JPH07211496A - Neutral beam charge conversion device - Google Patents

Neutral beam charge conversion device

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Publication number
JPH07211496A
JPH07211496A JP1486294A JP1486294A JPH07211496A JP H07211496 A JPH07211496 A JP H07211496A JP 1486294 A JP1486294 A JP 1486294A JP 1486294 A JP1486294 A JP 1486294A JP H07211496 A JPH07211496 A JP H07211496A
Authority
JP
Japan
Prior art keywords
charge conversion
gas
neutral
nozzle
gas fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1486294A
Other languages
Japanese (ja)
Inventor
Mutsumi Nishifuji
睦 西藤
Tomoyuki Yahiro
知行 八尋
Masaki Hatakeyama
雅規 畠山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP1486294A priority Critical patent/JPH07211496A/en
Publication of JPH07211496A publication Critical patent/JPH07211496A/en
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To achieve highly efficient charge conversion of a large quantity of neutral beams with high energy by passing a beam of neutral particles through a high-speed gas fluid for electrification conversion. CONSTITUTION:Gas in a reservoir tank 1 is formed into an ultra high-speed gas fluid 3 by a divergent nozzle 6 and discharged via a vacuum pump 7. A beam of neutral particles going through a hole 8A in the container 6 is allowed to pass through the fluid 3 and converted into a charged particle beam through charge conversion. With this constitution using the high-speed gas fluid, the fluid does not diffuse out of the hole 8A, the need for reducing the size of the hole 8A to prevent diffusion is eliminated, and a large quantity of neutron beams with high energy can be made to undergo charge conversion with high efficiency.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は半導体製造等に使用す
る、高速原子線等の高速中性粒子ビームを変換し荷電粒
子ビームとする中性ビーム荷電変換装置に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a neutral beam charge conversion device for converting a high-speed neutral particle beam such as a high-speed atomic beam into a charged particle beam, which is used for semiconductor manufacturing.

【０００２】[0002]

【従来の技術】従来この種の荷電変換装置には、図２に
示すガスセルと呼ばれる装置が用いられていた。ガスセ
ルは、真空容器内に粒子ビームが通過する穴８のあいた
ガス容器６を入れ、そのガス容器６内を中性粒子ビーム
１を通して、ガス導入パイプから導入されたガス３と接
触させ、荷電変換するものである。又、金属蒸気セルと
呼ばれるガスセルのガスとして、Ｌｉ等のアルカリ金属
蒸気を使ってその蒸気内を中性粒子ビーム１を通して中
性粒子と金属蒸気を接触させ荷電変換するものがあっ
た。2. Description of the Related Art Conventionally, a device called a gas cell shown in FIG. 2 has been used for this type of charge conversion device. In the gas cell, a gas container 6 having a hole 8 through which a particle beam passes is placed in a vacuum container, and the inside of the gas container 6 is passed through the neutral particle beam 1 and brought into contact with the gas 3 introduced from a gas introduction pipe to carry out charge conversion. To do. Further, as a gas of a gas cell called a metal vapor cell, there is a gas in which an alkali metal vapor such as Li is used to cause the neutral particles and the metal vapor to come into contact with each other through the neutral particle beam 1 for charge conversion.

【０００３】[0003]

【発明が解決しようとする課題】しかしながら、ガスセ
ルは真空容器内にあるガス容器６にガス３を導入するた
め、ガスセルからの圧力拡散による真空度の悪化を防ぐ
目的でガス容器６の穴８を小さくしていた。そのためガ
スセル内のガス粒子数や中性粒子数が多く得られなかっ
た。また金属蒸気セルはガスセルと同じように真空度保
持のためビーム量が制限されたり、扱うアルカリ金属が
化学的に活性であるので容器本体をいためたり、取扱い
に注意する必要があった。However, since the gas cell introduces the gas 3 into the gas container 6 located in the vacuum container, the hole 8 of the gas container 6 is formed for the purpose of preventing deterioration of the degree of vacuum due to pressure diffusion from the gas cell. It was small. Therefore, a large number of gas particles or neutral particles in the gas cell could not be obtained. Further, in the metal vapor cell, the beam amount is limited to maintain the degree of vacuum as in the gas cell, and since the alkali metal to be treated is chemically active, the container body must be damaged and it is necessary to be careful in handling.

