JPH0765767A - Sample mount for scanning electron microscope - Google Patents
Sample mount for scanning electron microscopeInfo
- Publication number
- JPH0765767A JPH0765767A JP5207828A JP20782893A JPH0765767A JP H0765767 A JPH0765767 A JP H0765767A JP 5207828 A JP5207828 A JP 5207828A JP 20782893 A JP20782893 A JP 20782893A JP H0765767 A JPH0765767 A JP H0765767A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron microscope
- scanning electron
- notch
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004020 conductor Substances 0.000 claims abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052799 carbon Inorganic materials 0.000 abstract description 9
- 239000000853 adhesive Substances 0.000 abstract description 8
- 230000001070 adhesive effect Effects 0.000 abstract description 7
- 238000011109 contamination Methods 0.000 abstract description 6
- 238000005070 sampling Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は走査電子顕微鏡用試料台
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample stage for a scanning electron microscope.
【０００２】[0002]
【従来の技術】従来、走査電子顕微鏡用試料台の表面は
平坦であり、観察試料の断面を観察する際の試料の支持
の方法としては、観察試料を立てたままカーボン等の導
電性のある接着剤により接着する方法、バネ等の観察試
料を押さえる治具を用いて試料台に固定する方法などが
あった。2. Description of the Related Art Conventionally, the surface of a sample stage for a scanning electron microscope is flat, and as a method of supporting a sample when observing a cross section of the sample to be observed, an electrically conductive material such as carbon can be used while the sample is standing. There are a method of adhering with an adhesive, a method of fixing to the sample stand using a jig such as a spring that holds the observed sample.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、前述し
たような方法によって観察試料を支持すると、以下のよ
うな問題を生じる。However, when the observation sample is supported by the above-mentioned method, the following problems occur.
【０００４】カーボン等導電性のある接着剤により、観
察試料を立てて試料台に接着する方法においては、断面
観察の時には切り出した試料の反対側の断面を試料台に
置き、試料を立てるのであるが、シリコンウエハなど試
料が非常に薄い場合にはこのウエハを殆ど垂直にしたま
ま試料台に接着させるのは非常に困難であり、高度な技
術と多くの作業時間を要する。In the method of standing an observation sample by a conductive adhesive such as carbon and adhering it to the sample stand, the cross section on the opposite side of the cut sample is placed on the sample stand when the cross section is observed. However, when a sample such as a silicon wafer is very thin, it is very difficult to bond the wafer to the sample stage while keeping the wafer almost vertical, which requires advanced technology and a lot of working time.
【０００５】またこの場合、試料の接着が困難である為
に接着剤を多量に必要とし、これにより試料汚染、ＳＥ
Ｍ鏡筒内汚染等の問題も生じる。Further, in this case, since it is difficult to adhere the sample, a large amount of adhesive is required, which causes sample contamination and SE.
Problems such as contamination in the M lens barrel also occur.
【０００６】バネ等の押さえる治具を用いて試料台に装
着する方法においては、バネの力により試料が破損して
しまったり、また治具の形態や大きさ等により、試料の
大きさや形態が制限されてしまい、サンプリング（切り
出し）等も困難であった。In the method of mounting the sample on the sample table by using a jig such as a spring, the sample may be damaged by the force of the spring, or the size and shape of the sample may vary depending on the shape and size of the jig. It was limited and it was difficult to sample (cut out).
【０００７】一般にＳＥＭ観察の際のワーキングディス
タンスの制限から、断面切り出しの際には試料を非常に
小さく切り出さなくてはならないので、この点からも高
度な技術と多くの作業時間を必要としていた。Generally, due to the limitation of working distance during SEM observation, a sample must be cut out into a very small size when cutting out a cross section, which requires a high level of skill and a lot of working time.
【０００８】また、上記いずれの方法においても、試料
台と試料との接触面積が小さい場合が多く、観察の際チ
ャージアップ等の問題が生じていた。Further, in any of the above methods, the contact area between the sample table and the sample is often small, which causes problems such as charge-up during observation.
【０００９】[0009]
【課題を解決するための手段】本発明は、上記課題を解
決する為に成されたものであり、本発明は、導電性材料
からなる試料台の表面に、試料の少なくとも一部を差し
込むための切り込み部を設けたことを特徴とする。The present invention has been made to solve the above problems, and the present invention is for inserting at least a part of a sample into the surface of a sample table made of a conductive material. It is characterized in that a notch part is provided.
【００１０】[0010]
【実施例】図１に本発明の試料台の実施例を示す。
（ａ）は平面図、（ｂ）は側面図、（ｃ）は試料を装着
したところを表している。EXAMPLE FIG. 1 shows an example of the sample table of the present invention.
(A) is a plan view, (b) is a side view, and (c) is where the sample is mounted.
