JPH0743540B2 - Light source - Google Patents
Light sourceInfo
- Publication number
- JPH0743540B2 JPH0743540B2 JP1159044A JP15904489A JPH0743540B2 JP H0743540 B2 JPH0743540 B2 JP H0743540B2 JP 1159044 A JP1159044 A JP 1159044A JP 15904489 A JP15904489 A JP 15904489A JP H0743540 B2 JPH0743540 B2 JP H0743540B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge lamp
- leakage current
- light source
- source device
- cooling liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
- F21V17/06—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages the fastening being onto or by the lampholder
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
- F21V29/50—Cooling arrangements
- F21V29/56—Cooling arrangements using liquid coolants
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V25/00—Safety devices structurally associated with lighting devices
- F21V25/02—Safety devices structurally associated with lighting devices coming into action when lighting device is disturbed, dismounted, or broken
- F21V25/04—Safety devices structurally associated with lighting devices coming into action when lighting device is disturbed, dismounted, or broken breaking the electric circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、冷却液が循環されるジャケット管の管壁を
所望波長の有効成分のみを通すフィルタとして形成した
写真製版などの露光に用いられる光源装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention is used for exposure of photoengraving or the like in which a tube wall of a jacket tube in which a cooling liquid is circulated is formed as a filter for passing only an effective component having a desired wavelength. The present invention relates to a light source device.
従来、写真製版などの露光装置としては、光源装置から
所望の紫外線を得るために、光学的フィルタを放電灯と
は別体に設けていた。また、光源装置の発光熱を除去す
るため、水冷式の光源装置などが提案されている。この
水冷式の光源装置は、特開昭57-63704号に示すように、
放電灯を覆うジャケット管を備え、ジャケット管の一方
の開口部から他方の開口部側に強制的に冷却液を流し、
放電灯の発光熱を除去するものである。なお、ジャケッ
ト管は、両開口部側の径が胴体部分より大きく形成され
ている構成としている。Conventionally, as an exposure device for photolithography, an optical filter is provided separately from a discharge lamp in order to obtain desired ultraviolet rays from a light source device. Further, a water-cooled light source device and the like have been proposed in order to remove the emitted heat of the light source device. This water-cooled light source device, as shown in JP-A-57-63704,
Equipped with a jacket tube that covers the discharge lamp, the cooling liquid is forced to flow from one opening of the jacket tube to the other opening,
It is intended to remove the emitted heat of the discharge lamp. In addition, the jacket tube is configured such that the diameter on both sides of the opening is larger than that of the body portion.
しかし、従来の光源装置では、以下のような問題点が存
在していた。However, the conventional light source device has the following problems.
放電灯とは別体に光学的フィルタを設けたものは、光
学的フィルタの吸収した多量の熱線によって、光学的フ
ィルタ自体の温度が上昇するため、新たな冷却手段が必
要となった。また、温度上昇に伴い光学的フィルタの破
裂を生ずることになった。In the case where the optical filter is provided separately from the discharge lamp, the temperature of the optical filter itself rises due to a large amount of heat rays absorbed by the optical filter, so that a new cooling means is required. In addition, the optical filter bursts as the temperature rises.
水冷式の光源装置は、高圧水銀灯などの高電圧の放電
灯を使用するため、取扱に十分注意が必要で、安全手段
を考慮した光源装置が望まれていた。Since a water-cooled light source device uses a high-voltage discharge lamp such as a high-pressure mercury lamp, it must be handled with care, and a light source device that takes safety measures into consideration has been desired.
この発明は、上記問題点に鑑み創案されたものであり、
光学的フィルタの吸収した熱を適切に冷却でき、高電圧
に対する配慮がなされている光源装置を提供することを
目的とする。This invention was created in view of the above problems,
An object of the present invention is to provide a light source device capable of appropriately cooling the heat absorbed by the optical filter and taking high voltage into consideration.
この発明は、上記目的を達成するため、冷却液に対して
絶縁構造とした放電灯の電力供給用両端子に、受け部お
よび装着部を介して内側管および外側管の透光ジャケッ
ト管を取り付け、前記装着部に設けた供給口と排出口と
を介して冷却液を外側管から内側管側に強制往復流通さ
せる光源装置であって、前記透光ジャケット管の材質が
所定波長の照射光を放出するフィルタに形成され、各ジ
ャケット管のそれぞれが異なる所定波長の照射光を放出
するフィルタとして構成した光源装置とした。In order to achieve the above object, the present invention attaches a transparent jacket tube of an inner tube and an outer tube to a power supply terminal of a discharge lamp having an insulating structure with respect to a coolant through a receiving part and a mounting part. A light source device for forcibly circulating the cooling liquid from the outer tube to the inner tube side through a supply port and a discharge port provided in the mounting part, wherein the material of the transparent jacket tube emits irradiation light of a predetermined wavelength. The light source device is formed as a filter that emits light, and each jacket tube is configured as a filter that emits irradiation light of a different predetermined wavelength.
また、前記放電灯の電力供給用両端子は、一次側に常閉
接点を備える昇圧トランスの二次側に接続されると共
に、この二次側巻線の中性点には漏電電流検出器が接続
され、この漏電電流検出器は、前記放電灯からの漏電電
流の検出により作動する常開接点と、この常開接点の動
作により作動する前記一次側の常閉接点を作動させるた
めのソレノイドとを備えた前記光源装置として構成し
た。Both terminals for power supply of the discharge lamp are connected to the secondary side of a step-up transformer having a normally closed contact on the primary side, and a leakage current detector is provided at the neutral point of the secondary winding. This leakage current detector is connected to a normally open contact that operates by detecting a leakage current from the discharge lamp, and a solenoid that operates the normally closed contact on the primary side that operates by the operation of the normally open contact. And the light source device.
