JPH0718503B2 - Air operated valve - Google Patents
Air operated valveInfo
- Publication number
- JPH0718503B2 JPH0718503B2 JP28463886A JP28463886A JPH0718503B2 JP H0718503 B2 JPH0718503 B2 JP H0718503B2 JP 28463886 A JP28463886 A JP 28463886A JP 28463886 A JP28463886 A JP 28463886A JP H0718503 B2 JPH0718503 B2 JP H0718503B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- flow
- air
- flow passage
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Lift Valve (AREA)
- Fluid-Driven Valves (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は空気作動弁に係り、流体を用いて作動される各
種目的装置への洗浄な流体の供給を制御するものであっ
て、製造時に於ける部材の洗浄を容易なものとし、使用
時に洗浄流体の汚染を生じる事がないようにするととも
にピストンロッドの作動を、弁部に正確に伝達し、しか
も工作上の手数を大幅に簡略化して、工作精度を高め得
るようにしようとするものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air-operated valve, which controls the supply of clean fluid to various target devices that are operated by using a fluid. The cleaning of the members is facilitated, the cleaning fluid is not contaminated during use, the operation of the piston rod is accurately transmitted to the valve, and the number of working steps is greatly simplified. It is intended to improve the work precision.
従来の技術 従来空気作動弁には、一定方向に付勢されるピストンの
付勢力により、ピストンロッドに設けた弁部で、流体の
流通路を常時開放するとともに開閉信号を感知して、空
気圧を付勢力に抗してピストンに加へることにより、流
体の流通路を常時開放から閉止状態とする常開空気作動
弁と、常時はピストンの付勢力により、ピストンロッド
に設けた弁部で、流体の流通路を常時閉止するとともに
開閉信号を感知して、空気圧を付勢力に抗してピストン
に加へることにより、流体の流通路を常時閉止から開放
状態とする、常閉空気作動弁とが存在する。この空気作
動弁が流通を制御する流体に、IC基盤の洗浄に用いるよ
うな、純水を使用する場合とか、純粋なガスを流通させ
る場合には、塵あい等の混入が生じる事のないようにす
るため、組み立て前の部材の洗浄を確実に行なう必要が
ある。しかしながら弁部材には、オーリング等の軟弾性
部材が多数用いられているため、超音波等により強力な
洗浄を行なうと、これらの軟弾性部材が超音波によって
破壊されるものとなり、好ましくない。またオーリング
等の軟弾性材を分離して洗浄すると、オーリング等を組
込む必要性から、組立時に部材に接触する回数が多くな
り、塵あい等もそれだけ多く付着する欠点を有してい
た。2. Description of the Related Art A conventional air-operated valve has a valve portion provided on a piston rod, which constantly opens a fluid flow passage by an urging force of a piston that is urged in a fixed direction and senses an opening / closing signal to detect an air pressure. By a normally open air actuated valve that constantly opens the fluid flow passage from the open state to the closed state by adding to the piston against the biasing force, and the valve portion that is normally provided by the piston biasing force on the piston rod, A normally closed air-operated valve that constantly closes the fluid flow passage, senses an open / close signal, and applies air pressure to the piston against the urging force to open the fluid flow passage from the normally closed to open state. And exist. When using pure water as a fluid whose flow is controlled by this air-operated valve, such as for cleaning the IC board, or when passing pure gas, make sure that dust or other contaminants do not occur. Therefore, it is necessary to surely clean the members before assembling. However, since a large number of soft elastic members such as O-rings are used for the valve member, strong cleaning with ultrasonic waves will destroy these soft elastic members due to ultrasonic waves, which is not preferable. Further, if the soft elastic material such as the O-ring is separated and washed, it is necessary to incorporate the O-ring and the like, so that the member is frequently contacted during assembly, and dust and the like are adhered so much.
そして、このような欠点を除去する目的で、特開昭61-1
09973号、特開昭61-130682号のごとく、ピストンロッド
を、超音波洗浄によって破損される虞れのあるオーリン
グ等を有するピストンロッドと、洗浄な流体が接触しオ
ーリング等超音波洗浄によって破損される虞れのない流
通部材とを別部材にて形成し、製造時に於ける洗浄作業
を、ピストンロッドと流通部材とで別個に行なう事によ
り、清浄な内容液と接触する流通部材を確実に洗浄し、
後にピストンロッドと流通部材を組み立てて接続する方
法が知られている。しかしながら、弁部の開閉ストロー
クを短くする必要がある場合、例えば0.5mm程度の開閉
ストロークしか取れないような場合には、ピストンロッ
ドと流通部材を、組み立て接続して一本のピストンロッ
ドとすると、ピストン、固定リング、接続のための各部
材、部材間の突当て位置等の多くの部材が連結し、各部
材単位の製作誤差が僅かのものであっても、これが集合
されると、大きなものとなり、組み立て時の誤差、ガタ
付き等も加わり、0.5mm程度の開閉ストロークは吸収さ
れるか、何倍にも成ってしまい、弁部の開閉を行うこと
が出来ないものとなる可能性が、高いものであった。Then, for the purpose of eliminating such a defect, JP-A-61-1 is used.
