JPH0740378B2 - Method and device for duplicating information record carrier - Google Patents
Method and device for duplicating information record carrierInfo
- Publication number
- JPH0740378B2 JPH0740378B2 JP59257598A JP25759884A JPH0740378B2 JP H0740378 B2 JPH0740378 B2 JP H0740378B2 JP 59257598 A JP59257598 A JP 59257598A JP 25759884 A JP25759884 A JP 25759884A JP H0740378 B2 JPH0740378 B2 JP H0740378B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- substrate
- radiation
- metal stamper
- information record
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/2669—Moulds with means for removing excess material, e.g. with overflow cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/0053—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor combined with a final operation, e.g. shaping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/263—Moulds with mould wall parts provided with fine grooves or impressions, e.g. for record discs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/46—Means for plasticising or homogenising the moulding material or forcing it into the mould
- B29C45/56—Means for plasticising or homogenising the moulding material or forcing it into the mould using mould parts movable during or after injection, e.g. injection-compression moulding
- B29C45/561—Injection-compression moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C2033/0005—Moulds or cores; Details thereof or accessories therefor with transparent parts, e.g. permitting visual inspection of the interior of the cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/0053—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor combined with a final operation, e.g. shaping
- B29C2045/0075—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor combined with a final operation, e.g. shaping curing or polymerising by irradiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2017/00—Carriers for sound or information
- B29L2017/001—Carriers of records containing fine grooves or impressions, e.g. disc records for needle playback, cylinder records
- B29L2017/003—Records or discs
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は、光ディスクのような情報記録担体の複製装置
に係り、特に硬化前液状である輻射線硬化樹脂の好適な
コントロールを行なうことができる情報記録担体の複製
方法及びその装置に関するものである。Description: FIELD OF THE INVENTION The present invention relates to a duplication device for an information recording carrier such as an optical disk, and in particular, information capable of performing suitable control of a radiation curable resin which is a liquid before curing. The present invention relates to a record carrier duplication method and apparatus.
従来より、ガラス、又は透明プラスチック基板を裏打材
として、その表面に輻射線硬化樹脂を塗布し、複製金属
スタンパの情報記録を転写した後、輻射線を照射し硬化
させる方法として、特開昭55−152028号があげられる。
この方法によれば、光ディスクの様な微細高密度の情報
を複製する際、最も問題となる樹脂中に混入する気泡を
抑える為、中心部より樹脂注入を行ない、外周へ樹脂を
伸ばしている。この方法は、樹脂中の気泡巻込み防止に
は効果的であるが、この効果を完全にする為には、複製
金属スタンパの外周より外側に樹脂をはみ出させる必要
がある。従来技術に於いては、このはみ出し樹脂の除去
に関して、配慮されていない為、高能率、高品質の面に
問題がある。Conventionally, a glass or transparent plastic substrate is used as a backing material, a radiation-curable resin is applied to the surface of the backing material, the information record of the duplicate metal stamper is transferred, and then a method of irradiating with a radiation ray to cure the resin is disclosed. -152028 can be mentioned.
According to this method, resin is injected from the central portion to extend the resin to the outer periphery in order to suppress air bubbles mixed in the resin, which is the most problematic when reproducing information with a high density such as an optical disc. This method is effective in preventing bubbles from being entrained in the resin, but in order to complete this effect, it is necessary to cause the resin to protrude outside the outer circumference of the duplicate metal stamper. In the prior art, since no consideration is given to the removal of the protruding resin, there is a problem in terms of high efficiency and high quality.
本発明の目的は、従来技術による不十分な点を配慮し、
高品質な情報記録担体の高能率な製造方法及びその装置
を提供する事にある。The object of the present invention is to consider the shortcomings of the prior art,
An object of the present invention is to provide a highly efficient method and apparatus for producing a high quality information recording carrier.
本発明の特徴とするところは、情報記録担体複製方法に
おいて、透明な基板と複製金属スタンパとの間に所定の
間隔を設け、液状体の輻射線硬化樹脂を該複製金属スタ
ンパと該基板の間に加圧注入し、樹脂吐出ノズルを閉
め、注入された樹脂を所定の厚さにまで押圧し、前記樹
脂膜を硬化させるため輻射線光源により露光し、マスク
（輻射線遮蔽部）により未硬化である基板外周のはみ出
した液状樹脂を金属スタンパ外周保持材に設けられた吸
引排出機構により装置外へ排出し、前記複数金属スタン
パより剥離させ、複製金属スタンパの凹凸溝型情報記録
を転写し、基板保持部一体型輻射線露光装置と基板の真
空係合を解き、両者を離脱することである。A feature of the present invention is that, in the information recording carrier duplication method, a predetermined space is provided between the transparent substrate and the duplicate metal stamper, and a radiation curable resin in a liquid state is provided between the duplicate metal stamper and the substrate. Under pressure, close the resin discharge nozzle, press the injected resin to a predetermined thickness, expose with a radiation light source to cure the resin film, and uncure with a mask (radiation shielding part) The liquid resin protruding from the outer circumference of the substrate is discharged to the outside of the apparatus by a suction discharge mechanism provided in the metal stamper outer circumference holding material, separated from the plurality of metal stampers, and the concave and convex groove type information recording of the duplicate metal stamper is transferred, This is to release the vacuum engagement between the substrate holding unit-integrated radiation exposure apparatus and the substrate and separate them from each other.