【０００４】また最近公開された特開平５−１２９０９
６号公報の分子ビームを利用した電荷中和方法によれ
ば、分子ビームの場合には分子数が少ないため荷電変換
効率が悪く、大量のビームの荷電変換は困難である。
又、上述の方法では大量に中性ビームを荷電ビームに変
換する場合、装置が大型化してしまう。以上のような欠
点が従来の種々の荷電変換装置にあった。Recently published Japanese Patent Laid-Open No. 5-12909
According to the charge neutralization method using a molecular beam of Japanese Patent Publication No. 6, in the case of a molecular beam, the charge conversion efficiency is poor because the number of molecules is small, and charge conversion of a large amount of beams is difficult.
Further, in the above method, when a large amount of neutral beams are converted into charged beams, the device becomes large. The above-mentioned drawbacks exist in various conventional charge conversion devices.

【０００５】本発明は上述の事情に鑑みなされたもの
で、高エネルギー、大ビーム量の中性ビームを高効率で
荷電変換する装置を提供することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a device for highly efficiently converting a neutral beam having a high energy and a large beam amount.

【０００６】[0006]

【課題を解決するための手段】本発明の荷電変換装置
は、高速原子線等の中性粒子線において、中性粒子の電
荷を変換させる装置のうち、高速ガス流体中を中性粒子
ビームを通過させて電荷の変換を行い荷電粒子ビームと
することを特徴とする。The charge conversion device of the present invention is a device for converting the charge of neutral particles in a neutral particle beam such as a high-speed atomic beam. It is characterized in that a charged particle beam is obtained by passing through it to convert charges.

【０００７】[0007]

【作用】高速ガス流体中を中性粒子ビームを通過させ
て、荷電変換することにより、中性粒子ビームを荷電粒
子ビームに変換するので、高速ガス流体がガス容器の穴
からガス容器外に発散するという問題を防止することが
できる。このため、例えばガス容器の穴を大きくしてガ
ス流体と中性粒子ビームとの接触面積を大きくすること
により、荷電変換の高効率化が達成される。[Function] Since the neutral particle beam is converted into a charged particle beam by passing the neutral particle beam through the high-speed gas fluid and converting the charge, the high-speed gas fluid diverges from the hole of the gas container to the outside of the gas container. The problem of doing can be prevented. Therefore, for example, the efficiency of charge conversion can be increased by enlarging the hole of the gas container to increase the contact area between the gas fluid and the neutral particle beam.

【０００８】[0008]

【実施例】図１（ａ）（ｂ）（ｃ）は本発明を用いたビ
ーム荷電変換装置の一例である。符号１は荷電変換前の
ビーム、符号２は荷電変換後のビーム、符号３は荷電変
換前のビーム１と接触して荷電変換するガス等の高速流
体、符号４はガス３のリザーバタンクである。符号５は
ガス３を超音速流とし、ガス３の速度成分をビーム１と
垂直な方向成分にするための末広ノズルであり、符号６
はビーム荷電変換装置の容器、符号７はノズル５から出
たガス３を排気する真空ポンプである。ノズル５の形状
及びリザーバタンク４のガス圧を適当な値に選べばノズ
ル５から出るガス３は超音速となり、容器６にあいてい
るビーム１，２の通過用の穴８から出て行くことが少な
くなり、容器６の外側との圧力差を大きくとることがで
きる。1 (a), 1 (b) and 1 (c) are examples of a beam charge conversion device using the present invention. Reference numeral 1 is a beam before charge conversion, reference numeral 2 is a beam after charge conversion, reference numeral 3 is a high-speed fluid such as a gas that contacts the beam 1 before charge conversion to perform charge conversion, and reference numeral 4 is a reservoir tank for the gas 3. . Reference numeral 5 is a divergent nozzle for making the gas 3 a supersonic flow and making the velocity component of the gas 3 a direction component perpendicular to the beam 1, and a reference numeral 6
Is a container of the beam charge conversion device, and reference numeral 7 is a vacuum pump for exhausting the gas 3 discharged from the nozzle 5. If the shape of the nozzle 5 and the gas pressure in the reservoir tank 4 are selected to be appropriate values, the gas 3 discharged from the nozzle 5 becomes supersonic velocity and should go out through the holes 8 for passing the beams 1 and 2 in the container 6. And the pressure difference with the outside of the container 6 can be increased.

