JPH074599Y2 - Sheet type sensor for permittivity measurement - Google Patents
Sheet type sensor for permittivity measurementInfo
- Publication number
- JPH074599Y2 JPH074599Y2 JP1987063051U JP6305187U JPH074599Y2 JP H074599 Y2 JPH074599 Y2 JP H074599Y2 JP 1987063051 U JP1987063051 U JP 1987063051U JP 6305187 U JP6305187 U JP 6305187U JP H074599 Y2 JPH074599 Y2 JP H074599Y2
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- JP
- Japan
- Prior art keywords
- dielectric constant
- substance
- measurement
- measured
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Measurement Of Resistance Or Impedance (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、多種多様な物質を測定対象にし得ると共に、
その誘電率を高精度で容易に測定できる、全く新規な構
成のシート型誘電率測定用センサーに関する。[Detailed Description of the Invention] [Industrial field of application] The present invention can measure a wide variety of substances and
The present invention relates to a sheet-type dielectric constant measuring sensor having a completely new structure, which can easily measure the dielectric constant with high accuracy.
例えば油脂（動物油，植物油など）および鉱物油の鮮度
を評価するひとつの方法として、その油脂の鮮度と相関
の深い誘電率を測定する手段が用いられることがある
が、かかる誘電率の測定は、従来は次のようにして行わ
れていた。For example, as one method for evaluating the freshness of oils and fats (animal oils, vegetable oils, etc.) and mineral oils, a means for measuring the dielectric constant deeply correlated with the freshness of the oils and fats may be used. Conventionally, it was performed as follows.
即ち、原理的には、第４図に示すように、F/Vコンバー
ター1,発振回路2,信号処理回路3,較正回路4,表示器５お
よび電源回路６等から構成された公知の誘電率測定器Ａ
に、一対の平板状対向電極7a,7bから成る誘電率検出用
電極部Ｂを接続し、その電極部Ｂを、容器８内に収容さ
れた測定対象物質であるサンプル油Ｏ中に浸漬させる
と、非導電性物質であるサンプル油Ｏは電極部Ｂに対す
る誘電体となって、これら電極部Ｂとサンプル油Ｏとで
コンデンサーが構成されて、その誘電率が前記誘電率測
定器Ａにより計測される（つまり、より詳しく言えば、
誘電率検出用電極部Ｂを構成する両電極7a,7b間に、測
定対象物質であるサンプル油Ｏが存在しない場合と存在
する場合との静電容量変化から、サンプル油Ｏの誘電率
が計測される）。そこで、その計測された誘電率の値か
らサンプル油Ｏの鮮度（あるいは劣化度）の評価を行う
のである。That is, in principle, as shown in FIG. 4, a known dielectric constant composed of an F / V converter 1, an oscillation circuit 2, a signal processing circuit 3, a calibration circuit 4, an indicator 5, a power supply circuit 6 and the like. Measuring instrument A
Is connected to a dielectric constant detecting electrode portion B composed of a pair of flat plate-shaped counter electrodes 7a and 7b, and the electrode portion B is immersed in the sample oil O which is the substance to be measured contained in the container 8. The sample oil O, which is a non-conductive substance, serves as a dielectric with respect to the electrode portion B, and the electrode portion B and the sample oil O constitute a capacitor, and the dielectric constant thereof is measured by the dielectric constant measuring device A. (That is, more specifically,
The dielectric constant of the sample oil O is measured from the change in the capacitance between the case where the sample oil O, which is the measurement target substance, does not exist and the case where the sample oil O, which is the measurement target substance, exists between the two electrodes 7a and 7b forming the dielectric constant detecting electrode portion B. Be done). Therefore, the freshness (or deterioration degree) of the sample oil O is evaluated from the value of the measured dielectric constant.
ところで、前記誘電率検出用電極部Ｂの実際的な構造に
ついては、非常に取り扱いが容易で実用的な構成を有す
るものとして、本考案者らが最近開発し、特願昭62-031
860号（昭和62年２月14日出願）により、既に提案して
いるものがある。By the way, the practical structure of the dielectric constant detecting electrode portion B was recently developed by the present inventors as a practical structure having a very easy handling and a practical structure.
Some of them have already been proposed by No. 860 (filed on February 14, 1987).
