JPH07211278A - Sample carrying device for vacuum device - Google Patents

Abstract

PURPOSE:To facilitate and secure the support of the sample in the vacuum and the cancel thereof, and to prevent the generation of any malfunction during transport by providing a member for stopping the turning of a sample and a spring means for offsetting this member to the tip side of a clearance. CONSTITUTION:A male screw 3, which is projected in the tip direction and which is to be concentrically and integrally rotated with the core of a carrying shaft 2, and a presser frame 4 as a member for restricting the turning of a sample board are provided in the movement tip of the carrying shaft 2 go as to support the sample board with screw engagement. Namely, the male screw 3 is formed in the tip of a bolt member 31, which is concentrically fixed to the tip of the carrying shaft 2 by a pin 11 under the condition that the relative rotation thereof around the shaft is impossible. The frame 4 is fitted out of the peripheral part of the tip of the male screw 3 so that the rotation thereof around the shaft and the relative movement thereof in the axial direction are possible, and a spring holder 12, of which rotation around the shaft is possible and of which movement in the axial direction is restricted, is fitted out of the root side periphery of the male screw 3, and a compression spring 5 is stretched between the holder 12 and the frame 4. The male screw 3 can be thereby easily screwed with a screw hole of a sample board, and this engagement can be easily cancelled.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、例えば固体の表面分析
などを目的として使用される真空装置内において、大気
側からの操作により真空中にある試料の受け渡し、受け
取り、搬送を容易かつ正確に行うことができる試料搬送
装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention can easily and accurately transfer, receive and transfer a sample in a vacuum by an operation from the atmosphere side in a vacuum device used for the purpose of surface analysis of solids and the like. The present invention relates to a sample transfer device that can be used.

【０００２】[0002]

【従来の技術】従来、真空中において試料を搬送するた
めに設けられた試料搬送装置（ハンドリング装置）とし
ては、搬送対象である試料台の両サイドに設けた溝に、
搬送軸等に設けたフォーク形状の２本の爪を差し込む形
式の機構が広く知られ、またこのような機構では、フォ
ーク形状の２本の爪の一方に板バネを組み付けてこの板
バネに固着のピンが試料台に設けた穴に弾着嵌合するよ
うにしたクランプ機構を併用することで、ハンドリング
（試料台の把持等）を確実にする構成のものも知られて
いる。そしてこのような試料搬送装置は、試料台の落下
などのトラブルの発生が十分に防止された搬送を実現で
きる点で優れている。2. Description of the Related Art Conventionally, as a sample transfer device (handling device) provided for transferring a sample in a vacuum, grooves provided on both sides of a sample table to be transferred are
A mechanism for inserting two fork-shaped pawls provided on a transport shaft or the like is widely known, and in such a mechanism, a leaf spring is attached to one of the fork-shaped pawls and fixed to the leaf spring. There is also known a configuration in which the handling (holding of the sample table, etc.) is ensured by using a clamp mechanism in which the pins of (1) and (2) are elastically fitted in the holes provided in the sample table. Further, such a sample transport device is excellent in that it is possible to realize transport in which troubles such as dropping of the sample table are sufficiently prevented.

【０００３】また、上記とは別に、試料搬送装置の搬送
軸の先端に雄ネジを設け、この雄ネジを試料台のネジ穴
にねじ込むことによりハンドリングを行なう形式の装置
も知られている。この装置の場合、搬送先のステージ上
での試料台のハンドリングに関して、スプリングを利用
しただけの簡単な機構により、試料台の受け取りと受け
渡しが容易かつ確実にできるという利点がある。In addition to the above, there is also known a device of the type in which a male screw is provided at the tip of the carrying shaft of the sample carrying device and the male screw is screwed into the screw hole of the sample stand for handling. In the case of this device, regarding the handling of the sample stage on the stage of the transfer destination, there is an advantage that the sample stage can be received and delivered easily and surely by a simple mechanism using only a spring.

