JPH07190747A - Distortion measuring method of synthetic resin sheet - Google Patents

Distortion measuring method of synthetic resin sheet

Info

Publication number
JPH07190747A
JPH07190747A JP33219193A JP33219193A JPH07190747A JP H07190747 A JPH07190747 A JP H07190747A JP 33219193 A JP33219193 A JP 33219193A JP 33219193 A JP33219193 A JP 33219193A JP H07190747 A JPH07190747 A JP H07190747A
Authority
JP
Japan
Prior art keywords
resin sheet
synthetic resin
measured
strain
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33219193A
Other languages
Japanese (ja)
Inventor
Hiromi Jinno
博実 神野
Katsuhiko Aoki
勝彦 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP33219193A priority Critical patent/JPH07190747A/en
Publication of JPH07190747A publication Critical patent/JPH07190747A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To measure the distortion of every resin sheet accurately without receiving the influence of the tare weight of the resin sheet, by supporting the synthetic resin sheet in a liquid having the density same as the synthetic resin sheet whose distortion is to be measured. CONSTITUTION:A supporting board 1 consists of a triaxial direction moving device to support movable a sensor holder 110 on a frame 10. At the bottom surface of a water tank 2 of the frame 10, a rectangular surface plate 21 whose four corners are supported horizontally by jack bolts 20 is provided, and a synthetic resin sheet 4 whose distortion is to be measured is supported on the surface plate 21 through support pins 23, while a water solution 22 of salt or the like having the density same as the sheet 4 is poured in the water tank 2. And an ultrasonic sensor 30 is soaked in the solution 22, and the distance between a standard surface and the sheet 4 is measured continuously while moving the sensor 30, so as to measure the distortion of the sheet 4. Consequently, no distortion by the tare weight is generated even though the sheet 4 is very thin, and since an ultrasonic wave is used for measuring, the sheet can be measured even though it is transparent.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、合成樹脂シートの歪測
定方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a synthetic resin sheet strain measuring method.

【0002】[0002]

【従来の技術】合成樹脂シートは製造過程において反り
のような歪が発生し易く、その歪具合は品質評価の判断
基準となる。そのため、合成樹脂シートはその歪が測定
されるが、一般に合成樹脂シートは機械的強度が弱く、
ノギスなどの接触式センサーを用いて定盤上に載せられ
た合成樹脂シートの歪を測定すると、シートの自重及び
測定時にセンサーの接触部分によって加えられる荷重に
より合成樹脂シートが変形し、測定誤差が生じるという
問題がある。
2. Description of the Related Art A synthetic resin sheet is liable to be distorted such as a warp in the manufacturing process, and the degree of the distortion is a criterion for quality evaluation. Therefore, the strain of the synthetic resin sheet is measured, but generally, the mechanical strength of the synthetic resin sheet is weak,
When the strain of the synthetic resin sheet placed on the surface plate is measured using a contact type sensor such as a caliper, the synthetic resin sheet is deformed due to the weight of the sheet and the load applied by the contact part of the sensor at the time of measurement, and the measurement error occurs. There is a problem that it will occur.

【0003】すなわち、合成樹脂シートは通常重力によ
り変形しており、そのため真実の歪の測定値が得られな
いので、無重力状態で測定を行うことが望ましい。ま
た、センサーからの外力による影響を除くため、レーザ
ー光線等の光学的非接触センサーを用いた合成樹脂シー
トの歪測定方法があるが、合成樹脂シートが透明な場合
には、光学的非接触センサーをそのまま使用しても、セ
ンサーから発振される光線の大部分がシートを通過して
しまい、歪を測定することができない上、重力による歪
の影響を避けることもできない。このように透明な合成
樹脂シートの歪を光学的非接触センサーを用いて測定す
る場合は、光線が反射するよう測定すべき合成樹脂シー
トの表面に反射テープを貼り付けなければならない。し
かし、反射テープを貼り付ける際に合成樹脂シートが歪
み、正確な測定値を得ることができず、さらに、その測
定値から反射テープの厚みを補正しなければならないと
いう問題がある。
That is, since the synthetic resin sheet is usually deformed by gravity, and therefore a true measured value of strain cannot be obtained, it is desirable to perform the measurement in a weightless state. In addition, in order to eliminate the influence of external force from the sensor, there is a method for measuring the strain of a synthetic resin sheet using an optical non-contact sensor such as a laser beam, but if the synthetic resin sheet is transparent, use the optical non-contact sensor. Even if it is used as it is, most of the light emitted from the sensor passes through the sheet, and the strain cannot be measured, and the influence of the strain due to gravity cannot be avoided. When the strain of the transparent synthetic resin sheet is measured by using the optical non-contact sensor, a reflection tape must be attached to the surface of the synthetic resin sheet to be measured so that the light ray is reflected. However, when the reflection tape is attached, the synthetic resin sheet is distorted, an accurate measurement value cannot be obtained, and the thickness of the reflection tape must be corrected from the measurement value.