As described in 09973 and JP-A-61-130682, a piston rod having an O-ring or the like that may be damaged by ultrasonic cleaning contacts the cleaning fluid with ultrasonic cleaning such as O-ring. By forming the circulation member that is not likely to be damaged by a separate member and performing the cleaning work during manufacturing separately for the piston rod and the circulation member, the circulation member that comes into contact with the clean content liquid is secured. Washed to
A method is later known in which the piston rod and the flow member are assembled and connected. However, when it is necessary to shorten the opening / closing stroke of the valve part, for example, when only an opening / closing stroke of about 0.5 mm can be taken, if the piston rod and the flow member are assembled and connected to form one piston rod, Many members such as piston, fixing ring, each member for connection, abutting positions between members, etc. are connected, and even if the manufacturing error of each member is small, it will be a big one when assembled As a result, assembling errors, rattling, etc. are added, and the opening and closing stroke of about 0.5 mm may be absorbed or multiplied, resulting in the fact that the valve part cannot be opened and closed. It was expensive.
発明が解決しようとする問題点 本発明は、上述の如き欠点を除去した空気作動弁に係る
ものであって、超音波洗浄によって破損される虞れのあ
るオーリング等を有するピストンロッド方向と、洗浄な
流体が接触しオーリング等超音波洗浄によって破損され
る虞れのない流通部材とを、別部材にて形成し、製造時
に於ける洗浄作業を、ピストンロッドと流通部材とで別
個に行なう事により、洗浄な内容液と接触する流通部材
を確実に洗浄することができ、清浄洗浄液、純粋ガス等
の汚染を生じることがないようにするとともにピストン
ロッドと流通部材を、組み立て接続することなく、分離
したままの状態とし、流通部材とピストンロッドの組み
立て接続による、開閉ストロークの吸収等を生じず、小
さなストロークで、弁部による確実な開閉部の開閉を可
能にし、しかもこれらの部材の製作精度、組み立て精度
に手数をそれ程掛けなくとも、高精度の製品を得ること
を可能とし、微少な開閉ストロークであっても、十分対
応しようとするものである。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention The present invention relates to an air actuated valve in which the above-mentioned drawbacks are eliminated, and a piston rod direction having an O-ring or the like that may be damaged by ultrasonic cleaning, A flow member that is not likely to be damaged by ultrasonic cleaning such as O-ring due to contact with a cleaning fluid is formed as a separate member, and the cleaning work during manufacturing is performed separately for the piston rod and the flow member. By doing so, it is possible to reliably clean the flow member that comes into contact with the content liquid to be cleaned, prevent the clean cleaning liquid, pure gas, and the like from being contaminated, and without assembling and connecting the piston rod and the flow member. , Keeping separated state, the opening and closing stroke is not absorbed by the assembly and connection of the circulation member and the piston rod, and the valve part can be opened and closed reliably with a small stroke. It is possible to open and close parts, and it is possible to obtain high-precision products without much trouble in manufacturing accuracy and assembly accuracy of these members, and to try to sufficiently cope with even minute opening and closing strokes. It is a thing.
問題点を解決するための手段 本発明は、上述の如き問題点を解決するため、一定方向
に付勢されるピストンの付勢力により、弁部で流体の流
通路を常時開放または常時閉止とするとともに開閉信号
を感知し空気圧を付勢力に抗してピストンに加えること
により、流体の流通路を常時開放から閉止状態、または
常時閉止から開放状態とするものに於て、流通路方向に
ピストンロッドとは別個に進退可能に形成した流通部材
に、加工作業時に工作機械に接続するための、保持部を
形成するとともに流通路の開閉部に臨ませて弁部を接続
し、この弁部の開閉部方向面を任意量切削し得るよう、
少なくとも切削予測量だけ肉厚に形成してなるものであ
る。Means for Solving the Problems In order to solve the above-mentioned problems, the present invention causes the flow passage of the fluid to be always open or closed at the valve portion by the urging force of the piston urged in a fixed direction. At the same time, by detecting an opening / closing signal and applying air pressure to the piston against the biasing force, the fluid flow passage is made from the normally open to the closed state or from the normally closed to the open state. In addition to forming a holding part for connecting to the machine tool at the time of machining work, the valve part is connected to face the opening and closing part of the flow passage, and the valve part is opened and closed. In order to be able to cut an arbitrary amount of surface,
At least the predicted cutting amount is formed to be thick.