【０００４】[0004]

【発明が解決しようとする課題】しかし、上記のフォー
ク形状の爪を試料台の溝に差し込む形式の装置は、搬送
元のステージに対して、試料台を受け取り、あるいは受
け渡すという二つの操作を可能とするには、試料搬送装
置による試料台の確実な支持とその解除のための着脱手
段を設け、また、搬送先のステージにおいても試料台の
支持とその解除も考慮せねばならず、複雑な構造、繁雑
な操作が必要とならざるを得ないという問題があった。However, the device of the type in which the fork-shaped claw is inserted into the groove of the sample table has two operations of receiving or transferring the sample table with respect to the stage of the transfer source. In order to make it possible, it is necessary to provide a mounting and demounting means for surely supporting and releasing the sample stage by the sample transporting device, and also to support and release the sample stage at the stage of the transport destination, which is complicated. There was a problem that it had to be complicated in structure and complicated in operation.

【０００５】また上記の雄ネジを用いる形式の装置で
は、雄ネジのねじ込みが不十分であった揚合、搬送中に
試料台がその自重によって回転するという危険性をもっ
ており、このようなハンドリングの緩みが一旦生じる
と、もはや試料台の姿勢を制御することが不可能となる
という問題を抱えていた。Further, in the apparatus of the type using the above-mentioned male screw, there is a risk that the sample table will rotate due to its own weight during the lifting and the conveying, in which the male screw is not screwed in sufficiently. There was a problem that once the loosening occurred, it became impossible to control the posture of the sample stage.

【０００６】本発明は、これらの従来技術がもっていた
問題点を克服し、真空中にある試料の支持とその解除が
容易かつ確実にでき、さらに、搬送途中においても不都
合が生ずることがない試料搬送装置を提供することを目
的とする。The present invention overcomes the problems of these prior art techniques, supports and releases a sample in a vacuum easily and reliably, and does not cause any inconvenience during transportation. An object is to provide a carrier device.

【０００７】[0007]

【課題を解決するための手段】上記目的を実現する本発
明の真空装置用の試料搬送装置の特徴は、大気から封止
された真空ハウジング内で軸回り回転及び軸方向移動が
できるように支持された搬送軸と、この搬送軸の軸回り
回転及び軸方向移動をハウジング外部から非接触で操作
可能に設けられたマグネットカップリング式の操作手段
と、上記搬送軸の軸方向端部に固定されたネジ結合する
対部材の一方（例えば雄ネジ）と、ネジ結合する対部材
の他方（例えばネジ穴）を有しかつ搬送対象試料を担持
する試料台とを備え、上記ネジ結合する対部材の螺合及
び螺合解除により、所定のステージ上に試料台を受け渡
し、あるいはステージ上から受け取ることができるよう
に構成した真空装置用の試料搬送装置において、上記搬
送軸の先端に、上記ネジ結合する部材の螺合時に上記試
料台と係合する試料台回り止め部材をその軸方向に一定
長の移動遊隙をもつように設けると共に、この回り止め
部材を該遊隙の先端側に偏倚させるバネ手段を設け、か
つこの回り止め部材は、該回り止め部材を上記ステージ
上で回転拘束した際の搬送軸回転時にのみ該搬送軸に対
し相対回転するように構成したところにある。The features of the sample transfer device for a vacuum device of the present invention that achieves the above object are characterized in that a sample is supported so as to be rotatable about an axis and movable in an axial direction in a vacuum housing sealed from the atmosphere. And a magnetic coupling type operation means provided so as to be capable of operating the rotation and axial movement of the conveyance shaft from the outside of the housing in a non-contact manner and fixed to the end of the conveyance shaft in the axial direction. One of the pair members to be screw-coupled (for example, a male screw) and the other one of the pair members to be screw-coupled (for example, a screw hole) and a sample table for carrying a sample to be transported are provided. In a sample transfer device for a vacuum device, which is configured so that it can be delivered to or received from a predetermined stage by being screwed and unscrewed, the sample can be transferred to the tip of the transfer shaft from above. A sample table rotation stopping member that engages with the sample table when the members to be screwed together are provided so as to have a movement play of a fixed length in the axial direction, and the rotation prevention member is provided on the tip side of the play. The biasing spring means is provided, and the detent member is configured to rotate relative to the transport shaft only when the transport shaft rotates when the detent member is rotationally constrained on the stage.

