JPH0722037Y2 - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPH0722037Y2 JPH0722037Y2 JP324583U JP324583U JPH0722037Y2 JP H0722037 Y2 JPH0722037 Y2 JP H0722037Y2 JP 324583 U JP324583 U JP 324583U JP 324583 U JP324583 U JP 324583U JP H0722037 Y2 JPH0722037 Y2 JP H0722037Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- shaft
- moving
- axis
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【考案の詳細な説明】 本考案は、走査型電子顕微鏡、特に試料室の構造を無駄
なく、しかも強固にした走査型電子顕微鏡に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a scanning electron microscope, and more particularly to a scanning electron microscope in which the structure of a sample chamber is not wasted and is solid.
従来この種の走査型電子顕微鏡としては、例えば第１図
及び第２図に示すようなものである。これは、電子銃、
集束レンズ、対物レンズ等を組込んだ鏡筒１と、鏡筒１
を下側から支持すると共に内部に試料５を載置する試料
台６及びこれを作動させる操作機構７を組込んだ試料室
２そして試料から発生する二次電子線を検出する二次電
子検出器４とから成る。試料室２はパネル材を溶接等の
手段で接合させた矩形の筺体から成り、ベース部17に取
付け固定されている。試料台６及び操作機構７は、板状
の蓋体21に一体的に取付けられ支持枠体８によつて、鏡
筒１の直下部に回転可能に支持されている。そして操作
機構７は、試料台６を水平面内の一方向（Ｘ線方向とす
る）に移動させるため、試料台６に設けた連結部材９に
ねじ係合するＸ動ねじ棒10を有する第１のガイドフレー
ム11と、この第１のガイドフレーム11にＹ動ねじ棒12を
介して連結され、試料台６と第１のガイドフレーム11と
をＸ軸方向とは直角のＹ軸方向へ移動させる第２のガイ
ドフレーム13とから成る。また、この操作機構７を支持
する支持枠体８にはつまみ部14が設けられて当該支持枠
体８を回転させ、試料傾斜を行わせる一方、Ｘ動ねじ棒
10にはＸ動つまみ15、Ｙ動ねじ棒12にはＹ動つまみ16が
それぞれ連結され、試料５をＸ軸方向及びＹ軸方向へ移
動させる際に回転操作する様になつている。A conventional scanning electron microscope of this type is, for example, as shown in FIGS. 1 and 2. This is an electron gun,
A lens barrel 1 incorporating a focusing lens, an objective lens, and the like, and a lens barrel 1
And a sample chamber 2 in which a sample table 6 for mounting a sample 5 therein and an operating mechanism 7 for operating the sample table 6 are supported, and a secondary electron detector for detecting a secondary electron beam generated from the sample. It consists of 4 and. The sample chamber 2 is composed of a rectangular housing in which panel materials are joined by means such as welding, and is fixedly mounted on the base portion 17. The sample table 6 and the operating mechanism 7 are integrally attached to a plate-like lid body 21 and are rotatably supported directly below the lens barrel 1 by a support frame body 8. The operation mechanism 7 has an X-moving screw rod 10 that is screwed into a connecting member 9 provided on the sample table 6 in order to move the sample table 6 in one direction (X-ray direction) in a horizontal plane. Of the first guide frame 11 and the first guide frame 11 via the Y moving screw rod 12 to move the sample table 6 and the first guide frame 11 in the Y-axis direction perpendicular to the X-axis direction. It comprises a second guide frame 13. Further, the support frame 8 supporting the operation mechanism 7 is provided with a knob portion 14 to rotate the support frame 8 to tilt the sample, while the X-moving screw rod
An X-moving knob 15 is connected to 10 and a Y-moving knob 16 is connected to the Y-moving screw rod 12, so that the sample 5 is rotated when the sample 5 is moved in the X-axis direction and the Y-axis direction.
