JPH0753227A - Apparatus for producing quartz glass crucible - Google Patents
Apparatus for producing quartz glass crucibleInfo
- Publication number
- JPH0753227A JPH0753227A JP5216909A JP21690993A JPH0753227A JP H0753227 A JPH0753227 A JP H0753227A JP 5216909 A JP5216909 A JP 5216909A JP 21690993 A JP21690993 A JP 21690993A JP H0753227 A JPH0753227 A JP H0753227A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- grinding wheel
- quartz glass
- rotating
- grinding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、Ｓｉ単結晶引上げに
用いる石英ガラスルツボの製造装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quartz glass crucible manufacturing apparatus used for pulling Si single crystal.
【０００２】[0002]
【従来の技術】石英ガラスルツボは黒鉛ルツボの内側に
配置され、Ｓｉ単結晶の引上げに用いられる。2. Description of the Related Art A quartz glass crucible is arranged inside a graphite crucible and is used for pulling a Si single crystal.
【０００３】石英ガラスルツボは石英粉を成形溶融後
に、ルツボ外面に付着した未溶融粉を一部除去すること
によって製造される。従来、外面に付着した未溶融粉
は、必要に応じて石英ガラスルツボの外面全体を高圧液
体でブラスティングするか、又はルツボの円筒部（スト
レート部）外面のみを旋盤等で加工することによって除
去している。A quartz glass crucible is manufactured by forming and melting quartz powder and then partially removing unmelted powder adhering to the outer surface of the crucible. Conventionally, unmelted powder adhering to the outer surface is removed by blasting the entire outer surface of the quartz glass crucible with high-pressure liquid, or by processing only the outer surface of the cylindrical part (straight part) of the crucible with a lathe etc. is doing.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、前者の
方法では、石英ガラスルツボ外面の中心線平均粗さが１
００μｍ以上になってしまい、寸法精度も充分ではなか
った。他方、黒鉛ルツボは高精度機械加工によって表面
の仕上げが行われる。このような表面粗さ及び寸法精度
の違いによって、両者の接合面には不均一な隙間が生じ
ることが多かった。However, in the former method, the center line average roughness of the outer surface of the quartz glass crucible is 1 or less.
It was over 100 μm, and the dimensional accuracy was not sufficient. On the other hand, the surface of the graphite crucible is finished by high precision machining. Due to such differences in surface roughness and dimensional accuracy, non-uniform gaps were often created on the joint surfaces of the two.
【０００５】このため、Ｓｉ単結晶を引上げる際に、高
温になって軟化した石英ガラスルツボが変形し、溶融Ｓ
ｉ液面に振動が生じることがあった。その場合には、引
上げたＳｉ単結晶が悪影響を受け、歩留が低下してい
た。Therefore, when the Si single crystal is pulled up, the quartz glass crucible softened at a high temperature is deformed and melted S
Vibration may occur on the i liquid surface. In that case, the pulled Si single crystal was adversely affected and the yield was lowered.
【０００６】また、後者の方法では、ストレート部（円
筒部）の寸法精度は充分であるが、それ以外の部分で黒
鉛ルツボとの間にやはり隙間が生じ、同様の液面振動が
発生する恐れがあった。また、ストレート部とそれ以外
の部分の面粗さの差が大きいため、加熱時に両方の部分
での熱線透過率が異なって溶融Ｓｉの温度制御に悪影響
を与えていた。Further, in the latter method, the dimensional accuracy of the straight portion (cylindrical portion) is sufficient, but a gap is also formed between the straight portion (cylindrical portion) and the graphite crucible, and similar liquid level vibration may occur. was there. Further, since the difference in surface roughness between the straight portion and the other portion is large, the heat ray transmittances of both portions differ during heating, which adversely affects the temperature control of the molten Si.
【０００７】いずれにせよ、特に大口径の石英ガラスル
ツボにおいて前述の問題が生じ易く、Ｓｉ単結晶引上げ
の歩留り（単結晶化率）が低下していた。In any case, the above-mentioned problem is likely to occur particularly in a large-diameter quartz glass crucible, and the yield (single crystallization rate) of pulling Si single crystal is lowered.
【０００８】本発明は、前述のような従来技術の問題点
を解消して、Ｓｉ単結晶引上げの歩留りを向上可能な不
透明石英ガラスルツボの製造方法を提供することを目的
としている。An object of the present invention is to provide a method for manufacturing an opaque quartz glass crucible which solves the above-mentioned problems of the prior art and can improve the yield of Si single crystal pulling.
