JPH07198345A - Circular diameter measurement device - Google Patents
Circular diameter measurement deviceInfo
- Publication number
- JPH07198345A JPH07198345A JP33752593A JP33752593A JPH07198345A JP H07198345 A JPH07198345 A JP H07198345A JP 33752593 A JP33752593 A JP 33752593A JP 33752593 A JP33752593 A JP 33752593A JP H07198345 A JPH07198345 A JP H07198345A
- Authority
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- Japan
- Prior art keywords
- circular sample
- diameter
- edge
- optical system
- circular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の技術分野】本発明は、円形試料の径を光学的
に測定するための装置に係り、特に円形試料のエッジ検
出誤差を補正して正確な径を測定する円径測定装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for optically measuring the diameter of a circular sample, and more particularly to a circular diameter measuring apparatus for correcting an edge detection error of a circular sample to measure an accurate diameter.
【０００２】[0002]
【従来の技術】図７は従来のエッジ検出装置を示す。こ
の装置は、試料１′のエッジを光学的に検出するもので
ある。図７において、試料１は、後述の対物レンズ３′
に対して垂直方向に移動可能なステージ２′の一面上に
載置され、ステージ２′の他面側に配置された光源（図
示せず）により、透過照明されている。2. Description of the Related Art FIG. 7 shows a conventional edge detecting device. This device optically detects the edge of the sample 1 '. In FIG. 7, a sample 1 is an objective lens 3'described later.
Is mounted on one surface of the stage 2'movable in the vertical direction, and is transilluminated by a light source (not shown) arranged on the other surface side of the stage 2 '.
【０００３】ステージ２′の一面側には、ステージ２′
表面の法線方向に沿って、対物レンズ３′、結像レンズ
４′、ピンホール５′及び光検出部６′が順次に配置さ
れている。対物レンズ３′の焦点は試料１の表面に位置
され、上述の透過照明光は、対物レンズ３′、結像レン
ズ４′及びピンホール５′を経て光検出器６′により受
光される。光検出器６′は、受光された光をその強度に
応じて光電変換し、比較器７の第１の入力端へ入力させ
る。比較器７の第２の入力端には、閾値設定手段８にて
設定された所定の閾値が入力される。ここで所定の閾値
とは、明部と暗部とにおける出力の中間の値（５０％）
である。従って、試料１のエッジがピンホール５の中心
に位置すると、即ち、試料１のエッジが検出されると、
比較器７の第１入力端への入力値は、閾値設定手段８に
よる閾値と等しくなる。比較器７は、光検出器６′によ
る検出光強度と、閾値設定手段８による閾値とを比較す
る結果、試料１のエッジが検出されると、エッジ検出信
号を出力する。On one side of the stage 2 ', the stage 2'
An objective lens 3 ', an imaging lens 4', a pinhole 5 ', and a photodetector 6'are sequentially arranged along the surface normal direction. The focal point of the objective lens 3'is located on the surface of the sample 1, and the transmitted illumination light described above is received by the photodetector 6'through the objective lens 3 ', the imaging lens 4'and the pinhole 5'. The photodetector 6 ′ photoelectrically converts the received light according to its intensity and inputs it to the first input end of the comparator 7. The predetermined threshold value set by the threshold value setting means 8 is input to the second input terminal of the comparator 7. Here, the predetermined threshold value is an intermediate value (50%) of the output in the bright area and the dark area.
Is. Therefore, when the edge of the sample 1 is located at the center of the pinhole 5, that is, when the edge of the sample 1 is detected,
The input value to the first input terminal of the comparator 7 becomes equal to the threshold value by the threshold value setting means 8. The comparator 7 outputs an edge detection signal when the edge of the sample 1 is detected as a result of comparing the detected light intensity by the photodetector 6 ′ and the threshold value by the threshold value setting means 8.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、従来の
エッジ検出装置は、図８に示すように、試料１が円形で
あり、この円形試料１の径を測定する場合には、試料１
のエッジがピンホール５の中心位置だとしても、光検出
器６′の出力は中間の値（５０％）にならない。実際、
図９に示すように、試料１のエッジがピンホール５の中
心からずれた位置で、比較器７の第１入力端への入力が
閾値に達し、エッジ検出信号が出力されてしまう。従っ
て、エッジ検出が誤差を含み、測定精度の低下という問
題が生じる。However, in the conventional edge detecting apparatus, as shown in FIG. 8, the sample 1 has a circular shape. When measuring the diameter of the circular sample 1, the sample 1 has a circular shape.
