JPH07296955A - Carbon heater - Google Patents
Carbon heaterInfo
- Publication number
- JPH07296955A JPH07296955A JP10623894A JP10623894A JPH07296955A JP H07296955 A JPH07296955 A JP H07296955A JP 10623894 A JP10623894 A JP 10623894A JP 10623894 A JP10623894 A JP 10623894A JP H07296955 A JPH07296955 A JP H07296955A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- carbon
- slits
- carbon heater
- normal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体ウェハ又は半導
体単結晶引上げ用のルツボ等を加熱する平板状又は円筒
状のカーボンヒーター。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat plate or cylindrical carbon heater for heating a semiconductor wafer or a crucible for pulling a semiconductor single crystal.
【０００２】[0002]
【従来の技術】この種のカーボンヒーターは、単に方形
状をなす平板状又は円筒状のカーボン基材の対向する面
から垂直に複数のスリットを交互に設けて、構成されて
いる。このため、スリット部分では、熱放射が行なわれ
ず、カーボン基材部との熱放射率が異なり、均熱性の確
保が難しい。2. Description of the Related Art A carbon heater of this kind is constructed by alternately providing a plurality of slits vertically from the facing surfaces of a flat plate-shaped or cylindrical carbon substrate having a rectangular shape. Therefore, heat is not radiated in the slit portion, and the heat emissivity is different from that of the carbon base material portion, so that it is difficult to ensure uniform heat distribution.
【０００３】特開平４―１６０７８８公報において、上
記熱放射率の変化を無くすために、スリット部分にＣＶ
Ｄ法により電気比抵抗がカーボン基材の１０3倍以上
で、かつ放射率が０．６５〜１．０の物質にて充填した
ヒーターが開示されている。In Japanese Patent Laid-Open No. 4-160788, in order to eliminate the change in the thermal emissivity, CV is formed in the slit portion.
According to the D method, a heater is disclosed which is filled with a substance having an electrical resistivity of 10 3 times or more that of a carbon substrate and an emissivity of 0.65 to 1.0.
【０００４】これにより、均熱性は大幅に向上するが、
充填物質と基材との熱膨張差を充分に考慮しないと、繰
り返し加熱冷却を行なった場合のクラック発生は回避で
きず、ヒーター寿命を低下させる。また、ＣＶＤ法によ
る充填のためのコストアップは大きく、適用範囲を限定
する必要が生ずる。As a result, the soaking property is greatly improved,
If the difference in thermal expansion between the filling material and the base material is not sufficiently taken into consideration, cracking cannot be avoided when heating and cooling are repeated, and the life of the heater is shortened. Further, the cost for filling by the CVD method is large, and it is necessary to limit the range of application.
【０００５】[0005]
【発明が解決しようとする課題】上記従来のカーボンヒ
ーターにおいては、スリットはカーボン基材の相対する
面に対し垂直にスリットが設けられているため、このス
リット部分からの熱放射が行なわれないため、均熱性に
欠ける問題が有り、この問題を緩和するため、ヒーター
パワーを余分に掛ける事にて見掛け上の均熱性を確保す
べく、産業上無駄な対応せざる得ないと言う問題が有
る。In the above-mentioned conventional carbon heater, since the slits are provided perpendicularly to the opposite surfaces of the carbon substrate, heat is not radiated from the slits. However, there is a problem of lack of uniform heat distribution, and in order to alleviate this problem, there is a problem in that industrial waste must be dealt with in order to secure an apparent uniform heat distribution by extra heating power.
【０００６】また、熱放射を均等にするため、ＣＶＤ法
によりＳｉＣをスリット部分を充填する場合は、その製
造コストが上がると共に、基材との物性値の整合性に配
慮しないと、その寿命が劣化するという問題がある。In addition, in the case of filling the slit portion with SiC by the CVD method in order to make the heat radiation uniform, the manufacturing cost increases, and the life is shortened unless the consistency of the physical properties with the base material is taken into consideration. There is a problem of deterioration.
【０００７】そこで、本発明は、上記問題を鑑み、均熱
性に優れ、且つ、ヒーターパワーを低減すると共に製造
コストのアップしないカーボンヒーターを提供する事を
目的とし、産業上の利用範囲を拡大する。In view of the above problems, the present invention has an object to provide a carbon heater which is excellent in thermal uniformity, reduces the heater power and does not increase the manufacturing cost, and expands the industrial application range. .
