JPH0744972Y2 - Non-contact linear displacement sensor - Google Patents
Non-contact linear displacement sensorInfo
- Publication number
- JPH0744972Y2 JPH0744972Y2 JP14903589U JP14903589U JPH0744972Y2 JP H0744972 Y2 JPH0744972 Y2 JP H0744972Y2 JP 14903589 U JP14903589 U JP 14903589U JP 14903589 U JP14903589 U JP 14903589U JP H0744972 Y2 JPH0744972 Y2 JP H0744972Y2
- Authority
- JP
- Japan
- Prior art keywords
- yoke
- sensor unit
- guide
- fixed
- base end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は無接触直線変位センサに関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a non-contact linear displacement sensor.
従来、接点摺動型の変位センサは一般的に使用されてい
るが、さらに、磁気抵抗素子を用いた無接触直線変位セ
ンサとして直線型のパターンをもつ磁気抵抗素子とマグ
ネットの組み合わせのものも使用されている。Conventionally, a sliding contact type displacement sensor is generally used, but as a non-contact linear displacement sensor using a magnetoresistive element, a combination of a magnetoresistive element having a linear pattern and a magnet is also used. Has been done.
従来使用されている接触形式直線変位センサは摺動形式
である関係上、検出信号にはノイズが多く含まれ、この
センサを使った場合には誤動作発生の原因にもなる欠点
があった。さらに、無接触型方式も含め、従来方式で
は、何れも磁気抵抗素子とマグネットの間隙を誤差なく
保ち乍ら直線摺動する構造が要求されていた。殊に、長
ストロークの場合、この機構は高価となり、また低荷重
での作動が困難となる欠点があった。本考案は、検出信
号内のノイズ含有率が小さく、従来使用のものより構造
が簡素であって量産に適し、低荷重によって作動する外
に、計測すべき直線変位の範囲が異なったものをも容易
に作成することができる無接触直線変位センサを提供す
ることを目的とする。Since the contact type linear displacement sensor used conventionally is a sliding type, the detection signal contains a lot of noise, and when this sensor is used, it has a drawback that it may cause malfunction. Further, in any of the conventional methods including the non-contact type method, a structure that linearly slides while maintaining the gap between the magnetoresistive element and the magnet without error has been required. In particular, in the case of a long stroke, this mechanism is disadvantageous in that it is expensive and it is difficult to operate at a low load. INDUSTRIAL APPLICABILITY The present invention has a small noise content in the detection signal, has a simple structure and is suitable for mass production as compared with the conventional one, and it operates with a low load and also has a range of linear displacement to be measured. An object of the present invention is to provide a non-contact linear displacement sensor that can be easily manufactured.
本考案は上記問題点を解決するために、センサユニット
と該センサユニットの駆動手段とから構成され、上記セ
ンサユニットは透磁性物質によって湾曲形成したヨーク
１の両端に取り付けた一対の永久磁石２と、上記一対の
永久磁石の磁極間に介設した磁気抵抗素子３と、上記ヨ
ーク１の両端部を所定角度回動自在に支持する本体４
と、上記ヨーク１の湾曲部分に一端が係止され該ヨーク
を回転原位置に復帰させるべく他端が固定部材に係止さ
れたバックスプリング11とから成り、上記センサユニッ
ト駆動手段は、上記ヨーク１の湾曲形成部分に先端20a
を固設し円弧形状のガイト20と、上記ガイドの基端20b
にその基端22bを固着して上記ガイドの先端20a側に案内
されるベルト22と、上記ベルトの先端22aが固着されそ
のガイドの基端20b側の基端23cが被測定部材と係合し直
線移動すると共に上記本体４と一体的に形成した枠体24
に支持される棒部材23とから成る。In order to solve the above problems, the present invention comprises a sensor unit and a driving means for the sensor unit, and the sensor unit includes a pair of permanent magnets 2 attached to both ends of a yoke 1 curved by a magnetically permeable material. , A magnetic resistance element 3 provided between the magnetic poles of the pair of permanent magnets, and a body 4 for supporting both ends of the yoke 1 so as to be rotatable by a predetermined angle.
