JPH073276Y2 - Substrate firing jig - Google Patents
Substrate firing jigInfo
- Publication number
- JPH073276Y2 JPH073276Y2 JP1989009403U JP940389U JPH073276Y2 JP H073276 Y2 JPH073276 Y2 JP H073276Y2 JP 1989009403 U JP1989009403 U JP 1989009403U JP 940389 U JP940389 U JP 940389U JP H073276 Y2 JPH073276 Y2 JP H073276Y2
- Authority
- JP
- Japan
- Prior art keywords
- jig
- molded product
- firing
- groove
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Furnace Charging Or Discharging (AREA)
Description
【考案の詳細な説明】 ［産業上の利用分野］ 本考案は、多層配線基板などの電子部品用セラミックス
を焼成する際、焼成炉内のサヤ上に敷いて用いる基板焼
成用治具に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a jig for firing a substrate, which is laid on a sheath in a firing furnace when firing ceramics for electronic parts such as a multilayer wiring board.
［従来の技術］ 多層配線基板や多層ICのような電子部品の製造に必要な
焼成体は、先ず一定の厚さのセラミックス薄板を成形す
るために、セラミックス原料粉体に溶剤やバインダーな
どを混合調製した泥漿をベルト上に流し出し、シート状
に成形し、成形シートを切断、さらに銅ペーストなどに
よる電極印刷、積層圧着等の加工を施した後、焼成して
作成されている。[Prior Art] A fired body required for manufacturing electronic parts such as a multilayer wiring board and a multilayer IC is manufactured by first mixing a ceramic raw material powder with a solvent or a binder to form a ceramic thin plate having a certain thickness. The prepared sludge is poured onto a belt, molded into a sheet, the molded sheet is cut, and further, electrode printing with a copper paste or the like, lamination pressure bonding, and the like are performed, followed by firing.
従来、このような成形物を積み重ねて焼成するに当って
は、サヤと直接接している成形物がサヤと反応してその
特性が変化するのを防ぐために、サヤと成形物との間に
耐火性のセラミックス、例えばアルミナ粉等、を敷く方
法が採られてきた。さらに量産の場合、上記のような印
刷電極とセラミックス基板の同時焼成には通常、窒素と
水素の混合ガス雰囲気で950℃程度の温度が用いられ、
シート成形物とサヤとの間に耐熱性治具（セッター）、
例えばアルミナ板、を置き焼成している。Conventionally, when stacking and firing such molded products, in order to prevent the molded product that is in direct contact with the sheath from reacting with the sheath and changing its characteristics, fireproofing is performed between the sheath and the molded product. A method of laying a conductive ceramic such as alumina powder has been adopted. Further, in the case of mass production, a temperature of about 950 ° C. is usually used in a mixed gas atmosphere of nitrogen and hydrogen for simultaneous firing of the printed electrode and the ceramic substrate as described above.
A heat resistant jig (setter) between the sheet molded product and the sheath,
For example, an alumina plate is placed and baked.
［考案が解決しようとする課題］ しかしながら、シート成形物中には有機バインダーが含
まれており、焼成時にバインダーの分解等により発生す
るCO,CO2、H2O等のガスが成形物とセッターとの間に渋滞
し、ガスの蒸気圧が高まって成形物の一部が発泡したり
クラックを生じたりするなどのことがある。[Problems to be solved by the invention] However, since the sheet molded product contains an organic binder, gases such as CO, CO 2 and H 2 O generated by decomposition of the binder during firing generate the molded product and the setter. There is a case in which there is congestion between the and, the vapor pressure of the gas increases and a part of the molded product foams or cracks.
このような事態を回避する手段として、例えば第２図及
び第３図に示すように、表面状態が凹凸状（第２図）ま
たは網目状（第３図）を有するセラミックス成形体を反
応防止用敷台（セッター）として用い、それによって成
形物とセッターとの接触面積を小さくし、バインダーの
蒸発面面積を大きくして発生する蒸気が発散するように
したセラミックス治具が公開特許公報、昭58-172270号
等に開示されている。As a means for avoiding such a situation, for example, as shown in FIG. 2 and FIG. 3, a ceramic molded body whose surface condition is uneven (FIG. 2) or mesh (FIG. 3) is used for reaction prevention. A ceramic jig that is used as a bed (setter), thereby reducing the contact area between the molded product and the setter, increasing the evaporation surface area of the binder and allowing the generated vapor to diverge, is disclosed in Japanese Patent Laid-Open Publication No. 58-58. -172270 and the like.