【０００８】[0008]
【課題を解決するための手段】前記課題を解決するた
め、本発明のカーボンヒーターは、スリットを交互に設
けた平板状又は円筒状のカーボンヒーターにおいて、ス
リットの角度を相対する面の垂線若しくは法線に対し、
５゜から７５゜の角度を持つように設け、見掛け上スリ
ットが無い様にしたヒーター。In order to solve the above-mentioned problems, the carbon heater of the present invention is a flat plate-shaped or cylindrical carbon heater having slits provided alternately, and a perpendicular line or a method of a plane where slit angles are opposed to each other. For the line
A heater with an apparent angle of 5 ° to 75 ° and no slits.
【０００９】カーボンヒーターとしては、従来から使用
されている黒鉛または炭素繊維強化炭素複合材（Ｃ／
Ｃ）を対象とすればよい。カーボンヒーターの厚さは、
特に、規定される事は無いが、１〜４０ｍｍが好まし
い。１ｍｍ未満であるとスリット両端の電磁作用によっ
て生じる振動に対する剛性に難を生じる。As the carbon heater, graphite or carbon fiber reinforced carbon composite material (C /
The target is C). The thickness of the carbon heater is
Although not particularly specified, it is preferably 1 to 40 mm. If it is less than 1 mm, the rigidity against vibration generated by the electromagnetic action at both ends of the slit becomes difficult.
【００１０】また、４０ｍｍ以上になると、特に、大型
のカーボンヒーターにおいては、その重量が嵩みハンド
リングに難を生ずる。If it is 40 mm or more, particularly in a large-sized carbon heater, its weight becomes heavy and handling becomes difficult.
【００１１】スリットの幅は、特に、規定されるもので
はない。しかし、本発明に適用するには、１ｍｍから３
０ｍｍが望ましい。The width of the slit is not particularly specified. However, to apply to the present invention, 1 mm to 3
0 mm is desirable.
【００１２】１ｍｍ未満の場合には放電の可能性が高ま
り、３０ｍｍ以上の場合は、本発明のスリット形状を適
用しても、充分な均熱性の確保が難しくなる。If it is less than 1 mm, the possibility of electric discharge increases, and if it is 30 mm or more, it becomes difficult to secure sufficient heat uniformity even if the slit shape of the present invention is applied.
【００１３】カーボン基材の相対する面との垂線若しく
は法線に対するスリットの角度は、カーボン基材の相対
する面の垂線方向から見通し出来ない様に、カーボン基
材の厚みおよびスリット幅に応じて決定されるが、好ま
しい範囲としては、５°〜７５°であり、より好ましい
範囲としては、３０°〜６０°である。The angle of the slit with respect to the normal line or the normal line to the facing surface of the carbon base material depends on the thickness and the slit width of the carbon base material so that it cannot be seen from the direction of the normal line of the facing surface of the carbon base material. Although it is determined, a preferable range is 5 ° to 75 °, and a more preferable range is 30 ° to 60 °.
【００１４】スリットの角度が５°以下の場合には、ス
リット幅によっては、スリットが完全に遮蔽されず、カ
ーボン基材の垂線方向から見通しがきくため、熱放射さ
れない部分が残存するため、均熱性を低下させる。When the angle of the slit is 5 ° or less, the slit is not completely shielded depending on the slit width and the line of sight from the normal direction of the carbon base material can be seen, so that there is a portion where heat is not radiated, so that the uniform heat is left. Decrease heat resistance.
【００１５】一方、スリットの角度が７５°以上の場合
は、スリットのコーナー部分の強度が確保出来ないため
カケ、クラック等の発生頻度が高くなり、ヒーター寿命
を劣化させる。また、加工上の困難さが発生し、産業上
適用は難しい。On the other hand, when the angle of the slit is 75 ° or more, the strength of the corner portion of the slit cannot be secured, so that the frequency of occurrence of chips, cracks, etc. becomes high and the life of the heater is deteriorated. In addition, processing difficulty occurs, and industrial application is difficult.
【００１６】[0016]
【作用】カーボンヒーターのスリットをカーボン基材の
相対する面の垂線若しくは法線に対し５°〜７５°の角
度を設けたため、カーボン基材とスリット部分との熱放
射の差異が極めて小さくなり、均熱性が大幅に改善され
る。Since the slits of the carbon heater are formed at an angle of 5 ° to 75 ° with respect to the normal line or the normal line of the facing surface of the carbon base material, the difference in heat radiation between the carbon base material and the slit portion becomes extremely small, Uniform heating is greatly improved.
