JPH0735267B2 - Method for manufacturing bent heat ray reflective glass - Google Patents
Method for manufacturing bent heat ray reflective glassInfo
- Publication number
- JPH0735267B2 JPH0735267B2 JP62099128A JP9912887A JPH0735267B2 JP H0735267 B2 JPH0735267 B2 JP H0735267B2 JP 62099128 A JP62099128 A JP 62099128A JP 9912887 A JP9912887 A JP 9912887A JP H0735267 B2 JPH0735267 B2 JP H0735267B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- heat ray
- bending
- ray reflective
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
- C03B23/035—Re-forming glass sheets by bending using a gas cushion or by changing gas pressure, e.g. by applying vacuum or blowing for supporting the glass while bending
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
- C03B23/025—Re-forming glass sheets by bending by gravity
- C03B23/0252—Re-forming glass sheets by bending by gravity by gravity only, e.g. sagging
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
- C03B23/025—Re-forming glass sheets by bending by gravity
- C03B23/0258—Gravity bending involving applying local or additional heating, cooling or insulating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/225—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Surface Treatment Of Glass (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は曲げ熱線反射ガラスの製造方法に係り、特に高
特性の曲げ熱線反射ガラスを低コストで容易に製造する
ことができる方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for producing a bent heat ray reflective glass, and more particularly to a method for easily producing a bent heat ray reflective glass having high characteristics at low cost.
［従来の技術］ 近年、ビル、住宅、自動車等の窓ガラスに、太陽光線を
反射する熱線反射ガラスが使用されつつある。熱線反射
ガラスは太陽熱を反射し、室内の温度上昇を防ぎ、直射
日光を遮断して眩しさを防いだり、外部の視線からプラ
イバシーを守る等の機能の他、建物に美観を付与するな
どの効果も有し、各種窓ガラス材として注目を集めてい
る。[Prior Art] In recent years, heat ray-reflecting glass that reflects sunlight has been used for window glasses of buildings, houses, automobiles, and the like. The heat ray reflective glass reflects the sun's heat, prevents the temperature rise in the room, blocks direct sunlight to prevent glare, protects privacy from the outside line of sight, and has the effect of adding aesthetic appeal to the building. It also has various characteristics, and is attracting attention as various window glass materials.
従来、熱線反射ガラスとしては、ガラス基板表面に窒化
クロム被膜等の吸収膜を形成したものが一般的である。Conventionally, as the heat ray reflective glass, a glass substrate on which an absorption film such as a chromium nitride film is formed is generally used.
［発明が解決しようとする問題点］ 従来、提供されている熱線反射ガラスはいずれも平板状
であるが、施工対象によっては曲板状の熱線反射ガラス
が要求される場合もある。[Problems to be Solved by the Invention] Conventionally, all the heat ray reflection glasses provided have a flat plate shape, but a curved plate heat ray reflection glass may be required depending on the construction object.
曲板状の熱線反射ガラスを製造する方法としては、次の
２方法が考えられる。The following two methods are conceivable as a method of manufacturing the curved plate-shaped heat ray reflective glass.
曲げ加工したガラス基板上に窒化クロム被膜等の吸
収膜を形成する。An absorption film such as a chromium nitride film is formed on a bent glass substrate.
窒化クロム被膜等の吸収膜を形成した通常の熱線反
射ガラスを曲げ加工する。An ordinary heat-reflecting glass on which an absorption film such as a chromium nitride film is formed is bent.
上記の方法は、既に実施されているが、吸収膜の形成
にあたり、通常の平板用の成膜装置を用いることができ
ず、装置に特別な工夫が要求され、装置コストが高くつ
く上に、その作動制御も複雑化し、生産性が悪くなる。
また、成膜の前処理として、ガラス基板の洗浄、乾燥等
を行なうにあたり、曲板に対しての処理が難しいことか
ら、十分な処理が行なえず、前処理の不完全による膜品
質の悪化、具体的には膜のピンホールの増加、膜の色ム
ラの増加、ヘイズの増加、膜付着力の低下等、が発生し
易くなり、しかも、元来、曲板に成膜することは極めて
難しく、基板上に特性のばらつきが出ることがあり、高
品質の製品を製造するのが極めて困難となる。The above method has already been carried out, but in forming the absorption film, it is not possible to use a film forming apparatus for a normal flat plate, a special device is required for the apparatus, and the apparatus cost is high, and The operation control is also complicated and the productivity is deteriorated.
