JPH0763518A - Device and method for measuring length - Google Patents
Device and method for measuring lengthInfo
- Publication number
- JPH0763518A JPH0763518A JP21670193A JP21670193A JPH0763518A JP H0763518 A JPH0763518 A JP H0763518A JP 21670193 A JP21670193 A JP 21670193A JP 21670193 A JP21670193 A JP 21670193A JP H0763518 A JPH0763518 A JP H0763518A
- Authority
- JP
- Japan
- Prior art keywords
- light
- measurement
- image
- subject
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、物体の長さ測定装置に
係り、より詳細には光切断法を用いてプリント基板上の
微小対象物の高さを計測する高さ計測装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an object length measuring device, and more particularly to a height measuring device for measuring the height of a minute object on a printed circuit board by using a light cutting method.
【０００２】近年の半導体デバイス及び製造技術の進展
に伴って素子の微細化プロセスが進歩し、微小な大きさ
の対象物の高さを精度よく高速で計測する必要が出てき
た。例えば、ＬＳＩチップのＡｌ線上に形成されるバン
プの高さや、プリント基板への微小実装部品の装着状況
を、高さによって検査するといったことが必要となって
いる。With the recent progress of semiconductor devices and manufacturing techniques, the miniaturization process of elements has advanced, and it has become necessary to measure the height of a target having a minute size with high accuracy and at high speed. For example, it is necessary to inspect the height of the bumps formed on the Al lines of the LSI chip and the mounting status of the minute mounting components on the printed circuit board by the height.
【０００３】特にＬＳＩのＡｌ線上に形成されるバンプ
は、その数が多く、それらを検査するために、個々のバ
ンプの高さを高速且つ正確に計測する高さ計測装置が要
望されている。In particular, the number of bumps formed on the Al line of an LSI is large, and in order to inspect them, a height measuring device for measuring the height of each bump at high speed and accurately is required.
【０００４】[0004]
【従来の技術】光切断法においては、光軸と直交する断
面形状が帯状もしくは線状である測定光を測定対象物に
投射し、測定対象物の表面で反射された測定光と、測定
基準面で反射された測定光とをテレビカメラ等の画像合
成装置によって検出する。その後、当該測定光の元の形
状からの変形量、測定光の倍率および幾何学的配置から
測定対象物の形状を算出する。2. Description of the Related Art In the optical cutting method, a measuring light having a band-shaped or linear cross-sectional shape orthogonal to the optical axis is projected onto a measuring object, and the measuring light reflected on the surface of the measuring object and a measuring reference. The measuring light reflected on the surface is detected by an image synthesizing device such as a television camera. Then, the shape of the measurement object is calculated from the deformation amount of the measurement light from the original shape, the magnification of the measurement light, and the geometrical arrangement.
【０００５】従来の光切断法を利用した物体の高さ計測
の原理を図４に示す。図４において、光源１から発生し
た光は、スリット２によって光軸に直交する断面形状が
帯状もしくは線状の光となり、レンズ３によって集光さ
れ、測定対象物４に投射される。この時の光は、測定対
象物４上の高さを測定すべき測定面（Ｐ1 ）と基準面
（Ｐ2 ）の両方に照射されるように投射される。測定対
象物４上の測定面（Ｐ1）と基準面（Ｐ2 ）からの反射
光は、レンズ６によって拡大され、画像合成装置７によ
って映像信号に変換される。FIG. 4 shows the principle of measuring the height of an object using the conventional optical cutting method. In FIG. 4, the light generated from the light source 1 is converted into light having a band shape or a linear shape in a cross section orthogonal to the optical axis by the slit 2, condensed by the lens 3, and projected onto the measurement target 4. The light at this time is projected so as to irradiate both the measurement surface (P 1 ) and the reference surface (P 2 ) whose height on the measurement object 4 is to be measured. The reflected light from the measurement plane (P 1 ) and the reference plane (P 2 ) on the measurement object 4 is enlarged by the lens 6 and converted into a video signal by the image synthesizing device 7.
