JPH07174232A - Sealing method for metal sealing material - Google Patents

Sealing method for metal sealing material

Info

Publication number
JPH07174232A
JPH07174232A JP32245993A JP32245993A JPH07174232A JP H07174232 A JPH07174232 A JP H07174232A JP 32245993 A JP32245993 A JP 32245993A JP 32245993 A JP32245993 A JP 32245993A JP H07174232 A JPH07174232 A JP H07174232A
Authority
JP
Japan
Prior art keywords
metal
diaphragm
welding
main body
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32245993A
Other languages
Japanese (ja)
Other versions
JP3334983B2 (en
Inventor
Masahiko Nakazawa
正彦 中沢
Kanetsugu Yamamoto
兼嗣 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP32245993A priority Critical patent/JP3334983B2/en
Publication of JPH07174232A publication Critical patent/JPH07174232A/en
Application granted granted Critical
Publication of JP3334983B2 publication Critical patent/JP3334983B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To reduce the number of parts so as to reduced costs and sizes of the parts by welding a plate metal sealing member in such a way as sandwichingly holding the metal member for containing it and sandwichingly holding the metal sealing member in its sealed state by using shrinkage deformation of the metal member due to welding. CONSTITUTION:In a line check valve, when fluid flows into a flow passage 7, a diaphragm 5 is pressed and deformed in the downstream side wall face W2 direction by pressure difference acting on its both sides so that a movable seal body 6 separates from a sealing member 4. As a result, fluid flows to a flow passage 8 via a connecting passage 3d and a valve chamber 9. In such a valve, when the diaphragm 5 is sandwichingly supported by upper and lower stream side main bodies 1, 2, both main bodies 1, 2 are welded in such points that the diaphragm 5 is not affected by heat and the direction of shrinkage deformation due to welding matches the sandwiching direction of the diaphragm 5. Neighborhood of the welding point W is thus made to theremally expand so as to fasten both the bodies 1, 2 together by shrinkage due to cooling following thereafter.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、主に半導体製造プラン
ト等の流体輸送ラインに介設されるバルブ、圧力計、流
量計及びフィルター等に用いられる金属製ダイヤフラム
や金属製パッキン等の板状の金属製シール材のシール方
法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention mainly relates to a plate shape such as a metal diaphragm or a metal packing used for a valve, a pressure gauge, a flow meter, a filter or the like installed in a fluid transportation line of a semiconductor manufacturing plant. The present invention relates to a method for sealing a metal sealing material.

【0002】[0002]

【従来の技術】一般に、半導体製造プラント等の流体輸
送ラインに介設される高純度ガス用のバルブには、シー
ル材として金属製ダイヤフラムや金属製パッキンが使用
されて居り、これらによって流体の漏洩を防止するよう
にしている。図5は半導体製造プラントの流体輸送ライ
ンに介設されるライン逆止弁の拡大縦断面図を示し、シ
ール材に金属製ダイヤフラムを使用したものである。
又、図6は同じく流体輸送ラインに介設されるダイヤフ
ラム型流体制御弁の拡大縦断面図を示し、シール材に板
状の金属製パッキンを使用したものである。
2. Description of the Related Art Generally, a valve for high-purity gas provided in a fluid transportation line of a semiconductor manufacturing plant or the like uses a metal diaphragm or a metal packing as a sealing material, which causes fluid leakage. I try to prevent it. FIG. 5 shows an enlarged vertical cross-sectional view of a line check valve provided in a fluid transportation line of a semiconductor manufacturing plant, in which a metal diaphragm is used as a sealing material.
Further, FIG. 6 is an enlarged vertical sectional view of a diaphragm type fluid control valve which is also installed in a fluid transportation line, and uses a plate-shaped metal packing as a sealing material.

【0003】即ち、前者のライン逆止弁は、流入通路3
0を有する上流側本体31と、流出通路32を有し、上
流側本体31との間に弁室33を形成する下流側本体3
4と、上流側本体31に取り付けられ、流入通路30と
弁室33とを連通する連絡通路35を有する静止シール
体36と、静止シール体36に取り付けられたシール部
材37と、弁室33内に配置され、両本体31,34に
挾持される環状の金属製ダイヤフラム38と、金属製ダ
イヤフラム38の内周縁部に固着され、シール部材37
に当離座する筒状の可動シール体39と、両本体31,
34を締め付け固定するユニオンナット40等から構成
されている。又、シール材となる金属製ダイヤフラム3
8は、上流側本体31の雄ネジ部31aにユニオンナッ
ト40を螺着して両本体31,34を締め付けることに
よって、上流側本体31と下流側本体34とで気密状に
挾圧保持されている。
That is, the former line check valve is provided with the inflow passage 3
A downstream main body 3 having an upstream main body 31 having 0 and an outflow passage 32 and forming a valve chamber 33 between the upstream main body 31 and the upstream main body 31.
4, a stationary seal body 36 attached to the upstream main body 31 and having a communication passage 35 communicating the inflow passage 30 and the valve chamber 33, a seal member 37 attached to the stationary seal body 36, and the inside of the valve chamber 33. And a ring-shaped metal diaphragm 38 held between the two main bodies 31 and 34, and fixed to the inner peripheral edge of the metal diaphragm 38, and the seal member 37.
A tubular movable seal body 39 which is seated on and away from the main body 31,
It is composed of a union nut 40 and the like for fastening and fixing 34. In addition, a metal diaphragm 3 that serves as a sealing material
8 is that the union nut 40 is screwed onto the male screw portion 31a of the upstream main body 31 to tighten both the main bodies 31 and 34, so that the upstream main body 31 and the downstream main body 34 are held in a hermetically sealed condition. There is.