In addition, as a pretreatment for film formation, when cleaning, drying, etc. of a glass substrate, it is difficult to treat a curved plate, so that sufficient treatment cannot be performed, resulting in deterioration of film quality due to incomplete pretreatment. Specifically, increase in pinholes in the film, increase in color unevenness of the film, increase in haze, decrease in film adhesion, etc. are more likely to occur, and originally, it is extremely difficult to form a film on a curved plate. However, variations in characteristics may occur on the substrate, and it becomes extremely difficult to manufacture high quality products.
一方、の方法では、上記の問題はないものの、吸収膜
を有するガラスを通常の透明ガラスと同様にして曲げ加
工すると、吸収膜が変色したり、熱線反射性能等の光学
特性が低下する問題があり、従って、の方法は現在に
到るまで実用化されていない。On the other hand, in the method 1, although the above problem does not occur, when the glass having an absorption film is bent in the same manner as ordinary transparent glass, there is a problem that the absorption film is discolored or the optical characteristics such as heat ray reflection performance are deteriorated. Therefore, the method has not been put into practical use until now.
［問題点を解決するための手段］ 本発明は、通常の平板用成膜装置を用い、低コストで効
率的に製造することができ、しかも曲げ加工による光学
特性の低下も極めて少なく、高品質の製品とすることが
できる曲げ熱線反射ガラスの製造方法を提供するもので
あって、ガラス基板表面に、金属窒化物被膜を含む吸収
膜を形成した後、非酸化性雰囲気中で曲げ加工すること
を特徴とする曲げ熱線反射ガラスの製造方法を要旨とす
るものである。[Means for Solving Problems] The present invention uses a normal flat-plate film forming apparatus, can be efficiently manufactured at low cost, and has very little deterioration in optical characteristics due to bending, and has high quality. The present invention provides a method for producing a bent heat ray-reflecting glass that can be used as a product of the invention, comprising forming an absorbing film containing a metal nitride coating on the surface of a glass substrate, and then bending the glass substrate in a non-oxidizing atmosphere. The gist is a method for producing a bent heat ray reflective glass characterized by:
以下、本発明を図面を参照して詳細に説明する。Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図は本発明で製造される曲げ熱線反射ガラスの一実
施例を示す断面図である。FIG. 1 is a cross-sectional view showing an embodiment of the bending heat ray reflective glass manufactured by the present invention.
図示の如く、本発明で製造される曲げ熱線反射ガラス１
は、ガラス基板２の表面に金属窒化物被膜（以下、これ
を「第１の被膜」ということがある。）３が形成された
ものである。第１の被膜の金属窒化物としては窒化クロ
ム（CrXｘ）、窒化チタン（TiNｘ）又は窒化チタンアル
ミニウム（TiAlNｘ）が好適である。As shown in the drawing, the bending heat ray reflective glass 1 produced by the present invention
Is a glass substrate 2 on which a metal nitride coating (hereinafter, sometimes referred to as “first coating”) 3 is formed. Chromium nitride (CrX x ), titanium nitride (TiN x ), or titanium aluminum nitride (TiAlN x ) is suitable as the metal nitride of the first coating.
本発明において、金属窒化物被膜３の厚さは、所望の熱
反射能が得られる厚さとなるように適宜決定されるが、
一般には200〜1000Å程度とする。特に、金属窒化物被
膜３として窒化クロム被膜を形成する場合には200〜800
Å、窒化チタン被膜を形成する場合には300〜1000Å程
度の厚さとなるようにするのが良い。In the present invention, the thickness of the metal nitride coating 3 is appropriately determined so as to obtain a desired heat reflectivity,
Generally, it is about 200 to 1000Å. In particular, when forming a chromium nitride coating as the metal nitride coating 3, 200 to 800
Å When forming a titanium nitride film, it is preferable to have a thickness of about 300 to 1000Å.
本発明においては、このような金属窒化物被膜３の上
に、第２図に示す如く、必要に応じて金属酸化物被膜４
のオーバーコート層（以下、「第２の被膜」ということ
がある。）を形成しても良い。この場合、金属酸化物と
しては酸化チタン又は酸化スズが好適である。In the present invention, as shown in FIG. 2, a metal oxide coating 4 is optionally formed on the metal nitride coating 3 as described above.
