JPH0755600A - Magnetostrictive type torque sensor - Google Patents
Magnetostrictive type torque sensorInfo
- Publication number
- JPH0755600A JPH0755600A JP22642793A JP22642793A JPH0755600A JP H0755600 A JPH0755600 A JP H0755600A JP 22642793 A JP22642793 A JP 22642793A JP 22642793 A JP22642793 A JP 22642793A JP H0755600 A JPH0755600 A JP H0755600A
- Authority
- JP
- Japan
- Prior art keywords
- torque
- coil
- magnetostrictive
- torque sensor
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁性体の逆磁歪効果を利
用した非接触式トルクセンサに関するもので、とくに、
ロボット、工作機械などに使用するモータのトルクを検
出するトルクセンサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact type torque sensor utilizing the inverse magnetostrictive effect of a magnetic material, and
The present invention relates to a torque sensor that detects the torque of a motor used in robots, machine tools, and the like.
【０００２】[0002]
【従来の技術】回転駆動系を有するロボットやマニピュ
レータおよび工作機械の制御に、非接触でかつ小型のト
ルクセンサが要求されている。このようなトルクセンサ
には種々の方式があるが、非接触で小型化に有利な方式
としては磁歪式トルクセンサがある。これは、磁性体に
力が印加されると磁性体の透磁率が変わるという逆磁歪
効果を利用してトルク検出を行うものである。これは磁
歪合金材により発生する回転軸表面の透磁率の変化を回
転軸の周囲に一定ギャップを保って巻いてあるコイルま
たはコイルを巻いた磁気ヘッドのインピーダンス変化と
して検出する。このインピーダンスの変化をトルクに換
算して出力を発生する。また、磁歪効果を有する磁性体
を回転軸に取付けて上記と同様にトルクを計測するもの
がある（実開昭第６２−６２９４２号）。2. Description of the Related Art A non-contact and small torque sensor is required for controlling a robot having a rotary drive system, a manipulator, and a machine tool. There are various types of torque sensors, but a magnetostrictive torque sensor is a non-contact type that is advantageous for miniaturization. This is to detect torque by utilizing the inverse magnetostriction effect that the magnetic permeability of the magnetic body changes when a force is applied to the magnetic body. This detects a change in the magnetic permeability of the surface of the rotating shaft caused by the magnetostrictive alloy material as an impedance change of a coil wound around the rotating shaft with a constant gap or a magnetic head wound with the coil. This change in impedance is converted into torque to generate an output. Also, there is one in which a magnetic body having a magnetostrictive effect is attached to a rotary shaft and torque is measured in the same manner as described above (Japanese Utility Model Publication No. 62-62942).
【０００３】[0003]
【発明が解決しようとする課題】ところが、上述のよう
な磁歪式トルクセンサは何れも温度変化による出力のド
リフト量が大きいという問題があった。そこで、本発明
は簡便な温度測定信号を用いて補正することにより、温
度による出力変動の小さい磁歪式トルクセンサを提供す
ることを目的する。However, each of the magnetostrictive torque sensors as described above has a problem that the output drift amount due to a temperature change is large. Therefore, it is an object of the present invention to provide a magnetostrictive torque sensor having a small output fluctuation due to temperature, which is corrected by using a simple temperature measurement signal.