Even if the edge of is at the center position of the pinhole 5, the output of the photodetector 6'does not have an intermediate value (50%). In fact
As shown in FIG. 9, at the position where the edge of the sample 1 is displaced from the center of the pinhole 5, the input to the first input end of the comparator 7 reaches the threshold value and the edge detection signal is output. Therefore, there is a problem that the edge detection includes an error and the measurement accuracy is degraded.
【０００５】ここで、円形試料１の概略的な径が既知で
ある場合には、閾値設定手段８による設定閾値が円形試
料１の径に対応する閾値になるように、操作者が閾値設
定手段８を手動操作して設定変更することも考えられ
る。しかし、様々な円の径を測定する場合には、その都
度に閾値の設定変更せねばならず、作業が繁雑であり、
多くの時間を要するという問題がある。Here, when the approximate diameter of the circular sample 1 is known, the operator sets the threshold value setting means 8 so that the threshold value set by the threshold value setting means 8 corresponds to the diameter of the circular sample 1. It is also possible to manually operate 8 to change the setting. However, when measuring the diameters of various circles, the threshold setting must be changed each time, and the work is complicated,
There is a problem that it takes a lot of time.
【０００６】従って本発明の目的は、円形試料のエッジ
の検出誤差を補正でき、閾値の設定を変更することなく
円形試料の径を正確に測定できる円径測定装置を提供す
ることである。Therefore, an object of the present invention is to provide a circle diameter measuring device capable of correcting the detection error of the edge of a circular sample and accurately measuring the diameter of the circular sample without changing the setting of the threshold value.
【０００７】[0007]
【課題を達成するための手段】上記目的を達成するため
に、本発明は、円形試料の径を測定するための装置であ
って、光源と、この光源から射出された光の円形試料に
対する反射光または透過光を受光する光検出器とを含む
光学系と、この光学系と円形試料とを、円形試料の法線
方向に対して垂直な方向へ相対移動させる移動手段と、
前記移動手段による前記光学系と円形試料との相対移動
期間中の前記光検出器の出力に基づいて、円形試料のエ
ッジを検出するエッジ検出手段と、円形試料と前記光学
系との相対的移動量を計数する計数手段と、前記計数手
段の出力に基づいて円形試料の径を演算し、且つその演
算結果に対し、前記エッジ検出手段の検出誤差を補正す
る演算手段とを備える円径測定装置を提供する。In order to achieve the above object, the present invention provides a device for measuring the diameter of a circular sample, which comprises a light source and reflection of light emitted from the light source to the circular sample. An optical system including a photodetector that receives light or transmitted light, and a moving means that relatively moves the optical system and the circular sample in a direction perpendicular to the normal direction of the circular sample,
Edge detection means for detecting the edge of the circular sample based on the output of the photodetector during the relative movement period of the optical system and the circular sample by the moving means, and the relative movement of the circular sample and the optical system. A circle diameter measuring device comprising a counting means for counting the amount and a computing means for computing the diameter of the circular sample based on the output of the counting means and correcting the detection error of the edge detecting means with respect to the computation result. I will provide a.
【０００８】本発明の一実施例によれば、前記光学系
が、円形試料からの光を前記光検出器に対して結像させ
る結像光学系と、前記光検出器と前記結像光学系との間
に配置されたピンホールとを含む。According to one embodiment of the present invention, the optical system forms an image of light from a circular sample on the photodetector, the photodetector and the image formation optical system. And a pinhole disposed between and.
