JPH07233851A - Control type vibration-proof device - Google Patents

Control type vibration-proof device

Info

Publication number
JPH07233851A
JPH07233851A JP2387194A JP2387194A JPH07233851A JP H07233851 A JPH07233851 A JP H07233851A JP 2387194 A JP2387194 A JP 2387194A JP 2387194 A JP2387194 A JP 2387194A JP H07233851 A JPH07233851 A JP H07233851A
Authority
JP
Japan
Prior art keywords
chamber
piston member
actuator
cylinder
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2387194A
Other languages
Japanese (ja)
Other versions
JP3499279B2 (en
Inventor
Yoichi Kawamoto
洋一 河本
Sumio Uchida
純生 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kurashiki Kako Co Ltd
Original Assignee
Kurashiki Kako Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurashiki Kako Co Ltd filed Critical Kurashiki Kako Co Ltd
Priority to JP2387194A priority Critical patent/JP3499279B2/en
Publication of JPH07233851A publication Critical patent/JPH07233851A/en
Application granted granted Critical
Publication of JP3499279B2 publication Critical patent/JP3499279B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Combined Devices Of Dampers And Springs (AREA)

Abstract

PURPOSE:To secure the effect due to the vibrating operation of a vibrating plate in the state where the deterioration of the vibrating characteristic is surely prevented, even if air bubbles are left at manufacture, in the vibrating operation mechanism of the vibrating plate by an actuator. CONSTITUTION:A pair of installation members 3 and 4 are connected each other by an elastic supporting body 5, and an inside liquid chamber 7 is partitioned into a pressure receiving chamber 7a and an equillibrium chamber 7b by a partitioning body 9. The partitioning body 9 is elastically supported so as to be displacement-enabled form in the cylinder axis X direction, and connected with an actuator 12 through an operation characteristic varying means 15. The operation characteristic varying means is constituted of a cylinder 16 charged with the noncompressible fluid 8, piston member 17 on the drive side whose one end is connected with the actuator and a pressurizing surface 17a at the other end is formed to a small area, driven side piston member 18 whose one end is connected with the partitioning body and the pressure receiving surface 18a at the other end is formed to a large area, and an air bubble vent hole 24 for discharging the air bubbles into the pressure receiving chamber from the cylinder chamber. The resonance frequency of the air bubble vent hole is set so as to be locked in the frequency region where the actuator operates. Further, a pot part 25 for accommodating air bubbles which is opened in close to th top part of the pressure receiving chamber is formed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、液室内に振動板を配設
し、この振動板をアクチュエータにより強制加振するこ
とによって液室の内圧上昇を抑制制御するようにした防
振装置に係り、詳しくは、上記振動板とアクチュエータ
との間にアクチュエータによる加振作動力もしくは加振
作動ストロークなどの作動特性を変換する作動特性変換
手段を介装した制御式防振装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration isolator in which a vibration plate is arranged in a liquid chamber, and the vibration plate is forcibly excited by an actuator to suppress and control an increase in internal pressure of the liquid chamber. More specifically, the present invention relates to a control type vibration damping device in which an operating characteristic converting means for converting an operating characteristic such as an oscillating operating force or an oscillating operating stroke by the actuator is interposed between the diaphragm and the actuator.

【０００２】[0002]

【従来の技術】従来より、この種の防振装置として、振
動板を加振させるアクチュエータとして圧電素子を用
い、この圧電素子の伸縮量を拡大させる拡大機構を設け
たものが知られている（例えば、実開平５−５０２００
号公報参照）。このものでは、上記圧電素子の電圧印
加，遮断に伴う伸縮量、つまり、振動板の加振ストロー
クが極めて小さいために、大径筒部と小径筒部とからな
るシリンダの大径筒部に圧電素子に固定したピストンを
内嵌させ、小径筒部に内嵌させた弾性キャップの先端を
振動板に当接させることにより、上記圧電素子の伸縮量
を拡大させて上記振動板を加振させるようにしている。2. Description of the Related Art Conventionally, as this type of vibration isolator, there has been known one in which a piezoelectric element is used as an actuator for vibrating a diaphragm, and an expansion mechanism for expanding the expansion / contraction amount of the piezoelectric element is provided ( For example, the actual Kaihei 5-50200
(See the official gazette). In this structure, the amount of expansion and contraction due to the voltage application and interruption of the piezoelectric element, that is, the vibration stroke of the diaphragm is extremely small. The piston fixed to the element is fitted inside, and the tip of the elastic cap fitted inside the small-diameter cylindrical portion is brought into contact with the vibration plate, thereby expanding the expansion and contraction amount of the piezoelectric element and vibrating the vibration plate. I have to.

【０００３】[0003]

【発明が解決しようとする課題】ところで、上記従来の
防振装置において、圧電素子の伸縮量を有効に拡大させ
るには、上記シリンダ内の作動油の容積が変化しないよ
うにする必要がある。このため、上記のシリンダ内に作
動油を注入しピストンおよび弾性キャップを内嵌させる
作業においては、上記作動油の中に気泡が残留しないよ
うに注意して作業を行う必要がある。In the conventional vibration isolator described above, in order to effectively expand the expansion / contraction amount of the piezoelectric element, it is necessary to keep the volume of the hydraulic oil in the cylinder unchanged. Therefore, in the work of injecting the working oil into the cylinder and fitting the piston and the elastic cap therein, it is necessary to perform the work carefully so that no bubbles remain in the working oil.

【０００４】しかし、上記の作業においては、防振装置
自体が比較的小さいものであり、その内部に装着するシ
リンダはさらに小さく、この組付け作業には困難を伴う
ため、上記シリンダの内部に気泡が残留するおそれがあ
る。そして、作動油中に気泡が残留すると、圧電素子の
伸長によりピストンが作動油を加圧しても、残留気泡が
圧縮されて作動油全体の体積が変化してしまい、上記圧
電素子の伸長量が有効に増幅されず、大径筒部のピスト
ンの加圧面と小径筒部の弾性キャップの受圧面との面積
比に対応する伸縮量の増幅を得ることができなくなる。
特に、アクチュエータとして圧電素子を用いた場合、そ
の伸縮量が極めて小さいことから、上記残留した気泡が
たとえ微量（例えばマイクロメータ単位の大きさ）であ
ったとしても、その気泡の圧縮による体積変化が振動板
の加振ストロークに与える影響度合は極めて大きくな
り、このため、上記加振ストロークが圧電素子自体の伸
縮量に近いものとなってしまうという加振特性の大幅な
低下を招き、所定の加振特性で振動板を加振することが
できなくなるという問題がある。However, in the above work, the vibration isolator itself is relatively small, and the cylinder to be mounted therein is even smaller, and this assembling work is difficult. May remain. When bubbles remain in the hydraulic oil, even if the piston pressurizes the hydraulic oil due to the expansion of the piezoelectric element, the residual bubbles are compressed and the volume of the entire hydraulic oil changes, and the expansion amount of the piezoelectric element is reduced. It is not amplified effectively, and it becomes impossible to obtain the expansion and contraction amount amplification corresponding to the area ratio between the pressing surface of the piston of the large-diameter tubular portion and the pressure-receiving surface of the elastic cap of the small-diameter tubular portion.
In particular, when a piezoelectric element is used as an actuator, its expansion and contraction amount is extremely small, so that even if the remaining bubbles are very small (for example, in the size of a micrometer), the volume change due to the compression of the bubbles does not occur. The degree of influence of the vibration plate on the vibration stroke becomes extremely large, and therefore, the vibration stroke becomes close to the amount of expansion and contraction of the piezoelectric element itself, which greatly deteriorates the vibration characteristic and causes a predetermined vibration. There is a problem that the vibration plate cannot be excited due to the vibration characteristic.

【０００５】本発明は、このような事情に鑑みてなされ
たものであり、その目的とするところは、アクチュエー
タによる振動板の加振作動機構内に、その製造時に万一
気泡が残留したとしても、加振特性の低下を確実に防止
した状態で振動板の加振による効果を得ることにある。The present invention has been made in view of such circumstances, and it is an object of the present invention that even if bubbles are left in the vibration actuation mechanism of the diaphragm by the actuator at the time of its manufacture, This is to obtain the effect of vibrating the diaphragm while surely preventing the deterioration of the vibrating characteristics.

【０００６】[0006]

【課題を解決するための手段】上記目的を達成するため
に、請求項１記載の発明は、振動入力方向に互いに離し
て配置された一対の取付部材と、この一対の取付部材を
互いに連結する弾性支承体と、この弾性支承体により画
成されてし非圧縮性の液体が封入された液室と、この液
室の上記弾性支承体の側を仕切るように配置され上記弾
性支承体の側の液室の容積を拡縮する方向に変位可能に
支持された振動板と、上記振動板を加振作動させるアク
チュエータとを備え、このアクチュエータの作動を制御
することにより上記弾性支承体の側の液室の内圧を制御
するようにしたものを前提とする。このものにおいて、
上記振動板とアクチュエータとの間に、アクチュエータ
による振動板の加振作動の特性を変換する作動特性変換
手段を介装し、この作動特性変換手段を、内部に上記液
体と同じ液体が封入されたシリンダ室を有するシリンダ
と、このシリンダに進退可能に配設された駆動側および
従動側の一対のピストン部材と、上記シリンダ室内の気
泡を上記液室側に排出する気泡抜孔とを備えたもので構
成する。そして、上記駆動側ピストン部材の基端部を上
記アクチュエータにより加振作動されるようアクチュエ
ータに連結し、先端部の加圧面を上記シリンダ室の流体
に臨むよう上記シリンダに配置する一方、上記従動側ピ
ストン部材の基端部を上記振動板に取付け、先端部の受
圧面をシリンダ室の流体を介して駆動側ピストン部材か
らの加振作動力を受けるように配置する。また、上記気
泡抜孔を、上記駆動側ピストン部材および従動側ピスト
ン部材の内の上方に位置するピストン部材を貫通して上
記シリンダ室と液室とを互いに連通させるよう形成し、
かつ、その気泡抜孔を介した液柱の共振周波数を、上記
アクチュエータを作動させるものとして予め設定された
入力振動の周波数域よりも十分に低くなるように設定す
る構成とするものである。In order to achieve the above object, the invention according to claim 1 connects a pair of mounting members which are arranged apart from each other in the vibration input direction and the pair of mounting members. An elastic bearing, a liquid chamber defined by the elastic bearing and containing an incompressible liquid, and a side of the elastic bearing arranged so as to partition the side of the elastic bearing of the liquid chamber. A vibrating plate supported so as to be displaceable in a direction in which the volume of the liquid chamber is expanded and contracted, and an actuator for vibrating the vibrating plate, and the liquid on the elastic bearing side is controlled by controlling the operation of the actuator. It is assumed that the internal pressure of the chamber is controlled. In this one,
An operating characteristic converting means for converting the characteristic of the vibration operation of the diaphragm by the actuator is interposed between the diaphragm and the actuator, and the operating characteristic converting means is filled with the same liquid as the liquid. A cylinder having a cylinder chamber, a pair of driving-side and driven-side piston members that are arranged to be able to move forward and backward in the cylinder, and a bubble vent for discharging bubbles in the cylinder chamber to the liquid chamber side. Constitute. The base end of the drive-side piston member is connected to the actuator so that it is vibrated by the actuator, and the pressurizing surface of the tip end is arranged in the cylinder so as to face the fluid in the cylinder chamber while the driven-side side is arranged. The base end portion of the piston member is attached to the vibration plate, and the pressure receiving surface of the tip end portion is arranged so as to receive the vibration actuating force from the drive side piston member via the fluid in the cylinder chamber. Further, the bubble vent hole is formed to penetrate the piston member located above in the drive side piston member and the driven side piston member to communicate the cylinder chamber and the liquid chamber with each other,
Further, the resonance frequency of the liquid column passing through the bubble vent is set to be sufficiently lower than the frequency range of the input vibration that is preset for operating the actuator.

【０００７】請求項２記載の発明は、請求項１記載の発
明において、弾性支承体側の液室を上方に位置付け、気
泡を収容するつぼ部を、上記液室の頂部に臨んで下向き
に開口するよう上記弾性支承体に形成する構成とするも
のである。According to a second aspect of the present invention, in the first aspect of the invention, the liquid chamber on the side of the elastic support is positioned above, and the crucible portion for storing bubbles is opened downward facing the top of the liquid chamber. As described above, the elastic support is formed on the elastic support.