An overcoat layer (hereinafter, sometimes referred to as “second coating”) may be formed. In this case, titanium oxide or tin oxide is suitable as the metal oxide.
このような金属酸化物被膜により、得られる曲げ熱線反
射ガラスの耐久性や光学特性等の改善が図られる。従っ
て、その厚さは、要求特性に応じて決定されるが、一般
には10〜500Å程度とする。By such a metal oxide film, the durability and optical characteristics of the bending heat ray reflective glass obtained can be improved. Therefore, the thickness is determined according to the required characteristics, but is generally about 10 to 500Å.
このような曲げ熱線反射ガラスを本発明方法により製造
するには、まず平板状のガラス基板を用い、この表面に
常法により第１の被膜である金属窒化物被膜を形成し、
必要に応じてさらにその上に第２の被膜である金属酸化
物被膜を形成する。In order to manufacture such a bending heat ray reflective glass by the method of the present invention, first, a flat glass substrate is used, and a metal nitride coating film which is a first coating film is formed on this surface by a conventional method,
If necessary, a second metal oxide film, which is a second film, is further formed thereon.
被膜の形成方法としては真空蒸着法、スパッタリング法
等を採用することができるが、例えば、第３図に示すよ
うなスパッタリング装置を用い、第１及び第２の被膜を
連続的に形成するのが有利である。A vacuum deposition method, a sputtering method, or the like can be adopted as the method for forming the coating film. For example, it is possible to continuously form the first and second coating films by using a sputtering apparatus as shown in FIG. It is advantageous.
第３図に示すスパッタリング装置は、アースされた真空
槽11の一部にバリアブルバルブ12を設けた排気口13を形
成し、この排気口13を介して真空ポンプ14と接続し、真
空槽11内を減圧するように構成されている。また、真空
槽11の上部にはマグネトロンカソード15,16,17が設けら
れ、これらは直流電源18と接続している。またマグネト
ロンカソード12と16の間には、バルブ19を備えたガス供
給管20が設けられ、真空槽11内にガスを供給するように
構成されている。更に、各カソード15,16,17の下方には
往復動可能な搬送ベルト21が配置されている。In the sputtering apparatus shown in FIG. 3, an exhaust port 13 provided with a variable valve 12 is formed in a part of the vacuum chamber 11 which is grounded, and a vacuum pump 14 is connected through this exhaust port 13 so that the inside of the vacuum chamber 11 is connected. Is configured to reduce the pressure. Further, magnetron cathodes 15, 16 and 17 are provided above the vacuum chamber 11, and these are connected to a DC power supply 18. Further, a gas supply pipe 20 having a valve 19 is provided between the magnetron cathodes 12 and 16, and is configured to supply gas into the vacuum chamber 11. Further, a reciprocating conveyor belt 21 is arranged below each of the cathodes 15, 16 and 17.
このような構成のスパッタリング装置を用いて成膜を行
なうには、例えば次のような方法で行なう。For example, the following method is used to form a film using the sputtering apparatus having such a configuration.
カソード15の下面に第１の被膜形成のためのターゲット
22（例えばCr）、カソード16の下面に第２の被膜形成の
ためのターゲット23（例えばTi）を取り付ける。一方、
搬送ベルト21上の基板ホルダー25にガラス基板26を載置
する。Target for forming the first coating on the lower surface of the cathode 15
22 (for example, Cr), and a target 23 (for example, Ti) for forming the second film is attached to the lower surface of the cathode 16. on the other hand,
A glass substrate 26 is placed on a substrate holder 25 on the conveyor belt 21.
次いで、バリアブルバルブ12を設け、真空槽11内を減圧
とし、ガス供給管10より窒素を供給した後、バリアブル
バルブ12を閉じ、真空槽11内の圧力を所定の窒素雰囲気
とする。Next, a variable valve 12 is provided, the pressure in the vacuum chamber 11 is reduced, and nitrogen is supplied from the gas supply pipe 10. Then, the variable valve 12 is closed to bring the pressure in the vacuum chamber 11 to a predetermined nitrogen atmosphere.