焼成される成形物の寸法が比較的小さく、例えば100mm
角以内のような場合には、成形物から出るガス量が比較
的少なく、焼成炉内の雰囲気を構成している窒素と水素
の混合ガスも容易に成形物とセッターとの接触部に入り
こむため、特に焼成上のトラブルは発生しない。The size of the molded product to be fired is relatively small, for example 100 mm
In the case of a corner or less, the amount of gas emitted from the molded product is relatively small, and the mixed gas of nitrogen and hydrogen that constitutes the atmosphere in the firing furnace easily enters the contact area between the molded product and the setter. In particular, no trouble in firing occurs.
しかしながら、成形物の寸法が例えば100mm角を超えて
大型になると、成形物から発生するCO,CO2またはH2O等
のガスが前記接触部に渋滞するようになり、成形物の周
辺部から中央部に行くに従って窒素と水素を含む炉内ガ
スが成形物の下側に入り難くなり、特に中央部下側には
全く炉内ガスが存在しない部分が生じるようになる。そ
の結果、接触面中央部においては成形物の還元不足や焼
結不足によって電極部分のブリスターが発生したり、残
留カーボンによる成形物素地の変色が生じるなどの不都
合を生じる。もちろん、極めて長い時間をかけてゆっく
り焼成することが許される場合にはそのような問題は生
じにくいが、上記のような大型基板成形物を量産するた
めには、成形物を炉に装入して焼成後取出すまでの時間
を短時間、例えば60分以内とし、炉雰囲気の入れ換えを
することが要求されるので、成形物と焼成用治具との接
触部における上記ガスの渋滞は積極的に排除する必要が
あるのである。However, when the size of the molded product becomes larger than 100 mm square, for example, gas such as CO, CO 2 or H 2 O generated from the molded product becomes congested at the contact part, and from the peripheral part of the molded product. The furnace gas containing nitrogen and hydrogen is less likely to enter the lower side of the molded product as it goes to the central portion, and in particular, a portion where no furnace gas is present is generated below the central portion. As a result, in the central portion of the contact surface, blister of the electrode portion occurs due to insufficient reduction or sintering of the molded product, and discoloration of the molded product base due to residual carbon occurs. Of course, such a problem is unlikely to occur when slow firing is allowed over an extremely long time, but in order to mass-produce the above-mentioned large-sized substrate molding, the molding is placed in a furnace. Since it is required to change the furnace atmosphere within a short time, for example, within 60 minutes, before taking out after firing, it is necessary to positively prevent the above-mentioned gas congestion at the contact part between the molded product and the firing jig. It needs to be eliminated.
［課題を解決するための手段及び作用］ 本考案者らは、特に成形物の寸法が大型となりその面積
が大きいものの焼成に際して発生する前述の諸問題を解
決するために、従来のセッターにおいて成形物と接する
面だけを凹凸状または網目状にするという工夫ではな
く、さらにその構造を根本的に改善すべく研究を進め、
以下に述べる工夫を行なった。すなわち、成形物の内部
から発生するガスをその箇所からできるだけ早く分散さ
せ、もって成形物と接するセッター上面中央部にも炉内
ガスが充分流通するような構造とすることがセッターの
設計上極めて重要であるという観点から研究を重ねた結
果、セッターの構造は、その上面から下面に貫通する多
数の小孔２とこれに連通する拡大空間たる溝３を有する
薄板形状とするのが特に有効であることを知った。この
板状体の材質はアルミナ等の耐火物セラミックスでよい
が、加工性の点からはグラファイトを用いることが好ま
しい。これらの材料からなる上記構造の焼成用治具を用
いれば、前述の諸問題が解消できることを見出し、本考
案に到達した。[Means and Actions for Solving the Problem] The inventors of the present invention have made a molded product in a conventional setter in order to solve the above-mentioned problems that occur during firing although the molded product has a large size and a large area. Rather than devising an uneven or mesh-like surface only in contact with the surface, further research is being conducted to further improve its structure.
