JPH0721961A - Photographing method and device for transmission electron microscope or electronic energy loss analysis electron microscope - Google Patents
Photographing method and device for transmission electron microscope or electronic energy loss analysis electron microscopeInfo
- Publication number
- JPH0721961A JPH0721961A JP5165718A JP16571893A JPH0721961A JP H0721961 A JPH0721961 A JP H0721961A JP 5165718 A JP5165718 A JP 5165718A JP 16571893 A JP16571893 A JP 16571893A JP H0721961 A JPH0721961 A JP H0721961A
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- Prior art keywords
- image
- electron
- image pickup
- electron microscope
- scanning signal
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims description 34
- 238000004458 analytical method Methods 0.000 title claims description 33
- 238000010894 electron beam technology Methods 0.000 claims description 30
- 238000003384 imaging method Methods 0.000 claims description 22
- 239000013078 crystal Substances 0.000 claims description 3
- 238000005430 electron energy loss spectroscopy Methods 0.000 claims 1
- 238000001000 micrograph Methods 0.000 abstract description 6
- 230000003287 optical effect Effects 0.000 abstract description 5
- 230000004075 alteration Effects 0.000 abstract description 4
- 239000012634 fragment Substances 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 34
- 238000012937 correction Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 230000005405 multipole Effects 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000538 analytical sample Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、透過電子顕微鏡に関
し、より詳細には、試料を透過した電子ビームの拡大像
や、試料を透過した電子のエネルギー損失を分析して得
られる特定の元素の分布像の歪を修正する撮像装置に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transmission electron microscope, and more particularly, it shows a magnified image of an electron beam transmitted through a sample and a specific element obtained by analyzing the energy loss of electrons transmitted through the sample. The present invention relates to an image pickup apparatus that corrects distortion of a distribution image.
【０００２】[0002]
【従来の技術】透過電子顕微鏡の像観察には、蛍光体に
よる光変換像をＴＶカメラを用いてモニターする方法が
よく用いられている。この従来の像観察方法は、図５
（ａ）に示すように、ガラス基板の表面に薄い蛍光体膜
を塗った蛍光板９に電子顕微鏡像を形成し、それを鏡２
２を介して真空外に設置されたＴＶカメラ２１で撮像す
る方法、あるいは、図５（ｂ）に示すように、真空中に
固体撮像管２１を設置して蛍光板９の裏から蛍光像を直
接撮像する方法である。2. Description of the Related Art For observing an image with a transmission electron microscope, a method of monitoring a light conversion image by a phosphor with a TV camera is often used. This conventional image observation method is shown in FIG.
As shown in (a), an electron microscope image is formed on a fluorescent plate 9 having a glass substrate surface coated with a thin fluorescent substance film, and the image is formed on the mirror 2
A method of taking an image with a TV camera 21 installed outside the vacuum via 2 or, as shown in FIG. 5B, a solid-state image pickup tube 21 is installed in a vacuum to directly obtain a fluorescent image from the back of the fluorescent plate 9. This is a method of imaging.
【０００３】これらの撮像方法には、次のような問題点
がある。 １）蛍光体の裏面から像を観察するので、蛍光体の厚み
により像の輪郭がぼける。 ２）蛍光体を薄くすると、像の輝度が落ちる。 ３）蛍光体の裏面からの像を観察するので、観察像が鏡
像になる。These imaging methods have the following problems. 1) Since the image is observed from the back surface of the phosphor, the outline of the image is blurred depending on the thickness of the phosphor. 2) When the phosphor is made thin, the brightness of the image is reduced. 3) Since the image from the back surface of the phosphor is observed, the observed image becomes a mirror image.
【０００４】このような問題点を解決する撮像方法とし
て、図６（ａ）のように蛍光板９上の像を斜め方向から
撮影する方法と、図６（ｂ）のように蛍光板９を傾斜さ
せて垂直方向から撮影する方法がある。これらの方法
は、蛍光板９の表面に形成された像をガラス基板を通す
ことなく直接ＴＶカメラで撮影するため、前記した問題
点を解決することができる。As an image pickup method for solving such a problem, a method of photographing an image on the fluorescent plate 9 from an oblique direction as shown in FIG. 6A and a method of inclining the fluorescent plate 9 as shown in FIG. 6B. There is a method to shoot from the vertical direction. In these methods, the image formed on the surface of the fluorescent plate 9 is directly photographed by the TV camera without passing through the glass substrate, so that the above-mentioned problems can be solved.
【０００５】しかし、モニターに映る像は、図６（ａ）
の撮像方法の場合には縦方向に圧縮された像になり、図
６（ｂ）の撮像方法の場合には逆に縦方向に引き延ばさ
れた像になってしまい、いずれの方式でもモニター像は
試料表面を垂直方向から見た形から変形したように映る
という問題が新たに発生する。電子像の歪の補正は、電
子のエネルギー損失を分析して特定の原子の分布像を撮
像する分析電子顕微鏡においても必要になる。However, the image displayed on the monitor is as shown in FIG.
In the case of the image pickup method of No. 6, the image becomes a vertically compressed image, and in the case of the image pickup method of FIG. 6B, it becomes an image stretched in the vertical direction. A new problem arises in that the image appears to be deformed from the shape of the sample surface viewed from the vertical direction. The correction of the distortion of the electron image is also necessary in an analytical electron microscope that analyzes the energy loss of electrons and captures a distribution image of specific atoms.