【００１７】[0017]
【実施例】以下、本発明の実施例を図面を参照して説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【００１８】[0018]
【実施例１〜３】Ｃ／Ｃ複合材からなる厚さ５ｍｍ、２
０ｍｍ、４０ｍｍの３００ｍｍ×３００ｍｍの方形平板
状のカーボンヒーターを用い、図１に示す様に、各カー
ボンヒーター１に於ける対向する上下辺から互いに平行
な、幅５ｍｍ、長さ２７０ｍｍのスリット２を相対する
面の垂線に対し、６５°、４５°、２５°の角度にて１
５本形成すると共に、対向する左右辺に電流の入出力端
子部３ａ、３ｂを設置した。[Examples 1 to 3] 5 mm thick made of C / C composite material, 2
As shown in FIG. 1, the slits 2 having a width of 5 mm and a length of 270 mm, which are parallel to each other, are formed from the opposite upper and lower sides of each carbon heater 1, as shown in FIG. 1 at an angle of 65 °, 45 °, 25 ° with respect to the perpendicular of the facing surface
Five pieces were formed, and the current input / output terminal portions 3a and 3b were installed on the opposite left and right sides.
【００１９】[0019]
【比較例１〜３】Ｃ／Ｃ複合材からなる厚さ５ｍｍ、２
０ｍｍ、４０ｍｍの３００ｍｍ×３００ｍｍの方形平板
状のカーボンヒーターを用い、各カーボンヒーターに於
ける対向する上下辺から互いに平行する、幅５ｍｍ、長
さ２７０ｍｍのスリットを相対する面の垂線に対し、０
°、８０°、３°の角度にて１５本形成すると共に、対
向する左右辺に電流の入出力端子部を設置した。[Comparative Examples 1 to 3] C / C composite material having a thickness of 5 mm, 2
Using 0 mm and 40 mm 300 mm × 300 mm rectangular flat plate carbon heaters, the slits having a width of 5 mm and a length of 270 mm, which are parallel to each other from the upper and lower sides facing each other in each carbon heater, are set to 0.
Fifteen electrodes were formed at angles of 80 °, 3 °, and current input / output terminal portions were installed on the opposite left and right sides.
【００２０】カーボンヒーターの均熱性を評価するため
に、熱電対を埋め込んだ単結晶ウェハをサセプターに戴
置し、不活性ガス雰囲気中で、サセプターの下面からカ
ーボンヒーターにより加熱し、ウェハの中心部が１００
０℃に制御した場合のウェハ面内の温度分布の変動を測
定した。In order to evaluate the soaking property of the carbon heater, a single crystal wafer having a thermocouple embedded therein is placed on a susceptor and heated from the lower surface of the susceptor by a carbon heater in an inert gas atmosphere, and the central portion of the wafer is heated. Is 100
The fluctuation of the temperature distribution in the wafer surface when controlled at 0 ° C. was measured.
【００２１】測定位置は、図２に示すウェハ同心円上の
１７ヵ所とした、測定結果を第１表に示す。The measurement positions were set at 17 points on the wafer concentric circle shown in FIG. 2, and the measurement results are shown in Table 1.
【００２２】[0022]
【表１】 [Table 1]
【００２３】中心部との温度差は小さく、バラツキが大
幅に低減され、均熱性が大幅に改善された。The temperature difference from the center is small, the variation is greatly reduced, and the soaking property is greatly improved.
【００２４】なお、カーボンヒーターは、方形板状のも
のに限定されず、例えば、図３に示すように、円板状の
カーボンヒーターに螺旋状にスリットを形成すると共
に、中心部と外周端部とに電流の入出力端子を形成し、
実施例１〜３と同様に相対する面の垂線に対し、６５
°、４５°、２５°の角度にてスリットを形成した。こ
の場合も、同様の効果作用が得られ、均熱性が大幅に向
上した。The carbon heater is not limited to a rectangular plate-shaped one, and for example, as shown in FIG. 3, a circular slit is formed in a disk-shaped carbon heater, and a central portion and an outer peripheral end portion are formed. Form the current input and output terminals at,
As with the first to third embodiments, with respect to the perpendicular line of the facing surface, 65
Slits were formed at angles of 45 ° and 25 °. Also in this case, the same effect and action were obtained, and the soaking property was significantly improved.
【００２５】[0025]
【実施例４】ＣＩＰ法による等方性黒鉛からなる内径５
７０ｍｍ、高さ５５０ｍｍ、厚み１０ｍｍの円筒形のカ
ーボンヒーター８に於ける対向する上下端から複数のス
リットを交互に形成した。[Example 4] Inner diameter 5 made of isotropic graphite by CIP method
A plurality of slits were alternately formed from the upper and lower ends facing each other in the cylindrical carbon heater 8 having a size of 70 mm, a height of 550 mm and a thickness of 10 mm.