【0004】一方、後者のバルブは、弁室41を有する
ボディ42と、ボディ42に嵌合され、弁室41に連通
する流入通路43及び弁室41内に位置する弁座44を
有する上流側本体45と、ボディ42に嵌合され、弁室
41に連通する流出通路46を有する下流側本体47
と、ボディ42と両本体45,47との間に介設された
板状の環状の金属製パッキン48と、ボディ42と両本
体45,47とを締め付け固定する押え板49及びボル
ト50と、弁室41を覆うべくボディ42の上面に固定
され、挿通孔51aを有するダイヤフラムクランプ51
と、弁室41内に縦向きに配設され、上端部がダイヤフ
ラムクランプ51に固定されたスラストピン52と、ス
ラストピン52の下端部に固着され、弁座44に当離座
する弁体53と、スラストピン52を挿通せしめて弁室
41内に縦向きに配設され、上端部がダイヤフラムクラ
ンプ51の挿通孔51aに挿通されると共に下端部が弁
体53へ固着されたスラストピンハウジング54と、外
周縁部がボディ42とダイヤフラムクランプ51との間
に挾持固定され、内周縁部がスラストピンハウジング5
4に固着されたダイヤフラム55と、ダイヤフラムクラ
ンプ51に固定板56を介して支持固定され、駆動軸5
7aを有するアクチュエータ57と、アクチュエータ5
7の駆動軸57aと対向する位置に縦向きに配設され、
上端部が固定板56にスライド自在に支持されると共に
下端部がスラストピンハウジング54の上端部に連結さ
れた駆動レバー58等から構成されている。又、シール
材となる金属製パッキン48は、押え板49及びボルト
50でボディ42と上流側本体45及び下流側本体47
とを締め付けることによって、ボディ42と両本体4
5,47とで気密状に挾圧保持されている。
On the other hand, the latter valve has a body 42 having a valve chamber 41, an inflow passage 43 fitted to the body 42 and communicating with the valve chamber 41, and a valve seat 44 located in the valve chamber 41 on the upstream side. A main body 45 and a downstream main body 47 fitted to the body 42 and having an outflow passage 46 communicating with the valve chamber 41.
A plate-shaped annular metal packing 48 interposed between the body 42 and both main bodies 45 and 47, a holding plate 49 and bolts 50 for tightening and fixing the body 42 and both main bodies 45 and 47, A diaphragm clamp 51 fixed to the upper surface of the body 42 to cover the valve chamber 41 and having an insertion hole 51a.
And a thrust pin 52 which is vertically arranged in the valve chamber 41 and whose upper end is fixed to the diaphragm clamp 51, and a valve body 53 which is fixed to the lower end of the thrust pin 52 and is seated on and off the valve seat 44. The thrust pin housing 54 is arranged vertically in the valve chamber 41 with the thrust pin 52 inserted, and the upper end is inserted into the insertion hole 51a of the diaphragm clamp 51 and the lower end is fixed to the valve body 53. The outer peripheral edge portion is sandwiched and fixed between the body 42 and the diaphragm clamp 51, and the inner peripheral edge portion is thrust pin housing 5
4 is fixed to the diaphragm 55 and the diaphragm clamp 51 via a fixing plate 56.
Actuator 57 having 7a, and actuator 5
7 is arranged vertically at a position facing the drive shaft 57a of 7,
The upper end is slidably supported by the fixed plate 56, and the lower end is composed of a drive lever 58 and the like connected to the upper end of the thrust pin housing 54. Further, the metal packing 48 serving as a sealing material is composed of the body 42, the upstream main body 45 and the downstream main body 47 by means of the pressing plate 49 and the bolt 50.
By tightening and, the body 42 and both main bodies 4
5 and 47 are held in a hermetically sealed condition.

【0005】[0005]

【発明が解決しようとする課題】ところで、従前の金属
製シール材のシール方法は、何れも金属製ダイヤフラム
38や金属製パッキン48のシール材をこれを収容する
部材で挾み、ユニオンナット40やボルト50等を用い
て前記部材を締め付け、シール材を気密状に挾圧保持す
るようにしている為、部品点数が増えてコストの高騰を
招くと共に、製品自体の小型化を図れないと云う問題が
あった。又、ユニオンナット40やボルト50等を用い
た場合には、長期間の使用によってネジが弛むことがあ
り、これに伴ってシール性が著しく低下すると云う問題
があった。更に、錆の発生等を防止する為にネジ部に油
を使用することもあり、この場合には油が流路内に混入
して管路が汚損されると云う問題もあった。
All of the conventional sealing methods for metallic sealing materials include a sealing material for the metallic diaphragm 38 and the metallic packing 48 sandwiched between them, and a union nut 40 or Since the member is tightened by using the bolts 50 and the like, and the sealing material is held in a hermetically sealed condition, the number of parts increases and the cost rises, and the product itself cannot be downsized. was there. Further, when the union nut 40, the bolt 50 and the like are used, there is a problem that the screw may be loosened after long-term use, and the sealing property is remarkably deteriorated accordingly. Further, oil may be used for the screw portion in order to prevent the generation of rust and the like, and in this case, there is a problem that the oil is mixed into the flow passage and the pipe is polluted.

【0006】本発明は、上記の問題点を解消する為に創
案されたものであり、その目的は部品点数の削減や製品
の小型化を図れると共に、シール性の低下等を来さない
金属製シール材のシール方法を提供するにある。
The present invention was devised in order to solve the above problems, and its purpose is to reduce the number of parts and the size of the product, and to prevent the deterioration of the sealing property. A method of sealing a sealing material is provided.

【0007】上記目的を達成する為に、本発明の金属製
シール材のシール方法は、板状の金属製シール材を一対
の金属製部材間に収容して両金属製部材で挾持し、両金
属製部材の金属製シール材が熱による影響を受けない個
所で且つ溶接による収縮方向が金属製シール材を挾持す
る方向と同一になるような個所を溶接し、溶接による金
属製部材の収縮変形を利用して前記金属製シール材を両
金属製部材で気密状に挾圧保持するようにしたものであ
る。又、金属製シール材は、一方の金属製部材に形成し
たテーパ面と他方の金属製部材に形成した突条とで挾圧
保持することが好ましい。
In order to achieve the above object, the method for sealing a metallic sealant according to the present invention is such that a plate-shaped metallic sealant is housed between a pair of metallic members and held by both metallic members. Welding where the metal sealing material of the metal member is not affected by heat and where the shrinking direction due to welding is the same as the direction in which the metal sealing material is held, and shrinking deformation of the metal member due to welding. By utilizing the above, the metal sealing material is sandwiched and held by both metal members in an airtight manner. In addition, it is preferable that the metal seal material be held by the taper surface formed on one metal member and the ridge formed on the other metal member in a sandwiched state.