しかしながら、このような従来の走査型電子顕微鏡にあ
つては、試料室２が矩形状の筺体から構成されているの
に対し、試料５はＸ軸及びＹ軸の平面運動のみならず傾
斜回転運動を行うため、この傾斜回転運動を考慮して試
料室２の室内スペースを採ると、当該試料室２の上部及
び下部の隅に無駄なスペースが出来てしまい、特にICウ
エハー等の大型試料を観察する走査型電子顕微鏡にあつ
ては試料室が不必要な大型化するという問題があつた。However, in such a conventional scanning electron microscope, while the sample chamber 2 is composed of a rectangular housing, the sample 5 is not only the plane movement of the X axis and the Y axis but also the tilt rotation movement. Therefore, if the indoor space of the sample chamber 2 is taken in consideration of this tilt rotation motion, a wasteful space is created in the upper and lower corners of the sample chamber 2, and especially a large sample such as an IC wafer is observed. The scanning electron microscope has a problem that the sample chamber is unnecessarily enlarged.
本考案は、このような従来の問題点に着目してなされた
もので、その目的は、試料室の室内空間を有効に活用出
来るようにした走査型電子顕微鏡を提供することによ
り、上記従来の問題点を解決することである。The present invention has been made in view of such conventional problems, and an object thereof is to provide a scanning electron microscope capable of effectively utilizing the indoor space of a sample chamber. It is to solve the problem.
そして、本考案は、電子線軸に直交する試料傾斜軸とほ
ぼ一致した軸を有し、該軸に対し直角方向に最大に試料
を移動させた場合の、試料台の一端から他端までの距離
を最小の内径とし、上記軸方向に試料を移動させた場合
の試料台の一端から他端までを最小の内長さとする円筒
形の試料室を有する走査型電子顕微鏡にある。The present invention has an axis that is substantially coincident with the sample tilt axis orthogonal to the electron beam axis, and the distance from one end of the sample stage to the other end when the sample is moved to the maximum in the direction perpendicular to the axis. Is the minimum inner diameter, and the scanning electron microscope has a cylindrical sample chamber having a minimum inner length from one end to the other end of the sample table when the sample is moved in the axial direction.
以下、本考案の実施例を添付の図面を参照して詳細に説
明する。Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
第３図乃至第６図は本考案の一実施例を示す図である。
この実施例に係る走査型電子顕微鏡は、鏡筒１と、鏡筒
１を支持すると共に内部に試料５を載置すに試料台６及
びこれらを作動する試料操作機構25を組込んだ試料室20
とを有する点については上記従来の走査型電子顕微鏡と
基本的に同様な構成を有する。しかし、従来と異なり、
試料室20は円筒形の筺体から構成され、その長手方向
（便宜上、これをＸ軸方向とする）両端部は一体成形又
は板状の蓋体21を当該蓋体21に設けた掛金具23と試料室
20本体に設けた止め部22とをねじ24結合することによつ
て密閉して成る。この試料室20は取付部材によつてベー
ス部17に固定取付けされている一方、その長手方向端
面、例えば蓋体21には試料操作機構25を可動支持するた
めの支持筒18が一体的に取付けられている。3 to 6 are views showing an embodiment of the present invention.
The scanning electron microscope according to this embodiment includes a lens barrel 1, a sample chamber that supports the lens barrel 1, mounts a sample 5 therein, and a sample operating mechanism 25 that operates these. 20
With respect to the point having, there is basically the same configuration as the above-mentioned conventional scanning electron microscope. However, unlike the past,
The sample chamber 20 is composed of a cylindrical housing, and both ends in the longitudinal direction (for convenience, this is referred to as the X-axis direction) of the sample chamber 20 are integrally molded or have plate-like lids 21 and hooks 23 provided on the lid 21. Sample room
(20) A stopper (22) provided on the main body is joined by a screw (24) to hermetically seal. The sample chamber 20 is fixedly attached to the base portion 17 by an attaching member, while a support cylinder 18 for movably supporting the sample operating mechanism 25 is integrally attached to the longitudinal end face thereof, for example, the lid body 21. Has been.