【０００４】[0004]
【課題を解決するための手段】上記問題を解決するた
め、本発明は加えられるトルクに対応して透磁率が変化
する磁歪材料が少なくとも表面に存在する回転軸と、磁
歪材料に磁場を加える励磁コイルおよびトルクに起因す
る磁歪材料の透磁率の変化を非接触で感知する検出コイ
ルからなるコイル対と、検出コイルから得られた電気信
号をトルクの大きさに変換するトルク変換回路からなる
磁歪式トルクセンサの回転軸は大きい径Ｄ1 と小さい径
Ｄ2 からなる異なった軸径を有し、コイル対を前記径の
大きい軸Ｄ1 の段差の端面から（Ｄ1 −Ｄ2 ）／２以内
の外周部に少なくとも１個、段差の端面から（Ｄ1 −Ｄ
2 ）／２以上離れた外周部に少なくとも１個を配置した
構成にしている。また、回転軸の大きい径の部分を力嵌
めによって固定装着され、磁歪材料が少なくとも表面に
存在する円筒状の力嵌め部材を用いてもよい。In order to solve the above problems, the present invention provides a rotating shaft having at least a surface of a magnetostrictive material whose magnetic permeability changes according to an applied torque, and an excitation for applying a magnetic field to the magnetostrictive material. Magnetostrictive system that consists of a coil pair consisting of a coil and a detection coil that senses changes in the permeability of the magnetostrictive material due to torque in a non-contact manner, and a torque conversion circuit that converts the electrical signal obtained from the detection coil into the magnitude of torque. The rotating shaft of the torque sensor has different shaft diameters consisting of a large diameter D 1 and a small diameter D 2 , and the coil pair is within (D 1 −D 2 ) / 2 from the end face of the step of the large diameter shaft D 1. At least one on the outer circumference of the step from the end face of the step (D 1 -D
2 ) At least one is arranged in the outer peripheral portion separated by ½ or more. Alternatively, a cylindrical force-fitting member in which a large-diameter portion of the rotating shaft is fixedly mounted by force-fitting and the magnetostrictive material is present on at least the surface may be used.
【０００５】[0005]
【作用】図２に原理図を示すように段差の端面位置から
（Ｄ1 −Ｄ2 ）／２以内の梨地部分ではトルクが伝達さ
れにくい特性がある。したがって、この部分に配置した
信号検出手段からは、トルクが印加されても出力が発生
しない。しかし、温度変化による出力のドリフトは発生
する。つまり、この検出手段は温度検出手段となる。一
方、（Ｄ1 −Ｄ2 ）／２以外の外周部に配置した信号検
出手段からの信号は実際にはトルク出力信号と温度によ
るドリフト値を加算した出力が発生する。すなわち、前
記二つの信号検出手段の出力の差動をとれば、その値は
温度変化による出力のドリフトのないトルク出力値とな
る。As shown in the principle diagram of FIG. 2, torque is less likely to be transmitted in the matte portion within (D 1 -D 2 ) / 2 from the end face position of the step. Therefore, no output is generated from the signal detection means arranged in this portion even if torque is applied. However, output drift due to temperature change occurs. That is, this detecting means becomes a temperature detecting means. On the other hand, a signal from the signal detecting means arranged on the outer peripheral portion other than (D 1 -D 2 ) / 2 actually produces an output obtained by adding the torque output signal and the drift value due to temperature. That is, if the outputs of the two signal detecting means are made differential, the value becomes a torque output value without output drift due to temperature change.
【０００６】[0006]
【実施例】以下、本発明を実施例に基づいて詳細に説明
する。 第１実施例 図１に本発明の第１実施例である磁歪式トルクセンサを
構成する断面図を示す。図において、１は回転軸、１１
は歪みが検出される大径部、３は励磁コイルと検出コイ
ルからなるトルク検出用のコイル対、４は同じく励磁コ
イルと検出コイルからなる温度補正用のコイル対であ
る。回転軸１はマルエージング鋼を機械加工により直径
がＤ1 の大径部１１と直径がＤ2 の小径部１２に作製し
たものである。この大径部１１の端面から（Ｄ1 −
Ｄ2 ）／２以内の外周部に温度補正用のコイル対４を配
置し、トルク検出用のコイル対３を（Ｄ1 −Ｄ2 ）／２
以外の外周部に配置してある。いま、周囲温度を変化さ
せてトルクの有無のそれぞれについて出力特性を測定し
た。結果を表１に示す。EXAMPLES The present invention will be described in detail below based on examples. First Embodiment FIG. 1 shows a sectional view of a magnetostrictive torque sensor according to a first embodiment of the present invention. In the figure, 1 is a rotating shaft, 11
Is a large-diameter portion in which strain is detected, 3 is a torque detecting coil pair including an exciting coil and a detecting coil, and 4 is a temperature correcting coil pair including an exciting coil and a detecting coil. The rotary shaft 1 is made of maraging steel by machining into a large diameter portion 11 having a diameter D 1 and a small diameter portion 12 having a diameter D 2 . From the end face of the large diameter portion 11 (D 1 −
The coil pair 4 for temperature correction is arranged on the outer peripheral portion within D 2 ) / 2, and the coil pair 3 for torque detection is (D 1 −D 2 ) / 2.
