JPH07333186A - Liquid concentration measuring device - Google Patents
Liquid concentration measuring deviceInfo
- Publication number
- JPH07333186A JPH07333186A JP15282294A JP15282294A JPH07333186A JP H07333186 A JPH07333186 A JP H07333186A JP 15282294 A JP15282294 A JP 15282294A JP 15282294 A JP15282294 A JP 15282294A JP H07333186 A JPH07333186 A JP H07333186A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- measured
- concentration
- temperature
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、液体内の特定成分の濃
度を測定する液体濃度測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid concentration measuring device for measuring the concentration of a specific component in a liquid.
【０００２】[0002]
【従来の技術】例えば、半導体装置の製造には種々の薬
液（例えばエタノール、塩酸、フッ酸、硝酸、過酸化水
素水等）と水等との混合液をつくり、それを例えばエッ
チング、洗浄、前処理等に使用するということが多い。
その場合、その薬液の濃度を精確に制御することが必要
であり、それにはその濃度を精確に測定することが必要
である。従来、そのような薬液の濃度測定には、近赤外
線による透過分光測定方式の測定装置あるいは超音波伝
達速度測定方式による測定装置が多く用いられた。2. Description of the Related Art For example, in the manufacture of semiconductor devices, a mixed solution of various chemicals (for example, ethanol, hydrochloric acid, hydrofluoric acid, nitric acid, hydrogen peroxide solution, etc.) and water is prepared, which is then subjected to etching, cleaning, It is often used for pretreatment.
In that case, it is necessary to accurately control the concentration of the drug solution, and it is necessary to accurately measure the concentration. Heretofore, in order to measure the concentration of such a drug solution, a measuring device of a transmission spectroscopic measurement system using near infrared rays or a measuring device of an ultrasonic transmission velocity measurement system has been often used.
【０００３】前者は、０．８〜２．５μｍ程度の波長の
光線（近赤外線）の分光特性が液体の薬液の濃度により
異なることを利用するものである。後者は、超音波の液
体を伝播する速度が薬液の濃度により異なることを利用
するものである。The former utilizes the fact that the spectral characteristics of light rays (near infrared rays) having a wavelength of about 0.8 to 2.5 μm differ depending on the concentration of the liquid chemical. The latter utilizes the fact that the speed of ultrasonic waves propagating through a liquid varies depending on the concentration of the chemical liquid.
【０００４】[0004]
【発明が解決しようとする課題】ところで、近赤外線に
よる透過分光測定方式による測定装置には、光学系を使
用しているために、振動に弱く、移動タイプには適しな
いという問題と、被測定液の濁りや泡により測定値が影
響され、誤差が生じ易いという問題があった。また、超
音波伝達速度測定方式による測定装置には、超音波発振
器を被測定液中に入れるために、薬液がその発振器によ
って汚染されるおそれ、あるいは逆に発振器が薬液によ
って侵されるおそれがあるという問題があった。By the way, the measuring device using the near-infrared transmission spectroscopic measurement method uses an optical system, which is vulnerable to vibration and is not suitable for the moving type. There was a problem that the measured values were affected by the turbidity of the liquid and bubbles, and errors were likely to occur. Further, in the measuring device using the ultrasonic transmission velocity measurement method, since the ultrasonic oscillator is placed in the liquid to be measured, the chemical liquid may be contaminated by the oscillator, or conversely, the oscillator may be attacked by the chemical liquid. There was a problem.
【０００５】更に、被測定液中に超音波発振器及びケー
ブルが入るため、もしその液で処理をしながらその濃度
測定をしようとすると、製品処理スペース以外にその超
音波発振器及びケーブルの入るスペースが被測定液の入
る処理槽内になければならなくなる。従って、実際上は
処理作業中における濃度測定は行うことができない。そ
のため、処理作業中に濃度変化が起きてもそれに対応す
ることができないという問題があった。Further, since the ultrasonic oscillator and the cable are put in the liquid to be measured, if the concentration is measured while the liquid is being processed, the space for the ultrasonic oscillator and the cable to be put is provided in addition to the product processing space. It must be in the processing tank containing the liquid to be measured. Therefore, it is practically impossible to measure the concentration during the processing operation. Therefore, there is a problem that even if the concentration changes during the processing operation, it cannot be dealt with.