【0008】[0008]

【作用】金属製ダイヤフラムや金属製パッキン等の金属
製シール材を、一方の金属製部材に形成したテーパ面と
他方の金属製部材に形成した突条とで挾む。次に、金属
製部材同志を溶接する。即ち、金属製部材を溶接する個
所は、金属製シール材が熱の影響を受けない個所で且つ
溶接による収縮変形の方向が金属製シール材を挾持する
方向と同一になるような個所を溶接する。そうすると、
金属製部材の溶接部近傍は、温度上昇によって膨張し、
続いて起こる冷却によって収縮が生じる。その結果、金
属製部材同志が締め付けられ、金属製シール材はテーパ
面と突条とで確実且つ強固に挾圧保持されることなる。
特に、金属製シール材をテーパ面と突条とで挾圧してい
る為、より高い気密性の確保が可能となる。本発明の方
法では、溶接による金属製部材の収縮変形を利用して金
属製シール材を金属製部材で締め付けるようにしている
為、従来のように金属製シール材をナットやボルト等で
締め付ける方法に比較して、部品点数が削減してコスト
低減を図れると共に、製品自体の小型化を図れる。然
も、ネジの弛みによるシール性の低下が皆無になる等、
優れた効果を発揮することができる。
The metal sealing material such as the metal diaphragm and the metal packing is sandwiched between the tapered surface formed on one metal member and the ridge formed on the other metal member. Next, the metal members are welded together. That is, the place where the metal member is welded is a place where the metal seal material is not affected by heat and the direction of shrinkage deformation due to welding is the same as the direction in which the metal seal material is held. . Then,
The vicinity of the welded part of the metal member expands due to temperature rise,
The subsequent cooling causes shrinkage. As a result, the metallic members are clamped together, and the metallic sealing material is securely and firmly held by the tapered surface and the ridge.
In particular, since the metal sealing material is sandwiched between the tapered surface and the ridge, higher airtightness can be secured. In the method of the present invention, since the metal seal member is tightened with the metal member by utilizing the shrinkage deformation of the metal member due to welding, the method of tightening the metal seal member with nuts or bolts as in the conventional method. Compared with, the number of parts can be reduced, the cost can be reduced, and the product itself can be downsized. Of course, there is no loss of sealing due to loosening of screws, etc.
It can exert excellent effects.

【0009】[0009]

【実施例】以下、本発明の実施例を図面に基づいて詳細
に説明する。図1は本発明の金属製シール材のシール方
法を用いたライン逆止弁の拡大縦断面図であり、当該ラ
イン逆止弁は、上流側本体1、下流側本体2、静止シー
ル体3、シール部材4、金属製ダイヤフラム5及び可動
シール体6から構成されて居り、金属製シール材に金属
製ダイヤフラム5を使用したものである。
Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is an enlarged vertical cross-sectional view of a line check valve using the method for sealing a metallic sealing material according to the present invention. The line check valve includes an upstream main body 1, a downstream main body 2, a stationary seal body 3, It is composed of a seal member 4, a metal diaphragm 5 and a movable seal body 6, and uses the metal diaphragm 5 as a metal seal material.

【0010】前記上流側本体1は、ステンレス鋼等の金
属製部材により断面形状が略T字型に形成されて居り、
中心軸線上には直線状の流入通路7が、下流側には流入
通路7に直交する断面形状略凹状の上流側壁面W1が夫
々形成されている。又、上流側壁面W1の外周縁部に
は、図2に示すように後述する金属製ダイヤフラム5の
外周縁部を気密状に押圧保持する為の環状の突条1aが
形成されている。更に、上流側壁面W1の外側部位に
は、下流側方向へ突出して下流側本体2の上流側外周面
に嵌合される筒部1bが一体的に形成されて居り、当該
筒部1bの内方に下流側本体2の上流側端部や金属製ダ
イヤフラム5が夫々挿着される。
The upstream main body 1 has a substantially T-shaped cross section formed of a metal member such as stainless steel.
A linear inflow passage 7 is formed on the central axis, and an upstream side wall surface W1 having a substantially concave cross section orthogonal to the inflow passage 7 is formed on the downstream side. Further, as shown in FIG. 2, an annular ridge 1a is formed on the outer peripheral edge of the upstream side wall surface W1 to press and hold the outer peripheral edge of the metal diaphragm 5 described later in an airtight manner. Further, a cylindrical portion 1b protruding in the downstream direction and fitted to the upstream outer peripheral surface of the downstream main body 2 is integrally formed on the outer side portion of the upstream side wall surface W1. The upstream end of the downstream main body 2 and the metal diaphragm 5 are inserted in this direction.

【0011】前記下流側本体2は、ステンレス鋼等の金
属製部材により断面形状が略T字型に形成されて居り、
中心軸線上には流入通路7と同一直線上に位置する流出
通路8が、上流側本体1の上流側壁面W1に対向する面
には上流側壁面W1との間に弁室9を形成する為の断面
形状略凹状の下流側壁面W2が夫々形成されている。
又、下流側壁面W2の外周縁部には、図2に示すように
上流側本体1の突条1aに対向するテーパ面2aが形成
されて居り、これによって金属製ダイヤフラム5の気密
挾持が行われる。更に、下流側本体2の上流側端部に
は、上流側本体1の筒部1b内に嵌合される小径部2b
と筒部1bの端面に当接する大径部2cが夫々一体的に
形成されている。尚、大径部2cの外径は、筒部1bの
外径と同一に設定されている。
The downstream main body 2 has a substantially T-shaped cross section formed of a metal member such as stainless steel.
An outflow passage 8 located on the same straight line as the inflow passage 7 on the central axis forms a valve chamber 9 between the upstream side wall surface W1 and the upstream side wall surface W1 of the upstream main body 1. The downstream side wall surfaces W2 each having a substantially concave cross-sectional shape are formed.
Further, as shown in FIG. 2, a taper surface 2a is formed on the outer peripheral edge of the downstream side wall surface W2 so as to face the ridge 1a of the upstream main body 1, whereby the metal diaphragm 5 can be held airtightly. Be seen. Further, at the upstream end of the downstream main body 2, a small diameter portion 2b fitted in the tubular portion 1b of the upstream main body 1.
And a large-diameter portion 2c that comes into contact with the end surface of the tubular portion 1b are integrally formed. The outer diameter of the large diameter portion 2c is set to be the same as the outer diameter of the tubular portion 1b.