【０００９】[0009]
【課題を解決するための手段】この発明は、倒立状態の
ルツボの内面を支持してルツボ１を中心軸の回りに低速
で回転させるルツボ支持回転手段２０を設け、回転軸を
鉛直に保った研削砥石１６を高速回転させつつこれをル
ツボ１の外側に沿って移動させる砥石回転移動手段２１
を設け、研削砥石１６が少なくとも下側に丸みを持った
研削面１８ａ，１９ａを有しており、ルツボ１の外面全
体を研削砥石１６で研削できる構成にしたことを特徴と
する石英ガラスルツボの製造装置を要旨としている。According to the present invention, crucible supporting and rotating means 20 for supporting the inner surface of the crucible in an inverted state and rotating the crucible 1 around the central axis at a low speed is provided, and the rotating shaft is kept vertical. Grinding wheel rotating / moving means 21 for moving the grinding wheel 16 along the outside of the crucible 1 while rotating the grinding wheel 16 at high speed.
Of the quartz glass crucible characterized in that the grinding wheel 16 has at least a rounded grinding surface 18a, 19a on the lower side, and the entire outer surface of the crucible 1 can be ground by the grinding wheel 16. The main point is manufacturing equipment.
【００１０】[0010]
【実施例】以下、図面を参照して本発明の好適な実施例
を説明する。図１は本発明による石英ガラスルツボの製
造装置の好適な実施例を模式的に示す図、図２は図１の
研削砥石を示す断面図である。なお、本明細書では不透
明を広義に解釈し、半透明も不透明に含まれるものとす
る。同様に、研削を広義に解釈し、研磨も研削に含まれ
るものとする。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a view schematically showing a preferred embodiment of a quartz glass crucible manufacturing apparatus according to the present invention, and FIG. 2 is a sectional view showing the grinding wheel of FIG. In this specification, opacity is broadly interpreted, and semitransparent is included in opacity. Similarly, the term "grinding" is broadly interpreted, and the term "grinding" is also included in the term "grinding".
【００１１】ルツボ製造装置１０は、ルツボの外面全体
を研削してそこに付着した溶融石英粉を除去するための
装置である。図１の研削装置に設定されている石英ガラ
スルツボは、通常の回転溶融法で石英粉を溶融成形した
ものである。これにより、全体的に微小な気泡を多数含
む不透明な石英ガラスルツボが形成される。なお、この
石英ガラスルツボの内面には透明層が形成される。ま
た、その外面には未溶融石英粉が付着している。The crucible manufacturing apparatus 10 is an apparatus for grinding the entire outer surface of the crucible and removing the fused silica powder adhering thereto. The quartz glass crucible set in the grinding apparatus of FIG. 1 is one in which quartz powder is melt-molded by an ordinary rotary melting method. As a result, an opaque quartz glass crucible containing a large number of minute bubbles is formed. A transparent layer is formed on the inner surface of the quartz glass crucible. Further, unmelted quartz powder adheres to the outer surface thereof.
【００１２】ルツボ製造装置１０は、倒立状態のルツボ
１の内面を支持してルツボ１を中心軸の回りに低速で回
転させるためのルツボ支持回転手段２０を有している。
ルツボ支持回転手段２０は、ベース１１に設定されたデ
ィスク型の回転テーブル１２を備えている。回転テーブ
ル１２には、その回転軸の延長線上にセンタ押え１５が
設けられている。センタ押え１５の先端にはルツボ底部
の中央に当接するゴム部材１５ａが固定されている。The crucible manufacturing apparatus 10 has a crucible supporting / rotating means 20 for supporting the inner surface of the crucible 1 in an inverted state and rotating the crucible 1 around a central axis at a low speed.
The crucible supporting / rotating means 20 includes a disk-type rotary table 12 set on a base 11. The rotary table 12 is provided with a center presser 15 on an extension line of its rotary shaft. A rubber member 15a that is in contact with the center of the bottom of the crucible is fixed to the tip of the center presser 15.
【００１３】センタ押えの中程にはストレート部上方チ
ャック１３が固定されている。ストレート部上方チャッ
ク１３はルツボの大きさに合わせて径を変えるこが可能
であり、その外端部にはルツボのストレート部内周に当
接するゴム部材１３ａが配置されている。A straight upper chuck 13 is fixed in the middle of the center presser. The diameter of the upper chuck 13 of the straight portion can be changed according to the size of the crucible, and a rubber member 13a which is in contact with the inner circumference of the straight portion of the crucible is arranged at the outer end portion thereof.
