JPH0729797B2 - Method for manufacturing composite quartz glass tube - Google Patents
Method for manufacturing composite quartz glass tubeInfo
- Publication number
- JPH0729797B2 JPH0729797B2 JP4568990A JP4568990A JPH0729797B2 JP H0729797 B2 JPH0729797 B2 JP H0729797B2 JP 4568990 A JP4568990 A JP 4568990A JP 4568990 A JP4568990 A JP 4568990A JP H0729797 B2 JPH0729797 B2 JP H0729797B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- quartz glass
- inner layer
- glass tube
- tubes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/207—Uniting glass rods, glass tubes, or hollow glassware
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体ウエハーの高温熱処理に用いられる炉
心管として好適な複合石英ガラス管の製造方法に関す
る。Description: TECHNICAL FIELD The present invention relates to a method for producing a composite quartz glass tube suitable as a furnace core tube used for high-temperature heat treatment of semiconductor wafers.
従来、半導体工業に使用される炉心管やウエハー治具類
は、例えば、1000〜1300℃の高温領域で変形することの
ない耐熱性が要求され、また、半導体の集積度の向上に
伴い、熱処理工程における金属不純物、特にアルカリ金
属類によるウエハーへの微量な汚染が大きな問題となっ
ている。Conventionally, core tubes and wafer jigs used in the semiconductor industry are required to have heat resistance such that they are not deformed in a high temperature region of 1000 to 1300 ° C., and heat treatment is performed with an increase in the degree of integration of semiconductors. A slight problem is a slight contamination of wafers by metal impurities, particularly alkali metals, in the process.
かかる要求に沿って、耐熱性の優れた天然石英ガラスを
外層とし、金属不純物含有量の少ない高純度合成石英ガ
ラスを内層とする積層構造の複合管が提案された。その
代表的な製造方法が、例えば、特開昭48-92410号公報に
開示されている。In order to meet such demands, a composite tube having a laminated structure has been proposed in which natural quartz glass having excellent heat resistance is used as an outer layer and high-purity synthetic quartz glass having a low content of metal impurities is used as an inner layer. A typical manufacturing method thereof is disclosed in, for example, Japanese Patent Application Laid-Open No. 48-92410.
そこに開示された積層構造の複合石英ガラス管の製造方
法によれば、合成石英ガラス管の外表面に、水晶又は天
然石英ガラスの粉体が熱溶射されて積層構造の石英ガラ
ス管が形成される。しかし、この方法は、熱溶射される
天然石英ガラス層の厚みを均一に形成させることが難し
く、また合成石英ガラス管を基体としているため熱変形
し易く、更に、肉厚の不均質や外径精度あるいは軸精度
が低いために、管の炉体への取付け不良を招き、特に、
半導体ウエハー表面の熱処理温度分布が不均一となり均
質な熱処理が行われ難いという重大な問題があった。According to the method for producing a composite quartz glass tube having a laminated structure disclosed therein, a quartz glass tube having a laminated structure is formed on the outer surface of a synthetic quartz glass tube by thermally spraying powder of quartz or natural quartz glass. It However, with this method, it is difficult to form a uniform thickness of the thermal-sprayed natural quartz glass layer, and since the synthetic quartz glass tube is used as the substrate, it is easily deformed by heat, and further, the thickness is non-uniform and the outer diameter is small. Due to low accuracy or axial accuracy, it may lead to defective attachment of the tube to the furnace body,
There has been a serious problem that the heat treatment temperature distribution on the surface of the semiconductor wafer becomes non-uniform and it is difficult to perform a uniform heat treatment.
また、天然石英ガラス管の内部に小径の合成石英ガラス
を内挿し、これを外部加熱して一体化させる積層状複合
管の製造方法も提案された。しかし、この方法では、溶
融一体化された外側の天然石英ガラス管と内側の合成石
英ガラス管の融着面に多数の気泡が残存するので、使用
における加熱条件下でそれらの気泡が膨張してガラスを
破損させたり、融着時の加熱による変形などにより所定
の外径及び肉厚をもった一定形状のものを得ることが困
難であり、そのため前記と同様に、熱処理において不均
質を招くことになるなどの問題があり、工業的に採用で
きない。In addition, a method of manufacturing a laminated composite tube in which a synthetic quartz glass having a small diameter is inserted inside a natural quartz glass tube and this is externally heated and integrated is also proposed. However, in this method, a large number of air bubbles remain on the fused surfaces of the fused outer natural quartz glass tube and the inner synthetic quartz glass tube, and these bubbles expand under the heating conditions in use. It is difficult to obtain glass of a certain shape having a predetermined outer diameter and wall thickness due to glass breakage, deformation due to heating during fusion, etc. Therefore, similar to the above, it causes inhomogeneity in heat treatment. There is a problem such as becoming unusable and cannot be industrially adopted.