【0012】前記静止シール体3は、ステンレス鋼等の
金属製部材により下流側が閉塞された略筒状に形成され
て居り、上流側に形成した挿入筒部3aを流入通路7の
下流側に挿入してカシメ固定することによって、上流側
本体1の窪み部に収納固定されている。又、静止シール
体3の下流側面には、後述するシール部材4を挿着する
為の環状の溝3bと、シール部材4を押圧する金属製押
えリング10を固定する為のカシメ体3cとが夫々形成
されている。更に、静止シール体3の周壁部には、流入
通路7と弁室9とを連通する複数の連絡通路3dが等角
度毎に穿設されている。
The stationary seal body 3 is formed in a substantially tubular shape in which the downstream side is closed by a metal member such as stainless steel, and the insertion tubular portion 3a formed on the upstream side is inserted on the downstream side of the inflow passage 7. Then, by caulking and fixing, it is housed and fixed in the hollow portion of the upstream main body 1. Further, on the downstream side surface of the stationary seal body 3, there are provided an annular groove 3b for inserting a seal member 4 which will be described later and a caulking body 3c for fixing a metal pressing ring 10 for pressing the seal member 4. Each is formed. Further, a plurality of communication passages 3d that communicate the inflow passage 7 and the valve chamber 9 are formed in the peripheral wall portion of the stationary seal body 3 at equal angles.

【0013】前記シール部材4は、或る程度以上の弾性
を有するゴムやプラスチック等により環状に形成されて
居り、静止シール体3の環状の溝3bに圧入保持されて
いる。即ち、当該シール部材4は、溝3b内へシール部
材4を挿入した後、押えリング10を溝3bの内周縁側
に挿着し、最後にカシメ体3cを折り曲げることによ
り、溝3b内に圧入固定されている。
The seal member 4 is formed in an annular shape from rubber or plastic having elasticity of a certain level or more, and is press-fitted and held in the annular groove 3b of the stationary seal body 3. That is, the seal member 4 is press-fitted into the groove 3b by inserting the pressing member 10 into the groove 3b after inserting the seal member 4 into the groove 3b, and finally bending the caulking body 3c. It is fixed.

【0014】前記ダイヤフラム5は、ステンレス鋼やイ
ンコネル(商標名)等の金属製薄板により環状に形成さ
れて居り、その外周縁部には、下流側へ向けて二段に折
り曲げられた係止片5aが形成されている。又、ダイヤ
フラム5は、その係止片5aが図2に示すように下流側
本体2のテーパ面2aへ係合され、テーパ面2aと下流
側本体2の突条1aとの間で気密状に挾圧保持されるこ
とによって、軸線方向へ変形可能になっている。尚、ダ
イヤフラム5は、無圧状態に於いては平板形態に保持さ
れている。
The diaphragm 5 is formed in an annular shape by a thin metal plate such as stainless steel or Inconel (trademark). The outer peripheral edge of the diaphragm 5 is a locking piece bent in two stages toward the downstream side. 5a is formed. Further, the diaphragm 5 has its locking piece 5a engaged with the tapered surface 2a of the downstream main body 2 as shown in FIG. 2, so that the diaphragm 5 becomes airtight between the tapered surface 2a and the ridge 1a of the downstream main body 2. It is deformable in the axial direction by being held by being pressed. It should be noted that the diaphragm 5 is held in a flat plate shape in the unpressurized state.

【0015】前記可動シール体6は、ステンレス鋼等の
金属製部材により略筒状に形成されて居り、ダイヤフラ
ム5の内周縁部に溶着され、上流側の端面がシール部材
4に当離座するようになっている。尚、ダイヤフラム5
が平板形態に保持される無圧状態に於いては、可動シー
ル体6はシール部材4へ極軽く当接した状態になってい
る。
The movable seal body 6 is formed of a metal member such as stainless steel into a substantially cylindrical shape, is welded to the inner peripheral edge of the diaphragm 5, and the upstream end face is abutted against the seal member 4. It is like this. In addition, diaphragm 5
In the non-pressurized state in which the plate is held in a flat plate shape, the movable seal body 6 is in an extremely lightly contacted state with the seal member 4.

【0016】以上のように構成されたライン逆止弁にあ
っては、流入通路7に流体が流入すると、ダイヤフラム
5がその両面に作用する圧力差によって下流側壁面W2
方向に押圧されて変形し、可動シール体6がシール部材
4から離れる。その結果、流入通路7と流出通路8との
間が連通され、流体は流入通路7から連絡通路3d及び
弁室9を経て流出通路8へと流れる。又、流体が逆流し
たときには、ダイヤフラム5がその両面に作用する圧力
差によって上流側壁面W1方向に押圧され、可動シール
体6がシール部材4に強く当接する。その結果、流入通
路7と流出通路8との間の連通が遮断され、流出通路8
から流入通路7への逆流が阻止される。尚、ダイヤフラ
ム5に過大な流体圧が掛かった場合でも、ダイヤフラム
5は上流側壁面W1や下流側壁面W2に当接して支持さ
れる為、過大に変形することはない。
In the line check valve constructed as described above, when the fluid flows into the inflow passage 7, the pressure difference acting on both surfaces of the diaphragm 5 causes the downstream side wall surface W2.
The movable seal body 6 is separated from the seal member 4 by being pressed in the direction and deformed. As a result, the inflow passage 7 and the outflow passage 8 are communicated with each other, and the fluid flows from the inflow passage 7 to the outflow passage 8 through the communication passage 3d and the valve chamber 9. Further, when the fluid flows backward, the diaphragm 5 is pressed in the direction of the upstream side wall surface W1 due to the pressure difference acting on both surfaces thereof, and the movable seal body 6 strongly abuts the seal member 4. As a result, the communication between the inflow passage 7 and the outflow passage 8 is blocked, and the outflow passage 8
Backflow from the inlet to the inflow passage 7 is blocked. Even when an excessive fluid pressure is applied to the diaphragm 5, the diaphragm 5 does not deform excessively because it is supported by contacting the upstream side wall surface W1 and the downstream side wall surface W2.