また、記録情報を転写した金属ダンパおよびその保持装
置と、前記記録情報をさらに複製するガラス、プラスチ
ックなどからなる基板およびその保持機構と、硬化前液
状である輻射線硬化樹脂を吐出する吐出機構と、該輻射
線硬化樹脂に露光する露光機構と、前記輻射線露光機構
の外周部にマスクを設け、且つ前記金属スタンパ外周部
近傍に液状輻射線硬化樹脂の吸引排出機構を設け、且つ
前記基板保持機構の中心部に基板中心部強制押出し機構
を設けた情報記録担体複製装置であって、前記基板中心
部強制押出し機構により基板を変形させ、輻射線硬化樹
脂を中心から外周部に押し広げた後、輻射線露光は行な
い、該樹脂の硬化後に外周部からはみ出している未硬化
樹脂を前記吸引機構で吸引排出することを特徴とするこ
とである。Further, a metal damper to which the record information is transferred and a holding device for the same, a substrate made of glass, plastic or the like for further duplicating the record information and a holding mechanism therefor, and an ejection mechanism for ejecting a radiation curable resin which is a liquid before curing An exposure mechanism for exposing the radiation-curable resin, a mask on the outer peripheral portion of the radiation-exposure mechanism, and a suction / discharge mechanism for the liquid radiation-curable resin near the outer peripheral portion of the metal stamper, and the substrate holding An information recording carrier duplication device having a substrate center forced extrusion mechanism provided at the center of the mechanism, wherein the substrate is deformed by the substrate center forced extrusion mechanism, and the radiation curable resin is spread from the center to the outer peripheral portion. The radiation exposure is carried out, and the uncured resin protruding from the outer peripheral portion after the resin is cured is sucked and discharged by the suction mechanism.
以下、本発明の一実施例を添付図面により説明する。ま
ず第１図および第２図（特開昭55−152028号にも記載さ
れている）により従来技術の装置全体構成を説明する。
凹凸溝形情報記録を設けた複製金属スタンパ１は、中央
部の液状樹脂吐出ノズル４により支持台３上に固定され
ている。平坦な裏当て板の基板２は、基板押え板６の真
空吸引口７から真空ポンプ（図示せず）を接続する機構
により、着脱自在に保持される。前記基板押え板６は、
支持アーム９上部に設置されているエアーシリンダー８
により、上下動が可能な構造である。また、液状樹脂吐
出ノズル４に組み込まれるスライドピン５が上下動する
事により、ノズル内上部先端のテーパ部を開閉し、液状
樹脂の注入コントロールを行なう。An embodiment of the present invention will be described below with reference to the accompanying drawings. First, the overall configuration of the conventional apparatus will be described with reference to FIGS. 1 and 2 (also described in Japanese Patent Laid-Open No. 55-152028).
The duplicate metal stamper 1 provided with the concave and convex groove information recording is fixed on the support base 3 by the liquid resin discharge nozzle 4 in the central portion. The substrate 2 having a flat backing plate is detachably held by a mechanism that connects a vacuum pump (not shown) from the vacuum suction port 7 of the substrate pressing plate 6. The substrate pressing plate 6 is
Air cylinder 8 installed above the support arm 9
The structure allows vertical movement. In addition, the slide pin 5 incorporated in the liquid resin discharge nozzle 4 moves up and down to open and close the tapered portion at the tip of the upper part of the nozzle to control the injection of the liquid resin.