次に、カソード15に負電圧を印加してガラス基板26をカ
ソード15下に移動させ、金属窒化物被膜を形成する。同
様に、カソード16に負電圧を印加し、ガラス基板26を移
動させて、第２の被膜を形成する。Next, a negative voltage is applied to the cathode 15 to move the glass substrate 26 below the cathode 15 to form a metal nitride film. Similarly, a negative voltage is applied to the cathode 16 to move the glass substrate 26 to form a second coating.
このようにして、第１の被膜、必要に応じて第２の被膜
を形成した熱線反射ガラスを、次いで非酸化性雰囲気中
に曲げ加工する。In this way, the heat ray reflective glass on which the first coating film and, if necessary, the second coating film are formed, is then bent in a non-oxidizing atmosphere.
曲げ加工方法としては特に制限はないが、例えば第４図
に示す電気炉により、加熱して曲げ加工処理を行なうこ
とができる。The bending method is not particularly limited, but the bending processing can be performed by heating with an electric furnace shown in FIG. 4, for example.
第４図に示す電気炉は、ヒーター30によって昇温するよ
うになっており、熱電対31により測定した温度から温度
コートローラー32により炉内の温度を調節する。また、
ガスはガスシリンダー33又は34のバルブ35,36を流量計3
7の値から、所定の流量になるように調節し、ガス供給
管38から炉内に導入するようになっている。The electric furnace shown in FIG. 4 is designed to be heated by the heater 30, and the temperature inside the furnace is adjusted by the temperature coat roller 32 from the temperature measured by the thermocouple 31. Also,
For gas, use the valves 35 and 36 of the gas cylinder 33 or 34 for flow meter 3
The value of 7 is adjusted so that the flow rate becomes a predetermined value, and the gas is introduced from the gas supply pipe 38 into the furnace.
このような電気炉を用いて熱線反射ガラスを曲げるに
は、電気炉を600〜750℃程度に昇温し、シリンダー33及
び／又は34より雰囲気ガスを炉内に供給し、熱線反射ガ
ラス39を曲げ台40の上にセットして所定時間保持する。
その後、熱線反射ガラス39を取り出し放冷する。To bend the heat-reflecting glass using such an electric furnace, the electric furnace is heated to about 600 to 750 ° C., the atmosphere gas is supplied into the furnace from the cylinder 33 and / or 34, and the heat-reflecting glass 39 is supplied. It is set on the bending table 40 and held for a predetermined time.
Then, the heat ray reflective glass 39 is taken out and allowed to cool.
本発明において、曲げ加工の程度は、ガラスの大きさや
厚さ、被膜の種類、厚さ等によっても異なるが、一般に
は曲率半径20〜70cm程度とする。In the present invention, the bending degree varies depending on the size and thickness of glass, the type of coating, the thickness, etc., but is generally about 20 to 70 cm in radius of curvature.
なお、本発明において、このような曲げ加工を行なう際
の炉内の非酸化性雰囲気とは、例えばN2,H2及びAr等の
不活性ガスの１種又は２種以上よりなる雰囲気とするの
が良い。In the present invention, the non-oxidizing atmosphere in the furnace when performing such bending is, for example, an atmosphere composed of one or more inert gases such as N 2 , H 2 and Ar. Is good.
［作 用］ 金属窒化物被膜を吸収膜とする熱線反射ガラスを非酸化
性雰囲気中で曲げ加工することにより、曲げ加工時の歪
発生、膜の色調の変化、熱線反射性能等の光学特性の低
下等が改善される。[Operation] By bending the heat ray reflective glass with a metal nitride coating as an absorbing film in a non-oxidizing atmosphere, distortion during bending, change in the color tone of the film, heat ray reflection performance, and other optical characteristics The decrease is improved.
このため、本発明によれば、熱線反射ガラスの品質に悪
影響を与えることなく、加熱により曲げ加工することが
可能となるので、成膜後、曲げ加工という工程をとるこ
とができる。このため、成膜は従来の平板用成膜装置を
用いて効率的かつ安価に製造することができ、曲げ熱線
反射ガラスのコストダウンを図れる。Therefore, according to the present invention, it is possible to perform the bending process by heating without adversely affecting the quality of the heat ray reflective glass, so that a step of bending process can be performed after the film formation. Therefore, the film formation can be efficiently and inexpensively manufactured by using the conventional flat plate film forming apparatus, and the cost of the bending heat ray reflective glass can be reduced.