【０００８】[0008]

【作用】上記構成の本発明の試料台搬送装置によれば、
搬送元，搬送先のステージに試料台が載置された状態で
は、該試料台はステージにより回転できないように拘束
されるので、搬送軸の回転によりネジ結合する部材の螺
合が行なわれる際に、搬送軸が回り止め部材との間の回
転抵抗に打ち勝って相対回転し、また回り止め部材はネ
ジ結合部材の螺入に伴って付勢バネに抗して軸方向に相
対移動される。According to the sample stage transporting apparatus of the present invention having the above structure,
When the sample stage is placed on the stage of the transfer source and the transfer destination, the sample stage is constrained by the stage so that it cannot rotate. Therefore, when screwing the members to be screwed by the rotation of the transfer shaft, The transport shaft overcomes the rotational resistance between itself and the rotation preventing member to rotate relative to each other, and the rotation preventing member is relatively moved in the axial direction against the biasing spring as the screw coupling member is screwed.

【０００９】そしてネジ結合する部材の螺合が完了した
状態で、マグネットカップリング式の操作手段により搬
送軸を軸方向に移動させると、試料台は搬送軸先端にネ
ジ結合支持された状態で搬送され、しかも搬送中では、
試料台はステージによる回転の拘束がされていない状態
にあるので、回り止め部材は所定の摩擦力で搬送軸によ
り回転拘束されて、回転による螺合部の緩みを生ずるこ
とがなく、また搬送軸を回転させた場合には、これと一
体に試料台も回転するので、例えば搬送先ステージと搬
送元ステージの面が相互い傾斜しているような場合にも
有効に対処できる。When the transport shaft is axially moved by the magnetic coupling type operating means in a state where screwing of the members to be screwed is completed, the sample stage is transported while being screwed and supported at the tip of the transport shaft. And during transport,
Since the sample stage is in a state where the rotation is not restrained by the stage, the rotation preventing member is not restrained by the transport shaft by a predetermined frictional force, so that the screwing portion is not loosened due to the rotation, and the transport shaft is not restrained. When the table is rotated, the sample table also rotates integrally with the table, so that it is possible to effectively deal with the case where the surfaces of the transfer destination stage and the transfer source stage are inclined with respect to each other.

【００１０】[0010]

【実施例】以下、図面によって本発明の試料搬送装置の
一具体例を説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A specific example of the sample carrying device of the present invention will be described below with reference to the drawings.

【００１１】図３は本発明が適用された試料搬送装置を
利用する真空装置の全体概要を示し、図の右方部分に設
けられた試料搬送装置によって、真空槽Ａのステージａ
から、真空槽Ｂのステージｂあるいは真空槽Ｃのステー
ジｃに試料台を搬送できるように設けられた構成をなし
ている。FIG. 3 shows an overall outline of a vacuum apparatus using a sample transfer apparatus to which the present invention is applied. The sample transfer apparatus provided on the right side of the drawing shows a stage a of the vacuum chamber A.
Therefore, the sample table is configured to be transported to the stage b of the vacuum chamber B or the stage c of the vacuum chamber C.