次に上記装置による情報記録担体複製法を順に説明す
る。まず、第１図に示すように、透明な基板２を複製金
属スタンパ１との間に、所定な間隔が生じるまでエアー
シリンダー８を駆動し、その状態でスライドピン５が下
動し、樹脂吐出ノズル先端を開く。ついで、樹脂流入方
向12の通り、輻射線硬化樹脂11（液状態）が樹脂流入管
10、液状樹脂吐出ノズル４内を経てノズル上部中心よ
り、複製金属スタンパ１と基板２の間に加圧注入され
る。そして一枚分のディスク形成に充分な樹脂量を注入
後、スライドピン５を上動し、樹脂吐出ノズル先端を閉
め、その状態でエアーシリンダー８を駆動して、注入さ
れた樹脂を所定のディスク厚さまで押圧する。押圧完了
後、基板押え板６と基板２の真空係合を解き、基板押え
板６を離脱する。その後、第２図に示すように、樹脂膜
を硬化させるべく輻射線光源13を配設し、露光する。こ
の輻射線光源13は紫外線（365〜366nmの波長範囲）を発
するもので、水銀灯、光重合用螢光灯等を用いる事が有
効である。最後に輻射線硬化樹脂膜が硬化後、複製金属
スタンパ１より剥離する事によって、複製金属スタンパ
の凹凸溝型情報記録を転写し、情報記録担体の一工程完
了となる。Next, the method of duplicating the information record carrier by the above apparatus will be described in order. First, as shown in FIG. 1, the air cylinder 8 is driven until a predetermined space is generated between the transparent substrate 2 and the duplicate metal stamper 1, and in that state, the slide pin 5 is moved downward to discharge the resin. Open the nozzle tip. Then, as shown in the resin inflow direction 12, the radiation curing resin 11 (liquid state)
10. The liquid resin ejection nozzle 4 is injected into the space between the duplicate metal stamper 1 and the substrate 2 from the center of the upper portion of the nozzle. Then, after injecting a sufficient amount of resin to form one disk, the slide pin 5 is moved upward, the tip of the resin discharge nozzle is closed, and the air cylinder 8 is driven in this state to drive the injected resin into a predetermined disk. Press to thickness. After the pressing is completed, the vacuum engagement between the substrate pressing plate 6 and the substrate 2 is released, and the substrate pressing plate 6 is removed. After that, as shown in FIG. 2, a radiation light source 13 is provided to cure the resin film, and exposure is performed. The radiation light source 13 emits ultraviolet rays (wavelength range of 365 to 366 nm), and it is effective to use a mercury lamp, a fluorescent lamp for photopolymerization, or the like. Finally, after the radiation curable resin film is cured, it is peeled off from the duplicate metal stamper 1 to transfer the concave and convex groove type information record of the duplicate metal stamper, and one step of the information record carrier is completed.
以上の従来技術によれば、中心部より樹脂注入を行な
い、外周へ樹脂を伸ばしている為、樹脂中の気泡巻き込
み防止には効果的である。但しこの効果を完全にする為
には、複製金属スタンパの外周より外側に樹脂をはみ出
させる必要がある。従来技術に於いては、このはみ出し
樹脂の後処理に関して、配慮されていない為、はみ出し
樹脂の硬化や、剥離後の完成した情報記録担体の凹凸溝
型情報記録面への樹脂付着、また装置内の残留樹脂によ
る連続複製不能といった事が原因となり、高品質、高能
率の面に問題がある。According to the above-mentioned conventional technique, the resin is injected from the central portion and the resin is extended to the outer periphery, so that it is effective for preventing the inclusion of bubbles in the resin. However, in order to complete this effect, it is necessary to allow the resin to protrude outside the outer periphery of the duplicate metal stamper. In the prior art, since no consideration is given to the post-treatment of this protruding resin, the curing of the protruding resin, the adhesion of the resin to the uneven groove type information recording surface of the completed information recording carrier after peeling, and the inside of the device. There is a problem in terms of high quality and high efficiency due to the fact that continuous replication is impossible due to the residual resin.
本発明は、上記した不十分な点を配慮し、高品質かつ高
能率な情報記録担体の複製装置を提供する事にある。第
３図ないし第５図にその一実施例を示す。本発明の従来
技術との相違点は第１に金属スタンパ外周保持材14の液
状樹脂排出流路、樹脂排出管15、及び輻射線露光装置の
外周部にマスク（輻射線遮蔽部）16を備えた事にある。The present invention has been made in consideration of the above-mentioned inadequacies, and provides a high-quality and highly efficient information recording carrier duplicating apparatus. One embodiment is shown in FIGS. 3 to 5. The difference from the prior art of the present invention is, firstly, that a liquid resin discharge channel of the metal stamper outer peripheral holding material 14, a resin discharge pipe 15, and a mask (radiation ray shielding portion) 16 are provided on the outer peripheral portion of the radiation exposure apparatus. There is a thing.