【０００６】米国特許第４８５１６７０号明細書に記載
された分析電子顕微鏡を例にとり説明する。この分析電
子顕微鏡は、図７に概略を示すように、透過電子顕微鏡
の後方に扇型磁場１１を配置して、試料を透過する間に
特定の原子と非弾性散乱してエネルギー損失した電子ビ
ームを分離し、その分離された電子ビームによる特定の
原子の分布像１５を電子撮像素子５０を用いて撮像す
る。その際、図示されているように、スリット１４と電
子撮像素子５０の間に複数の磁場４重極レンズ３０，３
１，３２と複数の磁場６重極レンズ４０，４１，４２，
４３を配置して像の歪を除去している。透過電子顕微鏡
は軸対象の電子レンズ系を用いているので、像の歪は少
ないが、非対称の扇形磁場や４重極レンズを用いると電
子像は種々の歪みや収差を持つので、その修正にこのよ
うに組み合わせが複雑で煩雑な調整を要する電子レンズ
系が必要となるのである。An analytical electron microscope described in US Pat. No. 4,851,670 will be described as an example. As shown schematically in FIG. 7, this analytical electron microscope has an electron beam 11 in which a fan-shaped magnetic field 11 is arranged behind a transmission electron microscope and energy is lost due to inelastic scattering with specific atoms while passing through a sample. Are separated, and the distribution image 15 of specific atoms by the separated electron beam is imaged using the electronic imaging element 50. At that time, as shown in the drawing, a plurality of magnetic field quadrupole lenses 30, 3 are provided between the slit 14 and the electronic image pickup device 50.
1, 32 and a plurality of magnetic field hexapole lenses 40, 41, 42,
43 is arranged to remove image distortion. Since the transmission electron microscope uses an electron lens system that is axially symmetrical, the distortion of the image is small, but if an asymmetric fan-shaped magnetic field or a quadrupole lens is used, the electron image will have various distortions and aberrations. As described above, an electronic lens system that requires complicated adjustments and complicated combinations is required.
【０００７】[0007]
【発明が解決しようとする課題】本発明は、透過電子顕
微鏡において蛍光板上に形成された像を蛍光板の表面側
から撮像する際に生じる像の変形の問題を簡便な手段で
解決することを目的とする。本発明は、また、特定の電
子エネルギー損失した分析像の歪を、煩雑な調整を要す
る複雑な多重極レンズ系を必要とすることなく、補正す
ることを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to solve the problem of image deformation that occurs when an image formed on a fluorescent screen is taken from the front side of the fluorescent screen in a transmission electron microscope by a simple means. And It is another object of the present invention to correct the distortion of an analysis image having a specific electron energy loss without requiring a complicated multipole lens system which requires complicated adjustment.
【０００８】[0008]
【課題を解決するための手段】本発明では、蛍光板上の
像を撮像する撮像管のＸ方向及び／又はＹ方向の走査信
号の振幅及び／又は波形を変調することにより前記目的
を達成する。電子エネルギー損失分析像の歪補正も、同
様に分析像を撮像する撮像管のＸ方向及び／又はＹ方向
の走査信号の振幅及び／又は波形を変調することにより
行う。分析像に含まれる歪のモード及びその程度は規則
的な周期構造を有する既知の標準試料に対して形成され
る分析像を撮像することにより知り、その歪モードに合
わせて撮像管の走査信号を変調する。走査信号の変調に
当たっては、既知の画像処理技術やコンピュータによる
演算処理を利用できる。また、規則的な周期構造を有す
る既知の標準試料の代わりに、試料透過像を用いてもよ
い。In the present invention, the above object is achieved by modulating the amplitude and / or the waveform of a scanning signal in the X direction and / or the Y direction of an image pickup tube for picking up an image on a fluorescent screen. Similarly, the distortion correction of the electron energy loss analysis image is also performed by modulating the amplitude and / or the waveform of the scanning signal in the X direction and / or the Y direction of the image pickup tube for picking up the analysis image. The distortion mode and its degree included in the analysis image are known by capturing an analysis image formed on a known standard sample having a regular periodic structure, and the scanning signal of the image pickup tube is determined according to the distortion mode. Modulate. For the modulation of the scanning signal, a known image processing technique or computer arithmetic processing can be used. Further, a sample transmission image may be used instead of a known standard sample having a regular periodic structure.
【０００９】[0009]
【作用】例えば、真円の試料像が横長又は縦長の楕円像
としてモニター上に表示される場合には、撮像管の縦
（Ｙ）方向の走査信号の振幅を通常より小さく又は大き
くする変調を加えることにより、モニター画像を歪のな
い真円の像に補正して表示することができる。For example, when a perfectly circular sample image is displayed on the monitor as a horizontally long or vertically long elliptical image, modulation is performed to make the amplitude of the scanning signal in the vertical (Y) direction of the image pickup tube smaller or larger than usual. By adding it, the monitor image can be corrected and displayed as an image of a perfect circle without distortion.
【００１０】扇形磁場や磁場４重極レンズによる複雑な
像歪についても、構造が既知の標準試料の表示像が歪の
ない像となるように、あるいは試料の透過電子顕微鏡像
を基準として表示像がそれと同じになるように撮像管走
査信号に変調をかけることにより、電子光学系の収差を
撮像装置部分で補正し、歪の無い像を表示することがで
きる。With respect to complicated image distortion due to a fan-shaped magnetic field or a magnetic field quadrupole lens, a display image of a standard sample having a known structure becomes a distortion-free image or a display image based on a transmission electron microscope image of the sample. By modulating the scanning signal of the image pickup tube so as to be the same as that, it is possible to correct the aberration of the electron optical system in the image pickup device portion and display an image without distortion.
【００１１】[0011]
【実施例】以下、本発明の実施例について説明する。 〔実施例１〕図１に、本発明を透過電子顕微鏡による蛍
光像の歪補正に適用した実施例を示す。EXAMPLES Examples of the present invention will be described below. [Embodiment 1] FIG. 1 shows an embodiment in which the present invention is applied to distortion correction of a fluorescent image by a transmission electron microscope.