従って、本発明の目的ないし技術的課題は、半導体ウエ
ハーの熱処理において、優れた耐熱性と金属汚染防止性
を有する工業的に望ましい均質な複合管を提供すること
にある。また他の目的はそのような複合管の効果的製造
方法を提供することにある。Therefore, an object or technical object of the present invention is to provide an industrially desirable homogeneous composite tube having excellent heat resistance and metal contamination preventing property in heat treatment of a semiconductor wafer. Yet another object is to provide an effective method of manufacturing such a composite tube.
本発明者らは、上記課題を効果的に解消する積層状の複
合石英ガラス管の製造方法について研究を重ねた結果、
実用的に極めて望ましい製造方法を開発した。The present inventors, as a result of repeated research on a method for manufacturing a laminated composite quartz glass tube that effectively solves the above problems,
A practically highly desirable manufacturing method has been developed.
すなわち、本発明は、異なる石英ガラスから成る内層用
管と外層用管とを一体化する複合石英ガラス管の製造に
おいて、高純度合成石英ガラス内層用管を、その石英ガ
ラスより高い粘度を有する石英ガラス外層用管内に挿入
重合し、該重合状の両管を水平に保持して、それぞれを
共通軸の周りに同一速度で回転させながら、その重合管
の内側からアーク又はカーボン発熱体で加熱し、重合状
管を融着一体化することを特徴とする半導体熱処理用複
合石英ガラス管の製造方法を提供する。That is, in the present invention, in the production of a composite quartz glass tube in which an inner layer tube and an outer layer tube made of different quartz glass are integrated, a high-purity synthetic quartz glass inner layer tube is made of quartz having a viscosity higher than that of the quartz glass. Polymerization by inserting into the tube for glass outer layer, holding both tubes of the polymerized state horizontally, and rotating each of them at the same speed around a common axis, while heating with an arc or carbon heating element from the inside of the tube. Provided is a method for producing a composite quartz glass tube for heat treatment of a semiconductor, characterized in that the polymerized tube is fused and integrated.
本発明の複合石英ガラス管の製造に用いられる内層用管
は、半導体ウエハーをその熱処理の間に汚染するような
不純物を含まない可及的高純度の合成石英ガラスが好ま
しい。そのガラスはどのような合成方法で製造したもの
でもよいが、特にアルカリ金属類の不純物を実質的に含
まないことが重要である。また、これと一体化される外
層用石英ガラス管は、内層用石英ガラス管より高い粘度
を有し、半導体ウエハー熱処理温度領域で実質的に熱変
形しない耐熱性を有する石英ガラスが選択使用される。
その素材は変性した合成石英ガラスでもよいが、通常、
天然石英ガラスが好都合に、且つ工業的に有利に用いら
れる。その耐熱性は、実用性を考慮すれば、例えば、1,
280℃における粘度が1012 0ポアズ以上のものが好まし
く、本発明において内層管より高い粘度を有する石英ガ
ラスとは、実質的にそのような高い粘度を有するものを
包含する。The inner layer tube used to manufacture the composite quartz glass tube of the present invention is preferably a synthetic quartz glass of the highest possible purity that does not contain impurities that would contaminate the semiconductor wafer during its heat treatment. The glass may be produced by any synthetic method, but it is important that it is substantially free of alkali metal impurities. In addition, the quartz glass tube for the outer layer integrated with this has a higher viscosity than the quartz glass tube for the inner layer, and quartz glass having heat resistance that is not substantially thermally deformed in the heat treatment temperature region of the semiconductor wafer is selectively used. .
The material may be modified synthetic quartz glass, but
Natural quartz glass is used conveniently and industrially. Considering practicality, its heat resistance is, for example, 1,
Preferably not less than 10 12 0 poise viscosity at 280 ° C., a quartz glass having a higher viscosity than the inner tube in the present invention include those having substantially such high viscosities.