【００１２】図１（ａ）は試料搬送装置を備えた上記真
空装置の一例を部分的に示したものであり、この図にお
いて１はハウジングであり、内部を大気から封止して真
空に維持する筒状をなしていて、その一端（図の上端）
は、図示しない真空装置の本体に開口して接続されてい
る。FIG. 1 (a) partially shows an example of the above-mentioned vacuum device provided with a sample transfer device. In FIG. 1, reference numeral 1 denotes a housing, the inside of which is sealed from the atmosphere to maintain a vacuum. It has a cylindrical shape, and its one end (upper end in the figure)
Is open and connected to the main body of a vacuum device (not shown).

【００１３】２は上記ハウジング１に収容された搬送軸
であり、図示しない支持手段により図の上下方向（搬送
軸の軸方向）に移動（並進移動）可能でかつ軸回り回転
が可能に支持されている。そしてこの搬送軸２に設けた
マグネット（図示せず）と、ハウジングの外部に外装し
た大気側の操作マグネット１０とにより、非接触で搬送
軸を動作させることができるいわゆるマグネットカップ
リング式の操作機構をが構成されている。Reference numeral 2 denotes a transport shaft housed in the housing 1, which is supported by a support means (not shown) so as to be movable (translational movement) in the vertical direction (axial direction of the transport shaft) and rotatable about the axis. ing. A magnet (not shown) provided on the transport shaft 2 and an atmosphere-side operation magnet 10 that is externally mounted on the housing allow the transport shaft to operate in a non-contact manner, that is, a so-called magnet coupling type operating mechanism. Is configured.

【００１４】そして上記の搬送軸２の移動先端（図の上
端）には、図２で示す試料台６をネジ結合により支持す
るために、先端方向に突出して該搬送軸２と軸心を一致
して一体回転する雄ネジ３と、試料台６の回転を拘束す
る回り止め部材としての押えコマ４が設けられており、
その詳細は図１（ｂ）に拡大して示されている。すなわ
ち、搬送軸２の先端に軸心を一致してピン１１により軸
回りの相対回転が不能に固定されたボルト部材３１の先
端に、例えばＭ６ネジの上記雄ネジ３が形成されてい
る。In order to support the sample stage 6 shown in FIG. 2 by screw connection, the moving tip of the transport shaft 2 (the upper end in the figure) is projected in the tip direction so that the transport shaft 2 and the shaft center are aligned with each other. A male screw 3 that integrally rotates and a pressing piece 4 that serves as a rotation stopping member that restrains the rotation of the sample table 6 are provided.
The details are shown enlarged in FIG. That is, the male screw 3 of, for example, an M6 screw is formed at the tip of the bolt member 31 whose axis is aligned with the tip of the transport shaft 2 and which is fixed by the pin 11 such that relative rotation around the axis is impossible.