それは、第５図（イ）の平面図ならびに第５図（ロ）の
縦断面図に示すように、例えばセラミックス等の無機多
孔性材料あるいはエポキシ樹脂等の合成樹脂などから成
る薄い平板状の絶縁性基板９の上面側に、測定対象物質
であるサンプル油Ｏを滴下収容可能な凹部10を形成する
と共に、その凹部10の底部表面に、一対の櫛歯形薄膜状
対向電極11a,11bから成る誘電率検出用電極部Ｂを形成
し、全体としてシート状チップ構造のものに構成するこ
とにより、非常にシンプルかつコンパクトで安価に構成
できると共に、取り扱いも容易で測定対象物質のサンプ
ル量も極く少量で済むようにしたものである。なお、図
中11A,11Bは、夫々、各櫛歯形薄膜状対向電極11a,11bか
らの信号取り出し用端子である。As shown in the plan view of FIG. 5 (a) and the longitudinal sectional view of FIG. 5 (b), it is a thin flat plate made of, for example, an inorganic porous material such as ceramics or a synthetic resin such as epoxy resin. The upper surface of the flexible substrate 9 is provided with a recess 10 capable of containing sample oil O, which is a substance to be measured, and the bottom surface of the recess 10 is composed of a pair of comb-teeth thin-film counter electrodes 11a and 11b. By forming the rate detecting electrode part B and configuring it as a sheet-shaped chip structure as a whole, it can be constructed very simply, compactly and inexpensively, and it is easy to handle and the sample amount of the substance to be measured is very small. It was done so. In the figure, 11A and 11B are terminals for extracting signals from the respective comb-teeth thin-film counter electrodes 11a and 11b.
しかしながら、上記のように新たに開発され、実用上種
々の利点を備えているシート型誘電率測定用センサーに
おいても、その更なる改良を目指して種々検討した結
果、なお次のような難点があることが認識されるに至っ
た。However, the sheet-type dielectric constant measurement sensor newly developed as described above and having various practical advantages has various drawbacks as a result of various studies aimed at further improvement thereof. It came to be recognized.
即ち、上記従来構成のシート型誘電率測定用センサーに
おいては、それに滴下収容される測定対象物質（前記従
来例ではサンプル油Ｏ）が、誘電率検出用電極部Ｂにお
ける各電極11a,11bおよび絶縁性基板９の表面に対して
直接接触するようになっているために、 （ア）測定対象物質（サンプル油Ｏ）が誘電率検出用電
極Ｂにおける基板９の表面部に浸透して、次の測定のた
めに洗浄しても完全には除去できないために、絶縁性基
板９の劣化を招き易く、従って、測定回数あるいは測定
順序によって測定値が変化してしまうというように、耐
久性ならびに測定精度および測定結果の再現性の面で大
きな問題があり、 （イ）また、測定対象物質が導電性の物質（例えば水，
アルコールなど）である場合には、両電極11a,11b間に
抵抗成分が発生するために、測定対象物質の存在による
静電容量変化を正確に計測できず、従って、この従来構
成のシート型誘電率測定用センサーは、前記サンプル油
Ｏのように非導電性の物質しか測定対象にできず、非常
に汎用性に乏しい、 といった種々の欠点があった。That is, in the above-described conventional sheet-type dielectric constant measuring sensor, the substance to be measured (sample oil O in the above-mentioned conventional example) contained in the sensor is the electrodes 11a and 11b and the insulating material in the dielectric constant detecting electrode portion B. Since the material to be measured (sample oil O) penetrates into the surface portion of the substrate 9 in the dielectric constant detecting electrode B, the Since the insulating substrate 9 cannot be completely removed even if washed for measurement, deterioration of the insulating substrate 9 is likely to occur, and therefore the measured value changes depending on the number of times of measurement or the measurement order. Also, there is a big problem in terms of reproducibility of the measurement result.
In the case of alcohol, etc., the resistance component is generated between both electrodes 11a and 11b, so the capacitance change due to the presence of the substance to be measured cannot be accurately measured. The rate measuring sensor has various drawbacks such that only a non-conductive substance such as the sample oil O can be used as a measuring object, and the versatility is very poor.