【０００６】本発明はこのような問題点を解決すべく為
されたものであり、振動に強く、移動式のもつくること
ができ、濁りや泡による誤差がなく、被測定液の汚染や
被測定液による侵食のおそれがなく、被測定液による処
理中にも濃度測定のできる新規な液体濃度測定装置を提
供しようとするものである。The present invention has been made to solve the above problems, and is strong against vibration, can be moved, and has no error due to turbidity or bubbles. It is an object of the present invention to provide a novel liquid concentration measuring device which has no fear of being eroded by a measuring liquid and can measure the concentration even during treatment with a liquid to be measured.
【０００７】[0007]
【課題を解決するための手段】請求項１の液体濃度測定
装置は、被測定液を通す液通路の外部に設けた対向電極
と、該対向電極の静電容量を測定する静電容量測定回路
からなることを特徴とする。請求項２の液体濃度測定装
置は、請求項１記載の液体濃度測定装置において、温度
検出手段の出力結果に基づいて温度制御手段により被測
定液の温度を予め設定された温度になるように制御する
ようにしたことを特徴とする。According to another aspect of the present invention, there is provided a liquid concentration measuring device, wherein a counter electrode is provided outside a liquid passage through which a liquid to be measured is passed, and a capacitance measuring circuit for measuring the capacitance of the counter electrode. It is characterized by consisting of. The liquid concentration measuring device according to a second aspect is the liquid concentration measuring device according to the first aspect, wherein the temperature control means controls the temperature of the liquid to be measured to a preset temperature based on the output result of the temperature detecting means. It is characterized by doing so.
【０００８】[0008]
【作用】請求項１の液体濃度測定装置によれば、混合液
の成分が固有の誘電率を有するので、被測定液の外側に
設けた対向電極の静電容量が濃度によって変化し、静電
容量測定回路によりその静電容量を測定することによっ
て濃度の測定をすることができる。そして、光学系を必
要としないので、振動に強く、また移動タイプにも適用
することができるし、濁りや泡によって誤差の生じるお
それもない。しかも、対向電極及び静電容量測定回路は
被測定液の通る液通路の外側に設けられるので、被測定
液に対して非接触で濃度測定ができる。従って、薬液が
その対向電極等によって汚染されるおそれ、あるいは逆
に対向電極等が薬液によって侵されるおそれは全くな
い。According to the liquid concentration measuring device of the first aspect, since the components of the mixed liquid have a specific dielectric constant, the capacitance of the counter electrode provided outside the liquid to be measured changes depending on the concentration, and electrostatic It is possible to measure the concentration by measuring the capacitance of the capacitance measuring circuit. Since it does not require an optical system, it is strong against vibration and can be applied to a moving type, and there is no possibility of causing an error due to turbidity or bubbles. Moreover, since the counter electrode and the capacitance measuring circuit are provided outside the liquid passage through which the liquid to be measured passes, the concentration can be measured without contacting the liquid to be measured. Therefore, there is no possibility that the chemical solution is contaminated by the counter electrode or the like, or conversely, the counter electrode or the like is attacked by the chemical solution.
【０００９】しかも、超音波伝達速度測定方式による測
定装置のように被測定液中に超音波発振器及びケーブル
が入るということが全くなく、処理作業中における濃度
測定を全く支障なく行うことができ、従って、処理作業
中に濃度変化が起きてもそれに対応して濃度を制御する
ことが可能となる。請求項２の液体濃度測定装置によれ
ば、被測定液の温度を予め設定された温度になるように
制御するので、温度による測定誤差の生じるおそれがな
い。Moreover, unlike the measuring device using the ultrasonic transmission velocity measuring method, the ultrasonic oscillator and the cable do not enter the liquid to be measured at all, and the concentration measurement during the processing operation can be performed without any trouble. Therefore, even if the density changes during the processing operation, the density can be controlled correspondingly. According to the liquid concentration measuring device of the second aspect, since the temperature of the liquid to be measured is controlled to be a preset temperature, there is no possibility of causing a measurement error due to the temperature.