【０００８】請求項３記載の発明は、請求項２記載の発
明において、液室を、弾性支承体の側の受圧室と、少な
くとも一部が弾性薄膜部材により画成されて拡縮可能な
平衡室とに仕切り、この受圧室と平衡室とを連通するオ
リフィスを備える。そして、つぼ部に対して、上記オリ
フィスを介した液柱の設定共振周波数よりも十分に低い
共振周波数を設定する構成とするものである。According to a third aspect of the present invention, in the second aspect of the invention, the liquid chamber is capable of expanding and contracting with the pressure receiving chamber on the elastic bearing side and at least part of which is defined by an elastic thin film member. And an orifice that connects the pressure receiving chamber and the equilibrium chamber. Then, a resonance frequency that is sufficiently lower than the set resonance frequency of the liquid column via the orifice is set for the pot.

【０００９】請求項４記載の発明は、請求項１記載の発
明において、駆動側ピストン部材の加圧面の面積を従動
側ピストン部材の受圧面の面積より小さく設定して、作
動特性変換手段を、従動側ピストン部材の加振作動力特
性を増幅させる構成とするものである。According to a fourth aspect of the present invention, in the first aspect of the invention, the area of the pressing surface of the driving side piston member is set smaller than the area of the pressure receiving surface of the driven side piston member, and the operating characteristic converting means is The configuration is such that the vibration actuation force characteristic of the driven side piston member is amplified.

【００１０】また、請求項５記載の発明は、請求項１記
載の発明において、駆動側ピストン部材の加圧面の面積
を従動側ピストン部材の受圧面の面積より大きく設定し
て、作動特性変換手段を、従動側ピストン部材の加振作
動ストローク特性を増幅させる構成とするものである。According to a fifth aspect of the present invention, in the first aspect of the invention, the area of the pressing surface of the driving side piston member is set to be larger than the area of the pressure receiving surface of the driven side piston member, and the operating characteristic converting means is set. Is configured to amplify the vibration operation stroke characteristic of the driven side piston member.

【００１１】さらに、請求項６記載の発明は、請求項１
記載の発明において、アクチュエータとして、電圧の印
加，遮断により伸縮する圧電素子を用いて構成するもの
である。Further, the invention according to claim 6 is the same as claim 1.
In the invention described above, the actuator is configured by using a piezoelectric element that expands and contracts by applying and blocking a voltage.

【００１２】[0012]

【作用】上記の構成により、請求項１記載の発明では、
取付部材を介して弾性支承体に振動が入力した場合、こ
の弾性支承体の変形を受けて液室内の液圧が変動しよう
とするが、アクチュエータの作動によりその作動力が作
動特性変換手段を介して伝達されて振動板が強制加振さ
れるため、弾性支承体の側の液室内の容積が強制的に拡
縮されてその液室内の液圧変動の吸収が図られる。この
際、作動特性変換手段において、上記駆動側ピストン部
材の加圧面の面積と、従動側ピストン部材の受圧面の面
積とが互いに異なる大きさに設定されているため、アク
チュエータによる駆動側ピストン部材の進退作動特性が
上記両面積の比に応じて変換されて、上記駆動側ピスト
ン部材とは異なる作動力特性もしくは作動ストローク特
性で従動側ピストン部材が進退作動される。With the above construction, in the invention according to claim 1,
When vibration is input to the elastic support through the mounting member, the hydraulic pressure in the liquid chamber tends to fluctuate due to the deformation of the elastic support, but the operating force is changed by the operation of the actuator through the operation characteristic conversion means. Since the vibration plate is forcibly vibrated by being transmitted, the volume in the liquid chamber on the elastic bearing side is forcibly expanded and contracted to absorb fluctuations in the liquid pressure in the liquid chamber. At this time, in the operation characteristic conversion means, the area of the pressure-applying surface of the drive-side piston member and the area of the pressure-receiving surface of the driven-side piston member are set to different sizes from each other. The advancing / retreating operation characteristic is converted according to the ratio of the both areas, and the driven-side piston member is advanced / retreating with an operating force characteristic or an operating stroke characteristic different from that of the driving-side piston member.

【００１３】一方、製造時に上記シリンダ室に混入した
空気がその内部の液体中に気泡として残留した場合、気
泡抜孔がシリンダ室の上位の側のピストン部材に形成さ
れているため、その気泡が上記気泡抜孔を通して液室側
に排出される。この結果、上記駆動側ピストン部材の進
退作動によるシリンダ室内の液体がシリンダ室の容積の
まま一定に保たれ、確実に所定の作動特性に維持され
る。しかも、この気泡抜孔を介した液柱共振の共振周波
数が上記アクチュエータを作動させる入力振動の設定周
波数域よりも十分に低いものに設定されているため、上
記アクチュエータを作動させる周波数領域では上記気泡
抜孔が目詰まり状態となってロックする。このため、上
記各ピストン部材の加圧面と受圧面との両面積比に基く
作動特性の変換が確実に所定のものとされる。On the other hand, when the air mixed in the cylinder chamber at the time of manufacture remains as bubbles in the liquid therein, the bubbles are formed because the bubble vent hole is formed in the piston member on the upper side of the cylinder chamber. It is discharged to the liquid chamber side through the bubble vent. As a result, the liquid in the cylinder chamber due to the forward / backward movement of the drive side piston member is kept constant as the volume of the cylinder chamber, and the predetermined operating characteristics are reliably maintained. Moreover, since the resonance frequency of the liquid column resonance through the bubble vent is set to be sufficiently lower than the set frequency range of the input vibration for operating the actuator, the bubble vent is used in the frequency range for operating the actuator. Is locked and locks. For this reason, the conversion of the operating characteristics based on the area ratio of the pressure-applying surface and the pressure-receiving surface of each piston member is surely made to be predetermined.

【００１４】請求項２記載の発明では、上記請求項１記
載の発明による作用に加えて、シリンダ室の上位のピス
トン部材に形成された気泡抜孔を通して排出された気泡
が弾性支承体側の液室を上昇し、その頂部に開口するつ
ぼ部に収容される。この結果、液室内の液体中から上記
気泡の存在の排除が可能となる。According to the second aspect of the present invention, in addition to the action of the first aspect of the present invention, the bubbles discharged through the bubble removing hole formed in the upper piston member of the cylinder chamber cause the liquid chamber on the side of the elastic bearing to be discharged. It rises and is housed in a crucible that opens to the top. As a result, it becomes possible to eliminate the presence of the bubbles from the liquid in the liquid chamber.

【００１５】請求項３記載の発明では、上記請求項２記
載の発明による作用に加えて、つぼ部に対して、受圧室
と平衡室とを互いに連通するオリフィスの設定共振周波
数よりも十分に低い共振周波数が設定されているため、
このオリフィスの液柱共振により入力振動の減衰を図る
周波数域では上記気泡を収容したつぼ部がロックする。
この結果、その周波数域の振動が入力した際は、上記つ
ぼ部内の気泡が液室内の液体に混入することが防止され
て、この混入に伴うオリフィスの減衰特性の悪化が確実
に防止される。According to the third aspect of the invention, in addition to the effect of the second aspect of the invention, the resonance frequency is sufficiently lower than the set resonance frequency of the orifice for communicating the pressure receiving chamber and the equilibrium chamber with respect to the pot. Since the resonance frequency is set,
In the frequency range where the vibration of the input vibration is attenuated by the resonance of the liquid column of the orifice, the crucible portion containing the bubbles locks.
As a result, when the vibration in the frequency range is input, the bubbles in the pot are prevented from being mixed with the liquid in the liquid chamber, and the deterioration of the damping characteristic of the orifice due to the mixture is surely prevented.

【００１６】請求項４記載の発明では、上記請求項１記
載の発明による作用に加えて、駆動側ピストン部材の加
圧面の面積が、従動側ピストン部材の受圧面の面積より
小さく設定されて作動特性変換手段により従動側ピスト
ン部材がアクチュエータの作動力よりも大きい作動力で
進退作動されるように作動特性が変換される。このよう
な場合においても、製造時に気泡が万一残留しても、そ
の気泡が気泡抜孔により排出され上記残留気泡に伴うシ
リンダ室内の容積変化が防止される結果、作動特性の変
換効率の低下が防止される。According to the invention described in claim 4, in addition to the operation according to the invention described in claim 1, the area of the pressing surface of the driving side piston member is set smaller than the area of the pressure receiving surface of the driven side piston member to operate. The characteristic converting means converts the operating characteristic such that the driven side piston member is moved forward and backward with an operating force larger than the operating force of the actuator. Even in such a case, even if air bubbles remain during manufacturing, the air bubbles are discharged through the air bubble vent holes and the volume change in the cylinder chamber due to the above-mentioned remaining air bubbles is prevented, resulting in a decrease in the conversion efficiency of the operating characteristics. To be prevented.

【００１７】また、請求項５記載の発明では、上記請求
項１記載の発明による作用に加えて、駆動側ピストン部
材の加圧面の面積が、従動側ピストン部材の受圧面の面
積より大きく設定されて作動特性変換手段により従動側
ピストン部材がアクチュエータの作動ストロークよりも
大きい作動ストロークで進退作動されるように作動特性
が変換される。このような場合においても、製造時に気
泡が万一残留しても、その気泡が気泡抜孔により排出さ
れ上記残留気泡に伴うシリンダ室内の容積変化が防止さ
れる結果、作動特性の変換効率の低下が防止される。According to the invention of claim 5, in addition to the operation of the invention of claim 1, the area of the pressing surface of the driving side piston member is set larger than the area of the pressure receiving surface of the driven side piston member. The operating characteristic converting means converts the operating characteristic such that the driven side piston member is moved forward and backward with an operating stroke larger than the operating stroke of the actuator. Even in such a case, even if air bubbles remain during manufacturing, the air bubbles are discharged through the air bubble vent holes and the volume change in the cylinder chamber due to the above-mentioned remaining air bubbles is prevented, resulting in a decrease in the conversion efficiency of the operating characteristics. To be prevented.

【００１８】さらに、請求項６記載の発明では、上記請
求項１記載の発明による作用に加えて、アクチュエータ
が圧電素子により構成されて、電圧の印加、遮断により
圧電素子が伸縮されて駆動側ピストン部材が加振され
る。この際、上記圧電素子による伸縮量が極めて小さい
ため、シリンダ室に気泡が残留した場合、その残留気泡
量が極めて少ないものであっても、作動特性変換手段に
よる作動ストロークの増大変換作用に大きく影響する。
ところが、上記残留気泡が気泡抜孔によって確実に排出
されるため、アクチュエータとして圧電素子を用いた場
合であっても、振動板を確実に増幅した作動ストローク
によって加振させることが可能となる。Further, in the sixth aspect of the invention, in addition to the operation of the first aspect of the invention, the actuator is composed of a piezoelectric element, and the piezoelectric element is expanded / contracted by applying / cutting off a voltage, so that the driving side piston. The member is vibrated. At this time, since the amount of expansion and contraction due to the piezoelectric element is extremely small, when bubbles remain in the cylinder chamber, even if the amount of remaining bubbles is extremely small, it has a great effect on the increase conversion action of the operation stroke by the operation characteristic conversion means. To do.
However, since the residual bubbles are reliably discharged by the bubble vent holes, even when the piezoelectric element is used as the actuator, it is possible to vibrate the diaphragm with a surely amplified operation stroke.

【００１９】[0019]

【実施例】以下、本発明の実施例を図面に基いて説明す
る。Embodiments of the present invention will be described below with reference to the drawings.

