JPH07297231A - Jig and method for mounting chip on board - Google Patents

Jig and method for mounting chip on board

Info

Publication number
JPH07297231A
JPH07297231A JP8666794A JP8666794A JPH07297231A JP H07297231 A JPH07297231 A JP H07297231A JP 8666794 A JP8666794 A JP 8666794A JP 8666794 A JP8666794 A JP 8666794A JP H07297231 A JPH07297231 A JP H07297231A
Authority
JP
Japan
Prior art keywords
chip
circuit board
printed circuit
cover body
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8666794A
Other languages
Japanese (ja)
Inventor
Hiroshi Haji
宏 土師
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8666794A priority Critical patent/JPH07297231A/en
Publication of JPH07297231A publication Critical patent/JPH07297231A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/751Means for controlling the bonding environment, e.g. valves, vacuum pumps
    • H01L2224/75101Chamber
    • H01L2224/75102Vacuum chamber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7525Means for applying energy, e.g. heating means
    • H01L2224/753Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/75301Bonding head
    • H01L2224/75302Shape
    • H01L2224/75303Shape of the pressing surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757Means for aligning
    • H01L2224/75743Suction holding means
    • H01L2224/75745Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/812Applying energy for connecting
    • H01L2224/81201Compression bonding
    • H01L2224/81209Compression bonding applying isostatic pressure, e.g. degassing using vacuum or a pressurised liquid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818Bonding techniques
    • H01L2224/81801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/014Solder alloys
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE:To provide a jig and method for mounting a chip on a printed circuit board whereby the reflow process wherein the electrodes the chip are soldered to the lands of the printed circuit board by heatings the electrodes, etc., through a heating furnace can be made unnecessary. CONSTITUTION:Humps 3 of a chip 1 are contacted with lands 5 of a printed circuit board 4, and the chip 1 is covered with a mounting jig 10, and further, the mounting jig 10 is bonded to the printed circuit board 4 by a bonding agent 9. Then, the inner part of the mounting jig 10 is subjected to vacuum suction by a nozzle 15, and the mounting jig 10 is bent inward by the atomospheric pressure, and thereby, the chip 1 is mounted on the printed circuit board 4 while the chip 1 is pressed against the board 4 by the mounting jig 10.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、チップをプリント基板
に実装するためのチップの実装用治具および実装方法に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chip mounting jig and a mounting method for mounting a chip on a printed circuit board.

【0002】[0002]

【従来の技術】半導体から成るチップには様々な品種が
あるが、何れもその表面に形成された電極をプリント基
板の回路パターンのランド(電極)に接続することによ
りプリント基板に実装するようになっている。以下、従
来のチップの実装方法について説明する。
2. Description of the Related Art There are various types of chips made of semiconductors, and all of them are mounted on a printed circuit board by connecting electrodes formed on the surface to lands (electrodes) of a circuit pattern of the printed circuit board. Has become. Hereinafter, a conventional chip mounting method will be described.

【0003】図11(a)(b)(c)は従来のチップ
の実装方法の説明図である。図11(a)において、チ
ップ1の下面に形成された電極2にはハンダ材料から成
るバンプ(突出電極)3が形成されている。またプリン
ト基板4の上面には回路パターンのランド(電極)5が
形成されている。まず図11(a)に示すように、プリ
ント基板4の上面にエポキシ樹脂などの仮止め用のボン
ド6をディスペンサなどにより塗布し、次に図11
(b)に示すようにバンプ3をランド5に接地させてチ
ップ1をプリント基板4に搭載する。この搭載は、チッ
プの自動搭載装置により行われる。このとき、ボンド6
はチップ1の下面に付着し、チップ1が位置ずれしない
ようにプリント基板4に仮止めする。
11 (a), 11 (b) and 11 (c) are explanatory views of a conventional chip mounting method. In FIG. 11A, bumps (protruding electrodes) 3 made of a solder material are formed on the electrodes 2 formed on the lower surface of the chip 1. A land (electrode) 5 having a circuit pattern is formed on the upper surface of the printed board 4. First, as shown in FIG. 11A, a temporary bond 6 such as an epoxy resin is applied to the upper surface of the printed board 4 by a dispenser or the like, and then, as shown in FIG.
As shown in (b), the bump 3 is grounded to the land 5, and the chip 1 is mounted on the printed board 4. This mounting is performed by an automatic chip mounting device. At this time, bond 6
Adheres to the lower surface of the chip 1 and is temporarily fixed to the printed board 4 so that the chip 1 is not displaced.

【0004】次にこのようにしてチップ1が搭載された
プリント基板4をリフロー装置の加熱炉(図外)へ送
り、200℃以上に加熱することによりバンプ3を溶融
固化させてハンダ付けする。図11(c)はハンダ付け
が終了したものを示している。図示するようにバンプ3
が溶融固化してハンダ部3’となり、チップ1の電極2
はプリント基板4のランド5に接着されている。
Next, the printed board 4 on which the chip 1 is mounted in this way is sent to a heating furnace (not shown) of the reflow apparatus and heated to 200 ° C. or higher to melt and solidify the bumps 3 for soldering. FIG. 11C shows that the soldering has been completed. Bump 3 as shown
Melts and solidifies to become the solder part 3'and the electrode 2 of the chip 1
Are bonded to the lands 5 of the printed circuit board 4.