本考案は、かかる実情に鑑みて鋭意研究の結果なされた
ものであって、その目的は、耐久性，測定精度，測定結
果の再現性に優れ、かつ、非導電性物質は勿論、導電性
物質についても、その誘電率を十分に精度良く計測可能
な汎用性の高いシート型誘電率測定用センサー開発・提
供せんとすることにある。The present invention has been made as a result of earnest research in view of such circumstances, and its purpose is to provide excellent durability, measurement accuracy, and reproducibility of measurement results. As for the above, it is to develop and provide a highly versatile sheet-type dielectric constant measurement sensor capable of measuring the dielectric constant with sufficient accuracy.
上記目的を達成するために、本考案によるシート型誘電
率測定用センサーは、測定対象物質を滴下あるいは載置
する操作により収容可能な凹部を有する絶縁性基板の表
面に少なくとも一対の薄膜状対向電極から成る誘電率検
出用電極部を付着形成すると共に、その誘電率検出用電
極部の全体を、緻密でかつ化学的に安定な絶縁性薄膜で
被覆してなり、測定に際して、コンパクトな電卓型に構
成された誘電率測定器のセンサー装着部に装着し、前記
凹部内に測定対象物質を滴下あるいは載置により導入す
ることで、誘電率測定器の誘電率表示部に測定対象物質
の誘電率表示が行える、という特徴を備えている。In order to achieve the above object, the sheet-type dielectric constant measuring sensor according to the present invention has at least a pair of thin-film counter electrodes on the surface of an insulating substrate having a recess that can be accommodated by dropping or placing a substance to be measured. The dielectric constant detection electrode part consisting of is adhered and formed, and the entire dielectric constant detection electrode part is covered with a dense and chemically stable insulating thin film, making it a compact calculator type for measurement. By mounting it on the sensor mounting part of the configured dielectric constant measuring device and introducing the measurement target substance by dropping or placing it in the recess, the dielectric constant display part of the dielectric constant measuring device displays the dielectric constant of the measurement target substance. It has the feature that
かかる特徴構成故に発揮される作用は下記の通りであ
る。The action exerted due to this characteristic configuration is as follows.
即ち、上記本考案によるシート型誘電率測定用センサー
においては、絶縁性基板の表面に付着形成した誘電率検
出用電極部の全体を、緻密で（つまり、測定対象物質を
透過させない性質を有しており）かつ化学的に安定な
（つまり、測定対象物質によって変質し難い性質を有す
る）絶縁性薄膜で被覆することにより、その誘電率検出
用電極部に導かれる測定対象物質が、誘電率検出用電極
部における各薄膜状対向電極および絶縁性基板の表面に
対して、従来のように直接接触することが無いようにし
てあるから、誘電率検出用電極部における絶縁性基板の
劣化や、それによる測定精度および測定結果の再現性の
低下を招くことが無く、また、たとえ水やアルコールな
どの導電性物質を測定対象物質とする場合であっても、
その導電性の測定対象物質と誘電率検出用電極部におけ
る各薄膜状対向電極とは、前記絶縁性薄膜で電気的に分
離されているから、従来のように両電極間に抵抗成分が
発生することが無く、従って、測定対象物質の存在によ
る純粋な静電容量変化を正確に計測できる。〔実施例〕 以下、本考案に係るシート型誘電率測定用センサーの各
種具体的実施例を図面（第１図ないし第３図）に基いて
説明する。That is, in the above-mentioned sheet type dielectric constant measuring sensor according to the present invention, the whole dielectric constant detecting electrode portion adhered and formed on the surface of the insulating substrate is dense (that is, has a property of not permeating a substance to be measured). Of the measurement target substance introduced into the dielectric constant detection electrode section by coating with an insulating thin film that is stable and chemically stable (that is, has a property that is difficult to change depending on the measurement target substance) The thin film counter electrode in the electrode portion for insulation and the surface of the insulating substrate are prevented from directly contacting each other as in the conventional case. Does not cause deterioration of measurement accuracy and reproducibility of measurement results, and even when a conductive substance such as water or alcohol is used as a measurement target substance,
Since the conductive measurement target substance and each thin film counter electrode in the dielectric constant detection electrode portion are electrically separated by the insulating thin film, a resistance component is generated between both electrodes as in the conventional case. Therefore, it is possible to accurately measure the pure capacitance change due to the presence of the measurement target substance. [Examples] Various specific examples of the sheet-type dielectric constant measuring sensor according to the present invention will be described below with reference to the drawings (FIGS. 1 to 3).