【００２０】＜第１実施例＞図１は、本発明の第１実施
例に係る制御式防振装置を示す。同図において、１は筒
軸Ｘを上下方向に向けた第１支持筒体、２は上記第１支
持筒体１の下端開口側を閉止する有底の第２支持筒体で
あり、両者が一体的に連結されて下側の第１取付部材３
が構成されている。この第２支持筒体２の上端部には筒
軸Ｘ方向所定寸法にわたって外周方向に拡径された拡径
部２ａが形成されている一方、上記第１取付部材１の下
端部が上記拡径部２ａの外周囲を覆うよう拡径された
後、上下方向から挟むようにかしめ部１ａが形成されて
両者１，２が互いに一体化されている。そして、上記第
２支持筒体２が振動受部である例えば車体のブラケット
に内嵌されて上記拡径部２ａおよびかしめ部１ａで位置
固定されるようになっている。<First Embodiment> FIG. 1 shows a control type vibration damping device according to a first embodiment of the present invention. In the figure, 1 is a first support cylinder with the cylinder axis X directed in the vertical direction, and 2 is a bottomed second support cylinder that closes the lower end opening side of the first support cylinder 1, both of which are Lower first mounting member 3 connected integrally
Is configured. An enlarged diameter portion 2a is formed on the upper end portion of the second support cylinder body 2 and is enlarged in the outer peripheral direction over a predetermined dimension in the cylinder axis X direction, while the lower end portion of the first mounting member 1 is expanded. After the diameter is enlarged so as to cover the outer periphery of the portion 2a, the caulking portion 1a is formed so as to sandwich the portion 2a from above and below, and the both 1 and 2 are integrated with each other. The second support cylinder 2 is fitted in a vibration receiving portion, for example, a bracket of a vehicle body, and fixed in position by the expanded diameter portion 2a and the caulking portion 1a.

【００２１】４は上記第１支持筒体１の上端開口側の位
置であって上記筒軸Ｘ上に配置された上側の第２取付部
材であり、この第２取付部材４には上記筒軸Ｘに沿って
取付ボルト４ａが上向きに突出されて振動発生源である
例えばエンジンに連結されるようになっている。５はこ
の第２取付部材４と上記第１取付部材３の第１支持持体
１とを互いに連結する環状の弾性支承体であり、この弾
性支承体５が上記第２取付部材４および第１支持筒体１
と一体加硫成形されて第１取付部材３と第２取付部材４
とを互いに連結している。そして、上記第１取付部材３
に取付けられた弾性薄膜部材としてのゴム薄膜製ダイヤ
フラム６と、上記第１支持筒体１と、上記弾性支承体５
とによって液室７が画成されており、この液室７に非圧
縮性の液体８が封入されている。Reference numeral 4 denotes an upper second mounting member which is located on the upper end opening side of the first supporting cylindrical body 1 and is arranged on the cylindrical axis X. The second mounting member 4 includes the cylindrical shaft. The mounting bolt 4a is projected upward along X and is connected to a vibration generating source such as an engine. Reference numeral 5 denotes an annular elastic bearing body that connects the second mounting member 4 and the first support carrier 1 of the first mounting member 3 to each other. The elastic bearing body 5 is the second mounting member 4 and the first mounting member 3. Support cylinder 1
The first mounting member 3 and the second mounting member 4 are integrally vulcanized and molded.
And are connected to each other. Then, the first mounting member 3
A rubber thin film diaphragm 6 as an elastic thin film member attached to the first supporting cylinder 1, the elastic support 5
Defines a liquid chamber 7, and an incompressible liquid 8 is enclosed in the liquid chamber 7.

【００２２】また、９は上記液室７内の上下方向中間位
置において筒軸Ｘに直交する方向に配設された振動板と
しての仕切体であり、この仕切体９によって上記液室７
が上側の弾性支承体５の変形を受けて拡縮される受圧室
７ａと、下側のダイヤフラム６により拡縮される平衡室
７ｂとに仕切られている。加えて、上記仕切体９の周囲
には上記受圧室７ａと平衡室７ｂとを互いに連通する環
状のオリフィス１０が形成されている。そして、上記仕
切体９は、その周囲が環状の弾性支持部材１１を介して
上記第１取付部材３の内周面に取付けられており、これ
により、上記仕切体９は上下方向に相対変位可能に弾性
支持されている。Further, 9 is a partition body as a vibrating plate which is arranged in a direction orthogonal to the cylinder axis X at an intermediate position in the liquid chamber 7 in the vertical direction.
Is partitioned into a pressure receiving chamber 7a which is expanded and contracted by the deformation of the upper elastic support body 5 and an equilibrium chamber 7b which is expanded and contracted by the lower diaphragm 6. In addition, an annular orifice 10 that connects the pressure receiving chamber 7a and the equilibrium chamber 7b to each other is formed around the partition body 9. The partition body 9 is attached to the inner peripheral surface of the first mounting member 3 through an elastic support member 11 having an annular circumference, whereby the partition body 9 is relatively displaceable in the vertical direction. It is elastically supported by.

【００２３】さらに、１２は仕切体９を上下方向に強制
加振するためのアクチュエータであり、このアクチュエ
ータ１２は第２支持筒体２の底壁に固定された永久磁石
１３と、後述の駆動側ピストン部材１７の外周囲に設け
られた電磁コイル１４と、上記電磁コイル１４への交番
電流の通電の制御を行う図示省略の制御器とを備えてい
る。そして、このアクチュエータ１２は、作動特性変換
手段１５を介して上記仕切体９を上下方向に加振作動す
るようになっている。Further, 12 is an actuator for forcibly vibrating the partition body 9 in the vertical direction. This actuator 12 includes a permanent magnet 13 fixed to the bottom wall of the second support cylinder 2, and a drive side which will be described later. An electromagnetic coil 14 provided on the outer periphery of the piston member 17 and a controller (not shown) for controlling energization of the alternating current to the electromagnetic coil 14 are provided. The actuator 12 is configured to vibrate the partition body 9 in the vertical direction via the operating characteristic conversion means 15.

【００２４】上記作動特性変換手段１５は、シリンダ１
６と、先端部（上端部）がこのシリンダ１６に上下方向
に進退変位可能に下側から上方に内挿された駆動側ピス
トン部材１７と、先端部（下端部）が上記シリンダ１６
に上下方向に進退変位可能に上側から下方に内挿されて
基端部（上端部）が上記仕切体９に一体的に連結された
従動側ピストン部材１８と、後述の気泡抜孔２４とを備
えている。上記駆動側ピストン部材１７は小径の円形断
面に形成されて上端の加圧面１７ａが比較的小さい面積
（Ａ1 ）とされている一方、上記従動側ピストン部材１
８は上記駆動側ピストン部材１７のそれより所定量大径
の円形断面に形成されて下端の受圧面１８ａが上記面積
（Ａ1 ）より所定量大きい面積（Ａ2 ）とされている。
そして、上記駆動側ピストン部材１７の基端部（下端
部）側の筒部１７ｂに上記電磁コイル１４が設けられ
て、この駆動側ピストン部材１７が上下方向に進退する
ことにより、その進退作動力が上記シリンダ１６のシリ
ンダ室１６ａ内に封入された非圧縮性の作動用液体８を
介して上記従動側ピストン部材１８に伝達されるように
なっている。つまり、上記アクチュエータ１２による駆
動側ピストン部材１７の上下方向作動力をＦ1 とし、上
記作動用液体８を介して従動側ピストン部材１８が受け
る作動力をＦ2 とすると、このＦ2 は上記面積Ａ1 ，Ａ
2 に基いて、 Ｆ2 ＝（Ａ2 ／Ａ1 ）・Ｆ1 となり、Ｆ1 の（Ａ2 ／Ａ1 ）倍に作動力特性が増幅変
換されるようになっている。The operating characteristic converting means 15 is the cylinder 1
6, a drive-side piston member 17 having a tip portion (upper end portion) inserted in the cylinder 16 upward and downward so as to be able to move forward and backward, and a tip portion (lower end portion) described above.
A driven-side piston member 18 having a base end portion (upper end portion) integrally connected to the partition body 9 such that the driven piston member 18 is inserted downward from above so as to be able to move forward and backward, and a bubble vent hole 24 described later. ing. The driving-side piston member 17 is formed in a circular cross section with a small diameter so that the pressing surface 17a at the upper end has a relatively small area (A1), while the driven-side piston member 1
8 is formed in a circular cross section having a diameter larger than that of the drive side piston member 17 by a predetermined amount, and the pressure receiving surface 18a at the lower end has an area (A2) larger than the area (A1) by a predetermined amount.
The electromagnetic coil 14 is provided in the tubular portion 17b on the base end (lower end) side of the drive-side piston member 17, and the drive-side piston member 17 moves back and forth to move forward and backward. Is transmitted to the driven side piston member 18 via the incompressible working liquid 8 sealed in the cylinder chamber 16a of the cylinder 16. That is, when the vertical actuating force of the drive side piston member 17 by the actuator 12 is F1 and the actuating force received by the driven side piston member 18 through the actuating liquid 8 is F2, this F2 is the area A1, A
Based on 2, F2 = (A2 / A1) .F1 and the operating force characteristics are amplified and converted to (A2 / A1) times that of F1.

【００２５】以下、上記の全体構成をより詳細に説明す
ると、上記第１支持筒体１の下端側のかしめ部１ａに至
る内周面にはゴム薄層５ａが上記弾性支承体５と一体に
加硫接着されている。そして、上記かしめ部１ａのゴム
薄層５ａと上記第２支持筒体２の拡径部２ａ内面との間
に、上記弾性支持部材１１の後述の外周側取付リング１
１ｂのフランジ部と、上記シリンダ１６の外周部と、上
記ダイヤフラム６の外周部とが互いに重ね合わされた状
態で挟み込まれており、これにより、上記仕切体９，シ
リンダ１６およびダイヤフラム６の第１取付部材３に対
する取付けが行われている。The overall structure will be described in more detail below. A rubber thin layer 5a is integrally formed with the elastic bearing member 5 on the inner peripheral surface of the lower end side of the first supporting cylinder 1 which extends to the caulking portion 1a. It is vulcanized and bonded. Then, between the rubber thin layer 5a of the caulked portion 1a and the inner surface of the expanded diameter portion 2a of the second support cylinder 2, the outer peripheral side attachment ring 1 of the elastic support member 11 described later is formed.
The flange portion 1b, the outer peripheral portion of the cylinder 16 and the outer peripheral portion of the diaphragm 6 are sandwiched in a state of being overlapped with each other, whereby the partition 9, the cylinder 16 and the diaphragm 6 are first mounted. Attachment to the member 3 is performed.

【００２６】上記仕切体９は、下方に開口した第１有底
筒部材９ａと、上方に開口して上端の周縁が外周方向に
張り出した後、下方に折り返された第２有底筒部材９ｂ
とからなり、この第２有底筒部材９ｂが上記第１有底筒
部材９ａの内面に下側から内嵌状態で重合されて一体化
されている。そして、この第２有底筒部材９ｂの上端外
周囲と上記第１有底筒部材９ａの上端内周囲との間に形
成された環状の通路によって上記オリフィス１０が構成
されており、このオリフィス１０は周方向一側の開口１
０ａで上記受圧室７ａに連通する一方、他側の開口１０
ｂで上記平衡室７ｂに連通している。また、上記第２有
底筒部材９ｂの中央部は筒軸Ｘ上を下方に突出して上記
シリンダ１６に内嵌されており、この第２有底筒部材９
ｂの中央部によって上記従動側ピストン部材１８が構成
されている。The partition body 9 has a first bottomed tubular member 9a that opens downward, and a second bottomed tubular member 9b that opens upward and the peripheral edge of the upper end projects outward, and then folds back downward.
The second bottomed tubular member 9b is integrated with the inner surface of the first bottomed tubular member 9a from the lower side in an internally fitted state. The orifice 10 is constituted by an annular passage formed between the outer periphery of the upper end of the second bottomed tubular member 9b and the inner periphery of the upper end of the first bottomed tubular member 9a. Is the opening 1 on one side in the circumferential direction
0a communicates with the pressure receiving chamber 7a, while opening 10 on the other side
b communicates with the equilibrium chamber 7b. Further, the central portion of the second bottomed tubular member 9b is fitted into the cylinder 16 so as to project downward on the tubular axis X, and the second bottomed tubular member 9b.
The driven side piston member 18 is constituted by the central portion of b.

【００２７】一方、上記弾性支持部材１１は内外周の各
側に配置された一対の取付リング１１ａ，１１ｂと、こ
の一対の取付リング１１ａ，１１ｂと一体に加硫接着さ
れて両取付リング１１ａ，１１ｂを互いに連結する環状
のゴム弾性体１１ｃとから構成されている。そして、内
周側取付リング１１ａの内周面に上記第１有底筒部材９
ａの外周面が圧入される一方、上記外周側取付リング１
１ｂのフランジ部が上記のごとく第１取付部材３に取付
けられることにより、上記仕切体９が第１取付部材３に
対して上下方向に変位可能に弾性支持されている。On the other hand, the elastic support member 11 has a pair of mounting rings 11a, 11b arranged on each side of the inner and outer circumferences, and both mounting rings 11a, 11b are integrally vulcanized and bonded together. It is composed of an annular rubber elastic body 11c that connects 11b to each other. The first bottomed tubular member 9 is formed on the inner peripheral surface of the inner peripheral side mounting ring 11a.
While the outer peripheral surface of a is press-fitted, the outer peripheral side mounting ring 1
By attaching the flange portion 1b to the first mounting member 3 as described above, the partition body 9 is elastically supported so as to be vertically displaceable with respect to the first mounting member 3.