【0005】[0005]

【発明が解決しようとする課題】しかしながら上記従来
の実装方法では、チップ1が搭載されたプリント基板4
をリフロー装置の加熱炉へ送って加熱し、バンプ3を溶
融させるハンダ付け工程が必要であるため、工程数が多
いという問題点があった。またバンプ3を溶融させてハ
ンダ付けすると、溶融したハンダが流動して短絡の原因
となるブリッジを生じたり、あるいは加熱不十分による
接着不良が発生するなど、ハンダ付けの不良品が発生し
やすいものであった。
However, in the above-mentioned conventional mounting method, the printed circuit board 4 on which the chip 1 is mounted is mounted.
However, there is a problem in that the number of steps is large because a soldering step of sending the solder to a heating furnace of the reflow device to heat the bumps 3 is required. In addition, when the bumps 3 are melted and soldered, the melted solder flows to form a bridge that causes a short circuit, or defective adhesion due to insufficient heating occurs, and thus defective soldering products are likely to occur. Met.

【0006】またバンプ3を加熱して溶融させてハンダ
付けする際に、バンプ3とランド5の接合部に合金が発
生・成長し、この合金のために接合部が破壊されやすい
という問題点があった。また図11(c)に示すように
チップ1をプリント基板4に実装した後、ハンダ付け状
態の良否判定などの製品検査が行われ、不良と判定され
た場合には、チップ1をプリント基板4から取り除い
て、再度チップ1を実装し直すリペア作業が行われる
が、この場合、バンプ3は溶融してハンダ部3’とな
り、電極2をランド5にしっかり接着しているため、チ
ップ1をプリント基板4から取り除く作業をきわめて行
いにくく、またその場合プリント基板4のランド5など
を損傷しやすいという問題点があった。
Further, when the bumps 3 are heated and melted to be soldered, an alloy is generated and grows at the joints between the bumps 3 and the lands 5, and the joints are apt to be broken due to this alloy. there were. After mounting the chip 1 on the printed circuit board 4 as shown in FIG. 11C, product inspection such as quality determination of the soldering state is performed, and if it is determined to be defective, the chip 1 is mounted on the printed circuit board 4. After that, the repair work is carried out to remount the chip 1 again, but in this case, the bump 3 is melted and becomes the solder part 3 ′, and the electrode 2 is firmly adhered to the land 5, so the chip 1 is printed. There is a problem that the work of removing from the substrate 4 is extremely difficult to perform, and in that case, the land 5 and the like of the printed substrate 4 are easily damaged.

【0007】また上述のようにしてチップ1が実装され
たプリント基板4は、各種の電子機器に組み付けられる
が、長時間の間に金属部分であるプリント基板4の回路
パターンやハンダ部3’は空気中の酸素に触れることに
より腐食しやすく、またボンド6も腐食・変質しやす
く、製品寿命が短くなるという問題点があった。
The printed circuit board 4 on which the chip 1 is mounted as described above is assembled in various electronic devices, but the circuit pattern of the printed circuit board 4 which is a metal part and the solder part 3'can be assembled for a long time. There is a problem in that the product is easily corroded by contacting oxygen in the air, and the bond 6 is also easily corroded / altered, which shortens the product life.

【0008】以上のように従来のチップの実装方法には
多くの問題点があった。また従来のチップの実装方法と
しては、プリント基板のランドにハンダを予め形成して
チップのバンプレスの電極をハンダ付けすることにより
実装する方法、チップの電極とプリント基板のランドの
間に導電シートを介在させて実装する方法など様々な方
法があるが、何れの方法もプリント基板を加熱する工程
が必要なことから、上述と同様の多くの問題点があっ
た。
As described above, the conventional chip mounting method has many problems. Further, as a conventional chip mounting method, a method of mounting by previously forming solder on the land of the printed circuit board and soldering bump bump electrodes of the chip, or a conductive sheet between the chip electrode and the land of the printed circuit board is used. Although there are various methods such as a method of mounting with the interposition of, there are many problems similar to the above because each method requires a step of heating the printed board.

【0009】そこで本発明は、上記従来方法の問題点を
解消し、チップを簡単にプリント基板に実装でき、また
リペア作業を容易に行うことができ、更には金属部分や
ボンドの腐食を抑制できるチップの実装用治具および実
装方法を提供することを目的とする。
Therefore, the present invention solves the above-mentioned problems of the conventional method, can easily mount a chip on a printed circuit board, can easily perform repair work, and can suppress corrosion of metal parts and bonds. An object is to provide a jig for mounting a chip and a mounting method.