試料操作機構25は、試料室20の蓋体21に設けられた支持
筒18に回転可能に保持され試料５の傾斜調整を行う試料
傾斜部材26と、試料傾斜部材26に全体を支持された試料
ステージ機構27と、この試料ステージ機構27を作動させ
る駆動機構28と、駆動機構28と試料ステージ機構27との
間に介装され双方の機構を作動連結している伝動機構29
とから成る。The sample manipulating mechanism 25 includes a sample tilting member 26 that is rotatably held by a support cylinder 18 provided in a lid 21 of a sample chamber 20 to adjust the tilt of the sample 5, and a sample that is wholly supported by the sample tilting member 26. A stage mechanism 27, a drive mechanism 28 for operating the sample stage mechanism 27, and a transmission mechanism 29 interposed between the drive mechanism 28 and the sample stage mechanism 27 to operatively connect both mechanisms.
It consists of and.
試料傾斜部材26は、支持筒18にシール部材36を介して密
封支持され且つ電子線軸O2に直交する軸線O1を中心にし
て回転可能に嵌合する軸体30と、軸体30の先端部分に一
体的に設けられた平面略矩形状のフレーム体から成る受
部31と、軸体30の基端部にフランジ状に形成された傾斜
つまみ32とを有する。そして操作者が操作つまみ部32を
つかんで回転させれば、試料傾斜部材26は軸体30の部分
において軸線O1を中心にして回転することが出来る。ま
た、軸体30には、その先端部分から基端方向中間位置ま
で中空の腔33が穿設され、るた腔33から軸体30基端面ま
では第１の支持孔34及び第２の支持孔35が貫通して形成
されている。The sample tilting member 26 is a shaft 30 that is hermetically supported by the support cylinder 18 via a seal member 36 and is rotatably fitted around an axis O 1 orthogonal to the electron beam axis O 2 , and the tip of the shaft 30. It has a receiving portion 31 formed of a frame body having a substantially rectangular plane shape, which is provided integrally with the portion, and an inclined knob 32 formed in a flange shape at the base end portion of the shaft body 30. When the operator grips the operation knob portion 32 and rotates it, the sample tilting member 26 can rotate around the axis O 1 in the shaft body 30. In addition, a hollow cavity 33 is bored in the shaft body 30 from its distal end portion to an intermediate position in the proximal direction, and a first support hole 34 and a second support hole are formed from the barrel cavity 33 to the proximal end surface of the shaft body 30. A hole 35 is formed so as to penetrate therethrough.
試料ステージ機構27は、試料傾斜部材26の受部31にＸ軸
方向に延びて取付けられ且つ互いに所定の間隔をあけて
平行に設置された一対の支持シヤフト37,38と、当該支
持シヤフト37,38が貫通して摺動可能に支持された平面
略矩形状のＸ動フレーム39と、当該Ｘ動フレーム39内に
おいて上記支持シヤフト37,38に対して略直角の方向
（Ｘ軸方向に対してＹ軸方向とする）に延びて取付けら
れ且つ所定の間隔をあけて平行に設置された一対のシヤ
フト40,41と、当該シヤフト40,41が貫通して摺動可能に
支持されたＹ動体42と、Ｙ動体42上に固定設置された試
料台６とから成り、試料室20内において試料傾斜部材26
の軸線O1と試料５面とが一致して、上記軸線O1が試料傾
斜軸線（以下、O1を試料傾斜軸線とする）になる様な高
さ位置に配置されている。Ｘ動フレーム39には、試料傾
斜部材26側の側部から当該試料傾斜部材26へ向けて延び
る腕部43が突設されており、その先端部分には板状の受
部材44が直立固定されている。この受部材44は、試料傾
斜部材26に穿設された腔33内に緩く嵌り、この腔33内を
自由に摺動することが出来る。したがつて、受部材44を
押したり引いたりすれば、Ｘ動フレーム39が支持シヤフ
ト37,38に沿つて摺動し、試料ステージ機構27はＸ軸方
向へ移動する。また、Ｙ動体42の裏面にはＹ軸方向に延
びるラツク部材45が固定取付けされており、このラツク
部材45にピニオンを噛合させて作動させればこれに従動
してＹ動体42がシヤフト40,41に沿つて摺動し、試料ス
テージ機構27はＹ軸方向へ移動する。The sample stage mechanism 27 includes a pair of support shafts 37, 38 extending in the X-axis direction and attached to the receiving part 31 of the sample tilting member 26 and arranged in parallel at a predetermined interval, and the support shafts 37, 38. An X-moving frame 39 having a substantially rectangular shape in plan view which is slidably supported through 38, and a direction substantially perpendicular to the supporting shafts 37, 38 in the X-moving frame 39 (with respect to the X-axis direction). A pair of shafts 40, 41 extending in the Y-axis direction and mounted in parallel with each other at a predetermined interval, and a Y moving body 42 slidably supported through the shafts 40, 41. And the sample table 6 fixedly installed on the Y moving body 42, and the sample tilting member 26 in the sample chamber 20.