作用 本発明は上述の如く、空気圧導入方向のピストンロッド
と、流通路方向の流通部材とを別個に形成するものであ
るから、清浄な流体と接触する流通部材を確実に洗浄し
てから組立てることができる。また組み立てに於いて
は、ピストンロッドと流通部材を接続する必要が無いと
ともに弁部の流通路方向面を任意量切削し得るよう、少
なくとも切削予想量だけ肉厚に形成したから、流通部材
を組み立て後、この流通部材の保持部を工作機械に保持
して、弁部を切削することにより、複数の部材の組み合
わせからなる流通部材の、全体としての寸法を厳密に確
定することができ、流通部材およびこれに関連する各部
材の、個々の寸法が不均一なものであっても、弁部の微
少で正確な開閉ストロークを出す事ができ、従来のごと
く、ピストンロッドに接続する、全ての部材を厳密に製
作、組み立てする必要が無くなり、廉価に、しかも、バ
ラ付きの無い製品を得ることが出来るものである。従っ
て、金属ダイヤフラム等を設置することによって、弁部
の移動ストロークが極度に少ない場合も、確実な開閉弁
を可能にする。そして閉止信号を感知した場合は、空気
圧を付勢力に抗してピストンに加へることにより、常開
空気作動弁に於いては、ピストンがピストンロッドを介
して流通部材を押圧するから、弁部によって流体の流通
路を常時開放から閉止状態とする。Action As described above, the present invention separately forms the piston rod in the air pressure introducing direction and the circulation member in the flow passage direction, so that the circulation member that comes into contact with a clean fluid must be reliably cleaned before assembly. You can In addition, at the time of assembly, it is not necessary to connect the piston rod and the flow member, and at least the estimated cutting amount is formed to be thick so that the flow passage surface of the valve can be cut by an arbitrary amount. After that, by holding the holding portion of the flow member on the machine tool and cutting the valve portion, the overall dimension of the flow member composed of a combination of a plurality of members can be strictly determined. And even if the individual dimensions of each member related to this are non-uniform, a minute and accurate opening and closing stroke of the valve section can be produced, and all members connected to the piston rod as in the past Since it is not necessary to strictly manufacture and assemble the product, it is possible to obtain a product at a low cost and without variation. Therefore, by installing a metal diaphragm or the like, a reliable opening / closing valve is possible even when the movement stroke of the valve portion is extremely small. When a closing signal is sensed, the air pressure is applied to the piston against the biasing force, and in the normally open air actuated valve, the piston pushes the flow member through the piston rod. The fluid passage is always closed from the open state by the section.
また常閉空気作動弁にあっては、開放信号を感知した場
合は、空気圧を付勢力に抗してピストンに加へることに
より、ピストンロッドによる流通部材への押圧を解除す
るから、流通部材は自身の付勢力により、ピストンロッ
ド方向に移動し、弁部を開閉部から開放し、流体の流通
路を常閉状態から開放状態とする。Further, in the normally closed air operated valve, when an opening signal is sensed, the air pressure is applied to the piston against the urging force to release the pressing of the piston rod against the circulating member. Moves toward the piston rod by its own urging force, opens the valve portion from the opening / closing portion, and changes the fluid flow passage from the normally closed state to the opened state.
実施例 以下本発明を、常時開放状態で用いられる、常開空気作
動弁に於いて、一実施例を第1図で説明すれば、(1)
はシリンダーで、オーリング(2)を介して上端を密閉
体(3)により密閉固定し、この密閉体(3)の上面
を、係合突部(4)を設けた蓋体(5)により、被覆す
るとともに軸方向の側面に、制御空気の流入口(6)を
形成している。またシリンダー(1)内には、ピストン
ロッド(7)を挿入位置し、このピストンロッド(7)
の外周に、シリンダー(1)内周面にオーリング(8)
(9)を密接して摺動する、2個のピストン(10)(1
1)を固定し、このピストン(10)(11)を、シリンダ
ー(1)から内方環状に突出形成したセパレーター(1
3)にて、気密的に分割するとともにシリンダー飯野軸
方向の側面に開口した、制御流体の流入口(6)を、2
個のピストン(10)(11)の一面に各々形成される、2
個の流入室(14)(15)に接続している。この2個の流
入室(14)(15)への制御流体の注入は、ピストンロッ
ド(7)に上端面から軸方向に形成した、導入路(16)
を介して行うものであって、第1図に示す実施例では、
第1の流入室(14)を第1のピストン(10)と、前記密
閉体(3)との間隔に形成し、この第1の流入室(14)
から、ピストンロッド(7)の上端より軸方向に形成し
た流入路(16)を、第2の流入室(15)に開口してい
る。EXAMPLE An example of a normally open air operated valve used in a normally open state according to the present invention will be described below with reference to FIG.
Is a cylinder, the upper end of which is hermetically fixed by a sealing body (3) via an O-ring (2), and the upper surface of the sealing body (3) is covered by a lid body (5) provided with an engaging projection (4). A control air inlet (6) is formed on the side surface in the axial direction while covering. Further, the piston rod (7) is inserted into the cylinder (1) and the piston rod (7) is inserted into the cylinder (1).
O-ring (8) on the outer circumference of the cylinder (1)
Two pistons (10) (1) that slide closely on (9)
1) is fixed, and the piston (10) (11) is formed by projecting from the cylinder (1) in an inward annular shape.