さらに、冷却液に対して絶縁構造とした放電灯の電力供
給用両端子に受け部および装着部を介して透光ジャケッ
ト管を取り付け、前記受け部および装着部に形成した冷
却液の供給部および排出部を形成し、前記透光ジャケッ
ト管内に冷却液を供給部から排出部側に強制流通させる
光源装置であって、 前記透光ジャケット管は、前記透光ジャケット管の材質
を所定波長を放出するフィルタに構成すると共に、その
両端側が漏斗状に形成され中央側より径大に構成し、 前記放電灯の電力供給用両端子は、一次側に常閉接点を
備える昇圧トランスの二次側に接続されると共に、この
二次側巻線の中性点には漏電電流検出器が接続され、こ
の漏電電流検出器は、前記放電灯からの漏電電流の検出
により作動する常開接点と、この常開接点の動作により
作動する前記一次側の常閉接点を作動させるためのソレ
ノイドとを備えたことを特徴とする光源装置として構成
した。Further, a transparent jacket tube is attached to the power supply terminals of the discharge lamp having an insulating structure with respect to the cooling liquid via the receiving portion and the mounting portion, and the cooling liquid supply portion formed in the receiving portion and the mounting portion, A light source device that forms a discharge part and forcibly circulates a cooling liquid in the light-transmitting jacket tube from a supply part to the discharge part side, wherein the light-transmitting jacket tube emits a predetermined wavelength from a material of the light-transmitting jacket tube. In addition to the filter, both ends of the discharge lamp are formed in a funnel shape and have a diameter larger than that of the center side, and both terminals for power supply of the discharge lamp are connected to the secondary side of a step-up transformer having a normally closed contact on the primary side. Along with the connection, a leakage current detector is connected to the neutral point of the secondary winding, and the leakage current detector has a normally open contact that operates by detecting the leakage current from the discharge lamp, Depending on the operation of the normally open contact Further comprising a solenoid for actuating the normally closed contact of the primary-side operating configured as a light source apparatus according to claim.
この発明は、上記構成により、以下の作用を有する。 The present invention has the following effects due to the above configuration.
内側管および外側管の透光ジャケット管を、放電灯の
電力供給端子用両電極に、受け部および装着部を介して
取り付けており、前記受け部および装着部に形成した供
給口から冷却液を供給し、外側管から内側管を通って排
出口から排出される。したがって、内側管に吸収した熱
線は、内側を通る冷却液と、外側を通る冷却液により冷
却される。また、外側管は、吸収した熱線がその内側を
流れる冷却液により冷却される。The transparent jacket tubes of the inner tube and the outer tube are attached to both electrodes for the power supply terminal of the discharge lamp via the receiving part and the mounting part, and the cooling liquid is supplied from the supply port formed in the receiving part and the mounting part. It is supplied and discharged from the outlet through the outer tube through the inner tube. Therefore, the heat ray absorbed in the inner pipe is cooled by the cooling liquid passing inside and the cooling liquid passing outside. Further, the outer pipe is cooled by the cooling liquid in which the absorbed heat ray flows inside.
前記放電灯の電力供給端子用両電極は、一次側に常閉
接点を備える昇圧トランスの二次側に接続され、この二
次側巻線の中性点には、漏電電流検出器が接続されてい
る。そのため、放電灯の電力供給端子用両電極に人間な
どが触れることで、昇圧トランスの二次側での平均状態
がとれなくなり、漏電電流検出器側に漏電電流が発生す
ると、この漏電電流が漏電電流検出器の常開接点を作動
させ、この常開接点が作動することで昇圧トランスの一
次側の常閉接点をソレノイドが作動させ、放電灯に送ら
れている電力を遮断する。Both electrodes for the power supply terminal of the discharge lamp are connected to the secondary side of a step-up transformer having a normally closed contact on the primary side, and a leakage current detector is connected to the neutral point of the secondary side winding. ing. Therefore, when a person touches both electrodes for the power supply terminal of the discharge lamp, the average state on the secondary side of the step-up transformer cannot be maintained, and if a leakage current occurs on the leakage current detector side, this leakage current will leak. The normally open contact of the current detector is activated, and the normally open contact of the current detector activates the solenoid of the normally closed contact on the primary side of the step-up transformer to shut off the electric power sent to the discharge lamp.
透光ジャケットは、所定波長の照射光を放出するフィ
ルタに形成し、両端が漏斗状に形成されているため、放
電灯から吸収した熱線は、冷却液により冷却され、放電
灯の点灯時に加熱されて冷却液に気泡を生じても、冷却
液の流れる流速が変わるためにその流速の変化により除
去される。The translucent jacket is formed on a filter that emits irradiation light of a predetermined wavelength, and both ends are formed in a funnel shape, so the heat rays absorbed from the discharge lamp are cooled by the cooling liquid and heated when the discharge lamp is lit. Even if bubbles are generated in the cooling liquid, the flow velocity of the cooling liquid changes, so that the bubbles are removed by the change in the flow velocity.