【０００６】以上の従来技術を用いてプリント基板上の
微小部品の高さを測定する場合には、当該微小部品の測
定面（Ｐ1 ）と基準面（Ｐ2 ）の両方に照射されるよう
に測定光を投射するために、プリント基板または投射系
の位置を微調整する方法を採っていた。When measuring the height of a minute component on a printed circuit board by using the above-mentioned conventional technique, both the measuring surface (P 1 ) and the reference surface (P 2 ) of the minute component should be irradiated. In order to project the measurement light onto the substrate, a method of finely adjusting the position of the printed board or the projection system has been adopted.
【０００７】[0007]
【発明が解決しようとする課題】しかし、図５に示すよ
うに、従来の方法における投射系の位置を測定対象物４
の図面上真上方向とし、測定光を測定対象物４に投射し
た場合には、測定点ごとのレンズ６に対する距離が異な
り、レンズ６の特性として焦点深度Ｌが必要となる。こ
のため、鮮明な画像が得られないという問題点が生じ
る。However, as shown in FIG. 5, the position of the projection system in the conventional method is measured by the object 4 to be measured.
When the measurement light is projected directly onto the measurement target 4 in the above drawing, the distance to the lens 6 differs for each measurement point, and the focal depth L is required as a characteristic of the lens 6. Therefore, there is a problem that a clear image cannot be obtained.
【０００８】また、高さが不明な微小測定対象物の場合
には、図６（ａ）に示すように、微小測定対象物４を位
置決めしたにも拘らず、測定光が微小測定対象物４に照
射されない場合が生じる。この場合には、図６（ｂ）に
示すように、微小測定対象物４又は測定光を微小距離だ
け移動させ、測定光が当該微小測定対象物４の測定面
（Ｐ1 ）と基準面（Ｐ2 ）の両方に投射されるように微
調整しなければならず、測定に多大な時間を必要として
いた。Further, in the case of a minute measurement object whose height is unknown, as shown in FIG. 6A, the measurement light is emitted from the minute measurement object 4 despite the positioning of the minute measurement object 4. Occasionally, it will not be irradiated. In this case, as shown in FIG. 6B, the minute measurement object 4 or the measurement light is moved by a minute distance, and the measurement light causes the measurement surface (P 1 ) and the reference plane (P 1 ) of the minute measurement object 4 to move. must be finely adjusted so as to be projected on both the P 2), it has required a great deal of time to measure.
【０００９】そこで、本発明の目的は、高さが不明な微
小測定対象物の高さを高速・正確に測定し得る長さ測定
装置及び測定方法を提供することにある。Therefore, an object of the present invention is to provide a length measuring device and a measuring method capable of accurately and quickly measuring the height of a minute measuring object whose height is unknown.
【００１０】[0010]
【課題を解決するための手段】上記課題を解決するため
に、請求項１に記載の発明は、光軸に直交する断面形状
が帯状若しくは線状である測定光を照射する照射手段
（Ｓ）と、測定対象物（４）及び前記測定光の照射位置
の相対的な位置を、前記測定光の光像の長手方向に垂直
な方向に移動させることにより、前記測定対象物（４）
を含む測定領域で前記測定光を走査させる走査手段
（５）と、前記測定領域からの前記測定光を受光し、所
定時間の間蓄積して蓄積画像を形成する画像形成手段
（Ｉ）とを備えて構成する。In order to solve the above-mentioned problems, the invention according to claim 1 is to irradiate with a measuring light having a band-shaped or linear cross-sectional shape orthogonal to the optical axis. And the relative position of the measurement object (4) and the irradiation position of the measurement light in the direction perpendicular to the longitudinal direction of the optical image of the measurement light, whereby the measurement object (4)
A scanning unit (5) for scanning the measurement light in a measurement region including the image forming unit and an image forming unit (I) for receiving the measurement light from the measurement region and accumulating it for a predetermined time to form an accumulated image. Be prepared and configured.