【００２６】図４に於いては、スリットの法線に対する
角度は４５°、スリットの幅は１０ｍｍ、長さは５００
ｍｍ、本数は１６本とした。In FIG. 4, the angle of the slit with respect to the normal is 45 °, the width of the slit is 10 mm, and the length is 500.
mm, and the number was 16.
【００２７】カーボンヒーター８の下端部を適宜に切り
欠き、電流の入出力端子部９ａ、９ｂを形成した。The lower end of the carbon heater 8 was appropriately cut out to form current input / output terminal portions 9a and 9b.
【００２８】[0028]
【比較例４】ＣＩＰ法による等方性黒鉛からなる実施例
４と同形状の円筒形のカーボンヒーターに同様に入出力
端子部を形成すると共に、法線に対する角度を３°とし
たスリットを形成した。[Comparative Example 4] An input / output terminal portion was similarly formed on a cylindrical carbon heater having the same shape as that of Example 4 made of isotropic graphite by the CIP method, and a slit whose angle to the normal line was 3 ° was formed. did.
【００２９】[0029]
【比較例５】ＣＩＰ法による等方性黒鉛からなる実施例
４と同形状の円筒形のカーボンヒーターに同様に入出力
端子部を形成すると共に、従来通りの平行したスリット
を形成した（法線に対する角度は０°）。[Comparative Example 5] Input / output terminal portions were similarly formed on a cylindrical carbon heater having the same shape as that of Example 4 made of isotropic graphite by the CIP method, and parallel slits were formed as usual (normal line). Is 0 °).
【００３０】カーボンヒーターの均熱性を評価するため
に、上記実施例４、比較例４、５をそれぞれ用い、単結
晶引上げ炉にてルツボ内に原料を挿入した後、溶解し
た。In order to evaluate the soaking property of the carbon heater, the raw materials were inserted into the crucible in the single crystal pulling furnace and melted after using the above-mentioned Examples 4 and Comparative Examples 4 and 5, respectively.
【００３１】溶解時の電力消費量と時間を比較した後、
結晶を引上げた。３０回繰り返し行なった結果を、第２
表に示す。After comparing the power consumption during melting with the time,
The crystal was pulled up. The result of repeating 30 times is the second
Shown in the table.
【００３２】また、溶解後、融液に熱電対を浸漬し、る
つぼ内直径の１／２位置の円周方向８点の温度差を測定
した。測定結果を第２表に示す。After the melting, a thermocouple was immersed in the melt, and the temperature difference was measured at 8 points in the circumferential direction at the 1/2 position of the inner diameter of the crucible. The measurement results are shown in Table 2.
【００３３】[0033]
【表２】 [Table 2]
【００３４】[0034]
【表３】 [Table 3]
【００３５】メルト内の温度分布は、バラツキが大幅に
低減され、均熱性が確保された。The variation in the temperature distribution in the melt was greatly reduced, and the heat uniformity was secured.
【００３６】また、単結晶の引上成功率は大幅に増大
し、消費電力が低減し、コスト低減が図れる。Further, the success rate of pulling a single crystal is significantly increased, power consumption is reduced, and cost can be reduced.
【００３７】[0037]
【発明の効果】以上の様に本発明によれば、カーボンヒ
ーターのスリットの角度を相対する面の垂線若しくは法
線に対し、５°から７５°の角度を持つように設け、見
掛け上スリットが無い様にしたヒーターである。As described above, according to the present invention, the slits of the carbon heater are provided so as to form an angle of 5 ° to 75 ° with respect to the normal or the normal of the opposing surfaces, and the slits are apparently formed. It is a heater that has been removed.
【００３８】このため、スリット部分とヒーター基板と
の熱放射に差異が無くなり、均熱性を大幅に向上するこ
とができる。Therefore, there is no difference in heat radiation between the slit portion and the heater substrate, and the soaking property can be greatly improved.
【００３９】このため、消費電力の大幅な削減が可能と
成ると共に、単結晶の収率の向上が図れる。産業上のメ
リットは大きい。Therefore, the power consumption can be greatly reduced and the yield of the single crystal can be improved. The industrial advantages are great.
【図１】本発明の一実施例を示すカーボンヒーターの平
面図。FIG. 1 is a plan view of a carbon heater showing an embodiment of the present invention.
【図２】本発明カーボンヒーターを用いて加熱した単結
晶ウェハの温度測定位置を示す図。FIG. 2 is a view showing a temperature measurement position of a single crystal wafer heated by using the carbon heater of the present invention.