【０００９】本発明の一実施例によれば、前記演算手段
が、演算部と記憶手段とを有する。この場合、前記演算
手段の演算部は、先ず円形試料の補正前の径を演算す
る。一方、前記演算手段の記憶手段は、前記結像光学系
の拡大倍率と前記ピンホールの径とに対して定まる補正
値を表すデータ、或いは円形試料の既知の径を表すデー
タを予め記憶している。この場合、前記演算手段は、そ
の演算部により円形試料の補正前の径を演算し、その演
算結果に前記記憶手段に記憶されたデータを参照して円
形試料の実際の径を求める。尚、本発明において、用語
「円形試料」とは、数学的に厳密な円形の試料のみなら
ず、実質的に円形な試料をも含む広い意味に理解すべき
である。According to one embodiment of the present invention, the calculation means has a calculation section and a storage means. In this case, the calculation unit of the calculation means first calculates the diameter of the circular sample before correction. On the other hand, the storage means of the arithmetic means stores in advance data representing a correction value determined for the magnification of the imaging optical system and the diameter of the pinhole, or data representing a known diameter of a circular sample. There is. In this case, the calculating means calculates the diameter of the circular sample before correction by the calculating section, and the actual diameter of the circular sample is obtained by referring to the data stored in the storage means as the calculation result. In the present invention, the term “circular sample” should be understood in a broad sense including not only a mathematically exact circular sample but also a substantially circular sample.
【００１０】[0010]
【作用】上記の構成によれば、エッジ検出手段による円
形試料のエッジ検出には誤差が含まれているが、円形試
料のエッジ検出に基づく円形試料の径の算出の際には、
演算手段によってエッジ検出手段による誤差が補正され
る。According to the above structure, the edge detection of the circular sample by the edge detection means includes an error, but when the diameter of the circular sample is calculated based on the edge detection of the circular sample,
The error due to the edge detecting means is corrected by the calculating means.
【００１１】[0011]
【実施例】図１は本発明の第１実施例に係る円径測定装
置を示す。この装置は、円形試料の少なくとも三点のエ
ッジ位置を検出することにより、円形試料の径を測定す
るものである。1 shows a circle diameter measuring device according to a first embodiment of the present invention. This device measures the diameter of a circular sample by detecting the edge positions of at least three points on the circular sample.
【００１２】円形試料１は、対物レンズ３に対して垂直
方向に移動可能なＸＹステージ２の一面（載置面）上に
載置され、ステージ２の他面側に配置された照明光学系
（図示せず）により透過照明される。The circular sample 1 is mounted on one surface (mounting surface) of the XY stage 2 which is movable in the vertical direction with respect to the objective lens 3, and the illumination optical system (on the other surface side of the stage 2 is disposed. It is transmitted and illuminated by (not shown).
【００１３】ステージ２の載置面側の円形試料１の上方
には、円形試料１のエッジからの光を検出するための検
出光学系が配置されている。この検出光学系は、ステー
ジ２の載置面の法線方向に沿って、載置面から順次に配
置された上述の対物レンズ３、結像レンズ４、ピンホー
ル５及び光検出器６を含む。Above the circular sample 1 on the mounting surface side of the stage 2, a detection optical system for detecting light from the edge of the circular sample 1 is arranged. This detection optical system includes the above-mentioned objective lens 3, imaging lens 4, pinhole 5, and photodetector 6 which are sequentially arranged from the mounting surface along the direction normal to the mounting surface of the stage 2. .
【００１４】対物レンズ３の焦点は、試料１の表面に位
置されている。照明光学系からの光は、ステージ２を透
過して対物レンズ３、結像レンズ４及びピンホール５を
介して光検出器６の受光面に結像され、ここで光電変換
される。光検出器６により光電変換された電気信号は、
エッジ検出器９に与えられる。The focus of the objective lens 3 is located on the surface of the sample 1. The light from the illumination optical system passes through the stage 2, is imaged on the light receiving surface of the photodetector 6 through the objective lens 3, the imaging lens 4 and the pinhole 5, and is photoelectrically converted here. The electric signal photoelectrically converted by the photodetector 6 is
It is given to the edge detector 9.
【００１５】ステージ駆動装置１２によるステージ２の
駆動により、ピンホール５の中心軸（検出光学系の光
軸）またはその近傍に試料１のエッジが位置すると、エ
ッジ検出器９はエッジ検出信号を出力し、これをカウン
タ１０へ入力させる。それと同時に、このエッジ検出信
号が出力されたときのステージ２の座標値がカウンタ１
０により計数される。このカウンタ１０の出力が演算器
１１に入力され、ここで円形試料１の径が演算される
が、検出誤差を補正して円形試料１の正確な径が演算さ
れる。When the edge of the sample 1 is positioned at or near the central axis of the pinhole 5 (optical axis of the detection optical system) by driving the stage 2 by the stage driving device 12, the edge detector 9 outputs an edge detection signal. Then, this is input to the counter 10. At the same time, the coordinate value of the stage 2 when this edge detection signal is output is the counter 1
Counted by 0. The output of the counter 10 is input to the calculator 11, where the diameter of the circular sample 1 is calculated, and the accurate diameter of the circular sample 1 is calculated by correcting the detection error.