第２に排出樹脂回収タンク20、及び真空ポンプ21等から
構成さる吸引排出機構を備えた事にある。第３に樹脂中
の気泡巻込み防止を更に効果的にする為、基板２を押圧
する際、中心部から順に外周部へ押圧する機構、つま
り、圧縮バネ17とセンターピン18から成る、基板中心部
の強制押出機構を備えた事にある。この基板中心部押出
機構は、基板２を最大で5mm程度、たわむ状態であれば
充分であり、基板２の板厚が１〜1.5mmとすると、中心
部押出力は、円形平板の中心集中荷重の式より0.3Kg程
度と求まる。従って、この機構に用いる圧縮バネ17は、
バネ定数が0.06程度の物が好適である。また、この機構
を用いる場合、基板保持部一体型輻射線露光装置19の真
空圧力による基板２の保持力を考慮しなくてはならな
い。基板保持部一体型輻射線露光装置19の外周に設けら
れる真空吸引口７の総面積は、場所的なスペースを考慮
し、2mm程度の幅とすると、18.5cm2となり、真空吸引力
（基板保持力）が9Kg程度となる。従って、基板中心部
押出機構による荷重0.3Kgと基板２の自重約0.1Kgをトー
タルしても、0.4Kgと非常に小さく、基板保持力とは、
１オーダの差がある。よって、基板中心部押出機構を使
用する事による基板の落下は起きず、実用上の問題点は
ない。Secondly, there is provided a suction / discharge mechanism including a discharge resin recovery tank 20, a vacuum pump 21, and the like. Thirdly, in order to prevent air bubbles from being entrained in the resin more effectively, when pressing the substrate 2, a mechanism for sequentially pressing from the central portion to the outer peripheral portion, that is, the substrate center including the compression spring 17 and the center pin 18 It is equipped with a forced extrusion mechanism. It is sufficient for the substrate center push-out mechanism to bend the substrate 2 by a maximum of about 5 mm, and when the substrate 2 has a plate thickness of 1 to 1.5 mm, the center push force is the central concentrated load of a circular flat plate. From the formula, it can be calculated as about 0.3 kg. Therefore, the compression spring 17 used in this mechanism is
A material having a spring constant of about 0.06 is suitable. When using this mechanism, the holding force of the substrate 2 due to the vacuum pressure of the substrate exposure unit-integrated radiation exposure apparatus 19 must be taken into consideration. The total area of the vacuum suction port 7 provided on the outer circumference of the substrate holding unit-integrated radiation exposure apparatus 19 is 18.5 cm 2 when the width is about 2 mm in consideration of the space in space. Strength) is about 9Kg. Therefore, even if the total load of 0.3 kg by the pushing mechanism of the central part of the substrate and the self-weight of the substrate 2 of about 0.1 kg is very small as 0.4 kg, the substrate holding force is
There is a difference of 1 order. Therefore, the substrate does not drop due to the use of the substrate center extrusion mechanism, and there is no practical problem.
上記、従来技術との相違点を含め、本発明による情報記
録担体複数装置を行程順に説明する。まず、第３図に示
すように、透明な基板２を複製金属スタンパ１との間
に、所定の間隔が生じるまでエアーシリンダー８を駆動
し、その状態でスライドピン５が下動し、樹脂吐出ノズ
ル先端が開く。ついで、樹脂流入方向12の通り、輻射線
硬化樹脂11（液状態）が樹脂流入管10、液状樹脂吐出ノ
ズル４内を経て、ノズル上部中心より、複製金属スタン
パ１と基板２の間に加圧注入される。そして、一枚分の
ディスク形成に充分な樹脂量を注入後、スライドピン５
を上動し、樹脂吐出ノズル先端を閉め、その状態でエア
ーシリンダー８を駆動して、注入された樹脂を所定のデ
ィスク厚さまで押圧する。所定のディスク厚さとは１〜
3mm程度の板厚の基板に対し樹脂層の膜厚が１〜75μｍ
程度の範囲内が好適である。この押圧行程に於いて従来
技術との相違点は、基板２を押圧する際の樹脂中への気
泡巻込み防止を更に効果的にする方法として、圧縮バネ
17とセンターピン18から成る基板中心部の押出機構を備
えた事でり、この機構により基板と液状樹脂の接触は、
中心から順に外周へ広がる状態となり、上記効果を高め
る。押圧完了後、第４図に示すように、押圧した状態の
まま、樹脂膜を硬化させるべく、輻射線光源13により露
光する。本装置による押圧した状態での輻射線露光は、
従来技術に比べ、一行程短縮によるタクトタイムの低
減、及び樹脂層膜厚変化を防ぐ効果が得られる。輻射線
光源13は紫外線（365〜366nmの波長範囲）を発するもの
で500w程度の超高圧水銀灯等を用いる事が有効である。
露光時間と露光距離は、樹脂膜層厚と基板板厚に左右さ
れるが、40〜50cm程度の距離で１〜300秒程度の露光時
間が有効である。露光完了後、マスク（輻射線遮蔽部）
16により不硬化であった基板２外周のはみ出した液状樹
脂は金属スタンパ外周保持材14に設けられた液状樹脂排
出流路、樹脂排出管15を通り、第５図に示す吸引排出機
構により装置外へ排出される。この金属スタンパ外周保
持材14に設けられる液状樹脂排出流路の数は基板の外周
面近傍に等間隔で５〜６カ所あれば充分であるが、数が
多い程効率の良い結果が得られる。樹脂排出管15は樹脂
排出流路の数と等数配置し、第５図の吸引排出機構の手
前で管を１本に集合（図示せず）させる。第５図に示す
吸引排出機構は排出樹脂回収タンク20、真空ポンプ21、
及び配管、バルブ等により構成される。真空ポンプ21に
より排出樹脂回収タンク20内を真空に保ち、バルブ25を
操作する事により、装置内の残留液状樹脂が樹脂流入方
向12の通り排出樹脂回収タンク20へ吸引される。空気配
管24と樹脂用配管は独立した構造とし、真空ポンプ21へ
の樹脂流入を防止する。排出樹脂回収タンク20はレベル
ゲージ23を備え、樹脂の回収状態を管理し、バルブ25の
操作により回収樹脂を排出する。装置内に於ける残留液
状樹脂の吸引排出完了後、エアーシリンダー８を駆動
し、複製金属スタンパ１より剥離する事によって、複製
金属スタンパの凹凸溝型情報記録が転写され、最後に基
板保持部一体型輻射線露光装置19と基板２の真空係合を
解き両者を離脱する事により、情報記録担体の一行程完