Consistent with the axis O 1 and the sample 5 surface is, the axis O 1 is the specimen rotation axis (hereinafter, the O 1 specimen rotation axis to) is arranged to become such a height. The X-moving frame 39 is provided with an arm portion 43 extending from the side portion on the sample tilting member 26 side toward the sample tilting member 26, and a plate-shaped receiving member 44 is fixed upright on the tip portion thereof. ing. The receiving member 44 is loosely fitted in the cavity 33 formed in the sample inclining member 26 and can freely slide in the cavity 33. Therefore, when the receiving member 44 is pushed or pulled, the X motion frame 39 slides along the support shafts 37, 38, and the sample stage mechanism 27 moves in the X axis direction. Further, a rack member 45 extending in the Y-axis direction is fixedly attached to the back surface of the Y moving body 42, and if a pinion is engaged with this rack member 45 to operate it, the Y moving body 42 is driven by the rack 40, Sliding along 41, the sample stage mechanism 27 moves in the Y-axis direction.
工藤機構28は、試料傾斜部材26の軸体30に開設した第１
の支持孔34内にシール部材47の介在の下に回転可能に配
置されたＸ動シヤフト46と、同じく軸体30に開設した第
２の支持孔35内にシール部材49の介在の下に回転可能に
配置されたＹ動シヤフト48とから成る。Ｙ動シヤフト46
にはシヤフト内部に軸方向に延びる中空孔50が穿設され
ている一方、当該シヤフト先端部には中空孔50よりやや
小径のめねじ部51が設けられ、またシヤフト基端部には
Ｘ動つまみ52が設けられている。そして、Ｘ動シヤフト
46の軸体30に支持された部分外周面には、段状に切落さ
れた小径部を形成することによつて長手方向に所定の間
隔をおいて対向するフランジ部53,54が形成され、これ
らのフランジ部53、54を軸体30に係止させることにより
Ｘ動シヤフト46をＸ動方向に固定している。また、Ｘ動
シヤフト46のねじ部51には、一端が試料ステージ機構27
の受部材44に固定され且つＸ軸方向に延びるＸ動雄ねじ
55が螺合されている。The Kudo mechanism 28 is the first opened on the shaft body 30 of the sample tilting member 26.
Of the X-movement shaft 46 rotatably disposed in the support hole 34 of the shaft 30 under the interposition of the seal member 47, and the rotation of the X-axis shaft 46 in the second support hole 35 also formed in the shaft body 30 under the interposition of the seal member 49. It consists of a Y-movement shaft 48 arranged as possible. Y movement shaft 46
On the other hand, a hollow hole 50 extending axially is bored inside the shaft, while at the tip of the shaft, a female screw part 51 having a diameter slightly smaller than that of the hollow hole 50 is provided. A knob 52 is provided. And X-moving Shaft
On a portion of the outer peripheral surface of the shaft 46 supported by the shaft body 30, flange portions 53, 54 facing each other are formed at predetermined intervals in the longitudinal direction by forming a small diameter portion cut in a stepwise manner. The X-moving shaft 46 is fixed in the X-moving direction by engaging the flange portions 53 and 54 with the shaft body 30. Further, one end of the screw portion 51 of the X movement shaft 46 has a sample stage mechanism 27.
X-moving male screw fixed to the receiving member 44 of X and extending in the X-axis direction
55 is screwed.