It is arranged on the outer peripheral portion other than. Now, the output characteristics were measured for each of the presence and absence of torque by changing the ambient temperature. The results are shown in Table 1.
【０００７】[0007]
【表１】 [Table 1]
【０００８】本発明の信号出力はトルク検出コイルのみ
の信号および温度検出コイルを（Ｄ1 −Ｄ2 ）／２以外
の位置に配置して補正を行ったトルク信号に比べ、温度
ドリフトが大幅に改善された事が分かる。 第２実施例 図３に本発明の第２実施例である磁歪式トルクセンサの
断面図を示す。図において、１はＳ４５Ｃからなる回転
軸、２はマルエージング鋼からなる回転軸１に焼き嵌め
により嵌合する力嵌め部材である。第１実施例と同じく
温度補正用のコイル対４およびトルク検出用のコイル対
３を配置し、周囲温度を変化させてトルクの有無のそれ
ぞれについて出力特性を測定した。結果を表１に示す。
本発明の信号出力はトルク検出コイルのみの信号および
温度検出コイルを（Ｄ1 −Ｄ2 ）／２以外の位置に配置
して補正を行ったトルク信号に比べ、温度ドリフト（信
号に対する変動の割合）が大幅に改善された事が分か
る。なお、本実施例は回転軸または力嵌め部材が磁歪材
料であるマルエージング鋼についてのみ述べたが、回転
軸または力嵌め部材の表面に磁歪材料からなる膜を設け
たものでもさらに効果があることは明らかである。The signal output of the present invention has a large temperature drift as compared with the torque signal obtained by correcting the torque detection coil only signal and the temperature detection coil arranged at a position other than (D 1 -D 2 ) / 2. You can see that it has been improved. Second Embodiment FIG. 3 shows a sectional view of a magnetostrictive torque sensor according to a second embodiment of the present invention. In the figure, 1 is a rotary shaft made of S45C, and 2 is a force fitting member which is fitted to the rotary shaft 1 made of maraging steel by shrink fitting. Similar to the first embodiment, the temperature-correcting coil pair 4 and the torque-detecting coil pair 3 were arranged, and the ambient temperature was changed to measure the output characteristics with and without the torque. The results are shown in Table 1.
The signal output of the present invention is a temperature drift (ratio of fluctuation with respect to the signal, as compared with a torque signal corrected by arranging the signal of only the torque detection coil and the temperature detection coil at a position other than (D 1 -D 2 ) / 2. ) Is significantly improved. Although the present embodiment has described only the maraging steel in which the rotating shaft or the force fitting member is the magnetostrictive material, the one in which the film made of the magnetostrictive material is provided on the surface of the rotating shaft or the force fitting member is further effective. Is clear.
【０００９】[0009]
【発明の効果】以上述べたように、本発明によれば、回
転軸の大径部の段差部の近傍に励磁コイルと検出コイル
とからなるコイル対を配置し、その差動出力をとるよう
にしたので、温度による出力のドリフトをなくすことが
でき、精度の高い磁歪式トルクセンサを得る効果があ
る。As described above, according to the present invention, a coil pair including an exciting coil and a detection coil is arranged near the step portion of the large diameter portion of the rotary shaft, and the differential output is obtained. Therefore, it is possible to eliminate the drift of the output due to the temperature, and it is possible to obtain a highly accurate magnetostrictive torque sensor.
【図１】本発明の第１実施例を示す磁歪式トルクセンサ
の部分断面図である。FIG. 1 is a partial cross-sectional view of a magnetostrictive torque sensor showing a first embodiment of the present invention.
【図２】本発明の動作原理を説明する説明図である。FIG. 2 is an explanatory diagram illustrating an operation principle of the present invention.
【図３】本発明の第２実施例を示す磁歪式トルクセンサ
の部分断面図である。FIG. 3 is a partial sectional view of a magnetostrictive torque sensor showing a second embodiment of the present invention.