【0017】次に、金属製ダイヤフラム5を上流側本体
1と下流側本体2とで気密状に挾圧保持する場合につい
て説明する。先ず、上流側本体1の上流側壁面W1と下
流側本体2の下流側壁面W2との間に可動シール体6を
溶着したダイヤフラム5を配置し、上流側本体1の筒部
1bを下流側本体2の小径部2bに嵌合して両本体1,
2でダイヤフラム5を挾み込む。このとき、ダイヤフラ
ム5の係止片5aは、上流側本体1の突条1aと下流側
本体2のテーパ面2aとの間で挾持された格好になって
いる。又、筒部1bの端面と下流側本体2の端面とは当
接状態になっている。次に、図示していないが、自動溶
接装置(例えば自動TIG溶接装置等)によって、上流
側本体1と下流側本体2とを溶接する。このとき、両本
体1,2を溶接する個所は、金属製ダイヤフラム5が熱
の影響を受けない個所で且つ溶接による収縮変形の方向
がダイヤフラム5を挾持する方向と同一になるような個
所を溶接する。即ち、本実施例では、筒部1bと大径部
2cの突き合わせ部分を全周に亘って溶接する。そうす
ると、両本体1,2の溶接部W近傍は、温度上昇によっ
て膨張し、続いて起こる冷却によって収縮が生じる。そ
の結果、上流側本体1と下流側本体2とが図1の矢印方
向へ締め付けられ、ダイヤフラム5の外周縁部(係止片
5a)は突条1aとテーパ面2aとで確実且つ強固に挾
圧保持されることなる。特に、ダイヤフラム5の外周縁
部をテーパ面2aと突条1aとで挾圧している為、より
高い気密性の確保が可能となる。尚、溶接条件やシール
部の寸法・形状等は、溶接による収縮方向がダイヤフラ
ム5を挾持する方向と同一になること、ダイヤフラム5
が熱の影響を受けないこと、シール部の締め代よりも溶
接による収縮変形の量が大きくなること、等の条件を充
足するように設定することは勿論である。
Next, a description will be given of a case where the metal diaphragm 5 is held by the upstream main body 1 and the downstream main body 2 in a hermetically sealed condition. First, the diaphragm 5 welded with the movable seal body 6 is arranged between the upstream side wall surface W1 of the upstream main body 1 and the downstream side wall surface W2 of the downstream main body 2, and the tubular portion 1b of the upstream main body 1 is connected to the downstream main body 1. Both main bodies 1,
Insert the diaphragm 5 with 2. At this time, the locking piece 5a of the diaphragm 5 is sandwiched between the protrusion 1a of the upstream main body 1 and the tapered surface 2a of the downstream main body 2. Further, the end surface of the tubular portion 1b and the end surface of the downstream main body 2 are in contact with each other. Next, although not shown, the upstream main body 1 and the downstream main body 2 are welded by an automatic welding device (for example, an automatic TIG welding device). At this time, the parts where the two main bodies 1 and 2 are welded are the parts where the metal diaphragm 5 is not affected by heat and the direction of shrinkage deformation due to welding is the same as the direction in which the diaphragm 5 is held. To do. That is, in this embodiment, the abutting portion of the cylindrical portion 1b and the large diameter portion 2c is welded over the entire circumference. Then, the vicinity of the welded portion W of the two main bodies 1 and 2 expands due to the temperature rise, and contracts due to the subsequent cooling. As a result, the upstream main body 1 and the downstream main body 2 are tightened in the direction of the arrow in FIG. 1, and the outer peripheral edge portion (locking piece 5a) of the diaphragm 5 is securely and firmly sandwiched by the ridge 1a and the tapered surface 2a. It will be held under pressure. In particular, since the outer peripheral edge of the diaphragm 5 is pinched by the tapered surface 2a and the ridge 1a, higher airtightness can be secured. Regarding the welding conditions and the size and shape of the seal portion, the contraction direction due to welding should be the same as the direction in which the diaphragm 5 is clamped.
Is not affected by heat, and the amount of shrinkage deformation due to welding is larger than the tightening margin of the seal portion.

【0018】本発明のシール方法を用いたライン逆止弁
は、シール用のダイヤフラム5を溶接による収縮変形を
利用して上流側本体1と下流側本体2とで締め付けるよ
うにしている為、ダイヤフラム5及び両本体1,2を締
め付ける為の部品(ナットやボルト等)が不要になり、
部品点数が削減してコスト低減を図れると共に、弁自体
の小型化を図れる。然も、ネジによる締め付けがない
為、ネジの弛みによるシール性の低下もなく、確実なシ
ールを行える。又、シール材として溶接が困難な材質の
ダイヤフラム5も使用することができ、至極便利であ
る。更に、両本体1,2を溶接する個所はダイヤフラム
5が熱の影響を受けない個所を溶接している為、ダイヤ
フラム5が熱によって変形したり、組成が変化したりす
ると云うこともない。そのうえ、ダイヤフラム5が熱の
影響を受けないように溶接部分の肉厚を厚くしている
為、耐圧性や強度が不足すると云うこともない。加え
て、溶接条件や溶接部の寸法・形状等によって両本体
1,2の収縮変形力を変えることができ、適宜の締め付
け力でシール材を挾圧保持することができる。
In the line check valve using the sealing method of the present invention, the diaphragm 5 for sealing is clamped between the upstream main body 1 and the downstream main body 2 by utilizing shrinkage deformation caused by welding. No need for parts (nuts, bolts, etc.) for tightening 5 and both main bodies 1 and 2,
The number of parts can be reduced to reduce the cost, and the valve itself can be downsized. Of course, since there is no tightening with screws, there is no deterioration in sealing performance due to loosening of screws, and reliable sealing can be performed. Further, the diaphragm 5 made of a material that is difficult to weld can be used as the sealing material, which is extremely convenient. Furthermore, since the diaphragm 5 is welded at a location where the two main bodies 1 and 2 are welded, the diaphragm 5 is not deformed by heat or its composition is not changed. Moreover, since the thickness of the welded portion is made thick so that the diaphragm 5 is not affected by heat, it cannot be said that the pressure resistance and strength are insufficient. In addition, the shrinkage and deformation force of the two main bodies 1 and 2 can be changed depending on the welding conditions, the size and shape of the welded portion, and the sealing material can be held with a proper tightening force.