本発明の方法においては、まず溶融一体化させるための
重合し得る上記のような外層用と内層用のそれぞれの石
英ガラス管を予め作成し、外層用管内に内層用管を挿入
し同軸的に重合させて水平に保持し、一体化操作の間
は、重合両管を所定の回転速度、例えば、100〜250rpm
で同期回転させる。In the method of the present invention, first of all, a quartz glass tube for each of the above-mentioned polymerizable outer layer and inner layer for melt-integrating is prepared in advance, and the inner layer tube is inserted into the outer layer tube so as to be coaxial. Polymerize and hold horizontally, and during the integration operation, both polymerization tubes are at a predetermined rotation speed, for example, 100 to 250 rpm.
To rotate synchronously.
一方、内層用管の内側に、その内層用合成石英ガラス管
を、例えば、1,700〜2,000℃の温度に高めるアーク又は
カーボン発熱体が配置される。この加熱装置は、通常そ
の発熱部を、回転する重合管の一端から多端へその軸位
に沿って移動するように操作される。On the other hand, inside the inner layer tube, an arc or carbon heating element for raising the inner layer synthetic quartz glass tube to a temperature of, for example, 1,700 to 2,000 ° C. is arranged. This heating device is usually operated so as to move its heat generating portion from one end of the rotating polymerization tube to the other end along its axial position.
本発明の方法を添付図面について更に具体的に説明す
る。The method of the present invention will be described more specifically with reference to the accompanying drawings.
第１図は、本発明の方法の実施状態の一例を示す模式的
説明図である。FIG. 1 is a schematic explanatory view showing an example of an implementation state of the method of the present invention.
内層用合成石英ガラス管P1が、これより若干短い外層用
天然石英ガラス管P2内に挿入され、それぞれの管の両端
部は、共通の基台１に取り付けられた左右一対のチャッ
クＣの連動して動機回転する二対のスクロール回転チャ
ックC1,C1及びC2,C2にそれぞれ取り付け固定されて水平
に保持される。The inner layer synthetic quartz glass tube P 1 is inserted into the outer layer natural quartz glass tube P 2 which is slightly shorter than the inner layer synthetic quartz glass tube P 2 , and both ends of each tube of the pair of left and right chucks C attached to the common base 1 are attached. The scroll rotating chucks C 1 and C 1 and C 2 and C 2 that rotate in a coordinated manner are attached and fixed to the scroll rotating chucks C 1 and C 1 and held horizontally.
一方、アーク加熱装置は、一対の截頭円錐状のカーボン
電極2,2が、電源（図示せず）に通じる銅管3,3の端縁に
固定されて所定間隔に対向保持されている。上記銅管3,
3はいずれも、対向電極2,2を石英ガラス重合管の左端部
から右端部まで軸位移動させ得る充分な長さを有し、他
の端部は、銅管３を水平軸位に沿って移動させる電極保
持装置４の把持部５にそれぞれ安定且つ強固に取付けら
れる。また、この銅管３は、通常、放電加熱の間には、
水を通して冷却される。複合化操作は、対向電極間にア
ーク放電させながら、上記保持装置を移動させることに
よって、その発熱部を重合管の左端部から右端部に移動
させ、回転している重合管は左から右へ連続的に且つゆ
っくり一体化が行われ、実質的に気泡を含まない複合管
P12が得られる。重合管の回転速度及び電極の移動速度
は、管径，内層用管の肉厚，それぞれの材質，その他加
熱源やそのキャパシティ等により、それぞれに応じて適
宜選択変更されるが、その最適条件は簡単な実験により
容易に決定することができる。On the other hand, in the arc heating device, a pair of frustoconical carbon electrodes 2, 2 are fixed to the end edges of copper pipes 3, 3 leading to a power source (not shown) and are held facing each other at predetermined intervals. Above copper tube 3,
3 has a sufficient length to move the counter electrodes 2, 2 axially from the left end to the right end of the quartz glass polymerization tube, and the other ends have the copper tube 3 along the horizontal axis. It is stably and firmly attached to each of the gripping portions 5 of the electrode holding device 4 that is moved. Further, this copper tube 3 is usually
Cooled through water. In the compounding operation, while moving the holding device while arcing between the opposing electrodes, the heat generating part is moved from the left end part to the right end part of the polymerization tube, and the rotating polymerization tube is moved from left to right. A composite tube that integrates continuously and slowly and is substantially bubble-free
P 12 is obtained. The rotation speed of the polymerization tube and the movement speed of the electrode can be appropriately selected and changed according to the tube diameter, the wall thickness of the inner layer tube, each material, other heating source and its capacity, etc. Can be easily determined by simple experimentation.