【0010】[0010]

【課題を解決するための手段】このために本発明は、チ
ップを覆うようにチップに被蓋されてその下端部がプリ
ント基板の表面に固着されるカバー体からチップの実装
用治具を構成し、このカバー体をその内部の真空圧によ
って内方へ屈曲する屈曲可能な素材により形成したもの
である。
To this end, the present invention constitutes a chip mounting jig from a cover body which is covered with a chip so as to cover the chip and whose lower end is fixed to the surface of a printed circuit board. However, the cover body is formed of a bendable material that bends inward by the vacuum pressure inside the cover body.

【0011】[0011]

【作用】上記構成によれば、カバー体を真空圧によって
内方へ屈曲させることにより、チップの電極をプリント
基板のランドに押し付けて、チップをカバー体によりプ
リント基板に固定できるので、ハンダ付け工程が不要と
なり、チップをプリント基板に簡単に実装できる。
According to the above structure, by bending the cover body inward by vacuum pressure, the electrodes of the chip can be pressed against the land of the printed circuit board and the chip can be fixed to the printed circuit board by the cover body. Is unnecessary, and the chip can be easily mounted on the printed circuit board.

【0012】[0012]

【実施例】次に、図面を参照しながら本発明の実施例を
説明する。図1は本発明の第一実施例のチップの実装用
治具の斜視図、図2(a)(b)(c)、図3(a)
(b)、図4(a)(b)は同チップの実装方法の説明
図である。図1において、10はチップの実装用治具で
あり、箱形のカバー体11の上面側部に真空吸引用のパ
イプ状の吸込部12を突設して形成されている。この実
装用治具10は、熱可塑性合成樹脂などの屈曲可能な素
材により形成されている。
Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a perspective view of a jig for mounting a chip according to a first embodiment of the present invention, FIG. 2 (a) (b) (c), and FIG. 3 (a).
4B and FIG. 4A and FIG. 4B are explanatory views of a mounting method of the same chip. In FIG. 1, reference numeral 10 denotes a chip mounting jig, which is formed by projecting a pipe-shaped suction portion 12 for vacuum suction on the upper surface side portion of a box-shaped cover body 11. The mounting jig 10 is formed of a bendable material such as a thermoplastic synthetic resin.

【0013】次に図2〜図4を参照しながら、チップの
実装方法を説明する。図2(a)(b)(c)はチップ
1をプリント基板4に搭載する工程を工程順に示してい
る。まず図2(a)(b)に示すように、ディスペンサ
などによりプリント基板4の上面に仮止め用のボンド6
を塗布し、バンプ3をランド5に合致させてチップ1を
自動搭載装置によりプリント基板4に搭載する。なお各
図において、図11に示す従来と同一の部分には同一符
号を付している。
Next, a chip mounting method will be described with reference to FIGS. 2A, 2 </ b> B, and 2 </ b> C show the steps of mounting the chip 1 on the printed board 4 in the order of steps. First, as shown in FIGS. 2A and 2B, a bond 6 for temporary fixing is attached to the upper surface of the printed circuit board 4 by a dispenser or the like.
Is applied, the bumps 3 are aligned with the lands 5, and the chip 1 is mounted on the printed circuit board 4 by an automatic mounting device. In each figure, the same parts as those of the prior art shown in FIG. 11 are designated by the same reference numerals.

【0014】次に図2(b)(c)に示すように、実装
用治具10のカバー体11の上面をノズル7の下端部に
真空吸着して保持し、カバー体11をチップ1を覆うよ
うに被蓋する。8はノズル7の下端部に装着された気密
用Oリングである。これに先立って、カバー体11の下
面には瞬間接着剤などのボンド9が塗布されており、こ
のボンド9により、カバー体11はプリント基板4に接
着される。なおカバー体11をノズル7に真空吸着した
状態で、カバー体11の下端部を容器に貯溜されたボン
ド9にわずかに浸漬するなどすれば、ボンド9をカバー
体11の下面に容易に塗布できる。
Next, as shown in FIGS. 2B and 2C, the upper surface of the cover body 11 of the mounting jig 10 is vacuum-sucked and held on the lower end portion of the nozzle 7, and the cover body 11 is attached to the chip 1. Cover to cover. Reference numeral 8 is an airtight O-ring mounted on the lower end of the nozzle 7. Prior to this, a bond 9 such as an instant adhesive is applied to the lower surface of the cover body 11, and the bond body 9 bonds the cover body 11 to the printed circuit board 4. The bond 9 can be easily applied to the lower surface of the cover body 11 by slightly immersing the lower end portion of the cover body 11 in the bond 9 stored in the container while the cover body 11 is vacuum-adsorbed to the nozzle 7. .