The following measures were taken. In other words, it is extremely important for the design of the setter to disperse the gas generated from the inside of the molded product as quickly as possible from that location, and to make the structure so that the gas inside the furnace sufficiently flows even in the center of the upper surface of the setter that contacts the molded product. As a result of repeated research from the viewpoint that the above, the structure of the setter is particularly effective in the form of a thin plate having a large number of small holes 2 penetrating from the upper surface to the lower surface and grooves 3 which are expanded spaces communicating with the small holes 2. I knew that. The plate-shaped body may be made of refractory ceramics such as alumina, but graphite is preferably used from the viewpoint of workability. The inventors have found that the above-mentioned problems can be solved by using a firing jig of the above structure made of these materials, and have reached the present invention.
したがって、本考案はセラミックス基板用成形物を焼成
する際に焼成炉のサヤ上に敷いて用いる薄板状の治具
（１）であって、薄板はその表面から裏面に貫通する多
数の小孔（２）とこれに連通する溝（３）と有してな
り、溝（３）は薄板が成形物と接する面側に小孔（２）
に連なる拡大空間として設けられていることを特徴とす
る基板焼成用治具および前記溝（３）が小孔（２）に連
なる断面Ｖ字状空間である上記の基板焼成用治具の提供
を目的とする。孔は同一の孔径を有し、薄板全体にわた
り、できるだけ均一な密度で分布していることが望まし
い。Therefore, the present invention is a jig (1) in the form of a thin plate that is used by laying it on the sheath of a firing furnace when firing a molded article for a ceramic substrate, and the thin plate has a large number of small holes ( 2) and a groove (3) communicating with the groove (3). The groove (3) has a small hole (2) on the surface side where the thin plate contacts the molded product.
And a jig for baking a substrate, characterized in that it is provided as an expanded space continuous with the above, and a jig for baking a substrate, wherein the groove (3) is a V-shaped cross section continuous with the small hole (2). To aim. It is desirable that the holes have the same hole diameter and be distributed as uniformly as possible throughout the thin plate.
大型の成形物の焼成の際に組成物の下段に敷いて使用で
きる本考案の治具の一例を第１図（同図ａは平面図、ｂ
は断面図である）により説明すると、治具（セッター）
１はその上面から下面に貫通する多数の小孔２とこれに
連通する拡大空間、例えば第１図に示すような断面Ｖ字
状空間である溝３とを有する薄い板状体から構成されて
おり、かつ材質は耐火物セラミックスまたはグラファイ
ト等が用いられる。An example of a jig of the present invention that can be used by laying on the lower stage of the composition when firing a large molded article is shown in FIG. 1 (a is a plan view, b is a plan view).
Is a cross-sectional view), jig (setter)
Reference numeral 1 denotes a thin plate-like body having a large number of small holes 2 penetrating from the upper surface to the lower surface and an enlarged space communicating with the small holes 2, for example, a groove 3 having a V-shaped cross section as shown in FIG. In addition, refractory ceramics, graphite, or the like is used as the material.
この多孔板に設けられる小孔の大きさは、焼成される生
成物から発生する前述のガスを速かに分散させることが
でき、かつ製作加工が困難でないことという見地から0.
5mm径以上とするのが望ましく、また孔の数、つまり孔
の間隔、は焼成される成形物の種類、大きさに従って適
宜選定して差支えない。The size of the small holes provided in this perforated plate is 0 from the viewpoint that the above-mentioned gas generated from the product to be fired can be quickly dispersed and the manufacturing process is not difficult.
The diameter is preferably 5 mm or more, and the number of holes, that is, the distance between the holes may be appropriately selected according to the type and size of the molded product to be fired.