【００１４】回転テーブル１２の上部には、ストレート
部下方チャック１４が配置されている。ストレート部下
方チャック１４もルツボの大きさに合わせて径を変える
ことが可能であり、その外端部にはルツボのストレート
部内周に当接するゴム部材１４ａが配置されている。On the upper part of the rotary table 12, a straight part lower chuck 14 is arranged. The diameter of the lower chuck 14 of the straight portion can also be changed according to the size of the crucible, and a rubber member 14a which is in contact with the inner circumference of the straight portion of the crucible is arranged at the outer end portion thereof.
【００１５】ルツボ製造装置１１は、回転軸を鉛直に保
った研削（グラインダー）砥石１６を高速回転させつつ
ルツボの外周に沿って動かすための砥石回転移動手段２
１を備えている。砥石回転移動手段２１は高速回転可能
なスピンドルを有し、研削砥石１６を設定することがで
きる。The crucible manufacturing apparatus 11 has a grindstone rotation moving means 2 for moving the grinding (grinder) grindstone 16 with its rotation axis kept vertical while rotating the crucible along the outer periphery of the crucible.
1 is provided. The grindstone rotating / moving means 21 has a spindle capable of rotating at high speed, and can set the grinding grindstone 16.
【００１６】砥石回転移動手段２１は、図示しないコラ
ムに移動可能に配置されていて、図１の図平面内で定め
られた経路（Ａ〜Ｅ）を速度をかえて移動可能である。
経路Ａ，Ｂではスピンドルを研削速度（低速）で移動さ
せ、経路Ｃ〜Ｆではスピンドルを早送りで移動させる。The grindstone rotating / moving means 21 is movably arranged on a column (not shown), and can move along a path (AE) defined within the plane of the drawing of FIG. 1 at different speeds.
The spindle is moved at a grinding speed (low speed) on the paths A and B, and the spindle is moved at a fast feed on the paths C to F.
【００１７】好ましい一例を挙げると研削砥石１６は、
図２に示すように、カップ形のダイヤモンド砥石であ
る。研削砥石１６はカップ状の台金１９とその下部外周
に着脱可能に設けられた砥石取付部１７を有している。
台金１９はアルミ製であり、砥石取付部１７は樹脂製で
ある。砥石取付部１７には砥石本体１８が取付けられて
いる。As a preferred example, the grinding wheel 16 is
As shown in FIG. 2, it is a cup-shaped diamond grindstone. The grinding wheel 16 has a cup-shaped base metal 19 and a whetstone mounting portion 17 which is detachably provided on the outer periphery of the lower part thereof.
The base metal 19 is made of aluminum, and the grindstone mounting portion 17 is made of resin. A whetstone body 18 is attached to the whetstone attachment portion 17.
【００１８】砥石本体１８は曲率半径がＲの研削面を有
していて、その断面形状は半円形になっている。また、
図２の矢印で示したように下方が湾曲した１／４円形で
もよい。このように、砥石本体１８は少なくとも下側に
丸みを持った研削面を有している。従って、ワ―クに対
する砥石の補正量は常にほぼ一定となり、従って正確な
研削が可能となるのである。なお、石英ガラスルツボの
外面全体をより早く、より適切に下記中心線平均粗さＲ
ａの範囲とし、さらに、装置全体をよりコンパクトとす
るためには、上記Ｒは、３〜３５ｍｍとすることが好ま
しい。The whetstone body 18 has a ground surface with a radius of curvature of R, and its cross-sectional shape is semicircular. Also,
As shown by the arrow in FIG. 2, a quarter circle having a curved lower portion may be used. Thus, the whetstone body 18 has a rounded grinding surface at least on the lower side. Therefore, the correction amount of the grindstone with respect to the work is always almost constant, so that accurate grinding can be performed. It should be noted that the entire center surface of the quartz glass crucible can be swiftly and appropriately adjusted to the following center line average roughness R
In order to make the range a and to make the entire device more compact, it is preferable that the above R is 3 to 35 mm.
【００１９】さて、研削装置１０を用いて、ルツボ１を
低速で回転させ、一方研削砥石１６を高速回転させつつ
経路Ａ，Ｂを移動させて、ルツボの外面全体の研削を行
った。そして、得られた石英ガラスルツボの外面の中心
線平均粗さＲａを測定したところ０．１μｍ〜５０μｍ
の範囲内であった。By using the grinding device 10, the crucible 1 was rotated at a low speed, while the grinding wheel 16 was rotated at a high speed, the paths A and B were moved, and the entire outer surface of the crucible was ground. Then, the center line average roughness Ra of the outer surface of the obtained quartz glass crucible was measured to be 0.1 μm to 50 μm.
Was within the range.