【0019】図3は本発明の金属製シール材のシール方
法を用いたダイヤフラム型流体制御弁の拡大縦断面図で
あり、シール材に板状の金属製パッキンを使用したもの
である。当該制御弁は、弁室11、弁室11に連通する
深穴12及び弁室11に連通する流出通路13を有する
ボディ14と、ボディ14の深穴12に嵌合され、弁室
11に連通する流入通路15及び弁室11内に位置する
弁座16を有する上流側本体17と、ボディ14と上流
側本体17との間に介設された板状の環状の金属製パッ
キン18と、弁室11を覆うべくボディ14の上面に固
定され、挿通孔19aを有するダイヤフラムクランプ1
9と、弁室11内に縦向きに配設され、上端部がダイヤ
フラムクランプ19に固定されたスラストピン20と、
スラストピン20の下端部に固着され、弁座16に当離
座する弁体21と、スラストピン20を挿通せしめて弁
室11内に縦向きに配設され、上端部がダイヤフラムク
ランプ19の挿通孔19aに挿通されると共に下端部が
弁体21へ固着されたスラストピンハウジング22と、
外周縁部がボディ14とダイヤフラムクランプ19との
間に挾持固定され、内周縁部がスラストピンハウジング
22に固着されたダイヤフラム23と、ダイヤフラムク
ランプ19に固定板24を介して支持固定され、駆動軸
25aを有するアクチュエータ25と、アクチュエータ
25の駆動軸25aと対向する位置に縦向きに配設さ
れ、上端部が固定板24にスライド自在に支持されると
共に下端部がスラストピンハウジング22の上端部に連
結された駆動レバー26と、駆動レバー26の引き戻し
用スプリング27等から構成されている。又、シール材
となる金属製パッキン18は、深穴12内に形成したテ
ーパ面12aと上流側本体17に形成した環状の突条1
7aとで気密状に挾圧保持されている。更に、上流側本
体17の外周面には、ボディ14の端面に対向するフラ
ンジ部17bが形成されている。
FIG. 3 is an enlarged vertical cross-sectional view of a diaphragm type fluid control valve using the method of sealing a metallic seal material of the present invention, in which a plate-shaped metallic packing is used as the sealing material. The control valve is fitted in a body 14 having a valve chamber 11, a deep hole 12 communicating with the valve chamber 11 and an outflow passage 13 communicating with the valve chamber 11, and a deep hole 12 of the body 14 and communicating with the valve chamber 11. Upstream main body 17 having a valve seat 16 located in the inflow passage 15 and the valve chamber 11, a plate-shaped annular metal packing 18 interposed between the body 14 and the upstream main body 17, and a valve A diaphragm clamp 1 fixed to the upper surface of the body 14 to cover the chamber 11 and having an insertion hole 19a.
9 and a thrust pin 20 vertically arranged in the valve chamber 11 and having an upper end fixed to the diaphragm clamp 19.
The valve body 21 fixed to the lower end of the thrust pin 20 and seated on the valve seat 16 and the thrust pin 20 are vertically arranged in the valve chamber 11, and the upper end of the diaphragm clamp 19 is inserted. A thrust pin housing 22 which is inserted into the hole 19a and whose lower end is fixed to the valve body 21;
The outer peripheral edge portion is sandwiched and fixed between the body 14 and the diaphragm clamp 19, and the inner peripheral edge portion is supported and fixed by the diaphragm 23 fixed to the thrust pin housing 22 via the fixing plate 24. An actuator 25 having 25a, and a longitudinally arranged position facing the drive shaft 25a of the actuator 25, the upper end being slidably supported by the fixed plate 24 and the lower end being the upper end of the thrust pin housing 22. The drive lever 26 is connected to the drive lever 26, and the pullback spring 27 of the drive lever 26 is connected to the drive lever 26. In addition, the metallic packing 18 serving as a sealing material includes a tapered surface 12a formed in the deep hole 12 and an annular ridge 1 formed in the upstream main body 17.
It is held in a hermetically sealed condition with 7a. Further, a flange portion 17b facing the end surface of the body 14 is formed on the outer peripheral surface of the upstream main body 17.

【0020】以上のように構成された流体制御弁にあっ
ては、弁体21が弁座16に当接している状態から、ア
クチュエータ25の駆動軸25aが突出すると、駆動レ
バー26と弁体21とスラストピン20との連結体は、
スラストピン20の略中間位置を中心点とする回転運動
をし、駆動レバー26の下端部は矢印a方向へ、また弁
体21は矢印b方向へ回動する。その結果、弁体21は
弁座16から離れて開弁状態となる。反対にアクチュエ
ータ25の駆動軸25aが引っ込むと、引き戻し用スプ
リングの弾性力によって駆動レバー26と弁体21とス
ラストピン20との連結体は、スラストピン20の略中
間位置を中心点とする回転運動をし、駆動レバー26の
下端部は矢印a反対方向へ、また弁体21は矢印b反対
方向へ回動する。その結果、弁体21は弁座16へ当接
して閉弁状態となる。
In the fluid control valve configured as described above, when the drive shaft 25a of the actuator 25 projects from the state where the valve body 21 is in contact with the valve seat 16, the drive lever 26 and the valve body 21 are arranged. And the connecting body of the thrust pin 20
The thrust pin 20 makes a rotational movement about the middle position, and the lower end of the drive lever 26 rotates in the direction of arrow a and the valve body 21 rotates in the direction of arrow b. As a result, the valve body 21 separates from the valve seat 16 and enters the valve open state. On the contrary, when the drive shaft 25a of the actuator 25 retracts, the elastic force of the pullback spring causes the connecting body of the drive lever 26, the valve body 21, and the thrust pin 20 to rotate about the middle position of the thrust pin 20. The lower end of the drive lever 26 rotates in the direction opposite to the arrow a, and the valve body 21 rotates in the direction opposite to the arrow b. As a result, the valve body 21 comes into contact with the valve seat 16 to be in the valve closed state.