他方、Ｙ動シヤフト48は、，試料傾斜部材26の軸体30を
貫通すると共に、その先端は受部材44をも貫通して延び
ている。このため、受部材44の所定の位置にはＹ動シヤ
フト48を遊嵌させるための通孔56が貫設してある。そし
て、Ｙ動シヤフト48にはシヤフト先端から基端方向へ所
定の長さだけ軸方向へ延びる中空孔57が穿設されると共
に、その長手方向にスリツト溝58が切欠形成され、また
シヤフト基端部にはＹ動つまみ59が設けられている。そ
して、Ｙ動シヤフト48の基端部近くには小径部48aが段
状に形成され、この小径部48aにて軸体30に係止させる
ことにより、Ｙ動シヤフト48をＸ軸方向に固定してい
る。また、Ｙ動シヤフト48の中空孔57には、ピン61を立
設した連設シヤフト60の一端側がスラスト運動可能に挿
入され、ピン61をスリツト溝58に係合させることにより
Ｙ動シヤフト48と連結シヤフト60とが作動係合してい
る。連結シヤフト60の他端は、Ｘ動フレーム39に固定さ
れると共にその側部を貫通してＹ動体42下側まで延び、
その先端にはラツク45に噛合するピニオン62が固定され
てラツク・アンド・ピニオン機構を成している。そし
て、上記Ｘ動雄ねじ55と連結シヤフト60、及びピニオン
62によつて伝動機構29を構成している。On the other hand, the Y moving shaft 48 penetrates the shaft body 30 of the sample inclining member 26, and its tip also extends through the receiving member 44. Therefore, a through hole 56 for loosely fitting the Y moving shaft 48 is provided at a predetermined position of the receiving member 44. The Y moving shaft 48 is provided with a hollow hole 57 extending axially from the shaft distal end in the axial direction by a predetermined length, and a slit groove 58 is formed in the longitudinal direction of the hollow hole 57. The section is provided with a Y movement knob 59. A small diameter portion 48a is formed in a step shape near the base end portion of the Y moving shaft 48, and the Y moving shaft 48 is fixed in the X axis direction by being locked to the shaft body 30 at the small diameter portion 48a. ing. Further, one end side of a continuous shaft 60 having a pin 61 erected therein is inserted into the hollow hole 57 of the Y moving shaft 48 so as to allow thrust movement, and by engaging the pin 61 with the slit groove 58, The connecting shaft 60 is in operative engagement. The other end of the connecting shaft 60 is fixed to the X moving frame 39, penetrates the side portion thereof, and extends to the lower side of the Y moving body 42.
A pinion 62 that meshes with the rack 45 is fixed to the tip thereof to form a rack and pinion mechanism. Then, the above X moving male screw 55, the connecting shaft 60, and the pinion
The transmission mechanism 29 is constituted by 62.
かかる構成を有するため、いま操作者がＸ動つまみ52を
つまんでＹ動シヤフト46を回転させると、ねじ部51の部
分にてＸ動シヤフト46とＸ動雄ねじ55との間でねじ送り
作用が働き、これによつて受部材44が進退して試料５を
Ｘ軸方向へ、試料室20の軸方向前端から後端まで移動さ
せる。このとき、Ｙ動シヤフト48についてみると、当該
Ｙ動シヤフト48は受部材44の通孔56に遊嵌し、且つ連結
シヤフト60はＹ動シヤフト48の中空孔57内でスラスト運
動するから、Ｙ動シヤフト48が試料５のＸ動を妨げるこ
とはない。With this configuration, when the operator now grips the X-moving knob 52 and rotates the Y-moving shaft 46, the screw feed action is performed between the X-moving shaft 46 and the X-moving external screw 55 at the screw portion 51. This causes the receiving member 44 to move forward and backward, moving the sample 5 in the X-axis direction from the front end to the rear end of the sample chamber 20 in the axial direction. At this time, regarding the Y moving shaft 48, the Y moving shaft 48 is loosely fitted in the through hole 56 of the receiving member 44, and the connecting shaft 60 thrusts in the hollow hole 57 of the Y moving shaft 48. The moving shaft 48 does not interfere with the X movement of the sample 5.