【００１２】透過電子顕微鏡の電子源１から発生された
電子ビーム２は、集束レンズ３で絞られ試料４に照射さ
れる。薄い試料４を透過した電子ビームは、対物レンズ
５で拡大されて一度結像６し、さらに結像レンズ７で拡
大されて蛍光板９上に像８を形成する。蛍光板９は、図
では傾斜しているが、水平であってもよい。蛍光板９上
の像８は、光学レンズ１０によってビジコン等の撮像管
１６のターゲット面に結像される。撮像管１６のターゲ
ット面は、走査信号発生器１８に接続された走査信号変
調器１９から走査偏向コイル１７に入力される変調され
た走査信号によって走査される。撮像管１６の出力は画
像表示装置２０に表示される。An electron beam 2 generated from an electron source 1 of a transmission electron microscope is focused by a focusing lens 3 and irradiated on a sample 4. The electron beam transmitted through the thin sample 4 is expanded by the objective lens 5 to form an image 6 once, and further expanded by the image forming lens 7 to form an image 8 on the fluorescent plate 9. Although the fluorescent plate 9 is inclined in the drawing, it may be horizontal. The image 8 on the fluorescent plate 9 is formed by the optical lens 10 on the target surface of the image pickup tube 16 such as a vidicon. The target surface of the image pickup tube 16 is scanned by the modulated scanning signal input to the scanning deflection coil 17 from the scanning signal modulator 19 connected to the scanning signal generator 18. The output of the image pickup tube 16 is displayed on the image display device 20.
【００１３】本発明の撮像装置による透過電子顕微鏡像
の歪補正法を図２（ａ），（ｂ）により説明する。図２
（ａ）は図６（ａ）の撮像方式によって発生する像歪の
補正法を示し、図２（ｂ）は図６（ｂ）の撮像方式によ
って発生する像歪の補正法を示す。前述のように、螢光
板９を水平に配置した場合は、例えば真円の電子像を通
常の走査信号を用いて撮像管で撮像すると、モニター画
面には横に拡がった楕円像として表示される。この時、
図２（ａ）中に破線で示すように、撮像装置の縦（Ｙ）
方向の走査信号である鋸歯状波の振幅を小さくするとモ
ニター画像を歪のない真円に補正することができる。A distortion correction method for a transmission electron microscope image by the image pickup apparatus of the present invention will be described with reference to FIGS. 2 (a) and 2 (b). Figure 2
6A shows a method of correcting the image distortion generated by the image pickup method of FIG. 6A, and FIG. 2B shows a method of correcting the image distortion generated by the image pickup method of FIG. 6B. As described above, in the case where the fluorescent plate 9 is arranged horizontally, for example, when an electronic image of a perfect circle is picked up by an image pickup tube using a normal scanning signal, it is displayed on the monitor screen as an elliptical image expanded laterally. . This time,
As indicated by the broken line in FIG. 2A, the vertical direction (Y) of the image pickup device.
By reducing the amplitude of the sawtooth wave which is the scanning signal in the direction, the monitor image can be corrected to a perfect circle without distortion.
【００１４】また、螢光板９を斜めに傾向けて配置し、
その垂直方向から通常の走査信号を用いて撮像管で撮影
すると、真円の試料像は縦長の楕円像としてモニター上
に表示される。このような場合は、図２（ｂ）中に破線
で示すように、撮像装置の縦（Ｙ）方向の走査信号であ
る鋸歯状波の振幅を大きくすることによりモニター画像
を同様に真円に補正することができる。このように撮像
管の走査信号に変調を加えることにより、試料を垂直方
向から透過した歪のない電子像を再生することができ
る。Further, the fluorescent plate 9 is arranged so as to be inclined,
When an image is taken by the image pickup tube from the vertical direction using a normal scanning signal, a sample image of a perfect circle is displayed on the monitor as a vertically elongated elliptic image. In such a case, as shown by a broken line in FIG. 2B, the amplitude of the sawtooth wave, which is the scanning signal in the vertical (Y) direction of the image pickup device, is increased to make the monitor image into a perfect circle. Can be corrected. By thus modulating the scanning signal of the image pickup tube, it is possible to reproduce an undistorted electronic image that is transmitted through the sample in the vertical direction.
【００１５】〔実施例２〕図３に、本発明を電子エネル
ギー損失分析像の歪補正に適用した実施例を示す。透過
電子顕微鏡の電子源１から発生された電子ビーム２は、
集束レンズ３で絞られ試料４に照射される。薄い試料４
を透過した電子ビームは、対物レンズ５で拡大されて一
度結像６し、さらに結像レンズ７で拡大されて蛍光板９
上に像８を形成する。蛍光板９の中心には***が開けら
れており、操作者は蛍光板９に形成された電子顕微鏡像
８によって所望の分析個所を確認した後、その個所が蛍
光板９の***の位置にくるように電子顕微鏡を調整す
る。***の開いた蛍光板９に代えて、電子ビーム中に出
し入れできる穴の開いていない蛍光板と固定のピンホー
ル板とを使用してもよい。このようにして、試料４の特
定の部分を透過した電子ビームは、次に扇形磁場１１に
よって試料４中の特定の原子と非弾性衝突してエネルギ
ー損失した電子に分離され、分離された電子ビームはス
リット１４を通って磁場４重極レンズ１２により電子−
光変換器１３の表面に分析像１５として結像される。電
子−光変換器１３による変換像は、走査偏向コイル１７
を備えるビジコン等の撮像管１６、走査信号発生器１８
及び走査信号変調器１９からなる前記実施例と同じ構成
の撮像装置によって撮像され、画像表示装置２０に表示
される。[Embodiment 2] FIG. 3 shows an embodiment in which the present invention is applied to distortion correction of an electron energy loss analysis image. The electron beam 2 generated from the electron source 1 of the transmission electron microscope is
The sample is focused by the focusing lens 3 and irradiated on the sample 4. Thin sample 4
The electron beam that has passed through is once expanded by the objective lens 5 to form an image 6 once, and then expanded by the image forming lens 7 to form a fluorescent plate 9.
