JPH0719810A - Displacement detection device - Google Patents
Displacement detection deviceInfo
- Publication number
- JPH0719810A JPH0719810A JP18658493A JP18658493A JPH0719810A JP H0719810 A JPH0719810 A JP H0719810A JP 18658493 A JP18658493 A JP 18658493A JP 18658493 A JP18658493 A JP 18658493A JP H0719810 A JPH0719810 A JP H0719810A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- photo
- light
- light source
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】従来の三方向の変位を検出する装
置は、例えば特開昭６３−１１１６７６号に記載された
もの等である。それは単結晶基板による平板状起歪体に
変形により電気抵抗の変化する検出素子を直交するＸ方
向とＹ方向に夫々設けブリッジを形成したものである。
これを変位を検出したい場所に設置する。もし変位が生
じると基板が変形しその歪みにより生じた電気抵抗の変
化を検出することによって、各方向の変位量を検出する
ものである。BACKGROUND OF THE INVENTION A conventional device for detecting displacement in three directions is, for example, the one described in Japanese Patent Laid-Open No. 63-111676. In the flat-plate strained body made of a single crystal substrate, a detection element whose electric resistance changes by deformation is provided in each of the X direction and the Y direction orthogonal to each other to form a bridge.
This is installed in the place where you want to detect the displacement. If displacement occurs, the substrate is deformed and the change in electrical resistance caused by the strain is detected to detect the amount of displacement in each direction.
【０００２】[0002]
【発明が解決しようとする課題】前記のような従来の三
方向変位検出装置は、高価な半導体素子を必要とし又、
薄い基板に上記素子を設けたものであるため、基板の取
り付け等に問題がある。The conventional three-way displacement detecting device as described above requires an expensive semiconductor element, and
Since the above elements are provided on a thin substrate, there is a problem in mounting the substrate.
【０００３】[0003]
【課題を解決するための手段】本発明の三方向の変位検
出装置は、円筒状の支持体と、棒状の作用子を有する可
動体と、可動体を支持体に支持する変形可能な変位薄片
と、支持体又は可動体に取り付けられた光源と、支持体
の所定位置配置された複数の検出素子と、光源よりの光
ビームを夫々の検出素子に導くための導光手段とを有す
るものである。DISCLOSURE OF THE INVENTION A three-direction displacement detecting device according to the present invention comprises a cylindrical support member, a movable member having a rod-shaped operator, and a deformable displacement thin piece for supporting the movable member on the support member. A light source attached to a support or a movable body, a plurality of detection elements arranged at predetermined positions of the support, and a light guide means for guiding a light beam from the light source to each detection element. is there.
【０００４】この検出装置は、支持体を所望位置に設置
すると共に作用子に力が加わらない状態において光源よ
りの光が各検出素子の中心に当るように調整する。。又
作用子には変位を検出する部分を変位が生じた時に作用
子に作用するように配置する。これによって、変位が生
じた時には作用子が移動しこれと一体となった可動体に
取り付けた光源が移動し、この光源の移動にて生ずる光
ビームの揺れを各検出素子の中心からのずれの検出によ
り求めて変位を求めるものである。In this detecting device, the support is installed at a desired position and the light from the light source is adjusted so as to strike the center of each detecting element in a state where no force is applied to the operator. . Further, a portion for detecting the displacement is arranged on the operator so as to act on the operator when the displacement occurs. As a result, when displacement occurs, the operator moves and the light source attached to the movable body that is integrated with the operator moves, and the fluctuation of the light beam caused by the movement of the light source is displaced from the center of each detection element. The displacement is obtained by detection.
【０００５】この三方向の変位検出装置は、支持体と可
動体と作用子の変位薄片を合成樹脂材料にて一体に成形
可能な全体構造であってその場合軽量で製作が容易であ
って、高価材料を必要としないために安価になし得る。This three-direction displacement detecting device has an overall structure in which the displacement thin pieces of the supporting member, the movable member and the operator can be integrally molded with a synthetic resin material. In that case, they are lightweight and easy to manufacture. It can be inexpensive because it does not require expensive materials.
【０００６】[0006]
【実施例】次に本発明の三方向の変位検出装置の各実施
例を示す。[Embodiments] Next, respective embodiments of the three-direction displacement detecting device of the present invention will be described.
