JPH072501A - High-voltage electrode structure of ozone generator - Google Patents
High-voltage electrode structure of ozone generatorInfo
- Publication number
- JPH072501A JPH072501A JP16947993A JP16947993A JPH072501A JP H072501 A JPH072501 A JP H072501A JP 16947993 A JP16947993 A JP 16947993A JP 16947993 A JP16947993 A JP 16947993A JP H072501 A JPH072501 A JP H072501A
- Authority
- JP
- Japan
- Prior art keywords
- voltage electrode
- electrode
- dielectric
- ozone generator
- coat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、水処理や屎尿処理等に
利用される無声放電式のオゾン発生装置の高電圧電極構
造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high voltage electrode structure of a silent discharge type ozone generator used for water treatment, human waste treatment and the like.
【０００２】[0002]
【従来の技術】オゾンは極めて強い酸化力を有し、水の
殺菌、脱臭、脱色等の上下水処理や屎尿処理及び食品関
連における殺菌などの多くの用途に使われている。オゾ
ンの生成法には、紫外線照射法、放射線照射法、プラズ
マ放電法、無声放電法及び水の電気分解法等があるが、
工業的には無声放電法が主体である。図２に無声放電法
によるオゾン発生装置の原理を示す。図２において高電
圧電極１と接地電極２は、両者間に空隙部３が形成され
るように誘電体４を介在させて並設されている。両電極
１，２間に例えばＡＣ電圧を印加して空隙部３で無声放
電を発生させ原料となるガス（乾燥空気もしくは酸素）
をこの空隙部３に通すことによりオゾンを発生させてい
る。2. Description of the Related Art Ozone has an extremely strong oxidizing power and is used for many purposes such as water and sewage treatment such as water sterilization, deodorization and decolorization, human waste treatment and food related sterilization. The ozone generation method includes an ultraviolet irradiation method, a radiation irradiation method, a plasma discharge method, a silent discharge method, and a water electrolysis method.
The silent discharge method is mainly used industrially. FIG. 2 shows the principle of an ozone generator using the silent discharge method. In FIG. 2, the high voltage electrode 1 and the ground electrode 2 are arranged side by side with a dielectric 4 interposed so that a void 3 is formed therebetween. A gas as a raw material (dry air or oxygen) by applying an AC voltage between the electrodes 1 and 2 to generate a silent discharge in the void 3
Ozone is generated by passing the gas through the voids 3.
【０００３】オゾンＯ3の理論収率は、 Ｏ2→Ｏ＋Ｏ−１１８Ｋｃａｌ（吸熱反応） Ｏ＋Ｏ2→Ｏ3＋２５Ｋｃａｌ（発熱反応） より、 ３Ｏ2→２Ｏ3−６８Ｋｃａｌ となり、Ｏ3を１ｍｏｌ生成するために３４Ｋｃａｌ必
要となる。従って理論上の収率は１．２ｋｇＯ3／ＫＷ
ｈとなる。しかし、消費電力に対するオゾンの生成効率
は理論収率に比べて極めて低く数％に過ぎず、残りの９
０数％の電力は熱となってオゾン生成に寄与していない
というのがオゾン発生装置の現状である。The theoretical yield of ozone O 3 is O 2 → O + O-118 Kcal (endothermic reaction) O + O 2 → O 3 +25 Kcal (exothermic reaction), resulting in 3O 2 → 2O 3 -68 Kcal, and 1 mol of O 3 is produced. 34 Kcal is required. Therefore, the theoretical yield is 1.2 kgO 3 / KW
h. However, the ozone generation efficiency with respect to the power consumption is extremely low compared to the theoretical yield and is only a few percent, and the remaining 9
The current state of the ozone generator is that 0% or less of electric power does not contribute to ozone generation as heat.
【０００４】[0004]
【発明が解決しようとする課題】オゾンの生成量に影響
を及ぼす主な因子としては、電極の形状、電極間ギャッ
プの大きさ、誘電体の形状及び材質、電極の冷却方法、
原料ガスの除湿や冷却方法、印加電圧の波形等が挙げら
れる。The main factors affecting the amount of ozone produced are the shape of the electrodes, the size of the gap between the electrodes, the shape and material of the dielectric, the cooling method of the electrodes,
Examples of the method include dehumidifying and cooling the source gas, and the waveform of the applied voltage.