Form image 8 on top. A small hole is formed in the center of the fluorescent plate 9, and the operator confirms the desired analysis point by the electron microscope image 8 formed on the fluorescent plate 9, and then the electron is placed so that the position comes to the position of the small hole of the fluorescent plate 9. Adjust the microscope. Instead of the fluorescent plate 9 having small holes, a fluorescent plate having no holes that can be taken in and out of the electron beam and a fixed pinhole plate may be used. In this way, the electron beam that has passed through a specific portion of the sample 4 is separated into electrons that have lost energy by inelastically colliding with specific atoms in the sample 4 by the sector magnetic field 11, and the separated electron beam Passes through the slit 14 and the electrons are emitted by the magnetic field quadrupole lens 12.
An analysis image 15 is formed on the surface of the light converter 13. The conversion image obtained by the electron-optical converter 13 is a scanning deflection coil 17
Image pickup tube 16 such as a vidicon, scan signal generator 18
The image is picked up by the image pickup device having the same structure as that of the above-mentioned embodiment, and is displayed on the image display device 20.
【００１６】しかし、この分析像１５は必ずしも正しい
形状とは限らない。すなわち、分析像１５は、一般に非
対称である扇形磁場１１や４重極レンズ１２の影響によ
る種々の歪や収差を含み変形している。本実施例では、
撮像管１６の走査偏向コイル１７に入力される走査信号
発生器１８からの信号波形に走査信号変調器１９によっ
て種々の変調を加えることによって、この分析像１５の
歪を除去する。However, the analysis image 15 does not always have the correct shape. That is, the analysis image 15 is deformed including various distortions and aberrations due to the influence of the fan magnetic field 11 and the quadrupole lens 12 which are generally asymmetric. In this embodiment,
The scanning signal modulator 19 applies various modulations to the signal waveform from the scanning signal generator 18 input to the scanning deflection coil 17 of the image pickup tube 16 to remove the distortion of the analysis image 15.
【００１７】図４に、種々の像歪に対応した走査信号の
変調モードを示す。図４の左の列は規則的な格子配列を
有する結晶の歪のない試料像を表している。中央の列
は、色々な像の歪モードを表している。右の列は、その
像歪を修正するために変調を加えた走査信号波形を表し
ている。なお、ここでは像の水平方向をＸ方向、垂直方
向をＹ方向とし、Ｘ方向の走査信号波形をＸ波形、Ｙ方
向の走査信号波形をＹ波形という。FIG. 4 shows the modulation modes of the scanning signal corresponding to various image distortions. The left column of FIG. 4 represents an undistorted sample image of a crystal with a regular lattice arrangement. The middle column represents the distortion modes of the various images. The right column shows the scanning signal waveform with modulation applied to correct the image distortion. Here, the horizontal direction of the image is the X direction, the vertical direction is the Y direction, the scanning signal waveform in the X direction is the X waveform, and the scanning signal waveform in the Y direction is the Y waveform.
【００１８】Ａは本来の試料像と撮像による表示像とが
一致していて像歪のない場合である。この時の走査信号
波形は、Ｘ波形もＹ波形も通常の波形すなわち標準波形
である。Ｂは等間隔であるべき格子の像がＹ方向に不等
間隔になってＹ方向にひずんだ場合である。この場合に
は、走査信号のＸ波形はＡの場合と同様の標準波形と
し、Ｙ波形を線形の波形から凸形の波形に変調すること
によって像歪を補正することができる。A is a case where the original sample image and the display image obtained by the image pickup coincide with each other and there is no image distortion. The scanning signal waveform at this time is a normal waveform, that is, a standard waveform for both the X waveform and the Y waveform. B is a case in which the images of the gratings, which should be evenly spaced, are unequally spaced in the Y direction and are distorted in the Y direction. In this case, the X waveform of the scanning signal is a standard waveform similar to the case of A, and the image distortion can be corrected by modulating the Y waveform from a linear waveform to a convex waveform.
【００１９】Ｃは直線であるべき格子の像がＹ方向に湾
曲した歪の場合である。この場合には、Ｘ波形は標準波
形とし、Ｙ波形を、Ｘ方向の走査毎にＸ波形に同期して
線形から凸形に変形した図示のような波形に変調するこ
とによって歪を補正することができる。Ｄは像の倍率が
Ｙ方向に変化し、等しくなるべき格子の像のＸ方向間隔
がＹ方向に変化した場合である。このような歪を補正す
るには、Ｘ波形の振幅をＹ波形の１波長の間に連続して
減少させる変調を行えばよい。C is the case where the image of the grating, which should be a straight line, is a distortion curved in the Y direction. In this case, the X waveform is a standard waveform, and the distortion is corrected by modulating the Y waveform in synchronization with the X waveform for each scanning in the X direction to a waveform that is deformed from linear to convex as shown in the figure. You can D is the case where the magnification of the image changes in the Y direction and the X-direction spacing of the images of the gratings to be equal changes in the Y direction. In order to correct such distortion, the amplitude of the X waveform may be continuously reduced during one wavelength of the Y waveform.