In 3), the control fluid inlet (6) that is airtightly divided and opened on the side surface in the cylinder Iino axis direction is
Formed on one surface of each piston (10) (11), 2
It is connected to each inflow chamber (14) (15). The control fluid is injected into the two inflow chambers (14) and (15) by introducing the control passage in the piston rod (7) from the upper end surface in the axial direction.
In the embodiment shown in FIG. 1,
The first inflow chamber (14) is formed in a space between the first piston (10) and the sealing body (3), and the first inflow chamber (14) is formed.
Therefore, the inflow passage (16) formed in the axial direction from the upper end of the piston rod (7) is opened to the second inflow chamber (15).
またシリンダー(1)は、一端を本体(17)にロックリ
ング(18)を介して接続固定することにより、本体(1
7)に対して回転自在に固定するとともに第1のピスト
ン(10)とセパレーター(13)の間に、押圧発条(20)
を介装し、この押圧発条(20)によって、第1および第
2ピストン(10)(11)は、第1および第2の流入室
(14)(15)方向に付勢され、常時はピストンロッド
(7)の下端外周に突出した係合部(21)を、本体(1
7)から内方に突出した内筒(22)の端部(23)に係合
している。そして流入口(6)から制御空気が注入され
ると、ピストンロッド(7)に形成された導入路(16)
を介して、制御空気はピストン(10)(11)を、押圧発
条(20)の復元力に抗して押圧する方向に流入し、ピス
トンロッド(7)を移動する。また本体(17)の内周に
は、制御流体の流通路(24)を有する接続体(25)を、
螺子部(26)を介して螺着固定し、この接続体(25)内
には、ピストンロッド(7)とは別個に、進退自在に形
成した流通部材(27)を挿入位置している。Further, the cylinder (1) has one end connected and fixed to the main body (17) through a lock ring (18), so that the main body (1) is
7) is rotatably fixed to the first piston (10) and the separator (13), and the pressing spring (20) is provided between the piston (10) and the separator (13).
The first and second pistons (10) and (11) are urged toward the first and second inflow chambers (14) and (15) by the pressing spring (20), and the pistons are normally provided. Attach the engaging part (21) protruding to the outer periphery of the lower end of the rod (7) to the main body (1
It engages with the end portion (23) of the inner cylinder (22) which protrudes inward from the (7). Then, when control air is injected from the inflow port (6), the introduction passage (16) formed in the piston rod (7)
The control air flows through the pistons (10) and (11) in a direction of pressing the pistons (10) and (11) against the restoring force of the pressing bar (20), and moves the piston rod (7). A connecting body (25) having a control fluid flow passage (24) is provided on the inner periphery of the main body (17).
A connecting member (25) is screwed and fixed via a screw portion (26), and a connecting member (25), which is formed separately from the piston rod (7), is provided with a flow member (27) formed to be movable back and forth.
この流通部材(27)は、多角形または二方ズリの、係合
受部(28)を外周に突出した、部材本体(30)を設け、
この部材本体(30)の上方に螺子部(31)を介して保持
体(32)を螺着固定し、この保持体(32)の上端には、
螺溝を設けた保持部(33)を形成するとともに保持体
(32)と部材本体(30)間には、ステンレス等の材質で
形成した金属ダイヤフラム(34)および係合鍔(35)
を、金属ダイヤフラム(34)を部材本体(30)側に、係
合鍔(35)を保持体(32)側に位置して、部材本体(3
0)の環状押圧部(36)を金属ダイヤフラム(34)に圧
着することにより狭持固定している。また流通路(24)
の開閉部(37)に臨ませた部材本体(30)には、流通路
(24)を常時は閉止することのない弁部(38)を固定
し、この弁部(38)は、適宜量の切削が行えるよう、少
なくとも切削予測量だけ肉厚に形成し、上記部材本体
(30)、保持体(32)、係合鍔(35)、金属ダイヤフラ
ム(34)の組み立てを完了した段階で、保持部(33)に
治具(40)を螺着固定し、この治具(40)を旋盤等の工
作機械のチャック(41)に固定して、弁部(38)の表面
を切削加工すれば、上記各部材の寸法は精度が低いもの
であっても、係合鍔(35)の上面から弁部(38)の下面
までの寸法(a)は、極めて厳密に設定する事ができる
ものとなり、流通部材(27)を簡易な工作手段によって
精度の高いものとすることができる。The flow member (27) is provided with a member body (30) having a polygonal shape or a two-sided deviation, the engagement receiving portion (28) projecting to the outer periphery,
A holder (32) is screwed and fixed above the member body (30) via a screw portion (31), and the upper end of the holder (32) is
A metal diaphragm (34) made of a material such as stainless steel and an engaging collar (35) are formed between the holding body (32) and the member body (30) while forming a holding portion (33) provided with a screw groove.
With the metal diaphragm (34) on the member body (30) side and the engaging collar (35) on the holding body (32) side.