【００１６】検出誤差の補正の説明に先だって、本発明
の円径測定装置において、検出誤差の補正がない場合を
考える。透過照明光学系からの光がステージ２を照明す
ると、この照明光は、試料１によりその一部を遮断され
た後、対物レンズ３により結像レンズ４に導かれて結像
され、ピンホール５を介して光検出器６に入射し、光検
出器６にて光電変換される。その結果、光検出器６から
は、図２に示すような波形が出力される。この出力はエ
ッジ検出器９に入力され、このエッジ検出器９の出力が
明部と暗部との中間の値（５０％）となったときに、エ
ッジ検出信号がカウンタ１０に入力される。そのときの
ステージ２の座標値がカウンタ１０により計数され、そ
れに基づいてカウンタ１０はエッジ位置を出力する。Prior to the explanation of the correction of the detection error, the case where the detection error is not corrected in the circle diameter measuring device of the present invention will be considered. When the light from the transmissive illumination optical system illuminates the stage 2, the illumination light is partially blocked by the sample 1 and then guided by the objective lens 3 to the imaging lens 4 to be imaged, and the pinhole 5 The light is incident on the photodetector 6 via and is photoelectrically converted by the photodetector 6. As a result, the photodetector 6 outputs a waveform as shown in FIG. This output is input to the edge detector 9, and when the output of the edge detector 9 becomes an intermediate value (50%) between the bright portion and the dark portion, the edge detection signal is input to the counter 10. The coordinate value of the stage 2 at that time is counted by the counter 10, and the counter 10 outputs the edge position based on the count value.
【００１７】このようにして少なくとも三点のエッジ位
置を検出することにより、図３に示す破線の円形試料１
の径が演算される。しかしながら、この円形試料１の径
は、図３に示すように検出誤差を含んでいる。By detecting at least three edge positions in this manner, the circular sample 1 indicated by the broken line in FIG.
The diameter of is calculated. However, the diameter of the circular sample 1 includes a detection error as shown in FIG.
【００１８】実際には、ピンホール５の中心位置が試料
１のエッジと一致したときにエッジ検出信号を出力し、
図３に実線で示した円形試料１の径を求めるべきであ
る。本発明の円径測定装置は、図３に実線で示した円形
試料１の径を求めるように適合されている。以下、検出
誤差の補正について説明する。Actually, when the center position of the pinhole 5 coincides with the edge of the sample 1, an edge detection signal is output,
The diameter of the circular sample 1 shown by the solid line in FIG. 3 should be calculated. The circle diameter measuring device of the present invention is adapted to determine the diameter of the circular sample 1 shown by the solid line in FIG. The correction of the detection error will be described below.
【００１９】図４は検出すべきエッジ部の拡大図を示
す。円形試料１の径をＲ、ピンホール５の半径をｒ、検
出誤差を含む円形試料１の径をａとすると、ピンホール
５の中心位置が図３に示す破線の円形試料１のエッジと
一致したとき、ピンホール５のエッジと円形試料１のエ
ッジとの交点を通り、且つピンホール５の接線をなす二
本の直線の間の角度αは、FIG. 4 shows an enlarged view of the edge portion to be detected. When the diameter of the circular sample 1 is R, the radius of the pinhole 5 is r, and the diameter of the circular sample 1 including the detection error is a, the center position of the pinhole 5 coincides with the edge of the circular sample 1 shown by the broken line in FIG. Then, the angle α between the two straight lines passing through the intersection of the edge of the pinhole 5 and the edge of the circular sample 1 and forming the tangent to the pinhole 5 is
【００２０】[0020]
【数１】 角度αをなす二本の接線と検出すべきエッジ部との間の
角度βは、[Equation 1] The angle β between the two tangents forming the angle α and the edge to be detected is
【００２１】[0021]
【数２】 となる。これら角度α，βを用いて図４に斜線で示した
Ａ部の面積ＳA 及びＢ部の面積ＳB を求めると、[Equation 2] Becomes Using these angles α and β, when the area SA of the portion A and the area SB of the portion B shown by hatching in FIG. 4 are obtained,
【００２２】[0022]
【数３】 [Equation 3]
【００２３】ここで、 ＳA ＋ＳB ＝πｒ2 ／２ となるａを求めると２（Ｒ−ａ）が直径での誤差とな
る。尚、ここで用いたピンホール５の半径ｒは次式に示
される。[0023] Here, when obtaining the SA + SB = πr 2/2 to become a 2 (R-a) is the error in diameter. The radius r of the pinhole 5 used here is expressed by the following equation.