And a back spring 11 having one end locked to a curved portion of the yoke 1 and the other end locked to a fixed member to return the yoke to the original position of rotation, and the sensor unit driving means includes the yoke. Tip 20a on the curved portion of 1
Fixed and arc-shaped guide 20 and the base end 20b of the above guide.
The belt 22 which is fixed at its base end 22b to be guided to the tip end 20a side of the guide and the tip end 22a of the belt is fixed so that the base end 23c at the base end 20b side of the guide engages with the member to be measured. A frame 24 that moves linearly and is formed integrally with the main body 4
And a rod member 23 supported by the.
磁気抵抗素子３は一対の永久磁石２の磁極間に設けたの
で、磁束密度が大きく、安定した磁気回路内で作動す
る。また、永久磁石２が両端に取り付けられたヨーク１
に円弧状のガイド20が固定され、このガイド内をベルト
22が移動し、このベルトの先端22aに棒部材23の第１突
起23aを取着し、しかも、この棒部材23の基端23cに被測
定物を係合させて被測定物の変移量を測定するので、測
定データは確実，安定となる。しかも、棒部材23の第１
突起23aはベルト22を介して円弧状ガイド20の基端20bに
固着しているので、棒部材23の移動は直線運動となり、
この棒部材23の直線移動に比例した数値がセンサユニッ
トを形成する磁気抵抗素子３の出力端子に出力するの
で、本考案は無接触直線変位センサとして作動する。Since the magnetoresistive element 3 is provided between the magnetic poles of the pair of permanent magnets 2, it has a large magnetic flux density and operates in a stable magnetic circuit. Also, a yoke 1 having permanent magnets 2 attached to both ends
The arc-shaped guide 20 is fixed to the
22 moves, the first projection 23a of the rod member 23 is attached to the front end 22a of the belt, and the base end 23c of the rod member 23 is engaged with the measured object to measure the displacement amount of the measured object. Since the measurement is performed, the measurement data is reliable and stable. Moreover, the first of the rod member 23
Since the protrusion 23a is fixed to the base end 20b of the arc-shaped guide 20 via the belt 22, the movement of the rod member 23 becomes a linear movement,
Since a numerical value proportional to the linear movement of the rod member 23 is output to the output terminal of the magnetoresistive element 3 forming the sensor unit, the present invention operates as a contactless linear displacement sensor.
以下、本考案の実施例を図面を参照して説明する。第１
図ないし第８図は本実施例の構成を示す。本実施例の主
要部としてのセンサユニットは透磁性物質でつくった断
面コの字形のヨーク１と、このヨーク１の両端部内側に
相対して取り付けた一対の永久磁石２と、磁気抵抗素子
３と合成樹脂製の本体４とからなり、上記ヨーク１はそ
の両端部外側に突設した永久磁石２の軸心と一致する軸
5,5及び該軸5,5に外嵌する軸受材6,6を介して本体４に
回動自在に支持されている。上記磁気抵抗素子３は、第
５図に示すように、両端をそれぞれ入力端子8,9とし、
中央部分10と何れか１つの入力端子８まはた９を出力端
子とし、端子８と10間および端子９と10間とに２分割さ
れた磁気抵抗素子3a,3bは、同心円を２分割した対向半
円周上に外側から内側に向って順次，往復接続する形式
に配置して構成される。さらに、磁気抵抗素子３は第４
図に示すように、その入力端子8,9、出力端子10が各端
子板12,13,14に接続されるとともに、永久磁石２の長方
形の磁極面により、磁気抵抗素子３の半分を覆われ、ヨ
ーク１が図示の位置にあるとき、磁力線の半分が磁気抵
抗素子3a,3bを等分に貫通している。また磁気抵抗素子
３は第１図に示すように、この中心が本体４の軸心16と
一致するよにに、本体４に支持され、各端子板12,13,14
の末端から導いた３本の端子17,18,19が本体４を貫通し
て外方へ突出しており、永久磁石２の磁極面が磁気抵抗
素子３の上面および端子板12,13,14の下面に近接してい
る。Hereinafter, embodiments of the present invention will be described with reference to the drawings. First
FIG. 8 to FIG. 8 show the structure of this embodiment. The sensor unit as the main part of the present embodiment is a yoke 1 made of a magnetically permeable material and having a U-shaped cross section, a pair of permanent magnets 2 attached to the inside of both ends of the yoke 1, and a magnetoresistive element 3. And a main body 4 made of synthetic resin, and the yoke 1 is an axis that coincides with the axis of the permanent magnet 2 that is provided on the outside of both ends thereof.