了となる。The plural information record carrier devices according to the present invention will be described in the order of steps, including the differences from the prior art. First, as shown in FIG. 3, the air cylinder 8 is driven until a predetermined space is formed between the transparent substrate 2 and the duplicate metal stamper 1, and in that state, the slide pin 5 is moved downward to discharge the resin. The nozzle tip opens. Then, as shown in the resin inflow direction 12, the radiation curable resin 11 (liquid state) passes through the resin inflow pipe 10 and the liquid resin discharge nozzle 4, and is pressed between the duplicate metal stamper 1 and the substrate 2 from the upper center of the nozzle. Injected. Then, after injecting a sufficient amount of resin to form one disk, slide pin 5
And the tip of the resin discharge nozzle is closed, and the air cylinder 8 is driven in this state to press the injected resin to a predetermined disc thickness. The prescribed disc thickness is 1
The thickness of the resin layer is 1 to 75 μm for a board with a thickness of about 3 mm
Within the range of about, it is suitable. The difference between this pressing process and the prior art is that a compression spring is used as a more effective method for preventing bubbles from being entrained in the resin when pressing the substrate 2.
It is equipped with an extrusion mechanism for the central part of the substrate consisting of 17 and the center pin 18, by which the contact between the substrate and the liquid resin is
From the center to the outer periphery, the state becomes wider and the above effect is enhanced. After the pressing is completed, as shown in FIG. 4, the resin film is exposed while being pressed by the radiation source 13 so as to cure the resin film. Radiation exposure in the pressed state by this device is
Compared with the conventional technique, the tact time can be reduced by shortening the stroke, and the resin layer thickness change can be prevented. The radiation light source 13 emits ultraviolet rays (wavelength range of 365 to 366 nm), and it is effective to use an ultrahigh pressure mercury lamp of about 500 w.
The exposure time and the exposure distance depend on the resin film layer thickness and the substrate plate thickness, but an exposure time of about 1 to 300 seconds is effective at a distance of about 40 to 50 cm. After exposure is completed, mask (radiation ray shielding part)
The liquid resin protruding to the outer periphery of the substrate 2 which is uncured by 16 passes through the liquid resin discharge flow path and the resin discharge pipe 15 provided in the metal stamper outer peripheral holding material 14, and is removed from the apparatus by the suction and discharge mechanism shown in FIG. Is discharged to. The number of liquid resin discharge passages provided in the metal stamper outer circumference holding material 14 is sufficient if it is 5 to 6 at equal intervals in the vicinity of the outer circumferential surface of the substrate, but the larger the number, the more efficient the result is obtained. The resin discharge pipes 15 are arranged in the same number as the number of resin discharge passages, and the pipes are assembled (not shown) in front of the suction discharge mechanism of FIG. The suction / discharge mechanism shown in FIG. 5 includes a discharge resin recovery tank 20, a vacuum pump 21,
And piping, valves, etc. The vacuum pump 21 keeps the inside of the discharged resin recovery tank 20 in vacuum, and by operating the valve 25, the residual liquid resin in the apparatus is sucked into the discharged resin recovery tank 20 in the resin inflow direction 12. The air pipe 24 and the resin pipe have an independent structure to prevent the resin from flowing into the vacuum pump 21. The discharged resin recovery tank 20 is provided with a level gauge 23, manages the recovery state of the resin, and operates the valve 25 to discharge the recovered resin. After the suction and discharge of the residual liquid resin in the apparatus is completed, the air cylinder 8 is driven and peeled off from the duplicate metal stamper 1, whereby the concave and convex groove type information record of the duplicate metal stamper is transferred, and finally the substrate holding part 1 One stroke of the information record carrier is completed by releasing the vacuum engagement between the body type radiation exposure apparatus 19 and the substrate 2 and separating them from each other.