なお、第１図ｂの断面図に示すように、成形物と接する
上記薄板状の治具上面にさらに溝３を設けることは、溝
の深さが多孔板の強度を削減しない範囲であれば、多孔
板の孔の数を減少させる上で有効である。As shown in the cross-sectional view of FIG. 1b, it is necessary to further provide the groove 3 on the upper surface of the thin plate-shaped jig that is in contact with the molded product as long as the depth of the groove is within a range that does not reduce the strength of the perforated plate. , Effective in reducing the number of holes in the perforated plate.
本考案の治具は以上のように構成されているので、成形
物の焼成の際に発生する成形物からのガスが治具上に渋
滞することなく、炉内雰囲気の流通をさまたげないの
で、成形物に発生する前述のようなトラブルを解消でき
るのである。Since the jig of the present invention is configured as described above, the gas from the molded product generated during firing of the molded product does not cause congestion on the jig and does not block the circulation of the atmosphere in the furnace. It is possible to eliminate the above-mentioned troubles that occur in the molded product.
［参考例］ アルミナ粉末に少量の溶剤及びバインダーを添加混練し
たのち、厚さ2mmの平板状に押出し成形し、乾燥処理し
た。これに第１図a,bに示すように多数の孔（0.5mmφ）
を基盤割に穿孔してから、さらに還元雰囲気下で焼成操
作を施し、130mm角の基板焼成用治具を多数作製用意し
た。[Reference Example] A small amount of a solvent and a binder were added to and kneaded with alumina powder, and the mixture was extruded into a flat plate having a thickness of 2 mm and dried. As shown in Fig. 1 a, b, a large number of holes (0.5 mmφ)
After perforating the substrate, the firing operation was further performed in a reducing atmosphere to prepare a large number of 130 mm square substrate firing jigs.
多層配線基板用としてシート状に成形したセラミックス
素子の形状が120mm角の大きさで素子の厚さ2mmのものを
高さ8mmに積層して焼成する場合、上記の治具を焼成炉
のサヤ上に敷き、その上に焼成用成形物を載せて焼成し
たところ、アルミナ板に設けた孔の大きさ及び孔の間隔
がそれぞれ0.5〜5mm及び５〜20mm程度であれば、前述の
ような焼成上のトラブルが全く発生しないことが確認さ
れた。また、上記治具の材質をグラファイトに変えた場
合も、同様の効果が得られることが確認された。When stacking a ceramic element shaped like a sheet for a multilayer wiring board with a 120 mm square shape and a thickness of 2 mm and stacking it to a height of 8 mm and firing, stack the jig above the sheath of the firing furnace. If the size of the holes and the space between the holes provided in the alumina plate are about 0.5 to 5 mm and 5 to 20 mm, respectively, the molded product for firing is placed on the It was confirmed that no troubles occurred. It was also confirmed that the same effect was obtained when the material of the jig was changed to graphite.
［実施例］ 第１図ｂの断面図に示すように、単に孔を設けるだけで
なく、孔の上半分を拡大空間とすることによって成形物
と接するグラファイト板上面に溝３を設けて、孔の間隔
を参考例の場合より広げたこと以外は、参考例の場合と
全く同じ手順で焼成試験をおこなった。参考例の場合と
同様に焼成上のトラブルは全く発生しないことが確認さ
れた。さらに、孔２の間隔を参考例の場合よりも大幅に
広げることができ、これにより治具の強度が顕著に改善
できることが確認された。また、孔２のほかに孔に連な
る溝３を設けたことにより、焼成時に成形物と接する面
積が小さくなり、かつ溝と孔が連通する構造により炉内
ガスの拡散が効果的に起こり、焼成物の変色が生じ難し
くなることが確認された。[Example] As shown in the cross-sectional view of FIG. 1b, not only the holes are provided, but also the groove 3 is provided on the upper surface of the graphite plate which is in contact with the molded product by making the upper half of the hole an enlarged space. A firing test was performed in the same procedure as in the reference example, except that the interval was extended from the reference example. It was confirmed that no firing trouble occurred at all, as in the case of the reference example. Furthermore, it was confirmed that the distance between the holes 2 can be made wider than in the case of the reference example, whereby the strength of the jig can be significantly improved. In addition to the holes 2, by providing the grooves 3 connected to the holes, the area in contact with the molded product during firing becomes small, and due to the structure in which the grooves and the holes communicate with each other, diffusion of the in-furnace gas effectively occurs, and the firing is performed. It was confirmed that discoloration of the product occurred and became difficult.
［考案の効果］ 以上説明したように、本考案の治具を用いて成形物の焼
成を行えば成形物とサヤとの反応を防止できる上、特に
成形物の形状が大型の場合でも、成形物の内部から発生
するガスが治具と成形物の接触部に渋滞することなく速
かに排除され、炉雰囲気ガスの接触部への流通がさまた
げられないので焼成物の品質にバラツキがなく、信頼性
の高い大型基板成形物の焼成が可能となり、産業上貢献
するところが大である。[Effects of the Invention] As described above, when the molded product is fired using the jig of the present invention, the reaction between the molded product and the sheath can be prevented, and even when the molded product has a large shape, The gas generated from the inside of the product is quickly eliminated without congesting the contact part of the jig and the molded product, and the circulation of the furnace atmosphere gas to the contact part cannot be interrupted, so there is no variation in the quality of the fired product, It is possible to bake a highly reliable large-sized substrate molding, which greatly contributes to the industry.
第１図は本考案になる治具の形状を示すものであり、同
図ａ及びｂは代表的な形状を示す平面図及び断面図であ
る。第１図ｂは治具の上面にさらに溝を有する本考案の
実施例を示す断面図（第１図ａのＡ−Ａにおける断面
図）である。 第２図及び第３図は従来の治具のうち治具の上，下面を
それぞれ凹凸状または網目状にした例を示す斜視図であ
る。 記号の説明 １……治具、２……小孔 ３……溝FIG. 1 shows the shape of a jig according to the present invention, and FIGS. 1A and 1B are a plan view and a sectional view showing a typical shape. FIG. 1b is a sectional view (a sectional view taken along line AA of FIG. 1a) showing an embodiment of the present invention in which a groove is further provided on the upper surface of the jig. FIG. 2 and FIG. 3 are perspective views showing an example in which the upper and lower surfaces of a conventional jig are made uneven or meshed, respectively. Explanation of symbols 1 ... Jig, 2 ... Small hole 3 ... Groove
Claims (2)
焼成炉のサヤ上に敷いて用いる薄板状の治具（１）であ
って、薄板はその表面から裏面に貫通する多数の小孔
（２）とこれに連通する溝（３）とを有してなり、溝
（３）は薄板が成形物と接する面側に小孔（２）に連な
る拡大空間として設けられていることを特徴とする基板
焼成用治具。1. A thin plate-shaped jig (1) used by laying on a sheath of a baking furnace when baking a molded article for a ceramic substrate, wherein the thin plate has a large number of small holes penetrating from its front surface to its back surface ( 2) and a groove (3) communicating therewith, wherein the groove (3) is provided as an enlarged space connected to the small hole (2) on the surface side where the thin plate contacts the molded product. Substrate firing jig.
字状空間である請求項１記載の基板焼成用治具。2. A cross section V in which the groove (3) is continuous with the small hole (2).
The jig for baking a substrate according to claim 1, wherein the jig has a character space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989009403U JPH073276Y2 (en) | 1989-01-31 | 1989-01-31 | Substrate firing jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989009403U JPH073276Y2 (en) | 1989-01-31 | 1989-01-31 | Substrate firing jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02103700U JPH02103700U (en) | 1990-08-17 |
| JPH073276Y2 true JPH073276Y2 (en) | 1995-01-30 |
Family
ID=31216110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989009403U Expired - Lifetime JPH073276Y2 (en) | 1989-01-31 | 1989-01-31 | Substrate firing jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073276Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102781562B (en) * | 2009-12-24 | 2014-11-19 | Lg伊诺特有限公司 | Heat treatment container for vacuum heat treatment apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57116701A (en) * | 1981-01-12 | 1982-07-20 | Yoshitsuka Seiki:Kk | Tray for sintering |
| JPS58172270A (en) * | 1982-03-31 | 1983-10-11 | 松下電器産業株式会社 | Ceramic baking method |
-
1989
- 1989-01-31 JP JP1989009403U patent/JPH073276Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02103700U (en) | 1990-08-17 |
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