【0021】次に、金属製パッキン18をボディ14と
上流側本体17とで気密状に挾圧保持する場合について
説明する。先ず、上流側本体17の深穴12内に金属製
パッキン18と上流側本体17の下流側端部を挿入し、
上流側本体17の突条17aと深穴12内のテーパ面1
2aとで金属製パッキン18を挾む。このとき、上流側
本体17のフランジ部17bは、ボディ14の端面に近
接状態になっている。次に、図示していないが、自動溶
接装置(例えば自動TIG溶接装置等)によって、ボデ
ィ14と上流側本体17とを溶接する。このとき、溶接
する個所は、金属製パッキン18が熱の影響を受けない
個所で且つ溶接による収縮変形の方向が金属製パッキン
18を挾持する方向と同一になるような個所を溶接す
る。即ち、本実施例では、フランジ部17bとボディ1
4の端面との突き合わせ部分を全周に亘って溶接する。
そうすると、溶接部W近傍は、温度上昇によって膨張
し、続いて起こる冷却によって収縮が生じる。その結
果、ボディ14と上流側本体17とが締め付けられ、金
属製パッキン18は突条17aとテーパ面12aとで確
実且つ強固に挾圧保持されることなる。特に、金属製パ
ッキン18をテーパ面12aと突条17aとの間で挾着
している為、より高度な気密性の確保が可能となる。
Next, a description will be given of a case where the metal packing 18 is held in a hermetically sealed state by the body 14 and the upstream main body 17. First, insert the metallic packing 18 and the downstream end of the upstream main body 17 into the deep hole 12 of the upstream main body 17,
The ridge 17a of the upstream main body 17 and the tapered surface 1 in the deep hole 12
The metal packing 18 is sandwiched with 2a. At this time, the flange portion 17b of the upstream main body 17 is in a state of being close to the end surface of the body 14. Next, although not shown, the body 14 and the upstream main body 17 are welded by an automatic welding device (for example, an automatic TIG welding device or the like). At this time, welding is performed at a location where the metal packing 18 is not affected by heat and where the direction of shrinkage deformation due to welding is the same as the direction in which the metal packing 18 is held. That is, in this embodiment, the flange portion 17b and the body 1 are
4 is welded over the entire circumference at the butting portion with the end face.
Then, the vicinity of the welded portion W expands due to the temperature rise, and contracts due to the subsequent cooling. As a result, the body 14 and the upstream main body 17 are tightened, and the metal packing 18 is reliably and firmly held by the protrusion 17a and the tapered surface 12a. In particular, since the metal packing 18 is sandwiched between the tapered surface 12a and the ridge 17a, a higher degree of airtightness can be secured.

【0022】本発明のシール方法を用いた流体制御弁
は、シール用の金属製パッキン18を溶接による収縮変
形を利用してボディ14と上流側本体17とで締め付け
るようにしている為、金属製パッキン18等を締め付け
る為の部品(ボルト等)が不要になり、部品点数が削減
してコスト低減を図れると共に、弁自体の小型化を図れ
る。又、ネジによる締め付けがない為、ネジの弛みによ
るシール性の低下もなく、確実なシールを行える。更
に、ボディ14と上流側本体17とは部分的に溶融され
る為、溶接後の狂いが殆どなく、同軸度等が保持され
る。そのうえ、上流側本体17の端部(突条17a)と
深穴12内の底部(テーパ面12a)との間を金属製パ
ッキン18でシールし、上流側本体17のフランジ部1
7bと深穴12の開口部との間を溶接によりシールして
いる為、嵌め合い部や突き当て部があっても、この部分
がガス溜まりになると云うこともない。
In the fluid control valve using the sealing method of the present invention, the metal packing 18 for sealing is clamped between the body 14 and the upstream main body 17 by utilizing shrinkage deformation caused by welding. Parts (bolts, etc.) for tightening the packing 18 and the like are unnecessary, the number of parts can be reduced, cost can be reduced, and the valve itself can be downsized. Further, since there is no tightening with screws, the sealing performance does not deteriorate due to loosening of screws, and reliable sealing can be performed. Further, since the body 14 and the upstream main body 17 are partially melted, there is almost no deviation after welding, and the coaxiality and the like are maintained. In addition, the metal packing 18 seals between the end (protrusion 17a) of the upstream main body 17 and the bottom (tapered surface 12a) in the deep hole 12, and the flange 1 of the upstream main body 17 is sealed.
Since the gap between 7b and the opening of the deep hole 12 is sealed by welding, even if there is a fitting portion or an abutting portion, this portion does not become a gas reservoir.

【0023】[0023]

【発明の効果】上述の通り、請求項1に記載の発明で
は、板状の金属製シール材をこれを収容する金属製部材
で挾持し、金属製部材の金属製シール材が熱の影響を受
けない個所で且つ溶接による収縮方向が金属製シール材
の挾持方向と同一になるような個所を溶接し、溶接によ
る金属製部材の収縮変形を利用して金属製シール材を気
密状に挾圧保持するようにしている。その結果、次のよ
うな効果を奏することができる。 (1)金属製シール材をナットやボルト等で締め付ける
従来の方法に比較して、部品点数が削減してコスト低減
を図れると共に、製品自体の小型化を図れる。 (2)ナットやボルト等を使用していない為、ネジの弛
みによるシール性の低下がなく、シールを確実に行え
る。然も、製品が不用意に分解されると云うこともな
い。 (3)錆の発生等を防止する為にネジ部に油を使用する
こともなく、油が流路内に混入して管路が汚損されると
云う問題もない。 (4)溶接による収縮変形力を利用してシール材を締め
付けるようにしている為、溶接ができない材質の金属製
シール材も使用でき、至極便利である。 (5)金属製部材を溶接する個所は、金属製シール材が
熱の影響を受けない個所を溶接している為、金属製シー
ル材が熱によって変形したり、組成が変化したりすると
云うこともない。 (6)金属製シール材が熱の影響を受けないように溶接
部分の肉厚を厚くしている為、耐圧性や強度が不足する
と云うこともない。 (7)溶接条件や溶接部の寸法・形状等によって溶接に
よる金属製部材の収縮変形力を変えることができる。そ
の結果、適宜の締め付け力で金属製シール材を挾圧保持
することができ、至極便利である。 (8)金属製部材同志は部分的に溶融される為、溶接後
の狂いが殆どなく、同軸度等が保持される。
As described above, according to the first aspect of the present invention, the plate-shaped metal sealing material is held by the metal member that accommodates it, and the metal sealing material of the metal member prevents the influence of heat. Weld locations that are not received and whose contraction direction due to welding is the same as the holding direction of the metal seal material, and compress the metal seal material in an airtight manner by utilizing the contractive deformation of the metal member due to welding. I try to hold it. As a result, the following effects can be obtained. (1) Compared with the conventional method of tightening a metal sealing material with nuts, bolts, etc., the number of parts can be reduced, cost can be reduced, and the product itself can be miniaturized. (2) Since no nuts or bolts are used, the sealing performance does not deteriorate due to loosening of the screw, and the sealing can be reliably performed. However, it does not mean that the product is disassembled carelessly. (3) No oil is used in the threaded portion to prevent rusting and the like, and there is no problem that oil is mixed into the flow path and the pipeline is contaminated. (4) Since the sealing material is tightened by utilizing the shrinkage deformation force due to welding, a metallic sealing material that cannot be welded can be used, which is extremely convenient. (5) Since the metal seal material is welded at a location where the metal seal material is not affected by heat, the metal seal material may be deformed by heat or its composition may change. Nor. (6) Since the thickness of the welded portion is increased so that the metal sealing material is not affected by heat, it cannot be said that the pressure resistance and strength are insufficient. (7) The shrinkage and deformation force of the metal member due to welding can be changed depending on the welding conditions and the size and shape of the welded portion. As a result, it is possible to hold the metal sealing material with a proper tightening force, which is extremely convenient. (8) Since the metal members are partially melted, there is almost no deviation after welding, and the coaxiality and the like are maintained.