The annular pressing part (36) of (0) is clamped and fixed to the metal diaphragm (34) by pressure. Also the flow passage (24)
The valve body (38) that does not normally close the flow passage (24) is fixed to the member main body (30) facing the opening / closing part (37) of the valve body (38). In order to be able to cut, at least the predicted cutting amount is formed thick, and when the assembly of the member body (30), the holding body (32), the engaging collar (35), and the metal diaphragm (34) is completed, The jig (40) is screwed and fixed to the holding part (33), the jig (40) is fixed to the chuck (41) of a machine tool such as a lathe, and the surface of the valve part (38) is cut. For example, the dimension (a) from the upper surface of the engaging collar (35) to the lower surface of the valve portion (38) can be set extremely strictly even if the dimensions of the above-mentioned members are low. Therefore, the distribution member (27) can be made highly accurate by a simple working means.
次に治具(40)から取り外した流通部材(27)は、金属
ダイヤフラム(34)の外周を接続体(25)の上面に位置
し、この金属ダイヤフラム(34)の上面に、接続体(2
5)と回動不能に凹凸嵌合接続する、環状の挿通部材(4
2)を位置するとともに挿通部材(42)の内周突部(3
9)を係合鍔(35)の上面に接触する。そして内周突部
(39)と、前記保持部(33)に固定した環状鍔(43)と
の間に、復元発条(44)を介装し、ピストンロッド
(7)方向に流通部材(27)を付勢している。また上述
のごとく、金属ダイヤフラム(34)を位置する事によ
り、ピストン(10)(11)方向と、流通路(24)方向と
を液密に分割し、流通路(24)を流通する清浄な制御目
的流体が、ピストンロッド(7)方向との接触によっ
て、汚染されることのないよう保護している。この金属
ダイヤフラム(34)を設置することにより、流通部材
(27)は移動ストロークを極めて限定されたものとな
り、一実施例では0.5mm程度としている。そして、流通
部材(27)に接続した弁部(38)が、流通路(24)の開
閉部(37)を開放した状態で、流通部材(27)の係合鍔
(35)と挿通部材(42)とは、復元発条(44)の復元力
により突当接触するものとなる。Next, the flow member (27) removed from the jig (40) is located with the outer periphery of the metal diaphragm (34) on the upper surface of the connecting body (25), and the connecting body (2) is placed on the upper surface of the metal diaphragm (34).
5) A ring-shaped insertion member (4
2) is located and the inner peripheral projection (3) of the insertion member (42)
9) Contact the upper surface of the engaging collar (35). A restoration spring (44) is interposed between the inner circumferential protrusion (39) and the annular collar (43) fixed to the holding portion (33), and the flow member (27) is arranged in the piston rod (7) direction. ). Further, as described above, by locating the metal diaphragm (34), the direction of the pistons (10) (11) and the direction of the flow passage (24) are liquid-tightly divided, and a clean passage that flows through the flow passage (24) is obtained. The control objective fluid is protected against contamination by contact with the piston rod (7) direction. By installing this metal diaphragm (34), the moving member (27) has a very limited movement stroke, and in one embodiment, it is about 0.5 mm. Then, in a state where the valve portion (38) connected to the flow member (27) opens the opening / closing portion (37) of the flow passage (24), the engaging flange (35) of the flow member (27) and the insertion member ( 42) comes into abutting contact by the restoring force of the restoring spring (44).
上述のごとく構成したものに於いて、これを組み立てる
には、まずピストンロッド(7)方向の各部材と、流通
部材(27)の各部材を別個に洗浄する。この洗浄は、清
浄な流体と直接接触する、流通部材(27)および接続体
(25)を特に確実に行なうとともにピストンロッド
(7)方向の各部材は、使用している多数のオーリング
(2)(8)を破損しない範囲で適宜の洗浄を行なう。
この洗浄を行なった、ピストンロッド(7)と流通部材
(27)とは、相互に連結することのないよう他の部材と
ともに組み立てを行なう。この組み立ては、ピストンロ
ッド(7)と、流通部材(27)を連結することなく行な
うから、組み立てが容易で、洗浄化された自動機械によ
り、係合固定作業を行なう事ができ、ピストンロッド
(7)を構成する各部材の、組立作業時に於ける接触を
少なくし、組立時に於ける流通部材(27)への塵あいの
付着を防止する事を可能とする。In order to assemble the above-mentioned structure, first, each member in the piston rod (7) direction and each member of the flow member (27) are washed separately. This cleaning is particularly reliable for the flow member (27) and the connecting body (25) that come into direct contact with a clean fluid, and each member in the direction of the piston rod (7) has a large number of used O-rings (2). ) Perform appropriate washing within a range that does not damage (8).
The piston rod (7) and the flow member (27) that have been washed are assembled together with other members so as not to connect to each other. Since this assembly is performed without connecting the piston rod (7) and the flow member (27), the assembly is easy, and the engaging and fixing work can be performed by the cleaned automatic machine. It is possible to reduce the contact of each member constituting 7) during the assembling work and prevent dust from adhering to the flow member (27) during the assembling.