［実施例］ 以下、実施例及び比較例について説明する。[Examples] Examples and comparative examples will be described below.
実施例１ 本発明の方法に従って、第１図に示す曲げ熱線反射ガラ
ス１を製造した。Example 1 A bent heat ray reflective glass 1 shown in FIG. 1 was manufactured according to the method of the present invention.
まず、第３図に示すスパッタリング装置を用い、次の
〜の手順で第１及び第２の被膜を形成した。First, using the sputtering apparatus shown in FIG. 3, the first and second coatings were formed by the following procedures (1) to (3).
カソード15の下面にCrをターゲット22として取り付
け、搬送ベルト21上の基板ホルダー25に洗浄したガラス
基板26を載置した。Cr was attached as the target 22 to the lower surface of the cathode 15, and the cleaned glass substrate 26 was placed on the substrate holder 25 on the conveyor belt 21.
バリアブルバルブ12を開け、真空槽11内を５×10-6
Torr以下になるまで減圧し、ガス供給管20より窒素を供
給して、バリアブルバルブ12を閉じ、真空槽11内の圧力
が２×10-3Torrになるようにした。Open the variable valve 12 and set the inside of the vacuum chamber 11 to 5 × 10 -6
The pressure was reduced to less than Torr, nitrogen was supplied from the gas supply pipe 20, the variable valve 12 was closed, and the pressure in the vacuum chamber 11 was adjusted to 2 × 10 −3 Torr.
次にカソード15に500Vの負電圧を印加し、ガラス基
板26をカソード15下を移動させることで、ガラス基板26
表面に厚さ500Åの窒化クロム被膜、即ち第１の被膜３
を形成した。Next, by applying a negative voltage of 500 V to the cathode 15 and moving the glass substrate 26 under the cathode 15, the glass substrate 26
Chromium nitride film with a thickness of 500Å on the surface, ie, the first film 3
Was formed.
次に、第４図に示す電気炉を用いて、次の〜の手順
で曲げ加工を行なった。Next, using the electric furnace shown in FIG. 4, the bending process was performed in the following procedures.
電気炉を約650℃まで昇温した後、シリンダー33よ
り窒素ガスを送給し、ガス供給管38より炉内に導入し
た。After heating the electric furnace to about 650 ° C., nitrogen gas was fed from the cylinder 33 and introduced into the furnace through the gas supply pipe 38.
窒素ガスが炉内に均質にいきわたった後、上記作成
した熱線反射ガラス39を曲げ台40の上にセットする。After the nitrogen gas has spread uniformly in the furnace, the heat ray reflective glass 39 created above is set on the bending table 40.
約630℃で、３分間保持する。 Hold at about 630 ° C for 3 minutes.
ガラス39を電気炉の外に取り出し、自然放冷させ
る。The glass 39 is taken out of the electric furnace and naturally cooled.
（曲げ加工の程度：曲率半径42cm） 得られた曲げ熱線反射ガラスの透過スペクトルを第５図
に示す。また、曲げ加工前後の可視光透過率を第１表に
示す。なお、比較のため、曲げ加工前のものの透過スペ
クトルも第５図に併記する。(Extent of bending: radius of curvature 42 cm) The transmission spectrum of the obtained bending heat ray reflective glass is shown in FIG. Table 1 shows the visible light transmittance before and after bending. For comparison, the transmission spectrum before bending is also shown in FIG.
比較例１ 曲げ加工を空気雰囲気で行なったこと以外は実施例１と
同様にして曲げ熱線反射ガラスを作成した。Comparative Example 1 A bent heat ray reflective glass was prepared in the same manner as in Example 1 except that the bending process was performed in an air atmosphere.
得られた曲げ熱線反射ガラスの透過スペクトルを第５図
に示す。また、曲げ加工前後の可視光透過率を第１表に
示す。The transmission spectrum of the bending heat ray reflective glass obtained is shown in FIG. Table 1 shows the visible light transmittance before and after bending.