【０００５】現在のオゾン発生装置は図２で示したよう
に、電極間に空隙が形成されるように誘電体を介在させ
て、その空隙部分で放電を起こさせる無声放電を応用す
る構造などが主となっている。安定な無声放電を発生さ
せるためには電極間ギャップ長を数ｍｍ以下にするとと
もにギャップ長を均一にして、放電をギャップ部分で一
様に発生させる必要がある。実際のオゾン発生装置の電
極部分の構造の一例を図１に示す。As shown in FIG. 2, the present ozone generator has a structure in which a dielectric is interposed so that a gap is formed between electrodes and a silent discharge is applied to cause a discharge in the gap. Has become the main. In order to generate a stable silent discharge, it is necessary to make the inter-electrode gap length several millimeters or less and make the gap length uniform so that the discharge can be generated uniformly in the gap portion. FIG. 1 shows an example of the structure of the electrode portion of an actual ozone generator.
【０００６】図１において（ａ）は放電管の断面、
（ｂ）は誘電体管の構造を示している。１４は一端が閉
塞され他端が解放された円筒の誘電体管であり、例えば
ガラス管で構造されている。誘電体管１４の内壁面には
高電圧電極１が設けられている。誘電体管１４の同心円
外周には空隙部（無声放電部）３を介して接地電極２が
並設されている。５は高電圧電極１と接地電極２の間に
所定の高電圧を印加する高電圧電源である。In FIG. 1, (a) is a cross section of the discharge tube,
(B) shows the structure of the dielectric tube. Reference numeral 14 is a cylindrical dielectric tube whose one end is closed and the other end is open, and is constituted by, for example, a glass tube. The high voltage electrode 1 is provided on the inner wall surface of the dielectric tube 14. A ground electrode 2 is arranged in parallel on the outer circumference of a concentric circle of the dielectric tube 14 with a void portion (silent discharge portion) 3 interposed therebetween. A high voltage power source 5 applies a predetermined high voltage between the high voltage electrode 1 and the ground electrode 2.
【０００７】図１の構造において、放電を安定且つ一様
に発生させるためには、高圧電極となる誘電体管１４の
内側に設ける高電圧電極１の信頼性が重要となる。図１
のようなオゾン放電管の高電圧電極膜作製には、一般に
カーボンの混入した塗料を塗布したり、アルミ粉末を溶
射したりする方法が用いられている。In the structure of FIG. 1, in order to stably and uniformly generate a discharge, the reliability of the high voltage electrode 1 provided inside the dielectric tube 14 which is a high voltage electrode is important. Figure 1
For producing a high-voltage electrode film for such an ozone discharge tube, a method of applying a coating material mixed with carbon or spraying an aluminum powder is generally used.
【０００８】これらの電極被膜は乾燥した原料空気ガス
が接触している時は問題はないが、湿った外気と接触す
ると、電極被膜の劣化が起こる。すなわち放電によって
窒素分子Ｎ2から励起された窒素分子Ｎ2＊（活性種）が
発生し、Ｎ2Ｏ，ＮＯ………などの窒素酸化物が生成さ
れる。その中でもＮ2Ｏ5は液体となり、装置の運転停止
時にタンクの扉を開けたときなどに侵入してくる湿った
外気の中の水分と反応して硝酸ができてしまう。この硝
酸がアルミの溶射被膜電極に付着するとアルミが腐食さ
れて高電圧電極被膜の劣化が起こり、最終的にガラス放
電管が破壊に至ってしまうという問題点がある。These electrode coatings are not a problem when they are in contact with dry raw air gas, but when they are in contact with moist outside air, the electrode coatings are deteriorated. That discharge nitrogen molecules N 2 nitrogen molecules excited from N 2 * (active species) is generated by, N 2 O, nitrogen oxides such as NO ......... is generated. Among them, N 2 O 5 becomes liquid, and nitric acid is produced by reacting with moisture in the moist outside air that enters when the door of the tank is opened when the apparatus is stopped. When this nitric acid adheres to the sprayed aluminum electrode, the aluminum is corroded, the high-voltage electrode coating deteriorates, and finally the glass discharge tube is destroyed.