【0004】[0004]

【発明が解決しようとする課題】本願発明は、上記の問
題点を解決するためになされたものであり、その目的と
するところは、測定すべき合成樹脂シートの自重による
影響を受けることなく、かつ、それが透明な薄物であっ
ても、その歪を正確に測定し得る合成樹脂シートの歪測
定方法を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and its purpose is to avoid the influence of the weight of the synthetic resin sheet to be measured. Another object of the present invention is to provide a synthetic resin sheet strain measuring method capable of accurately measuring the strain even when it is a transparent thin material.

【0005】[0005]

【課題を解決するための手段】上記の目的は、歪を測定
すべき合成樹脂シートと略同一の密度を有する液体中で
合成樹脂シートを支持し、好ましくは超音波センサーを
使用してその歪を測定することを特徴とする合成樹脂シ
ートの歪測定方法によって達成される。
The above object is to support a synthetic resin sheet in a liquid having substantially the same density as that of the synthetic resin sheet whose strain is to be measured, and preferably use an ultrasonic sensor to measure the strain. Is achieved by a method for measuring strain of a synthetic resin sheet.

【0006】[0006]

【作用】上記の如き方法であると、重力の影響を受ける
ことなく合成樹脂シートの歪を正確に測定できるように
なる。
With the above method, the strain of the synthetic resin sheet can be accurately measured without being affected by gravity.

【0007】[0007]

【発明を実施するための最良の様態】本発明は、歪を測
定すべき合成樹脂シートをそれと略同一の密度、望まし
くはやや大きな密度を有する液体中で支持し、その液体
中に超音波センサーが浸漬された超音波測定装置で、基
準面と合成樹脂シートとの距離を超音波センサーを移動
させながら、連続的に測定することにより、そのシート
の歪を測定するものである。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, a synthetic resin sheet whose strain is to be measured is supported in a liquid having substantially the same density, preferably a slightly large density, and an ultrasonic sensor is provided in the liquid. With the ultrasonic measuring device in which is immersed, the strain of the sheet is measured by continuously measuring the distance between the reference surface and the synthetic resin sheet while moving the ultrasonic sensor.

【0008】合成樹脂シートの密度は次の通りである。 ポリプロピレン;密度0.9〜0.91g/cm3 ポリエチレン;密度0.94〜0.96g/cm3 ポリスチレン;密度1.04〜1.07g/cm3 ポリ塩化ビニル;密度1.16〜1.55g/cm3 ポリエチレンテレフタレート;密度1.37g/cm3 ポリアクリロニトリル;密度1.15g/cm3 ポリカーボネート;密度1.28g/cm3 これらはいずれも本発明方法により歪を測定し得るもの
である。
The density of the synthetic resin sheet is as follows. Polypropylene; Density 0.9 to 0.91 g / cm 3 Polyethylene; Density 0.94 to 0.96 g / cm 3 Polystyrene; Density 1.04 to 1.07 g / cm 3 Polyvinyl chloride; Density 1.16 to 1. 55 g / cm 3 Polyethylene terephthalate; Density 1.37 g / cm 3 Polyacrylonitrile; Density 1.15 g / cm 3 Polycarbonate; Density 1.28 g / cm 3 All of these can measure strain by the method of the present invention.