【００１１】また、請求項２に記載の発明は、光軸に直
交する断面形状が帯状もしくは線状である測定光を照射
する照射工程と、測定対象物（４）及び前記測定光の照
射位置の相対的な位置を、前記測定光の光像の長手方向
に垂直な方向に移動させることにより、前記測定対象物
（４）を含む測定領域で前記測定光を走査する走査工程
と、前記測定領域からの前記測定光を受光し、所定時間
の間蓄積して蓄積画像を形成する画像形成工程とを備え
て構成する。The invention according to claim 2 further comprises an irradiation step of irradiating the measuring light having a band-shaped or linear sectional shape orthogonal to the optical axis, the measuring object (4) and the irradiation position of the measuring light. A scanning step of scanning the measurement light in a measurement region including the measurement object (4) by moving the relative position of the measurement light in a direction perpendicular to the longitudinal direction of the optical image of the measurement light; An image forming step of receiving the measurement light from the area and accumulating it for a predetermined time to form an accumulated image.
【００１２】[0012]
【作用】請求項１に記載の発明によれば、照射手段
（Ｓ）は、光軸に直交する断面形状が帯状もしくは線状
の測定光を照射する。According to the first aspect of the invention, the irradiation means (S) irradiates the measuring light having a strip-shaped or linear sectional shape orthogonal to the optical axis.
【００１３】これと並行して走査手段（５）は、測定対
象物（４）及び測定光の照射位置の相対的な位置を、前
記測定光の光像の長手方向に垂直な方向に移動させるこ
とにより、測定対象物（４）を含む測定領域で測定光を
走査させる。In parallel with this, the scanning means (5) moves the relative position of the measuring object (4) and the irradiation position of the measuring light in a direction perpendicular to the longitudinal direction of the optical image of the measuring light. Thus, the measurement light is scanned in the measurement region including the measurement object (4).
【００１４】これにより、画像形成手段（Ｉ）は、測定
領域からの測定光を受光し、所定時間の間蓄積して蓄積
画像を形成する。また、請求項２に記載の発明によれ
ば、照射工程において光軸に直交する断面形状が帯状も
しくは線状の測定光を照射し、これと並行して、走査工
程において測定対象物（４）及び測定光の照射位置の相
対的な位置を、前記測定光の光像の長手方向に垂直な方
向に移動させることにより、測定対象物（４）を含む測
定領域で測定光を走査する。As a result, the image forming means (I) receives the measurement light from the measurement area and accumulates it for a predetermined time to form an accumulated image. Further, according to the invention of claim 2, in the irradiation step, the measuring light having a band-shaped or linear sectional shape orthogonal to the optical axis is irradiated, and in parallel with this, the measurement object (4) is irradiated in the scanning step. By moving the relative position of the irradiation position of the measurement light in a direction perpendicular to the longitudinal direction of the optical image of the measurement light, the measurement region including the measurement object (4) is scanned with the measurement light.
【００１５】その後、画像形成工程において、測定領域
からの測定光の反射光を受光し、所定時間の間蓄積して
蓄積画像を形成する。したがって、以上のいずれの発明
においても、走査している測定光を所定時間の間蓄積す
ることにより得られる蓄積画像に基づいて長さを測定す
ることができ、測定対象物の長さが不明の場合等でも走
査範囲内にあれば確実に測定することができるととも
に、測定対象物と測定光の位置を測定前に厳密に定める
必要がないため高速で測定を行うことができる。Then, in the image forming step, the reflected light of the measuring light from the measuring region is received and accumulated for a predetermined time to form an accumulated image. Therefore, in any of the above inventions, the length can be measured based on the accumulated image obtained by accumulating the scanning measurement light for a predetermined time, and the length of the measurement target is unknown. Even in such cases, it is possible to perform reliable measurement if it is within the scanning range, and it is possible to perform high-speed measurement because it is not necessary to strictly determine the positions of the measurement object and the measurement light before measurement.