【０００９】本発明は上記の点に鑑みてなされたもので
その目的は、誘電体管との密着性を損なうことなく耐腐
食性に優れたオゾン発生装置の高電圧電極構造を提供す
ることにある。The present invention has been made in view of the above points, and an object thereof is to provide a high-voltage electrode structure for an ozone generator which is excellent in corrosion resistance without impairing the adhesion with the dielectric tube. is there.
【００１０】[0010]
【課題を解決するための手段】本発明は、高電圧電極が
設けられた誘電体と、該誘電体に空隙部を介して対向配
設された接地電極とを備え、前記高電圧電極と接地電極
間に電圧を印加して前記空隙部内に流通させた原料ガス
中にオゾンを発生させる無声放電式のオゾン発生装置に
おいて、（１）前記誘電体にアルミ被膜を溶射して高電
圧電極を形成した後、該高電圧電極上にＮｉ−Ｃｒ被膜
を所定の手段（例えば溶射）によって形成したことを特
徴とし、（２）前記誘電体にアルミ被膜を溶射して高電
圧電極を形成した後、該高電圧電極上にクロム被膜を所
定の手段（例えばメッキ処理）によって形成したことを
特徴としている。SUMMARY OF THE INVENTION The present invention comprises a dielectric provided with a high voltage electrode, and a grounding electrode facing the dielectric with a gap therebetween, and the high voltage electrode is grounded. In a silent discharge type ozone generator that applies a voltage between electrodes to generate ozone in a raw material gas that has been circulated in the void, (1) spraying an aluminum coating on the dielectric to form a high voltage electrode After that, a Ni-Cr coating is formed on the high-voltage electrode by a predetermined means (for example, thermal spraying). (2) After the aluminum coating is sprayed on the dielectric to form the high-voltage electrode, It is characterized in that a chromium film is formed on the high-voltage electrode by a predetermined means (for example, plating treatment).
【００１１】[0011]
（１）高電圧電極上にＮｉ−Ｃｒ被膜を形成しているの
で、誘電体に用いられるガラス管との密着性が良いアル
ミ溶射被膜は直接硝酸と接触することはない。Ｎｉ−Ｃ
ｒは耐オゾン性や耐硝酸性などの耐腐食性に優れてい
る。このため誘電体との密着性をアルミ溶射被膜で保持
しつつ、耐腐食性に優れた高電圧電極を形成することが
できる。(1) Since the Ni-Cr coating is formed on the high-voltage electrode, the aluminum spray coating having good adhesion to the glass tube used for the dielectric does not come into direct contact with nitric acid. Ni-C
r is excellent in corrosion resistance such as ozone resistance and nitric acid resistance. Therefore, it is possible to form a high voltage electrode having excellent corrosion resistance while maintaining the adhesion to the dielectric with the aluminum sprayed coating.
【００１２】（２）高電圧電極上にクロム被膜を形成し
ているので、誘電体に用いられるガラス管との密着性が
良いアルミ溶射被膜は直接硝酸と接触することはない。
クロムは耐オゾン性や耐硝酸性などの耐腐食性に優れて
いる。このため誘電体との密着性をアルミ溶射被膜で保
持しつつ、耐腐食性に優れた高電圧電極を形成すること
ができる。(2) Since the chrome coating is formed on the high-voltage electrode, the aluminum sprayed coating having good adhesion to the glass tube used for the dielectric does not come into direct contact with nitric acid.
Chromium has excellent corrosion resistance such as ozone resistance and nitric acid resistance. Therefore, it is possible to form a high voltage electrode having excellent corrosion resistance while maintaining the adhesion to the dielectric with the aluminum sprayed coating.
【００１３】[0013]
【実施例】以下図面を参照しながら本発明の一実施例を
説明する。本発明では前述の問題点を解決するために誘
電体に用いられるガラス管との密着性が良いアルミ溶射
被膜が直接硝酸と接触しないような構造を採用した。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. In order to solve the above-mentioned problems, the present invention employs a structure in which the aluminum sprayed coating having good adhesion to the glass tube used for the dielectric does not come into direct contact with nitric acid.