また、漏電電流検出器が設けられているため、上記した
ように、漏電電流が漏電電流検出器の常開接点を作動さ
せ、この常開接点が作動することで昇圧トランスの一次
側の常閉接点をソレノイドが作動させ、放電灯に送られ
ている電力を遮断する。In addition, since the leakage current detector is provided, as described above, the leakage current activates the normally open contact of the leakage current detector, and this normally open contact activates to normally close the primary side of the step-up transformer. The solenoid activates the contact to shut off the power being sent to the discharge lamp.
以下、この発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は、片持ち支持方式の光源装置の断面図、第２図
は、電源装置の一実施例における回路図、第３図は、写
真製版手段を示す断面図、第４図は、紫外線主スペクト
ラムを示す特性図、第５図は光源装置の動作説明のため
の要部断面図である。FIG. 1 is a cross-sectional view of a light source device of a cantilever type, FIG. 2 is a circuit diagram of an embodiment of a power supply device, FIG. 3 is a cross-sectional view showing a photomechanical processing means, and FIG. FIG. 5 is a characteristic diagram showing a main spectrum, and FIG. 5 is a cross-sectional view of essential parts for explaining the operation of the light source device.
光源装置Ａは、両極絶縁型超高圧水銀灯からなる管状の
放電灯１と、この放電灯１の両端に形成した第１絶縁部
３と、第２絶縁部６とを備え、これら両絶縁部３、６
は、絶縁性の高いステアタイトで形成している。前記放
電灯１は、その両端側に、装着部４および受け部９を介
して内側管10および外側管21からなる透光ジャケット管
２に液密に装着されている。The light source device A includes a tubular discharge lamp 1 composed of a bipolar insulated ultra-high pressure mercury lamp, a first insulating portion 3 formed at both ends of the discharge lamp 1, and a second insulating portion 6. , 6
Is made of steatite, which has high insulation. The discharge lamp 1 is liquid-tightly mounted on both ends of the discharge lamp 1 through a mounting portion 4 and a receiving portion 9 to a transparent jacket tube 2 including an inner tube 10 and an outer tube 21.
前記透光ジャケット管２の外側管21は、ほぼ円筒形に形
成され、内側管10は、一端側が漏斗状に形成されてい
る。The outer tube 21 of the transparent jacket tube 2 is formed in a substantially cylindrical shape, and the inner tube 10 is formed in a funnel shape at one end side.
また、前記受け部９は、受け具17、締付具16、パッキン
グ18およびＯリング19とからなり、前記受け具17は、一
端側にフラジ部分を有し、他端側にネジ部分をそなえる
筒状に形成され、前記放電灯１の第１絶縁部３を、Ｏリ
ング19を介して筒状内に嵌入すると共に、前記外側管21
の一端側を受け具17にパッキング18を介して取り付け、
受け具17ネジ部分に締付具16のネジ部を螺合組付けし、
Ｏリング19およびパッキング18を押圧することで液密に
留め付けている。The receiving part 9 is composed of a receiving tool 17, a fastening tool 16, a packing 18 and an O-ring 19, and the receiving tool 17 has a bulge portion on one end side and a screw portion on the other end side. The first insulating part 3 of the discharge lamp 1 is formed into a cylindrical shape and is fitted into the cylindrical shape through an O-ring 19, and the outer tube 21
Attach one end side of the receiving tool 17 to the receiving tool 17 via the packing 18,
Attach the threaded portion of the fastener 16 to the threaded portion of the receiver 17 by screwing,
The O-ring 19 and the packing 18 are pressed to keep them liquid-tight.
一方、装着部４は、一端側に外側管21を保持するネジ部
分11aを有し、中央後部に放電灯１の取り付け穴11bが形
成され、前部中央に内側管10の保持部11cが形成されて
おり、その所定位置に冷却液の給水口13および給水路13
aと、排出口14および排水路14aを有する保持金具11と、
この保持金具11のネジ部分に螺合するネジ部分を有する
固定金具15と、前記保持金具11の放電灯取り付け穴11b
に螺合する筒状の締付ネジ12および複数のパッキング18
とから構成されている。なお、前記取り付け穴11bは、
内部が径の大きさを異ならせ段状に形成した組付段部20
を有している。On the other hand, the mounting portion 4 has a screw portion 11a for holding the outer tube 21 at one end side, a mounting hole 11b for the discharge lamp 1 is formed in the center rear portion, and a holding portion 11c for the inner tube 10 is formed in the front center portion. The cooling water supply port 13 and the water supply channel 13 are provided at the predetermined positions.
a, a holding metal fitting 11 having a discharge port 14 and a drainage path 14a,
A fixing fitting 15 having a threaded portion to be screwed into the threaded portion of the holding fitting 11, and a discharge lamp mounting hole 11b of the holding fitting 11.
Cylindrical tightening screw 12 and multiple packings 18
It consists of and. The mounting hole 11b is
Assembling stepped portion 20 in which the inside has a stepped shape with different diameters
have.
そのため、放電灯１および透光ジャケット管２を装着部
４に取り付ける場合は、保持金具11の前部中央の保持部
11cにパッキング18を介して内側管10の基端側を装着
し、外側管21の基端側を、保持金具11の上面外周端部
に、パッキング18、18を介して載置し、固定金具15のネ
ジ部分11aを保持金具11のネジ部分に螺合締付けするこ
とで液密に留め付ける。そして、放電灯１の第２絶縁部
６を保持金具15の取り付け穴11bに嵌入すると共に、放
電灯１の係止段部７を、組付段部20にパッキング18を介
して当接させる。さらに、締付ネジ12を螺着し、放電灯
１の係止段部７を押圧することで、液密に装着部４に放
電灯１を留め付けている。Therefore, when the discharge lamp 1 and the translucent jacket tube 2 are attached to the mounting portion 4, the holding portion at the front center of the holding metal fitting 11 is attached.
