]

【発明の効果】以上説明したように本発明のワイヤボン
ダは、駆動部ユニットのベアリング部を本体部ユニット
の凹入部にマグネットとステータの磁気吸引力を利用し
ながら嵌合させることにより、簡単に組み立てることが
でき、また高い組み立て精度を実現することができる。As described above, the wire bonder of the present invention is easily assembled by fitting the bearing portion of the drive unit into the recess of the main unit while utilizing the magnetic attraction force of the magnet and the stator. It is also possible to achieve high assembly accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の一実施例におけるワイヤボンダの組み
立て前の側面図FIG. 1 is a side view of a wire bonder before assembly according to an embodiment of the present invention.

【図２】本発明の一実施例におけるワイヤボンダの組み
立て後の側面図FIG. 2 is a side view of the wire bonder after assembly according to an embodiment of the present invention.

【図３】本発明の一実施例におけるワイヤボンダの駆動
部ユニットの分解図FIG. 3 is an exploded view of a drive unit of a wire bonder according to an embodiment of the present invention.

【図４】本発明の一実施例におけるワイヤボンダの本体
部ユニットの斜視図FIG. 4 is a perspective view of a main body unit of a wire bonder according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

１ 駆動部ユニット ２ 本体部ユニット ３ ホーン ４ ツール ６ 回転軸 ７ａ，７ｂ ベアリングホルダー １０ａ，１０ｂ ベアリング（ベアリング部） １１ ロータヨーク １２ マグネット ２１ 本体部 ２２ 凹入部 ２６ ステータ ２８ コイル 1 Drive Unit Unit 2 Main Body Unit 3 Horn 4 Tool 6 Rotating Shaft 7a, 7b Bearing Holder 10a, 10b Bearing (Bearing Part) 11 Rotor Yoke 12 Magnet 21 Body Part 22 Recessed Part 26 Stator 28 Coil

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】ツールを保持するホーンと、このホーンの
回転軸と、この回転軸を軸支するベアリング部と、背面
にマグネットを備えたロータヨークと、コイルが巻回さ
れたステータと、本体部とから成るワイヤボンダであっ
て、 前記ホーンと前記ロータヨークと前記ベアリング部とを
前記回転軸に一体的に組み付けて駆動部ユニットとし、
また前記ステータを前記本体部に一体的に組み付けて本
体部ユニットとし、かつ前記本体部に凹入部を形成し、
前記マグネットとステータの磁気吸引力を利用してこの
凹入部に前記ベアリング部を嵌合させることにより、前
記ロータヨークのマグネットを前記ステータの前面に対
向させて、前記駆動部ユニットを前記本体ユニットに組
み付けることを特徴とするワイヤボンダ。1. A horn for holding a tool, a rotating shaft of the horn, a bearing portion for supporting the rotating shaft, a rotor yoke having a magnet on a back surface thereof, a stator around which a coil is wound, and a main body portion. A wire bonder comprising: a horn, the rotor yoke, and the bearing portion, which are integrally assembled with the rotary shaft to form a drive portion unit,
Further, the stator is integrally assembled to the main body to form a main body unit, and a recessed portion is formed in the main body.
By fitting the bearing portion into the recess using the magnetic attraction force of the magnet and the stator, the magnet of the rotor yoke faces the front surface of the stator, and the drive unit is assembled to the main unit. A wire bonder characterized in that
JP5147338A 1993-06-18 1993-06-18 Wire bonder Pending JPH077035A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5147338A JPH077035A (en) 1993-06-18 1993-06-18 Wire bonder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5147338A JPH077035A (en) 1993-06-18 1993-06-18 Wire bonder

Publications (1)

Publication Number Publication Date
JPH077035A true JPH077035A (en) 1995-01-10

Family

ID=15427924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5147338A Pending JPH077035A (en) 1993-06-18 1993-06-18 Wire bonder

Country Status (1)

Country Link
JP (1) JPH077035A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5728983A (en) * 1995-12-27 1998-03-17 Asmo Co., Ltd. Elongated tube-like pressure sensitive cable switch
US5834719A (en) * 1995-08-04 1998-11-10 Asmo Co., Ltd. Cord switch
US5920044A (en) * 1995-10-05 1999-07-06 Asmo Co., Ltd. Pressure-responsive switch
US6107580A (en) * 1998-02-09 2000-08-22 Shinmei Rubber Industries Co., Ltd. Omnidirectional response cable switch

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5834719A (en) * 1995-08-04 1998-11-10 Asmo Co., Ltd. Cord switch
US5920044A (en) * 1995-10-05 1999-07-06 Asmo Co., Ltd. Pressure-responsive switch
US5728983A (en) * 1995-12-27 1998-03-17 Asmo Co., Ltd. Elongated tube-like pressure sensitive cable switch
US6107580A (en) * 1998-02-09 2000-08-22 Shinmei Rubber Industries Co., Ltd. Omnidirectional response cable switch

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