【００１０】[0010]
【実施例】以下、本発明液体濃度測定装置を図示実施例
に従って詳細に説明する。図１（Ａ）乃至（Ｃ）は本発
明液体濃度測定装置の一つの実施例を示すもので、
（Ａ）は全体の構成図、（Ｂ）は対向電極部の縦断面
図、（Ｃ）は（Ｂ）のＢ−Ｂ線視断面図である。図面に
おいて、１は処理槽、２は該処理槽１内の処理液で、例
えばエタノールの水溶液である。３はその処理槽１内に
供給する水を蓄えるタンク、４は同じくエタノールを蓄
えるタンク、５は該タンク４から処理槽１内に供給する
管の供給量調整用バルブであり、このバルブ５の調整を
自動的に行うための濃度測定を本液体濃度測定装置によ
って行うのである。The liquid concentration measuring device of the present invention will be described in detail below with reference to the illustrated embodiments. 1A to 1C show one embodiment of the liquid concentration measuring device of the present invention,
(A) is an overall configuration diagram, (B) is a vertical sectional view of a counter electrode portion, and (C) is a sectional view taken along line BB of (B). In the drawing, 1 is a processing tank, 2 is a processing liquid in the processing tank 1, and is, for example, an aqueous solution of ethanol. 3 is a tank for storing water to be supplied into the processing tank 1, 4 is a tank for similarly storing ethanol, and 5 is a valve for adjusting a supply amount of a pipe supplied from the tank 4 into the processing tank 1. The liquid concentration measuring device measures the concentration for automatic adjustment.
【００１１】６は被測定液２をその濃度測定のために吸
い込む液通管で、特許請求の範囲における液通路に該当
する。７は該液通管６の一部を圧潰した対向電極設置部
で、該部７の外面に一対の対向電極８、８が互いに平行
に設けられている。この液通管６を対向電極設置部７に
おいて圧潰するのは、対向電極８・８間の間隔を小さく
することによりその静電容量をできるだけ大きくして濃
度測定の感度を上げるためである。９は液通管を流れる
被測定液２の流量を調整するバルブ、１０は液通管６に
処理槽１中の被測定液２を吸い込むためのポンプであ
る。尚、液通管６内に吸い込まれた被測定液２は廃液処
理される。Reference numeral 6 denotes a liquid passage pipe for sucking the liquid to be measured 2 for measuring its concentration, which corresponds to the liquid passage in the claims. Reference numeral 7 denotes a counter electrode installation portion in which a part of the liquid passage tube 6 is crushed, and a pair of counter electrodes 8, 8 are provided in parallel to each other on the outer surface of the portion 7. The reason why the liquid passage tube 6 is crushed at the counter electrode installation portion 7 is to reduce the distance between the counter electrodes 8 to increase the capacitance thereof as much as possible to enhance the sensitivity of concentration measurement. Reference numeral 9 is a valve for adjusting the flow rate of the liquid to be measured 2 flowing through the liquid passage pipe, and 10 is a pump for sucking the liquid to be measured 2 in the processing tank 1 into the liquid passage pipe 6. The measured liquid 2 sucked into the liquid passage pipe 6 is treated as a waste liquid.
【００１２】１１は液通管６中を流れる被測定液（処理
液）２の温度を測定する温度センサー、１２は被測定液
２中を流れる温度を加熱するヒーターで、その温度を一
定に保つため制御を受ける。このように温度制御を行う
のは、被測定液中の成分、例えばエタノールの比誘電率
が温度により変化することから、測定値に誤差が生じな
いようにするためである。そして、上記温度センサー１
１はその温度制御に不可欠な温度モニターをするための
ものである。Reference numeral 11 is a temperature sensor for measuring the temperature of the liquid to be measured (processing liquid) 2 flowing in the liquid passage pipe 6, and 12 is a heater for heating the temperature flowing in the liquid to be measured 2 and keeping the temperature constant. To get control. The temperature control is carried out in this manner in order to prevent an error in the measured value since the relative dielectric constant of the component in the liquid to be measured, for example, ethanol changes with temperature. And the temperature sensor 1
Reference numeral 1 is for temperature monitoring which is indispensable for temperature control.