【００１１】１は断面形状が矩形であるところの切り込
み部、２は試料台の表面、３は試料、４はカーボンペー
ストなどの接着剤である。Reference numeral 1 is a cut portion having a rectangular cross section, 2 is a surface of a sample table, 3 is a sample, and 4 is an adhesive agent such as carbon paste.
【００１２】このような試料台を用いてＳＥＭ観察を行
なえば、従来よりも切り込み部の大きさの分だけサンプ
リング試料の大きさを大きくすることができ、試料切り
出しが容易となる。また、カーボンペーストなどの接着
剤も従来の３分の１程度でよく、それによって試料汚染
も少なく、ＳＥＭ観察の際に鮮明な像が得られる。When SEM observation is performed using such a sample stand, the size of the sample to be sampled can be increased by the size of the cut portion and the sample can be cut out more easily than before. Further, an adhesive such as carbon paste may be about one-third of that used in the past, so that the sample is less contaminated and a clear image can be obtained during SEM observation.
【００１３】図２に本発明の試料台の他の実施例を示
す。（ａ）は平面図、（ｂ）は側面図、（ｃ）は試料を
装着したところを表している。FIG. 2 shows another embodiment of the sample table of the present invention. (A) is a plan view, (b) is a side view, and (c) is where the sample is mounted.
【００１４】前述した図１の実施例との差異は、試料台
に複数の切り込み部を設けた点である。本実施例では３
個の切り込み部を設け、３個の試料を立て、カーボンペ
ーストで接着した。これにより従来困難であった同一試
料台による複数の試料の断面観察が可能となり、また試
料交換のためのＳＥＭリークの時間等の短縮が可能とな
った。The difference from the embodiment of FIG. 1 described above is that a plurality of cut portions are provided on the sample table. In this embodiment, 3
Three notches were provided and three samples were stood up and bonded with a carbon paste. As a result, it becomes possible to observe cross-sections of a plurality of samples by the same sample stage, which has been difficult in the past, and it is possible to shorten the time of SEM leakage for sample exchange.
【００１５】図３に本発明の試料台の他の実施例を示
す。（ａ）は平面図、（ｂ）は側面図、（ｃ）は試料を
装着したところを表している。FIG. 3 shows another embodiment of the sample table of the present invention. (A) is a plan view, (b) is a side view, and (c) is where the sample is mounted.
【００１６】本実施例では試料台に形成される切り込み
部はＶ字形状をしており、この切り込み部内に試料をあ
る程度の傾きをもって立て、カーボンペーストで接着し
た。In this embodiment, the cut portion formed on the sample table has a V-shape, and the sample was erected in the cut portion with a certain inclination and bonded with a carbon paste.
【００１７】本実施例によると、他の実施例同様サンプ
リングは簡単かつ容易で作業時間も大幅に短縮され、ま
た、垂直に試料を立てて接着するよりも観察角度範囲が
広がるという更なる効果も有する。According to this embodiment, the sampling is simple and easy like the other embodiments, the working time is greatly shortened, and there is a further effect that the observation angle range is widened as compared with the case where the sample is vertically placed and adhered. Have.
【００１８】尚、本実施例において試料の接着される側
の断面とＶ字型の切り込み部の側面の傾きが一致するよ
うにして固定してもよい。In the present embodiment, the sample may be fixed such that the cross section of the sample on the side to be bonded and the side surface of the V-shaped cut portion are inclined.
【００１９】本実施例は以上の実施例に限定されるもの
ではなく、発明の主旨を逸脱しない範囲で、種々の構成
が可能であることはいうまでもない。例えば同一の試料
台に複数の切り込み部を設ける際に夫々切り込み部の幅
や深さを異ならせてもよい。それによりある試料を固定
する際に、その試料の大きさや厚さから判断して最も好
ましい切り込み部を選び、固定することができる。It is needless to say that the present embodiment is not limited to the above embodiments, and various configurations can be made without departing from the spirit of the invention. For example, when a plurality of notches are provided on the same sample stage, the notches may have different widths and depths. Accordingly, when fixing a certain sample, it is possible to select and fix the most preferable cut portion by judging from the size and thickness of the sample.
【００２０】また、複数の切り込み部の側面の傾きを互
いに異ならせ、それに合わせて複数の試料の固定する角
度を互いに異ならせてもよい。それにより垂直に立てた
試料と斜めに傾けた試料とを同一の試料台で観察するこ
とができる。Further, the inclinations of the side surfaces of the plurality of cut portions may be different from each other, and the angles at which the plurality of samples are fixed may be different from each other accordingly. As a result, it is possible to observe the vertically standing sample and the obliquely tilted sample on the same sample stand.
【００２１】尚、本発明の試料台は、従来の表面観察に
も使用することができるのはいうまでもない。Needless to say, the sample stage of the present invention can also be used for conventional surface observation.