It is rotatably supported by the main body 4 via bearing members 6,6 which are fitted onto the shafts 5,5 and the shafts 5,5. As shown in FIG. 5, the magnetoresistive element 3 has input terminals 8 and 9 at both ends,
The central portion 10 and any one of the input terminals 8 or 9 are used as output terminals, and the magnetoresistive elements 3a and 3b divided into two between the terminals 8 and 10 and between the terminals 9 and 10 are concentric circles divided into two. It is constructed by arranging in the form of reciprocal connection in order from the outside to the inside on the opposite semicircle. Further, the magnetoresistive element 3 has a fourth
As shown in the figure, the input terminals 8 and 9 and the output terminal 10 are connected to the terminal plates 12, 13 and 14, and the rectangular magnetic pole surface of the permanent magnet 2 covers half of the magnetoresistive element 3. When the yoke 1 is at the position shown in the drawing, half of the lines of magnetic force penetrate the magnetoresistive elements 3a and 3b equally. Further, as shown in FIG. 1, the magnetoresistive element 3 is supported by the main body 4 such that its center coincides with the axis 16 of the main body 4, and each of the terminal plates 12, 13, 14 is supported.
The three terminals 17, 18, 19 led from the end of each of the magnets penetrate the main body 4 and project outward, and the magnetic pole surface of the permanent magnet 2 includes the upper surface of the magnetoresistive element 3 and the terminal plates 12, 13, 14. Close to the bottom surface.
また、本体４の軸５には第３図に示すように、バックス
プリング11を巻回し、このバックスプリングの一端を本
体４の壁7a上の上辺部7a1に係止させると共に、他端を
ヨーク１の折曲部上辺部1aに係止させ、バックスプリン
グ11の弾揆力によって、ヨーク１を非計測時には本体４
の壁7bに当接させヨーク回転の原位置としている。な
お、バックスプリング11はヨーク１を回転原位置に復帰
させれば足りるので、その一端をヨーク１の湾曲部に係
止し、他端を本体４のような固定部材に係止させてもよ
い。As shown in FIG. 3, a back spring 11 is wound around the shaft 5 of the main body 4, one end of the back spring is locked to the upper side portion 7a 1 on the wall 7a of the main body 4, and the other end is When the yoke 1 is not measured, the main body 4 is locked by the upper side 1a of the bent portion of the yoke 1 and the elastic force of the back spring 11
It is brought into contact with the wall 7b of the to make the yoke rotate in its original position. Since the back spring 11 is sufficient if the yoke 1 is returned to the original position of rotation, one end thereof may be locked to the curved portion of the yoke 1 and the other end may be locked to a fixing member such as the main body 4. .
また、ヨーク１は対向配置した永久磁石2,2の軸心と一
致する本体４の軸５を中心として回動するもので、この
回動範囲αは第３図に示すように本体４に設けた壁7a,7
bによるヨーク１の回動制限によって約120度に規制さ
れ、この回動範囲α内では磁気抵抗素子３の出力電圧が
第６図に示すように直線的に変化する。Further, the yoke 1 is rotated about a shaft 5 of the main body 4 which coincides with the axial center of the permanent magnets 2, 2 arranged opposite to each other, and the rotation range α is set on the main body 4 as shown in FIG. Abandoned walls 7a, 7
The rotation of the yoke 1 by b is restricted to about 120 degrees, and the output voltage of the magnetoresistive element 3 linearly changes within this rotation range α as shown in FIG.
なお、ヨーク１はコの字形の代りに、円弧形状に形成し
てもよく、永久磁石２の断面は半円形にしてもよい。The yoke 1 may be formed in an arc shape instead of the U-shape, and the permanent magnet 2 may have a semicircular cross section.
