JPH07169422A - X-ray tube - Google Patents
X-ray tubeInfo
- Publication number
- JPH07169422A JPH07169422A JP31340793A JP31340793A JPH07169422A JP H07169422 A JPH07169422 A JP H07169422A JP 31340793 A JP31340793 A JP 31340793A JP 31340793 A JP31340793 A JP 31340793A JP H07169422 A JPH07169422 A JP H07169422A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- target piece
- ray tube
- ray
- anode target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明はＸ線管に係わり、特に
その陽極基体の材質の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray tube, and more particularly to improvement of the material of its anode substrate.
【０００２】[0002]
【従来の技術】従来、固定陽極形Ｘ線管は図２に示すよ
うに構成され、ガラス等の絶縁体からなる真空外囲器１
内に陰極構体２と陽極構体３とが対向して配設されてい
る。陰極構体２には陰極フィラメント４が設けられ、陽
極構体３は陽極基体５の傾斜面に陽極タ−ゲット片６が
埋設されてなっている。この陽極タ−ゲット片６に対応
して、真空外囲器１にはＸ線放射窓７が封着されてい
る。2. Description of the Related Art Conventionally, a fixed anode X-ray tube is constructed as shown in FIG. 2 and is a vacuum envelope 1 made of an insulating material such as glass.
A cathode assembly 2 and an anode assembly 3 are arranged inside to face each other. The cathode assembly 2 is provided with a cathode filament 4, and the anode assembly 3 is formed by embedding an anode target piece 6 on an inclined surface of an anode substrate 5. Corresponding to this anode target piece 6, an X-ray radiation window 7 is sealed in the vacuum envelope 1.
【０００３】動作時には、陰極フィラメント４より放出
された電子ビ−ムが電界により加速され、陽極タ−ゲッ
ト片６上に集束させつつ衝突させてＸ線を発生させる。
そして、このＸ線を出来るだけ減衰させないように、Ｘ
線放射窓７から取り出している。During operation, the electron beam emitted from the cathode filament 4 is accelerated by the electric field and focused on the anode target piece 6 to collide with it to generate X-rays.
Then, in order not to attenuate this X-ray as much as possible, X
It is taken out from the line emission window 7.
【０００４】ところで陽極タ−ゲット片６の材質は、特
に必要とする場合を除き、Ｘ線の発生効率が良いこと、
高融点であること等の理由から主としてタングステンが
用いられる。しかしながら、タングステンは熱伝導率が
０．４ｃａｌ／ｃｍ・ｓｅｃ・ｄｅｇ（＝１６７ｗ／ｍ
・ｄｅｇ）と余り良くないため、比較的、熱伝導率が良
く（０．９４ｃａｌ／ｃｍ・ｓｅｃ・ｄｅｇ）入手が容
易な銅を接合し、タングステン表面が高温になり溶解す
るのを防止している。By the way, the material of the anode target piece 6 has a good X-ray generation efficiency unless otherwise required.
Tungsten is mainly used because of its high melting point. However, tungsten has a thermal conductivity of 0.4 cal / cm · sec · deg (= 167 w / m)
・ Because it is not so good, it has relatively good thermal conductivity (0.94cal / cm ・ sec ・ deg) and is easy to obtain. It joins copper and prevents the tungsten surface from becoming hot and melting. There is.
【０００５】一方、Ｘ線源は出来るだけ小さいほうがＸ
線像が鮮明になり、使用上好ましいが、入力エネルギの
９９％以上が熱エネルギに変換されることから、Ｘ線源
の寸法は入力エネルギに制限されて、或る限度以上は小
さくすることが出来ない。従って、入力エネルギとＸ線
源の寸法は使用目的に応じ最適な組み合わせのものが選
べるように多種製造されている。On the other hand, the X-ray source is preferably as small as possible.
Although the X-ray image becomes clear and preferable for use, since 99% or more of the input energy is converted into thermal energy, the size of the X-ray source is limited to the input energy, and it is possible to reduce the size beyond a certain limit. Can not. Therefore, various types of input energy and X-ray source dimensions are manufactured so that an optimum combination can be selected according to the purpose of use.