第１図（イ）の平面図ならびに第１図（ロ），（ハ）の
各縦断面図は基本的な実施例を示し、図示しているよう
に、比較的小型で薄い矩形平板状の絶縁性基板９（この
例では、縦×横×厚さが、15mm×15mm×1mm程度のガラ
スプレート）の表面（上面側）に、測定対象物質Ｏ（液
体あるいは粉末などの固体）を滴下あるいは載置するな
どの操作により収容可能な凹部10を形成すると共に、そ
の凹部10の底部表面に、少なくとも一対の櫛歯形薄膜状
対向電極11a,11bから成る誘電率検出用電極部Ｂ（この
例では、全体として縦×横×厚さが、8mm×8mm×0.2μ
ｍ程度で、各線幅および間隔は20〜30Å程度のアルミニ
ウム電極）を形成すると共に、少なくともその誘電率検
出用電極部Ｂの全体（この例では、その電極部Ｂが付着
形成されている絶縁性基板９の上面側全体）を、緻密で
（つまり、測定対象物質を透過させない性質を有してお
り）かつ化学的に安定な（つまり、測定対象物質によっ
て変質し難い性質を有する）絶縁性薄膜Ｃ（この例で
は、厚さが1000Å程度の石英膜）を形成して、全体とし
てシート状チップ構造をなすシート型誘電率測定用セン
サーＸを構成してある。なお、図中11A,11Bは、夫々、
各櫛歯形薄膜状対向電極11a,11bからの信号取り出し用
端子であり、これらはプラグ部12上に至るように形成さ
れている。The plan view of FIG. 1 (a) and the vertical cross-sectional views of FIG. 1 (b) and (c) show a basic embodiment, and as shown in the drawing, it is a relatively small and thin rectangular flat plate. On the surface (upper surface side) of the insulating substrate 9 (in this example, a glass plate having a length of 15 mm, a width of 15 mm, and a thickness of about 15 mm), the target substance O (solid such as liquid or powder) is dropped or A recess 10 that can be accommodated is formed by an operation such as mounting, and a dielectric constant detecting electrode portion B (in this example, a pair of comb-teeth thin-film counter electrodes 11a and 11b) is formed on the bottom surface of the recess 10. , Overall length x width x thickness is 8mm x 8mm x 0.2μ
An aluminum electrode having a line width and an interval of about 20 to 30 Å is formed on the order of m and at least the entire dielectric constant detecting electrode portion B (in this example, the electrode portion B is adhered and formed) An insulating thin film that is dense (that is, has a property of not allowing the substance to be measured to permeate) and chemically stable (that is, has a property that is difficult to be altered by the substance to be measured) over the entire upper surface of the substrate 9. C (in this example, a quartz film having a thickness of about 1000Å) is formed to form a sheet-type dielectric constant measuring sensor X having a sheet-shaped chip structure as a whole. In the figure, 11A and 11B are respectively
Terminals for taking out signals from the comb-teeth-shaped thin-film counter electrodes 11a and 11b, which are formed so as to extend onto the plug portion 12.
ところで、上記構成のシート型誘電率測定用センサーＸ
は、下記のように、半導体製造プロセスに類似した量産
方式により、容易にかつ安価に製造できるものである。By the way, the sheet-type dielectric constant measuring sensor X having the above structure
Can be easily and cheaply manufactured by a mass production method similar to the semiconductor manufacturing process as described below.