【００１５】また上記の押えコマ４は、雄ネジ３の先端
外周部に、軸回り回転及び軸方向相対移動が可能に外装
され、また同様に、雄ネジ３の根元側外周には、軸回り
回転が可能で軸方向移動は拘束された一端開放筒状のス
プリングホルダー１２が外装されていて、このスプリン
グホルダー１２と上記押えコマ４の間には圧縮スプリン
グ５が張設されている。またこの押えコマ４の先端は、
後述する試料台６の円形側面に沿って係合できるように
弧状の凹面をなすように設けられていて、本例ではこの
凹面が雄ネジ３の先端位置に略一致する位置で係止され
るように、その限界位置を雄ネジ３に設けたフランジ３
２により与えられるようになっている。なお、スプリン
グ５を中間に張設している上記押えコマ４とスプリング
ホルダー１２の対は、雄ネジ３に対して一体に軸回り回
転をするように設けられていると共に、この雄ネジ３に
対する軸回り回転の回転抵抗（摩擦力）を上回る相対的
な回転力がある場合、すなわち押えコマ４とネジ結合し
た試料台がステージ上でその回転が拘束されている状態
で搬送軸を回転させた場合には、ねじ込み動作に伴う雄
ネジ３の回転に対して自由に回転できるようになってい
る。つまり、回転が拘束された押えコマ４に対して搬送
軸２（つまりボルト部材３１，雄ネジ３）をねじ込み回
転させると、押えコマ４及びスプリングホルダー１２は
ボルト部材３１軸回りを滑り回転することになる。The pressing piece 4 is externally mounted on the outer peripheral portion of the tip of the male screw 3 so as to be rotatable about the axis and relatively movable in the axial direction. A spring holder 12, which is rotatable and axially constrained and is open at one end, is externally mounted, and a compression spring 5 is stretched between the spring holder 12 and the pressing piece 4. Moreover, the tip of the presser piece 4 is
It is provided so as to form an arcuate concave surface so that it can be engaged along the circular side surface of the sample table 6 which will be described later, and in this example, this concave surface is locked at a position substantially matching the tip position of the male screw 3. The flange 3 with its limit position on the male screw 3.
2 is given. The pair of the pressing piece 4 and the spring holder 12 in which the spring 5 is stretched in the middle are provided so as to integrally rotate around the axis with respect to the male screw 3, and the pair with respect to the male screw 3 is also provided. When there is a relative rotational force that exceeds the rotational resistance (friction force) of the rotation around the axis, that is, the transport shaft is rotated while the rotation of the sample stage screwed to the pressing piece 4 is restricted on the stage. In this case, the male screw 3 can be freely rotated with respect to the rotation of the male screw 3 accompanying the screwing operation. In other words, when the conveying shaft 2 (that is, the bolt member 31, the male screw 3) is screwed into and rotated with respect to the pressing piece 4 whose rotation is restricted, the pressing piece 4 and the spring holder 12 slide and rotate around the axis of the bolt member 31. become.

【００１６】図２は、以上の構成を有する本例装置によ
る試料台のねじ込み支持と、その解除の動作を説明する
ための図である。FIG. 2 is a view for explaining the screwing support of the sample table and the releasing operation thereof by the apparatus of this example having the above-mentioned configuration.

【００１７】この図２において、６は真空中に配置され
ているステージ８上に載置された試料台であり、該ステ
ージ８に固定のプランジャー９によって保持されてい
る。本例のこのプランジャー９は、図示しない内蔵コイ
ルスプリングによりピンが試料台と係合する方向に突出
できるように設けられた構造をなしており、試料台がス
テージに挿入された際には該試料台にピンが係合してこ
れを安定に保持し、試料台が引抜かれる際にはそのコイ
ルスプリングの弾性圧縮により係合を解除できるように
なっている。In FIG. 2, reference numeral 6 denotes a sample table mounted on a stage 8 arranged in a vacuum, which is held by a plunger 9 fixed to the stage 8. This plunger 9 of the present example has a structure in which a pin can be projected by a built-in coil spring (not shown) in a direction in which the pin is engaged with the sample table. When the sample table is inserted into the stage, The pin is engaged with the sample table to hold it stably, and when the sample table is pulled out, the engagement can be released by elastic compression of the coil spring.

【００１８】この試料台６は、図示の如く扁平な厚肉筒
状に設けられていると共に、その胴部の外側面には周状
の受け溝６１が設けられていて、その受け溝６１の底部
に水平方向のネジ穴７が設けられている。試料台６によ
り支持される試料は、本例では上述した筒状の上端に例
えばネジで図示しない板を固定し、この板の上に薄片状
の試料を貼り付けるなどにより固定して行なわれる。な
お、本例の試料台が筒状に設けられているのは、必要に
応じてこの筒内部にヒーター等を挿入して試料の加熱を
行なうことができるようにするためである。The sample table 6 is provided in the shape of a flat, thick-walled cylinder as shown in the drawing, and a circumferential receiving groove 61 is provided on the outer surface of the body portion of the receiving table 61. A horizontal screw hole 7 is provided at the bottom. In this example, the sample supported by the sample table 6 is fixed by fixing a plate (not shown) to the above-mentioned cylindrical upper end with, for example, a screw, and pasting a thin sample on the plate. The sample base of this example is provided in a cylindrical shape so that a heater or the like can be inserted into the cylinder to heat the sample, if necessary.