【0015】図3(a)(b)および図4(a)(b)
は、次に行われる一連の真空吸引工程を工程順に示して
いる。図3(a)において、15は内部に吸引孔16が
形成されたノズルであり、その下端部近くの内部にはヒ
ータ17が内蔵されている。18は気密用Oリングであ
る。このノズル15は、真空吸引装置(図外)に接続さ
れている。図示するようにノズル15を吸込部12に接
続し、カバー体11内の空気を真空吸引する。すると図
3(b)に示すようにカバー体11の上面は大気圧に押
されて内方へ屈曲し、チップ1をプリント基板4に押し
付け、バンプ3もランド5に強く押し付けられる。また
これと同時にヒータ17は駆動して吸込部12を加熱す
る。
3A and 3B and FIGS. 4A and 4B.
Shows a series of vacuum suction steps to be performed next in the order of steps. In FIG. 3A, reference numeral 15 is a nozzle having a suction hole 16 formed therein, and a heater 17 is built in near the lower end thereof. Reference numeral 18 is an airtight O-ring. The nozzle 15 is connected to a vacuum suction device (not shown). As shown in the figure, the nozzle 15 is connected to the suction portion 12, and the air in the cover body 11 is vacuum-sucked. Then, as shown in FIG. 3B, the upper surface of the cover body 11 is pressed by the atmospheric pressure to bend inward, the chip 1 is pressed against the printed board 4, and the bump 3 is strongly pressed against the land 5. At the same time, the heater 17 is driven to heat the suction section 12.

【0016】すると図4(a)に示すように、吸込部1
2は軟化し、また吸込部12は真空圧により内側へ吸引
されることにより押し潰されて盲となり、さらにノズル
15が真空吸引することにより押し潰された首細部から
吸込部12の上部12aは吸いちぎられる。次にノズル
15は上昇して吸込部12から離れ、図4(b)に示す
ように側方へ移動し、そこで真空吸引を停止すると吸い
ちぎられた上部12aは自然落下し、回収箱(図外)に
回収される。以上のようにして、一連の実装工程は終了
する。
Then, as shown in FIG. 4A, the suction portion 1
2 is softened, and the suction portion 12 is crushed by being sucked inward by vacuum pressure and becomes blind. Further, the upper portion 12a of the suction portion 12 is crushed by vacuum suction of the nozzle 15 from the neck portion. Being sucked off. Next, the nozzle 15 rises and separates from the suction part 12, moves laterally as shown in FIG. 4B, and when vacuum suction is stopped there, the sucked upper part 12a falls naturally and the collection box (see FIG. Outside). As described above, the series of mounting steps is completed.

【0017】図4(b)に示す実装状態において、カバ
ー体11の内部は真空状態(厳密には真空に近い状態)
であるため、カバー体11の上面は大気圧に押され、チ
ップ1はプリント基板4に強く押し付けられて、バンプ
3はランド5にしっかり密着する。したがって従来方法
のようにプリント基板1をリフロー装置の加熱炉へ送っ
てハンダ付けする工程を不要にできる。
In the mounted state shown in FIG. 4B, the inside of the cover body 11 is in a vacuum state (strictly, a state close to a vacuum).
Therefore, the upper surface of the cover body 11 is pressed by the atmospheric pressure, the chip 1 is strongly pressed against the printed circuit board 4, and the bumps 3 are firmly attached to the lands 5. Therefore, the step of sending the printed circuit board 1 to the heating furnace of the reflow apparatus and soldering it unlike the conventional method can be eliminated.

【0018】またカバー体11の内部の空気は吸い出さ
れて真空になっているため、チップ1は実質的に真空封
止されることとなり、電極2、バンプ3、ランド5など
の金属部分が酸化して腐食することもなく、またボンド
6も腐食・変質しにくく、したがって製品寿命は著しく
長命化し、信頼性の高い製品を得ることができる。バン
プ3がランド5から位置ずれするなどして実装状態が不
良の場合には、リペア作業が行われる。そこで、次にリ
ペア作業について説明する。
Further, since the air inside the cover body 11 is sucked out to be a vacuum, the chip 1 is substantially vacuum-sealed, and the metal parts such as the electrodes 2, the bumps 3, and the lands 5 are removed. It does not oxidize and corrode, and the bond 6 is unlikely to corrode or change in quality, so that the product life is significantly extended and a highly reliable product can be obtained. When the mounting state is bad due to the bump 3 being displaced from the land 5, the repair work is performed. Therefore, the repair work will be described next.

【0019】図5(a)(b)(c)は本発明の第一実
施例のチップのリペア作業の説明図である。まず図5
(a)に示すように、針状の加熱ツール19をカバー体
11の適所に差し込んで穴あけする。すると図5(b)
に示すように開けられた孔部14からカバー体11内に
外気が吸入され、カバー体11の上面は自身の弾性によ
りフラットな形状に復帰する。またボンド9を電気こて
で加熱して軟化させるなどして取り除き、カバー体11
をプリント基板4から分離する。ここで、チップ1のバ
ンプ3はプリント基板4のランド5上に単に載っている
だけであるので、カバー体11を取り除けばチップ1も
難なく取り除ける。またチップ1を取り除いてもランド
5は無傷であるから、上記工程を再度繰り返すことによ
り、新たなチップ1とカバー体11をプリント基板4に
実装することができる。
5 (a), 5 (b) and 5 (c) are explanatory views of the repair work of the chip of the first embodiment of the present invention. Figure 5
As shown in (a), the needle-shaped heating tool 19 is inserted into an appropriate place of the cover body 11 to make a hole. Then, Fig. 5 (b)
Outside air is sucked into the cover body 11 through the hole 14 opened as shown in FIG. 3, and the upper surface of the cover body 11 returns to a flat shape by its elasticity. Further, the bond 9 is removed by heating with an electric iron to soften it, and the cover body 11
Is separated from the printed circuit board 4. Here, since the bumps 3 of the chip 1 are simply mounted on the lands 5 of the printed board 4, the chip 1 can be easily removed by removing the cover body 11. Further, since the land 5 is intact even if the chip 1 is removed, a new chip 1 and a cover body 11 can be mounted on the printed board 4 by repeating the above steps.