また一方、操作者がＹ動つまみ59をつまんでＹ動シヤフ
ト48を回転させると、この回転はピン61を介して連結シ
ヤフト60に伝達され、ピニオン62を連結シヤフト60と共
に回転させる。よつて、連結シヤフト60とＹ動体42との
間ではラツク45とピニオン62とを介して送り作用が働
き、試料５を、試料室20の軸に対して略直交するＹ軸方
向へ一側端から他側端まで移動させる。On the other hand, when the operator grips the Y-moving knob 59 and rotates the Y-moving shaft 48, this rotation is transmitted to the connecting shaft 60 via the pin 61 and rotates the pinion 62 together with the connecting shaft 60. Therefore, a feeding action works between the connecting shaft 60 and the Y moving body 42 via the rack 45 and the pinion 62, and the sample 5 is moved to one end in the Y axis direction substantially orthogonal to the axis of the sample chamber 20. To the other end.
さらにまた、操作者が傾斜つまみ32をつまんで回すと、
試料傾斜部材26は試料傾斜軸線O1を中心として回転し、
試料５を傾斜させる。この試料５の傾斜動に伴い、試料
５のＹ軸方向両側端は円弧を描いて運動するから、試料
室20を、試料５のＹ軸方向へ最大に移動させた場合の一
端から他端までの長さが内直径となる円筒構造とし、且
つこの円筒の軸線を試料傾斜軸線O1に一致させれば、試
料傾斜に対して最も無駄のない有効スペースとすること
ができる。また一方、試料５をＸ軸方向へ最大に移動さ
せた場合の一端から他端までの長さを試料室20の内長さ
寸法とすれば、前記同様試料室20のスペースの有効利用
を図ることができる。なお、このような、試料５をＸ軸
方向又はＹ軸方向へ最大に移動させたときの一端から他
端までの長さは、それぞれの方向の試料５の長さ寸法の
約２倍の長さとして捉えることもできる。Furthermore, when the operator pinches and turns the tilt knob 32,
The sample tilting member 26 rotates about the sample tilting axis O 1 .
The sample 5 is tilted. With the tilting movement of the sample 5, both ends of the sample 5 in the Y-axis direction move in an arc, so that the sample chamber 20 is moved from the one end to the other end when the sample chamber 20 is moved to the maximum in the Y-axis direction. If a cylindrical structure whose length is the inner diameter is used and the axis line of this cylinder coincides with the sample inclination axis line O 1 , the most effective space for the sample inclination can be obtained. On the other hand, if the length from one end to the other end when the sample 5 is moved to the maximum in the X-axis direction is set as the inner length dimension of the sample chamber 20, the space in the sample chamber 20 is effectively used as described above. be able to. It should be noted that the length from one end to the other end when the sample 5 is moved to the maximum in the X-axis direction or the Y-axis direction is about twice the length dimension of the sample 5 in each direction. It can also be regarded as
以上説明したように、本考案によれば、走査型電子顕微
鏡の試料室を試料傾斜軸線とほぼ一致した軸を有する円
筒形状とし、且つその内直径は、試料を直径方向に最大
に動かした場合の当該試料の端から端までの距離に設定
する一方、試料室の軸方向の内長さ寸法は、試料を軸方
向に最大に動かした場合の当該試料の端から端までの距
離に設定したため、走査型電子顕微鏡における試料室の
スペースが大幅に小型化できた。特に外観を見た場合に
受ける感じは、同じ試料移動寸法を持つ角型の試料室と
比較して、見る角度によつては70パーセント（角型の方
が▲√▼倍に見える）程度に抑えられるため、非常に
小さく見える。また、試料室が小型化したことから、そ
の内容積の角型のものに対して3/4程度となり、試料室
内を真空状態にするための排気時間の短縮を図ることが
出来る。更にまた、試料室を円筒形にすることにより、
外圧に対する強度が増大するから従来における如き角型
のものに比べて小さな肉厚であつても同程度の強度を発
揮することが出来る等種々の効果が得られる。As described above, according to the present invention, the sample chamber of the scanning electron microscope has a cylindrical shape having an axis substantially coincident with the sample tilt axis, and its inner diameter is the maximum when the sample is moved in the diametrical direction. While the distance from the edge of the sample to the edge of the sample is set, the inner length of the sample chamber in the axial direction is set to the distance from the edge of the sample when the sample is moved in the maximum axial direction. , The space of the sample chamber in the scanning electron microscope has been greatly reduced. In particular, when you look at the external appearance, the feeling you receive is about 70% (the square type looks ▲ √ ▼ times more than the square type) depending on the viewing angle compared to the square type sample chamber with the same sample movement dimension. Because it is suppressed, it looks very small. Further, since the sample chamber is downsized, its internal volume is about 3/4 of that of a rectangular chamber, and the exhaust time for bringing the sample chamber into a vacuum state can be shortened. Furthermore, by making the sample chamber cylindrical,
Since the strength against external pressure is increased, various effects can be obtained such that even if the thickness is smaller than that of the conventional rectangular type, the same strength can be exhibited.