【００２４】[0024]
【数４】 [Equation 4]
【００２５】但し、ｒ′は実際のピンホール５の半径、
Ｎは倍率である。このように、図２に破線で示した円の
径に基づいて演算器１１により上述の式（ｉ）乃至（i
v) を演算し、検出誤差を補正して円形試料１の真の径
を算出することにより、オペレータは様々な円の径を測
定する場合にも、繁雑な閾値の設定変更をすることな
く、正確に円形試料１の径を求めることが可能となる。However, r'is the actual radius of the pinhole 5,
N is a magnification. As described above, the calculator 11 calculates the above equations (i) to (i) based on the diameter of the circle shown by the broken line in FIG.
By calculating v) and correcting the detection error to calculate the true diameter of the circular sample 1, the operator does not have to change the setting of the complicated threshold value even when measuring the diameters of various circles. It is possible to accurately determine the diameter of the circular sample 1.
【００２６】図５は本発明の第２実施例を説明する。本
実施例の第１実施例に対する差異は、演算器１１に記憶
器１３を設けたことにある。記憶器１３には、図６に示
すような、光学系の拡大倍率とピンホール５の径とに対
して定まる補正値が、検出誤差を含んだ円形試料１の径
に対応して予め記憶されている。ここで図６は例えば倍
率が１０倍、ピンホール５の径が４０μｍのときに円形
試料１の径を測定する場合におけるグラフである。FIG. 5 illustrates a second embodiment of the present invention. The difference of this embodiment from the first embodiment is that the storage unit 13 is provided in the arithmetic unit 11. In the memory 13, a correction value determined for the magnification of the optical system and the diameter of the pinhole 5 as shown in FIG. 6 is stored in advance corresponding to the diameter of the circular sample 1 including the detection error. ing. Here, FIG. 6 is a graph in the case of measuring the diameter of the circular sample 1 when the magnification is 10 times and the diameter of the pinhole 5 is 40 μm, for example.
【００２７】本実施例においては、エッジ検出器９の出
力が明部と暗部との中間の値（５０％）となったとき
に、エッジ検出信号がカウンタ１０に入力される。その
ときのステージ２の座標値がカウンタ１０により計数さ
れ、それに基づいてカウンタ１０はエッジ位置を出力す
る。それに基づいて演算器１１は、検出誤差を含んだ円
形試料１の径ａ（図４参照）を計算する。次いで、演算
器１１は、検出誤差を含んだ円形試料１の径ａに対応す
る補正値を記憶器１３から読み出し、円形試料１の径ａ
を補正し、円形試料１の真の径Ｒを算出する。このよう
にして、円形試料１の真の径Ｒを正確に求めることが可
能となる。In the present embodiment, the edge detection signal is input to the counter 10 when the output of the edge detector 9 becomes an intermediate value (50%) between the bright portion and the dark portion. The coordinate value of the stage 2 at that time is counted by the counter 10, and the counter 10 outputs the edge position based on the count value. Based on this, the calculator 11 calculates the diameter a (see FIG. 4) of the circular sample 1 including the detection error. Next, the computing unit 11 reads out the correction value corresponding to the diameter a of the circular sample 1 including the detection error from the storage unit 13, and calculates the diameter a of the circular sample 1.
Is corrected and the true diameter R of the circular sample 1 is calculated. In this way, the true diameter R of the circular sample 1 can be accurately obtained.
【００２８】ここで円形試料１の真の径Ｒが既知の場合
には、記憶器１３には補正値に代えて、円形試料１の真
の径Ｒを記憶させておいてもよい。本発明は上述した実
施例のみに限定されるものではなく、幾多の変更又は変
形が可能である。例えば上記実施例においては照明を透
過照明としたが、落射照明としてもよい。If the true diameter R of the circular sample 1 is known, the true diameter R of the circular sample 1 may be stored in the memory 13 instead of the correction value. The present invention is not limited to the above-described embodiments, but various modifications and variations are possible. For example, in the above embodiment, the illumination is transmissive illumination, but it may be epi-illumination.