【００１６】[0016]
【実施例】次に、本発明の好適な実施例を図面に基づい
て説明する。 （Ｉ）第１実施例 図１に示すように本実施例は、単波長の光、例えばレー
ザー光を発生する光源１と、光を帯状もしくは線状の断
面形状にするスリット２と、光を移動台５上に集光させ
るレンズ３によって構成される、帯状もしくは線状の断
面形状を持つ測定光を測定対象物４上に投射する照射手
段として機能する投射系Ｓと、測定中に測定対象物４を
移動させ、測定光を走査させるための移動台５と、受光
面の入射光を電気信号に変換する光電変換器を含み、入
射光を一定の露光時間蓄積して測定対象物４からの反射
光を映像化するための画像形成手段として機能する映像
化装置Ｉで構成されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, preferred embodiments of the present invention will be described with reference to the drawings. (I) First Embodiment As shown in FIG. 1, in this embodiment, a light source 1 for generating light of a single wavelength, for example, a laser light, a slit 2 for making the light into a band-like or linear cross-sectional shape, and light A projection system S configured by a lens 3 for condensing light on a moving table 5 and serving as an irradiation unit that projects measurement light having a strip-shaped or linear cross-sectional shape onto a measurement target 4, and a measurement target during measurement. The moving table 5 for moving the object 4 to scan the measuring light, and the photoelectric converter for converting the incident light on the light receiving surface into an electric signal are accumulated from the measuring object 4 by accumulating the incident light for a certain exposure time. The image forming device I functions as an image forming unit for forming an image of the reflected light.
【００１７】ここで、映像化装置Ｉは、測定対象物４か
らの反射光全体を視野の中に収めて拡大するレンズ６
と、画像合成装置７によって構成されている。移動台５
上には微小測定対象物４が搭載されている。Here, the imaging device I has a lens 6 for enlarging the entire reflected light from the object 4 to be measured within the field of view.
And the image synthesizing device 7. Mobile stand 5
The minute measurement object 4 is mounted on the top.
【００１８】また、映像化装置Ｉにおいて、レンズ６は
レンズを通過した反射光が画像合成装置７の受光面上に
結像するように配置されている。画像合成装置７は、例
えばＣＣＤカメラのような光電変換装置と、一定の露光
時間開放となるシャッターとを備えている。In the imaging device I, the lens 6 is arranged so that the reflected light passing through the lens forms an image on the light receiving surface of the image synthesizing device 7. The image synthesizing device 7 includes, for example, a photoelectric conversion device such as a CCD camera and a shutter that opens a fixed exposure time.
【００１９】次に、図１及び図２を用いて動作を説明す
る。図１において、光源１からの光はスリット２によっ
て、その断面形状が帯状もしくは線状の測定光となりレ
ンズ３によって移動台５上の基準面に集光される。そし
て、測定光の一部は移動台５により図面上右方向に移動
されている測定対象物４に投射される。その後、測定対
象物４及び移動台（基準面）５上からの反射光は、レン
ズ６によって拡大され画像合成装置７の受光面に集光さ
れて映像化される。Next, the operation will be described with reference to FIGS. In FIG. 1, the light from the light source 1 is measured by the slit 2 into a measuring light having a band-shaped or linear sectional shape, and is condensed by the lens 3 on the reference surface on the movable table 5. Then, a part of the measurement light is projected by the moving table 5 onto the measurement object 4 which is moved rightward in the drawing. After that, the reflected light from the measurement object 4 and the movable table (reference surface) 5 is magnified by the lens 6 and condensed on the light receiving surface of the image synthesizing device 7 to be visualized.
【００２０】この場合において、測定対象物４上に測定
光が投射されていない状態（測定対象物８または測定対
象物９の位置）では、測定光は移動台５（基準面）上で
反射されて、反射光の形状は図２（ａ）または図２
（ｃ）に示すように、測定光と同じく帯状若しくは線状
となる。In this case, when the measurement light is not projected on the measurement object 4 (position of the measurement object 8 or the measurement object 9), the measurement light is reflected on the movable table 5 (reference surface). The shape of the reflected light is as shown in FIG.
As shown in (c), it becomes strip-shaped or linear like the measurement light.