次に、本実施例の主要部の駆動手段としては、前記セン
サユニットを形成するヨーク１のコの字形湾曲部1bに、
第７図（Ａ），（Ｂ）、第８図に示すように、本体４の
軸５を中心とする円弧状に形成されたガイド20の先端20
aが固着され、基端20bは自由端となっている。このガイ
ド20の基端20bには平ワイヤなどで形成されたベルト22
の基端22bが固着され、その先端22aは棒部材23上の第１
突起23aに固着されている。また、ガイド20の外表面に
は溝21が形成され、この溝の内部に上記ベルト22が案内
されている。上記棒部材23はガイド20の先端20aにおけ
る接線と平行配置されている。Next, as the driving means of the main part of the present embodiment, the U-shaped curved portion 1b of the yoke 1 forming the sensor unit,
As shown in FIGS. 7 (A), (B), and FIG. 8, the tip 20 of the guide 20 formed in an arc shape with the shaft 5 of the main body 4 as the center.
a is fixed and the base end 20b is a free end. A belt 22 formed of a flat wire or the like is provided at the base end 20b of the guide 20.
The base end 22b of the rod 22 is fixed, and the tip 22a of the
It is fixed to the protrusion 23a. A groove 21 is formed on the outer surface of the guide 20, and the belt 22 is guided inside the groove. The rod member 23 is arranged parallel to the tangent line at the tip 20a of the guide 20.
先に述べたように、センサユニットを形成するヨーク１
のコの字形湾曲部1bは、本体４の壁7bにバックスプリン
グ11の弾力によって当接しているので、棒部材23はその
第１突起23aに固着されたベルト22の張力を受けて、第
７図（Ａ）の図面上右側に向って移動し、棒部材23に設
けた第２突起23bがセンサユニットの本体４と一体形成
された枠体24の折曲部24bに当接している。As described above, the yoke 1 forming the sensor unit
Since the U-shaped curved portion 1b is in contact with the wall 7b of the main body 4 by the elastic force of the back spring 11, the rod member 23 receives the tension of the belt 22 fixed to the first protrusion 23a thereof, and The second protrusion 23b provided on the rod member 23 contacts the bent portion 24b of the frame body 24 integrally formed with the main body 4 of the sensor unit by moving toward the right side in the drawing of FIG.
次に、本実施例の作動について説明する。Next, the operation of this embodiment will be described.
一対の永久磁石2,2がヨーク１の両端部内側に取り付け
られて磁気抵抗素子３を介在しているので、磁気閉回路
が形成され、磁極間に強力な磁場が作られる。このた
め、ヨーク１が回動すると、第６図に示すように、磁気
抵抗素子３の出力電圧が急勾配で変化し、出力感度が大
きい。Since the pair of permanent magnets 2, 2 are attached inside the both ends of the yoke 1 and the magnetoresistive element 3 is interposed, a magnetic closed circuit is formed and a strong magnetic field is created between the magnetic poles. Therefore, when the yoke 1 rotates, the output voltage of the magnetoresistive element 3 changes steeply as shown in FIG. 6, and the output sensitivity is large.
また、ヨーク１が回動しても、磁束密度が変化しないの
で、出力電圧は広い範囲に渡って安定した変化をする。Further, since the magnetic flux density does not change even when the yoke 1 rotates, the output voltage changes stably over a wide range.
他方、ヨーク１の湾曲部1bはバックスプリング11の弾力
によって、常時、本体４の壁7bに当接し、従って、棒部
材23の第２突起23bはセンサユニットの本体４と一体的
に形成した枠体24の折曲部24bに係止している。このた
め、直線移動距離を検出したい被測定物を棒部材23の基
端23cに当接させ、センサユニットを形成する磁気抵抗
素子３の入力端子を所定電圧値の直流電源に接続してお
くことによって、被測定物が第７図（Ａ）の矢印25方向
に直線移動すると、棒部材23も矢印25方向に直線移動
し、第８図に示すように最大限、棒部材23の第１突起23
aが枠体24の折曲部24aに係止するまで移動する。この移
動距離に応じて上記磁気抵抗素子３の出力端子間に電圧
値が発生することになる。On the other hand, the curved portion 1b of the yoke 1 is always in contact with the wall 7b of the main body 4 by the elastic force of the back spring 11, so that the second protrusion 23b of the rod member 23 is a frame formed integrally with the main body 4 of the sensor unit. It is locked to the bent portion 24b of the body 24. Therefore, the object to be measured whose linear movement distance is to be detected is brought into contact with the base end 23c of the rod member 23, and the input terminal of the magnetoresistive element 3 forming the sensor unit is connected to a DC power source having a predetermined voltage value. When the object to be measured linearly moves in the direction of arrow 25 in FIG. 7 (A), the rod member 23 also moves linearly in the direction of arrow 25, and as shown in FIG. twenty three
It moves until a is locked in the bent portion 24a of the frame body 24. A voltage value is generated between the output terminals of the magnetoresistive element 3 according to this moving distance.