【００１３】１３は上記対向電極８、８からなるコンデ
ンサを構成要素とする発振器で、このコンデンサの静電
容量により発振周波数が変化する。１４は該発振器１３
の発振出力をＦ−Ｖ変換するＦ／Ｖコンバータ、１５は
該Ｆ／Ｖコンバータ１４の出力電圧（アナログ出力）を
ディジタル信号に変換するＡ／Ｄコンバータで、このＡ
／Ｄコンバータ１５の出力は入出力回路１６を介してＣ
ＰＵ１７に伝送され、濃度を算出するための演算処理を
される。即ち、被測定液２の濃度とその比誘電率との間
には例えば図２に示すような（図２はエタノールを例と
する。）リニアな関係があり、濃度によってその比誘電
率が変化するので、必然的に対向電極８、８からなるコ
ンデンサの静電容量も変化する。その静電容量が変化す
ると発振器１３の発振周波数も変化し、この発振周波数
はＦ／Ｖコンバータ１４によりＦ・Ｖ変換され、更にＡ
／Ｄコンバータ１５によりＡ・Ｄ変換されてＣＰＵ１７
に伝送される。このＣＰＵ１７に伝送されたディジタル
信号は当然に液通管６を通る被測定液２の濃度に対応し
たものであり、従って、この信号を演算処理することに
より濃度を算出することができるのである。Reference numeral 13 is an oscillator having a capacitor composed of the counter electrodes 8 and 8 as a constituent element, and the oscillation frequency changes depending on the capacitance of the capacitor. 14 is the oscillator 13
Is an F / V converter for FV converting the oscillation output of the F / V converter, and 15 is an A / D converter for converting the output voltage (analog output) of the F / V converter 14 into a digital signal.
The output of the / D converter 15 is C through the input / output circuit 16.
It is transmitted to the PU 17 and is subjected to arithmetic processing for calculating the density. That is, there is a linear relationship between the concentration of the liquid to be measured 2 and its relative dielectric constant as shown in FIG. 2 (for example, FIG. 2 shows ethanol), and the relative dielectric constant changes depending on the concentration. Therefore, the capacitance of the capacitor formed of the counter electrodes 8 inevitably changes. When the capacitance changes, the oscillation frequency of the oscillator 13 also changes, and this oscillation frequency is F / V converted by the F / V converter 14, and further A
A / D converted by the A / D converter 15 and converted to the CPU 17
Be transmitted to. The digital signal transmitted to the CPU 17 naturally corresponds to the concentration of the liquid to be measured 2 passing through the liquid passage tube 6, and therefore, the concentration can be calculated by processing this signal.
【００１４】そして、演算処理により算出された被測定
液２の値が予め設定された基準値とずれているときは処
理槽１内の被測定液２の濃度を調整する必要がある。そ
れは、薬液であるエタノールの入ったタンクから処理槽
１への供給量を調整するバルブ５を制御することにより
行う。水の供給量を一定にしてエタノールの供給量を加
減することにより処理槽１内の被測定液２の濃度を濃く
したり、薄くしたりすることができるからである。尤
も、濃度が高すぎる場合には水供給用のバルブを開き、
薄過ぎる場合は薬液供給用のバルブ５を開くようにする
ことも考えられる。１８はそのバルブ５を制御する信号
をアナログ信号に変換するＤ／Ａコンバータで、この出
力信号はアンプ１９により増幅されてバルブ５の制御を
行い濃度を所定の基準値通りにしようとする。When the value of the liquid to be measured 2 calculated by the arithmetic processing deviates from the preset reference value, it is necessary to adjust the concentration of the liquid to be measured 2 in the processing tank 1. This is performed by controlling the valve 5 that adjusts the supply amount to the processing tank 1 from the tank containing ethanol as a chemical solution. This is because the concentration of the liquid to be measured 2 in the processing tank 1 can be made thicker or thinner by adjusting the amount of ethanol supplied while keeping the amount of water supplied constant. However, if the concentration is too high, open the valve for water supply,
If it is too thin, it may be possible to open the valve 5 for supplying the chemical liquid. Reference numeral 18 is a D / A converter for converting the signal for controlling the valve 5 into an analog signal, and this output signal is amplified by an amplifier 19 to control the valve 5 so as to make the concentration equal to a predetermined reference value.