【００２１】これに対し、測定対象物４上に測定光の一
部が投射されている状態（測定対象物４の位置）では、
当該測定対象物４からの反射光と移動台５からの反射光
とは測定対象物４の高さに比例して反射位置が異なり、
反射光の形状は図２（ｂ）に示すように、測定対象物４
の高さに比例した量だけ帯状若しくは線状の測定光の一
部がずれた反射光となる。On the other hand, in the state where a part of the measuring light is projected on the measuring object 4 (position of the measuring object 4),
The reflected light from the measurement object 4 and the reflection light from the movable table 5 have different reflection positions in proportion to the height of the measurement object 4,
The shape of the reflected light is as shown in FIG.
A portion of the strip-shaped or linear measurement light is deviated by an amount proportional to the height of the reflected light.
【００２２】このとき、画像合成装置７は、入射光を一
定の露光時間蓄積するため、測定対象物に測定光が投射
される前の位置（測定対象物８の位置）における反射光
の画像（図２（ａ))と、測定光が投射されている位置
（測定対象物４の位置）における反射光の画像（図２
（ｂ))と、測定光が投射された後の位置（測定対象物９
の位置）の反射光の画像（図２（ｃ))とが一つの画像と
して処理される（図２（ｄ))。At this time, since the image synthesizing device 7 accumulates the incident light for a certain exposure time, the image of the reflected light at the position (the position of the measuring object 8) before the measuring light is projected onto the measuring object ( 2A) and an image of the reflected light at the position where the measurement light is projected (the position of the measurement object 4) (FIG. 2A).
(B)) and the position after the measurement light is projected (measurement object 9
The image of the reflected light at the position (FIG. 2 (c)) is processed as one image (FIG. 2 (d)).
【００２３】ここで、図２（ｄ）中の符号Ｈで示される
長さは、基準面からの測定対象物の高さに比例した長さ
となる。したがって、図１において、測定光に基準面に
対する入射角をθ、画像合成装置７における倍率をＭと
し、測定対象物の実際の高さをｈとすると、ｈ＝Ｍ×Ｈ
sinθとなる。よって、画像合成装置７の画面上の長さ
Ｈから、微小測定対象物の高さｈを求めることができ
る。Here, the length indicated by the symbol H in FIG. 2D is a length proportional to the height of the object to be measured from the reference surface. Therefore, in FIG. 1, when the incident angle of the measurement light with respect to the reference plane is θ, the magnification in the image synthesizing device 7 is M, and the actual height of the measurement object is h, h = M × H
sin θ. Therefore, the height h of the minute measurement object can be obtained from the length H on the screen of the image synthesizing device 7.
【００２４】以上のように、本実施例によれば、移動す
る微小測定対象物からの反射光を一つの画像に合成して
測定を行うため、微小測定対象物の高さが不明であった
り、微小測定対象物の位置にばらつきがあるような場合
等であっても、微小測定対象物の高さを高速かつ正確に
測定できる。 （II）第２実施例 図３に示すように本実施例は、単波長の光、例えばレー
ザー光を発生する光源１と、光を帯状もしくは線状の断
面形状にするスリット２と、光を移動台５上に集光させ
るレンズ３によって構成される、帯状もしくは線状の断
面形状を持つ測定光を測定対象物４上に投射する照射手
段として機能する投射系Ｓと、受光面の入射光を電気信
号に変換する光電変換器７を含み、その光電変換器７が
入射光を一定の露光時間蓄積し、測定対象物４からの反
射光を映像化するための画像形成手段として機能する映
像化装置Ｉとを備えている。As described above, according to the present embodiment, since the reflected light from the moving minute measuring object is combined into one image for the measurement, the height of the minute measuring object is unknown. Even if the position of the minute measurement target varies, the height of the minute measurement target can be measured accurately at high speed. (II) Second Embodiment As shown in FIG. 3, in this embodiment, a light source 1 for generating a single wavelength light, for example, a laser beam, a slit 2 for converting the light into a band-shaped or linear sectional shape, and a light A projection system S, which is composed of a lens 3 for condensing light on a movable table 5, and which functions as an irradiation unit that projects measurement light having a strip-shaped or linear cross-sectional shape onto the measurement target 4, and incident light on the light-receiving surface. Image that functions as an image forming means for converting incident light into an electric signal and accumulating incident light for a certain exposure time, and visualizing reflected light from the measuring object 4 And a chemical conversion device I.