【００２０】また、その寸法精度を調べたところ、外径
は設計寸法５０８ｍｍに対して誤差が±１ｍｍ以内、肉
厚は同じく１１ｍｍに対して誤差が±１．５ｍｍ以内、
外側Ｒ形状は５０８ｍｍに対して誤差が±１ｍｍ以内、
高さは３５６ｍｍに対して誤差が±２ｍｍ以内であっ
た。Further, when the dimensional accuracy is examined, the outer diameter has an error of ± 1 mm with respect to the design dimension of 508 mm, and the wall thickness has an error of ± 1.5 mm with respect to 11 mm.
The outer R shape has an error of ± 1 mm with respect to 508 mm,
The error was within ± 2 mm with respect to the height of 356 mm.
【００２１】この石英ガラスルツボを用いてＳｉ単結晶
の引上げを行い、歩留りを調べた。その結果、従来のル
ツボを用いた場合に較べて歩留りが約５％向上した。Using this quartz glass crucible, Si single crystals were pulled up and the yield was examined. As a result, the yield was improved by about 5% as compared with the case where the conventional crucible was used.
【００２２】[0022]
【発明の効果】本発明の石英ガラスルツボの製造装置
は、倒立状態のルツボの内面を支持してルツボ１を中心
軸の回りに低速で回転させるルツボ支持回転手段２０を
設け、回転軸を鉛直に保った研削砥石１６を高速回転さ
せつつこれをルツボ１の外周に沿って移動させる砥石回
転移動手段２１を設け、研削砥石１６が少なくとも下側
に丸みを持った研削面１８ａ，１９ａを有しており、ル
ツボ１の外面全体を研削砥石１６で研削する構成になっ
ているので、本発明装置で製造した石英ガラスルツボは
従来のルツボと較べて表面粗さが改善され寸法精度も向
上する。The quartz glass crucible manufacturing apparatus of the present invention is provided with the crucible supporting and rotating means 20 for supporting the inner surface of the crucible in the inverted state and rotating the crucible 1 about the central axis at a low speed, and rotating the rotary shaft vertically. A grindstone rotating / moving means 21 for moving the grinding grindstone 16 kept at a high speed along the outer periphery of the crucible 1 is provided, and the grinding grindstone 16 has at least a rounded ground surface 18a, 19a. Since the entire outer surface of the crucible 1 is ground by the grinding wheel 16, the quartz glass crucible manufactured by the device of the present invention has improved surface roughness and dimensional accuracy as compared with the conventional crucible.
【００２３】従って、外側に配置するカーボンルツボと
の接触状態を良好に保つことができ、ルツボの軟化に起
因する溶融Ｓｉ液面の振動を防止できる。Therefore, it is possible to maintain a good contact state with the carbon crucible arranged outside, and to prevent vibration of the molten Si liquid surface due to softening of the crucible.
【００２４】また、ストレート部と底部の面粗さがほぼ
同一となって、熱線透過率が等しくなるので、温度制御
の精度を向上させることができる。Further, since the surface roughness of the straight portion and the surface roughness of the bottom portion are substantially the same and the heat ray transmittances are equal, the accuracy of temperature control can be improved.
【００２５】このため、本発明の石英ガラスルツボを用
いることにより、Ｓｉ単結晶の歩留りを従来のルツボに
較べて大幅に向上させることができる。Therefore, by using the quartz glass crucible of the present invention, the yield of Si single crystal can be greatly improved as compared with the conventional crucible.
【００２６】なお、本発明は前述の実施例に限定されな
い。例えば、研削経路は、図１に示した径路の逆方向で
あってもよい。The present invention is not limited to the above embodiment. For example, the grinding path may be in the opposite direction of the path shown in FIG.
【図１】本発明の石英ガラスルツボ製造装置を示す概略
図。FIG. 1 is a schematic view showing a quartz glass crucible manufacturing apparatus of the present invention.
【図２】図１の研削砥石を示す断面図。FIG. 2 is a sectional view showing the grinding wheel of FIG.