【００１５】２０は温度センサー１１の出力信号（アナ
ログ信号）をディジタル信号に変換するＡ／Ｄコンバー
タで、この出力信号が上記入出力回路１６を介してＣＰ
Ｕ１７に伝送されて所定の基準値と比較される。そし
て、その比較結果に基づいてヒーター駆動信号がつくら
れ、それがＤ／Ａコンバータ２１によりアナログ信号に
変換され、アンプ２２により増幅されてヒーター１２に
伝達され、液通管６内を通る被測定液２の温度を所定の
基準値通りになるように制御（駆動）する。このよう
に、液通管６内を通る被測定液２の温度を一定に保とう
とするのは、被測定液２の比誘電率が温度依存性を有
し、温度の変化によって測定値に誤差が生じることか
ら、その誤差が生じないようにするためである。Reference numeral 20 is an A / D converter for converting the output signal (analog signal) of the temperature sensor 11 into a digital signal. This output signal is sent to the CP via the input / output circuit 16.
It is transmitted to U17 and compared with a predetermined reference value. Then, a heater drive signal is generated based on the comparison result, which is converted into an analog signal by the D / A converter 21, amplified by the amplifier 22 and transmitted to the heater 12, and passes through the liquid passage pipe 6 to be measured. The temperature of the liquid 2 is controlled (driven) so as to be a predetermined reference value. In order to keep the temperature of the measured liquid 2 passing through the liquid passage tube 6 constant in this way, the relative permittivity of the measured liquid 2 has temperature dependence, and the measured value may have an error due to a change in temperature. This is to prevent the error from occurring.
【００１６】尚、温度制御をするのではなく、温度セン
サー１１の出力結果に基づいて測定値の温度による変化
分をＣＰＵ１７における演算処理により捨象するように
しても良い。即ち、測定値の温度補償を行うのである。
尚、２３は工場内のオペレータが操作する操作パネル、
２４はバルブ９制御用Ｄ／Ａコンバータ、２５はポンプ
制御用Ｄ／Ａコンバータである。Instead of controlling the temperature, the change in the measured value due to the temperature may be discarded by the arithmetic processing in the CPU 17 based on the output result of the temperature sensor 11. That is, temperature compensation of the measured value is performed.
In addition, 23 is an operation panel operated by an operator in the factory,
Reference numeral 24 is a D / A converter for controlling the valve 9, and 25 is a D / A converter for controlling the pump.
【００１７】このような液体濃度測定装置によれば、光
学系を必要としないので、振動に強く、また移動タイプ
にも適用することができるし、濁りや泡によって誤差の
生じるおそれもない。しかも、対向電極８、８、静電容
量測定回路は被測定液２の通る液通管（液通路）６の外
側に設けられるので、被測定液２に対して非接触で濃度
測定ができる。従って、薬液が静電容量測定回路の構成
部品、例えば対向電極８、８、発振器１３によって汚染
されるおそれ、あるいは逆に対向電極８、８等が薬液に
よって侵されるおそれは全くない。According to such a liquid concentration measuring device, since no optical system is required, it is strong against vibration and can be applied to a moving type, and there is no possibility of causing an error due to turbidity or bubbles. Moreover, since the counter electrodes 8, 8 and the capacitance measuring circuit are provided outside the liquid passage tube (liquid passage) 6 through which the liquid to be measured 2 passes, the concentration can be measured without contacting the liquid to be measured 2. Therefore, there is no possibility that the chemical solution will be contaminated by the components of the capacitance measuring circuit, for example, the counter electrodes 8 and 8, the oscillator 13, or conversely, the counter electrodes 8 and 8 will be attacked by the chemical solution.