【００２５】ここで、映像化装置Ｉは、測定対象物４か
らの反射光全体を視野の中に収めて拡大するレンズ６
と、画像合成装置７によって構成されている。本実施例
における投射系は、第１実施例と異なり、測定対象物４
を移動させるのではなく、測定対象物４に投射する測定
光が、投射角度一定のまま当該測定光の光軸に直交し、
且つ測定光の断面の長手方向に直角な面上を移動する。
その他の投射系の構成は第１実施例と同様であるので説
明は省略する。Here, the imaging device I has a lens 6 for enlarging the entire reflected light from the object to be measured 4 within the field of view.
And the image synthesizing device 7. The projection system in this embodiment is different from the projection system in the first embodiment in that
Instead of moving, the measurement light projected on the measurement object 4 is orthogonal to the optical axis of the measurement light while the projection angle is constant.
Further, the measurement light moves on a plane perpendicular to the longitudinal direction of the cross section.
The rest of the configuration of the projection system is the same as that of the first embodiment, so the explanation is omitted.
【００２６】また、映像化装置Ｉの構成についても第１
実施例と同様であるので、説明は省略する。次に、図３
を用いて動作を説明する。Further, the structure of the imaging apparatus I is also the first.
The description is omitted because it is the same as the embodiment. Next, FIG.
The operation will be described using.
【００２７】図３において、光源１からの光はスリット
２によってその断面形状が帯状もしくは線状となりレン
ズ３によって集光され、測定対象物４に投射される。そ
の後、投射角度一定のまま当該測定光の光軸に直交し、
且つ測定光の断面の長手方向に直交する面上を移動され
る。In FIG. 3, the light from the light source 1 has a band-shaped or linear cross-sectional shape by the slit 2, is condensed by the lens 3, and is projected onto the measurement object 4. After that, orthogonal to the optical axis of the measurement light while keeping the projection angle constant,
Further, the measurement light is moved on a plane orthogonal to the longitudinal direction of the cross section.
【００２８】移動された測定光が、測定対象物４を含む
測定領域で走査された結果、測定対象物４に測定光が投
射された場合の反射光と、それ以外の反射光が、共に映
像化装置Ｉのレンズ６によって拡大され、画像合成装置
７の受光面に集光された後、画像合成装置７によって一
つの画像として形成される。As a result of the moved measuring light being scanned in the measuring area including the measuring object 4, the reflected light when the measuring light is projected on the measuring object 4 and the other reflected light are both imaged. The image is enlarged by the lens 6 of the image forming device I, condensed on the light receiving surface of the image combining device 7, and then formed as one image by the image combining device 7.
【００２９】したがって、形成された画像上の測定光の
反射光のずれから第１実施例に記載した原理と同様の原
理により、微小測定対象物４の高さを求めることができ
る。以上のように、本実施例によれば、微小測定対象物
４に投射する測定光を移動させ、微小測定対象物４上に
投射される場合の画像と、微小測定対象物４上に測定光
が投射されていない場合の画像を一つの画像に合成でき
るため、高さが不明であるか、あるいはその位置にばら
つきがある等の場合であっても微小測定対象物４の高さ
を高速かつ正確に測定できる。Therefore, the height of the minute measuring object 4 can be obtained from the deviation of the reflected light of the measuring light on the formed image according to the same principle as that described in the first embodiment. As described above, according to the present embodiment, the measurement light projected on the minute measurement object 4 is moved, and the image when it is projected on the minute measurement object 4 and the measurement light on the minute measurement object 4 are measured. Since the image when no image is projected can be combined into one image, the height of the minute measurement object 4 can be set at high speed even if the height is unknown or the position varies. Can measure accurately.