本考案は、ヨークの両端に取り付けた一対の永久磁石の
間に磁気抵抗素子を介在させ、この磁気抵抗素子の両端
に直流電源の入力端子を接続し、中間部分に出力端子を
設けて、ポテンショメータ形式のセンサユニットに形成
し、上記ヨークの回動駆動手段として被測定物に係合す
る直線変移部材を用いているので、下記の効果を奏す
る。According to the present invention, a magnetoresistive element is interposed between a pair of permanent magnets attached to both ends of a yoke, an input terminal of a DC power source is connected to both ends of the magnetoresistive element, and an output terminal is provided at an intermediate portion of the potentiometer. Since a linear displacement member that engages with the object to be measured is used as the rotation driving means for the yoke, the following effects are achieved.
（１）直線変位センサは原理的には無接触式ポテンショ
メータであるので、測定信号には含有ノイズが少なく、
測定精度が高い。(1) Since the linear displacement sensor is a non-contact potentiometer in principle, the measurement signal contains less noise,
High measurement accuracy.
（２）構成部品はセンサユニットとしてのヨーク，永久
磁石，磁気抵抗素子，およびセンサ本体，バックスプリ
ング，センサユニットの駆動手段としての円弧状ガイ
ド，ベルト，棒部材などであるので、構造が簡単であっ
て、量産に適する。(2) The components are a yoke as a sensor unit, a permanent magnet, a magnetoresistive element, a sensor body, a back spring, an arc-shaped guide as a driving means of the sensor unit, a belt, a rod member, etc., so that the structure is simple. It is suitable for mass production.
（３）被測定物の荷重は、センサユニット本体の軸に回
動自在に取り付けたヨークをバックスプリングの弾力に
抗して駆動できれば足りるので、低荷重ですみ、感度が
高い。(3) The load of the object to be measured suffices if the yoke rotatably attached to the shaft of the sensor unit body can be driven against the elastic force of the back spring, so that the load is low and the sensitivity is high.
（４）円弧状のガイドの中心径を任意の大きさにすれ
ば、同一のヨークの回転角で大小の直線変位を変換でき
る。(4) If the center diameter of the arc-shaped guide is arbitrarily set, large and small linear displacements can be converted with the same rotation angle of the yoke.
第１図ないし第６図は本考案実施例のセンサユニットの
構成図で、第１図は一部切断側面図、第２図，第３図，
第４図は第１図におけるII-II方向,III-III方向の矢視
図およびIV-IV方向からの拡大矢視図、第５図は磁気抵
抗素子の概念を示す構成図、第６図はセンサユニットの
特性図、第７図，第８図は本実施例のセンサユニットと
該センサユニットの駆動手段との関連構造を示し、第７
図（Ａ）はセンサユニットが駆動されていない状態の正
面図、第７図（Ｂ）は第７図（Ａ）内のガイドの拡大斜
視図、第８図はセンサユニットが駆動されている状態の
正面図である。 １……ヨーク、２……永久磁石、３……磁気抵抗素子、
４……本体、５……軸、６……軸受材、７……壁、8,9
……入力端子、10……出力端子、11……バックスプリン
グ、12,13,14……端子板、17,18,19……端子、20……ガ
イド、20a……ガイドの先端、20b……ガイドの基端、21
……溝、22……ベルト、22a……ベルトの先端、22b……
ベルトの基端、23……棒部材、24……枠体。1 to 6 are configuration diagrams of a sensor unit according to an embodiment of the present invention. FIG. 1 is a partially cut side view, FIG. 2, FIG.