【００２０】ＥはＸ方向の格子間隔が縮まった場合であ
る。このような像歪を補正するには、Ｘ波形の振幅を標
準波形に対して一定量減少する。どのような像歪であっ
ても、このように本発明の撮像装置のＸ方向走査信号と
Ｙ方向走査信号の変調器を用いることによって、正しい
像に修正することができる。E is the case where the lattice spacing in the X direction is reduced. To correct such image distortion, the amplitude of the X waveform is reduced by a certain amount with respect to the standard waveform. Any image distortion can be corrected to a correct image by using the modulator of the X-direction scanning signal and the Y-direction scanning signal of the image pickup apparatus of the present invention in this way.
【００２１】具体的な像歪の補正にあたっては、試料の
測定に先だって規則的な格子配列を有するＡｕ等の結
晶、又は既知の周期構造を有する人工的なグレーティン
グ等を標準試料として用い、その標準試料に対して形成
された像１６を画像処理装置２０によって観察すること
によって像歪の種類及びその歪の程度を知り、撮像管１
６の走査信号に加えるべき変調信号の決定、すなわち撮
像装置の調整を行う。In concrete correction of image distortion, a crystal such as Au having a regular lattice arrangement or an artificial grating having a known periodic structure is used as a standard sample before the measurement of the sample, and the standard thereof is used. By observing the image 16 formed on the sample by the image processing device 20, the type of image distortion and the degree of the distortion are known, and the image pickup tube 1
The modulation signal to be added to the scanning signal 6 is determined, that is, the image pickup device is adjusted.
【００２２】この撮像装置の調整は、画像表示装置２０
に表示された標準試料の像を見ながら操作者が手動で行
ってもよいが、既知の画像処理技術やコンピュータによ
る演算処理を利用してもよい。例えば、画像表示装置２
０上に、図４の左列に示されているような標準試料の歪
のない格子パターンを特定の色で表示しておき、その上
に撮像された像を異なる色で重ねて表示し、２つの像が
一致するように撮像装置の走査信号変調器１９を調整す
る方法、あるいは撮像された標準試料の各像点の位置を
検知し、検知された各像点の位置データと像歪がない場
合に予想される格子点の位置データとをコンピュータに
入力し、両者の誤差が最小となるように撮像装置の走査
信号の波形を決定する方法を採用することができる。変
調信号の発生は、例えばＤＡＣ（Digital-Analog Conve
rter）を用いることによって任意の波形に対応すること
ができる。そして、このようにして撮像装置の調整が完
了したら、試料を標準試料から分析試料に交換して目的
とする分析を行う。The adjustment of the image pickup device is performed by the image display device 20.
The operator may manually perform the operation while observing the image of the standard sample displayed on the screen, or a known image processing technique or arithmetic processing by a computer may be used. For example, the image display device 2
0, the distortion-free lattice pattern of the standard sample as shown in the left column of FIG. 4 is displayed in a specific color, and the captured image is displayed in a different color in a superimposed manner. A method of adjusting the scanning signal modulator 19 of the image pickup device so that the two images match, or the position of each image point of the imaged standard sample is detected, and the position data and image distortion of each detected image point are detected. It is possible to adopt a method of inputting the position data of the grid points expected when there is no such data into the computer and determining the waveform of the scanning signal of the image pickup device so that the error between them is minimized. The modulation signal is generated by, for example, a DAC (Digital-Analog Conve
rter) can be used to support arbitrary waveforms. Then, when the adjustment of the imaging device is completed in this way, the sample is exchanged from the standard sample to the analytical sample, and the desired analysis is performed.
【００２３】また、上記のように標準の試料を用いずと
も、蛍光板９上に形成された像８を用いることにより撮
像装置の調整を行うことができる。すなわち、蛍光板９
上に形成された像８を図１に示したようにして別の撮像
装置で撮像し、その撮像装置による表示像を前記実施例
１の方法で無歪像に補正する。そして、それを標準像と
して、上記の方法と同様な方法で図３に示した撮像装置
の走査信号変調器１９を調整して画像の歪を補正する。Further, the image pickup device can be adjusted by using the image 8 formed on the fluorescent plate 9 without using the standard sample as described above. That is, the fluorescent plate 9
The image 8 formed above is picked up by another image pickup device as shown in FIG. 1, and the display image by the image pickup device is corrected to a distortion-free image by the method of the first embodiment. Then, using that as a standard image, the distortion of the image is corrected by adjusting the scanning signal modulator 19 of the image pickup apparatus shown in FIG. 3 by a method similar to the above method.
【００２４】その場合、像８を表示する画像表示装置と
分析像１５を表示する画像表示装置を別々に用意し、２
つの画像表示装置に表示された画像が同じになるように
図３に示した撮像装置の走査信号表示器１７を調整して
もよいし、１つの画像表示装置を用い、先ず蛍光板９上
の像８を表示して像８について撮像装置の調整を行った
後、その画像を画像メモリに記憶しておき、次にその画
像メモリからの信号と分析像１５を撮像する撮像装置か
らの信号とを画像撮像装置に同時に入力し、表示された
分析像１５が補正された像８と同じになるように、図３
に示した撮像装置の調整を行うようにしてもよい。ま
た、前述の方法と同様に、既知の画像処理技術を用いて
補正された像８の特徴部分をマッピングし、像１５のそ
れに対応する部分が一致するようにコンピュータ処理す
ることによって撮像装置の走査信号波形を決定してもよ
い。In that case, an image display device for displaying the image 8 and an image display device for displaying the analysis image 15 are separately prepared, and 2
The scanning signal display 17 of the image pickup device shown in FIG. 3 may be adjusted so that the images displayed on the two image display devices are the same. 8 is displayed and the image pickup device is adjusted for the image 8, the image is stored in the image memory, and then the signal from the image memory and the signal from the image pickup device for picking up the analysis image 15 are displayed. 3 so that the analysis image 15 displayed at the same time as the corrected analysis image 8 is input to the image pickup device.