即ち、前記ガラス製絶縁性基板９における測定対象物質
Ｏを収容するための凹部10の研磨表面に、例えば真空蒸
着したアルミニウム薄膜に対するリソグラフ処理を行う
等の手段を用いて、前記櫛歯形薄膜状対向電極11a,11b
から成る誘電率検出用電極部Ｂを形成し、次に、それら
基板９と両電極11a,11bとの間の良好な密着性を確保す
るために、300℃の窒素雰囲気中で約15分程度シンタリ
ング処理を施し、しかる後、前記電極部Ｂが付着形成さ
れている絶縁性基板９の上面側全体に、RFスパッタリン
グ等の手段を用いて、石英膜を堆積形成することによ
り、前記絶縁性薄膜Ｃを形成するのである。That is, on the polished surface of the recess 10 for containing the substance to be measured O in the glass insulating substrate 9, the comb-teeth-shaped thin film-shaped opposing surface is formed by means of, for example, performing lithographic processing on a vacuum-deposited aluminum thin film. Electrodes 11a, 11b
To form a dielectric constant detecting electrode portion B, and then to secure good adhesion between the substrate 9 and both electrodes 11a and 11b, in a nitrogen atmosphere at 300 ° C. for about 15 minutes. A sintering process is performed, and thereafter, a quartz film is deposited and formed on the entire upper surface side of the insulating substrate 9 on which the electrode portion B is adhered and formed by means of RF sputtering or the like, whereby the insulating property is improved. The thin film C is formed.
なお、前記絶縁性基板９としては、上記したガラスプレ
ートに限らず、アルミナ,SiO2,石英など他の絶縁性無機
物質から成るプレートを用いてもよいことは勿論、プラ
スチックプレートなどの他の材質からなる基板上にそれ
ら絶縁性無機物質の何れかをCVD,溶射などの手段により
付着させたものを用いてもよい。The insulating substrate 9 is not limited to the glass plate described above, but a plate made of other insulating inorganic material such as alumina, SiO 2 , or quartz may be used, and other materials such as a plastic plate may be used. You may use what made any of those insulating inorganic substances adhere to the board | substrate which consists of these by means, such as CVD and thermal spraying.
また、前記電極11a,11bとしては、上記したアルミニウ
ム電極に限らず、銀などの他の導電物質を用いてもよ
い。Further, the electrodes 11a and 11b are not limited to the above aluminum electrodes, and other conductive materials such as silver may be used.
更に、前記絶縁性薄膜Ｃとしては、上記した石英膜に限
らず、例えばCVDにより形成した窒化シリコン膜などの
ように、緻密でかつ化学的に安定なものであれば、他の
材質のものを用いてもよい。Further, the insulating thin film C is not limited to the above-mentioned quartz film, but may be made of another material as long as it is dense and chemically stable, such as a silicon nitride film formed by CVD. You may use.
更にまた、上記実施例においては、前記誘導率検出用電
極部Ｂを、一対の櫛歯形薄膜状対向電極11a,11bで構成
したものを示したが、その形状は対向櫛歯形に限らず、
例えば対向渦巻形にするなど任意の形状を採用し得るも
のであり、また、複数対の対向電極を電気的並列関係に
設けるようにしてもよい。Furthermore, in the above embodiment, the inductivity detection electrode portion B is shown to be composed of a pair of comb tooth-shaped thin film counter electrodes 11a and 11b, but the shape is not limited to the counter comb tooth shape.
For example, an arbitrary shape such as a counter spiral shape may be adopted, and a plurality of pairs of counter electrodes may be provided in an electrically parallel relationship.
さて、上記のように構成されたシート型誘電率測定用セ
ンサーＸは、測定に際して、第２図に示すように、コン
パクトな電卓型に構成された誘電率測定器Ｙ（この場合
には、特にオイル鮮度計として用い得るように構成され
ているが、一般的な誘電率測定器として用い得ることは
言うまでもない）におけるセンサー装着部13に対して、
着脱自在に装着される。なお、誘電率測定器Ｙは、図示
しているように、その外面部に、誘電率表示部14,鮮度
判定結果表示用LED15…，シート型誘電率測定用センサ
ーＸ側のプラグ部12に対応するコンセント部16や、図示
はしていないが、ON/OFFスイッチ，ゼロ点調整ボリュー
ム，スパン調整ボリューム等の制御手段を備えている。
また、その内部回路構成は、測定された誘電率に基いて
鮮度の良否を判別する判定回路（図示せず）を備えてい
ることを除いて、前記第７図で説明した誘電率測定器の
場合と基本的に同様であるから、その説明は省略する。In the measurement, the sheet-type dielectric constant measuring sensor X having the above-described structure has a compact calculator type dielectric constant measuring device Y (in this case, in particular, as shown in FIG. 2). It is configured so that it can be used as an oil freshness meter, but it goes without saying that it can be used as a general dielectric constant measuring device).