外層用管の外径φが150mm、内層用管の外径φが130mm
で、それぞれの肉厚が20mmの重合管の融着一体化の場合
を例にして、更に具体的に説明すれば、カーボン電極
は、例えば、先端部の直径が約20mm,基部の直径が約30m
m,長さが200mm程度の截頭円錐状のものが好適に用いら
れ、その極間距離は５〜15mm程度である。また重合管の
回転速度は、100〜250rpm程度が採用され、その適度の
遠心力が融着一体化に好都合に利用される。更にアーク
部の移動速度は、極間距離や消費電力等と関連するが、
通常30〜100mm/min程度であり、その際、内層用管の粘
度に応じて、その内層用管の内表面が、1,700℃〜2,200
℃の適切な温度に加熱されるように選択操作される。The outer diameter of the outer layer pipe is 150 mm, and the outer diameter of the inner layer pipe is 130 mm
Then, each of the wall thickness is 20 mm, for example, in the case of fusion-bonding of the polymerization tubes, and more specifically explained, the carbon electrode has, for example, a tip diameter of about 20 mm and a base diameter of about 20 mm. 30m
A frusto-conical shape with m and a length of about 200 mm is preferably used, and the distance between the poles is about 5 to 15 mm. The rotation speed of the polymerization tube is about 100 to 250 rpm, and its moderate centrifugal force is conveniently used for fusion and integration. Furthermore, the moving speed of the arc part is related to the distance between the electrodes and the power consumption,
Usually, it is about 30 to 100 mm / min. At that time, depending on the viscosity of the inner layer pipe, the inner surface of the inner layer pipe is 1,700 ° C to 2,200 ° C.
It is selectively operated so as to be heated to an appropriate temperature of ° C.
この重合管の融着一体化操作においては、内層用管内に
窒素やアルゴン等の不活性ガスをゆっくり送り込んでも
よい。また、内層用管の一端を封止し、他端からガスを
送入して内層用管内を所定の加圧状態に保持することも
できる。この加圧用ガスとしては、加熱された石英ガラ
ス管に悪影響を与えないものであればすべて使用できる
が、通常、高純度の窒素ガス，アルゴンガス、あるいは
0.2μｍ以上のミスト粒子をフィルタリングした圧縮空
気等が実用的に有利に用いられる。In this fusion and integration operation of the polymerization tubes, an inert gas such as nitrogen or argon may be slowly fed into the inner layer tube. It is also possible to seal one end of the inner layer pipe and feed gas from the other end to maintain the inside of the inner layer pipe in a predetermined pressurized state. As this pressurizing gas, any gas that does not adversely affect the heated quartz glass tube can be used, but normally high-purity nitrogen gas, argon gas, or
Compressed air obtained by filtering mist particles with a size of 0.2 μm or more is practically advantageously used.
上記加熱一体化操作における加熱部の相対的移動は、通
常、重合用管を固定して加熱部を移動させるが、加熱部
を固定して重合管をスライドさせてもよい。Regarding the relative movement of the heating section in the heating integration operation, the polymerization tube is usually fixed and the heating section is moved, but the heating section may be fixed and the polymerization tube may be slid.
また、重合管の加熱溶融一体化に際して、その重合用石
英ガラス管に50Hz以上の周波数の振動を与えると、両管
同士の融着一体化が助長され、微細な気泡の残存が効果
的に排除されるので、極めて好ましい。この振動は、両
方の管に与えることがよいが、一方の管、特に外層用管
のみに与えることも効果的であり、更に、重合状の両管
の間隙を減圧にして融着面に気泡が残らないようにする
ことも極めて有効である。In addition, when heat-melting and unifying a polymerization tube, if a vibration with a frequency of 50 Hz or higher is applied to the polymerization quartz glass tube, fusion and integration of both tubes will be promoted, and fine bubbles will be effectively eliminated. Therefore, it is extremely preferable. This vibration may be applied to both pipes, but it is also effective to apply it to only one pipe, especially to the outer layer pipe. Furthermore, the pressure between the superposed pipes is reduced to reduce bubbles on the fusion surface. It is also extremely effective to prevent the remaining.