また金属ダイヤフラム(34)の設置により、移動可能ス
トロークは、一実施例に於いて、0.5mm程度と極めて短
いものとなるが、ピストンロッド(7)と流通部材(2
7)を別個に形成しているから、ピストンロッド
(7)、ピストン(10)(11)等の多くの部材の寸法の
影響を受けることがなく、しかも流通部材(27)は前述
のごとく、組み立て後に弁部(38)を切削加工すれば、
厳密な寸法を確保できるから、部材寸法としては、接続
体(25)の立上部(46)と、挿通部材(42)の寸法を正
確に製作、組み立てを行なえば、弁部(38)と開閉部
(37)間に形成される開放間隔(47)は、自ずと正確に
形成されるものとなり、従来のごとく多数の部材の全て
を、厳密に製作、組み立てしなければ成らないという、
無駄を省く事ができるとともに製品の信頼性を向上し、
開放間隔(47)に対応する移動ストロークが吸収され、
弁部(38)を作動させることが出来ないといった事故を
防止し、0.5mm程度の、極めて小さな移動ストロークの
弁部(38)の作動を確実に行なうことが出来るものであ
る。Moreover, the movable stroke becomes extremely short, about 0.5 mm in one embodiment by installing the metal diaphragm (34), but the piston rod (7) and the flow member (2
Since 7) is formed separately, it is not affected by the dimensions of many members such as the piston rod (7), pistons (10) (11), and the flow member (27) is as described above. If the valve part (38) is cut after assembly,
Since strict dimensions can be secured, if the dimensions of the rising part (46) of the connection body (25) and the insertion member (42) are accurately manufactured and assembled, the valve part (38) and the opening / closing part can be opened and closed. The open space (47) formed between the parts (37) is naturally formed accurately, and it is necessary to strictly manufacture and assemble all the many members as in the conventional case.
It is possible to reduce waste and improve product reliability,
The movement stroke corresponding to the opening interval (47) is absorbed,
It is possible to prevent an accident in which the valve section (38) cannot be operated, and to reliably operate the valve section (38) with an extremely small moving stroke of about 0.5 mm.
上述の如く構成した空気作動弁の作動を説明すれば、常
時は押圧発条(20)によるピストン(10)(11)への付
勢力により、ピストンロッド(7)は流通部材(27)を
押圧することがないから、流通部材(27)は復元発条
(44)の復元力によって弁部(38)を、常時開放状態と
する。そして閉止信号を感知した場合は、シリンダー
(1)に開口した制御流体の流入口(6)から、制御流
体を、2個のピストン(10)(11)間に形成される2個
の流入室(14)(15)に流入させれば、制御流体圧は2
個のピストン(10)(11)に加えられ、ピストン(10)
(11)の受圧面積は、一個のピストンの場合に比較し、
2倍近くなり、大きな出力をピストンロッド(7)を介
して、流通部材(27)に加える事ができ、復元発条(4
4)の復元力に抗して、流通部材(27)を押圧し、流通
路(24)を流通する流体が高圧の場合も、容易に、弁部
(38)にて流通路(24)の開閉部(37)を閉止すること
ができる。Explaining the operation of the air operated valve configured as described above, the piston rod (7) normally presses the flow member (27) by the urging force of the pressing spring (20) to the pistons (10) (11). Therefore, the flow member (27) causes the valve portion (38) to be always opened by the restoring force of the restoring spring (44). When a closing signal is detected, the control fluid is introduced from the control fluid inlet (6) opened in the cylinder (1) into two inflow chambers formed between the two pistons (10) and (11). (14) If it is made to flow into (15), the control fluid pressure becomes 2
Pistons (10) added to individual pistons (10) (11)
The pressure receiving area of (11) is compared with the case of one piston,
It is nearly doubled, and a large output can be added to the flow member (27) via the piston rod (7), and the restoration spring (4
Even if the flow member (27) is pressed against the restoring force of 4) and the fluid flowing through the flow passage (24) has a high pressure, the valve portion (38) can be used to easily remove the flow passage (24) from the flow passage (24). The opening / closing part (37) can be closed.
上記実施例に於ては、本発明を常開空気作動弁として用
いた実施例について説明したが、常閉空気作動弁として
用いる場合にあっては、第2図に示すごとく、押圧発条
(20)をピストン(10)と密閉体(3)の間に装着し、
流通部材(27)を流通路(24)の閉止方向にピストンロ
ッド(7)の押圧端面(45)で押圧して、開閉部(37)
を弁部(38)により常時閉止状態としている。この閉止
状態に於いて、流通部材(27)と、挿通部材(42)間に
形成される、開放間隔(48)を厳密に形成しておけば、
金属ダイヤフラム(34)を設置することによって、弁部
(38)の移動ストロークが、極度に少ない場合も、確実
な開閉弁を可能にする。そして開放信号を感知した場合
は、空気圧を押圧発条(20)の付勢力に抗してピストン
(10)(11)に加へることにより、ピストンロッド
(7)による流通部材(27)への押圧を解除するから、
流通部材(27)は復元発条(44)の付勢力により、ピス
トンロッド(7)方向に移動し、弁部(38)を開閉部
(37)から開放し、流体の流通路(24)を常閉状態から
開放状態とする。In the above embodiment, the embodiment in which the present invention is used as the normally open air operated valve has been described. However, when it is used as the normally closed air operated valve, as shown in FIG. ) Between the piston (10) and the closed body (3),
The flow member (27) is pressed by the pressing end surface (45) of the piston rod (7) in the closing direction of the flow passage (24) to open and close the opening (37).