【００２８】上記シリンダ１６は、上下方向に互いに重
合されて一体化された一対の板状部材１９，２０により
形成されており、これら一体化された両板状体１９，２
０の外周部が上記の如く第１取付部材３に固定されてい
る。上記の内、下側板状体１９の中央部には筒軸Ｘに沿
って下方に延びる小径筒部１９ａが一体形成されてお
り、この小径筒部１９ａが上記ダイヤフラム６を貫通し
て液室８外の第２支持筒体２の内周面により区画された
空間２１内に突出されている。そして、この小径筒部１
９ａの内周面に上記駆動側ピストン部材１７の上端部の
外周面がゴム弾性部材２２を介して液密に内嵌されて上
記駆動側ピストン部材１７が上下方向に進退変位可能に
支持されている。The cylinder 16 is formed by a pair of plate-like members 19 and 20 which are vertically overlapped with each other and integrated with each other, and these plate-like members 19 and 2 are integrated with each other.
The outer peripheral portion of 0 is fixed to the first mounting member 3 as described above. Of the above, a small-diameter cylinder portion 19a extending downward along the cylinder axis X is integrally formed in the central portion of the lower plate-like body 19, and the small-diameter cylinder portion 19a penetrates the diaphragm 6 and the liquid chamber 8 It projects into the space 21 defined by the inner peripheral surface of the outer second support cylinder 2. And this small diameter cylinder part 1
The outer peripheral surface of the upper end portion of the drive-side piston member 17 is liquid-tightly fitted into the inner peripheral surface of 9a through the rubber elastic member 22 so that the drive-side piston member 17 is supported so as to be able to move forward and backward in the vertical direction. There is.

【００２９】一方、上記上側板状体２０の中央部には筒
軸Ｘに沿って上方に延びる大径筒部２０ａが一体形成さ
れており、この大径筒部２０ａの内周面に上記従動側ピ
ストン部材１８の下端部の外周面が有底筒状のゴム弾性
部材２３を介して液密に内嵌されて上記従動側ピストン
部材１８が上下方向に進退変位可能に支持されている。
そして、この従動側ピストン部材１８の受圧面１８ａ
と、上記大径筒部２０ａと、上記駆動側ピストン部材１
７の加圧面１７ａとによって密閉されて上記シリンダ室
１６ａが画成されている。On the other hand, a large-diameter cylindrical portion 20a extending upward along the cylindrical axis X is integrally formed in the central portion of the upper plate-like body 20, and the driven surface is attached to the inner peripheral surface of the large-diameter cylindrical portion 20a. The outer peripheral surface of the lower end portion of the side piston member 18 is liquid-tightly fitted in via a bottomed tubular rubber elastic member 23 so that the driven side piston member 18 is supported so as to be able to move forward and backward in the vertical direction.
Then, the pressure receiving surface 18a of the driven side piston member 18
And the large-diameter cylindrical portion 20a and the drive-side piston member 1
The cylinder chamber 16a is defined by being closed by the pressure surface 17a of the cylinder 7.

【００３０】加えて、上記従動側ピストン部材１８の受
圧面１８ａには所定の微小径の気泡抜孔２４が形成され
ており、この気泡抜孔２４を通してシリンダ室１６ａ内
に残留した気泡が受圧室７ａの側に排出されるようにな
っている。そして、この気泡抜孔２４の径などの寸法諸
元は上記ゴム弾性体１１ｃおよびゴム弾性部材２２，２
３に基く拡張バネと、気泡抜孔２４内の液体の質量とで
定まる共振周波数が、アクチュエータ１２の作動により
仕切体９を強制加振させる周波数領域よりも十分に低く
なるように設定されている。つまり、上記仕切体９の強
制加振により受圧室７ａの内圧制御を行う周波数領域の
振動が入力した時には、上記気泡抜孔２４が目詰まり現
象を生じてロックするようになっている。また、上記弾
性支承体５の頂部には、上記受圧室７ａの最上部に臨ん
で下向きに開口するつぼ部２５が形成されており、この
つぼ部２５によって受圧室７ａの頂部に上昇して溜まる
気泡を収容するようになっている。そして、このつぼ部
２５の内径および長さなどの寸法諸元は、上記オリフィ
ス１０の設定共振周波数よりも十分に低い共振周波数と
なるように設定されており、上記オリフィス１０の液柱
共振により振動の減衰を行う低周波域の振動入力時には
上記つぼ部２５が目詰まり現象を生じてロックするよう
になっている。In addition, the pressure receiving surface 18a of the driven side piston member 18 is provided with a bubble vent hole 24 having a predetermined small diameter, and the bubbles remaining in the cylinder chamber 16a through the bubble vent hole 24 are stored in the pressure receiving chamber 7a. It is designed to be discharged to the side. Further, the dimensions such as the diameter of the bubble vent hole 24 are determined by the rubber elastic body 11c and the rubber elastic members 22, 2 described above.
The resonance frequency defined by the expansion spring based on 3 and the mass of the liquid in the bubble vent hole 24 is set to be sufficiently lower than the frequency range in which the partition body 9 is forcibly excited by the operation of the actuator 12. That is, when the vibration in the frequency region for controlling the internal pressure of the pressure receiving chamber 7a is input by the forced vibration of the partition body 9, the bubble vent hole 24 is locked due to a clogging phenomenon. Further, a crucible portion 25 is formed at the top of the elastic bearing member 5 so as to face the uppermost portion of the pressure receiving chamber 7a and opens downward. The crucible portion 25 rises and accumulates at the top of the pressure receiving chamber 7a. It is designed to contain air bubbles. The dimensional specifications such as the inner diameter and the length of the pot 25 are set so that the resonance frequency is sufficiently lower than the set resonance frequency of the orifice 10, and the liquid column resonance of the orifice 10 causes vibration. At the time of inputting vibration in the low frequency range for damping, the pot portion 25 causes a clogging phenomenon and locks.

【００３１】また、上記アクチュエータ１２において、
電磁コイル１４には第２支持筒体２を貫通して配設され
た図示省略のラインが接続され、このラインを通して通
電されるようになっている。一方、上記永久磁石１３の
上下端の両極にはそれぞれヨーク金具２６，２７が連結
され、これら両ヨーク金具２６，２７が上記電磁コイル
１４を筒軸Ｘに直交する方向から所定の隙間を介して挟
むように配置されている。In the actuator 12,
The electromagnetic coil 14 is connected to a line (not shown) arranged so as to pass through the second support cylindrical body 2 and is energized through this line. On the other hand, yoke fittings 26 and 27 are connected to the upper and lower poles of the permanent magnet 13, respectively, and these yoke fittings 26 and 27 interpose the electromagnetic coil 14 in a direction perpendicular to the cylinder axis X via a predetermined gap. It is arranged so as to sandwich it.

【００３２】なお、図中２８は上記一対の板状体１９，
２０の外周部を上下に貫通する１以上のかなり大きめの
連通孔であり、この連通孔２８によって平衡室７ｂ内の
上記両板状体１９，２０より上側の部分とダイヤフラム
６側である下側部分との間で液体８の自由な流動が行わ
れるようになっている。In the figure, 28 is the pair of plate-like members 19,
One or more rather large communicating holes vertically penetrating the outer peripheral portion of 20. By means of this communicating hole 28, the portion above the plate-like members 19 and 20 in the equilibrium chamber 7b and the lower side which is the diaphragm 6 side. A free flow of the liquid 8 is made between the portions.

【００３３】次に、上記構成の第１実施例による作用、
効果について説明する。Next, the operation of the first embodiment having the above-mentioned structure,
The effect will be described.

【００３４】第２取付部材４側から低周波域の振動が上
下方向に弾性支承体５に入力すると、この弾性支承体５
が上下方向に撓められ受圧室７ａ内の液体８がオリフィ
ス１０を通して平衡室７ｂとの間で流動する。そして、
この液体８の流動により、上記受圧室７ａと平衡室７ｂ
との間でのオリフィス１０を介した液柱共振が生じ、こ
の液柱共振により上記振動の減衰が図られる。When vibration in the low frequency range is input from the second mounting member 4 side in the vertical direction to the elastic support body 5, this elastic support body 5
Is bent in the vertical direction, and the liquid 8 in the pressure receiving chamber 7a flows through the orifice 10 to the equilibrium chamber 7b. And
Due to the flow of the liquid 8, the pressure receiving chamber 7a and the equilibrium chamber 7b are
A liquid column resonance is generated between the nozzles 1 and 2 via the orifice 10, and the liquid column resonance attenuates the vibration.

【００３５】そして、入力振動がより高周波側のものと
なって、上記オリフィス１０を通しての液体８の流動が
実質的に生じない、いわゆるロック状態となる場合で
も、上記振動の入力方向に応じて電磁コイル１４に通電
してアクチュエータ１２を作動することにより、仕切体
９を上下方向に強制加振することができ、受圧室７ａ内
の液圧変動の吸収を図ることができる。すなわち、振動
入力を受けた第２取付部材４の変位方向と同位相側に上
記仕切体９を加振することにより受圧室７ａ内の液圧の
急増を抑制することができ、これにより、第１取付部材
３側への伝達率の低減化、動ばね定数の低減化を図るこ
とができる。Even when the input vibration is on the higher frequency side and a so-called locked state in which the flow of the liquid 8 through the orifice 10 does not substantially occur, the electromagnetic wave is generated depending on the input direction of the vibration. By energizing the coil 14 and operating the actuator 12, the partition body 9 can be forcibly excited in the vertical direction, and fluctuations in the hydraulic pressure in the pressure receiving chamber 7a can be absorbed. That is, by vibrating the partition body 9 in the same phase side as the displacement direction of the second mounting member 4 that receives the vibration input, it is possible to suppress a sudden increase in the hydraulic pressure in the pressure receiving chamber 7a. (1) It is possible to reduce the transmissibility to the mounting member 3 side and the dynamic spring constant.

【００３６】この強制加振に際し、上記アクチュエータ
１２の作動により駆動側ピストン部材１７が上下動され
てその加圧面１７ａがシリンダ室１６ａ内の液体８を加
圧，減圧する。このシリンダ室１６ａの変化した内圧が
従動側ピストン部材１８の受圧面１８ａに作用して従動
側ピストン部材１８が上下動する。この際、上記加圧面
１７ａの面積（Ａ1 ）に対する上記受圧面１８ａの面積
（Ａ2 ）の比率（Ａ2／Ａ1 ）で上記駆動側ピストン部
材１７の作動力が増幅され、この増幅された作動力で従
動側ピストン部材１８が上下方向に加振される。このた
め、アクチュエータ１２による作動力の（Ａ2 ／Ａ1 ）
倍の作動力で仕切体９を加振することができる。このよ
うにアクチュエータ１２と仕切体９との間に作動特性変
換手段１５を介装させることにより、アクチュエータ１
２が永久磁石１３と電磁コイル１４との組合わせにより
構成されて比較的弱い加振力しか得られないものであっ
ても、仕切体９を所要の強い加振力で作動させることが
できる一方、仕切体９を同一の加振力で作動させるため
の上記アクチュエータ１２の能力や規模、すなわち、永
久磁石１３の規模や電磁コイル１４への電流値を小さく
することができ、防振装置全体のコンパクト化、作動コ
ストの低減化を図ることができる。なお、この場合、従
動側ピストン部材１８の作動ストロークは駆動側のそれ
より小さくなるものの、永久磁石１３と電磁コイル１４
との組合わせによるアクチュエータ１２は、元来、比較
的大きな作動ストロークを有しているため、所要の作動
ストロークを十分に確保することができる。During this forced vibration, the drive side piston member 17 is moved up and down by the operation of the actuator 12, and the pressurizing surface 17a pressurizes and depressurizes the liquid 8 in the cylinder chamber 16a. The changed internal pressure of the cylinder chamber 16a acts on the pressure receiving surface 18a of the driven side piston member 18 to move the driven side piston member 18 up and down. At this time, the operating force of the drive-side piston member 17 is amplified by the ratio (A2 / A1) of the area (A2) of the pressure receiving surface 18a to the area (A1) of the pressing surface 17a. The driven piston member 18 is vertically vibrated. Therefore, the operating force of the actuator 12 (A2 / A1)
The partition body 9 can be vibrated with a double operating force. In this way, by interposing the operating characteristic conversion means 15 between the actuator 12 and the partition body 9, the actuator 1
Even if 2 is a combination of the permanent magnet 13 and the electromagnetic coil 14 and can obtain only a comparatively weak excitation force, the partition 9 can be operated with a required strong excitation force. , The capacity and scale of the actuator 12 for operating the partition body 9 with the same excitation force, that is, the scale of the permanent magnet 13 and the current value to the electromagnetic coil 14 can be reduced, and the vibration damping device as a whole can be reduced. It is possible to make the device compact and reduce the operating cost. In this case, although the working stroke of the driven side piston member 18 is smaller than that on the driving side, the permanent magnet 13 and the electromagnetic coil 14 are
Since the actuator 12 formed by the combination of and has a relatively large operating stroke, it is possible to sufficiently secure the required operating stroke.