【０００７】第１図は本発明の第１の実施例の断面図
で、１は円筒状の支持体、２は可動体、３は可動体２に
取り付けれらた作用子、４は薄くて変形可能で支持体１
に対し可動体２を動き得るように保持している薄片、５
は可動体２に固定された発光ダイオード等の光源、６は
支持体１に取り付けられた受光素子で、例えば、Ｘ方向
に相対して２ケ、又これと直角方向であるＹ方向に相対
して２ケ設けてある。又７は光ファイバーで光源５から
の光を夫々の受光素子６の中心に向けるように調整され
ている。FIG. 1 is a sectional view of the first embodiment of the present invention, in which 1 is a cylindrical support, 2 is a movable body, 3 is an operator attached to the movable body 2, and 4 is thin and deformed. Possible and support 1
Against the thin piece, which holds the movable body 2 so that it can move,
Is a light source such as a light emitting diode fixed to the movable body 2, and 6 is a light receiving element attached to the support 1, for example, two in the X direction and two in the Y direction which are perpendicular to the light receiving element. Two are provided. Reference numeral 7 is an optical fiber and is adjusted so that the light from the light source 5 is directed to the center of each light receiving element 6.
【０００８】この実施例の検出装置は、前記のように光
源５からの光は各受光素子の中心に入射する。ここで変
位を検出すべきものの変位により作用子３の先端３ａに
力が加わると可動子２が移動し、それによって各受光素
子の中心に入射する光は、変位方向および変位量に対応
して中心からずれる。この各素子のずれ方向およびずれ
量にもとづいて、変位方向及び変量を求めるものであ
る。例えば、受光素子として第２図に示すように中心Ｏ
を通る縦横の２本の線で区切られる四つの受光部にて構
成し、光ビームの入射する位置が中心に調整されている
時、四つの各受部にて検出される光量は等しい。一方受
光素子に当たる光が中心からずれた場合、各受光部にて
検出される光量はすべてが等しいものにはならない。こ
れによりずれ量を検出する。In the detection device of this embodiment, the light from the light source 5 is incident on the center of each light receiving element as described above. Although the displacement should be detected here, when a force is applied to the tip end 3a of the operator 3 due to the displacement, the mover 2 moves, and the light incident on the center of each light receiving element accordingly corresponds to the displacement direction and the displacement amount. Deviate from the center. The displacement direction and the variation amount are obtained based on the displacement direction and the displacement amount of each element. For example, as a light receiving element, as shown in FIG.
It is composed of four light receiving portions which are separated by two vertical and horizontal lines passing through, and when the incident position of the light beam is adjusted to the center, the light amount detected by each of the four light receiving portions is equal. On the other hand, when the light striking the light receiving element is deviated from the center, the light amounts detected by the respective light receiving portions are not all equal. This detects the amount of deviation.
【０００９】第３図は、第１図に示す実施例において光
ファイバーの代わりに反射面を用いた例である。即ち光
源５からの光をレンズ８を介し反射鏡９にて反射させて
受光素子６へ向かうようにしたものである。第１図と同
様に変位がない時に４分割された受光素子６の中心に光
源５からの光ビームの中心が達するように調節されてい
る。これによって変位を生じた時に、その変位方向と変
位量を受光素子６の検出値によって求めるものである。FIG. 3 shows an example in which a reflecting surface is used instead of the optical fiber in the embodiment shown in FIG. That is, the light from the light source 5 is reflected by the reflecting mirror 9 via the lens 8 and directed toward the light receiving element 6. As in the case of FIG. 1, the center of the light beam from the light source 5 is adjusted so as to reach the center of the light receiving element 6 divided into four when there is no displacement. When the displacement is generated by this, the displacement direction and the displacement amount are obtained from the detection value of the light receiving element 6.
【００１０】第４図第５図は、光源５も支持体１に設け
た例である。つまり光源５と受光体６を共に支持体１に
設け、又可動体２の側面に反射面１０を形成したもので
ある。そして変位のない時に、光源１からの光が反射面
１０にて反射された後に受光体６の中心に向かうように
構成されている。FIG. 4 and FIG. 5 show an example in which the light source 5 is also provided on the support 1. In other words, both the light source 5 and the light receiving body 6 are provided on the support 1, and the reflecting surface 10 is formed on the side surface of the movable body 2. Then, when there is no displacement, the light from the light source 1 is reflected by the reflecting surface 10 and then directed toward the center of the light receiving body 6.