【図３】本発明の一実施例を示すカーボンヒーターの平
面図。FIG. 3 is a plan view of a carbon heater showing an embodiment of the present invention.
【図４】本発明の一実施例を示すカーボンヒーターの斜
視図。FIG. 4 is a perspective view of a carbon heater showing an embodiment of the present invention.
【図５】本発明の一実施例を示すカーボンヒーターの断
面図。FIG. 5 is a sectional view of a carbon heater showing an embodiment of the present invention.
１ カーボン発熱体 ２ スリット ３ａ 入出力端子 ３ｂ 入出力端子 ４ 相対する面の垂線 ５ カーボン発熱体 ６ スリット ７ａ 入出力端子 ７ｂ 入出力端子 ８ カーボン発熱体 ９ スリット １０ａ 入出力端子 １０ｂ 入出力端子 １１ 法線 1 Carbon heating element 2 Slit 3a Input / output terminal 3b Input / output terminal 4 Perpendicular line of opposing surface 5 Carbon heating element 6 Slit 7a Input / output terminal 7b Input / output terminal 8 Carbon heating element 9 Slit 10a Input / output terminal 10b Input / output terminal 11 Method line
Claims (1)
状のカーボンヒーターにおいて、スリットが、相対する
面の垂線若しくは法線に対して５°から７５°傾斜した
ことを特徴としたカーボンヒーター 。1. A flat plate or cylinder having slits provided alternately.
-Shaped carbon heater has slits facing each other
Inclined 5 ° to 75 ° with respect to the normal or normal of the surface
A carbon heater characterized by .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10623894A JPH07296955A (en) | 1994-04-22 | 1994-04-22 | Carbon heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10623894A JPH07296955A (en) | 1994-04-22 | 1994-04-22 | Carbon heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07296955A true JPH07296955A (en) | 1995-11-10 |
Family
ID=14428546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10623894A Pending JPH07296955A (en) | 1994-04-22 | 1994-04-22 | Carbon heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07296955A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6501056B1 (en) | 1998-04-28 | 2002-12-31 | E. Tec Corporation | Carbon heating element and method of manufacturing the same |
| JP2003142237A (en) * | 2001-11-05 | 2003-05-16 | Sukegawa Electric Co Ltd | Carbon heater unit |
| JP2006049088A (en) * | 2004-08-04 | 2006-02-16 | Metro Denki Kogyo Kk | Carbonaceous heating element and infrared heater using same |
| JP2009081185A (en) * | 2007-09-25 | 2009-04-16 | Nuflare Technology Inc | Vapor deposition apparatus and vapor deposition method |
| JP2011232029A (en) * | 2009-04-07 | 2011-11-17 | Yoshinobu Abe | Heating apparatus |
| WO2013020621A3 (en) * | 2011-08-05 | 2013-07-18 | Heraeus Noblelight Gmbh | Electrically conductive material and radiator comprising electrically conductive material and also process for the production thereof |
| US9161392B2 (en) | 2009-04-07 | 2015-10-13 | Yoshinobu ANBE | Heating apparatus for X-ray inspection |
| JP2017103190A (en) * | 2015-12-04 | 2017-06-08 | 信越化学工業株式会社 | Carbon heater and method of manufacturing carbon heater |
-
1994
- 1994-04-22 JP JP10623894A patent/JPH07296955A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6501056B1 (en) | 1998-04-28 | 2002-12-31 | E. Tec Corporation | Carbon heating element and method of manufacturing the same |
| JP2003142237A (en) * | 2001-11-05 | 2003-05-16 | Sukegawa Electric Co Ltd | Carbon heater unit |
| JP2006049088A (en) * | 2004-08-04 | 2006-02-16 | Metro Denki Kogyo Kk | Carbonaceous heating element and infrared heater using same |
| JP2009081185A (en) * | 2007-09-25 | 2009-04-16 | Nuflare Technology Inc | Vapor deposition apparatus and vapor deposition method |
| JP2011232029A (en) * | 2009-04-07 | 2011-11-17 | Yoshinobu Abe | Heating apparatus |
| US9161392B2 (en) | 2009-04-07 | 2015-10-13 | Yoshinobu ANBE | Heating apparatus for X-ray inspection |
| WO2013020621A3 (en) * | 2011-08-05 | 2013-07-18 | Heraeus Noblelight Gmbh | Electrically conductive material and radiator comprising electrically conductive material and also process for the production thereof |
| JP2017103190A (en) * | 2015-12-04 | 2017-06-08 | 信越化学工業株式会社 | Carbon heater and method of manufacturing carbon heater |
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