The base end side of the inner pipe 10 is attached to the 11c via the packing 18, and the base end side of the outer pipe 21 is placed on the outer peripheral end of the upper surface of the holding metal fitting 11 via the packings 18 and 18, and the fixing metal fitting is attached. The threaded portion 11a of 15 is tightly screwed to the threaded portion of the holding metal fitting 11 so as to be fixed in a liquid-tight manner. Then, the second insulating portion 6 of the discharge lamp 1 is fitted into the mounting hole 11b of the holding fitting 15, and the locking step portion 7 of the discharge lamp 1 is brought into contact with the assembly step portion 20 via the packing 18. Further, by tightening the tightening screw 12 and pressing the locking step portion 7 of the discharge lamp 1, the discharge lamp 1 is liquid-tightly fixed to the mounting portion 4.
したがって、第１図で示すように、放電灯１は、両端の
電極端子５、８を突出した状態で、一端側を受け部９に
留め付けられ、装着部４に基端側を片持ち支持される構
成としている。さらに、保持金具11に形成された給水口
13からの給水路13aが、前記内側管10と外側管21の間に
開口されており、また、前記内側管10と、放電灯１の間
に排出口14からの排水路14aが開口している。Therefore, as shown in FIG. 1, the discharge lamp 1 is fastened to the receiving portion 9 on one end side in a state where the electrode terminals 5 and 8 at both ends are projected, and the mounting portion 4 cantilever-supports the base end side. It is configured to be. Furthermore, the water supply port formed in the holding metal fitting 11
A water supply passage 13a from 13 is opened between the inner pipe 10 and the outer pipe 21, and a drain passage 14a from an outlet 14 is opened between the inner pipe 10 and the discharge lamp 1. There is.
次に、第２図で示すように、光源装置の電源回路は、交
流電源24から昇圧用トランス25を介して放電灯１の電極
端子５、８に高電圧が印加されるようになっている。前
記昇圧用トランス25の二次側の巻線にはセンタータップ
26が設けられており、このセンタータップ26を介して漏
電電流検出コイル27が付されいる。この漏電電流検出コ
イル27には、漏電電流が検出されると閉成する常開接点
28が設けられている。そして、前記常開接点28には、ソ
レノイド29が直列に接続され、この直列に接続された常
開接点28およびソレノイド29は、交流電源24に接続され
ている。さらに、前記昇圧用トランス25の一次側には、
前記ソレノイド29によって開成される常閉スイッチ30が
設けられている。Next, as shown in FIG. 2, in the power source circuit of the light source device, a high voltage is applied from the AC power source 24 to the electrode terminals 5 and 8 of the discharge lamp 1 through the boosting transformer 25. . Center tap on the secondary winding of the step-up transformer 25
26 is provided, and a leakage current detection coil 27 is attached via this center tap 26. This leakage current detection coil 27 has a normally open contact that closes when a leakage current is detected.
28 are provided. A solenoid 29 is connected in series to the normally open contact 28, and the normally open contact 28 and the solenoid 29 connected in series are connected to an AC power supply 24. Further, on the primary side of the step-up transformer 25,
A normally closed switch 30 opened by the solenoid 29 is provided.
上記構成の光源装置Ａを写真製版の作業に使用した場合
の動作について説明する。The operation when the light source device A having the above-mentioned configuration is used for the work of photoengraving will be described.
第３図で示すように、被照射体である刷版機成基板40上
に接着剤41を介して感光剤を備える刷版感光層42を設け
ることで刷版基板43が形成されている。前記刷版基板43
上に画像形成フィルム44を配した状態で、光源装置Ａか
ら光照射して露光作業を行うものである。光照射が行わ
れると、画像形成フィルム44のポジティブ部44aでは光
が遮断され、ネガティブ部44bでは、光が通過して刷版
感光層42の写真製版作業が行われる。As shown in FIG. 3, a printing plate substrate 43 is formed by providing a printing plate photosensitive layer 42 containing a photosensitizer via an adhesive 41 on a printing plate mechanical substrate 40 which is an object to be irradiated. The plate substrate 43
With the image forming film 44 disposed on the upper side, light is emitted from the light source device A to perform the exposure work. When the light irradiation is performed, the positive portion 44a of the image forming film 44 blocks the light, and the negative portion 44b allows the light to pass therethrough to perform the photoengraving operation of the plate photosensitive layer 42.
また、前記刷版基板43の感光剤は、その種類により吸収
する波長が異なるため照射する紫外線の波長をあらかじ
め設定する必要がある。例えば、第４図で示すように、
吸収する波長がそれぞれ波長λ1＝200〜300nm、波長λ2
＝200〜400nm、波長λ3＝300〜400nmのように異なる感
光剤を選択的に使用する場合は、放電灯１から照射され
る紫外線主スペクトルがλ1′＝253.7nmのときは、光学
的フィルター効果が、λ1″＝200nm〜4mμの石英ガラス
フィルターを用いる。また、放電灯１の紫外線主スペク
トルがλ2′＝360nmのときは、λ2″＝310nm〜2mμのソ
ーダガラスおよび鉛ガラスフィルターを用いる。さら
に、放電灯１の紫外線主スペクトルがλ3′＝414nmのと
きには、λ3″＝300nm〜4mμの曹達ガラスフィルターを
用いると適切に感光剤を感光できる。さらに、ガラスフ
ィルターの組み合わせによることにより達成してもよ
い。In addition, since the wavelength of the photosensitizer of the printing plate substrate 43 is different depending on the type of the photosensitizer, it is necessary to set the wavelength of the ultraviolet rays to be irradiated in advance. For example, as shown in FIG.