【００１８】そして、超音波伝達速度測定方式の測定装
置のように被測定液中に超音波発振器及びケーブルが入
るということが全くなく、処理作業中における濃度測定
は全く支障なく行うことができ、従って、処理作業中に
濃度変化が起きてもそれに対応することができる。更
に、被測定液２の温度を予め設定された温度になるよう
に制御するので、温度による測定誤差の生じるおそれが
ない。図３は対向電極部の変形例を示す斜視図である。
この変形例は、液通管６の対向電極設置部を直方体形状
にしたものである。Further, unlike the measuring device of the ultrasonic transmission velocity measuring system, the ultrasonic oscillator and the cable never enter the liquid to be measured, and the concentration measurement during the processing operation can be performed without any trouble. Therefore, even if the concentration changes during the processing operation, it can be dealt with. Furthermore, since the temperature of the liquid to be measured 2 is controlled so as to reach a preset temperature, there is no risk of measurement error due to temperature. FIG. 3 is a perspective view showing a modified example of the counter electrode portion.
In this modified example, the counter electrode installation portion of the liquid passage tube 6 has a rectangular parallelepiped shape.
【００１９】[0019]
【発明の効果】請求項１の液体濃度測定装置は、被測定
液を通す液通路の外部に設けた対向電極と、該対向電極
の静電容量を測定する静電容量測定回路からなることを
特徴とする。従って、請求項１の液体濃度測定装置によ
れば、光学系を必要としないので、振動に強く、また移
動タイプにも適用することができるし、濁りや泡によっ
て誤差の生じるおそれもない。しかも、対向電極、静電
容量測定回路は被測定液の通る液通路の外側に設けられ
るので、被測定液に対して非接触で濃度測定ができる。
従って、薬液がその対向電極等によって汚染されるおそ
れ、あるいは逆に対向電極等が薬液によって侵されるお
それは全くない。The liquid concentration measuring apparatus according to the first aspect of the present invention comprises a counter electrode provided outside the liquid passage through which the liquid to be measured is passed, and a capacitance measuring circuit for measuring the capacitance of the counter electrode. Characterize. Therefore, according to the liquid concentration measuring device of the first aspect, since no optical system is required, the liquid concentration measuring device is strong against vibration and can be applied to the moving type, and there is no possibility of causing an error due to turbidity or bubbles. Moreover, since the counter electrode and the capacitance measuring circuit are provided outside the liquid passage through which the liquid to be measured passes, the concentration can be measured without contacting the liquid to be measured.
Therefore, there is no possibility that the chemical solution is contaminated by the counter electrode or the like, or conversely, the counter electrode or the like is attacked by the chemical solution.
【００２０】そして、超音波伝達速度測定方式による測
定装置のように被測定液中に超音波発振器及びケーブル
が入るということが全くなく、処理作業中における濃度
測定は全く支障なく行うことができ、従って、処理作業
中に濃度変化が起きてもそれに対応することができる。The ultrasonic oscillator and the cable do not enter the liquid to be measured as in the case of the measuring device using the ultrasonic transmission velocity measuring method, and the concentration can be measured during the processing operation without any trouble. Therefore, even if the concentration changes during the processing operation, it can be dealt with.
【００２１】請求項２の液体濃度測定装置は、温度検出
手段の出力結果に基づいて温度制御手段により被測定液
の温度を予め設定された温度になるように制御するよう
にしたことを特徴とする。従って、請求項２の液体濃度
測定装置によれば、被測定液の温度を予め設定された温
度になるように制御するので、温度による測定誤差の生
じるおそれがない。According to another aspect of the liquid concentration measuring apparatus of the present invention, the temperature control means controls the temperature of the liquid to be measured to a preset temperature based on the output result of the temperature detection means. To do. Therefore, according to the liquid concentration measuring apparatus of the second aspect, since the temperature of the liquid to be measured is controlled to be a preset temperature, there is no possibility of causing a measurement error due to the temperature.