【０００６】[0006]
【発明が解決しようとする課題】以上説明した従来技術
によると、次のような不都合がある。一般にＸ線強度は
大で焦点寸法は出来るだけ小さいものが当然要求される
が、焦点面の温度が上昇するため、或る限度以上の強度
で小焦点のものは実現出来なかった。又、焦点寸法を小
さくすることは、電子銃より放出された電子の軌道を陽
極タ−ゲット表面で集束するように陰極の電子レンズの
形状を決めるが、或る程度（０．１ｍｍ）以下に小さく
絞り込むのは困難であった。又、管電圧，管電流等の条
件を変えることにより焦点寸法が変化し、使用上の制限
もあった。更に、小さく絞り込むためには多極構造とな
り、陰極構体２が複雑となる。この発明は、陽極タ−ゲ
ット片の必要とする焦点寸法と形状が容易に得られ、且
つ従来より高Ｘ線出力エネルギのＸ線管を提供すること
を目的とする。According to the conventional technique described above, there are the following inconveniences. In general, it is naturally required that the X-ray intensity be large and the focal point size be as small as possible. However, since the temperature of the focal plane rises, it was not possible to realize a small focal point with an intensity exceeding a certain limit. Also, reducing the focal point size determines the shape of the electron lens of the cathode so that the trajectory of the electrons emitted from the electron gun is focused on the surface of the anode target, but to a certain extent (0.1 mm) or less. It was difficult to narrow it down. Further, the focal point size is changed by changing the conditions such as the tube voltage and the tube current, and there is a limitation in use. Furthermore, in order to narrow down to a small size, it has a multi-pole structure, and the cathode structure 2 becomes complicated. An object of the present invention is to provide an X-ray tube having a higher X-ray output energy than the conventional one, which can easily obtain the required focus size and shape of the anode target piece.
【０００７】[0007]
【課題を解決するための手段】この発明は、真空外囲器
内に陰極フィラメントと重金属の陽極タ−ゲット片とが
対向配設され、陽極タ−ゲット片が陽極基体に支持され
てなるＸ線管において、陽極基体は合成ダイヤモンドか
らなるＸ線管である。According to the present invention, a cathode filament and a heavy metal anode target piece are disposed in opposition to each other in a vacuum envelope, and the anode target piece is supported on an anode substrate. In the X-ray tube, the anode substrate is an X-ray tube made of synthetic diamond.
【０００８】[0008]
【作用】この発明によれば、陽極基体の表面に必要とす
る焦点寸法，形状のタ−ゲット片を接合しておくことに
より、容易に所定寸法・形状の微小焦点が得られる。According to the present invention, a micro focus having a predetermined size and shape can be easily obtained by joining a target piece having a required focus size and shape to the surface of the anode substrate.
【０００９】[0009]
【実施例】以下、図面を参照して、この発明の一実施例
を詳細に説明する。この発明による固定陽極形のＸ線管
の要部は、図１に示すように構成され、従来例（図２）
と同一箇所は同一符号で示すと、図示しない真空外囲器
内には陰極構体２と陽極構体８が対向して配設されてい
る。そして、陰極構体２には陰極フィラメント４が設け
られ、陽極構体８は陽極基体９に陽極タ−ゲット片６が
埋設されてなっている。この場合、陽極基体９は合成ダ
イヤモンドからなっており、この発明の特徴となってい
る。この陽極基体９に高融点重金属であるタングステン
によって必要とする焦点寸法形状に形成された陽極タ−
ゲット片６が埋設されている。更に、合成ダイヤモンド
は絶縁物ゆえ、陽極タ−ゲット片６に電圧を印加するた
めのリ−ド線１０が陽極基体９に貫通埋設され、陽極タ
−ゲット片６に接続されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. The main part of the fixed anode type X-ray tube according to the present invention is constructed as shown in FIG.
When the same parts are denoted by the same reference numerals, the cathode structure 2 and the anode structure 8 are arranged to face each other in a vacuum envelope (not shown). The cathode assembly 2 is provided with a cathode filament 4, and the anode assembly 8 is formed by embedding an anode target piece 6 in an anode substrate 9. In this case, the anode substrate 9 is made of synthetic diamond, which is a feature of the present invention. An anode target formed on the anode substrate 9 by using tungsten, which is a heavy metal having a high melting point, in a required focal dimension.
The get piece 6 is buried. Further, since the synthetic diamond is an insulator, a lead wire 10 for applying a voltage to the anode target piece 6 is embedded in the anode base body 9 and connected to the anode target piece 6.
【００１０】或いは、上記のリ−ド線１０を設ける代り
に、陽極基体９の表面にＸ線を殆ど発生しない導電材料
の被膜を、幅狭く形成して導電リ−ドとしても良い。
尚、上記以外は従来例（図２）と同様構成ゆえ、詳細な
説明を省略する。Alternatively, instead of providing the lead wire 10 described above, a conductive material film that hardly generates X-rays may be formed on the surface of the anode substrate 9 to have a narrow width to form a conductive lead.
Since the configuration other than the above is the same as that of the conventional example (FIG. 2), detailed description will be omitted.
【００１１】このような構造のＸ線管によれば、必要と
する焦点寸法（特に微小焦点）を容易に形成することが
出来る。その結果、従来のような集束電極等は不要とな
り、管電流，管電圧の影響を全く受けることなく、安定
した焦点寸法を得ることが出来る。According to the X-ray tube having such a structure, it is possible to easily form a required focus size (in particular, a fine focus). As a result, a focusing electrode or the like as in the prior art is unnecessary, and a stable focus size can be obtained without being affected by the tube current and the tube voltage.