本発明の方法に適用される内層用合成石英ガラス管と外
層用石英ガラス管のそれぞれの肉厚の割合は、得られる
複合管が、半導体ウエハーの熱処理において充分な耐熱
性と耐汚染性をもつならば何ら制限されず、通常、10:9
0〜90:10の広い範囲から選択されるが、一般的には、内
層用管の肉厚が両管の合計の1/2以下であることが好ま
しく、特に内層の肉厚が10〜40％程度のものが製造の容
易さからも、また実用的にも望ましい。The thickness ratios of the synthetic quartz glass tube for the inner layer and the quartz glass tube for the outer layer applied to the method of the present invention are such that the obtained composite tube has sufficient heat resistance and stain resistance in the heat treatment of semiconductor wafers. Then there is no limitation, usually 10: 9
It is selected from a wide range of 0 to 90:10, but generally, the wall thickness of the inner layer tube is preferably 1/2 or less of the total of both tubes, and particularly the inner layer wall thickness is 10 to 40. % Is preferable in terms of easiness of production and practically.
本発明の方法は、外側に合成石英ガラス層及び内側に耐
熱性石英ガラス層を有するものを外層用管として用いる
と、耐熱性石英ガラス管の内外両面に高純度の合成石英
ガラス層を有する耐熱性管を容易に製造することができ
る。In the method of the present invention, when a tube having a synthetic quartz glass layer on the outer side and a heat-resistant quartz glass layer on the inner side is used as an outer layer tube, a heat-resistant quartz glass tube having high-purity synthetic quartz glass layers on both inner and outer surfaces is used. The sex tube can be easily manufactured.
本発明の方法によれば、重合状の管を内側から加熱する
ので、粘度の低い内層用管が容易に軟化し、その回転遠
心力によって高粘度外層用管の内面に、気泡をつくるこ
となく融着一体化して、均質な耐熱性複合管が容易に得
られる。According to the method of the present invention, since the polymerized tube is heated from the inside, the low-viscosity inner layer tube is easily softened, and its rotational centrifugal force does not create bubbles on the inner surface of the high-viscosity outer layer tube. A uniform heat-resistant composite pipe can be easily obtained by fusion-bonding and integration.
次に、具体例により本発明を更に詳細に説明する。 Next, the present invention will be described in more detail with reference to specific examples.
実施例１ 1,280℃の温度における粘度が1012 6ポアズの天然水晶
の粉末を電気溶融法によりガラス化し、外径φが150mm,
内径φが130mm,長さが2,000mmの外層用管を作成した。
また内層用管として、四塩化けい素を火炎加水分解して
合成した1,280℃における粘度が1011 5ポアズの合成石
英ガラスで外径φ120mm,内径φ100mm,長さ2,600mmの内
層用管を作成した。Example 1 A powder of natural quartz having a viscosity of 10 12 6 poise at a temperature of 1,280 ° C. was vitrified by an electric melting method to have an outer diameter φ of 150 mm,
An outer layer tube having an inner diameter φ of 130 mm and a length of 2,000 mm was prepared.
As for the inner layer pipe, the silicon tetrachloride was created flame hydrolysis and viscosity at 1,280 ° C. was synthesized 10 11 5 poise synthetic quartz glass with an outer diameter of 120 mm, an inner diameter of 100 mm in diameter, the inner pipe length 2,600mm .
次に、前記装置を用いて複合石英ガラス管を製造した。Next, a composite quartz glass tube was manufactured using the above apparatus.
まず、上記外層用管の両端部150mmを第一のスクロール
回転チャックにそれぞれ取り付け固定し、その管の内側
に内層用合成石英ガラス管を送入重合し、その両端部15
0mmを第一のスクロール回転チャックと連動する第二の
スクロール回転チャックに取り付け固定した。First, 150 mm of both ends of the outer layer tube were attached and fixed to the first scroll rotary chuck, respectively, and a synthetic quartz glass tube for the inner layer was fed and polymerized inside the tube, and both ends 15
0 mm was attached and fixed to the second scroll rotary chuck that works in conjunction with the first scroll rotary chuck.