【0020】図6(a)(b)(c)は本発明の第二実
施例のチップの実装方法の説明図である。この方法で
は、図6(a)に示すようにチップ1と実装用治具10
を上下反転させ、またカバー体11の内面にボンド6を
塗布し、チップ1をカバー体11の内部にボンド6で仮
付けする。次に図6(b)(c)に示すように実装用治
具10を上下反転させ、ノズル7に真空吸着してプリン
ト基板4に搭載する。この場合、プリント基板4にも仮
止め用のボンド6が塗布されている。これ以後の工程は
図3に示す第一実施例と同様であって、カバー体11の
内部を真空吸引してカバー体11を内方へ屈曲させ、チ
ップ1をプリント基板4に押し付ける。
FIGS. 6A, 6B and 6C are explanatory views of a chip mounting method according to the second embodiment of the present invention. In this method, as shown in FIG. 6A, the chip 1 and the mounting jig 10 are
Is turned upside down, the bond 6 is applied to the inner surface of the cover body 11, and the chip 1 is temporarily attached to the inside of the cover body 11 with the bond 6. Next, as shown in FIGS. 6B and 6C, the mounting jig 10 is turned upside down, and the nozzle 7 is vacuum-sucked and mounted on the printed board 4. In this case, the printed board 4 is also coated with the bond 6 for temporary fixing. The subsequent steps are similar to those of the first embodiment shown in FIG. 3, and the inside of the cover body 11 is vacuum-sucked to bend the cover body 11 inward, and the chip 1 is pressed against the printed board 4.

【0021】図7(a)(b)および図8(a)(b)
(c)は本発明の第三実施例のチップの実装方法の説明
図である。本方法は複数個のチップを同時にプリント基
板に一括実装する方法である。プリント基板4Aは第一
実施例のプリント基板4よりも大形であり、第一実施例
と同様の手法により2個のチップ1が搭載されており、
各々のチップ1には実装用治具10が被蓋されている。
FIGS. 7A and 7B and FIGS. 8A and 8B.
(C) is an explanatory view of a chip mounting method of the third embodiment of the present invention. This method is a method of collectively mounting a plurality of chips on a printed circuit board at the same time. The printed board 4A is larger than the printed board 4 of the first embodiment, and two chips 1 are mounted by the same method as in the first embodiment.
A mounting jig 10 is covered on each chip 1.

【0022】図7(a)に示すように、このプリント基
板4Aをケーシング20の内部に収納し、その側面に設
けられた排気部21から真空吸引装置(図外)により真
空吸引する。するとカバー体11の内部の空気も吸込部
12から真空吸引される。次にケーシング20の内部の
上部に設けられたヒータ22を図外の上下動手段によっ
て下降させ、吸込部12に押し付ける(図7(b))。
すると吸込部12は加熱されて軟化し、押し潰されて盲
となる。このとき、排気部21からの真空吸引は継続し
ている。
As shown in FIG. 7 (a), this printed circuit board 4A is housed inside a casing 20 and is vacuum-sucked by a vacuum suction device (not shown) from an exhaust portion 21 provided on the side surface thereof. Then, the air inside the cover body 11 is also vacuum-sucked from the suction section 12. Next, the heater 22 provided in the upper portion inside the casing 20 is lowered by the vertical moving means (not shown) and pressed against the suction portion 12 (FIG. 7B).
Then, the suction part 12 is heated and softened, and is crushed and becomes blind. At this time, vacuum suction from the exhaust unit 21 continues.

【0023】次に図8(a)に示すようにヒータ22を
上昇させ、続いて排気部21からの真空吸引を停止して
排気部21から外気をリークする(図8(b))。する
とケーシング20の内部は大気圧となり、カバー体11
は大気圧に押されて内方へ屈曲してチップ1をプリント
基板4Aに押し付ける。次にプリント基板4Aをケーシ
ング20から取り出すことにより、一連の実装工程は終
了する(図8(c))。本方法によれば、第一実施例と
同様の効果が得られるとともに、複数個のチップ1を同
時にプリント基板4Aに一括実装できるので、作業能率
が向上する。
Next, as shown in FIG. 8A, the heater 22 is raised, and then vacuum suction from the exhaust unit 21 is stopped to leak outside air from the exhaust unit 21 (FIG. 8B). Then, the inside of the casing 20 becomes atmospheric pressure, and the cover body 11
Is pressed by the atmospheric pressure and bent inward to press the chip 1 against the printed circuit board 4A. Next, the printed circuit board 4A is taken out from the casing 20 to complete a series of mounting steps (FIG. 8C). According to this method, the same effect as in the first embodiment can be obtained, and a plurality of chips 1 can be simultaneously mounted on the printed circuit board 4A at the same time, so that the work efficiency is improved.