以上、述べたように、液状樹脂排出流路、樹脂排出管、
樹脂吸引排出機構、及びマスク（輻射線遮蔽部）、基板
中心部押出機構等を備えた本発明の情報記録担体複製装
置によれば、樹脂中の気泡混入を軽減除去し、かつ、装
置内の残留樹脂による連続複製不能、剥離後の完成した
情報記録担体の凹凸溝型情報記録面への樹脂付着といっ
た問題を解消し、高品質な情報記録担体を能率よく得ら
れるものである。As described above, the liquid resin discharge flow path, the resin discharge pipe,
According to the information recording carrier copying apparatus of the present invention including the resin suction / discharge mechanism, the mask (radiation shielding unit), the substrate center pushing mechanism, and the like, air bubbles in the resin can be reduced and removed, and It is possible to efficiently obtain a high-quality information recording carrier by solving the problems such as continuous replication failure due to residual resin and resin adhesion to the uneven groove type information recording surface of the completed information recording carrier after peeling.
本発明の応用例としては、第１に第３〜４図に示すマス
ク（輻射線射遮蔽部）16を設けず、基板保持部一体型輻
射線露光装置19を金属、又は輻射線を遮蔽する不透明体
材料にする事によって、上記、マスク16と同等の効果が
得られる。また、基板２にあらかじめ、マスク16′を設
けた物を使用する事により、さらに効果が得られる第２
に、第３〜４図に示すセンターピン（基板中心部押しピ
ン）18と圧縮バネ17から成る基板中心部強制押出機構に
於いて、圧縮バネ17を使用せず、シリンダー構造とし、
油圧、又は空気圧によって、センターピンを上下動させ
ることもできる。以上の応用例によれば、輻射線硬化樹
脂の押圧工程と樹脂硬化後（輻射線露光後）の剥離工程
時のみセンターピンを下動させ、基板を押し、その他は
基板に接触させないような機構とする事により、樹脂中
への気泡巻込み防止効果は同等に得られる上、その他工
程で、基板の障害を少なくすることができる。As an application example of the present invention, first, the mask (radiation shielding unit) 16 shown in FIGS. 3 to 4 is not provided, and the substrate holding unit integrated type radiation exposure device 19 shields metal or radiation. By using an opaque material, the same effect as that of the mask 16 can be obtained. Further, by using the substrate 2 on which the mask 16 'is provided in advance, the second effect can be obtained more effectively.
In addition, in the substrate center portion forced pushing mechanism including the center pin (the substrate center portion pushing pin) 18 and the compression spring 17 shown in FIGS. 3 to 4, the compression spring 17 is not used, and the cylinder structure is used.
The center pin can also be moved up and down by hydraulic pressure or air pressure. According to the above-mentioned application example, the mechanism is such that the center pin is moved down to push the substrate only during the pressing process of the radiation curable resin and the peeling process after the resin is cured (after the radiation exposure), and the others are not brought into contact with the substrate. By so doing, it is possible to obtain the same effect of preventing bubbles from being entrapped in the resin, and it is possible to reduce obstacles to the substrate in other steps.
以上述べた如く、本発明によれば、基板押圧時、基板中
心部強制押出機構を設けた事により凹凸溝型情報記録を
転写形成する輻射線硬化樹脂への気泡混入を軽減除去
し、複製した情報記録担体の信号ドロップアウトは従来
装置に比べ1/10〜1/100程度の低減が可能である。ま
た、輻射線露光装置と基板保持機構を一体構造にした事
による一行程の短縮や、樹脂吸引排出機構を設けた事に
よる装置内残留液状樹脂の除去効果等により、タクトタ
イム従来装置に比べ1/2〜1/3程度とすることができる。As described above, according to the present invention, when the substrate is pressed, a forced extrusion mechanism for the central portion of the substrate is provided to reduce and remove air bubbles from the radiation curable resin that transfers and forms the groove-and-groove type information recording, and is reproduced. The signal dropout of the information record carrier can be reduced by about 1/10 to 1/100 compared with the conventional device. In addition, due to the shortening of one stroke by integrating the radiation exposure device and the substrate holding mechanism, and the effect of removing the liquid resin remaining in the device by providing the resin suction and discharge mechanism, etc. It can be about / 2 to 1/3.