【００１４】すなわち請求項１、２に記載の発明では、
耐オゾン性や耐硝酸性などの耐腐食性に優れたＮｉ−Ｃ
ｒを図１（ｂ）に示すアルミ溶射被膜の高電圧電極１の
上から溶射する。Ｎｉ−Ｃｒの溶射条件は次のとおりで
ある。That is, in the invention described in claims 1 and 2,
Ni-C with excellent corrosion resistance such as ozone resistance and nitric acid resistance
r is sprayed from above the high voltage electrode 1 of the aluminum sprayed coating shown in FIG. 1 (b). The Ni-Cr thermal spraying conditions are as follows.
【００１５】Ｎｉ−Ｃｒ粒子の粒度分布…４４μｍ以下 Ｎｉ−Ｃｒの溶射厚さ…５０μｍ程度 これにより下地のガラス管との密着性をアルミ溶射被膜
で保持しつつ、Ｎｉ−Ｃｒ溶射被膜により、耐腐食性に
も優れた高電圧電極を形成することができるようになっ
た。尚Ｎｉ−Ｃｒを直接ガラスに溶射した場合、アルミ
ほど被膜の密着性は良くない。Particle size distribution of Ni-Cr particles: 44 μm or less Ni-Cr sprayed thickness: about 50 μm As a result, the adhesion to the underlying glass tube is maintained by the aluminum sprayed coating, while the Ni-Cr sprayed coating provides resistance. It has become possible to form high-voltage electrodes with excellent corrosiveness. When Ni-Cr is directly sprayed on glass, the adhesion of the coating is not as good as that of aluminum.
【００１６】また請求項３、４に記載の発明では、耐オ
ゾン性や耐硝酸性などの耐腐食性に優れたクロムを図１
（ｂ）に示すアルミ溶射被膜の高電圧電極１の上からメ
ッキ処理する。クロムのメッキ処理条件は次のとおりで
ある。Further, in the invention described in claims 3 and 4, chromium which is excellent in corrosion resistance such as ozone resistance and nitric acid resistance is used.
A plating treatment is performed on the high voltage electrode 1 having the aluminum sprayed coating shown in FIG. The chromium plating treatment conditions are as follows.
【００１７】エッチャント…無水クロム酸２５０ｇ／
ｌ、硫酸１．５ｇ／ｌ、けいふっ酸５ｇ／ｌ 浴温…５０℃ 電流密度…５０Ａ／ｄｍ2 めっき時間 ３〜４ｍｉｎ これにより下地のガラス管との密着性をアルミ溶射被膜
で保持しつつ、クロムメッキ被膜により、耐腐食性にも
優れた高電圧電極を形成することができるようになっ
た。Etchant: Chromic anhydride 250 g /
1, sulfuric acid 1.5 g / l, silicofluoric acid 5 g / l Bath temperature ... 50 ° C. Current density ... 50 A / dm 2 Plating time 3-4 min As a result, adhesion to the underlying glass tube is maintained by the aluminum sprayed coating. The chrome-plated coating has made it possible to form high-voltage electrodes with excellent corrosion resistance.
【００１８】[0018]
【発明の効果】以上のように請求項１、２に記載の発明
によれば、誘電体にアルミ被膜を溶射して高電圧電極を
形成した後、該高電圧電極上にＮｉ−Ｃｒ被膜を溶射に
よって形成したので、次のような優れた効果が得られ
る。 （１）従来のアルミ溶射被膜電極上にＮｉ−Ｃｒ溶射被
膜を施すことにより、耐オゾン性や耐硝酸性などの耐腐
食性を向上することができた。As described above, according to the first and second aspects of the present invention, after a high voltage electrode is formed by spraying an aluminum film on the dielectric, a Ni-Cr film is formed on the high voltage electrode. Since it is formed by thermal spraying, the following excellent effects can be obtained. (1) By applying a Ni-Cr sprayed coating on a conventional aluminum sprayed coating electrode, it was possible to improve corrosion resistance such as ozone resistance and nitric acid resistance.
【００１９】また請求項３、４に記載の発明によれば、
誘電体にアルミ被膜を溶射して高電圧電極を形成した
後、該高電圧電極上にクロム被膜をメッキ処理によって
形成したので、次のような優れた効果が得られる。 （２）従来のアルミ溶射被膜電極上にクロムメッキ処理
を施すことにより、耐オゾン性や耐硝酸性などの耐腐食
性を向上することができた。According to the invention described in claims 3 and 4,
Since the aluminum film is sprayed on the dielectric to form the high-voltage electrode, and the chromium film is formed on the high-voltage electrode by plating, the following excellent effects can be obtained. (2) By subjecting a conventional aluminum sprayed coating electrode to chromium plating, it was possible to improve corrosion resistance such as ozone resistance and nitric acid resistance.