Is always closed by the valve (38). In this closed state, if the open space (48) formed between the flow member (27) and the insertion member (42) is strictly formed,
By installing the metal diaphragm (34), even if the movement stroke of the valve portion (38) is extremely small, a reliable on-off valve can be achieved. When the release signal is detected, the air pressure is applied to the pistons (10) and (11) against the urging force of the pressing spring (20), and the piston rod (7) applies the force to the flow member (27). Since the pressure is released,
The flow member (27) moves in the direction of the piston rod (7) by the urging force of the restoring spring (44), opens the valve portion (38) from the opening / closing portion (37), and keeps the fluid flow passage (24) open. Change from the closed state to the open state.
発明の効果 本発明は上述の如く、超音波洗浄によって破損される虞
れのあるオーリング等を有するピストンロッドと、清浄
な流体が接触しオーリング等超音波洗浄によって破損さ
れる虞れの有る部材を有しない流通部材とを、別部材に
て形成し、製造時に於ける洗浄作業を、ピストンロッド
と流通部材とで別個に行なう事により、清浄な内容液と
接触する流通部材を確実に洗浄し、清浄洗浄液の汚染を
生じることがない。EFFECTS OF THE INVENTION As described above, the present invention has a possibility that a clean fluid may come into contact with a piston rod having an O-ring that may be damaged by ultrasonic cleaning and may be damaged by ultrasonic cleaning such as O-ring. The flow member that does not have a member is formed as a separate member, and the cleaning work during manufacturing is performed separately for the piston rod and the flow member, so that the flow member that comes into contact with the clean contents liquid is reliably washed. However, the cleaning solution will not be contaminated.
また金属ダイヤフラム等の設置により、弁部の移動可能
ストロークが短くなっても、ピストンロッドと流通部材
を別個に形成しているから、従来のごとくピストンロッ
ド、ピストン、固定リング等の多くの部材の寸法の影響
を受けることがなく、しかも流通部材は、組み立て後に
弁部を切削加工するものであるから、構成部材個々の工
作精度を比較的低いものとしても、弁部と開閉部間に形
成される開放間隔は、自ずと正確に形成されるものとな
り、廉価で信頼性の高い製品を得ることが出来るもので
ある。Even if the movable stroke of the valve is shortened by installing a metal diaphragm, etc., the piston rod and the flow member are formed separately, so many members such as the piston rod, piston, and fixing ring can be used as before. Since the flow member is not affected by the size and the valve part is cut after assembly, it is formed between the valve part and the opening / closing part even if the working accuracy of each component is relatively low. The open interval is naturally formed accurately, and an inexpensive and highly reliable product can be obtained.
図面は本発明の一実施例を示すもので、第1図は常開空
気作動弁の断面図、第2図は常閉空気作動弁の断面図、
第3図は流通部材の拡大断面図、第4図は工作機械によ
る弁部の切削状態を示す断面図である。 (7)……ピストンロッド (10)(11)……ピストン (24)……流通路、(27)……流通部材 (30)……部材本体、(33)……保持部 (34)……金属ダイヤフラム (35)……係合鍔、(37)……開閉部 (38)……弁部、(42)……挿通部材 (43)……環状鍔、(44)……復元発条 (47)(48)……開放間隔The drawings show one embodiment of the present invention. FIG. 1 is a sectional view of a normally open air operated valve, FIG. 2 is a sectional view of a normally closed air operated valve,
FIG. 3 is an enlarged cross-sectional view of the flow member, and FIG. 4 is a cross-sectional view showing a cutting state of the valve portion by the machine tool. (7) …… Piston rod (10) (11) …… Piston (24) …… Flow passage, (27) …… Flowing member (30) …… Member body, (33) …… Holding part (34)… … Metal diaphragm (35) …… Engagement collar, (37) …… Opening and closing part (38) …… Valve part, (42) …… Insert member (43) …… Annular collar, (44) …… Restoring spring ( 47) (48) …… Opening interval
フロントページの続き (72)発明者 青樹 寿一 埼玉県大宮市三橋1丁目840 藤倉ゴム工 業株式会社大宮工場内 (72)発明者 星 光昇 埼玉県大宮市三橋1丁目840 藤倉ゴム工 業株式会社大宮工場内 (72)発明者 江尻 隆 東京都中野区中野3−13−16 (56)参考文献 特開 昭63−88387(JP,A) 実開 昭55−181074(JP,U) 実開 昭62−82477(JP,U)Front page continued (72) Inventor Juichi Aoki 1-840 Mitsuhashi, Omiya-shi, Saitama Fujikura Rubber Industrial Co., Ltd. Omiya Plant (72) Inventor Noboru Hoshi, 840, Mitsuhashi, Omiya-shi, Saitama Fujikura Rubber Industrial Co., Ltd. Omiya Factory (72) Inventor Takashi Ejiri 3-13-16 Nakano, Nakano-ku, Tokyo (56) References JP-A-63-88387 (JP, A) Actual exploitation Sho 55-181074 (JP, U) Actual exploitation Sho 62-82477 (JP, U)
Claims (6)
より、弁部で流体の流通路を常時開放または常時閉止と
するとともに開閉信号を感知し空気圧を付勢力に抗して
ピストンに加えることにより、流体の流通路を常時開放
から閉止状態または常時閉止から開放状態とするものに
於て、流通路方向にピストンロッドとは別個に進退可能