【0009】また、本発明に用いられる液体としては、
例えば、グリセリン78%水溶液(密度1.2g/cm
3 )、グリセリン74%水溶液(密度1.18g/cm
3 )、可塑剤ジメチルフタレート(DMP)(密度1.
189g/cm3 )、メタノール54%水溶液(密度
0.9g/cm3 )、エタノール50%水溶液(密度
0.906g/cm3 )、プロピレングリコール(P
G)(密度1.1g/cm3)及び食塩を溶解させた水
溶液等が挙げられるが、この他にも、人体に無害であ
り、かつ、合成樹脂シートを浸食しないものであって、
測定すべき合成樹脂シートと略同一の密度のものが適宜
選択されるのであれば何でも使用できる。
Further, as the liquid used in the present invention,
For example, 78% aqueous glycerin solution (density 1.2 g / cm
3 ), glycerin 74% aqueous solution (density 1.18 g / cm
3 ), plasticizer dimethyl phthalate (DMP) (density 1.
189 g / cm 3 ), methanol 54% aqueous solution (density 0.9 g / cm 3 ), ethanol 50% aqueous solution (density 0.906 g / cm 3 ), propylene glycol (P
G) (density 1.1 g / cm 3 ) and an aqueous solution in which sodium chloride is dissolved and the like can be mentioned. In addition to these, it is harmless to the human body and does not erode the synthetic resin sheet,
Any material can be used as long as the material having substantially the same density as the synthetic resin sheet to be measured is appropriately selected.

【0010】通常、合成樹脂シートの密度の−10〜+
10%の範囲、望ましくは−10〜+0%の範囲の密度
のことをいう。
Usually, the density of the synthetic resin sheet is -10 to +
It refers to a density in the range of 10%, preferably in the range of -10 to + 0%.

【0011】この密度の範囲外の液体を使用した場合、
重力の影響が残り、正確な歪測定が不可能になる。
When a liquid outside this density range is used,
The effect of gravity remains, making accurate strain measurement impossible.

【0012】以下、図面により本発明を詳細に説明す
る。図1は本発明に係る合成樹脂シートの歪測定方法に
使用する歪測定装置の一実施例を示す部分破断正面図、
図2は図1に示した装置で測定される合成樹脂シートの
測定位置を示す平面説明図、図3は図1に示した装置の
プロッターに表示される映像を示す平面図である。
The present invention will be described in detail below with reference to the drawings. FIG. 1 is a partially cutaway front view showing an embodiment of a strain measuring device used in the strain measuring method for a synthetic resin sheet according to the present invention,
2 is a plan view showing a measurement position of the synthetic resin sheet measured by the apparatus shown in FIG. 1, and FIG. 3 is a plan view showing an image displayed on the plotter of the apparatus shown in FIG.

【0013】先ず、図1について説明する。図中、1は
支持台、2は水槽、3は超音波測定装置、4は合成樹脂
シートである。
First, FIG. 1 will be described. In the figure, 1 is a support base, 2 is a water tank, 3 is an ultrasonic measuring device, and 4 is a synthetic resin sheet.

【0014】支持台1は、架台10と、センサー支持部
110を架台10上で三軸方向に移動自在に支持する、
架台10に設けられた三軸方向移動装置11とから成
る。センサー支持部110は、図示しない制御装置によ
って三軸方向に移動制御される。
The support base 1 supports a base 10 and a sensor support 110 on the base 10 so as to be movable in three axial directions.
It comprises a three-axis moving device 11 provided on the frame 10. The sensor support portion 110 is controlled to move in three axial directions by a control device (not shown).

【0015】水槽2は、架台10上に載せられ、その底
内面には四隅がジャッキボルト20によって水平に支持
される矩形状の定盤21が設けられる。また、水槽2に
は、食塩の水溶液22が注入される。定盤21には、そ
の一辺の両端近傍と、その辺に対向する一辺の中央近傍
に、定盤21から垂直に立ち上がり、上端が丸い三本の
支持ピン23、が設けられる。
The water tank 2 is placed on a pedestal 10, and a rectangular surface plate 21 whose four corners are horizontally supported by jack bolts 20 is provided on the inner surface of the bottom. Further, an aqueous solution 22 of salt is poured into the water tank 2. The surface plate 21 is provided with three support pins 23 vertically rising from the surface plate 21 and having a round upper end in the vicinity of both ends of the side surface and in the vicinity of the center of the side surface facing the side surface.