１ 石英ガラスルツボ １０ ルツボ製造装置 １１ ベース １２ 回転テーブル １３ ストレート部上方チャック １４ ストレート部下方チャック １５ センタ押え １３ａ，１４ａ，１５ａ ゴム部材 １６ 研削砥石 １７ 砥石取付け部材 １８ 砥石本体 ２０ ルツボ支持回転手段 ２１ 砥石回転移動手段 DESCRIPTION OF SYMBOLS 1 Quartz glass crucible 10 Crucible manufacturing apparatus 11 Base 12 Rotary table 13 Straight part upper chuck 14 Straight part lower chuck 15 Center presser 13a, 14a, 15a Rubber member 16 Grinding grindstone 17 Grindstone mounting member 18 Grindstone main body 20 Crucible support rotating means 21 Grindstone Rotational movement means
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小関 忠雄 山形県西置賜郡小国町大字小国町378番地 東芝セラミックス株式会社小国製造所内 (72)発明者 伊藤 直衛 山形県西置賜郡小国町大字小国町378番地 東芝セラミックス株式会社小国製造所内 (72)発明者 高力 一彦 山形県西置賜郡小国町大字小国町378番地 東芝セラミックス株式会社小国製造所内 (72)発明者 横堀 義一 神奈川県秦野市曽屋30番地 東芝セラミッ クス株式会社開発研究所内 (72)発明者 堀 義道 大阪市天王寺区上本町１丁目２番19号 株 式会社ティ・ケー・エックス内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tadao Ozeki 378 Oguni-machi, Oguni-machi, Nishiokitama-gun, Yamagata Prefecture Oguni Factory, Toshiba Ceramics Co., Ltd. (72) Naoe Ito 378 Oguni-cho, Oguni-cho, Nishiokitama-gun, Yamagata Toshiba Ceramics Co., Ltd. Oguni Factory (72) Inventor Kazuhiko Kazuhiko Oguni Town, Nishikitama District, Yamagata 378 Oguni Town, Osamu Toshiba Ceramics Co., Ltd. (72) Yoshikazu Yokobori 30 Soya, Hadano City, Kanagawa Prefecture Toshiba Ceramics (72) Inventor Yoshimichi Hori 1-2-19 Uehonmachi, Tennoji-ku, Osaka City TK EX Co., Ltd.
Claims (1)
ボ（１）を中心軸の回りに低速で回転させるルツボ支持
回転手段（２０）を設け、回転軸を鉛直に保った研削砥
石（１６）を高速回転させつつこれをルツボ（１）の外
側に沿って移動させる砥石回転移動手段（２１）を設
け、研削砥石（１６）が少なくとも下側に丸みを持った
研削面（１８ａ，１９ａ）を有しており、ルツボ（１）
の外面全体を研削砥石（１６）で研削できる構成にした
ことを特徴とする石英ガラスルツボの製造装置。1. A grinding wheel (16) having a crucible supporting and rotating means (20) for supporting the inner surface of the crucible in an inverted state and rotating the crucible (1) around a central axis at a low speed, and keeping the rotational axis vertical. ) Is provided with a grindstone rotating / moving means (21) for moving it along the outer side of the crucible (1) while the grindstone (16) has at least a lower rounded grinding surface (18a, 19a). With a crucible (1)
An apparatus for manufacturing a quartz glass crucible, wherein the entire outer surface of the quartz glass crucible can be ground with a grinding wheel (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05216909A JP3113461B2 (en) | 1993-08-10 | 1993-08-10 | Quartz glass crucible manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05216909A JP3113461B2 (en) | 1993-08-10 | 1993-08-10 | Quartz glass crucible manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0753227A true JPH0753227A (en) | 1995-02-28 |
| JP3113461B2 JP3113461B2 (en) | 2000-11-27 |
Family
ID=16695823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05216909A Expired - Lifetime JP3113461B2 (en) | 1993-08-10 | 1993-08-10 | Quartz glass crucible manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3113461B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090293806A1 (en) * | 2008-05-28 | 2009-12-03 | Japan Super Quartz Corporation | Silica glass crucible and method for manufacturing the same |
| JP2010202515A (en) * | 2010-06-21 | 2010-09-16 | Shinetsu Quartz Prod Co Ltd | Method for producing quartz glass crucible for pulling up silicon single crystal |
| JP2011177889A (en) * | 2005-03-22 | 2011-09-15 | Schott Ag | Grinding method |
-
1993
- 1993-08-10 JP JP05216909A patent/JP3113461B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011177889A (en) * | 2005-03-22 | 2011-09-15 | Schott Ag | Grinding method |
| US20090293806A1 (en) * | 2008-05-28 | 2009-12-03 | Japan Super Quartz Corporation | Silica glass crucible and method for manufacturing the same |
| JP2009286651A (en) * | 2008-05-28 | 2009-12-10 | Japan Siper Quarts Corp | Quartz glass crucible and its manufacturing method |
| JP2010202515A (en) * | 2010-06-21 | 2010-09-16 | Shinetsu Quartz Prod Co Ltd | Method for producing quartz glass crucible for pulling up silicon single crystal |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3113461B2 (en) | 2000-11-27 |
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