【００３７】そして、このような作動力特性の増幅変換
が行われる防振装置において、上記シリンダ室１６ａは
気泡抜孔２４を介して受圧室７ａと連通されているた
め、例えば防振装置の製造時に気泡がシリンダ室１６ａ
の液体８中に万一残留した場合であっても、その残留し
た気泡が上記気泡抜孔２４を通して受圧室７ａ側に排出
され、この受圧室７ａ内の液体８中を上昇して頂部に至
り、つぼ部２５内に溜められる。これにより、たとえ、
気泡が製造時に残留しても、その残留気泡のシリンダ室
１６ａおよび／もしくは受圧室７ａからの排出および分
離を確実に行うことができる。この結果、上記シリンダ
室１６ａに残留した気泡により内圧変化が吸収されるこ
とに伴う作動力の特性変換効率の低下を防止することが
できる。しかも、上記気泡抜孔２４が上記仕切体９を強
制加振させるような高周波領域ではロックするようにチ
ューニングされているため、作動特性変換手段１５によ
る作動力の特性変換作用を確実に得ることができる。加
えて、上記つぼ部２５がオリフィス１０により減衰され
る低周波領域ではロックするようにチューニングされて
いるため、オリフィス１０による低周波領域の振動減衰
機能を害することを確実に防止することができる。In the vibration isolator that performs such amplification and conversion of the operating force characteristic, since the cylinder chamber 16a is communicated with the pressure receiving chamber 7a through the bubble vent hole 24, for example, when the vibration isolator is manufactured. Air bubbles are in the cylinder chamber 16a
Even if it remains in the liquid 8, the remaining bubbles are discharged to the pressure receiving chamber 7a side through the bubble vent hole 24, rise in the liquid 8 in the pressure receiving chamber 7a, and reach the top. It is stored in the pot portion 25. With this, even if
Even if the bubbles remain during manufacturing, it is possible to reliably discharge and separate the residual bubbles from the cylinder chamber 16a and / or the pressure receiving chamber 7a. As a result, it is possible to prevent the efficiency of characteristic conversion of the operating force from being lowered due to the change in the internal pressure being absorbed by the bubbles remaining in the cylinder chamber 16a. Moreover, since the bubble vent hole 24 is tuned so as to be locked in a high frequency region where the partition body 9 is forcibly excited, the characteristic conversion action of the operating force by the operation characteristic conversion means 15 can be reliably obtained. . In addition, since the pot portion 25 is tuned so as to lock in the low frequency region damped by the orifice 10, it is possible to reliably prevent the vibration damping function of the orifice 10 in the low frequency region from being impaired.

【００３８】＜第２実施例＞図２は本発明の第２実施例
に係る制御式防振装置を示し、３１は液室７を受圧室７
ａと平衡室７ｂとを仕切るよう筒軸Ｘ方向に直交する方
向に配置され弾性支持部材１１により筒軸Ｘ方向である
上下方向に振動変位可能に弾性支持された振動板として
の仕切体、３２はこの仕切体３１を上下方向に強制加振
するための圧電素子３２ａを用いたアクチュエータ、３
３はこのアクチュエータ３２と上記仕切体３１との間に
介装された作動特性変換手段である。<Second Embodiment> FIG. 2 shows a control type vibration damping device according to a second embodiment of the present invention, in which 31 denotes a liquid chamber 7 and a pressure receiving chamber 7.
A partitioning body as a diaphragm, which is arranged in a direction orthogonal to the cylinder axis X direction so as to partition the a and the equilibrium chamber 7b, and is elastically supported by an elastic support member 11 so as to be capable of vibration displacement in the vertical direction that is the cylinder axis X direction, Is an actuator using a piezoelectric element 32a for forcibly exciting the partition body 31 in the vertical direction,
Reference numeral 3 is an operation characteristic conversion means interposed between the actuator 32 and the partition body 31.

【００３９】上記仕切体３１は、下方に開口した第１有
底筒部材３１ａと、同様に下方に開口した第２有底筒部
材３１ｂとからなり、この第２有底筒部材３１ｂが上記
第１有底筒部材３１ａの内面に下側から内嵌状態で重合
されて一体化されている。そして、この第２有底筒部材
３１ｂの上端外周囲と上記第１有底筒部材３１ａの上端
内周囲との間に形成された環状の通路によって、受圧室
７ａと平衡室７ｂとを互いに連通するオリフィス１０が
構成されている。The partition body 31 is composed of a first bottomed tubular member 31a which is opened downward and a second bottomed tubular member 31b which is similarly opened downward, and the second bottomed tubular member 31b is the first tubular member 31b. 1 The bottomed tubular member 31a is superposed and integrated in an internally fitted state from the lower side. The pressure receiving chamber 7a and the equilibrium chamber 7b are communicated with each other by an annular passage formed between the outer periphery of the upper end of the second bottomed tubular member 31b and the inner periphery of the upper end of the first bottomed tubular member 31a. The orifice 10 is configured.

【００４０】上記アクチュエータ３２は、棒状に形成さ
れて筒軸Ｘに対して同軸上に配置された積層圧電素子３
２ａと、この圧電素子３２ａに電圧の印加、遮断の制御
を行う図示省略の制御器とを備えている。上記圧電素子
３２ａは圧電セラミック層が上下方向に積層されて電圧
を印加した時に生じる圧電縦効果を利用したものであ
り、電圧の印加、遮断により上下方向に伸縮して加振作
動力を発生するようになっている。つまり、電圧の印加
により印加電圧に対応して上下方向に伸び歪みが生じ、
遮断により縮んで復元するようになっている。上記圧電
素子３２ａは圧電縦効果が生じる方向に細長い棒状に形
成されており、このような圧電素子３２ａとしては、例
えば、圧電セラミック層となるセラミック薄板を積層接
着したものの他、上記の圧電セラミック層を厚膜積層技
術（グリーンシート法）の応用により接着剤を使わずに
積層しこれを一体焼結したものなどが適用される。そし
て、上記圧電素子３２ａは下端が第２支持筒体２の底面
上に位置固定され、上端が後述の駆動側ピストン部材３
５の筒部３５ｂに下から内挿されて加圧板３５ａの下面
に当接されている。The actuator 32 is formed in the shape of a rod and is arranged coaxially with the cylinder axis X.
2a and a controller (not shown) that controls the application and interruption of voltage to the piezoelectric element 32a. The piezoelectric element 32a utilizes a piezoelectric vertical effect that is generated when a piezoelectric ceramic layer is laminated in the vertical direction and a voltage is applied. The piezoelectric element 32a expands and contracts in the vertical direction by applying and blocking the voltage so as to generate a vibration actuation force. It has become. In other words, when voltage is applied, stretching strain is generated in the vertical direction corresponding to the applied voltage,
It is designed to shrink and restore due to interruption. The piezoelectric element 32a is formed in the shape of an elongated rod in the direction in which the piezoelectric vertical effect is generated. As such a piezoelectric element 32a, for example, a ceramic thin plate to be a piezoelectric ceramic layer is laminated and adhered, and the piezoelectric ceramic layer is also used. By applying the thick film laminating technology (green sheet method), a material obtained by laminating without using an adhesive and integrally sintering it is applied. The lower end of the piezoelectric element 32a is positionally fixed on the bottom surface of the second support cylindrical body 2, and the upper end thereof is the drive-side piston member 3 described later.
5 is inserted into the cylindrical portion 35b from below and is in contact with the lower surface of the pressure plate 35a.

【００４１】上記作動特性変換手段３３は、第１実施例
と同様に、シリンダ３４と、加圧面を構成する加圧板３
５ａがこのシリンダ３４に下側から上方に内挿された駆
動側ピストン部材３５と、先端部（下端部）が上記シリ
ンダ３４に上側から下方に内挿されて基端部（上端部）
が上記仕切体９に一体的に連結された従動側ピストン部
材３６と、後述の気泡抜孔４１とを備えている。As in the first embodiment, the operating characteristic converting means 33 includes the cylinder 34 and the pressure plate 3 forming the pressure surface.
5a is a driving-side piston member 35 inserted in the cylinder 34 from the lower side to the upper side, and a tip end (lower end) is inserted in the cylinder 34 from the upper side to the lower side, and a base end (upper end).
Is provided with a driven side piston member 36 integrally connected to the partition body 9 and a bubble vent hole 41 described later.

【００４２】上記駆動側ピストン部材３５は大径の円板
部材である加圧板３５ａ上面の加圧面が比較的大きい面
積（Ａ1 ）とされている一方、上記従動側ピストン部材
３６は上記駆動側ピストン部材３５のそれより所定量小
径の円形断面に形成されて下端の受圧面３６ａが上記面
積（Ａ1 ）より所定量小さい面積（Ａ2 ）とされてい
る。そして、上記駆動側ピストン部材３５の加圧板３５
ａの下面には筒軸Ｘに沿って下方に突出する筒部３５ｂ
が一体に形成されてこの筒部３５ｂ内に上述の如く圧電
素子３２ａが配設されており、この圧電素子３２ａが上
下方向に伸縮することにより上記駆動側ピストン部材３
５が進退して上記シリンダ３４のシリンダ室３４ａ内に
封入された非圧縮性の作動用液体８を介して上記従動側
ピストン部材３６に伝達されるようになっている。つま
り、上記アクチュエータ３２による駆動側ピストン部材
３５の上下方向作動ストロークをＳ1 とし、上記作動用
液体８を介して従動側ピストン部材３６が作動される作
動ストロークをＳ2 とすると、このＳ2 は上記面積Ａ1
，Ａ2 に基いて、 Ｓ2 ＝（Ａ1 ／Ａ2 ）・Ｓ1 となり、Ｓ1 の（Ａ1 ／Ａ2 ）倍に作動ストローク特性
が増大変換されるようになっている。The driving side piston member 35 has a relatively large area (A1) for the pressing surface of the pressing plate 35a, which is a large-diameter disk member, while the driven side piston member 36 is the driving side piston. The pressure receiving surface 36a at the lower end is formed in a circular cross section having a diameter smaller than that of the member 35 by a predetermined amount smaller than the area (A1). The pressure plate 35 of the drive side piston member 35 is
On the lower surface of a, a tubular portion 35b protruding downward along the tubular axis X.
Are integrally formed, and the piezoelectric element 32a is disposed in the tubular portion 35b as described above. The piezoelectric element 32a expands and contracts in the vertical direction, so that the drive-side piston member 3 is formed.
5 moves forward and backward and is transmitted to the driven-side piston member 36 via the incompressible working liquid 8 sealed in the cylinder chamber 34a of the cylinder 34. That is, when the vertical operation stroke of the drive side piston member 35 by the actuator 32 is S1 and the operation stroke at which the driven side piston member 36 is operated via the operation liquid 8 is S2, this S2 is the area A1.
, A2, S2 = (A1 / A2) .multidot.S1 and the operating stroke characteristic is increased and converted to (A1 / A2) times S1.