You may make it adjust the imaging device shown in FIG. Further, similar to the above-described method, the characteristic portion of the image 8 corrected by using the known image processing technique is mapped, and the image processing apparatus is scanned by computer processing so that the corresponding portion of the image 15 is matched. The signal waveform may be determined.
【００２５】このようにして調整された無歪像を発生す
るための撮像装置の設定は、電子顕微鏡倍率、フォーカ
ス、電子線加速電圧、電子エネルギー損失像形成におけ
る電子エネルギー損失量の選択等の電子顕微鏡パラメー
タを変更しない限り、試料を交換しても有効である。The setting of the image pickup device for generating the distortion-free image adjusted in this way is performed by selecting the electron microscope magnification, focus, electron beam accelerating voltage, electron energy loss amount in electron energy loss image formation, and the like. As long as the microscope parameters are not changed, it is effective to exchange the sample.
【００２６】[0026]
【発明の効果】本発明によると、透過電子顕微鏡の螢光
板上の像を撮像する場合に試料の斜め視野の形状が、試
料の真上から見た像に変換できる。また、本発明による
と、複雑な多重極レンズ系を用いることなく、電子エネ
ルギー損失分析計の特定の原子像の歪補正をうことがで
きる。そして、従来の像歪補正用の電子レンズ系とその
電源及び制御系が撮像管の走査信号変調器に置き代わる
ので、大幅なコスト低減と共に調整の簡略化を実現する
ことができる。According to the present invention, when the image on the fluorescent plate of the transmission electron microscope is taken, the shape of the oblique visual field of the sample can be converted into the image seen from directly above the sample. Further, according to the present invention, it is possible to correct the distortion of a specific atomic image of the electron energy loss analyzer without using a complicated multipole lens system. Further, since the conventional image distortion correcting electronic lens system and its power supply and control system replace the scanning signal modulator of the image pickup tube, it is possible to realize a significant cost reduction and simplification of adjustment.
【図１】本発明の実施例である透過電子顕微鏡用撮像装
置の概略図。FIG. 1 is a schematic diagram of an image pickup apparatus for a transmission electron microscope that is an embodiment of the present invention.
【図２】本発明による透過電子顕微鏡像の歪補正法の説
明図。FIG. 2 is an explanatory diagram of a distortion correction method for a transmission electron microscope image according to the present invention.
【図３】本発明の実施例である電子エネルギー損失分析
像撮像装置の概略図。FIG. 3 is a schematic diagram of an electron energy loss analysis image pickup device that is an embodiment of the present invention.
【図４】本発明による電子エネルギー損失分析像の歪補
正法の説明図。FIG. 4 is an explanatory view of a distortion correction method for an electron energy loss analysis image according to the present invention.
【図５】従来の透過電子顕微鏡における蛍光板裏面から
の撮像方式を説明する図。FIG. 5 is a diagram illustrating an imaging method from the back surface of a fluorescent plate in a conventional transmission electron microscope.
【図６】従来の透過電子顕微鏡における蛍光板表面から
の撮像方式を説明する図。FIG. 6 is a diagram illustrating an imaging method from the surface of a fluorescent plate in a conventional transmission electron microscope.
【図７】従来の多重極レンズ系による電子エネルギー損
失分析像の歪補正法の説明図。FIG. 7 is an explanatory diagram of a distortion correction method for an electron energy loss analysis image by a conventional multipole lens system.
１：電子源、２：電子ビーム、３：集束レンズ、４：試
料、５：対物レンズ、６：結像１、７：結像レンズ、
８：結像２、９：螢光板、１０：光学レンズ、１１：扇
形磁場、１２：磁場４重極レンズ、１３：電子−光変換
器、１４：スリット、１５：分析像、１６：撮像管、１
７：走査偏向コイル、１８：走査信号発生器、１９：走
査信号変調器、２０：画像表示装置、２１：撮像装置、
２２：鏡、３０，３１，３２：４重極レンズ、４０，４
１，４２，４３：６重極レンズ、５０：電子撮像素子1: electron source, 2: electron beam, 3: focusing lens, 4: sample, 5: objective lens, 6: imaging 1, 7: imaging lens,
8: Image formation 2, 9: Fluorescent plate, 10: Optical lens, 11: Fan-shaped magnetic field, 12: Magnetic field quadrupole lens, 13: Electron-optical converter, 14: Slit, 15: Analytical image, 16: Pickup tube 1
7: scanning deflection coil, 18: scanning signal generator, 19: scanning signal modulator, 20: image display device, 21: imaging device,
22: mirror, 30, 31, 32: quadrupole lens, 40, 4
1, 42, 43: 6-pole lens, 50: electronic image sensor
Claims (11)
された像を撮像管で撮像し、それを画像表示装置に表示
する電子顕微鏡の撮像方法において、 前記撮像管の走査信号の振幅及び／又は波形を変調する
ことにより、画像表示装置に表示される透過電子ビーム
像の歪を除去することを特徴とする電子顕微鏡の撮像方
法。1. An image pickup method for an electron microscope, wherein an image formed by an electron beam transmitted through a sample is picked up by an image pickup tube and is displayed on an image display device, wherein the amplitude and / or the waveform of a scanning signal of the image pickup tube. The image pickup method for an electron microscope is characterized in that distortion of a transmitted electron beam image displayed on an image display device is removed by modulating the.