【００１９】このネジ穴７は、上述した搬送軸先端の雄
ネジ３が螺合されるためのものであり、上記マグネット
カップリング式の操作機構の操作マグネット１０を操作
することにより搬送軸２を軸方向に移動させて雄ネジ３
の先端を該ネジ穴７に当て、その状態で該搬送軸２した
がって雄ネジ３を回転させることにより、該雄ネジ３を
ネジ穴７に螺合させることができる。The screw hole 7 is for screwing the male screw 3 at the tip of the carrying shaft, and the carrying shaft 2 is moved by operating the operating magnet 10 of the magnet coupling type operating mechanism. Axial move to move male screw 3
The male screw 3 can be screwed into the screw hole 7 by applying the tip of the to the screw hole 7 and rotating the transport shaft 2 and thus the male screw 3 in that state.

【００２０】そしてこのとき、押えコマ４は試料台６の
受け溝６１に合致して係合し、雄ネジ３のねじ込み動作
に伴う回転と軸方向移動に対しても実質的に静止状態を
保ったままとなって、雄ネジ３との相対位置のみが変化
し、次第にスプリング５が縮み、このバネ力によって押
えコマ４は試料台６に押し付けられて係合力が増加し、
所定の位置で支持のねじ込み操作を終了する。At this time, the pressing piece 4 is engaged with the receiving groove 61 of the sample table 6 in a substantially stationary state even with respect to the rotation and axial movement accompanying the screwing operation of the male screw 3. As it remains, only the position relative to the male screw 3 changes, the spring 5 gradually contracts, and the pressing force of the pressing piece 4 is pressed against the sample table 6 by this spring force, and the engaging force increases.
The screwing operation of the support is completed at a predetermined position.

【００２１】この後、操作マグネツトを図２の右方向に
移動させれば、試料台６はプランジャー９の保持から解
放され、ステージ８からの受け取り操作が完了する。After that, when the operating magnet is moved to the right in FIG. 2, the sample table 6 is released from the holding of the plunger 9, and the receiving operation from the stage 8 is completed.

【００２２】また、ステージ８ヘの受け渡しではこの操
作の逆を実行すればよい。Further, in the case of delivery to the stage 8, the reverse of this operation may be executed.

【００２３】以上のように、本例の試料搬送装置は、試
料台のネジ穴に搬送軸の雄ネジを螺合させる操作、ある
いはその逆の螺合を解除する操作を容易に行なうことが
できると共に、搬送中にはネジの緩みによって試料台が
回転する虞れはなく、確実な試料台の搬送、ステージと
の間の受け渡し、受け取りを行なうことができる。As described above, the sample transport apparatus of this embodiment can easily perform the operation of screwing the male screw of the transport shaft into the screw hole of the sample stand, or the operation of releasing the opposite screw operation. At the same time, there is no risk that the sample stage will rotate due to the loosening of the screw during the transportation, and the sample stage can be reliably transported, and can be delivered to and received from the stage.

【００２４】[0024]

【発明の効果】本発明の試料搬送装置によれば、従来の
装置に比較して、次のような利点を有している。The sample carrying device of the present invention has the following advantages over the conventional device.

【００２５】（１） 装置の構造は簡単であり、その操
作も容易かつ正確にできる。(1) The structure of the device is simple, and its operation can be performed easily and accurately.

【００２６】（２） 試料の搬送中における雄ネジとネ
ジ穴の螺合の緩みもなく、その姿勢も搬送軸の回りで自
由に制御でき、多くのステージに対応できる。(2) There is no loosening of the male screw and the screw hole during the sample transfer, and its posture can be freely controlled around the transfer axis, and it can be applied to many stages.