【０００９】図１（ａ）は、ガス末広ノズル５の途中
に、ビーム１，２の通過用の穴８Ａを設けたものであ
る。係る構造により、ガスリザーバタンク４よりガスノ
ズル５で拡張高速化したガス流体中を中性粒子ビーム１
を通過させて電荷の変換を行い、荷電粒子ビーム２とす
ることができる。In FIG. 1A, a hole 8A for passing the beams 1 and 2 is provided in the middle of the gas divergent nozzle 5. With such a structure, the neutral particle beam 1 is passed through the gas fluid whose expansion speed is increased from the gas reservoir tank 4 by the gas nozzle 5.
Can be converted to a charged particle beam 2 by converting the charge.

【００１０】図１（ｂ）は、ガスリザーバタンク４のノ
ズルより、容器６内にガス流体を自由噴流としたもので
ある。ビーム１，２の通過用の穴８Ｂは、容器６の上下
面に設けられている。係る構造により、ガスリザーバタ
ンク４のノズル４Ｂより自由噴流となった高速のガス流
体中を、容器６の穴８Ｂより中性粒子ビーム１を通過さ
せて電荷の変換を行い、荷電粒子ビーム２とすることが
できる。FIG. 1 (b) shows that a gas fluid is freely jetted into the container 6 from the nozzle of the gas reservoir tank 4. The holes 8B for passing the beams 1 and 2 are provided on the upper and lower surfaces of the container 6. With this structure, the neutral particle beam 1 is passed through the hole 8B of the container 6 in the high-speed gas fluid that has become a free jet from the nozzle 4B of the gas reservoir tank 4 to convert the charge, and the charged particle beam 2 can do.

【００１１】図１（ｃ）は、容器６の内部にガス末広ノ
ズル５を設け、拡張高速化したガス流体と容器６の穴８
Ｃから入射する中性粒子ビーム１と荷電変換して、荷電
粒子ビーム２を形成し穴８Ｃより出射するようにしたも
のである。In FIG. 1 (c), a gas divergent nozzle 5 is provided inside the container 6, and the gas fluid is expanded at a high speed and the hole 8 of the container 6 is provided.
A charged particle beam 2 is formed by charge conversion with the neutral particle beam 1 incident from C and is emitted from the hole 8C.

【００１２】たとえばノズルの絞り部断面積をＳ１、ノ
ズル拡大部面積をＳ２とし、 Ｓ２／Ｓ１＝３０ リザーバータンク４の圧力を１３００Ｐａ、ガスをＡｒ
とするとノズル５から放出したＡｒガスは圧力が０．７
４Ｐａのマッハ数７程度の超音速の噴流となり、容器６
内部で指向性を持つ。Ａｒガス３は中性粒子ビーム１と
衝突して荷電変換した後、真空ポンプ７で排気される。
この構造による効果として、容器６の外部を高真空に保
持したまま、容器６内部で中性粒子ビームとＡｒガスと
の衝突を高い割合で達成できる。そのため荷電粒子ビー
ムを多量に得ることができる。For example, assuming that the nozzle cross-sectional area is S1, the nozzle enlarged area is S2, S2 / S1 = 30, the pressure of the reservoir tank 4 is 1300 Pa, and the gas is Ar.
Then, the Ar gas discharged from the nozzle 5 has a pressure of 0.7.
It becomes a supersonic jet with a Mach number of about 7 at 4 Pa, and the container 6
Has directivity inside. The Ar gas 3 collides with the neutral particle beam 1 and undergoes charge conversion, and is then exhausted by the vacuum pump 7.
As an effect of this structure, collision of the neutral particle beam with the Ar gas can be achieved at a high rate inside the container 6 while keeping the outside of the container 6 in a high vacuum. Therefore, a large amount of charged particle beam can be obtained.