記像は蛍光板上に形成された蛍光像であることを特徴と
する請求項１記載の電子顕微鏡の撮像方法。2. The image pickup method for an electron microscope according to claim 1, wherein the microscope is a transmission electron microscope, and the image is a fluorescent image formed on a fluorescent plate.
によって拡大結像し、結像の所定部分に対応する電子ビ
ームを扇型電磁石によってエネルギー分離し、分離され
た電子ビームを磁場４重極レンズを通して結像し、得ら
れた電子像を撮像管で撮像して画像表示装置に表示する
電子エネルギー損失分析電子顕微鏡の撮像方法におい
て、 撮像管の走査信号の振幅及び／又は波形を変調すること
により画像表示装置に表示される電子エネルギー損失分
析像の歪を除去することを特徴とする電子エネルギー損
失分析電子顕微鏡の撮像方法。3. An electron beam transmitted through a sample is magnified and imaged by an electron lens, the electron beam corresponding to a predetermined portion of the image is separated by a fan-shaped electromagnet, and the separated electron beam is magnetic field quadrupole lens. In the imaging method of the electron microscope, the electron energy loss analysis electron microscope in which the obtained electron image is imaged by the imaging tube and displayed on the image display device by modulating the amplitude and / or the waveform of the scanning signal of the imaging tube An image pickup method of an electron energy loss analysis electron microscope, which comprises removing distortion of an electron energy loss analysis image displayed on an image display device.
準試料とし、画像表示装置に表示される標準試料の表示
像が前記既知の構造から期待される像と一致するように
撮像管の走査信号の振幅及び／又は波形を変調すること
を特徴とする請求項３記載の電子エネルギー損失分析電
子顕微鏡の撮像方法。4. A crystal or artifact having a known structure is used as a standard sample, and scanning of an image pickup tube is performed so that a display image of the standard sample displayed on an image display device matches an image expected from the known structure. The method for imaging an electron energy loss analyzing electron microscope according to claim 3, wherein the amplitude and / or the waveform of the signal is modulated.
料透過像を蛍光板によって蛍光像に変換して第１の撮像
管により撮像し、この第１の撮像管による画像表示装置
の表示像を基準像として電子エネルギー分析像と基準像
との差異が減少するように電子エネルギー分析像を撮像
する第２の撮像管の走査信号の振幅及び／又は波形を変
調することを特徴とする請求項３記載の電子エネルギー
損失分析電子顕微鏡の撮像方法。5. A sample transmission image magnified and formed by the electronic lens is converted into a fluorescent image by a fluorescent plate and is picked up by a first image pickup tube, and a display image of the image display device by the first image pickup tube is a reference image. 4. The amplitude and / or the waveform of the scanning signal of the second image pickup tube for capturing the electron energy analysis image is modulated so that the difference between the electron energy analysis image and the reference image is reduced. Electron energy loss analysis Imaging method of electron microscope.
された蛍光板上の像を撮像する撮像管と、前記撮像管か
らの出力信号が入力される画像表示装置とを含む透過電
子顕微鏡用撮像装置において、 撮像管の走査信号を変調する走査信号変調器をさらに備
え、前記走査信号変調器により撮像管の走査信号の振幅
及び／又は波形を変調することにより前記画像表示装置
に表示される透過電子ビーム像の歪を除去する機能を有
することを特徴とする透過電子顕微鏡用撮像装置。6. An image pickup device for a transmission electron microscope, comprising an image pickup tube for picking up an image on a fluorescent plate formed by an electron beam transmitted through a sample, and an image display device to which an output signal from the image pickup tube is inputted. A transmission electron beam displayed on the image display device by further comprising a scanning signal modulator for modulating a scanning signal of the image pickup tube, the amplitude and / or the waveform of the scanning signal of the image pickup tube being modulated by the scanning signal modulator An image pickup device for a transmission electron microscope, which has a function of removing image distortion.
とを特徴とする請求項６記載の透過電子顕微鏡用撮像装
置。7. The image pickup apparatus for a transmission electron microscope according to claim 6, wherein the image pickup tube is an electron beam scanning type image pickup tube.