【００２９】上述の実施例においては、閾値をピンホー
ル５における明部と暗部との出力の中間の値（５０％）
として設定したが、所望により他の値に設定してもよ
い。上述の実施例においては、光学系が固定され、ステ
ージ２が移動可能であるが、逆にステージ２を固定し、
光学系を対物レンズ３の光軸に対して垂直方向に移動可
能としてもよい。In the above-mentioned embodiment, the threshold value is the intermediate value (50%) of the output of the bright portion and the dark portion of the pinhole 5.
However, other values may be set as desired. In the above-described embodiment, the optical system is fixed and the stage 2 is movable, but conversely, the stage 2 is fixed,
The optical system may be movable in the direction perpendicular to the optical axis of the objective lens 3.
【００３０】[0030]
【発明の効果】以上説明したように本発明の円径測定装
置によれば、エッジ検出誤差を補正するようにしたの
で、様々な円の径を測定する場合にも、繁雑な閾値の設
定変更を伴わずに、円形試料の径を正確に測定すること
ができる。As described above, according to the circle diameter measuring device of the present invention, the edge detection error is corrected, so that the complicated threshold value setting change is required even when measuring various circle diameters. It is possible to accurately measure the diameter of a circular sample without the need for.
【図１】本発明の第１実施例に係る円径測定装置を示す
ブロック図である。FIG. 1 is a block diagram showing a circle diameter measuring device according to a first embodiment of the present invention.
【図２】図１の光検出器から出力される波形を示す線図
である。FIG. 2 is a diagram showing a waveform output from the photodetector of FIG.
【図３】図１のピンホールの中心位置と円形試料のエッ
ジとの位置関係を示す上面図である。FIG. 3 is a top view showing the positional relationship between the center position of the pinhole in FIG. 1 and the edge of a circular sample.
【図４】図３において検出すべき円形試料のエッジを拡
大して示す上面図である。FIG. 4 is an enlarged top view showing an edge of the circular sample to be detected in FIG.
【図５】本発明の第２実施例に係る円径測定装置を示す
ブロック図である。FIG. 5 is a block diagram showing a circle diameter measuring device according to a second embodiment of the present invention.
【図６】図５の記憶器に記憶された光学系の拡大倍率と
ピンホールの径とに対して定まる補正値を示す線図であ
る。FIG. 6 is a diagram showing a correction value determined with respect to a magnification of an optical system and a diameter of a pinhole stored in a storage device of FIG.
【図７】従来の検出装置を示すブロック図である。FIG. 7 is a block diagram showing a conventional detection device.
【図８】図７の装置による円形試料のエッジの理想的且
つ仮想的な検出状態を示し、円形試料のエッジとピンホ
ールの中心とが一致した状態を示す上面図である。8 is a top view showing an ideal and virtual detection state of an edge of a circular sample by the apparatus of FIG. 7, showing a state in which the edge of the circular sample and the center of a pinhole coincide with each other.
【図９】図７の装置による円形試料のエッジの実際の検
出状態を示し、円形試料のエッジとピンホールの中心と
が一致していない状態を示す上面図である。9 is a top view showing an actual detection state of the edge of the circular sample by the apparatus of FIG. 7, showing a state where the edge of the circular sample and the center of the pinhole do not coincide.
１…円形試料、３，４…レンズ（結像光学系）、５…ピ
ンホール、６…光検出器、９…エッジ検出器（エッジ検
出手段）、１０…カウンタ（計数手段）、１１…演算器
（演算手段）、１２…ステージ駆動装置（移動手段）、
１３…記憶器（記憶手段）。1 ... Circular sample, 3, 4 ... Lens (imaging optical system), 5 ... Pinhole, 6 ... Photodetector, 9 ... Edge detector (edge detecting means), 10 ... Counter (counting means), 11 ... Calculation Device (arithmetic means), 12 ... Stage drive device (moving means),
13 ... Memory device (memory means).