It is detachably attached. As shown in the figure, the permittivity measuring device Y corresponds to the permittivity display section 14, the freshness determination result display LED 15 ..., and the plug section 12 on the sheet-type permittivity measurement sensor X side on the outer surface thereof. It has a power outlet section 16 and control means (not shown) such as an ON / OFF switch, a zero point adjusting volume and a span adjusting volume.
In addition, the internal circuit configuration thereof includes a determination circuit (not shown) that determines whether the freshness is good or bad based on the measured permittivity, except that the permittivity measuring device described in FIG. The description is omitted because it is basically the same as the case.
かかる構成において、前記誘電率測定器Ｙにおけるセン
サー装着部13に対して、上記本考案のシート型誘電率測
定用センサーＸを装着し、電源投入，ゼロ点調整，スパ
ン調整等の所定の準備操作を行った後、センサーＸの凹
部10内に、測定対象物質Ｏ（非導電性物質であると導電
性物質であるとを問わず、また、液体であると固体であ
るとを問わない）を滴下（液体の場合）または載置（固
体の場合）により導入すれば、誘電率検出用電極部Ｂに
おける両櫛歯形薄膜状対向電極11a,11b間に静電容量の
変化が生じるので、その静電容量変化に対応した誘電率
が、予め求められている後述の検量線に基いて計測さ
れ、誘電率表示部14にその値がデジタル表示されると共
に、その測定対象物質Ｏがオイルである場合には、鮮度
判定結果表示用LED15…にオイルの鮮度判定結果が表示
される。In such a configuration, the sheet-type dielectric constant measuring sensor X of the present invention is mounted on the sensor mounting portion 13 of the dielectric constant measuring device Y, and predetermined preparatory operations such as power-on, zero point adjustment, span adjustment, etc. After performing, the measurement target substance O (whether it is a non-conductive substance or a conductive substance, or a liquid or a solid substance) is placed in the recess 10 of the sensor X. If it is introduced by dropping (in the case of a liquid) or placing (in the case of a solid), a change in electrostatic capacitance occurs between the comb-teeth shaped thin film counter electrodes 11a and 11b in the dielectric constant detecting electrode portion B, so that static When the permittivity corresponding to the change in capacitance is measured based on a calibration curve which will be obtained in advance, and the value is digitally displayed on the permittivity display unit 14, and the measurement target substance O is oil. For the freshness judgment result display LED15 ... Le freshness result of being displayed.
なお、第３図のグラフは、上記シート型誘電率測定用セ
ンサーＸを用いて、比誘電率εが既知である種々の物質
（この場合には全て液体である）を測定対象として、そ
の静電容量Ｅの測定実験を行った結果の一例を表すもの
であり、この結果から明らかなように、両者は非常に良
い相関を示しており（この場合における回帰式は、Ｅ＝
7.5ε＋56.1であり、これが前記検量線に相当する）、
従って、これらシート型誘電率測定用センサーＸおよび
誘電率測定器Ｙによれば、非常に優れた誘電率測定精度
および良好な直線性が得られることを確認できた。Note that the graph of FIG. 3 shows various static substances whose relative permittivity ε is known (all liquids in this case) using the above-mentioned sheet type dielectric constant measuring sensor X, and its static This shows an example of the result of the measurement experiment of the electric capacity E, and as is clear from this result, both have a very good correlation (the regression equation in this case is E =
7.5ε + 56.1, which corresponds to the above calibration curve),
Therefore, it has been confirmed that the sheet-type dielectric constant measuring sensor X and the dielectric constant measuring device Y can provide extremely excellent dielectric constant measuring accuracy and good linearity.