The wavelengths to be absorbed are respectively wavelength λ 1 = 200-300 nm, wavelength λ 2
= 200 to 400 nm, wavelength λ 3 = 300 to 400 nm, when different photosensitizers are selectively used, when the main ultraviolet spectrum emitted from the discharge lamp 1 is λ 1 ′ = 253.7 nm, the A quartz glass filter with a filter effect of λ 1 ″ = 200 nm to 4 mμ is used. When the main ultraviolet spectrum of the discharge lamp 1 is λ 2 ′ = 360 nm, soda glass and lead glass with λ 2 ″ = 310 nm to 2 mμ Use a filter. Further, when the main ultraviolet spectrum of the discharge lamp 1 is λ 3 ′ = 414 nm, the sensitizer can be properly exposed to light by using a Soda glass filter with λ 3 ″ = 300 nm to 4 mμ. Furthermore, it is achieved by combining glass filters. You may.
したがって、用いる感光剤によって、適切な露光作業が
できるように、放電灯１を選択する共に、光学的フィル
ター効果が適切に行われるように、内側管10および外側
管21を選択すると都合が良い。Therefore, it is convenient to select the discharge lamp 1 so that an appropriate exposure operation can be performed and also to select the inner tube 10 and the outer tube 21 so that an optical filter effect is appropriately performed depending on the photosensitizer used.
また、第５図で示すように、放電灯１から照射された照
射光は、内側管10でまず、所定の熱線がなどが吸収さ
れ、その後さらに外側管21で所定の熱線が吸収され、所
望波長の紫外線Ｃのみが照射されることになる。このと
き、供給口から供給された冷却液は、矢印Ｄで示すよう
に、外側管21および内側管10の間を通過し、その後、内
側管10と放電灯１部分を通過して排出口側に流通するよ
うに循環されている。そのため、内側管10に流れる冷却
液P1で照射光は冷却され、つぎに、内側管10で特定波長
の熱線が吸収され、内側管10は、その表裏を流れる冷却
液により冷却される。さらに、外側管21と内側管10との
間を流れる冷却液P3により冷却され、外側管21に特定波
長の熱線が吸収され、この外側管21は接水する冷却液P4
により冷却される。Further, as shown in FIG. 5, the irradiation light emitted from the discharge lamp 1 is first absorbed by the inner tube 10 with a predetermined heat ray, and then further absorbed by the outer tube 21 with a predetermined heat ray. Only the ultraviolet ray C having the wavelength is irradiated. At this time, the cooling liquid supplied from the supply port passes between the outer tube 21 and the inner tube 10 as shown by an arrow D, and then passes through the inner tube 10 and the discharge lamp 1 part to the outlet side. It is circulated to be distributed to. Therefore, the irradiation light is cooled by the cooling liquid P 1 flowing through the inner pipe 10, the heat rays having a specific wavelength are absorbed by the inner pipe 10, and the inner pipe 10 is cooled by the cooling liquid flowing through the front and back surfaces thereof. Furthermore, is cooled by the cooling fluid P 3 flowing between the outer tube 21 and inner tube 10, heat rays of a specific wavelength is absorbed by the outer tube 21, the cooling liquid P 4 The outer tube 21 of wetted
Is cooled by.
前記放電灯１は、第２図で示すように、交流電源24から
昇圧トランス25を介して得られた高電圧よって点灯され
る。そして、放電灯１の電極に人間が触れた場合のよう
に、昇圧トランス25の二次側で平衡状態がとれなくな
り、センタータップ26に漏電電流が発生すると、これを
漏電電流検出コイル27が検出して常開接点28を閉成し、
ソレノイド29に通電させて常閉スイッチ30を開成し、電
源供給を停止させる。そのため、人間が感電して危険な
状態になることはない。さらに、上記光源装置Ａは、外
側管21およ内側管10を所定のものに変更することで、感
光剤に対応した所望の照射光を放電灯１から行うことが
できる。また、前記透光ジャケット管２の構成を複数個
の円筒状管で形成し、円筒状管の相互管および放電灯と
の間に冷却液を流通させ、それぞれの円筒状管が異なる
光学的フィルター効果を備える材料で形成する構成とし
ても良い。As shown in FIG. 2, the discharge lamp 1 is lit by a high voltage obtained from an AC power source 24 via a step-up transformer 25. Then, as when a person touches the electrode of the discharge lamp 1, when the secondary side of the step-up transformer 25 becomes unbalanced and a leakage current is generated in the center tap 26, the leakage current detection coil 27 detects it. And close the normally open contact 28,
The solenoid 29 is energized to open the normally closed switch 30, and the power supply is stopped. Therefore, there is no danger of human beings being electrocuted. Further, in the light source device A, by changing the outer tube 21 and the inner tube 10 to predetermined ones, desired discharge light corresponding to the photosensitizer can be emitted from the discharge lamp 1. Further, the transparent jacket tube 2 is formed of a plurality of cylindrical tubes, a cooling liquid is circulated between the mutual tubes of the cylindrical tubes and the discharge lamp, and the respective cylindrical tubes are different optical filters. It may be formed of a material having an effect.