【００１３】ここで高速ガス流体の分子速度は、超音速
（マッハ数Ｍで、５＞Ｍ＞１．２）又は極超音速（マッ
ハ数Ｍで、Ｍ＞５）であることが好ましい。気体の流速
ａは、 ａ＝（ＫＲＴ）1/2 但し、Ｋ：比熱比、Ｒ：気体定数、Ｔ：温度 Ａｒガスの場合、 Ｋ＝１．６５８、 Ｒ＝２０８．１５、 Ｔ＝２０（Ｋ
°） として、 超音速 １００〜４１５ｍ／ｓ 極超音速 ＞４１５ｍ／ｓ 程度の流速が必要である。前述のようにノズルの形状、
ガス圧力等を適宜選択することにより、超音速ノズル、
極超音速ノズルを製作することができる。広範囲の流速
のノズルを準備することにより、荷電変換の対象となる
多様な中性粒子ビームのエネルギー（速度）に合ったガ
ス流体速度を選択することが可能となる。これにより高
エネルギー粒子の荷電変換の確率の制御性を高め、変換
効率を上げることができる。The molecular velocity of the high-speed gas fluid is preferably supersonic velocity (5>M> 1.2 at Mach number M) or hypersonic velocity (M> M at Mach number M> 5). The gas flow rate a is a = (KRT) 1/2 where K: specific heat ratio, R: gas constant, T: temperature In the case of Ar gas, K = 1.658, R = 208.15, T = 20 ( K
°) is required to have a flow velocity of about 100 to 415 m / s for supersonic velocity> 415 m / s for hypersonic velocity. The shape of the nozzle as described above,
By selecting gas pressure etc. appropriately, supersonic nozzle,
Hypersonic nozzles can be manufactured. By preparing a nozzle having a wide range of flow velocities, it becomes possible to select a gas fluid velocity matching the energy (velocity) of various neutral particle beams to be subjected to charge conversion. Thereby, the controllability of the probability of charge conversion of high-energy particles can be improved, and the conversion efficiency can be increased.

【００１４】高速ガス流体の自由分子流状態は、 ガスの平均自由行程（λ）／ノズル代表寸法（Ｌ）＞１ と定義されている。λ／Ｌはクヌーセン数と呼ばれ、ク
ヌーセン数が１以上の高速ガス流体が自由分子流状態で
あることが荷電変換には好ましい。 平均自由行程 λ＝２．３×１０-20 Ｔ／Ｐａ2（ｃ
ｍ） 但し、Ｔ：温度（°Ｋ）、Ｐ：圧力（Ｔｏｒｒ）、ａ：
分子直径（ｃｍ） なので、Ａｒガスの場合、 Ｔ＝２０（°Ｋ）、Ｐ＝１×１０-5（Ｔｏｒｒ） ａ＝
３．６７×１０-8（ｃｍ） として、 λ＞３４（ｃｍ） であると自由分子流状態となる。The free molecular flow state of a high-speed gas fluid is defined as the gas mean free path (λ) / nozzle representative dimension (L)> 1. λ / L is called the Knudsen number, and it is preferable for charge conversion that a high-speed gas fluid having a Knudsen number of 1 or more is in a free molecular flow state. Mean free path λ = 2.3 × 10 −20 T / Pa 2 (c
m) where T: temperature (° K), P: pressure (Torr), a:
Since the molecular diameter (cm) is Ar gas, T = 20 (° K), P = 1 × 10 −5 (Torr) a =
When 3.67 × 10 −8 (cm) and λ> 34 (cm), a free molecular flow state is established.

【００１５】本実施例の中性ビーム荷電変換装置は通常
の荷電変換ガスセルのガス導入方法と異なり、ノズルを
使用することでガス容器外の真空度を従来のものより悪
化させずに、中性粒子の通過する穴を拡大でき、荷電粒
子ビームを従来のものより高効率、多量に得ることがで
きる。これはノズル寸法を適当な値に選ぶことにより、
ノズル部から出た流体の速度をビーム通過穴方向の速度
成分をほとんど持たないようにすることにより達成され
る。The neutral beam charge conversion device of this embodiment is different from the usual gas introduction method of the charge conversion gas cell in that the use of the nozzle does not make the degree of vacuum outside the gas container worse than that of the conventional one, and it is neutral. The holes through which the particles pass can be enlarged, and the charged particle beam can be obtained with high efficiency and in a large amount as compared with the conventional one. This is by selecting the nozzle size to an appropriate value,
This is achieved by making the velocity of the fluid flowing out of the nozzle part to have almost no velocity component in the beam passage hole direction.