【００１２】即ち、動作時には陰極フィラメント４より
放出された電子１１は、正の高電圧が印加されている陽
極タ−ゲット片６に選択的に衝突する。この陽極タ−ゲ
ット片６の形状は必要とする焦点寸法形状に作っておく
だけで容易に焦点を形成することが出来る。そして、合
成ダイヤモンドは絶縁物（１０16Ω・ｃｍ）であるが、
熱伝導率は高い（５．０ｃａｌ／ｃｍ・ｓｅｃ１・ｄｅ
ｇ＝Ｃｕの約５倍）ため、陽極タ−ゲット片６から発生
した熱は合成ダイヤモンドの伝導により放熱される。
又、陽極タ−ゲット片６を外れ陽極基体９に衝突した電
子は、陽極タ−ゲット片６に比べＸ線発生効率は十分低
いため、実使用上は問題はない。That is, during operation, the electrons 11 emitted from the cathode filament 4 selectively collide with the anode target piece 6 to which a positive high voltage is applied. The shape of the anode target piece 6 can be easily formed by forming the shape of the required focus size. And synthetic diamond is an insulator (10 16 Ω · cm),
High thermal conductivity (5.0 cal / cm ・ sec1 ・ de
Since g = about 5 times Cu), the heat generated from the anode target piece 6 is radiated by conduction of synthetic diamond.
Further, since the electrons that have come off the anode target piece 6 and collide with the anode substrate 9 have a sufficiently lower X-ray generation efficiency than the anode target piece 6, there is no problem in actual use.
【００１３】[0013]
【発明の効果】この発明によれば、陽極基体が合成ダイ
ヤモンドからなっているので、この陽極基体の表面に必
要とする焦点寸法，形状のタ−ゲット片を接合しておく
ことにより、容易に所定寸法・形状の微小焦点を有する
Ｘ線管を提供することが出来る。According to the present invention, since the anode substrate is made of synthetic diamond, it is easy to bond the target piece having the required focal length and shape to the surface of the anode substrate. It is possible to provide an X-ray tube having a micro focus of a predetermined size and shape.
【図１】この発明の一実施例に係るＸ線管の要部を示す
断面図。FIG. 1 is a sectional view showing a main part of an X-ray tube according to an embodiment of the present invention.
【図２】従来のＸ線管を示す断面図。FIG. 2 is a cross-sectional view showing a conventional X-ray tube.
１…真空外囲器、２…陰極構体、３…陽極構体、４…陰
極フィラメント、５…陽極基体、６…陽極タ−ゲット
片、７…Ｘ線放射窓、８…陽極構体、９…陽極基体、１
０…リ−ド線。DESCRIPTION OF SYMBOLS 1 ... Vacuum envelope, 2 ... Cathode structure, 3 ... Anode structure, 4 ... Cathode filament, 5 ... Anode substrate, 6 ... Anode target piece, 7 ... X-ray radiation window, 8 ... Anode structure, 9 ... Anode Base, 1
0 ... lead line.
Claims (1)
属の陽極タ−ゲット片とが対向配設され、該陽極タ−ゲ
ット片が陽極基体に支持されてなるＸ線管において、 上記陽極基体は合成ダイヤモンドからなることを特徴と
するＸ線管。1. An X-ray tube in which a cathode filament and an anode target piece made of a heavy metal are arranged to face each other in a vacuum envelope, and the anode target piece is supported by an anode base. Is an X-ray tube characterized by being made of synthetic diamond.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31340793A JPH07169422A (en) | 1993-12-14 | 1993-12-14 | X-ray tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31340793A JPH07169422A (en) | 1993-12-14 | 1993-12-14 | X-ray tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07169422A true JPH07169422A (en) | 1995-07-04 |
Family
ID=18040910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31340793A Pending JPH07169422A (en) | 1993-12-14 | 1993-12-14 | X-ray tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07169422A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011071101A (en) * | 2009-08-31 | 2011-04-07 | Hamamatsu Photonics Kk | X-ray generator |
| KR20140066734A (en) | 2011-08-31 | 2014-06-02 | 캐논 가부시끼가이샤 | Target structure and x-ray generating apparatus |
| CN113571396A (en) * | 2021-07-12 | 2021-10-29 | 无锡日联科技股份有限公司 | Target window separation double-vacuum-chamber transmission X-ray tube |
-
1993
- 1993-12-14 JP JP31340793A patent/JPH07169422A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011071101A (en) * | 2009-08-31 | 2011-04-07 | Hamamatsu Photonics Kk | X-ray generator |
| KR20140066734A (en) | 2011-08-31 | 2014-06-02 | 캐논 가부시끼가이샤 | Target structure and x-ray generating apparatus |
| US9524846B2 (en) | 2011-08-31 | 2016-12-20 | Canon Kabushiki Kaisha | Target structure and X-ray generating apparatus |
| CN113571396A (en) * | 2021-07-12 | 2021-10-29 | 无锡日联科技股份有限公司 | Target window separation double-vacuum-chamber transmission X-ray tube |
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