第１図，第２図は、従来技術による情報記録担体複製装
置の縦断面概念図を示す。 第３図，第４図は、本発明による情報記録担体複製装置
の縦断面概念図を示す。 第５図は、本発明による情報記録担体複製装置の付属装
置の概念図を示す。 １……複製金属スタンパ（金型） ２……プラスチック又はガラス基板（裏当て板） ３……支持台 ４……液状樹脂吐出ノズル ５……スライドピン ６……基板押え板 ７……真空吸引口 ８……エアーシリンダー ９……支持アーム 10……樹脂流入管、11……輻射線硬化樹脂 12……樹脂流入方向、13……輻射線光源 14……金属スタンパ外周保持材 15……樹脂排出管、16,16′……マスク（輻射線遮蔽
部） 17……圧縮バネ 18……センターピン（基板中心部押しピン） 19……基板保持部一体型輻射線露光装置 20……排出樹脂回収タンク 21……真空ポンプ、22……架台 23……レベルゲージ、24……空気配管 25……バルブ、26……空気流入方向FIG. 1 and FIG. 2 are conceptual vertical cross-sectional views of an information record carrier duplication device according to the prior art. FIG. 3 and FIG. 4 are conceptual longitudinal sectional views of the information record carrier duplicating apparatus according to the present invention. FIG. 5 shows a conceptual diagram of an auxiliary device of the information record carrier duplicating apparatus according to the present invention. 1 …… Duplicate metal stamper (mold) 2 …… Plastic or glass substrate (backing plate) 3 …… Supporting base 4 …… Liquid resin discharge nozzle 5 …… Slide pin 6 …… Board pressing plate 7 …… Vacuum suction Port 8 …… Air cylinder 9 …… Support arm 10 …… Resin inflow pipe, 11 …… Radiation ray curing resin 12 …… Resin inflow direction, 13 …… Radiation ray light source 14 …… Metal stamper outer peripheral holding material 15 …… Resin Discharge pipe, 16, 16 '…… Mask (radiation shield) 17… Compression spring 18… Center pin (push pin at the center of substrate) 19… Radiation exposure device integrated with substrate holder 20 …… Discharge resin Recovery tank 21 …… Vacuum pump, 22 …… Stand 23… Level gauge, 24 …… Air piping 25 …… Valve, 26 …… Air inflow direction
───────────────────────────────────────────────────── フロントページの続き (72)発明者 海老沼 ▲尚▼武 神奈川県横浜市戸塚区吉田町292番地 株 式会社日立製作所生産技術研究所内 (72)発明者 金田 愛三 神奈川県横浜市戸塚区吉田町292番地 株 式会社日立製作所生産技術研究所内 (56)参考文献 特開 昭59−111820（ＪＰ，Ａ) 特開 昭58−140223（ＪＰ，Ａ) 特開 昭59−42933（ＪＰ，Ａ) 特開 昭53−116105（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Ebinuma ▲ Nao ▼ 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Production Technology Research Laboratory, Hitachi, Ltd. (72) Inventor Aizo Kaneda Totsuka, Yokohama-shi, Kanagawa 292 Yoshida-cho, Ward, Ltd., Production Engineering Laboratory, Hitachi, Ltd. (56) References JP-A-59-111820 (JP, A) JP-A-58-140223 (JP, A) JP-A-59-42933 (JP, 59-42933) A) JP-A-53-116105 (JP, A)
Claims (2)
け、液状体の輻射線硬化樹脂を該複製金属スタンパと該
基板の間に加入注入し、 樹脂吐出ノズルを閉め、注入された樹脂を所定の厚さに
まで押圧し、 前記樹脂膜を硬化させるため輻射線光源により露光し、 マスク（輻射線遮蔽部）により未硬化である基板外周の
はみ出した液状樹脂を金属スタンパ外周保持材に設けら
れた吸引排出機構により装置外へ排出し、 前記複数金属スタンパより剥離させ、複製金属スタンパ
の凹凸溝型情報記録を転写し、 基板保持部一体型輻射線露光装置と基板の真空係合を解
き、両者を離脱することを特徴とする情報記録担体複製
方法。1. A method for duplicating an information record carrier, wherein a predetermined space is provided between a transparent substrate and a duplicate metal stamper, and a radiation-curable resin in a liquid state is additionally injected between the duplicate metal stamper and the substrate. , Close the resin discharge nozzle, press the injected resin to a predetermined thickness, expose with a radiation light source to cure the resin film, and uncured the outer periphery of the substrate with a mask (radiation shielding part). The protruding liquid resin is discharged to the outside of the device by the suction / discharge mechanism provided on the metal stamper outer circumference holding material, peeled off from the plurality of metal stampers, and the concave / convex groove type information record of the duplicate metal stamper is transferred to the substrate holding part integrated type. A method for replicating an information record carrier, characterized in that a vacuum engagement between a radiation exposure device and a substrate is released, and the two are separated.