【００１６】またノズルからの高速流は、断熱膨張を行
うため、同じ圧力のガスセル容器内密度に比べ高密度の
高速流体、つまり粒子数の多い高速流体を達成できるた
め、荷電変換確率は向上する。高速流体とすることでガ
ス容器と真空容器の圧力差を充分大きくとることができ
る。つまりガス容器内に容器外の真空度を悪化させない
大量のガスを導入できる。ここで荷電変換用穴付近を通
過したガス容器内のガスはガス容器用の真空ポンプで排
気したり、循環して再利用して、ガスのビーム系全体の
真空容器への拡散を防止する。Further, since the high-speed flow from the nozzle undergoes adiabatic expansion, a high-speed fluid having a higher density than the density in the gas cell container at the same pressure, that is, a high-speed fluid having a large number of particles can be achieved, so that the charge conversion probability is improved. . By using a high-speed fluid, the pressure difference between the gas container and the vacuum container can be made sufficiently large. That is, a large amount of gas can be introduced into the gas container without deteriorating the degree of vacuum outside the container. The gas in the gas container that has passed through the vicinity of the charge conversion hole is exhausted by a vacuum pump for the gas container or is circulated and reused to prevent the gas from diffusing into the entire vacuum system.

【００１７】従来の荷電変換装置ではガス容器内のガ
ス、金属蒸気は容器のビーム通過用穴に対してランダム
な速度を持っているため、拡散し、真空容器内圧力を悪
化する。本実施例の装置では、高効率の荷電変換がで
き、多量のビームを得ることができる。特に、高エネル
ギーの中性粒子の変換に有効で、従来難しかった数Ｍｅ
Ｖ程度のビームをイオン化することも可能となる。また
ノズルのサイズを小さくすることも可能で、それに準じ
て荷電変換装置も小型化できる。In the conventional charge conversion device, the gas and the metal vapor in the gas container have a random velocity with respect to the beam passage hole of the container, and therefore diffuse and deteriorate the pressure in the vacuum container. The apparatus of this embodiment can perform charge conversion with high efficiency and can obtain a large amount of beams. Especially effective for the conversion of high-energy neutral particles, a few Me
It is also possible to ionize a beam of about V. Also, the size of the nozzle can be reduced, and the charge conversion device can be downsized accordingly.

【００１８】尚、以上の説明はＡｒガス等を用いた高速
ガス流体について説明したが、高速ガス流体としてはＮ
ａ，Ｋａ，Ｃｓ等の金属蒸気、或いは液体窒素等の液体
からなるものを用いてもよい。多様な種類の高速流体を
用いることにより、多様な元素、多様なエネルギーの中
性粒子ビームの荷電変換に対応することができる。この
ように本発明の趣旨を逸脱することなく、種々の変形実
施例が可能である。又、各図中同一符号は同一又は相当
部分を示す。In the above description, a high-speed gas fluid using Ar gas or the like has been described, but as a high-speed gas fluid, N is used.
A metal vapor such as a, Ka or Cs, or a liquid such as liquid nitrogen may be used. By using various kinds of high-speed fluids, it is possible to cope with charge conversion of neutral particles with various elements and various energies. As described above, various modifications can be made without departing from the spirit of the present invention. Further, the same reference numerals in the respective drawings indicate the same or corresponding parts.

【００１９】[0019]

【発明の効果】以上説明したように本発明によれば、荷
電変換装置外部の真空度悪化を防止し多量で高効率のビ
ーム荷電変換を小型装置で達成できる。特に高エネルギ
ーの中性粒子ビームのイオン化も可能であり数ＭｅＶ程
度のビームにも適用可能である。本発明の荷電変換装置
によれば、ビーム量測定が困難な電気的に中性な粒子か
らイオンにして電流を測定できる。半導体製造において
イオン注入装置のチャージアップ対策として中性粒子を
使用した際、イオン電流の測定等で産業上大きな効果が
期待できる。As described above, according to the present invention, it is possible to prevent the deterioration of the vacuum degree outside the charge conversion device and achieve a large amount of highly efficient beam charge conversion with a small device. In particular, ionization of a high-energy neutral particle beam is possible, and it is also applicable to a beam of about several MeV. According to the charge conversion device of the present invention, it is possible to measure an electric current by making ions from electrically neutral particles whose beam amount is difficult to measure. When neutral particles are used as a measure for charge-up of an ion implantation device in semiconductor manufacturing, a great industrial effect can be expected in measuring ion current.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の一実施例のビーム荷電変換装置の説明
図であり、（ａ）は末広ノズルの途中にビーム通過用の
穴を設けたものであり、（ｂ）はリザーバタンクのノズ
ルよりガス流体を自由噴流としたものであり、（ｃ）は
容器の内部に末広ノズルを設けたものである。FIG. 1 is an explanatory diagram of a beam charge conversion device according to an embodiment of the present invention, in which (a) is a divergent nozzle provided with a hole for passing a beam, and (b) is a nozzle of a reservoir tank. A gas fluid is used as a free jet, and (c) shows a divergent nozzle provided inside the container.