１：回転軸 ２：力嵌め部材 １１：大径部 ３、４：コイル対 1: Rotating shaft 2: Force fitting member 11: Large diameter part 3, 4: Coil pair
Claims (2)
する磁歪材料を少なくとも表面部に設けた回転軸と、前
記磁歪材料に磁場を加える励磁コイルおよびトルクに起
因する磁歪材料の透磁率の変化を非接触で感知する検出
コイルからなるコイル対と、前記コイルから得られた電
気信号をトルクの大きさに変換するトルク変換回路から
なる磁歪式トルクセンサにおいて、 前記回転軸は大きい径Ｄ1 と小さい径Ｄ2 からなる異な
った軸径を有し、前記コイル対を前記回転軸の大きい径
Ｄ1 の段差の端面から（Ｄ1 −Ｄ2 ）／２以内の外周部
に少なくとも１個、段差の端面から（Ｄ1 −Ｄ2 ）／２
以上離れた外周部に少なくとも１個を配置したことを特
徴とする磁歪式トルクセンサ。1. A rotating shaft having a magnetostrictive material whose magnetic permeability changes in accordance with applied torque, at least on the surface thereof, an exciting coil for applying a magnetic field to the magnetostrictive material, and a magnetic permeability of the magnetostrictive material caused by torque. In a magnetostrictive torque sensor including a coil pair including a detection coil that senses a change in a non-contact manner and a torque conversion circuit that converts an electric signal obtained from the coil into a magnitude of torque, the rotating shaft has a large diameter D 1 When have different shaft diameter made of smaller diameter D 2, at least one said coil pairs on the outer circumferential portion larger from the end surface of the stepped diameter D 1 (D 1 -D 2) / 2 within the said rotary shaft, From the end face of the step (D 1 −D 2 ) / 2
A magnetostrictive torque sensor, characterized in that at least one is arranged on the outer peripheral portion separated from the above.
えられるトルクに対応して透磁率が変化する円筒状の磁
歪材料を少なくとも表面部に設けた力嵌め部材と、前記
磁歪材料に磁場を加える励磁コイルおよびトルクに起因
する磁歪材料の透磁率の変化を非接触で感知する検出コ
イルからなるコイル対と、前記検出コイルから得られた
電気信号をトルクの大きさに変換するトルク変換回路か
らなる磁歪式トルクセンサにおいて、 前記力嵌め部材の外径をＤ1 、内径がＤ2 とした場合、
前記コイル対を端面から（Ｄ1 −Ｄ2 ）／２以内の外周
部に少なくとも１個、（Ｄ1 −Ｄ2 ）／２以上離れた外
周部に少なくとも１個を配置したことを特徴とする磁歪
式トルクセンサ。2. A force-fitting member, which is fixedly mounted on a rotating shaft by force-fitting, and has a cylindrical magnetostrictive material whose surface changes at least in response to applied torque, and a magnetic field applied to the magnetostrictive material. From an exciting coil to be applied and a coil pair composed of a detection coil that senses a change in magnetic permeability of the magnetostrictive material due to torque in a non-contact manner, and a torque conversion circuit that converts an electric signal obtained from the detection coil into a magnitude of torque. In the magnetostrictive torque sensor, the force fitting member has an outer diameter D 1 and an inner diameter D 2 .
At least one coil pair is arranged at the outer peripheral portion within (D 1 -D 2 ) / 2 from the end face, and at least one coil pair is arranged at the outer peripheral portion separated by (D 1 -D 2 ) / 2 or more. Magnetostrictive torque sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22642793A JPH0755600A (en) | 1993-08-18 | 1993-08-18 | Magnetostrictive type torque sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22642793A JPH0755600A (en) | 1993-08-18 | 1993-08-18 | Magnetostrictive type torque sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0755600A true JPH0755600A (en) | 1995-03-03 |
Family
ID=16844953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22642793A Pending JPH0755600A (en) | 1993-08-18 | 1993-08-18 | Magnetostrictive type torque sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0755600A (en) |
-
1993
- 1993-08-18 JP JP22642793A patent/JPH0755600A/en active Pending
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