JPH07244216A - Transmission wavelength variable interference filter - Google Patents

Transmission wavelength variable interference filter

Info

Publication number
JPH07244216A
JPH07244216A JP6035623A JP3562394A JPH07244216A JP H07244216 A JPH07244216 A JP H07244216A JP 6035623 A JP6035623 A JP 6035623A JP 3562394 A JP3562394 A JP 3562394A JP H07244216 A JPH07244216 A JP H07244216A
Authority
JP
Japan
Prior art keywords
interference filter
spacer layer
refractive index
transmission wavelength
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6035623A
Other languages
Japanese (ja)
Inventor
Mikio Okamoto
幹夫 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP6035623A priority Critical patent/JPH07244216A/en
Publication of JPH07244216A publication Critical patent/JPH07244216A/en
Pending legal-status Critical Current

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  • Optical Filters (AREA)

Abstract

PURPOSE:To obtain a filter capable of causing only the band shift without changing the bandwidth with the change of temp. by using a material high in temp. dependency of refractive index as a spacer layer in the interference filter having a multilayered structure. CONSTITUTION:In the interference filter having a multilayered structure, the material high in the temp. dependency of refractive index is used as the spacer out layer of the interference filter. That is, the interference filter is formed out of materials such as Ge and SiO and is composed of a substrate 1, the spacer layer 2 consisting of Ge layer and layers 3 consisting of Ge layers and a SiO layers arranged successively alternately. The center wavelength of the band is determined by the optical film thickness of the spacer layer 2 in the interference filter and then shifts to the long wavelength side or short wavelength side by changing the refractive index with the temp. In this case, the bandwidth is not changed. The thickness of the spacer layer 2 is integer times of lambda/2 and preferably 1-10 times.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は光学的干渉フィルターに
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical interference filter.

【０００２】[0002]

【従来の技術】従来、干渉フィルターにおいて、種々の
中心波長に対応するには、スペーサー層の厚さの違う干
渉フィルターに交換することで行ってきた。2. Description of the Related Art Conventionally, in order to cope with various center wavelengths in an interference filter, it has been performed by exchanging with an interference filter having a spacer layer having a different thickness.

【０００３】[0003]

【発明が解決しようとする課題】従って、これまでは、
幾つかの異なる波長の光を用いる際には、用いる光の波
長の数に応じた枚数の干渉フィルターを用意する必要が
あり、これらを交換することが煩雑であるばかりか、多
くの枚数の干渉フィルターを設備するコストやスペース
が問題になっていた。Therefore, until now,
When using light of several different wavelengths, it is necessary to prepare the number of interference filters according to the number of wavelengths of light used, and it is not only complicated to replace them, but also a large number of interference The cost and space to install the filter was a problem.

【０００４】本発明はこれらの問題点の解決にある。The present invention is directed to solving these problems.

【０００５】[0005]

【課題を解決するための手段】本発明は、屈折率の温度
依存性の高い物質によりスペーサー層を形成した干渉フ
ィルターを用い、光の波長の変更に対しては、干渉フィ
ルターの温度を変化させることで、帯域幅は変化させず
に、帯域シフトのみを起こさせることを見出し、本発明
をなすに至った。The present invention uses an interference filter in which a spacer layer is formed of a substance having a high temperature dependence of the refractive index, and changes the temperature of the interference filter when the wavelength of light is changed. As a result, they have found that only the band shift is caused without changing the bandwidth, and the present invention has been completed.

【０００６】従って、本発明は、第１に、「多層膜構造
の干渉フィルターにおいて、屈折率の温度依存性の高い
物質をスペーサ層に用いたことを特徴とする透過波長可
変干渉フィルター」を提供し、第２に、「請求項１に記
載の屈折率の温度依存性の高い物質として、Ge、Si、Zn
Ｓ、ZnSe、TiＯ2 、ZrＯ2 、HfＯ2 、Sb2Ｓ3 のうちの
いずれかを用いたことを特徴とする透過波長可変干渉フ
ィルター」を提供する。Therefore, the present invention firstly provides a "transmission wavelength variable interference filter characterized in that, in a multilayer film structure interference filter, a material having a high refractive index temperature dependency is used for a spacer layer". Secondly, “As a substance having a high temperature dependence of the refractive index according to claim 1, Ge, Si, Zn
A variable transmission wavelength interference filter characterized by using any one of S, ZnSe, TiO 2 , ZrO 2 , HfO 2 , and Sb 2 S 3 .

【０００７】[0007]

【作用】本発明による干渉フィルターのスペーサー層に
は、屈折率の温度依存性の高い物質が用いられている。
干渉フィルターはスペーサー層の光学膜厚により帯域の
中心波長が決定されるので、屈折率が温度によって変化
することにより帯域の中心波長も長波長側又は短波長側
にシフトすることになる。この際、帯域幅の変化はな
い。なお、スペーサー層の厚さは、λ／２の整数倍で１
から１０倍までが好ましい。In the spacer layer of the interference filter according to the present invention, a substance having a high refractive index temperature dependence is used.
Since the center wavelength of the band of the interference filter is determined by the optical film thickness of the spacer layer, the center wavelength of the band is also shifted to the long wavelength side or the short wavelength side as the refractive index changes with temperature. At this time, there is no change in bandwidth. The thickness of the spacer layer is 1 in integral multiple of λ / 2.
To 10 times is preferable.