Claims (7)
って、 光源と、この光源から射出された光の円形試料に対する
反射光または透過光を受光する光検出器とを含む光学系
と、 この光学系と円形試料とを、円形試料の法線方向に対し
て垂直な方向へ相対移動させる移動手段と、 前記移動手段による前記光学系と円形試料との相対移動
期間中の前記光検出器の出力に基づいて、円形試料のエ
ッジを検出するエッジ検出手段と、 円形試料と前記光学系との相対的移動量を計数する計数
手段と、 前記計数手段の出力に基づいて円形試料の径を演算し、
且つその演算結果に対し、前記エッジ検出手段の検出誤
差を補正する演算手段とを備える円径測定装置。1. An apparatus for measuring the diameter of a circular sample, comprising: an optical system including a light source, and a photodetector for receiving reflected light or transmitted light of light emitted from the light source with respect to the circular sample. Moving means for relatively moving the optical system and the circular sample in a direction perpendicular to the normal direction of the circular sample, and the light detection during the relative movement period of the optical system and the circular sample by the moving means. Edge detection means for detecting the edge of the circular sample based on the output of the instrument, counting means for counting the relative movement amount of the circular sample and the optical system, and the diameter of the circular sample based on the output of the counting means. Is calculated,
Further, a circle diameter measuring device comprising a calculation means for correcting the detection error of the edge detection means with respect to the calculation result.
光検出器に対して結像させる結像光学系と、前記光検出
器と前記結像光学系との間に配置されたピンホールとを
含む請求項１記載の円径測定装置。2. An optical system for forming an image of light from a circular sample on the photodetector, and a pin arranged between the photodetector and the image forming optical system. The circle diameter measuring device according to claim 1, further comprising a hole.
有する請求項１または２記載の円径測定装置。3. The circle diameter measuring device according to claim 1, wherein the arithmetic unit has an arithmetic unit and a storage unit.
正前の径を演算する請求項３記載の円径測定装置。4. The circle diameter measuring device according to claim 3, wherein the calculation unit of the calculation unit calculates a diameter of the circular sample before correction.
学系の拡大倍率と前記ピンホールの径とに対して定まる
補正値を表すデータを予め記憶している請求項３または
４記載の円径測定装置。5. The storage means of the arithmetic means stores in advance data representing a correction value that is determined with respect to the magnification of the imaging optical system and the diameter of the pinhole. Circle diameter measuring device.
既知の径を表すデータを予め記憶している請求項３また
は４記載の円径測定装置。6. The circle diameter measuring device according to claim 3, wherein the storage means of the calculation means stores in advance data representing a known diameter of the circular sample.
試料の補正前の径を演算し、その演算結果に前記記憶手
段に記憶されたデータを参照して円形試料の実際の径を
求める請求項５または６記載の円径測定装置。7. The calculating means calculates the diameter of the circular sample before correction by the calculating section, and obtains the actual diameter of the circular sample by referring to the data stored in the storage means as the calculation result. Item 5. The circle diameter measuring device according to item 5 or 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33752593A JPH07198345A (en) | 1993-12-28 | 1993-12-28 | Circular diameter measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33752593A JPH07198345A (en) | 1993-12-28 | 1993-12-28 | Circular diameter measurement device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07198345A true JPH07198345A (en) | 1995-08-01 |
Family
ID=18309475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33752593A Withdrawn JPH07198345A (en) | 1993-12-28 | 1993-12-28 | Circular diameter measurement device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07198345A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003327346A (en) * | 2002-05-14 | 2003-11-19 | Sharp Corp | Optical object distinguishing device and printing device using it |
| WO2009081990A1 (en) * | 2007-12-26 | 2009-07-02 | Kobelco Research Institute, Inc. | Shape measuring apparatus and shape measuring method |
| CN103175480A (en) * | 2013-02-25 | 2013-06-26 | 上海长园电子材料有限公司 | Protecting device and calibrating device with same |
-
1993
- 1993-12-28 JP JP33752593A patent/JPH07198345A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003327346A (en) * | 2002-05-14 | 2003-11-19 | Sharp Corp | Optical object distinguishing device and printing device using it |
| WO2009081990A1 (en) * | 2007-12-26 | 2009-07-02 | Kobelco Research Institute, Inc. | Shape measuring apparatus and shape measuring method |
| CN103175480A (en) * | 2013-02-25 | 2013-06-26 | 上海长园电子材料有限公司 | Protecting device and calibrating device with same |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
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