に形成した流通部材に、加工作業時に工作機械に接続す
るための保持部を形成するとともに流通路の開閉部に臨
ませて弁部を接続し、この弁部の開閉部方向面を任意量
切削し得るよう、少なくとも切削予測量だけ肉厚に形成
した事を特徴とする空気作動弁。1. A urging force of a piston which is urged in a fixed direction causes a valve portion to always open or close a fluid flow passage and sense an opening / closing signal to apply an air pressure to the piston against the urging force. In this way, the flow passage of the fluid is changed from the normally open to the closed state or the normally closed to the open state. A holding part for connecting to the valve is formed, and the valve part is connected so as to face the opening / closing part of the flow passage, and at least the predicted cutting amount is made thick so that the face of the valve part facing the opening / closing part can be cut by an arbitrary amount. An air operated valve characterized by being formed.
環状鍔と、流通部材を摺動自在に挿通した挿通部材間
に、復元発条に介装することにより、ピストンロッドに
向けて付勢力を形成したものであることを特徴とする特
許請求の範囲第1項記載の空気作動弁。2. The circulating member is attached to the piston rod by interposing a restoring rib between the annular flange of the circulating member fixed to the holding portion and the inserting member slidably inserted through the circulating member. The air actuated valve according to claim 1, wherein the air actuated valve forms a force.
係合鍔を、挿通部材の復元発条設置側とは反対側面に臨
ませて位置するとともに係合鍔と部材本体間に、金属ダ
イヤフラムの中央を挟持固定したものであることを特徴
とする特許請求の範囲第2項記載の空気作動弁。3. An engaging collar is projected on the outer periphery of the flow member, and the engaging collar is positioned so as to face the side opposite to the restoration spring installation side of the inserting member, and between the engaging collar and the member main body. The air actuated valve according to claim 2, wherein the center of the metal diaphragm is clamped and fixed.
挟持固定した、金属ダイヤフラムの外周を、流通部材と
挿通部材間に挿入固定し、ピストン方向と流通路方向と
を液密に分割したものであることを特徴とする特許請求
の範囲第2項記載の空気作動弁。4. A metal diaphragm having a central portion sandwiched and fixed between the engaging collar of the flow member and the member main body is inserted and fixed between the flow member and the insertion member, and the piston direction and the flow passage direction are liquid-tight. The air actuated valve according to claim 2, wherein the air actuated valve is divided into
が、流通路の開閉部を開放した状態で、流通部材の係合
鍔と挿通部材とは、復元発条の復元力により押圧接触す
るものであることを特徴とする特許請求の範囲第2項記
載の空気作動弁。5. A normally-open air-operated valve, wherein the engaging flange of the flow member and the insertion member are acted upon by the restoring force of the restoring spring when the valve portion of the flowing member opens the opening / closing portion of the flow passage. The air actuated valve according to claim 2, wherein the air actuated valve is in pressure contact.
した弁部が流通路の開閉部を閉止した状態で、流通部材
の係合鍔と挿通部材との間には、開放間隔が形成される
ものであることを特徴とする特許請求の範囲第2項記載
の空気作動弁。6. A normally closed air-operated valve, wherein a valve portion connected to a flow member closes an opening / closing portion of a flow passage, and an open gap is provided between an engaging collar of the flow member and an insertion member. The air actuated valve according to claim 2, characterized in that
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28463886A JPH0718503B2 (en) | 1986-11-29 | 1986-11-29 | Air operated valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28463886A JPH0718503B2 (en) | 1986-11-29 | 1986-11-29 | Air operated valve |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63140190A JPS63140190A (en) | 1988-06-11 |
JPH0718503B2 true JPH0718503B2 (en) | 1995-03-06 |
Family
ID=17681061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28463886A Expired - Lifetime JPH0718503B2 (en) | 1986-11-29 | 1986-11-29 | Air operated valve |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0718503B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102812275A (en) * | 2010-02-05 | 2012-12-05 | 株式会社富士金 | Fluid controller |
-
1986
- 1986-11-29 JP JP28463886A patent/JPH0718503B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102812275A (en) * | 2010-02-05 | 2012-12-05 | 株式会社富士金 | Fluid controller |
Also Published As
Publication number | Publication date |
---|---|
JPS63140190A (en) | 1988-06-11 |
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