なお、上述の光源装置は、一重の透光ジャケット管の構
成として構成しても構わない。すなわち、第７図で示す
ように、放電灯１の絶縁部３は、その電力端子用電極５
が突出するように、係止部51などを介して支持体50に取
り付けられている。一重構造の透光ジャケット管52は、
両端が漏斗状に形成され、その先端は、支持体50にＯリ
ングパッキング53を介して固定ネジ54によって締付けら
れている。そして、支持体50から突出している放電灯１
の係止部51の先端外周は、受け具55と、ワッシャー56と
を介して支持体50の先端部50aと螺合する固定ネジ57に
よって締め付けられている。また、支持体50の内部に設
けた透光ジャケット管52と放電灯１の係止部との間にあ
る注入口59には、内部を空洞に形成されて冷却液を運ぶ
支持管58に支持されている。支持体先端部50aと受け具5
5との間には、Ｏリングパッキング60が設けられ、受け
具55とワッシャー56との間には、Ｏリングパッキング61
が設けられている。なお、前記絶縁部３は、硝子部材で
形成されている。また、放電灯１は、その両端部で支持
される両持支持方式である。The above-mentioned light source device may be configured as a single transparent jacket tube. That is, as shown in FIG. 7, the insulating portion 3 of the discharge lamp 1 has the power terminal electrode 5
Is attached to the support body 50 via a locking portion 51 or the like so as to project. The translucent jacket tube 52 with a single structure is
Both ends are formed in a funnel shape, and the tips thereof are fastened to the support body 50 by O-ring packing 53 with fixing screws 54. And the discharge lamp 1 protruding from the support 50
The outer periphery of the front end of the locking portion 51 is fastened by a fixing screw 57 that is screwed into the front end portion 50a of the support body 50 via a receiving tool 55 and a washer 56. In addition, the injection port 59 provided between the translucent jacket tube 52 provided inside the support body 50 and the locking portion of the discharge lamp 1 is supported by the support tube 58 that is hollow inside and carries the cooling liquid. Has been done. Support body tip 50a and receiver 5
An O ring packing 60 is provided between the receiving member 55 and the washer 56.
Is provided. The insulating part 3 is formed of a glass member. Further, the discharge lamp 1 is of a double-support type in which both ends thereof are supported.
したがって、冷却液は、透光ジャケット管52の一端側か
ら給入され他端側から排出される。このとき、第６図で
示すように、照射された光線は、冷却液L1で熱線が吸収
冷却され、透光ジャケット管52の光学的フィルター効果
により、熱線が吸収され、透光ジャケット管52は、冷却
液の接水により透光ジャケット管52は冷却される。ま
た、漏斗状に絞った部分から狭い方向に冷却液が流れる
場合に、流速が速くなるため、気泡が透光ジャケット管
52に付着することはなく、冷却効率が良好となる。Therefore, the cooling liquid is supplied from one end side of the translucent jacket tube 52 and discharged from the other end side. At this time, as shown in FIG. 6, in the irradiated light rays, the heat ray is absorbed and cooled by the cooling liquid L 1 , and the heat ray is absorbed by the optical filter effect of the light transmitting jacket tube 52, so that the light transmitting jacket tube 52. The transparent jacket tube 52 is cooled by the contact of the cooling liquid. Also, when the cooling liquid flows in a narrow direction from the part that is squeezed into a funnel shape, the flow velocity becomes faster, so bubbles form in the transparent jacket tube.
It does not adhere to 52 and cooling efficiency is improved.
なお、この発明は、写真製版用のみならず、各種の光源
用としての露光装置にも適用できる。The present invention can be applied not only to photolithography but also to exposure apparatuses for various light sources.
以上のように構成したので、以下のような優れた効果を
奏する。Since it is configured as described above, the following excellent effects are obtained.
二重に設けた透光ジャケット管は、それぞれが異なる
紫外線の波長を通過させるように構成されていること
と、透光ジャケット管内に冷却液が強制循環しているこ
とで、光学的フィルタとしての透光ジャケット管の吸収
熱を適切に冷却することが可能である。また、所望の紫
外線を通過してワークの感光剤に適した露光作業を行う
ことが可能となる。The double-layered transparent jacket tubes are configured to pass different wavelengths of ultraviolet rays, and the cooling liquid is forcedly circulated in the transparent jacket tubes. It is possible to properly cool the heat absorbed by the transparent jacket tube. Further, it becomes possible to perform an exposure operation suitable for the photosensitive agent of the work by passing a desired ultraviolet ray.
また、放電灯の電極などに誤って人間が接触しても、
昇圧トランスの二次側での平均状態がとれなくなり、漏
電電流検出器側に漏電電流が発生し、漏電電流が漏電電
流検出器の常開接点、昇圧トランスの一次側の常閉接点
がソレノイドが作動させ、放電灯に送られている電力を
遮断するため、安全性に優れている。Also, even if a person accidentally contacts the electrodes of the discharge lamp,
The average state of the secondary side of the step-up transformer is lost, and the leakage current occurs on the side of the leakage current detector.The leakage current is the normally open contact of the leakage current detector and the normally closed contact of the primary side of the step-up transformer is the solenoid. It is operated and shuts off the electric power sent to the discharge lamp, so it is highly safe.