【００３０】したがって、例えばプリント基板上のバン
プ等のような、微小測定対象物の高さを高速且つ正確に
測定することができる。Therefore, the height of a minute measuring object such as a bump on a printed circuit board can be measured at high speed and accurately.
【００３１】[0031]
【発明の効果】以上説明したように、請求項１又は請求
項２に記載の発明によれば、測定対象物及び光軸に直交
する断面形状が帯状若しくは線状の測定光の照射位置の
相対的な位置を、測定光の光像の長手方向に垂直な方向
に移動させることにより測定光を走査させるとともに、
この測定光を受光して所定時間の間蓄積して蓄積画像を
形成するので、測定対象物の長さ（高さ）が不明の場合
等でも走査範囲内にあれば確実に測定することができ
る。As described above, according to the invention described in claim 1 or 2, relative to the measurement object and the irradiation position of the measurement light whose cross-sectional shape orthogonal to the optical axis is strip or linear. While moving the target position in the direction perpendicular to the longitudinal direction of the optical image of the measurement light, the measurement light is scanned,
Since this measurement light is received and accumulated for a predetermined time to form an accumulated image, even if the length (height) of the object to be measured is unknown, it is possible to reliably perform measurement if it is within the scanning range. .
【００３２】また、測定対象物と測定光の位置を測定前
に厳密に定める必要がないため高速で測定を行うことが
できる。これにより、微細構造を持つ半導体装置の性能
向上及び歩留率向上を促進する効果を有する。Further, since it is not necessary to precisely determine the positions of the measuring object and the measuring light before the measurement, the measurement can be performed at high speed. This has the effect of promoting performance improvement and yield improvement of the semiconductor device having a fine structure.
【図１】本発明の基本構成及び第１実施例を示す図であ
る。FIG. 1 is a diagram showing a basic configuration and a first embodiment of the present invention.
【図２】本発明における画像合成機能を示す図である。FIG. 2 is a diagram showing an image synthesizing function in the present invention.
【図３】本発明の第２実施例を示す図である。FIG. 3 is a diagram showing a second embodiment of the present invention.
【図４】光切断法による高さ計測の原理を示す図であ
る。FIG. 4 is a diagram showing a principle of height measurement by a light section method.
【図５】光切断法による高さ計測を示す図（１）であ
る。FIG. 5 is a diagram (1) showing height measurement by a light section method.
【図６】光切断法による高さ計測を示す図（２）であ
る。FIG. 6 is a diagram (2) showing height measurement by a light section method.
１…光源 ２…スリット ３…レンズ ４…微小測定対象物 ５…移動台 ６…レンズ ７…画像合成装置 ８、９…微小測定対象物 Ｐ1 …測定面 Ｐ2 …基準面 Ｈ…合成された画面上の微小測定対象物の高さ Ｓ…投射系 Ｉ…映像化装置 θ…測定光の基準面に対する入射角 ｈ…測定対象物の実際の高さ1 ... light source 2 ... slit 3 ... lens 4 ... is small measured object 5 ... moving platform 6 ... lens 7 ... image synthesizer 8,9 ... small measured object P 1 ... measurement surface P 2 ... reference plane H ... Synthesis Height of minute measurement object on screen S ... Projection system I ... Imaging device θ ... Incident angle of measurement light with respect to reference plane h ... Actual height of measurement object
Claims (2)
線状である測定光を照射する照射手段（Ｓ）と、 測定対象物（４）及び前記測定光の照射位置の相対的な
位置を、前記測定光の光像の長手方向に垂直な方向に移
動させることにより、前記測定対象物（４）を含む測定
領域で前記測定光を走査させる走査手段（５）と、 前記測定領域からの前記測定光を受光し、所定時間の間
蓄積して蓄積画像を形成する画像形成手段（Ｉ）と、 を備えたことを特徴とする長さ測定装置。1. A relative position of an irradiation means (S) for irradiating a measuring light whose cross-sectional shape orthogonal to the optical axis is strip-shaped or linear and a measuring object (4) and an irradiation position of the measuring light. A scanning unit (5) for scanning the measurement light in a measurement region including the measurement object (4) by moving the measurement light in a direction perpendicular to the longitudinal direction of the optical image of the measurement light; An image forming unit (I) for receiving the measurement light and accumulating it for a predetermined time to form an accumulated image.