実施例２ 実施例１において、カソード16の下面にTiをターゲット
23として取り付け、成膜工程のにおいて、カソード16
に550Vの負電圧を印加し、ガラス基板26をカソード16を
移動させることにより、厚さ800Åの窒化チタン被膜を
形成したこと以外は、実施例１と同様にして曲げ熱線反
射ガラス１を製造した。Example 2 In Example 1, Ti was targeted on the lower surface of the cathode 16.
Attached as 23, in the film forming process, the cathode 16
A bending heat ray reflective glass 1 was produced in the same manner as in Example 1 except that a negative voltage of 550V was applied to the glass substrate 26 to move the cathode 16 to form a titanium nitride film having a thickness of 800Å. .
得られた曲げ熱線反射ガラスの透過スペクトルを第６図
に示す。また、曲げ加工前後の可視光透過率を第１表に
す。なお、比較のため、曲げ加工前のものの透過スペク
トルも第６図に併記する。The transmission spectrum of the bending heat ray reflective glass obtained is shown in FIG. Table 1 shows the visible light transmittance before and after bending. For comparison, the transmission spectrum before bending is also shown in FIG.
比較例２ 曲げ加工を空気雰囲気で行なったこと以外は実施例２と
同様にして曲げ熱線反射ガラスを作成した。Comparative Example 2 A bent heat ray reflective glass was prepared in the same manner as in Example 2 except that the bending process was performed in an air atmosphere.
得られた曲げ熱線反射ガラスの透過スペクトルを第６図
に示す。また、曲げ加工前後の可視光透過率を第１表に
示す。The transmission spectrum of the bending heat ray reflective glass obtained is shown in FIG. Table 1 shows the visible light transmittance before and after bending.
実施例３ 実施例１において、カソード15下面にCrをターゲット22
として、またカソード16の下面にTiをターゲット23とし
て取り付け、成膜工程〜に続いて、下記，の工
程を経て成膜を行なったこと以外は同様にして第２図に
示すような第２の被膜として酸化チタン被膜を有する曲
げ熱線反射ガラス１を製造した。Example 3 In Example 1, a Cr target 22 was formed on the lower surface of the cathode 15.
In addition, except that Ti is attached to the lower surface of the cathode 16 as the target 23, and the film formation step is followed by the following steps, the film formation is performed in the same manner as in the second step shown in FIG. Bending heat ray reflective glass 1 having a titanium oxide coating as a coating was manufactured.
カソード15のパワーを切り、再び５×10-5Torr以下
の真空に引いた後、ガス供給管20から酸素を導入し、真
空槽11内の圧力が２×10-3Torrになるようにした。After turning off the power of the cathode 15 and drawing a vacuum of 5 × 10 −5 Torr or less again, oxygen was introduced from the gas supply pipe 20 so that the pressure in the vacuum chamber 11 became 2 × 10 −3 Torr. .
次にカソード16に450Vの負電圧を印加し、ガラス基
板26をカソード16下を移動させることで、窒化クロム被
膜３上に第２の被膜４として酸化チタン被膜を60Å厚さ
に形成した。Next, by applying a negative voltage of 450 V to the cathode 16 and moving the glass substrate 26 under the cathode 16, a titanium oxide film having a thickness of 60 Å was formed as the second film 4 on the chromium nitride film 3.
得られた曲げ熱線反射ガラスの透過スペクトルを第７図
に示す。また、曲げ加工前後の可視光透過率を第１表に
示す。なお、比較のため、曲げ加工前のものの透過スペ
クトルも第７図に併記する。The transmission spectrum of the bending heat ray reflective glass obtained is shown in FIG. Table 1 shows the visible light transmittance before and after bending. For comparison, the transmission spectrum before bending is also shown in FIG.
比較例３ 曲げ加工を空気雰囲気で行なったこと以外は実施例３と
同様にして曲げ熱線反射ガラスを作成した。Comparative Example 3 A bent heat ray reflective glass was prepared in the same manner as in Example 3 except that the bending process was performed in an air atmosphere.
得られた曲げ熱線反射ガラスの透過スペクトルを第７図
に示す。また、曲げ加工前後の可視光透過率を第１表に
示す。The transmission spectrum of the bending heat ray reflective glass obtained is shown in FIG. Table 1 shows the visible light transmittance before and after bending.
実施例４ 実施例３において、カソード16の下面にSnをターゲット
23として取り付け、第２の被膜として酸化スズ被膜を形
成したこと以外は同様にして曲げ熱線反射ガラス１を製
造した。Example 4 In Example 3, Sn was targeted on the lower surface of the cathode 16.