【0024】図9(a)(b)(c)および図10
(a)(b)は本発明の第四実施例のチップの実装方法
の説明図である。この実装用治具10Aの形状は、図1
に示す実装用治具10と同様に箱形のカバー体から成っ
ているが、吸込部12は有していない。ケーシング20
などの他の構成は第三実施例と同様である。
9 (a) (b) (c) and FIG.
(A) (b) is explanatory drawing of the mounting method of the chip | tip of the 4th Example of this invention. The shape of this mounting jig 10A is shown in FIG.
Like the mounting jig 10 shown in FIG. 1, it is made of a box-shaped cover body, but does not have the suction portion 12. Casing 20
Other configurations such as are similar to those of the third embodiment.

【0025】次に動作を説明する。図9(a)に示すよ
うに、まずチップ1のバンプ3をプリント基板4Aのラ
ンド5に合致させてチップ1をプリント基板4Aに搭載
する。このとき実装用治具10Aは加熱装置を備えたク
ランパ23にクランプされてチップ1の上方に位置して
いる。この状態で、排気部21からケーシング20内の
空気を真空吸引する。なおクランパ23のクランプ機構
は図では省略している。またクランパ23はこの状態で
は加熱されていない。
Next, the operation will be described. As shown in FIG. 9A, first, the bumps 3 of the chip 1 are aligned with the lands 5 of the printed board 4A, and the chip 1 is mounted on the printed board 4A. At this time, the mounting jig 10A is clamped by the clamper 23 having a heating device and is positioned above the chip 1. In this state, the air in the casing 20 is vacuumed from the exhaust unit 21. The clamp mechanism of the clamper 23 is omitted in the figure. The clamper 23 is not heated in this state.

【0026】次に図9(b)に示すようにクランパ23
を下降させ、実装用治具10Aの下端部のボンド9Aを
プリント基板4Aに付着させて、実装用治具10Aをチ
ップ1に被蓋する。被蓋した状態で加熱し、ボンド9A
を硬化させる。なおこのボンド9Aは熱硬化性樹脂であ
る。次にクランパ23による実装用治具10Aのクラン
プ状態を解除してクランパ23を上昇させ、またクラン
パ23の加熱を停止する(図9(c))。このとき、排
気部21からの真空吸引は継続している。なおこの実施
例では、クランパ23が加熱装置を備えているが、加熱
装置はクランパ23と別体にして、ケーシング20内に
設けてもよい。
Next, as shown in FIG. 9B, the clamper 23
Is lowered, the bond 9A at the lower end of the mounting jig 10A is attached to the printed board 4A, and the mounting jig 10A is covered on the chip 1. Heat with the lid on, bond 9A
Cure. The bond 9A is a thermosetting resin. Next, the clamped state of the mounting jig 10A by the clamper 23 is released to raise the clamper 23, and the heating of the clamper 23 is stopped (FIG. 9C). At this time, vacuum suction from the exhaust unit 21 continues. Although the clamper 23 is provided with the heating device in this embodiment, the heating device may be provided separately from the clamper 23 in the casing 20.

【0027】次に排気部21をリークして外気をケーシ
ング20に導入する(図10(a))。すると実装用治
具10Aは大気圧に押されて内方へ屈曲し、チップ1を
プリント基板4Aに押し付ける。次にプリント基板4A
をケーシング20から取り出すことにより、一連の工程
は終了する(図10(b))。この第四実施例も第三実
施例と同様の効果が得られる他、実装用治具10Aの溶
融の必要がないことから、高融点材料の使用も可能であ
る。また実装用治具を熱伝導性のよい金属板にて形成す
れば、プリント基板が電子機器に組み付けられてチップ
に電流が流れる際に発生するチップの自己発熱を、チッ
プの上面に密着する実装用治具を通して熱効率よく外界
へ放出でき、すぐれたヒートシンクとしての作用効果も
得られる。上記各実施例から明らかなように、本発明は
様々な設計変更が可能である。またバンプを有しないチ
ップや、導電シートを介してプリント基板に実装される
チップなど、様々なチップの実装手段にも適用できる。
Next, the exhaust part 21 is leaked to introduce the outside air into the casing 20 (FIG. 10 (a)). Then, the mounting jig 10A is pressed by the atmospheric pressure and bent inward, and the chip 1 is pressed against the printed board 4A. Next, printed circuit board 4A
The series of steps is completed by taking out the product from the casing 20 (FIG. 10B). In the fourth embodiment, the same effect as in the third embodiment can be obtained, and since it is not necessary to melt the mounting jig 10A, it is possible to use a high melting point material. If the mounting jig is made of a metal plate with good thermal conductivity, the self-heating of the chip, which occurs when the printed circuit board is assembled in an electronic device and a current flows through the chip, is closely attached to the upper surface of the chip. It can be efficiently released to the outside world through a jig for heat treatment, and it also has an excellent effect as a heat sink. As is apparent from the above embodiments, the present invention can be modified in various ways. Further, it can be applied to various chip mounting means such as a chip having no bumps and a chip mounted on a printed circuit board via a conductive sheet.