【図１】（Ａ）乃至（Ｃ）は本発明液体濃度測定装置の
一つの実施例を示すもので、（Ａ）は全体の構成図、
（Ｂ）は対向電極部の縦断面図、（Ｃ）は（Ｂ）のＢ−
Ｂ線視断面図である。1A to 1C show one embodiment of a liquid concentration measuring device of the present invention, in which FIG.
(B) is a vertical cross-sectional view of the counter electrode portion, and (C) is B- of (B).
It is a B line sectional view.
【図２】エタノール水溶液の濃度・比誘電率関係図であ
る。FIG. 2 is a diagram showing the relationship between the concentration and the relative dielectric constant of an aqueous ethanol solution.
【図３】上記実施例における対向電極部の変形例を示す
斜視図である。FIG. 3 is a perspective view showing a modified example of a counter electrode portion in the above embodiment.
１ 処理槽 ２ 被測定液 ６ 液通路（液通管） ８ 対向電極 １１ 温度検出手段 １２ 温度制御手段 DESCRIPTION OF SYMBOLS 1 Processing tank 2 Liquid to be measured 6 Liquid passage (liquid passage pipe) 8 Counter electrode 11 Temperature detection means 12 Temperature control means
Claims (2)
濃度測定装置において、 被測定液を通す液通路の外部に設けた対向電極と、 上記対向電極の静電容量を測定する静電容量測定回路
と、 からなることを特徴とする液体濃度測定装置1. A liquid concentration measuring device for measuring the concentration of a specific component in a liquid, comprising: a counter electrode provided outside a liquid passage through which a liquid to be measured is passed; and a capacitance for measuring the capacitance of the counter electrode. Liquid concentration measuring device comprising a measuring circuit and
温度検出手段と、 上記液通路を通る被測定液の温度を制御する温度制御手
段と、 を備え、 上記温度検出手段の出力結果に基づいて上記温度制御手
段により上記被測定液の温度を予め設定された温度にな
るように制御するようにしたことを特徴とする請求項１
記載の液体濃度測定装置2. An output result of the temperature detecting means, comprising: a temperature detecting means for detecting the temperature of the measured liquid passing through the liquid passage; and a temperature control means for controlling the temperature of the measuring liquid passing through the liquid passage. 2. The temperature control means controls the temperature of the liquid to be measured to a preset temperature based on the above.
Liquid concentration measuring device described
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15282294A JPH07333186A (en) | 1994-06-11 | 1994-06-11 | Liquid concentration measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15282294A JPH07333186A (en) | 1994-06-11 | 1994-06-11 | Liquid concentration measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07333186A true JPH07333186A (en) | 1995-12-22 |
Family
ID=15548913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15282294A Pending JPH07333186A (en) | 1994-06-11 | 1994-06-11 | Liquid concentration measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07333186A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100482465B1 (en) * | 2002-02-22 | 2005-04-25 | 신성화학 주식회사 | material concentration sensing apparatus, confirming apparatus using thereof and material saturation state confirming method |
| JP2006040836A (en) * | 2004-07-30 | 2006-02-09 | Matsushita Electric Ind Co Ltd | Fuel cell system |
| KR100842230B1 (en) * | 2006-05-08 | 2008-06-30 | 주식회사 엘지화학 | Method for Controlling the Flowing Amount and Concentration of Liquid Fuel in Fuel Cell |
-
1994
- 1994-06-11 JP JP15282294A patent/JPH07333186A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100482465B1 (en) * | 2002-02-22 | 2005-04-25 | 신성화학 주식회사 | material concentration sensing apparatus, confirming apparatus using thereof and material saturation state confirming method |
| JP2006040836A (en) * | 2004-07-30 | 2006-02-09 | Matsushita Electric Ind Co Ltd | Fuel cell system |
| KR100842230B1 (en) * | 2006-05-08 | 2008-06-30 | 주식회사 엘지화학 | Method for Controlling the Flowing Amount and Concentration of Liquid Fuel in Fuel Cell |
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