【０００８】[0008]

【実施例】図１は、本発明に係わる透過波長可変干渉フ
ィルターの垂直断面を示す。物質はGeとSiＯとし、スペ
ーサー層にはGeを用いている。製造した干渉フィルター
を真空中において、 295°Ｋと75°Ｋの温度雰囲気で分
光透過率を測定した。その結果を図２に示す。図２よ
り、温度の違いによって分光透過率に違いが現れている
が、帯域幅には変化がないことがわかる。1 shows a vertical section of a variable transmission wavelength interference filter according to the present invention. The material is Ge and SiO, and Ge is used for the spacer layer. The spectral transmittance of the manufactured interference filter was measured in a vacuum atmosphere at temperatures of 295 ° K and 75 ° K. The result is shown in FIG. It can be seen from FIG. 2 that the spectral transmittance differs depending on the temperature, but the bandwidth does not change.

【０００９】[0009]

【発明の効果】以上説明した通り、本発明によれば、温
度を変化させることで、帯域幅は変化させずに、帯域シ
フトのみを起こさせることができる透過波長可変干渉フ
ィルターを提供することができるようになった。As described above, according to the present invention, it is possible to provide a variable transmission wavelength interference filter capable of causing only the band shift without changing the bandwidth by changing the temperature. I can do it now.

【図面の簡単な説明】[Brief description of drawings]

【図１】 実施例で製造した透過波長可変干渉フィルタ
ーの垂直断面を示す概念図である。FIG. 1 is a conceptual diagram showing a vertical cross section of a variable transmission wavelength interference filter manufactured in an example.

【図２】 実施例で製造した透過波長可干渉フィルター
を真空中において、295 °Ｋと 75 °Ｋの温度雰囲気で
分光透過率を測定した結果を示すグラフである。FIG. 2 is a graph showing the results of measuring the spectral transmittance of a transmission wavelength interference filter manufactured in an example in a vacuum atmosphere at temperatures of 295 ° K and 75 ° K.

【符号の説明】[Explanation of symbols]

１・・・基板 ２・・・Ge層からなるスペーサー層 ３・・・Ge層とSiO層の交互繰り返し層 ４・・・ 295°Ｋの真空中における透過波長可変干渉フ
ィルターの分光透過率の測定値を示すグラフ ５・・・ 75 °Ｋの真空中における透過波長可変干渉フ
ィルターの分光透過率の測定値を示すグラフ 以上1 ... Substrate 2 ... Spacer layer consisting of Ge layer 3 ... Alternate repeating layer of Ge layer and SiO layer 4 ... Measurement of spectral transmittance of transmission wavelength variable interference filter in vacuum at 295 ° K Graph showing value 5 ... Graph showing measured value of spectral transmittance of variable transmission wavelength interference filter in vacuum of 75 ° K

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】多層膜構造の干渉フィルターにおいて、屈
折率の温度依存性の高い物質をスペーサー層に用いたこ
とを特徴とする透過波長可変干渉フィルター。1. A variable transmission wavelength interference filter, characterized in that, in the interference filter having a multilayer film structure, a substance having a high temperature dependence of a refractive index is used for a spacer layer. 【請求項２】請求項１に記載の屈折率の温度依存性の高
い物質として、Ge、Si、ZnＳ、ZnSe、TiＯ2 、ZrＯ2 、
HfＯ2 、Sb2Ｓ3 のうちのいずれかを用いたことを特徴
とする透過波長可変干渉フィルター。2. The substance having a high temperature dependence of the refractive index according to claim 1, which is Ge, Si, ZnS, ZnSe, TiO 2 , ZrO 2 ,
A variable transmission wavelength interference filter characterized by using either HfO 2 or Sb 2 S 3 .
JP6035623A 1994-03-07 1994-03-07 Transmission wavelength variable interference filter Pending JPH07244216A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6035623A JPH07244216A (en) 1994-03-07 1994-03-07 Transmission wavelength variable interference filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6035623A JPH07244216A (en) 1994-03-07 1994-03-07 Transmission wavelength variable interference filter

Publications (1)

Publication Number Publication Date
JPH07244216A true JPH07244216A (en) 1995-09-19

Family

ID=12446997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6035623A Pending JPH07244216A (en) 1994-03-07 1994-03-07 Transmission wavelength variable interference filter

Country Status (1)

Country Link
JP (1) JPH07244216A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007279534A (en) * 2006-04-11 2007-10-25 Nippon Telegr & Teleph Corp <Ntt> Optical element
US8986922B1 (en) * 2004-05-12 2015-03-24 Cirrex Systems, Llc Adjusting optical properties of optical thin films
WO2023095574A1 (en) * 2021-11-25 2023-06-01 浜松ホトニクス株式会社 Method for producing bandpass filter, and bandpass filter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8986922B1 (en) * 2004-05-12 2015-03-24 Cirrex Systems, Llc Adjusting optical properties of optical thin films
JP2007279534A (en) * 2006-04-11 2007-10-25 Nippon Telegr & Teleph Corp <Ntt> Optical element
WO2023095574A1 (en) * 2021-11-25 2023-06-01 浜松ホトニクス株式会社 Method for producing bandpass filter, and bandpass filter

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