線状である測定光を照射する照射工程と、 測定対象物（４）及び前記測定光の照射位置の相対的な
位置を、前記測定光の光像の長手方向に垂直な方向に移
動させることにより、前記測定対象物（４）を含む測定
領域で前記測定光を走査する走査工程と、 前記測定領域からの前記測定光を受光し、所定時間の間
蓄積して蓄積画像を形成する画像形成工程と、 を備えることを特徴とする長さ測定方法。2. An irradiation step of irradiating a measurement light whose cross-sectional shape orthogonal to an optical axis is a strip or a line, and a relative position of a measurement object (4) and an irradiation position of the measurement light are measured by the measurement. A scanning step of scanning the measurement light in a measurement region including the measurement object (4) by moving the measurement light in a direction perpendicular to the longitudinal direction of the light image, and receiving the measurement light from the measurement region. An image forming step of forming an accumulated image by accumulating for a predetermined time, and a length measuring method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21670193A JPH0763518A (en) | 1993-08-31 | 1993-08-31 | Device and method for measuring length |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21670193A JPH0763518A (en) | 1993-08-31 | 1993-08-31 | Device and method for measuring length |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0763518A true JPH0763518A (en) | 1995-03-10 |
Family
ID=16692570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21670193A Withdrawn JPH0763518A (en) | 1993-08-31 | 1993-08-31 | Device and method for measuring length |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0763518A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014119361A (en) * | 2012-12-18 | 2014-06-30 | Mitsubishi Electric Corp | Surface defect detection device and surface defect detection method |
-
1993
- 1993-08-31 JP JP21670193A patent/JPH0763518A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014119361A (en) * | 2012-12-18 | 2014-06-30 | Mitsubishi Electric Corp | Surface defect detection device and surface defect detection method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3158446B2 (en) | Surface position detecting device, surface position detecting method, exposure apparatus, exposure method, and semiconductor manufacturing method | |
| US4955062A (en) | Pattern detecting method and apparatus | |
| EP0148477A2 (en) | Exposure apparatus and method of aligning exposure mask with workpiece | |
| CN101114134A (en) | Alignment method and micro-device manufacturing method used for shadow cast scan photo-etching machine | |
| US4614432A (en) | Pattern detector | |
| US4952970A (en) | Autofocusing system for a projecting exposure apparatus | |
| JPS6286819A (en) | Position detection method | |
| JPH04211110A (en) | Projection aligner and aligning method | |
| JP2005294474A (en) | Position measuring device, position measuring method and aligner | |
| JPH0616480B2 (en) | Reduction projection type alignment method and apparatus | |
| JPH0763518A (en) | Device and method for measuring length | |
| EP0179438B1 (en) | A projection aligner of a lithographic system | |
| US5247329A (en) | Projection type exposure method and apparatus | |
| JP3376219B2 (en) | Surface position detecting device and method | |
| JPH09283423A (en) | Aligner and exposing method | |
| JP3667009B2 (en) | Exposure apparatus and device manufacturing method using the same | |
| JPH07151514A (en) | Superposition accuracy measuring method and measuring device | |
| JPH0640539B2 (en) | Pattern detection method and projection optical apparatus using the method | |
| KR100221022B1 (en) | Apparatus for optical lithography | |
| JPH11121351A (en) | Method for adjusting beam in focal position detector | |
| JPH104053A (en) | Surface position detector and manufacture of device thereby | |
| JP2602417B2 (en) | Projection type exposure equipment | |
| JP3255301B2 (en) | Position detection method and device | |
| JPH0564450B2 (en) | ||
| JP3203853B2 (en) | Inspection device for mounted printed circuit boards |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20001031 |