Bent heat ray reflective glass 1 was manufactured in the same manner except that it was attached as No. 23 and a tin oxide film was formed as the second film.
得られた曲げ熱線反射ガラスの曲げ加工前後の可視光透
過率を第１表に示す。Table 1 shows the visible light transmittances of the obtained bending heat ray reflective glass before and after bending.
比較例４ 曲げ加工を空気雰囲気で行なったこと以外は実施例４と
同様にして曲げ熱線反射ガラスを作成した。Comparative Example 4 A bent heat ray reflective glass was prepared in the same manner as in Example 4 except that the bending process was performed in an air atmosphere.
得られた曲げ熱線反射ガラスの曲げ加工前後の可視光透
過率を第１表に示す。Table 1 shows the visible light transmittances of the obtained bending heat ray reflective glass before and after bending.
第５図〜第７図並びに第１表より、本発明の方法によれ
ば、曲げ加工による可視光透過率の変化が小さく、熱線
反射性能が良好に保たれることが明らかである。 From FIGS. 5 to 7 and Table 1, it is clear that the method of the present invention has a small change in visible light transmittance due to bending, and the heat ray reflection performance is kept good.
［発明の効果］ 以上詳述した通り、本発明の曲げ熱線反射ガラスの製造
方法は、ガラス基板表面に、金属窒化物被膜を含む吸収
膜を形成した後、非酸化性雰囲気中で曲げ加工すること
を特徴とするものであって、 通常の平板用成膜装置を用いて吸収膜の成膜を行な
うことができ、装置コストが安価となり、また制御作業
も容易で、短時間で成膜できる。[Effects of the Invention] As described in detail above, in the method for manufacturing a bending heat ray reflective glass of the present invention, after forming an absorbing film containing a metal nitride coating on the surface of a glass substrate, bending is performed in a non-oxidizing atmosphere. This is characterized in that the absorption film can be formed by using an ordinary flat-plate film forming apparatus, the apparatus cost is low, the control work is easy, and the film can be formed in a short time. .
平板ガラスに成膜するため、膜欠陥が発生する可能
性が極めて低い。Since the film is formed on flat glass, the possibility of film defects is extremely low.
曲げ加工により歪が発生したり、色調が変化したり
することがなく、光学特性の低下も著しく小さい。Bending does not cause distortion or change in color tone, and the deterioration of optical characteristics is extremely small.
等の優れた効果を有する。And so on.
従って、本発明によれば、低コストで高い生産性のもと
に、高特性曲げ熱線反射ガラスを提供することができ、
本発明の工業的有用性は極めて高い。Therefore, according to the present invention, under high productivity at low cost, it is possible to provide a high-characteristic bending heat ray reflective glass,
The industrial utility of the present invention is extremely high.
第１図及び第２図は各々本発明で製造される曲げ熱線反
射ガラスの一実施例を示す断面図である。第３図は本発
明の方法の実施に好適なスパッタリング装置の構成を示
す概略図、第４図は本発明の実施に好適な電気炉の構成
を示す概略図である。第５図は実施例１及び比較例１の
結果を示すグラフ、第６図は実施例２及び比較例２の結
果を示すグラフ、第７図は実施例３及び比較例３の結果
を示すグラフである。 １……曲げ熱線反射ガラス、 ２……ガラス基板、 ３……金属窒化物被膜、 ４……金属酸化物被膜。1 and 2 are cross-sectional views showing an embodiment of the bending heat ray reflective glass manufactured by the present invention. FIG. 3 is a schematic view showing the structure of a sputtering apparatus suitable for carrying out the method of the present invention, and FIG. 4 is a schematic view showing the structure of an electric furnace suitable for carrying out the present invention. 5 is a graph showing the results of Example 1 and Comparative Example 1, FIG. 6 is a graph showing the results of Example 2 and Comparative Example 2, and FIG. 7 is a graph showing the results of Example 3 and Comparative Example 3. Is. 1 ... Bending heat ray reflective glass, 2 ... Glass substrate, 3 ... Metal nitride coating, 4 ... Metal oxide coating.