【0024】又、請求項2に記載の発明では、上記効果
に加えて、更に次のような効果を奏し得る。即ち、請求
項2の発明では、金属製シール材を一方の金属製部材に
形成したテーパ面と他方の金属製部材に形成した突条と
で挾持するようにしている為、より高い気密性の確保が
可能となる。その結果、取り扱い流体が高圧であって
も、流体が漏洩し難く、シール性に極めて優れている。
Further, in the invention described in claim 2, in addition to the above effects, the following effects can be further obtained. That is, in the invention of claim 2, since the metal sealing material is sandwiched between the tapered surface formed on one metal member and the ridge formed on the other metal member, a higher airtightness is obtained. It becomes possible to secure. As a result, even if the fluid to be handled has a high pressure, the fluid is unlikely to leak and the sealing property is extremely excellent.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のシール方法を用いたライン逆止弁の拡
大縦断面図である。
FIG. 1 is an enlarged vertical sectional view of a line check valve using a sealing method of the present invention.

【図2】図1のA部の拡大詳細図である。FIG. 2 is an enlarged detailed view of a portion A of FIG.

【図3】本発明のシール方法を用いたダイヤフラム型流
体制御弁の拡大縦断面図である。
FIG. 3 is an enlarged vertical sectional view of a diaphragm type fluid control valve using the sealing method of the present invention.

【図4】図3のB部の拡大詳細図である。FIG. 4 is an enlarged detailed view of a B part in FIG.

【図5】従来のシール方法を用いたライン逆止弁の拡大
縦断面図である。
FIG. 5 is an enlarged vertical cross-sectional view of a line check valve using a conventional sealing method.

【図6】従来のシール方法を用いた流体制御弁の拡大縦
断面図である。
FIG. 6 is an enlarged vertical sectional view of a fluid control valve using a conventional sealing method.

【符号の説明】[Explanation of symbols]

1は上流側本体、1aは突条、2は下流側本体、2aは
テーパ面、5は金属製ダイヤフラム、12aはテーパ
面、14はボディ、17は上流側本体、17aは突条、
18は金属製パッキン
1 is an upstream main body, 1a is a ridge, 2 is a downstream main body, 2a is a tapered surface, 5 is a metal diaphragm, 12a is a tapered surface, 14 is a body, 17 is an upstream main body, 17a is a ridge,
18 is a metal packing

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 板状の金属製シール材を一対の金属製部
材間に収容して両金属製部材で挾持し、両金属製部材の
金属製シール材が熱による影響を受けない個所で且つ溶
接による収縮方向が金属製シール材を挾持する方向と同
一になるような個所を溶接し、溶接による金属製部材の
収縮変形を利用して前記金属製シール材を両金属製部材
で気密状に挾圧保持するようにしたことを特徴とする金
属製シール材のシール方法。
1. A plate-shaped metal seal member is housed between a pair of metal members and held by both metal members, and the metal seal members of both metal members are not affected by heat. Weld the parts so that the shrinking direction by welding is the same as the direction in which the metal sealing material is held, and use the shrinking deformation of the metal member by welding to make the metal sealing material airtight with both metal members. A method for sealing a metal sealing material, characterized in that the pressure is maintained.
【請求項2】 金属製シール材を、一方の金属製部材に
形成したテーパ面と他方の金属製部材に形成した突条と
で挾圧保持するようにした請求項1に記載の金属製シー
ル材のシール方法。
2. The metal seal according to claim 1, wherein the metal seal material is sandwiched and held by a tapered surface formed on one metal member and a ridge formed on the other metal member. How to seal the material.
JP32245993A 1993-12-21 1993-12-21 Sealing method of metal member constituting fluid equipment using metal sealing material Expired - Fee Related JP3334983B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32245993A JP3334983B2 (en) 1993-12-21 1993-12-21 Sealing method of metal member constituting fluid equipment using metal sealing material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32245993A JP3334983B2 (en) 1993-12-21 1993-12-21 Sealing method of metal member constituting fluid equipment using metal sealing material

Publications (2)

Publication Number Publication Date
JPH07174232A true JPH07174232A (en) 1995-07-11
JP3334983B2 JP3334983B2 (en) 2002-10-15

Family

ID=18143896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32245993A Expired - Fee Related JP3334983B2 (en) 1993-12-21 1993-12-21 Sealing method of metal member constituting fluid equipment using metal sealing material

Country Status (1)

Country Link
JP (1) JP3334983B2 (en)

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WO2017038274A1 (en) * 2015-08-28 2017-03-09 株式会社フジキン Pipe joint, fluid control equipment, fluid control device and semiconductor manufacturing device, and pipe joint manufacturing method
WO2018131198A1 (en) * 2017-01-11 2018-07-19 日立オートモティブシステムズ株式会社 Fuel injection valve and method for manufacturing fuel injection valve

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JPWO2014196240A1 (en) * 2013-06-06 2017-02-23 日立オートモティブシステムズ株式会社 Electromagnetic fuel injection valve
WO2017038274A1 (en) * 2015-08-28 2017-03-09 株式会社フジキン Pipe joint, fluid control equipment, fluid control device and semiconductor manufacturing device, and pipe joint manufacturing method
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