【0016】超音波測定装置3は、センサー支持部11
0の下端に設けられ、下方に超音波を発信する超音波セ
ンサー30と、超音波センサー30の測定値をデジタル
表示する測定値表示装置31と、その測定値を測定方向
別に連続的に図形として表示するプロッター32と、そ
の測定値からシートの歪を計算する図示しないコンピュ
ーターとから成る。
The ultrasonic measuring device 3 includes a sensor support portion 11
An ultrasonic sensor 30 that is provided at the lower end of 0 and emits ultrasonic waves downward, a measured value display device 31 that digitally displays the measured values of the ultrasonic sensor 30, and the measured values are continuously displayed as figures in each measuring direction. It comprises a plotter 32 for displaying and a computer (not shown) for calculating the strain of the sheet from the measured value.

【0017】合成樹脂シート4は、例えば、縦横120
mm、厚さ0.5mmのポリカーボネート製である。ま
た、図2に示されるように、この合成樹脂シート4の各
辺の10mm内側を通る線の交わる位置を点4−1、4
−2、4−3、4−4とし、合成樹脂シート4の歪の測
定は、点4−1から点4−2へ向かう直線Aと、点4−
3から点4−4へ向かう直線Bと、点4−1から点4−
3へ向かう直線Cと、点4−2から点4−4へ向かう直
線Dに沿って5mm間隔で行われる。
The synthetic resin sheet 4 is, for example, 120 in length and width.
It is made of polycarbonate with a thickness of 0.5 mm and a thickness of 0.5 mm. In addition, as shown in FIG. 2, points 4-1 and 4 are defined as the intersections of the lines passing through 10 mm inside each side of the synthetic resin sheet 4.
-2, 4-3, 4-4, the strain of the synthetic resin sheet 4 is measured by measuring the straight line A from the point 4-1 to the point 4-2 and the point 4-
Straight line B from 3 to point 4-4 and point 4-1 to point 4-
It is performed at intervals of 5 mm along a straight line C that goes to point 3 and a straight line D that goes from point 4-2 to point 4-4.

【0018】この歪測定装置を使用するときは、先ず、
水槽2に食塩の水溶液22を注入する。この水溶液22
は、その密度がポリカーボネートの密度1.2g/cm
3 と同一になるよう26重量%の食塩を含むものであ
る。次に、その水槽2中に合成樹脂シート4を沈め、定
盤21の支持ピン23上に置く。
When using this strain measuring device, first,
An aqueous solution 22 of salt is poured into the water tank 2. This aqueous solution 22
Has a density of 1.2 g / cm of that of polycarbonate.
It contains 26% by weight of sodium chloride so as to be the same as 3 . Next, the synthetic resin sheet 4 is submerged in the water tank 2 and placed on the support pins 23 of the surface plate 21.

【0019】次に、三軸方向移動装置11を制御して、
超音波センサー30をその下部が水溶液22に浸かるま
で下降させ、基準面(定盤の上面)に平行に移動させ、
超音波センサー30を、その基準面と合成樹脂シート4
との距離を測定する。その後、超音波センサー30を点
4−1上に移動させ、点4−1を測定始点とし、そこか
ら順次5mm間隔で超音波センサー30を直線A方向に
水平移動させながら、基準面と合成樹脂シート4上面間
の距離を求める。点4−2まで測定し終わったら、超音
波センサー30を次の測定始点となる点4−3上方へ水
平移動させ、そこから直線B方向へ水平移動させながら
順次定盤21と合成樹脂シート4との距離を求め、同様
に直線C及び直線D方向についても定盤21との距離を
求める。
Next, the three-axis moving device 11 is controlled to
The ultrasonic sensor 30 is lowered until its lower part is immersed in the aqueous solution 22, and is moved parallel to the reference surface (the upper surface of the surface plate).
The ultrasonic sensor 30, the reference surface and the synthetic resin sheet 4
Measure the distance to. After that, the ultrasonic sensor 30 is moved onto the point 4-1, and the point 4-1 is used as the measurement starting point, and while the ultrasonic sensor 30 is horizontally moved in the direction of the straight line A at intervals of 5 mm, the reference plane and the synthetic resin are moved. The distance between the upper surfaces of the sheets 4 is calculated. When the measurement is completed up to the point 4-2, the ultrasonic sensor 30 is horizontally moved above the point 4-3 which is the next measurement starting point, and then horizontally moved in the direction of the straight line B while sequentially moving the surface plate 21 and the synthetic resin sheet 4. And the distance to the surface plate 21 in the directions of the straight line C and the straight line D as well.