第１図は従来の試料室を備えた走査型電子顕微鏡の一例
を示す斜視図、第２図は従来の走査型電子顕微鏡の試料
室の内部構造を概略的に示す断面図、第３図は本考案の
一実施例に係る走査型電子顕微鏡の斜視図、第４図は上
記実施例における試料室の内部構造を示す第３図中IV−
IV線における断面図、第５図は上記実施例における試料
室の内部構造を示す第４図中Ｖ−Ｖ線における断面図、
第６図は上記実施例における試料室の内部構造を示す底
面図である。 １…鏡筒、2,20…試料室 ５…試料、６…試料台 21…蓋体、25…試料操作機構 26…試料傾斜部材、27…試料ステージ機構 28…駆動機構、29…伝動機構 O1…試料傾斜軸線、O2…電子軸線FIG. 1 is a perspective view showing an example of a conventional scanning electron microscope equipped with a conventional sample chamber, FIG. 2 is a sectional view schematically showing the internal structure of the conventional sample chamber of a scanning electron microscope, and FIG. FIG. 4 is a perspective view of a scanning electron microscope according to one embodiment of the present invention, and FIG. 4 shows the internal structure of the sample chamber in the above embodiment IV- in FIG.
A sectional view taken along the line IV, FIG. 5 is a sectional view taken along the line VV in FIG. 4 showing the internal structure of the sample chamber in the above embodiment,
FIG. 6 is a bottom view showing the internal structure of the sample chamber in the above embodiment. 1 ... Lens barrel, 2, 20 ... Sample chamber 5 ... Sample, 6 ... Sample stand 21 ... Lid, 25 ... Sample operating mechanism 26 ... Sample tilting member, 27 ... Sample stage mechanism 28 ... Driving mechanism, 29 ... Transmission mechanism O 1 … Sample tilt axis, O 2 … Electron axis
Claims (1)
した軸を有し、該軸に対し直角方向に最大に試料を移動
させた場合の、試料台の一端から他端までの距離を最小
の内径とし、上記軸方向に最大に試料を移動させた場合
の試料台の一端から他端までを最小の内長さとする円筒
形の試料室を有する走査型電子顕微鏡。1. A distance from one end to the other end of the sample table when the sample is moved to the maximum in a direction perpendicular to the axis having a sample tilt axis substantially orthogonal to the electron beam axis. A scanning electron microscope having a minimum inner diameter and a cylindrical sample chamber having a minimum inner length from one end to the other end of the sample table when the sample is moved in the axial direction to the maximum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP324583U JPH0722037Y2 (en) | 1983-01-17 | 1983-01-17 | Scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP324583U JPH0722037Y2 (en) | 1983-01-17 | 1983-01-17 | Scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59110952U JPS59110952U (en) | 1984-07-26 |
| JPH0722037Y2 true JPH0722037Y2 (en) | 1995-05-17 |
Family
ID=30134871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP324583U Expired - Lifetime JPH0722037Y2 (en) | 1983-01-17 | 1983-01-17 | Scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0722037Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101524215B1 (en) * | 2013-11-29 | 2015-05-29 | (주)코셈 | Electron microscope |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5517790B2 (en) * | 2010-07-02 | 2014-06-11 | 株式会社キーエンス | Magnifying observation device |
| JP5564346B2 (en) * | 2010-07-08 | 2014-07-30 | 株式会社キーエンス | Magnifying observation device |
-
1983
- 1983-01-17 JP JP324583U patent/JPH0722037Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101524215B1 (en) * | 2013-11-29 | 2015-05-29 | (주)코셈 | Electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59110952U (en) | 1984-07-26 |
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