透光ジャケット管は、一重の構成としても、適切に放
電灯からの照射光による熱線を冷却でき、放電灯の点灯
時に加熱されて冷却液に気泡を生じても、冷却液の流れ
る流速が変わるためにその流速の変化により除去できる
ため、放電灯からの所望の紫外線を照射できると共に、
適切に冷却することができる。さらに、漏電電流検出器
が設けられているため、安全性に優れている。Even if the translucent jacket tube has a single structure, it can appropriately cool the heat rays from the irradiation light from the discharge lamp, and the flow velocity of the cooling liquid changes even if it is heated when the discharge lamp is turned on and bubbles are generated in the cooling liquid. Therefore, because it can be removed by changing the flow rate, it is possible to irradiate the desired ultraviolet rays from the discharge lamp,
It can be cooled appropriately. Further, since the leakage current detector is provided, the safety is excellent.
第１図は本発明に係る光源装置の一実施例を示す要部の
断面図、第２図は本発明に係る電源装置の一実施例にお
ける回路図、第３図は本発明が適用される写真製版手段
を示す断面図、第４図は本発明の説明に供するための紫
外線主スペクトラムを示す特性図、第５図は本発明に係
る光源装置の動作状態を説明するための要部断面図、第
６図は本発明に係る光源装置の他の実施例における透光
ジャケット管を示す断面図、第７図は本発明の両持支持
方式の光源装置の要部を示す断面図である。 １……放電灯、２、52……透光ジャケット管 ３……第１絶縁部、４……装着部 ５……電極端子、６……第２絶縁部 ７……係止段部、８……電極端子 ９……受け部、10……内側管 11……保持金具、12……締付けネジ 13……冷却液の給水口、14……冷却口の排出口 15……固定金具、16……締付具 17……受け具、18……パッキング 19……Ｏリング、20……組付段部 27……漏電電流検出コイル、28……常開接点 29……ソレノイド、43……刷版基板 44……画像形成フィルム、50……支持体 54、57……固定ネジ、55……受け具 59……注入口FIG. 1 is a cross-sectional view of an essential part showing an embodiment of a light source device according to the present invention, FIG. 2 is a circuit diagram of an embodiment of a power supply device according to the present invention, and FIG. FIG. 4 is a sectional view showing a photolithography means, FIG. 4 is a characteristic diagram showing an ultraviolet main spectrum for explaining the present invention, and FIG. 5 is a sectional view showing a main part for explaining an operating state of a light source device according to the present invention. FIG. 6 is a cross-sectional view showing a transparent jacket tube in another embodiment of the light source device according to the present invention, and FIG. 7 is a cross-sectional view showing an essential part of the light source device of the both-end supported type of the present invention. 1 ... Discharge lamp, 2, 52 ... Translucent jacket tube 3 ... First insulating part, 4 ... Mounting part 5 ... Electrode terminal, 6 ... Second insulating part 7 ... Locking step part, 8 ...... Electrode terminal 9 …… Reception part, 10 …… Inner tube 11 …… Holding bracket, 12 …… Tightening screw 13 …… Coolant supply port, 14 …… Cooling port discharge port 15 …… Fixing bracket, 16 ...... Clamping tool 17 …… Receptor, 18 …… Packing 19 …… O ring, 20 …… Assembling step 27 …… Leakage current detection coil, 28 …… Normally open contact 29 …… Solenoid, 43 …… Plate 44: Image forming film, 50: Support 54, 57: Fixing screw, 55: Receiver 59: Filling port
Claims (3)
力供給用両端子に、受け部および装着部を介して内側管
および外側管の透光ジャケット管を取り付け、前記装着
部に設けた供給口と排出口とを介して冷却液を外側管か
ら内側管側に強制往復流通させる光源装置であって、 前記透光ジャケット管の材質が所定波長の照射光を放出
するフィルタに形成され、各ジャケット管のそれぞれが
異なる所定波長の照射光を放出するフィルタとして構成
したことを特徴とする光源装置。1. A transparent jacket tube of an inner tube and an outer tube is attached to both power supply terminals of a discharge lamp having an insulating structure against a cooling liquid through a receiving portion and a mounting portion, and the light emitting jacket tube is provided in the mounting portion. In the light source device, the cooling liquid is forced to reciprocate from the outer tube to the inner tube through the supply port and the discharge port, and the material of the transparent jacket tube is formed in a filter that emits irradiation light of a predetermined wavelength. A light source device, wherein each of the jacket tubes is configured as a filter that emits irradiation light of a different predetermined wavelength.