【0020】このようにして求めた測定値を表1に示し
た。なお、測定位置とは、測定始点からの距離を示す。
The measured values thus obtained are shown in Table 1. The measurement position indicates the distance from the measurement starting point.

【表1】 [Table 1]

【0021】また、この測定値は、測定されるたびに測
定値表示装置31にデジタル表示され、さらに、プロッ
ター32にも送られる。プロッター32の表示画面に
は、この測定値に基づき、合成樹脂シート4の形状が測
定方向別にそれぞれ曲線a、b、c、dとして表示され
る。
Each time the measurement value is measured, it is digitally displayed on the measurement value display device 31 and is also sent to the plotter 32. On the display screen of the plotter 32, the shape of the synthetic resin sheet 4 is displayed as curves a, b, c, d for each measurement direction based on the measured values.

【0022】合成樹脂シート4の歪は、指定方向別に求
められ、曲線a、b、c、dと、それらの両端部を結ぶ
直線a′、b′、c′、d′との最大距離La、Lb、
Lc、Ldである。これらは、図示しないコンピュータ
ーで求められ、それぞれ測定値表示装置31に表示され
る。この例では、直線A方向の最大距離Laは1.3m
m、直線B方向の最大距離Lbは1.0mm、直線C方
向の最大距離は0.3mm、直線D方向の最大距離Ld
は0.45mmとなり、これらの数値がそれぞれの方向
の歪量となる。
The strain of the synthetic resin sheet 4 is obtained for each designated direction, and the maximum distance La between the curves a, b, c, d and the straight lines a ', b', c ', d'connecting both ends of them. , Lb,
Lc and Ld. These are obtained by a computer (not shown) and displayed on the measured value display device 31, respectively. In this example, the maximum distance La in the direction of the straight line A is 1.3 m.
m, the maximum distance Lb in the direction of straight line B is 1.0 mm, the maximum distance in the direction of straight line C is 0.3 mm, the maximum distance Ld in the direction of straight line D.
Becomes 0.45 mm, and these numerical values become the amount of strain in each direction.

【0023】なお、本発明は叙上の実施例に限定される
ものではない。例えば、水槽に投入する溶液は、食塩の
水溶液に限定されず、例えば、歪を測定すべき合成樹脂
シートがポリプロピレン(密度0.9g/cm3 )製で
あれば、メタノール54%溶液(密度0.9g/c
3 )を、また、ポリエチレン(密度0.94g/cm
3 )製であれば、エタノール50%溶液(密度0.90
6)を使用するといったように、合成樹脂シートの材質
の密度に応じて選択するものである。
The present invention is not limited to the above embodiment. For example, the solution to be put into the water tank is not limited to an aqueous solution of sodium chloride, and for example, if the synthetic resin sheet whose strain is to be measured is made of polypropylene (density 0.9 g / cm 3 ), a 54% methanol solution (density 0 9.9 g / c
m 3 ) and polyethylene (density 0.94 g / cm
3 ) made of 50% ethanol solution (density 0.90
6) is used according to the density of the material of the synthetic resin sheet.

【0024】また、歪の測定方向は、合成樹脂シートの
対角線や適宜定めた線上でもよく、測定間隔は5mmよ
り狭くても広くても構わないが、正確な歪測定のために
は、測定間隔を狭くすることが推奨される。さらに、支
持台、水槽、測定装置及び合成樹脂シートの形状、定盤
に設けられる三本の支持ピンの配置等は、本発明の目的
の範囲内で自由に設計変更することができ、本発明は上
記の説明から当業者が容易に想到し得る総ての変更実施
例を包摂するものである。
Further, the strain measuring direction may be on a diagonal line of the synthetic resin sheet or on an appropriately determined line, and the measuring interval may be narrower or wider than 5 mm. Is recommended to be narrow. Further, the shapes of the support base, the water tank, the measuring device and the synthetic resin sheet, the arrangement of the three support pins provided on the surface plate, and the like can be freely modified within the scope of the object of the present invention. Includes all modified embodiments that can be easily conceived by those skilled in the art from the above description.

【0025】[0025]

【発明の効果】本発明に係る合成樹脂シートの歪測定方
法は叙上の如く構成されるので、本発明によるときは、
歪測定すべき合成樹脂シートが薄物であっても、そのシ
ートはそれと同一の密度の液体中で支持されているた
め、自重により歪むことがなく、また、測定に超音波を
使用しているため、そのシートが透明であっても測定す
ることができる。そのため、どのような合成樹脂シート
でも、その歪を正確に測定することができる。
Since the strain measuring method for the synthetic resin sheet according to the present invention is constructed as described above, according to the present invention,
Even if the synthetic resin sheet to be strain-measured is thin, it is supported in a liquid of the same density as it, so it does not distort due to its own weight, and because it uses ultrasonic waves for measurement. , It can be measured even if the sheet is transparent. Therefore, the strain of any synthetic resin sheet can be accurately measured.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る合成樹脂シートの歪測定方法に使
用する歪測定装置の一実施例を示す部分破断正面図であ
る。
FIG. 1 is a partially cutaway front view showing an embodiment of a strain measuring device used in a strain measuring method for a synthetic resin sheet according to the present invention.

【図2】図1に示した装置で測定される合成樹脂シート
の測定位置を示す平面説明図である。
FIG. 2 is an explanatory plan view showing a measurement position of a synthetic resin sheet measured by the device shown in FIG.

【図3】図1に示した装置のプロッターの表示画面を示
す平面図である。
FIG. 3 is a plan view showing a display screen of a plotter of the apparatus shown in FIG.

【符号の説明】[Explanation of symbols]

1・・・・・・支持台 10・・・・・架台 11・・・・・三軸方向移動装置 110・・・・センサー支持部 2・・・・・・水槽 20・・・・・ジャッキボルト 21・・・・・定盤 22・・・・・水溶液 23・・・・・支持ピン 3・・・・・・超音波測定装置 30・・・・・超音波センサー 31・・・・・測定値表示装置 32・・・・・プロッター 4・・・・・・合成樹脂シート 4−1・・・・点 4−2・・・・点 4−3・・・・点 4−4・・・・点 A・・・・・・直線 B・・・・・・直線 C・・・・・・直線 D・・・・・・直線 a・・・・・・曲線 b・・・・・・曲線 c・・・・・・曲線 d・・・・・・曲線 a′・・・・・直線 b′・・・・・直線 c′・・・・・直線 d′・・・・・直線 La・・・・・最大距離 Lb・・・・・最大距離 Lc・・・・・最大距離 Ld・・・・・最大距離 1 ・ ・ Supporting base 10 ・ ・ ・ Mounting base 11 ・ ・ ・ Triaxial moving device 110 ・ ・ ・ ・ Sensor support 2 ・ ・ ・ ・ Water tank 20 ・ ・ ・ Jack Bolt 21 ・ ・ ・ ・ ・ Surface plate 22 ・ ・ ・ ・ ・ Aqueous solution 23 ・ ・ ・ ・ ・ Support pin 3 ・ ・ ・ ・ Ultrasonic measuring device 30 ・ ・ ・ Ultrasonic sensor 31 ・ ・ ・ ・ ・Measurement value display device 32 ・ ・ ・ ・ ・ Plotter 4 ・ ・ ・ ・ ・ Synthetic resin sheet 4-1 ・ ・ ・ ・ Point 4-2 ・ ・ ・ ・ Point 4-3 ・ ・ ・ ・ ・ ・ Point 4-4 ・ ・・ ・ Point A ・ ・ ・ ・ Straight line B ・ ・ ・ ・ ・ ・ Straight line C ・ ・ ・ ・ Straight line D ・ ・ ・ ・ ・ ・ Straight line a ・ ・ ・ ・ Curve b ・ ・Curve c ... Curve d ... Curve a '... Straight line b' ... Straight line c '... Straight line d' ... Straight line La・ ・ ・ ・ ・ Maximum distance Lb ・・ ・ ・ ・ Maximum distance Lc ・ ・ ・ Maximum distance Ld ・ ・ ・ Maximum distance

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】歪を測定すべき合成樹脂シート(4)と略
同一の密度を有する液体中で合成樹脂シート(4)を支
持し、基準面と合成樹脂シート(4)との距離を測定
し、その歪を知ることを特徴とする合成樹脂シートの歪
測定方法。
1. A synthetic resin sheet (4) is supported in a liquid having substantially the same density as the synthetic resin sheet (4) whose strain is to be measured, and the distance between the reference plane and the synthetic resin sheet (4) is measured. Then, a method for measuring the strain of a synthetic resin sheet, which is characterized by knowing the strain.
【請求項2】基準面と合成樹脂シート(4)の距離を測
定する装置が液体中に浸漬された超音波センサー(3
0)であり、その超音波センサー(30)と合成樹脂シ
ート(4)との距離を複数個所で測定し、合成樹脂シー
ト(4)の歪を測定する請求項1に記載の合成樹脂シー
トの歪測定方法。
2. An ultrasonic sensor (3) in which a device for measuring a distance between a reference surface and a synthetic resin sheet (4) is immersed in a liquid.
0), and the strain of the synthetic resin sheet (4) is measured by measuring the distance between the ultrasonic sensor (30) and the synthetic resin sheet (4) at a plurality of points. Strain measurement method.
【請求項3】超音波センサー(30)が、三軸方向に移
動自在に支持される請求項2に記載の合成樹脂シートの
歪測定方法。
3. The synthetic resin sheet strain measuring method according to claim 2, wherein the ultrasonic sensor (30) is supported so as to be movable in three axial directions.
【請求項4】液体が、グリセリン、プロピレングリコー
ル及び食塩から成る群から選ばれた少なくとも一種の物
質の水溶液(22)である請求項1ないし3のいずれか
一に記載の歪測定方法。
4. The strain measuring method according to claim 1, wherein the liquid is an aqueous solution (22) of at least one substance selected from the group consisting of glycerin, propylene glycol and sodium chloride.
JP33219193A 1993-12-27 1993-12-27 Distortion measuring method of synthetic resin sheet Pending JPH07190747A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33219193A JPH07190747A (en) 1993-12-27 1993-12-27 Distortion measuring method of synthetic resin sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33219193A JPH07190747A (en) 1993-12-27 1993-12-27 Distortion measuring method of synthetic resin sheet

Publications (1)

Publication Number Publication Date
JPH07190747A true JPH07190747A (en) 1995-07-28

Family

ID=18252196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33219193A Pending JPH07190747A (en) 1993-12-27 1993-12-27 Distortion measuring method of synthetic resin sheet

Country Status (1)

Country Link
JP (1) JPH07190747A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002039057A1 (en) * 2000-11-10 2002-05-16 Toto Ltd. Portable surface shape measurer
KR101235418B1 (en) * 2011-04-20 2013-02-20 한국기초과학지원연구원 Ultrasonic sensor device
JP2015166751A (en) * 2015-07-03 2015-09-24 エーファウ・グループ・エー・タルナー・ゲーエムベーハー Measuring device and method for measuring layer thicknesses and defects in wafer stack
US10008424B2 (en) 2010-11-12 2018-06-26 Ev Group E. Thallner Gmbh Measuring device and method for measuring layer thicknesses and defects in a wafer stack

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002039057A1 (en) * 2000-11-10 2002-05-16 Toto Ltd. Portable surface shape measurer
US6442857B1 (en) 2000-11-10 2002-09-03 Toto Ltd. Portable surface inspector
US10008424B2 (en) 2010-11-12 2018-06-26 Ev Group E. Thallner Gmbh Measuring device and method for measuring layer thicknesses and defects in a wafer stack
US10109538B2 (en) 2010-11-12 2018-10-23 EV Group E.Thallner GmbH Measuring device and method for measuring layer thicknesses and defects in a wafer stack
KR101235418B1 (en) * 2011-04-20 2013-02-20 한국기초과학지원연구원 Ultrasonic sensor device
JP2015166751A (en) * 2015-07-03 2015-09-24 エーファウ・グループ・エー・タルナー・ゲーエムベーハー Measuring device and method for measuring layer thicknesses and defects in wafer stack

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