【００２０】さらに請求項１、２、３、４に記載の発明
によれば次のような優れた効果が得られる。 （３）本発明の高電圧電極と下地の誘電体管（例えばガ
ラス管）とはアルミ溶射膜で接触しており、密着性が良
い。この密着性を損なうことなく、耐腐食性にも優れた
オゾン発生用の放電電極を製作できるようになった。 （４）誘電体管の高圧電極部の信頼性が向上したため、
大容量のオゾン発生装置を安全に運転でき、オゾン化ガ
スを安定に供給することができるようになった。Further, according to the invention described in claims 1, 2, 3, and 4, the following excellent effects can be obtained. (3) The high voltage electrode of the present invention and the underlying dielectric tube (for example, glass tube) are in contact with each other by an aluminum sprayed film, and have good adhesion. It has become possible to manufacture a discharge electrode for ozone generation having excellent corrosion resistance without impairing this adhesion. (4) Since the reliability of the high voltage electrode part of the dielectric tube is improved,
It is now possible to safely operate a large capacity ozone generator and to stably supply ozonized gas.
【図１】本発明のオゾン発生装置で用いる放電管の概略
を示し、（ａ）は放電管断面図、（ｂ）は誘電体管構造
図。FIG. 1 is a schematic view of a discharge tube used in an ozone generator of the present invention, (a) is a discharge tube cross-sectional view, and (b) is a dielectric tube structure diagram.
【図２】無声放電法によるオゾン生成の原理を示す説明
図。FIG. 2 is an explanatory diagram showing the principle of ozone generation by the silent discharge method.
１…高電圧電極 ２…接地電極 ３…空隙部 ４…誘電体 ５…高電圧電源 １４…誘電体管 DESCRIPTION OF SYMBOLS 1 ... High-voltage electrode 2 ... Ground electrode 3 ... Void part 4 ... Dielectric 5 ... High-voltage power supply 14 ... Dielectric tube
Claims (4)
電体に空隙部を介して対向配設された接地電極とを備
え、前記高電圧電極と接地電極間に電圧を印加して前記
空隙部内に流通させた原料ガス中にオゾンを発生させる
無声放電式のオゾン発生装置において、 前記誘電体にアルミ被膜を溶射して高電圧電極を形成し
た後、該高電圧電極上にＮｉ−Ｃｒ被膜を所定の手段に
よって形成したことを特徴とするオゾン発生装置の高電
圧電極構造。1. A dielectric provided with a high-voltage electrode, and a ground electrode facing the dielectric with a gap therebetween, and a voltage is applied between the high-voltage electrode and the ground electrode. In a silent discharge type ozone generator for generating ozone in a raw material gas circulated in the void, a high voltage electrode is formed by spraying an aluminum coating on the dielectric, and then Ni- is formed on the high voltage electrode. A high-voltage electrode structure for an ozone generator, characterized in that a Cr film is formed by a predetermined means.
ことを特徴とする請求項１に記載のオゾン発生装置の高
電圧電極構造。2. The high voltage electrode structure for an ozone generator according to claim 1, wherein the predetermined means is spraying.
電体に空隙部を介して対向配設された接地電極とを備
え、前記高電圧電極と接地電極間に電圧を印加して前記
空隙部内に流通させた原料ガス中にオゾンを発生させる
無声放電式のオゾン発生装置において、 前記誘電体にアルミ被膜を溶射して高電圧電極を形成し
た後、該高電圧電極上にクロム被膜を所定の手段によっ
て形成したことを特徴とするオゾン発生装置の高電圧電
極構造。3. A dielectric provided with a high-voltage electrode, and a ground electrode facing the dielectric with a gap therebetween, and a voltage is applied between the high-voltage electrode and the ground electrode. In a silent discharge type ozone generator for generating ozone in a raw material gas circulated in the void, a high voltage electrode is formed by spraying an aluminum film on the dielectric, and then a chromium film is formed on the high voltage electrode. A high-voltage electrode structure for an ozone generator, characterized in that it is formed by a predetermined means.