に常閉接点を備える昇圧トランスの二次側に接続される
と共に、この二次側巻線の中性点には漏電電流検出器が
接続され、この漏電電流検出器は、前記放電灯からの漏
電電流の検出により作動する常開接点と、この常開接点
の動作により作動する前記一次側の常閉接点を作動させ
るためのソレノイドとを備えた請求項（１）に記載の光
源装置。2. The power supply terminals of the discharge lamp are connected to a secondary side of a step-up transformer having a normally closed contact on the primary side, and a leakage current is present at a neutral point of the secondary side winding. A detector is connected, and this leakage current detector operates the normally-open contact that operates by detecting the leakage current from the discharge lamp and the normally-closed contact on the primary side that operates by the operation of the normally-open contact. The light source device according to claim 1, further comprising:
力供給用両端子に受け部および装着部を介して透光ジャ
ケット管を取り付け、前記受け部および装着部に形成し
た冷却液の供給部および排出部を形成し、前記透光ジャ
ケット管内に冷却液を供給部から排出部側に強制流通さ
せる光源装置であって、 前記透光ジャケット管は、前記透光ジャケット管の材質
を所定波長の照射光を放出するフィルタに構成すると共
に、その両端側が漏斗状に形成され中央側より径大に構
成し、 前記放電灯の電力供給用両端子は、一次側に常閉接点を
備える昇圧トランスの二次側に接続されると共に、この
二次側巻線の中性点には漏電電流検出器が接続され、こ
の漏電電流検出器は、前記放電灯からの漏電電流の検出
により作動する常開接点と、この常開接点の動作により
作動する前記一次側の常閉接点を作動させるためのソレ
ノイドとを備えたことを特徴とする光源装置。3. A transparent jacket tube is attached to both power supply terminals of a discharge lamp having an insulating structure with respect to a cooling liquid via a receiving portion and a mounting portion, and the cooling liquid formed in the receiving portion and the mounting portion is A light source device that forms a supply part and a discharge part, and forcibly circulates a cooling liquid in the light-transmitting jacket tube from the supply part to the discharge part side, wherein the light-transmitting jacket tube has a predetermined material. In addition to being configured as a filter that emits irradiation light of a wavelength, both end sides are formed in a funnel shape and have a diameter larger than the center side, and both terminals for power supply of the discharge lamp have a normally closed contact on the primary side. The leakage current detector is connected to the secondary side of the transformer and is connected to the neutral point of the secondary winding, and this leakage current detector operates by detecting the leakage current from the discharge lamp. Normally open contact and this normally open contact Light source device characterized by comprising a solenoid for actuating the normally closed contact of the primary-side operated by the operation of the.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1159044A JPH0743540B2 (en) | 1989-06-21 | 1989-06-21 | Light source |
| KR1019890017582A KR0135074B1 (en) | 1989-06-21 | 1989-11-30 | Light source unit for exposure |
| EP19900306275 EP0404406A3 (en) | 1989-06-21 | 1990-06-08 | Light source unit for using exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1159044A JPH0743540B2 (en) | 1989-06-21 | 1989-06-21 | Light source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0324548A JPH0324548A (en) | 1991-02-01 |
| JPH0743540B2 true JPH0743540B2 (en) | 1995-05-15 |
Family
ID=15685004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1159044A Expired - Fee Related JPH0743540B2 (en) | 1989-06-21 | 1989-06-21 | Light source |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0404406A3 (en) |
| JP (1) | JPH0743540B2 (en) |
| KR (1) | KR0135074B1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6621199B1 (en) | 2000-01-21 | 2003-09-16 | Vortek Industries Ltd. | High intensity electromagnetic radiation apparatus and method |
| DE10312474A1 (en) * | 2003-03-20 | 2004-09-30 | Olympus Biosystems Gmbh | lamp arrangement |
| US7781947B2 (en) | 2004-02-12 | 2010-08-24 | Mattson Technology Canada, Inc. | Apparatus and methods for producing electromagnetic radiation |
| JP6303118B2 (en) * | 2016-03-31 | 2018-04-04 | スガ試験機株式会社 | Metal halide lamp unit for weathering tester and weathering tester |
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| US3596125A (en) * | 1969-06-09 | 1971-07-27 | Wayne A Seigel | Liquid cooled radiation source with filter |
| US3739215A (en) * | 1970-12-24 | 1973-06-12 | Yoshio Yazaki | High pressure mercury vapor lamp provided with a cooling water jacket |
| GB1520736A (en) * | 1975-07-02 | 1978-08-09 | Ho Wai Chau | Electrical protection circuits |
| JPS5226828A (en) * | 1975-08-25 | 1977-02-28 | Ricoh Co Ltd | Filter device for the slit illumination system |
| SU668036A1 (en) * | 1977-08-01 | 1979-06-15 | Харьковское Высшее Военное Командное Училище Им. Маршала Советского Союза Крылова Н.И. | Device for protective cutout of electric installation in ac mains |
| US4184096A (en) * | 1978-06-09 | 1980-01-15 | Shigeru Suga | Weather resistance and light fastness tester with cooled xenon lamp |
| JPS55154051A (en) * | 1979-05-18 | 1980-12-01 | Oak Seisakusho:Kk | Ultrahigh pressure mercury lamp |
| JPS5763704A (en) * | 1980-10-01 | 1982-04-17 | Hitachi Ltd | Curved discharge lamp containing device |
| US4435670A (en) * | 1981-09-08 | 1984-03-06 | North American Philips Electric Corp. | Energy conserving instant-start series-sequence fluorescent lamp system with overcurrent protection |
| JPS5876775A (en) * | 1981-10-30 | 1983-05-09 | Matsushita Electric Works Ltd | Electric leak detecting apparatus |
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-
1989
- 1989-06-21 JP JP1159044A patent/JPH0743540B2/en not_active Expired - Fee Related
- 1989-11-30 KR KR1019890017582A patent/KR0135074B1/en not_active IP Right Cessation
-
1990
- 1990-06-08 EP EP19900306275 patent/EP0404406A3/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP0404406A2 (en) | 1990-12-27 |
| EP0404406A3 (en) | 1991-08-28 |
| KR910000357A (en) | 1991-01-29 |
| KR0135074B1 (en) | 1998-04-20 |
| JPH0324548A (en) | 1991-02-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |