JPH0731057A - Emergency power supply interrupting mechanism - Google Patents

Emergency power supply interrupting mechanism

Info

Publication number
JPH0731057A
JPH0731057A JP5167720A JP16772093A JPH0731057A JP H0731057 A JPH0731057 A JP H0731057A JP 5167720 A JP5167720 A JP 5167720A JP 16772093 A JP16772093 A JP 16772093A JP H0731057 A JPH0731057 A JP H0731057A
Authority
JP
Japan
Prior art keywords
abnormality
section
power supply
control section
content
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5167720A
Other languages
Japanese (ja)
Inventor
Akiisa Inada
暁勇 稲田
Masao Kako
雅郎 加来
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5167720A priority Critical patent/JPH0731057A/en
Publication of JPH0731057A publication Critical patent/JPH0731057A/en
Pending legal-status Critical Current

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  • Power Sources (AREA)
  • Direct Current Feeding And Distribution (AREA)

Abstract

PURPOSE:To allow later investigation of the content of abnormality even in case of emergent interruption of a power supply by scoring the content of abnormality upon occurrence thereof and then interrupting the power supply. CONSTITUTION:The body section 1 is connected with a control section 2, an abnormality detecting section 3, and a memory section 4. The control section 2 comprises a microprocessor and controls the body section 1 and the peripheral units. The abnormality detecting section 3 comprises a gas leak detector or a water leak detector, for example, and leakage information is delivered to the control section 2 upon detection of leakage. The memory section 4 comprises a RAM and the like for storing data written from the control section 2 and the RAM is backed up by a battery to retain the stored data even after power interruption. This constitution allows later investigation of the content of abnormality even in case of emergency power interruption.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、緊急電源遮断機構に係
り、特に、電源を遮断するに至った原因の調査を容易に
する緊急電源遮断機構に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an emergency power shutoff mechanism, and more particularly to an emergency power shutoff mechanism that facilitates investigation of the cause of power shutoff.

【０００２】[0002]

【従来の技術】従来の半導体製造装置（例えば「光アッ
シング装置」日立評論Vol.７３Ｎo.９（１９９１−
９））において、ガス漏れや水漏れのような重要異常発
生時にガスや水を遮断するため、電源を緊急遮断させる
機構がある。しかしこれでは電源が落ちてしまうために
異常内容が記録として残らず、後で原因を究明するとき
に全く手がかりがなくなるという支障がある。2. Description of the Related Art Conventional semiconductor manufacturing equipment (for example, "optical ashing equipment", Hitachi Review Vol. 73 No. 9 (1991-
In 9)), there is a mechanism for urgently shutting off the power source in order to shut off gas and water when an important abnormality such as gas leak or water leak occurs. However, in this case, since the power is turned off, the contents of the abnormality are not recorded as a record, and there is a problem that there is no clue when the cause is investigated later.

【０００３】[0003]

【発明が解決しようとする課題】本発明の目的は、この
ような電源の緊急遮断時でも異常内容を後で調べること
を可能としようとすることにある。SUMMARY OF THE INVENTION An object of the present invention is to make it possible to check the contents of abnormality later even in such an emergency power off.

【０００４】[0004]

【課題を解決するための手段】上記目的を達成するた
め、本発明は記憶部を設け、異常発生時に、異常内容を
記憶部に記憶させたのち、電源を遮断する。この時、記
憶に要する時間を最短にするため、電子式の記憶部を採
用し、電池でバックアップすることにより記録の保持を
図る。In order to achieve the above object, the present invention is provided with a storage unit, and when an abnormality occurs, the contents of the abnormality are stored in the storage unit and then the power is shut off. At this time, in order to minimize the time required for storage, an electronic storage unit is adopted, and a battery is used as a backup to maintain the record.

【０００５】[0005]

【作用】緊急に電源を遮断する必要があるような異常が
発生した場合においても、検知された異常にもとづく情
報を電源遮断後も保存することができ、装置の迅速な復
旧，改良等にそれらの情報を生かすことができる。[Effect] Even when an abnormality occurs that requires the power to be cut off urgently, information based on the detected abnormality can be saved even after the power is cut off, which can be used for quick restoration and improvement of the device. Information can be used.

【０００６】[0006]

【実施例】図１は本発明の一実施例の装置を示す。装置
本体部１に制御部２，異常検知部３、記憶部４が接続さ
れている。制御部はマイクロプロセッサからなり、装置
本体や周辺機器の制御を行う。異常検知部は、例えば、
ガス漏れ検知器や水漏れ検知器からなり、漏れが検出さ
れると制御部にその情報が伝達される。記憶部はＤＲＡ
Ｍなどからなり制御部から書き込みが行われるとそれを
記憶し、電池（図示せず）によるバックアップにより、
記憶情報を電源遮断後も保持する。DESCRIPTION OF THE PREFERRED EMBODIMENT FIG. 1 shows an apparatus according to an embodiment of the present invention. A control unit 2, an abnormality detection unit 3, and a storage unit 4 are connected to the device body unit 1. The control unit is composed of a microprocessor and controls the apparatus main body and peripheral devices. The abnormality detection unit, for example,
It consists of a gas leak detector and a water leak detector, and when a leak is detected, the information is transmitted to the control unit. Storage is DRA
It is composed of M etc., and when it is written from the control unit, it stores it, and by a backup with a battery (not shown)
The stored information is retained even after the power is cut off.

【０００７】[0007]

【発明の効果】本発明において異常が発生すれば、検知
部がこれを検知してその情報が制御部に伝達される。制
御部は記憶部にその情報を記憶させる。この時記憶部は
DRAMであるため、短時間で記憶を終了する。その後、制
御部の指令により電源を遮断する。本発明によれば電源
が落ちたあとでもその異常内容を容易に知ることができ
る。また異常情報の記憶に長時間を要しないため、短時
間に電源を遮断することができる。When an abnormality occurs in the present invention, the detection section detects it and the information is transmitted to the control section. The control unit stores the information in the storage unit. At this time the storage unit
Since it is a DRAM, the storage is completed in a short time. After that, the power supply is cut off according to a command from the control unit. According to the present invention, the details of the abnormality can be easily known even after the power is turned off. Moreover, since it does not take a long time to store the abnormality information, the power supply can be cut off in a short time.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の一実施例のブロック図。FIG. 1 is a block diagram of an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

１…装置本体部、２…制御部、３…検知部、４…記憶
部。1 ... Device main body part, 2 ... Control part, 3 ... Detection part, 4 ... Storage part.

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】異常を検知して電源を遮断する装置におい
て、電子式の記憶装置と、異常を検知した際に、前記異
常の内容を前記記憶装置に記憶させたのち電源を遮断す
る装置とを含むことを特徴とする緊急電源遮断機構。1. A device for detecting an abnormality and shutting off the power, and an electronic storage device, and a device for storing the contents of the abnormality in the storage device and then shutting off the power when the abnormality is detected. An emergency power-off mechanism including:
JP5167720A 1993-07-07 1993-07-07 Emergency power supply interrupting mechanism Pending JPH0731057A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5167720A JPH0731057A (en) 1993-07-07 1993-07-07 Emergency power supply interrupting mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5167720A JPH0731057A (en) 1993-07-07 1993-07-07 Emergency power supply interrupting mechanism

Publications (1)

Publication Number Publication Date
JPH0731057A true JPH0731057A (en) 1995-01-31

Family

ID=15854937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5167720A Pending JPH0731057A (en) 1993-07-07 1993-07-07 Emergency power supply interrupting mechanism

Country Status (1)

Country Link
JP (1) JPH0731057A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011055185A1 (en) * 2009-11-06 2011-05-12 パナソニック電工株式会社 Power distribution system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011055185A1 (en) * 2009-11-06 2011-05-12 パナソニック電工株式会社 Power distribution system

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