【００４３】上記シリンダ３４は、上下方向に互いに重
合されて一体化された一対の板状部材３７，３８により
形成されており、これら一体化された両板状体３７，３
８の外周部が第１実施例と同様に第１取付部材３に固定
されている。上記の内、下側板状体３７は比較的厚肉に
形成されその中央部に筒軸Ｘと同軸に上記大径の加圧板
３５ａより所定量大径の貫通孔が形成される一方、上記
上側板状体３８には上下方向に開口して筒軸Ｘに沿って
上方に延びる小径筒部３８ａが一体に形成されている。
そして、上記下側板状体３７の貫通孔の下端部に上記加
圧板３５ａが環状のゴム弾性部材３９を介して液密状態
で上下方向に進退可能に支持される一方、上記上側板状
体３８の小径筒部３８ａ内に従動側ピストン部材３６の
下端部が内挿された状態で筒状のゴム弾性部材４０介し
て液密状態で上下方向に進退可能に支持されている。こ
れにより、上記駆動側ピストン部材３５の加圧板３５
ａ、従動側ピストン部材の受圧面３６ａ、下側板状体３
７の貫通孔、および、上側板状体３８の下面によって密
閉されてシリンダ室３４ａが画成されている。The cylinder 34 is formed by a pair of plate-like members 37 and 38 which are vertically overlapped with each other and integrated with each other. The plate-like members 37 and 3 are integrated with each other.
The outer peripheral portion of 8 is fixed to the first mounting member 3 as in the first embodiment. Among the above, the lower plate-like body 37 is formed to be relatively thick, and a through hole having a predetermined diameter larger than that of the large-diameter pressure plate 35a is formed in the center of the lower plate-like body 37 coaxially with the cylinder axis X. The side plate member 38 is integrally formed with a small-diameter tubular portion 38a that opens in the vertical direction and extends upward along the tubular axis X.
The pressing plate 35a is supported at the lower end of the through hole of the lower plate-like body 37 via a ring-shaped rubber elastic member 39 so as to be vertically movable in the liquid-tight state, while the upper plate-like body 38 is also supported. With the lower end of the driven-side piston member 36 inserted in the small-diameter tubular portion 38a, the driven-side piston member 36 is supported by a tubular rubber elastic member 40 so as to be vertically movable in a vertical direction. Thereby, the pressure plate 35 of the drive side piston member 35 is
a, the pressure receiving surface 36a of the driven side piston member, the lower plate-like body 3
The through hole 7 and the lower surface of the upper plate-like body 38 are closed to define a cylinder chamber 34a.

【００４４】一方、上記従動側ピストン部材３６には所
定径の気泡抜孔４１が貫通して形成されており、この気
泡抜孔４１は下端が上記下端面３６ａでシリンダ室３４
ａに臨んで開口しシリンダ室３４ａ内に残留した気泡が
この気泡抜孔４１を通して仕切体３１下側の平衡室７ｂ
に排出されるようになっている。そして、この気泡抜孔
４１の径および長さなどの寸法諸元は上記ゴム弾性体１
１ｃおよびゴム弾性部材３９，４０に基く拡張バネと、
気泡抜孔４１内の液体の質量とで定まる共振周波数が、
アクチュエータ３２の作動により仕切体３１を強制加振
させる周波数領域よりも十分に低くなるように設定され
ている。つまり、上記仕切体３１の強制加振により受圧
室７ａの内圧制御を行う周波数領域の振動が入力した時
には、上記気泡抜孔４１が目詰まり現象を生じてロック
するようになっている。On the other hand, the driven side piston member 36 is formed with a bubble vent hole 41 of a predetermined diameter penetrating therethrough. The bubble vent hole 41 has a lower end at the lower end surface 36a of the cylinder chamber 34.
Bubbles that open toward the side a and remain in the cylinder chamber 34a pass through the bubble vent holes 41, and the equilibrium chamber 7b below the partition 31.
It is designed to be discharged to. The dimensional specifications such as the diameter and the length of the bubble vent 41 are the same as those of the rubber elastic body 1 described above.
1c and an expansion spring based on the rubber elastic members 39 and 40,
The resonance frequency determined by the mass of the liquid in the bubble vent 41 is
It is set to be sufficiently lower than the frequency range in which the partition body 31 is forcibly excited by the operation of the actuator 32. That is, when the vibration in the frequency range for controlling the internal pressure of the pressure receiving chamber 7a is input by the forced vibration of the partition body 31, the bubble vent hole 41 causes a clogging phenomenon and locks.

【００４５】なお、図中４２は上記一対の板状体３７，
３８の外周部を上下に貫通する１以上のかなり大きめの
連通孔であり、この連通孔４２によって平衡室７ｂ内の
上記両板状体３７，３８より上側部分とダイヤフラム６
側である下側部分との間で液体８の自由な流動が行われ
るようになっている。Reference numeral 42 in the drawing denotes the pair of plate-like members 37,
One or more rather large communicating holes vertically penetrating the outer peripheral portion of 38, and the communicating hole 42 allows the diaphragm 6 and the upper portion of both plate-like bodies 37 and 38 in the equilibrium chamber 7b to be communicated.
A free flow of the liquid 8 is made between the lower part which is the side.

【００４６】なお、上記制御式防振装置のその他の構成
は第１実施例のものと同様であるために、同一部材には
同一符号を付して、その説明は省略する。Since the other constitution of the control type vibration damping device is the same as that of the first embodiment, the same members are designated by the same reference numerals and the description thereof will be omitted.

【００４７】そして、この第２実施例の場合も、第２取
付部材４側から低周波域の振動が上下方向に弾性支承体
５に入力すると、第１実施例と同様に、上記受圧室７ａ
と平衡室７ｂとの間でのオリフィス１０を介した液柱共
振により上記振動の減衰が図られる一方、上記オリフィ
ス１０がロック状態となる高周波側の振動が入力する
と、その入力方向に応じて圧電素子３２ａへの電圧印
加，遮断が繰り返され、この進退作動力が作動特性変換
手段３３を介して仕切体３１に伝達されてこの仕切体３
１が強制加振される。すなわち、第１実施例と同様に、
振動入力を受けた第２取付部材４の変位方向と同位相側
に上記仕切体９が加振されて受圧室７ａ内の液圧の急増
を抑制することができ、これにより、第１取付部材３側
への伝達率の低減化、動ばね定数の低減化を図ることが
できる。Also in this second embodiment, when vibrations in the low frequency range are input from the second mounting member 4 side in the vertical direction to the elastic support body 5, the pressure receiving chamber 7a is the same as in the first embodiment.
The vibrations are damped by the resonance of the liquid column through the orifice 10 between the equilibrium chamber 7b and the equilibrium chamber 7b. On the other hand, when the vibration on the high frequency side in which the orifice 10 is locked is input, the vibration is generated according to the input direction. The application of voltage to the element 32a and the interruption thereof are repeated, and the forward / backward operating force is transmitted to the partition body 31 via the operating characteristic converting means 33 so that the partition body 3 is operated.
1 is forcibly excited. That is, as in the first embodiment,
The partition 9 is vibrated on the same phase side as the displacement direction of the second mounting member 4 which receives the vibration input, and it is possible to suppress the sudden increase of the hydraulic pressure in the pressure receiving chamber 7a. It is possible to reduce the transmissibility to the third side and the dynamic spring constant.

【００４８】この強制加振に際し、アクチュエータ３２
の作動により駆動側ピストン部材３５が上下動されてそ
の加圧板３５ａがシリンダ室３４ａ内の液体８を加圧，
減圧する。このシリンダ室３４ａの液体８が従動側ピス
トン部材３６の受圧面３６ａに作用して従動側ピストン
部材３６が上下動する。この際、上記受圧面３６ａの面
積（Ａ2 ）に対する上記加圧板３５ａの面積（Ａ1 ）の
比率（Ａ1 ／Ａ2 ）で上記駆動側ピストン部材３５の作
動ストロークが増大され、この増大された作動ストロー
クで従動側ピストン部材３６が上下方向に加振される。
このため、アクチュエータ３２による作動ストロークの
（Ａ1 ／Ａ2 ）倍の作動ストロークで仕切体３１を加振
することができる。このようにアクチュエータ３２と仕
切体３１との間に作動特性変換手段３３を介装させるこ
とにより、アクチュエータ３２が圧電素子３２ａにより
構成されて比較的小さい作動ストロークでしか加振させ
ることができないものであっても、仕切体３１を比較的
大きい作動ストロークで加振作動させることができる一
方、上記作動特性変換手段３３を設けない場合と比べ、
仕切体３１を同一の作動ストロークで加振させるための
上記アクチュエータ３２の能力や規模、すなわち、圧電
素子３２ａの積層数や印加電圧値などを小さくすること
ができ、防振装置全体のコンパクト化、作動コストの低
減化を図ることができる。なお、この場合、従動側ピス
トン部材３６の作動力は駆動側ピストン部材３５のそれ
よりも小さくなるものの、アクチュエータ３２が圧電素
子３２ａにより構成されて、元来、比較的大きい作動力
を有しているため、所要の作動力に対して十分なものを
確保することができる。At the time of this forced vibration, the actuator 32
The driving side piston member 35 is moved up and down by the operation of the pressure plate 35a to pressurize the liquid 8 in the cylinder chamber 34a,
Decompress. The liquid 8 in the cylinder chamber 34a acts on the pressure receiving surface 36a of the driven side piston member 36, and the driven side piston member 36 moves up and down. At this time, the working stroke of the drive-side piston member 35 is increased by the ratio (A1 / A2) of the area (A1) of the pressure plate 35a to the area (A2) of the pressure receiving surface 36a. The driven piston member 36 is vertically vibrated.
Therefore, the partition 31 can be vibrated with an operating stroke that is (A1 / A2) times the operating stroke of the actuator 32. By thus interposing the operation characteristic conversion means 33 between the actuator 32 and the partition body 31, the actuator 32 is constituted by the piezoelectric element 32a and can be excited only with a relatively small operation stroke. Even if there is, the partition body 31 can be vibrated with a relatively large operating stroke, while compared with the case where the operating characteristic conversion means 33 is not provided.
It is possible to reduce the capacity and scale of the actuator 32 for vibrating the partition body 31 with the same operation stroke, that is, the number of stacked piezoelectric elements 32a, the applied voltage value, etc. The operating cost can be reduced. In this case, although the operating force of the driven side piston member 36 is smaller than that of the driving side piston member 35, the actuator 32 is composed of the piezoelectric element 32a and originally has a relatively large operating force. Therefore, it is possible to secure a sufficient amount for the required operating force.

【００４９】そして、このような作動ストローク特性の
増大変換が行われる防振装置において、上記シリンダ室
３４ａは気泡抜孔４１を介して平衡室７ｂと連通と連通
されているため、例えば防振装置の製造時に気泡がシリ
ンダ室３４ａの液体８中に万一残留した場合であって
も、その残留した気泡が上記気泡抜孔４１を通して平衡
室７ｂ側に排出されるため、駆動側ピストン部材３５に
よる加圧時に上記シリンダ室３４ａに残留した気泡によ
りシリンダ室３４ａ内の容積が縮小することに伴う作動
ストロークの特性変換度合の低下を防止することができ
る。この場合、アクチュエータ３２が圧電素子３２ａに
よりされて駆動側ピストン部材３５の作動ストロークが
極めて小さいため、上記の特性変換度合の低下を防止で
きることは、上記の如きアクチュエータ３２を用いる防
振装置にとって、特に重要な効果となる。In the vibration isolator in which the operation stroke characteristic is increased and converted as described above, since the cylinder chamber 34a is in communication with the equilibrium chamber 7b through the bubble vent hole 41, for example, the vibration isolator Even if air bubbles remain in the liquid 8 in the cylinder chamber 34a during manufacturing, the remaining air bubbles are discharged to the equilibrium chamber 7b side through the air bubble vent hole 41, so that the driving side piston member 35 pressurizes the air bubbles. It is possible to prevent a decrease in the degree of characteristic conversion of the working stroke due to the reduction of the volume in the cylinder chamber 34a due to the bubbles remaining in the cylinder chamber 34a. In this case, since the actuator 32 is driven by the piezoelectric element 32a and the operation stroke of the driving side piston member 35 is extremely small, it is possible to prevent the above-mentioned deterioration of the characteristic conversion degree, especially for the vibration isolator using the actuator 32 as described above. It has an important effect.

【００５０】しかも、上記の場合、平衡室７ｂ内に排出
された気泡がオリフィス１０を通して受圧室７ａ側に排
出され、受圧室７ａ内を上昇してつぼ部２５内に溜めら
れるため、平衡室７ｂおよび受圧室７ａから混入気泡を
確実に排出させることができる。加えて、上記気泡抜孔
４１の高周波領域でのロック、および、つぼ部２５の低
周波領域でのロックによって、上記高周波領域での作動
特性変換手段３３による作動ストロークの特性変換作用
を確実に得ることができる一方、オリフィス１０による
低周波領域の入力振動の減衰を確実に得ることができる
点は、第１実施例と同様である。Moreover, in the above case, the air bubbles discharged into the equilibrium chamber 7b are discharged to the pressure receiving chamber 7a side through the orifice 10, rise in the pressure receiving chamber 7a and are stored in the crucible portion 25. Also, the mixed bubbles can be reliably discharged from the pressure receiving chamber 7a. In addition, by locking the bubble vent hole 41 in the high frequency range and locking the pot 25 in the low frequency range, it is possible to reliably obtain the characteristic conversion action of the operation stroke by the operation characteristic conversion means 33 in the high frequency range. On the other hand, the point that the input vibration in the low frequency region can be reliably attenuated by the orifice 10 is the same as in the first embodiment.

【００５１】＜他の態様例＞なお、本発明は上記第１お
よび第２実施例に限定されるものではなく、その他種々
の変形例を包含するものである。すなわち、上記実施例
では、振動板として、受圧室７ａと平衡室７ｂとを仕切
る仕切体９，３１を用いているが、これに限らず、例え
ば仕切体を固定にし、この仕切体とは別に振動板を設け
るようにしてもよい。<Other Embodiments> The present invention is not limited to the first and second embodiments described above, but includes various other modifications. That is, in the above-mentioned embodiment, as the diaphragm, the partition bodies 9 and 31 for partitioning the pressure receiving chamber 7a and the equilibrium chamber 7b are used, but the invention is not limited to this. For example, the partition body may be fixed and separated from this partition body. A diaphragm may be provided.

【００５２】上記実施例では、各ピストン部材１７，１
８、３５，３６をゴム弾性部材２２，２３、３９，４０
により弾性支持させているが、これに限らず、液密に維
持した状態で摺動により進退可能に支持させてもよい。In the above embodiment, each piston member 17, 1
8, 35, 36 are rubber elastic members 22, 23, 39, 40
However, the invention is not limited to this and may be supported so as to be able to advance and retreat by sliding in a liquid-tight state.

【００５３】上記実施例では、駆動側と従動側との両ピ
ストン部材１７，３５、１８，３６を共に進退方向が上
下方向になるように配置しているが、これに限らず、上
記従動側ピストン部材１８，３６をのみ振動板の加振方
向である上下方向に配置する必要があるだけで、駆動側
ピストン部材１７，３５は、シリンダ室１６ａ，３４ａ
内の液体を加圧，減圧できれば、いずれの方向に進退す
るように配置してもよい。In the above embodiment, both the driving side and driven side piston members 17, 35, 18 and 36 are arranged so that the advancing and retreating directions are the up and down directions. Only the piston members 18 and 36 need to be arranged in the vertical direction, which is the vibration direction of the diaphragm, and the drive side piston members 17 and 35 are arranged in the cylinder chambers 16a and 34a.
As long as the liquid inside can be pressurized or depressurized, it may be arranged so as to move forward or backward in any direction.

【００５４】また、上記実施例では、オリフィス１０を
仕切体９，３１自体に形成しているが、これに限らず、
例えば、仕切体とは全く独立してオリフィスを形成して
もよい。Further, in the above-mentioned embodiment, the orifice 10 is formed in the partition bodies 9 and 31 itself, but the invention is not limited to this.
For example, the orifice may be formed completely independently of the partition body.

【００５５】さらに、上記実施例では、上側の第２取付
部材４をエンジン側に、第１取付部材３を車体側に連結
しているが、これに限らず、例えばエンジンを吊り下げ
支承するタイプでは、第１取付部材を車体側に、第２取
付部材をエンジン側に連結すればよい。この場合、図３
に示すように、シリンダ室３４ａの上位となる駆動側ピ
ストン部材の加圧板３５ａに気泡抜孔４３を設け、シリ
ンダ室３４ａ内の液体８中に混入した気泡を上記気泡抜
孔４３から平衡室７ｂのダイヤフラム６側の部分に排出
し、この頂部４４に気泡を溜めるようにすればよい。こ
の場合においても、上記気泡抜孔４３は第１，第２実施
例と同様にチューニングすればよい。また、気泡が上記
ダイヤフラム６の頂部４４に溜められるため、弾性支承
体５の側から入力する低周波振動の減衰特性を害するこ
ともなく、また、つぼ部２５を設ける必要もない。Further, in the above embodiment, the upper second mounting member 4 is connected to the engine side and the first mounting member 3 is connected to the vehicle body side. However, the present invention is not limited to this, and the engine is suspended and supported, for example. Then, it suffices to connect the first mounting member to the vehicle body side and the second mounting member to the engine side. In this case,
As shown in FIG. 5, a bubble vent hole 43 is provided in the pressure plate 35a of the drive side piston member above the cylinder chamber 34a, so that the bubbles mixed in the liquid 8 in the cylinder chamber 34a can pass through the bubble vent hole 43 to the diaphragm of the equilibration chamber 7b. The gas may be discharged to the portion on the 6 side and the bubbles may be accumulated in the top portion 44. Even in this case, the bubble vent hole 43 may be tuned in the same manner as in the first and second embodiments. Further, since the bubbles are stored in the top portion 44 of the diaphragm 6, the damping characteristic of low frequency vibration input from the elastic support 5 side is not impaired, and it is not necessary to provide the crucible portion 25.

【００５６】[0056]

【発明の効果】以上説明したように、請求項１記載の発
明における制御式防振装置によれば、振動板と、これを
強制加振するためのアクチュエータとの間に、シリンダ
と、アクチュエータに連結されてシリンダに対して進退
する駆動側ピストン部材と、振動板に連結されてシリン
ダ室内に封入された非圧縮性液体を介して従動される従
動側ピストン部材と、気泡抜孔とで構成した作動特性変
換手段を介装し、その駆動側ピストン部材の加圧面の面
積と従動側ピストン部材の受圧面の面積とを互いに異な
る大きさに設定しているため、上記従動側ピストン部材
の作動力もしくは作動ストロークなどの進退作動特性
を、アクチュエータによる駆動側ピストン部材の進退作
動力もしくは作動ストロークに対して上記加圧面の面積
と受圧面の面積との比に応じて変化させたものにするこ
とができる。As described above, according to the control type vibration damping device of the first aspect of the invention, the cylinder and the actuator are provided between the diaphragm and the actuator for forcibly exciting the diaphragm. Operation consisting of a drive-side piston member that is connected and moves back and forth with respect to the cylinder, a driven-side piston member that is connected to the vibration plate and driven by the incompressible liquid enclosed in the cylinder chamber, and a bubble vent hole Since the characteristic converting means is interposed and the area of the pressing surface of the driving side piston member and the area of the pressure receiving surface of the driven side piston member are set to different sizes from each other, the operating force of the driven side piston member or The advancing / retreating characteristic such as the operating stroke can be calculated by comparing the area of the pressure surface and the area of the pressure receiving surface with respect to the advancing / retreating operation force of the driving side piston member by the actuator or the operating stroke. It can be that varied depending on the.

【００５７】そして、このような作動特性を変換し得る
防振装置において、製造時にシリンダ室に混入した空気
がその内部の液体中に気泡として残留した場合であって
も、上記シリンダ室の上位の側のピストン部材に気泡抜
孔を形成しているため、その気泡を上記気泡抜孔を通し
て液室側に確実に排出することができ、この結果、上記
駆動側ピストン部材の進退作動時にシリンダ室内の液体
をシリンダ室の容積のまま確実に一定に保つことがで
き、所定の効率の作動特性の変換を確実に得ることがで
きる。しかも、この気泡抜孔を介した液柱共振の共振周
波数として上記アクチュエータを作動させる入力振動の
設定周波数域よりも十分に低いものに設定しているた
め、上記アクチュエータを作動させる周波数領域では上
記気泡抜孔を目詰まり状態としてロックさせることがで
き、このため、上記各ピストン部材の加圧面と受圧面と
の両面積比に基く作動特性の変換を確実に所定のもに維
持することができる。In the vibration isolator capable of converting such operating characteristics, even when the air mixed in the cylinder chamber at the time of manufacture remains as bubbles in the liquid inside, the upper part of the cylinder chamber Since the air bubble vent hole is formed in the piston member on the side, the air bubble can be surely discharged to the liquid chamber side through the air bubble vent hole. The volume of the cylinder chamber can be surely kept constant and the conversion of the operating characteristic with a predetermined efficiency can be surely obtained. Moreover, since the resonance frequency of the liquid column resonance through the bubble vent is set to be sufficiently lower than the set frequency range of the input vibration for operating the actuator, the bubble vent is used in the frequency range for operating the actuator. Can be locked as a clogged state, so that the conversion of the operating characteristics based on the area ratio between the pressure surface and the pressure receiving surface of each piston member can be reliably maintained at a predetermined value.

【００５８】請求項２記載の発明によれば、上記請求項
１記載の発明による効果に加えて、液室の上方に位置付
けた弾性支承体の頂部に気泡を収容するつぼ部を設けて
いるため、シリンダ室の上位のピストン部材に形成され
た気泡抜孔を通して上記弾性支承体側の液室に排出され
た気泡を上記つぼ部に収容することができ、この結果、
液室内の液体中から上記気泡を排除することができる。According to the second aspect of the invention, in addition to the effect of the first aspect of the invention, a crucible portion for accommodating air bubbles is provided at the top of the elastic support positioned above the liquid chamber. , The bubbles discharged into the liquid chamber on the side of the elastic bearing through the bubble vent hole formed in the upper piston member of the cylinder chamber can be accommodated in the pot portion, and as a result,
The bubbles can be eliminated from the liquid in the liquid chamber.

【００５９】請求項３記載の発明によれば、上記請求項
２記載の発明による効果に加えて、液室をオリフィスで
互いに連通させた受圧室と平衡室とに仕切るとともに、
つぼ部に対して、受圧室と平衡室とを互いに連通するオ
リフィスの設定共振周波数よりも十分に低い共振周波数
を設定しているため、このオリフィスの液柱共振により
入力振動の減衰を図る周波数域では上記気泡を収容した
つぼ部をロックさせることができ、この結果、その周波
数域の振動が入力した際に上記つぼ部内の気泡が液室内
の液体に混入してオリフィスの減衰特性を悪化させるこ
とを確実に防止することができる。According to the invention of claim 3, in addition to the effect of the invention of claim 2, the liquid chamber is partitioned into a pressure receiving chamber and an equilibrium chamber which are communicated with each other by an orifice, and
The resonance frequency is set to the pot, which is sufficiently lower than the set resonance frequency of the orifice that connects the pressure receiving chamber and the equilibrium chamber to each other. Can lock the pot containing the bubble, and as a result, when the vibration in the frequency range is input, the bubble in the pot mixes with the liquid in the liquid chamber and deteriorates the damping characteristic of the orifice. Can be reliably prevented.

【００６０】請求項４記載の発明によれば、上記請求項
１記載の発明による効果に加えて、駆動側ピストン部材
の加圧面の面積を、従動側ピストン部材の受圧面の面積
より小さく設定して作動特性変換手段により従動側ピス
トン部材がアクチュエータの作動力よりも大きい作動力
で進退作動されるように作動特性の変換をしている場合
において、製造時に気泡が万一残留しても、その気泡を
気泡抜孔により排出させて上記残留気泡に伴うシリンダ
室内の容積変化の発生を防止することができる結果、作
動特性の変換効率の低下を確実に防止することができ
る。According to the invention of claim 4, in addition to the effect of the invention of claim 1, the area of the pressing surface of the driving side piston member is set smaller than the area of the pressure receiving surface of the driven side piston member. If the operating characteristic is converted by the operating characteristic converting means such that the driven side piston member is moved forward and backward with an operating force larger than the operating force of the actuator, even if bubbles remain during manufacturing, As a result of the bubbles being discharged through the bubble vents and the volume change in the cylinder chamber caused by the residual bubbles being prevented from occurring, it is possible to reliably prevent the conversion efficiency of the operating characteristics from decreasing.