【図面の簡単な説明】[Brief description of drawings]

【図１】図１（ａ）は、本発明の試料搬送装置の一実施
例の全体構成を示した一部断面図であり、図１（ｂ）は
同Ａ部の拡大詳細図である。FIG. 1 (a) is a partial cross-sectional view showing an overall configuration of an embodiment of a sample transport device of the present invention, and FIG. 1 (b) is an enlarged detailed view of the same section A.

【図２】図２（ａ）は、上記実施例装置によるハンドリ
ング動作の説明図であり、図２（ｂ）は該図２（ａ）を
横方向から視た断面図である。FIG. 2A is an explanatory diagram of a handling operation by the apparatus of the above-described embodiment, and FIG. 2B is a cross-sectional view of FIG. 2A viewed from a lateral direction.

【図３】図３は、本発明の試料搬送装置が用いられてい
る真空装置の全体概要を示した図である。FIG. 3 is a diagram showing an overall outline of a vacuum apparatus in which the sample transfer apparatus of the present invention is used.

【符号の説明】[Explanation of symbols]

１：ハウジング、２：搬送軸、３：雄ネジ、４：押えコ
マ、５：スプリング。1: Housing, 2: Conveying shaft, 3: Male screw, 4: Pressing piece, 5: Spring.

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】 大気から封止された真空ハウジング内で
軸回り回転及び軸方向移動ができるように支持された搬
送軸と、この搬送軸の軸回り回転及び軸方向移動をハウ
ジング外部から非接触で操作可能に設けられたマグネッ
トカップリング式の操作手段と、上記搬送軸の軸方向端
部に固定されたネジ結合する対部材の一方と、ネジ結合
する対部材の他方を有しかつ搬送対象試料を担持する試
料台とを備え、上記ネジ結合する対部材の螺合及び螺合
解除により、所定のステージ上に試料台を受け渡し、あ
るいはステージ上から受け取ることができるように構成
した真空装置用の試料搬送装置において、 上記搬送軸の先端に、上記ネジ結合する部材の螺合時に
上記試料台と係合する試料台回り止め部材をその軸方向
に一定長の移動遊隙をもつように設けると共に、この回
り止め部材を該遊隙の先端側に偏倚させるバネ手段を設
け、かつこの回り止め部材は、該回り止め部材を上記ス
テージ上で回転拘束した際の搬送軸回転時にのみ該搬送
軸に対し相対回転するように構成したことを特徴とする
真空装置用の試料搬送装置。1. A transfer shaft supported so as to rotate about an axis and move in an axial direction in a vacuum housing sealed from the atmosphere, and the rotation about the axis of the transfer shaft and the axial movement of the transfer shaft do not come into contact with the outside of the housing. A magnetic coupling type operation means provided so as to be operable, one of a pair of screw-coupled pair members fixed to the end of the transport shaft in the axial direction, and the other of the pair of screw-coupled pair members to be transported. For a vacuum device that is provided with a sample table that carries a sample, and is configured such that the sample table can be delivered to or received from a predetermined stage by screwing and unscrewing the pair of members that are screwed together. In the sample transporting device, the sample stage rotation preventing member that engages with the sample stage when the screw-engaging member is screwed is provided at the distal end of the transport shaft so as to have a movable play of a certain length in the axial direction. A spring means is provided for biasing the detent member toward the tip side of the play, and the detent member is provided only when the carrier shaft is rotated when the detent member is rotationally restrained on the stage. A sample transfer device for a vacuum device, which is configured to rotate relative to an axis. 【請求項２】 請求項１において、搬送軸先端に設けら
れたネジ結合する一方の部材が雄ネジであり、試料台が
有するネジ結合する他方の部材がネジ穴であることを特
徴とする真空装置用の試料搬送装置。2. The vacuum according to claim 1, wherein one of the threaded members provided at the tip of the transport shaft is a male screw, and the other threaded member of the sample table is a screw hole. Sample transport device for the device.