させる電子レンズ系と、結像した電子ビームをエネルギ
ーに応じて分離する扇形電磁石と、分離された電子ビー
ムをフォーカス調整する磁場４重極レンズと、分離され
た電子ビームによる像を電子−光変換して撮像する撮像
管と、撮像管からの出力信号が入力されて試料の電子エ
ネルギー損失分析像を表示する画像表示装置とを含む電
子エネルギー損失分析電子顕微鏡用撮像装置において、 撮像管の走査信号を変調する走査信号変調器をさらに備
え、走査信号変調器により撮像管の走査信号の振幅及び
／又は波形を変調することにより前記画像表示装置に表
示される電子エネルギー損失分析像の歪を除去する機能
を有することを特徴とする電子エネルギー損失分析電子
顕微鏡用撮像装置。8. An electron lens system for expanding and forming an image of an electron beam transmitted through a sample, a fan-shaped electromagnet for separating the formed electron beam according to energy, and a magnetic field quadruple for focus adjustment of the separated electron beam. It includes a polar lens, an image pickup tube that electron-optically converts an image by the separated electron beam to pick up the image, and an image display device that receives an output signal from the image pickup tube and displays an electron energy loss analysis image of the sample. Electron energy loss analysis In an image pickup device for an electron microscope, a scanning signal modulator for modulating a scanning signal of an image pickup tube is further provided, and the image is obtained by modulating the amplitude and / or the waveform of the scanning signal of the image pickup tube by the scanning signal modulator. Imaging device for electron energy loss analysis electron microscope, having a function of removing distortion of an electron energy loss analysis image displayed on a display device
させる電子レンズ系と、結像された電子像を蛍光像に変
換する蛍光板と、蛍光板上に形成された試料の透過電子
ビーム蛍光像を撮像する第１の撮像管と、第１の撮像管
からの出力信号が入力される第１の画像表示装置と、結
像された電子ビームをエネルギーに応じて分離する扇形
電磁石と、分離された電子ビームをフォーカス調整する
磁場４重極レンズと、分離された電子ビームによる像を
撮像する第２の撮像管と、第２の撮像管からの出力信号
が入力される第２の画像表示装置とを含む電子エネルギ
ー損失分析電子顕微鏡用撮像装置において、 第２の撮像管の走査信号を変調する走査信号変調器をさ
らに備え、走査信号変調器により第２の撮像管の走査信
号の振幅及び／又は波形を変調することにより第１の画
像表示装置の表示像を基準にして第２の画像表示装置の
表示像の歪みを除去する機能を有することを特徴とする
電子エネルギー損失分析電子顕微鏡用撮像装置。9. An electron lens system for expanding and forming an image of an electron beam transmitted through a sample, a fluorescent plate for converting the formed electron image into a fluorescent image, and a transmitted electron beam fluorescent image of the sample formed on the fluorescent plate. A first image pickup tube for picking up images, a first image display device to which an output signal from the first image pickup tube is input, and a fan-shaped electromagnet for separating the formed electron beam according to energy. Magnetic field quadrupole lens for focusing the electron beam, a second image pickup tube for picking up an image of the separated electron beam, and a second image display device to which an output signal from the second image pickup tube is input. In the imaging apparatus for electron energy loss analysis electron microscope, including: a scanning signal modulator for modulating a scanning signal of the second imaging tube, and the amplitude and / or amplitude of the scanning signal of the second imaging tube by the scanning signal modulator. Or change the waveform Electron energy loss spectrometry electron microscope imaging apparatus characterized by having a function of removing the distortion of the display image of the first of the second image display device based on the display image of the image display device by.
ビームの一部を空間的に選択して通過させる手段を有す
ることを特徴とする請求項８又は９記載の電子エネルギ
ー損失分析電子顕微鏡用撮像装置。10. An electron microscope for electron energy loss analysis according to claim 8, further comprising, before the fan-shaped electromagnet, means for spatially selecting and passing a part of the imaged electron beam. Imaging device.
画像表示装置を兼ねることを特徴とする請求項８、９又
は１０記載の電子エネルギー損失分析電子顕微鏡用撮像
装置。11. The imaging device for electron energy loss analysis electron microscope according to claim 8, 9 or 10, wherein the second image display device also serves as the first image display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5165718A JP2887361B2 (en) | 1993-07-05 | 1993-07-05 | Imaging method and imaging apparatus for transmission electron microscope or electron energy loss analysis electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5165718A JP2887361B2 (en) | 1993-07-05 | 1993-07-05 | Imaging method and imaging apparatus for transmission electron microscope or electron energy loss analysis electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0721961A true JPH0721961A (en) | 1995-01-24 |
| JP2887361B2 JP2887361B2 (en) | 1999-04-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5165718A Expired - Fee Related JP2887361B2 (en) | 1993-07-05 | 1993-07-05 | Imaging method and imaging apparatus for transmission electron microscope or electron energy loss analysis electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2887361B2 (en) |
Cited By (5)
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|---|---|---|---|---|
| JP2008097839A (en) * | 2006-10-06 | 2008-04-24 | Hitachi High-Technologies Corp | Scanning electron microscope, and distortion calibration of scanning electron microscope image |
| JP2008164429A (en) * | 2006-12-28 | 2008-07-17 | Ishikawajima Inspection & Instrumentation Co | X-ray sensor for x-ray inspection apparatus |
| JP2008171756A (en) * | 2007-01-15 | 2008-07-24 | Jeol Ltd | Distortion measuring method and luminance correction method of electron microscope |
| JP2009016181A (en) * | 2007-07-04 | 2009-01-22 | Fujitsu Ltd | Sample observing device and its correcting method |
| WO2012120576A1 (en) * | 2011-03-08 | 2012-09-13 | 株式会社 日立ハイテクノロジーズ | Scanning electron microscope |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101065074B1 (en) * | 2004-01-16 | 2011-09-15 | 삼성전자주식회사 | Standard sample for TEM Transmission electron microscope elemental mapping and TEM elemental mapping method using the same |
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1993
- 1993-07-05 JP JP5165718A patent/JP2887361B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008097839A (en) * | 2006-10-06 | 2008-04-24 | Hitachi High-Technologies Corp | Scanning electron microscope, and distortion calibration of scanning electron microscope image |
| JP2008164429A (en) * | 2006-12-28 | 2008-07-17 | Ishikawajima Inspection & Instrumentation Co | X-ray sensor for x-ray inspection apparatus |
| JP2008171756A (en) * | 2007-01-15 | 2008-07-24 | Jeol Ltd | Distortion measuring method and luminance correction method of electron microscope |
| JP2009016181A (en) * | 2007-07-04 | 2009-01-22 | Fujitsu Ltd | Sample observing device and its correcting method |
| WO2012120576A1 (en) * | 2011-03-08 | 2012-09-13 | 株式会社 日立ハイテクノロジーズ | Scanning electron microscope |
| JP2012186099A (en) * | 2011-03-08 | 2012-09-27 | Hitachi High-Technologies Corp | Scanning electron microscope |
| US8927931B2 (en) | 2011-03-08 | 2015-01-06 | Hitachi High-Technologies Corporation | Scanning electron microscope |
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| Publication number | Publication date |
|---|---|
| JP2887361B2 (en) | 1999-04-26 |
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