FIG. 4 is a view in the directions II-II and III-III in FIG. 1 and an enlarged view in the direction IV-IV, and FIG. 5 is a configuration diagram showing the concept of the magnetoresistive element, FIG. FIG. 7 is a characteristic diagram of the sensor unit, and FIGS. 7 and 8 show a related structure between the sensor unit of this embodiment and the driving means of the sensor unit.
FIG. 7A is a front view of the sensor unit not driven, FIG. 7B is an enlarged perspective view of the guide in FIG. 7A, and FIG. 8 is a sensor unit driven. FIG. 1 ... York, 2 ... Permanent magnet, 3 ... Magnetoresistive element,
4 ... Main body, 5 ... Shaft, 6 ... Bearing material, 7 ... Wall, 8,9
…… Input terminal, 10 …… Output terminal, 11 …… Back spring, 12,13,14 …… Terminal plate, 17,18,19 …… Terminal, 20 …… Guide, 20a …… Guide tip, 20b… ... the base of the guide, 21
...... Groove, 22 …… Belt, 22a …… Tip of belt, 22b ……
The base end of the belt, 23 ... rod member, 24 ... frame.
Claims (1)
手段とから構成され、 上記センサユニットは透磁性物質によって湾曲形成した
ヨーク１の両端に取り付けた一対の永久磁石２と、上記
一対の永久磁石の磁極間に介設した磁気抵抗素子３と、
上記ヨーク１の両端部を所定角度回転自在に支持する本
体４と、上記ヨーク１の湾曲部分に一端が係止され該ヨ
ークを回転原位置に復帰させるべく他端が固定部材に係
止されるバックスプリング11とから成り、 上記センサユニットの駆動手段は、上記ヨーク１の湾曲
形成部分にその先端20aを固設した円弧形状のガイト20
と、上記ガイドの基端20bにその基端22bを固着して上記
ガイドの先端20a側に案内されるベルト22と、上記ベル
トの先端22aが固着されそのガイドの基端20b側の基端23
cが被測定部材と係合し直線移動すると共に上記本体４
と一体的に形成した枠体24に支持される棒部材23とから
成ることを特徴とする無接触直線変位センサ。1. A sensor unit and driving means for the sensor unit, wherein the sensor unit includes a pair of permanent magnets 2 attached to both ends of a yoke 1 curvedly formed by a magnetically permeable material, and a pair of permanent magnets. A magnetoresistive element 3 interposed between the magnetic poles,
A main body 4 which supports both ends of the yoke 1 so as to be rotatable by a predetermined angle, and one end of which is locked to a curved portion of the yoke 1 and the other end of which is locked to a fixed member to return the yoke to the original rotation position. The driving means of the sensor unit is composed of a back spring 11 and has an arc-shaped guide 20 whose tip 20a is fixed to the curved portion of the yoke 1.
A belt 22 which is fixed to the base end 20b of the guide and is guided to the tip end 20a side of the guide, and a base end 23 of the guide which is fixed to the base end 20b side of the guide.
c engages with the member to be measured and moves linearly,
And a bar member (23) supported by a frame body (24) integrally formed with the non-contact linear displacement sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14903589U JPH0744972Y2 (en) | 1989-12-25 | 1989-12-25 | Non-contact linear displacement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14903589U JPH0744972Y2 (en) | 1989-12-25 | 1989-12-25 | Non-contact linear displacement sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0388118U JPH0388118U (en) | 1991-09-09 |
| JPH0744972Y2 true JPH0744972Y2 (en) | 1995-10-11 |
Family
ID=31695460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14903589U Expired - Fee Related JPH0744972Y2 (en) | 1989-12-25 | 1989-12-25 | Non-contact linear displacement sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744972Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7609056B2 (en) * | 2006-09-11 | 2009-10-27 | Fisher Controls International Llc | Apparatus to determine the position of an actuator |
| JP5475618B2 (en) * | 2010-11-12 | 2014-04-16 | 東京コスモス電機株式会社 | Non-contact angle sensor |
-
1989
- 1989-12-25 JP JP14903589U patent/JPH0744972Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0388118U (en) | 1991-09-09 |
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| LAPS | Cancellation because of no payment of annual fees |