上記スクロール回転チャックにより、重合両管を150rpm
で同期回転させながら、内層用管の内側に、その両端の
開口部からカーボン電極（先端部径20mm,基部径30mm,長
さ200mmの截頭円錐）を挿入した。With the scroll rotary chuck, overlap both tubes at 150 rpm.
While rotating in synchronism with each other, a carbon electrode (a truncated cone having a tip diameter of 20 mm, a base diameter of 30 mm, and a length of 200 mm) was inserted into the inner layer tube through openings at both ends thereof.
次いで、両電極を直流電圧を加えた状態で接触させ、通
電によるアークが発生した状態で電極先端面間距離を約
10mmに保ってアーク発熱部を左端部から右に約50mm/min
の速度で移動させた。重合管は左端から順次融着一体化
が進行して、その重合管の間隙のガスは右側に抜け、均
質な重層複合管が形成された。アークにより加熱された
内層用管の加熱部分の内面温度は、放射温度計の測定で
は約2,000℃であった。Next, contact both electrodes with a DC voltage applied, and set the distance between the electrode tip surfaces to about 1% with the arc generated by energization.
Keep it at 10 mm and the arc heating part from the left end to the right about 50 mm / min
Moved at the speed of. The fusion and integration of the polymerization tube proceeded sequentially from the left end, and the gas in the gap of the polymerization tube escaped to the right side to form a homogeneous multilayer composite tube. The inner surface temperature of the heated portion of the inner layer tube heated by the arc was about 2,000 ° C as measured by a radiation thermometer.
このようにして外径φ約150mm,厚さ約39mm,長さ約1,800
mmの実質的に気泡のない一体化された二層構造の厚肉石
英ガラス管を得た。得られた厚肉石英ガラス管の断面を
偏光顕微鏡で観察したところ、内層に約9mmの合成石英
ガラス層が確認できた。In this way, the outer diameter is about 150 mm, the thickness is about 39 mm, and the length is about 1,800.
mm thick substantially double-walled thick-walled quartz glass tubes without bubbles were obtained. When the cross section of the obtained thick quartz glass tube was observed with a polarization microscope, a synthetic quartz glass layer of about 9 mm was confirmed as the inner layer.
この肉厚ガラス管は、内側に圧力を加えながら加熱延伸
して、外径148mm,肉厚5mmの薄肉化されたものに加工し
炉心管を製作した。この炉心管に用いて、半導体ウエハ
ーを加熱酸化処理を行ったところ、ウエハーはなんら汚
染されることなく表面に均一な表面酸化膜が得られた。
また、この複合管は耐熱性に優れ、繰返しの使用にも実
質的な変形はみられず、長期にわたって安定に使用する
ことができた。This thick glass tube was heated and stretched while applying pressure to the inside, and processed into a thin tube having an outer diameter of 148 mm and a wall thickness of 5 mm to manufacture a furnace core tube. When a semiconductor wafer was subjected to a heat oxidation treatment using this furnace core tube, a uniform surface oxide film was obtained on the surface of the wafer without any contamination.
Further, this composite pipe was excellent in heat resistance, and was not substantially deformed even after repeated use, and could be used stably for a long period of time.
本発明の方法によって得られる複合石英ガラス管は、異
なる石英ガラス層の実質的に均一な重層管であって、耐
熱性とアルカリ金属汚染防止性が優れているので、特に
半導体ウエハーの各種熱処理用の炉心管として極めて有
用である。また、複合層融着部には実質的に気泡を含ま
ないから、高温条件下でも破損する恐れがなく、長い寿
命をもった安定な熱処理用部材として長期にわたって使
用できるので、その工業的且つ実用的価値は極めて高
い。The composite quartz glass tube obtained by the method of the present invention is a substantially uniform multi-layer tube of different quartz glass layers, and is excellent in heat resistance and alkali metal contamination prevention property, and thus is particularly suitable for various heat treatments of semiconductor wafers. It is extremely useful as a reactor core tube. Moreover, since the composite layer fusion part does not substantially contain bubbles, there is no risk of damage even under high temperature conditions, and it can be used for a long time as a stable heat-treating member having a long life, so that it is industrially and practically used. Value is extremely high.