以上詳述したところから明らかなように、本願考案によ
れば、絶縁性基板上に凹部を設け、この凹部の表面に少
なくとも一対の薄膜状対向電極から成る誘電率検出用電
極部を付着形成すると共に、その誘電率検出用電極部の
全体を、緻密でかつ化学的に安定な絶縁性薄膜で被覆
し、前記絶縁性薄膜によって、測定対象物質が一対の薄
膜状対向電極および前記誘電率検出用電極部における絶
縁性基板の表面に対して直接接触することを回避できる
ので、測定対象物質が誘電率検出用電極部における絶縁
性基板の表面部に浸透して、次の測定のために洗浄して
も完全には除去できないといった従来のシート型誘電率
測定用センサーの問題点を解消でき、したがって、誘電
率測定器のセンサー装着部に装着して前記凹部内に測定
対象物質を滴下あるいは載置する操作だけで、耐久性，
測定精度，測定結果の再現性を従来に比べて大幅に優れ
たものにしながら、容易に測定対象物質の誘電率をうる
ことができる。As is clear from the above detailed description, according to the present invention, a concave portion is provided on an insulating substrate, and a dielectric constant detecting electrode portion including at least a pair of thin film counter electrodes is attached and formed on the surface of the concave portion. At the same time, the entire dielectric constant detecting electrode portion is covered with a dense and chemically stable insulating thin film, and the insulating thin film serves as a pair of thin film counter electrodes for the measurement target substance and the dielectric constant detecting electrode. Since it is possible to avoid direct contact with the surface of the insulating substrate in the electrode part, the substance to be measured penetrates into the surface part of the insulating substrate in the electrode part for permittivity detection and is washed for the next measurement. However, it is possible to solve the problem of the conventional sheet type dielectric constant measurement sensor that it cannot be completely removed. Therefore, the measurement target substance is dropped in the concave part by mounting it on the sensor mounting part of the dielectric constant measuring instrument. The only operation to be placed, durability,
It is possible to easily obtain the dielectric constant of the substance to be measured while making the measurement accuracy and the reproducibility of the measurement result significantly superior to the conventional one.
また、測定対象物質が導電性の物質である場合、従来の
シート型誘電率測定用センサーでは前記一対の薄膜状対
向電極間に抵抗成分が発生し、測定対象物質の存在によ
る静電容量変化を正確には計測できず、サンプル油のよ
うに非導電性の物質しか測定対象にできなかったのを、
本願考案では、ひとつのセンサーでありながら、非導電
性物質であると導電性物質であるとを問わず、多種多用
な物質を測定対象にでき、かつ、その誘電率を十分に精
度良く計測できるので、汎用性が極めて高い、という優
れた効果を有する。Further, when the substance to be measured is a conductive substance, a resistance component is generated between the pair of thin film-shaped counter electrodes in the conventional sheet-type dielectric constant measurement sensor, and the capacitance change due to the presence of the substance to be measured is caused. It was impossible to measure accurately, and only non-conductive substances such as sample oil could be measured,
According to the present invention, a wide variety of substances can be measured, regardless of whether they are one sensor or non-conductive substance or conductive substance, and their permittivity can be measured sufficiently accurately. Therefore, it has an excellent effect of being extremely versatile.
第１図ないし第３図は、本考案の具体的実施例を示すも
のであって、第１図（イ）は本考案の一実施例に係るシ
ート型誘電率測定用センサーの一部を破断した平面図、
第１図（ロ）は第１図（イ）のＩ−Ｉ線矢視図、第１図
（ハ）は第１図（イ）のII−II線矢視図、第２図はその
使用例を説明するための全体斜視図、第３図は実験結果
を表すグラフである。 そして、第４図および第５図は、本考案の技術的背景お
よび従来技術の問題点を説明するためのものであって、
第４図は原理的な誘電率測定システムを示すブロツク回
路構成図であり、第５図は従来構成のシート型誘電率測
定用センサーの具体的構成を示し、第５図（イ）はその
平面図であり、第５図は（ロ）は第５図（イ）のVIII−
VIII線矢視図である。 ９……絶縁性基板、11a,11b……薄膜状対向電極、Ｂ…
…誘電率検出用電極部、Ｃ……絶縁性薄膜。1 to 3 show a concrete embodiment of the present invention, and FIG. 1 (a) shows a part of a sheet-type dielectric constant measuring sensor according to an embodiment of the present invention. A plan view,
1 (b) is a view taken along the line II of FIG. 1 (a), FIG. 1 (c) is a view taken along the line II-II of FIG. 1 (a), and FIG. 2 is its use. An overall perspective view for explaining an example, and FIG. 3 are graphs showing experimental results. 4 and 5 are for explaining the technical background of the present invention and the problems of the prior art,
FIG. 4 is a block circuit configuration diagram showing a principle dielectric constant measuring system, FIG. 5 shows a concrete structure of a conventional sheet type dielectric constant measuring sensor, and FIG. Fig. 5 shows (b) in Fig. 5 (a), VIII-.