保持装置と、 前記記録情報をさらに複製するガラス、プラスチックな
どからなる基板およびその保持機構と、 硬化前液状である輻射線硬化樹脂を吐出する吐出機構
と、 該輻射線硬化樹脂に露光する露光機構と、 前記輻射線露光機構の外周部にマスクを設け、 且つ前記金属スタンパ外周部近傍に液状輻射線硬化樹脂
の吸引排出機構を設け、且つ前記基板保持機構の中心部
に基板中心部強制押出し機構を設けた情報記録担体複製
装置であって、 前記基板中心部強制押出し機構により基板を変形させ、
輻射線硬化樹脂を中心から外周部に押し広げた後、輻射
線露光を行ない、 該樹脂の硬化後に外周部からはみ出している未硬化樹脂
を前記吸引機構で吸引排出することを特徴とする情報記
録担体複製装置。2. A metal damper to which recorded information is transferred and a holding device for the same, a substrate made of glass, plastic or the like for further duplicating the recorded information and a holding mechanism for the same, and a radiation curable resin which is liquid before curing is discharged. A discharge mechanism, an exposure mechanism that exposes the radiation-curable resin, a mask on the outer periphery of the radiation-exposure mechanism, and a suction-discharge mechanism for the liquid radiation-cured resin near the outer periphery of the metal stamper, An information record carrier duplicating device having a substrate center portion forced pushing mechanism provided at the center portion of the substrate holding mechanism, wherein the substrate is deformed by the substrate center portion forced pushing mechanism,
Information is characterized in that after the radiation curable resin is spread from the center to the outer peripheral portion, radiation exposure is performed, and the uncured resin protruding from the outer peripheral portion after curing of the resin is sucked and discharged by the suction mechanism. Carrier replication device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59257598A JPH0740378B2 (en) | 1984-12-07 | 1984-12-07 | Method and device for duplicating information record carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59257598A JPH0740378B2 (en) | 1984-12-07 | 1984-12-07 | Method and device for duplicating information record carrier |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61137246A JPS61137246A (en) | 1986-06-24 |
| JPH0740378B2 true JPH0740378B2 (en) | 1995-05-01 |
Family
ID=17308489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59257598A Expired - Lifetime JPH0740378B2 (en) | 1984-12-07 | 1984-12-07 | Method and device for duplicating information record carrier |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740378B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE68927617T2 (en) * | 1988-04-27 | 1997-06-05 | Dainippon Ink & Chemicals | Device for producing an optical information recording medium |
| KR100827741B1 (en) * | 2000-07-17 | 2008-05-07 | 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 | Method and system of automatic fluid dispensing for imprint lithography processes |
| FR2836970B1 (en) * | 2002-03-05 | 2005-04-29 | Valeo | METHOD FOR MANUFACTURING A CROWN-SHAPED FRICTION TRIM WITH FRICTION MATERIAL HAVING FIBERS, INJECTION MOLD FOR CARRYING OUT SAID METHOD, AND FRICTION TRIM THUS OBTAINED |
| JP4481698B2 (en) * | 2004-03-29 | 2010-06-16 | キヤノン株式会社 | Processing equipment |
| DE102004028501B3 (en) * | 2004-06-11 | 2006-05-04 | Maschinenfabrik Lauffer Gmbh & Co Kg | Press, in particular laminating press |
| DE102010029116B4 (en) | 2010-05-19 | 2021-10-14 | Bayerische Motoren Werke Aktiengesellschaft | Method and mold for making an adhesive sample |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL177721B (en) * | 1977-03-14 | 1985-06-03 | Philips Nv | METHOD FOR MANUFACTURING A PLASTIC INFORMATION CARRIER WITH LAYERED STRUCTURE AND AN APPARATUS FOR CARRYING OUT THE METHOD |
| JPS58140223A (en) * | 1982-02-15 | 1983-08-19 | Matsushita Electric Ind Co Ltd | Manufacture of recording medium |
| JPS5942933A (en) * | 1982-09-03 | 1984-03-09 | Toshiba Corp | Method and apparatus for manufacture of recording carrier for information |
| JPS59111820A (en) * | 1982-12-16 | 1984-06-28 | Matsushita Electric Ind Co Ltd | Manufacture of optical information carrier disc |
-
1984
- 1984-12-07 JP JP59257598A patent/JPH0740378B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61137246A (en) | 1986-06-24 |
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