第１図は、本発明の方法の実施状態の一例を示す模式的
説明図である。 図中の符号： １……基台、２……カーボン電極 ３……銅管、４……電極保持装置 ５……その把持部 P1……内層用合成石英ガラス管 P2……外層用天然石英ガラス管 C1……内層用管チャック C2……外層用管チャック P12……複合管FIG. 1 is a schematic explanatory view showing an example of an implementation state of the method of the present invention. Reference numerals: 1 ...... base, 2 ...... carbon electrode 3 ...... copper tube, 4 ...... electrode holding device 5 ...... its grip portion P 1 ...... for inner synthetic quartz glass tube P 2 ...... outer Natural quartz glass tube C 1 …… Inner layer tube chuck C 2 …… Outer layer tube chuck P 12 …… Composite tube
───────────────────────────────────────────────────── フロントページの続き (72)発明者 加藤 俊幸 福島県郡山市田村町金屋字川久保88 信越 石英株式会社石英技術研究所内 (72)発明者 西村 裕幸 福島県郡山市田村町金屋字川久保88 信越 石英株式会社石英技術研究所内 (72)発明者 嶋田 敦之 福島県郡山市田村町金屋字川久保88 信越 石英株式会社石英技術研究所内 (56)参考文献 特開 昭63−185838（ＪＰ，Ａ) 特公 昭54−5404（ＪＰ，Ｂ２) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshiyuki Kato, Kawamura, Kanaya, Tamura-cho, Koriyama-shi, Fukushima 88 Shin-Etsu Quartz Co., Ltd. Quartz Technology Laboratory (72) Hiroyuki Nishimura, Kawakubo, Kawamura, Tamura-cho, Koriyama-shi, Fukushima 88 Shin-etsu Quartz Co., Ltd. Quartz Technology Laboratory (72) Inventor Atsushi Shimada 88, Kawakubo, Kanaya, Tamura-cho, Koriyama City, Fukushima Prefecture Shin-Etsu Quartz Technology Laboratory (56) Reference Japanese Patent Laid-Open No. 63-185838 (JP, A) Sho 54-5404 (JP, B2)
Claims (2)
用管とを一体化する複合石英ガラス管の製造において、
高純度合成石英ガラス内層用管を、その石英ガラスより
高い粘度を有する石英ガラス外層用管内に挿入重合し、
該重合状の両管を水平に保持して、それぞれを共通軸の
周りに同一速度で回転させながら、その重合管の内側か
らアーク又はカーボン発熱体で加熱し、重合状管を融着
一体化することを特徴とする半導体熱処理用複合石英ガ
ラス管の製造方法。1. In the production of a composite quartz glass tube in which an inner layer tube and an outer layer tube made of different quartz glass are integrated,
A high-purity synthetic quartz glass inner layer tube is inserted and polymerized in a quartz glass outer layer tube having a higher viscosity than the quartz glass,
While holding the polymerized tubes horizontally and rotating them around the common axis at the same speed, the polymerized tubes are heated by an arc or a carbon heating element from the inside of the polymerized tubes to fuse and integrate the polymerized tubes. A method of manufacturing a composite quartz glass tube for heat treatment of a semiconductor, comprising:
周波数の振動を与える請求項１記載の製造方法。2. The manufacturing method according to claim 1, wherein vibration is applied to at least one of the polymerized tubes at a frequency of 50 Hz or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4568990A JPH0729797B2 (en) | 1990-02-28 | 1990-02-28 | Method for manufacturing composite quartz glass tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4568990A JPH0729797B2 (en) | 1990-02-28 | 1990-02-28 | Method for manufacturing composite quartz glass tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03252324A JPH03252324A (en) | 1991-11-11 |
| JPH0729797B2 true JPH0729797B2 (en) | 1995-04-05 |
Family
ID=12726356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4568990A Expired - Lifetime JPH0729797B2 (en) | 1990-02-28 | 1990-02-28 | Method for manufacturing composite quartz glass tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729797B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1309670C (en) * | 2001-10-16 | 2007-04-11 | 肖特股份公司 | Method for producing vitreum |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19962452B4 (en) * | 1999-12-22 | 2004-03-18 | Heraeus Quarzglas Gmbh & Co. Kg | Process for the production of opaque quartz glass |
-
1990
- 1990-02-28 JP JP4568990A patent/JPH0729797B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1309670C (en) * | 2001-10-16 | 2007-04-11 | 肖特股份公司 | Method for producing vitreum |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03252324A (en) | 1991-11-11 |
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