【００１１】この実施例においても作用子３に力が加わ
り変位が生ずると、支持体１と可動体２との位置関係
が、初期の状態から変位する。Also in this embodiment, when a force is applied to the operator 3 to cause displacement, the positional relationship between the support 1 and the movable body 2 is displaced from the initial state.
【００１２】これによって光源５よりの光は反射鏡９で
反射された後、当初調整され位置からずれた異なる方向
に向かい受光面６の中心からずれる。これを前記の他の
実施例におけると同様の方法で検出することによって変
位方向と変位量を求めることが出来る。As a result, the light from the light source 5 is reflected by the reflecting mirror 9, and then is shifted from the center of the light receiving surface 6 in different directions which are initially adjusted and deviated from the positions. The displacement direction and the displacement amount can be obtained by detecting this by the same method as in the other embodiment.
【００１３】[0013]
【発明の効果】本発明の装置によれば、正確な変位検出
が可能でしかも安価に構成し得る。又支持体、可動体等
を合成樹脂にて一体に成形し得るので、これによって、
軽量で一層安価になし得る。According to the apparatus of the present invention, the displacement can be accurately detected, and the cost can be reduced. In addition, since the support, movable body, etc. can be integrally molded with synthetic resin, this allows
It is lightweight and can be made cheaper.
【図１】 第１の実施例の断面図FIG. 1 is a sectional view of a first embodiment.
【図２】 本発明の装置で用いる受光素子の構成を示
す図FIG. 2 is a diagram showing a configuration of a light receiving element used in the device of the present invention.
【図３】 第１の実施例における光ファイバーの代わ
りの反射面の構成を示す図FIG. 3 is a diagram showing a configuration of a reflecting surface instead of an optical fiber in the first embodiment.
【図４】 第２の実施例の断面図FIG. 4 is a sectional view of the second embodiment.
【図５】 第２の実施例の平面図FIG. 5 is a plan view of the second embodiment.
１ 支持体 ２ 可動体 ３ 作用子 ４ 薄片 ５ 光源 ６ 受光素子 DESCRIPTION OF SYMBOLS 1 Support body 2 Movable body 3 Operator 4 Thin piece 5 Light source 6 Light receiving element
Claims (3)
測定すべき力を受ける作用子と一体と結合されている可
動体と、前記支持体と可動体とを連結する微小な力で変
位可能な変位薄片、可動体に固定された光源と、支持体
に固定されていて光源よりの光を受ける受光部とよりな
り、作用子に加わる力による可動体の支持体に対する変
位を光源よりの光ビームの受光部への入射位置の変化に
よって、変位方向と変位量を求めるようにした変位検出
装置。1. A support attached to a fixing member,
A movable body that is integrally connected to an operator that receives a force to be measured, a displacement thin piece that can be displaced by a minute force that connects the support body and the movable body, a light source fixed to the movable body, and a support body. Fixed to the light receiving portion for receiving light from the light source, the displacement of the movable body relative to the support due to the force applied to the operator is changed by the change of the incident position of the light beam from the light source to the light receiving portion. Displacement detection device for determining the amount of displacement.
変位検出装置。2. The displacement detecting device according to claim 1, wherein the displacement thin piece has a corrugated shape.
を合成樹脂にて一体に成形したことを特徴とする請求項
１又は２の変位検出装置。3. The displacement detection device according to claim 1, wherein the support body is formed by integrally molding the movable body, the operator, and the displacement thin piece with synthetic resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18658493A JPH0719810A (en) | 1993-07-01 | 1993-07-01 | Displacement detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18658493A JPH0719810A (en) | 1993-07-01 | 1993-07-01 | Displacement detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0719810A true JPH0719810A (en) | 1995-01-20 |
Family
ID=16191108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18658493A Pending JPH0719810A (en) | 1993-07-01 | 1993-07-01 | Displacement detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719810A (en) |
-
1993
- 1993-07-01 JP JP18658493A patent/JPH0719810A/en active Pending
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