It is a VIII line arrow line view. 9 ... Insulating substrate, 11a, 11b ... Thin film counter electrode, B ...
... Dielectric constant detecting electrode, C ... Insulating thin film.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−169719（ＪＰ，Ａ) 特開 昭60−50445（ＪＰ，Ａ) 特開 昭60−18768（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-60-169719 (JP, A) JP-A-60-50445 (JP, A) JP-A-60-18768 (JP, A)
Claims (1)
により収容可能な凹部を有する絶縁性基板の表面に少な
くとも一対の薄膜状対向電極から成る誘電率検出用電極
部を付着形成すると共に、その誘電率検出用電極部の全
体を、緻密でかつ化学的に安定な絶縁性薄膜で被覆して
なり、測定に際して、コンパクトな電卓型に構成された
誘電率測定器のセンサー装着部に装着し、前記凹部内に
測定対象物質を滴下あるいは載置により導入すること
で、誘電率測定器の誘電率表示部に測定対象物質の誘電
率表示が行えることを特徴とするシート型誘電率測定用
センサー。1. A dielectric constant detecting electrode portion comprising at least a pair of thin film counter electrodes is adhered and formed on the surface of an insulating substrate having a concave portion capable of accommodating by dropping or placing a substance to be measured. The whole of the dielectric constant detection electrode part is covered with a dense and chemically stable insulating thin film, and at the time of measurement, it is mounted on the sensor mounting part of the dielectric constant measuring device configured in a compact calculator type, A sheet-type dielectric constant measuring sensor characterized in that a dielectric constant of a measurement target substance can be displayed on a dielectric constant display portion of a dielectric constant measuring device by introducing a measurement target substance into the recess by dropping or placing the target substance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987063051U JPH074599Y2 (en) | 1987-04-25 | 1987-04-25 | Sheet type sensor for permittivity measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987063051U JPH074599Y2 (en) | 1987-04-25 | 1987-04-25 | Sheet type sensor for permittivity measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189375U JPH0189375U (en) | 1989-06-13 |
| JPH074599Y2 true JPH074599Y2 (en) | 1995-02-01 |
Family
ID=31288584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987063051U Expired - Lifetime JPH074599Y2 (en) | 1987-04-25 | 1987-04-25 | Sheet type sensor for permittivity measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH074599Y2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090100911A1 (en) * | 2004-01-13 | 2009-04-23 | Toshiaki Kawanishi | Method for producing synthetic resin mold package, alcohol concentration sensor and apparatus for measuring alcohol concentration |
| JP4821560B2 (en) * | 2006-10-27 | 2011-11-24 | 株式会社デンソー | Liquid property sensor |
| JP4967673B2 (en) * | 2007-01-16 | 2012-07-04 | パナソニック株式会社 | Liquid container for electrical equipment |
| EP2616801A2 (en) * | 2010-09-14 | 2013-07-24 | 3M Innovative Properties Company | Methods and devices for acquiring an oil sample and monitoring the quality thereof |
| CN108051645B (en) * | 2017-12-26 | 2023-10-27 | 宁夏钜晶源晶体科技有限公司 | Lithium tantalate and lithium niobate wafer resistivity testing device and testing method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6018768A (en) * | 1983-07-12 | 1985-01-30 | Katsuo Ebara | Non-contact type conductivity/dielectric constant simultaneous measuring sensor |
| JPS6050445A (en) * | 1983-08-31 | 1985-03-20 | マジヤール ツドマニヨス アカデミア ケズポンテイ ヒバタラ | Capacitive measuring element |
| JPS60169719A (en) * | 1984-02-14 | 1985-09-03 | Nippon Soken Inc | Physical quantity detecting apparatus |
-
1987
- 1987-04-25 JP JP1987063051U patent/JPH074599Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0189375U (en) | 1989-06-13 |
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