【図２】従来のビーム荷電変換装置の説明図である。FIG. 2 is an explanatory diagram of a conventional beam charge conversion device.

【符号の説明】[Explanation of symbols]

１ 荷電変換前のビーム ２ 荷電変換後のビーム ３ 高速ガス流体 ４ リザーバタンク ５ 末広ノズル ６ 容器 ７ 真空ポンプ ８ 穴 1 Beam before charge conversion 2 Beam after charge conversion 3 High-speed gas fluid 4 Reservoir tank 5 Suehiro nozzle 6 Container 7 Vacuum pump 8 holes

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 21/265 Ｈ０５Ｈ 5/06 9014−2Ｇ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical indication H01L 21/265 H05H 5/06 9014-2G

Claims (6)

【特許請求の範囲】[Claims] 【請求項１】 高速原子線等の中性粒子線において、中
性粒子の電荷を変換させる装置のうち、高速ガス流体中
を中性粒子ビームを通過させて電荷の変換を行い荷電粒
子ビームとすることを特徴とする中性ビーム荷電変換装
置。1. A device for converting a charge of neutral particles in a neutral particle beam such as a high-speed atomic beam, in which a neutral particle beam is passed through a high-speed gas fluid to convert the electric charge and a charged particle beam. A neutral beam charge conversion device characterized by: 【請求項２】 上記高速ガス流体は、ノズルから噴出す
る高速自由噴流によるものであることを特徴とする請求
項１記載の中性ビーム荷電変換装置。2. The neutral beam charge conversion device according to claim 1, wherein the high-speed gas fluid is a high-speed free jet ejected from a nozzle. 【請求項３】 上記高速ガス流体は、超音速ノズルから
流出する超音速ガス流体であることを特徴とする請求項
１記載の中性ビーム荷電変換装置。3. The neutral beam charge conversion device according to claim 1, wherein the high-speed gas fluid is a supersonic gas fluid flowing out from a supersonic nozzle. 【請求項４】 上記高速ガス流体は、極超音速ノズルか
ら流出する極超音速ガス流体であることを特徴とする請
求項１記載の中性ビーム荷電変換装置。4. The neutral beam charge conversion device according to claim 1, wherein the high-speed gas fluid is a hypersonic gas fluid flowing out from a hypersonic nozzle. 【請求項５】 上記超音速ノズル又は極超音速ノズルを
使用して加速及び膨張された高速ガス流体又は自由噴流
を自由分子流状態として、上記中性粒子ビームに対して
電荷の変換を行うことを特徴とする請求項２乃至４のい
ずれか一項に記載の中性ビーム荷電変換装置。5. A charge conversion is performed on the neutral particle beam by using a high-speed gas fluid or a free jet that is accelerated and expanded by using the supersonic nozzle or hypersonic nozzle as a free molecular flow state. The neutral beam charge conversion device according to any one of claims 2 to 4. 【請求項６】 前記ノズルによって加速させる高速ガス
流体は、液体又は金属蒸気からなるものであることを特
徴とする請求項２乃至５のいずれか一項に記載の中性ビ
ーム荷電変換装置。6. The neutral beam charge conversion device according to claim 2, wherein the high-speed gas fluid accelerated by the nozzle is made of liquid or metal vapor.
JP1486294A 1994-01-13 1994-01-13 Neutral beam charge conversion device Pending JPH07211496A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1486294A JPH07211496A (en) 1994-01-13 1994-01-13 Neutral beam charge conversion device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1486294A JPH07211496A (en) 1994-01-13 1994-01-13 Neutral beam charge conversion device

Publications (1)

Publication Number Publication Date
JPH07211496A true JPH07211496A (en) 1995-08-11

Family

ID=11872842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1486294A Pending JPH07211496A (en) 1994-01-13 1994-01-13 Neutral beam charge conversion device

Country Status (1)

Country Link
JP (1) JPH07211496A (en)

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