【0028】[0028]

【発明の効果】以上説明したように本発明によれば、リ
フロー装置によるハンダ付けを不要にでき、したがって
チップをプリント基板に実装する工程を著しく簡単・高
速化でき、またハンダ付け不良による不良品の発生を解
消できる。また実装用治具の内部を真空状態にすること
により、チップの電極や基板のランドなどの金属部分が
酸化して腐食するのを防止でき、製品を著しく長寿命化
できる。さらにはチップの実装不良の場合には簡単迅速
にリペア作業を行うことができ、またリペアを行っても
プリント基板のランドを損傷することもないので歩留り
が向上する。また複数のチップを一括してプリント基板
に実装することも可能であり、チップの実装作業能率を
著しく向上できる。
As described above, according to the present invention, it is possible to eliminate the need for soldering by a reflow device, and therefore the process of mounting a chip on a printed circuit board can be significantly simplified and speeded up, and defective products due to defective soldering can be obtained. Can be eliminated. Further, by making the inside of the mounting jig in a vacuum state, it is possible to prevent the metal parts such as the electrodes of the chip and the lands of the substrate from being oxidized and corroded, and the life of the product can be remarkably extended. Further, in the case of chip mounting failure, repair work can be performed easily and quickly, and even if repair is performed, the land of the printed circuit board is not damaged, so the yield is improved. It is also possible to mount a plurality of chips on the printed circuit board at a time, and the mounting work efficiency of the chips can be significantly improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第一実施例のチップの実装用治具の斜
視図
FIG. 1 is a perspective view of a chip mounting jig according to a first embodiment of the present invention.

【図2】(a)本発明の第一実施例のチップの実装方法
の説明図 (b)本発明の第一実施例のチップの実装方法の説明図 (c)本発明の第一実施例のチップの実装方法の説明図
2A is an explanatory diagram of a chip mounting method according to a first embodiment of the present invention; FIG. 2B is an explanatory diagram of a chip mounting method according to a first embodiment of the present invention; and FIG. 2C is a first embodiment of the present invention. Of the chip mounting method

【図3】(a)本発明の第一実施例のチップの実装方法
の説明図 (b)本発明の第一実施例のチップの実装方法の説明図
3A is an explanatory diagram of a chip mounting method according to a first embodiment of the present invention; FIG. 3B is an explanatory diagram of a chip mounting method according to a first embodiment of the present invention.

【図4】(a)本発明の第一実施例のチップの実装方法
の説明図 (b)本発明の第一実施例のチップの実装方法の説明図
4A is an explanatory diagram of a chip mounting method according to a first embodiment of the present invention; FIG. 4B is an explanatory diagram of a chip mounting method according to a first embodiment of the present invention;

【図5】(a)本発明の第一実施例のチップのリペア作
業の説明図 (b)本発明の第一実施例のチップのリペア作業の説明
図 (c)本発明の第一実施例のチップのリペア作業の説明
FIG. 5 (a) is an explanatory view of a tip repairing work of the first embodiment of the present invention (b) is an explanatory view of a tip repairing work of the first embodiment of the present invention; and (c) is a first embodiment of the present invention. Of tip repair work

【図6】(a)本発明の第二実施例のチップの実装方法
の説明図 (b)本発明の第二実施例のチップの実装方法の説明図 (c)本発明の第二実施例のチップの実装方法の説明図
6A is an explanatory view of a chip mounting method according to a second embodiment of the present invention; FIG. 6B is an explanatory view of a chip mounting method according to a second embodiment of the present invention; and FIG. 6C is a second embodiment of the present invention. Of the chip mounting method

【図7】(a)本発明の第三実施例のチップの実装方法
の説明図 (b)本発明の第三実施例のチップの実装方法の説明図
7A is an explanatory diagram of a chip mounting method according to a third embodiment of the present invention. FIG. 7B is an explanatory diagram of a chip mounting method according to a third embodiment of the present invention.