Claims (5)
吸収膜を形成した後、非酸化性雰囲気中で曲げ加工する
ことを特徴とする曲げ熱線反射ガラスの製造方法。1. A method for producing a bent heat ray reflective glass, which comprises forming an absorption film containing a metal nitride film on the surface of a glass substrate and then bending the film in a non-oxidizing atmosphere.
群から選ばれる１種又は２種以上よりなる雰囲気である
ことを特徴とする特許請求の範囲第１項に記載の方法。2. The non-oxidizing atmosphere according to claim 1, wherein the non-oxidizing atmosphere is an atmosphere consisting of one or more selected from the group consisting of N 2 , Ar and H 2 . Method.
窒化チタンアルミニウムであることを特徴とする特許請
求の範囲第１項又は第２項に記載の方法。3. The method according to claim 1, wherein the metal nitride is chromium nitride, titanium nitride or titanium aluminum nitride.
た金属酸化物被膜とからなることを特徴とする特許請求
の範囲第１項ないし第３項のいずれか１項に記載の方
法。4. The method according to claim 1, wherein the absorption film is composed of a metal nitride film and a metal oxide film formed on the metal nitride film. .
ることを特徴とする特許請求の範囲第１項ないし第４項
のいずれか１項に記載の方法。5. The method according to any one of claims 1 to 4, wherein the metal nitride is titanium oxide or tin oxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62099128A JPH0735267B2 (en) | 1987-04-22 | 1987-04-22 | Method for manufacturing bent heat ray reflective glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62099128A JPH0735267B2 (en) | 1987-04-22 | 1987-04-22 | Method for manufacturing bent heat ray reflective glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63265844A JPS63265844A (en) | 1988-11-02 |
| JPH0735267B2 true JPH0735267B2 (en) | 1995-04-19 |
Family
ID=14239116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62099128A Expired - Fee Related JPH0735267B2 (en) | 1987-04-22 | 1987-04-22 | Method for manufacturing bent heat ray reflective glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735267B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9790593B2 (en) | 2014-08-01 | 2017-10-17 | Corning Incorporated | Scratch-resistant materials and articles including the same |
| US10436945B2 (en) | 2014-05-12 | 2019-10-08 | Corning Incorporated | Durable and scratch-resistant anti-reflective articles |
| US11002885B2 (en) | 2015-09-14 | 2021-05-11 | Corning Incorporated | Scratch-resistant anti-reflective articles |
| US11567237B2 (en) | 2018-08-17 | 2023-01-31 | Corning Incorporated | Inorganic oxide articles with thin, durable anti-reflective structures |
| US11714213B2 (en) | 2013-05-07 | 2023-08-01 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2964150B2 (en) * | 1989-06-15 | 1999-10-18 | 大同特殊鋼株式会社 | Manufacturing method of large curved glass with metal coating on the surface |
| JPH0355832U (en) * | 1989-10-03 | 1991-05-29 | ||
| US7140204B2 (en) | 2002-06-28 | 2006-11-28 | Guardian Industries Corp. | Apparatus and method for bending glass using microwaves |
| WO2024041799A1 (en) | 2022-08-22 | 2024-02-29 | Saint-Gobain Glass France | Vehicle window having an opaque coating |
-
1987
- 1987-04-22 JP JP62099128A patent/JPH0735267B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11714213B2 (en) | 2013-05-07 | 2023-08-01 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
| US10436945B2 (en) | 2014-05-12 | 2019-10-08 | Corning Incorporated | Durable and scratch-resistant anti-reflective articles |
| US9790593B2 (en) | 2014-08-01 | 2017-10-17 | Corning Incorporated | Scratch-resistant materials and articles including the same |
| US11002885B2 (en) | 2015-09-14 | 2021-05-11 | Corning Incorporated | Scratch-resistant anti-reflective articles |
| US11698475B2 (en) | 2015-09-14 | 2023-07-11 | Corning Incorporated | Scratch-resistant anti-reflective articles |
| US11567237B2 (en) | 2018-08-17 | 2023-01-31 | Corning Incorporated | Inorganic oxide articles with thin, durable anti-reflective structures |
| US11906699B2 (en) | 2018-08-17 | 2024-02-20 | Corning Incorporated | Inorganic oxide articles with thin, durable anti reflective structures |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63265844A (en) | 1988-11-02 |
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