【００６１】また、請求項５記載の発明によれば、上記
請求項１記載の発明による効果に加えて、駆動側ピスト
ン部材の加圧面の面積を、従動側ピストン部材の受圧面
の面積より大きく設定して作動特性変換手段により従動
側ピストン部材がアクチュエータの作動ストロークより
も大きい作動ストロークで進退作動されるように作動特
性を変換している場合において、製造時に気泡が万一残
留しても、その気泡を気泡抜孔により排出させて上記残
留気泡に伴うシリンダ室内の容積変化の発生を防止する
ことができる結果、作動特性の変換効率の低下を確実に
防止することができる。According to the invention of claim 5, in addition to the effect of the invention of claim 1, the area of the pressing surface of the driving side piston member is larger than the area of the pressure receiving surface of the driven side piston member. In the case where the operating characteristic is converted by the operating characteristic converting means so that the driven side piston member is moved forward and backward with an operating stroke larger than the operating stroke of the actuator, even if bubbles remain during manufacturing, The bubbles can be discharged through the bubble vents to prevent the volume change in the cylinder chamber due to the residual bubbles, and as a result, it is possible to reliably prevent the conversion efficiency of the operating characteristics from being lowered.

【００６２】さらに、請求項６記載の発明によれば、上
記請求項１記載の発明による効果に加えて、アクチュエ
ータを圧電素子により構成し、電圧の印加、遮断による
圧電素子の伸縮により駆動側ピストン部材を加振するよ
うにした場合において、上記圧電素子による伸縮量が極
めて小さくて、シリンダ室に残留した気泡量に対する作
動特性変換手段による作動ストロークの増大変換効率の
低下度合が極めて大きいものであっても、上記残留気泡
を気泡抜孔によって確実に排出することができる結果、
振動板を確実に所定の増大変換効率の作動ストロークに
よって加振させることができる。従って、アクチュエー
タとして圧電素子を用い、これに作動ストロークを増大
させる作動特性変換手段を組み合わせた場合において
も、上記気泡抜孔を設けることにより上記の作動ストロ
ーク増大効果を確実に得ることができる。Further, according to the invention of claim 6, in addition to the effect of the invention of claim 1, the actuator is composed of a piezoelectric element, and the driving side piston is expanded and contracted by applying and blocking a voltage. When the member is vibrated, the amount of expansion and contraction by the piezoelectric element is extremely small, and the increase in the operation stroke by the operation characteristic conversion means with respect to the amount of bubbles remaining in the cylinder chamber is extremely large. Even as a result, it is possible to reliably discharge the residual bubbles by the bubble vents,
It is possible to reliably vibrate the diaphragm with an operation stroke having a predetermined increased conversion efficiency. Therefore, even when the piezoelectric element is used as the actuator and the operation characteristic conversion means for increasing the operation stroke is combined with the actuator, the effect of increasing the operation stroke can be reliably obtained by providing the bubble vent hole.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の第１実施例を示す縦断面図である。FIG. 1 is a vertical cross-sectional view showing a first embodiment of the present invention.

【図２】本発明の第２実施例を示す縦断面図である。FIG. 2 is a vertical sectional view showing a second embodiment of the present invention.

【図３】他の態様例を示す縦断面図である。FIG. 3 is a vertical cross-sectional view showing another embodiment example.

【符号の説明】[Explanation of symbols]

３ 第１取付部材 ４ 第２取付部材 ５ 弾性支承体 ６ ダイヤフラム（弾性薄膜部材） ７ 液室 ７ａ 受圧室 ７ｂ 平衡室 ８ 液体 ９ 仕切体（振動板） １０ オリフィス １２，３２ アクチュエータ １５，３３ 作動特性変換手段 １７，３５ 駆動側ピストン部材 １８，３６ 従動側ピストン部材 １７ａ 加圧面 ２４，４１，４３ 気泡抜孔 ２５ つぼ部 ３２ａ 圧電素子 ３５ａ 加圧板（加圧面） １８ａ，３６ａ 受圧面 3 1st mounting member 4 2nd mounting member 5 Elastic support body 6 Diaphragm (elastic thin film member) 7 Liquid chamber 7a Pressure receiving chamber 7b Equilibrium chamber 8 Liquid 9 Partition body (vibrating plate) 10 Orifice 12,32 Actuator 15,33 Operating characteristics Conversion means 17,35 Drive side piston member 18,36 Driven side piston member 17a Pressurizing surface 24,41,43 Bubble removal hole 25 Vessel part 32a Piezoelectric element 35a Pressurizing plate (pressurizing surface) 18a, 36a Pressure receiving surface

Claims (6)

【特許請求の範囲】[Claims] 【請求項１】 振動入力方向に互いに離して配置された
一対の取付部材と、この一対の取付部材を互いに連結す
る弾性支承体と、この弾性支承体により画成されてし非
圧縮性の液体が封入された液室と、この液室の上記弾性
支承体の側を仕切るように配置され上記弾性支承体の側
の液室の容積を拡縮する方向に変位可能に支持された振
動板と、上記振動板を加振作動させるアクチュエータと
を備え、このアクチュエータの作動を制御することによ
り上記弾性支承体の側の液室の内圧を制御するようにし
た制御式防振装置において、 上記振動板とアクチュエータとの間には、アクチュエー
タによる振動板の加振作動の特性を変換する作動特性変
換手段が介装され、この作動特性変換手段は、内部に上
記液体と同じ液体が封入されたシリンダ室を有するシリ
ンダと、このシリンダに進退可能に配設された駆動側お
よび従動側の一対のピストン部材と、上記シリンダ室内
の気泡を上記液室側に排出する気泡抜孔とを備えてお
り、 上記駆動側ピストン部材は基端部が上記アクチュエータ
により加振作動されるようアクチュエータに連結され、
先端部の加圧面が上記シリンダ室の流体に臨むよう上記
シリンダに配置される一方、上記従動側ピストン部材は
基端部が上記振動板に取付けられ、先端部の受圧面がシ
リンダ室の流体を介して駆動側ピストン部材からの加振
作動力を受けるように配置されており、 上記気泡抜孔は、上記駆動側ピストン部材および従動側
ピストン部材の内の上方に位置するピストン部材を貫通
して上記シリンダ室と液室とを互いに連通させるよう形
成され、かつ、その気泡抜孔を介した液柱の共振周波数
が、上記アクチュエータを作動させるものとして予め設
定された入力振動の周波数域よりも十分に低くなるよう
に設定されていることを特徴とする制御式防振装置。1. A pair of mounting members, which are arranged apart from each other in the vibration input direction, an elastic support member that connects the pair of mounting members to each other, and an incompressible liquid defined by the elastic support members. A liquid chamber in which is enclosed, and a diaphragm which is arranged so as to partition the side of the elastic bearing of the liquid chamber and is supported so as to be displaceable in the direction of expanding and contracting the volume of the liquid chamber on the side of the elastic bearing, A control type vibration damping device, comprising: an actuator for vibrating the diaphragm, and controlling the operation of the actuator to control the internal pressure of the liquid chamber on the elastic bearing side. Between the actuator and the actuator, an operating characteristic converting means for converting the characteristic of the vibration operation of the diaphragm by the actuator is interposed, and the operating characteristic converting means is a cylinder chamber in which the same liquid as the above liquid is sealed. And a pair of piston members on the driving side and the driven side, which are arranged to move forward and backward in the cylinder, and a bubble vent hole for discharging bubbles in the cylinder chamber to the liquid chamber side. The piston member is connected to the actuator so that the base end portion is vibrated by the actuator,
The pressurizing surface of the tip portion is arranged in the cylinder so as to face the fluid in the cylinder chamber, while the base end portion of the driven side piston member is attached to the diaphragm, and the pressure receiving surface of the tip portion exposes the fluid in the cylinder chamber. Is arranged so as to receive an oscillating actuating force from the drive side piston member via the above-mentioned bubble extraction hole, and penetrates the piston member located above the drive side piston member and the driven side piston member, and the cylinder The chamber and the liquid chamber are formed to communicate with each other, and the resonance frequency of the liquid column through the bubble vent hole is sufficiently lower than the frequency range of the input vibration preset for operating the actuator. The vibration control device is a control type that is set as follows. 【請求項２】 請求項１において、 弾性支承体側の液室が上方に位置付けられ、気泡を収容
するつぼ部が上記液室の頂部に臨んで下向きに開口する
よう上記弾性支承体に形成されている制御式防振装置。2. The liquid chamber on the side of the elastic support is positioned above, and a crucible for containing bubbles is formed in the elastic support so as to open downward facing the top of the liquid chamber. Controlled anti-vibration device. 【請求項３】 請求項２において、 液室が、弾性支承体の側の受圧室と、少なくとも一部が
弾性薄膜部材により画成されて拡縮可能な平衡室とに仕
切られて、この受圧室と平衡室とを連通するオリフィス
を備えており、 つぼ部に対して、上記オリフィスを介した液柱の設定共
振周波数よりも十分に低い共振周波数が設定されている
制御式防振装置。3. The pressure receiving chamber according to claim 2, wherein the liquid chamber is partitioned into a pressure receiving chamber on the side of the elastic support and an equilibrium chamber which is at least partially defined by an elastic thin film member and is expandable and contractible. And a balance chamber, the control type vibration damping device having a resonance frequency sufficiently lower than the resonance frequency of the liquid column through the orifice. 【請求項４】 請求項１において、 駆動側ピストン部材の加圧面の面積が、従動側ピストン
部材の受圧面の面積より小さく設定されて、作動特性変
換手段が従動側ピストン部材の加振作動力特性を増幅す
るものである制御式防振装置。4. The area of the pressurizing surface of the driving side piston member is set to be smaller than the area of the pressure receiving surface of the driven side piston member, and the operating characteristic converting means sets the vibration actuating force characteristic of the driven side piston member. A control type anti-vibration device that amplifies. 【請求項５】 請求項１において、 駆動側ピストン部材の加圧面の面積が、従動側ピストン
部材の受圧面の面積より大きく設定されて、作動特性変
換手段が従動側ピストン部材の加振作動ストローク特性
を増幅するものである制御式防振装置。5. The driving characteristic of the driven piston member according to claim 1, wherein the pressing surface area of the driving side piston member is set larger than the pressure receiving surface area of the driven piston member. Controlled anti-vibration device that amplifies the characteristics. 【請求項６】 請求項１において、 アクチュエータが、電圧の印加，遮断により伸縮する圧
電素子によって構成されている制御式防振装置。6. The control type vibration damping device according to claim 1, wherein the actuator is composed of a piezoelectric element that expands and contracts by applying and blocking a voltage.
JP2387194A 1994-02-22 1994-02-22 Control type anti-vibration device Expired - Fee Related JP3499279B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2387194A JP3499279B2 (en) 1994-02-22 1994-02-22 Control type anti-vibration device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2387194A JP3499279B2 (en) 1994-02-22 1994-02-22 Control type anti-vibration device

Publications (2)

Publication Number Publication Date
JPH07233851A true JPH07233851A (en) 1995-09-05
JP3499279B2 JP3499279B2 (en) 2004-02-23

Family

ID=12122515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2387194A Expired - Fee Related JP3499279B2 (en) 1994-02-22 1994-02-22 Control type anti-vibration device

Country Status (1)

Country Link
JP (1) JP3499279B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000356242A (en) * 1999-05-17 2000-12-26 Hutchinson Sa Active hydraulic vibration control support device and active vibration control system including this support device
CN104100673A (en) * 2014-07-22 2014-10-15 建新赵氏集团有限公司 Semi-active control hydraulic suspension for automobile powertrain
CN115515705A (en) * 2020-06-03 2022-12-23 株式会社村田制作所 Bubble generation device and bubble generation system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000356242A (en) * 1999-05-17 2000-12-26 Hutchinson Sa Active hydraulic vibration control support device and active vibration control system including this support device
JP4685213B2 (en) * 1999-05-17 2011-05-18 ユチンソン Active hydraulic vibration preventing support device and active vibration preventing system including the support device
CN104100673A (en) * 2014-07-22 2014-10-15 建新赵氏集团有限公司 Semi-active control hydraulic suspension for automobile powertrain
CN104100673B (en) * 2014-07-22 2016-03-02 建新赵氏集团有限公司 Automobile power assembly semi-active control hydraulic mount
CN115515705A (en) * 2020-06-03 2022-12-23 株式会社村田制作所 Bubble generation device and bubble generation system

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