【図8】(a)本発明の第三実施例のチップの実装方法
の説明図 (b)本発明の第三実施例のチップの実装方法の説明図 (c)本発明の第三実施例のチップの実装方法の説明図
8A is an explanatory diagram of a chip mounting method according to a third embodiment of the present invention; FIG. 8B is an explanatory diagram of a chip mounting method according to a third embodiment of the present invention; and FIG. 8C is a third embodiment of the present invention. Of the chip mounting method

【図9】(a)本発明の第四実施例のチップの実装方法
の説明図 (b)本発明の第四実施例のチップの実装方法の説明図 (c)本発明の第四実施例のチップの実装方法の説明図
9A is an explanatory diagram of a chip mounting method of a fourth embodiment of the present invention. FIG. 9B is an explanatory diagram of a chip mounting method of a fourth embodiment of the present invention. FIG. 9C is a fourth embodiment of the present invention. Of the chip mounting method

【図10】(a)本発明の第四実施例のチップの実装方
法の説明図 (b)本発明の第四実施例のチップの実装方法の説明図
10A is an explanatory diagram of a chip mounting method according to a fourth embodiment of the present invention. FIG. 10B is an explanatory diagram of a chip mounting method according to a fourth embodiment of the present invention.

【図11】(a)従来のチップの実装方法の説明図 (b)従来のチップの実装方法の説明図 (c)従来のチップの実装方法の説明図11A is an explanatory diagram of a conventional chip mounting method, FIG. 11B is an explanatory diagram of a conventional chip mounting method, and FIG. 11C is an explanatory diagram of a conventional chip mounting method.

【符号の説明】[Explanation of symbols]

1 チップ 2 電極 3 バンプ 4,4A プリント基板 5 ランド 10,10A 実装用治具 1 chip 2 electrode 3 bump 4, 4A printed circuit board 5 land 10, 10A mounting jig

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】プリント基板のランドにチップの電極を合
致させて実装するチップの実装用治具であって、チップ
を覆うようにチップに被蓋されてその下端部がプリント
基板の表面に固着されるカバー体から成り、且つこのカ
バー体をその内部の真空圧によって内方へ屈曲する屈曲
可能な素材により形成したことを特徴とするチップの実
装用治具。
1. A chip mounting jig for mounting a chip electrode on a land of a printed circuit board, the lower end of which is fixed to the surface of the printed circuit board so as to cover the chip. A jig for mounting a chip, characterized in that the cover body is formed of a bendable material that bends inward by a vacuum pressure inside the cover body.
【請求項2】プリント基板のランドにチップの電極を合
致させてチップをプリント基板に搭載する工程と、 前記チップを覆うカバー体から成る実装用治具を前記チ
ップに被蓋し、かつその下端部を前記プリント基板に固
着する工程と、 前記カバー体の内部を真空吸引することにより前記カバ
ー体を内方へ屈曲させて前記チップの電極を前記基板の
ランドに押し付ける工程と、 を含むことを特徴とするチップの実装方法。
2. A step of mounting a chip on a printed circuit board by matching a chip electrode with a land of the printed circuit board, and a mounting jig composed of a cover body for covering the chip, which is covered with the lower end of the mounting jig. A part of the cover body is fixed to the printed circuit board, and the inside of the cover body is vacuum-sucked to bend the cover body inward to press the electrode of the chip against the land of the substrate. Characteristic chip mounting method.
【請求項3】チップをカバー体の内部に収納する工程
と、 プリント基板のランドに前記チップの電極を合致させて
前記チップおよび前記カバー体を前記プリント基板に搭
載し、かつ前記カバー体を前記プリント基板に固着する
工程と、 前記カバー体の内部を真空吸引することにより前記カバ
ー体を内方へ屈曲させて前記チップの電極を前記基板の
ランドに押し付ける工程と、 を含むことを特徴とするチップの実装方法。
3. A step of accommodating a chip inside a cover body, and mounting the chip and the cover body on the printed circuit board by matching electrodes of the chip with lands of the printed circuit board, and the cover body A step of adhering to the printed circuit board; a step of bending the cover body inward by vacuum suction of the inside of the cover body to press the electrode of the chip against the land of the substrate. Chip mounting method.
JP8666794A 1994-04-25 1994-04-25 Jig and method for mounting chip on board Pending JPH07297231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8666794A JPH07297231A (en) 1994-04-25 1994-04-25 Jig and method for mounting chip on board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8666794A JPH07297231A (en) 1994-04-25 1994-04-25 Jig and method for mounting chip on board

Publications (1)

Publication Number Publication Date
JPH07297231A true JPH07297231A (en) 1995-11-10

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JP8666794A Pending JPH07297231A (en) 1994-04-25 1994-04-25 Jig and method for mounting chip on board

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6513236B2 (en) 2000-02-18 2003-02-04 Matsushita Electric Industrial Co., Ltd. Method of manufacturing bump-component mounted body and device for manufacturing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6513236B2 (en) 2000-02-18 2003-02-04 Matsushita Electric Industrial Co., Ltd. Method of manufacturing bump-component mounted body and device for manufacturing the same
EP1139410A3 (en) * 2000-02-18 2003-09-24 Matsushita Electric Industrial Co., Ltd. Method of manufacturing bump-component mounted body and device for manufacturing the same
KR100552095B1 (en) * 2000-02-18 2006-02-13 마쯔시다덴기산교 가부시키가이샤 Method for fabricating bump-mounted unit and apparatus for fabricating the same

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