であることを特徴とする請求項３に記載のオゾン発生装
置の高電圧電極構造。4. The high voltage electrode structure for an ozone generator according to claim 3, wherein the predetermined means is a plating process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16947993A JP3339114B2 (en) | 1993-04-23 | 1993-07-09 | High voltage electrode structure of ozone generator |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5-97315 | 1993-04-23 | ||
| JP9731593 | 1993-04-23 | ||
| JP16947993A JP3339114B2 (en) | 1993-04-23 | 1993-07-09 | High voltage electrode structure of ozone generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH072501A true JPH072501A (en) | 1995-01-06 |
| JP3339114B2 JP3339114B2 (en) | 2002-10-28 |
Family
ID=26438504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16947993A Expired - Fee Related JP3339114B2 (en) | 1993-04-23 | 1993-07-09 | High voltage electrode structure of ozone generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3339114B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007169134A (en) * | 2005-12-26 | 2007-07-05 | Toshiba Corp | Ozonizer |
| US7922979B2 (en) | 2005-03-28 | 2011-04-12 | Mitsubishi Denki Kabushiki Kaisha | Silent discharge plasma apparatus |
| JP7203295B1 (en) * | 2022-04-15 | 2023-01-12 | 三菱電機株式会社 | Discharge device manufacturing method and discharge device |
-
1993
- 1993-07-09 JP JP16947993A patent/JP3339114B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7922979B2 (en) | 2005-03-28 | 2011-04-12 | Mitsubishi Denki Kabushiki Kaisha | Silent discharge plasma apparatus |
| JP2007169134A (en) * | 2005-12-26 | 2007-07-05 | Toshiba Corp | Ozonizer |
| JP4634928B2 (en) * | 2005-12-26 | 2011-02-16 | 株式会社東芝 | Ozone generator |
| JP7203295B1 (en) * | 2022-04-15 | 2023-01-12 | 三菱電機株式会社 | Discharge device manufacturing method and discharge device |
| WO2023199504A1 (en) * | 2022-04-15 | 2023-10-19 | 三菱電機株式会社 | Method for manufacturing discharge device, and discharge device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3339114B2 (en) | 2002-10-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2531772B2 (en) | Ozone generator | |
| CA2222620A1 (en) | Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure | |
| JPS61275107A (en) | Ozonator | |
| US3996474A (en) | Corona generator apparatus | |
| JP4292002B2 (en) | Plasma processing equipment | |
| JPH072501A (en) | High-voltage electrode structure of ozone generator | |
| Gou et al. | Enhancing ozone production in dielectric barrier discharge utilizing water as electrode | |
| Monge et al. | Optimization of a corona wire‐to‐cylinder ozone generator. Comparison with economical criteria. part i: Oxygen | |
| Zhang et al. | An ozone generator of miniaturization and modularization with the narrow discharge gap | |
| JPH07242403A (en) | Ozonizer | |
| JP2549598B2 (en) | Ozone generator | |
| Held et al. | Analytic calculations of ozone concentration in an oxygen-fed wire-to-cylinder ozonizer and comparison with the Vasil'ev relation | |
| Yulianto et al. | Comparison of ozone production by DBDP reactors: difference external electrodes | |
| Koide et al. | A novel low temperature plasma generator with alumina coated electrode for open air material processing | |
| Fitria et al. | The Effects of Different Electrode Holes on Ozone Generation | |
| JP3417037B2 (en) | Ozone generator | |
| JPH0741304A (en) | Ozone generator | |
| JPS63291803A (en) | Ozone generator | |
| JPH08290901A (en) | Ozonizer | |
| JPH0733405A (en) | Ozone generator | |
| Zhang et al. | A cost-and time-saving strategy of spraying TiO2 self-cleaning coatings in tubular substrates by air cold plasma | |
| JPH08185999A (en) | Discharge chemical reactor | |
| RU2056343C1 (en) | Ozonizer | |
| CN221217164U (en) | Ozone generator | |
| Kaiga et al. | Corrosion resistance of ozone generator electrode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20070816 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 6 Free format text: PAYMENT UNTIL: 20080816 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080816 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 7 Free format text: PAYMENT UNTIL: 20090816 |
|
| LAPS | Cancellation because of no payment of annual fees |