【００２２】[0022]
【発明の効果】以上説明したように、本発明の試料台を
用いることにより、以下の効果を有する。As described above, the use of the sample table of the present invention has the following effects.
【００２３】シリコンウエハ等、サンプルの厚さがうす
い場合でも、該サンプルを垂直若しくは所望の角度傾け
て試料台に接着させるのが容易になり、作業時間も大幅
に短縮される。Even when the thickness of the sample such as a silicon wafer is thin, it is easy to adhere the sample to the sample stage vertically or at a desired angle, and the working time is greatly reduced.
【００２４】カーボン等導電性のある接着剤により、観
察試料を立てて試料台に張り付ける際、接着剤が少量で
すみこれにより試料汚染、ＳＥＭ鏡筒内汚染等の問題が
生じにくくなる。When an observation sample is erected and attached to a sample stand by a conductive adhesive such as carbon, a small amount of the adhesive is used, and problems such as sample contamination and SEM lens barrel contamination are less likely to occur.
【００２５】バネ等の試料を押さえるための治具を使う
必要もなくなり、バネの力による試料破損の問題もなく
なる。There is no need to use a jig such as a spring for holding the sample, and there is no problem of sample damage due to the force of the spring.
【００２６】試料台表面に形成される切込部に試料の一
部が入るので、従来よりも切り出す試料の大きさを大き
くすることができ、切り出し作業が容易になる。Since a part of the sample is inserted in the cut portion formed on the surface of the sample table, the size of the sample to be cut can be increased as compared with the conventional case, and the cutting work becomes easy.
【００２７】切り込み部を複数個設けることにより、複
数の試料の断面観察を同一試料台で行なうことが可能と
なり、作業効率アップにつながる。By providing a plurality of cut portions, it becomes possible to observe the cross-sections of a plurality of samples on the same sample stand, which leads to an improvement in work efficiency.
【図１】本発明の試料台の実施例を示す図FIG. 1 is a diagram showing an embodiment of a sample table of the present invention.
【図２】本発明の試料台の他の実施例を示す図FIG. 2 is a diagram showing another embodiment of the sample table of the present invention.
【図３】本発明の試料台の他の実施例を示す図FIG. 3 is a view showing another embodiment of the sample table of the present invention.
１ 切り込み部 ２ 試料台表面 ３ 試料 ４ カーボンペースト 1 Notch 2 Surface of sample stand 3 Sample 4 Carbon paste
Claims (5)
料の少なくとも一部を差し込むための切り込み部を設け
たことを特徴とする走査電子顕微鏡用試料台。1. A sample stage for a scanning electron microscope, wherein a notch for inserting at least a part of the sample is provided on the surface of the sample stage made of a conductive material.
数個設けたことを特徴とする特許請求の範囲第１項記載
の走査電子顕微鏡用試料台。2. The sample stage for a scanning electron microscope according to claim 1, wherein a plurality of the cutouts are provided on the surface of the sample stage.
ことを特徴とする特許請求の範囲第１又は２項記載の走
査電子顕微鏡用試料台。3. The sample stage for a scanning electron microscope according to claim 1, wherein the cut portion has a rectangular cross-sectional shape.
を特徴とする特許請求の範囲第１、２又は３項記載の走
査電子顕微鏡用試料台。4. The sample stage for a scanning electron microscope according to claim 1, 2, or 3, wherein the side surface of the cut portion is inclined.
状の少なくとも一方が互いに異なることを特徴とする特
許請求の範囲第２項記載の走査電子顕微鏡用試料台。5. The sample stage for a scanning electron microscope according to claim 2, wherein at least one of size and shape of the plurality of notches is different from each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5207828A JPH0765767A (en) | 1993-08-23 | 1993-08-23 | Sample mount for scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5207828A JPH0765767A (en) | 1993-08-23 | 1993-08-23 | Sample mount for scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0765767A true JPH0765767A (en) | 1995-03-10 |
Family
ID=16546195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5207828A Withdrawn JPH0765767A (en) | 1993-08-23 | 1993-08-23 | Sample mount for scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0765767A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003346693A (en) * | 2002-05-22 | 2003-12-05 | Dainippon Printing Co Ltd | Sample carrier and sample observing method |
| CN107437488A (en) * | 2017-07-24 | 2017-12-05 | 武汉华星光电技术有限公司 | A kind of focused ion beam microscope board |
-
1993
- 1993-08-23 JP JP5207828A patent/JPH0765767A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003346693A (en) * | 2002-05-22 | 2003-12-05 | Dainippon Printing Co Ltd | Sample carrier and sample observing method |
| CN107437488A (en) * | 2017-07-24 | 2017-12-05 | 武汉华星光电技术有限公司 | A kind of focused ion beam microscope board |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20001031 |