JPH07151738A - Handy method and device for measuring simple environment atmosphere - Google Patents
Handy method and device for measuring simple environment atmosphereInfo
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- JPH07151738A JPH07151738A JP5296909A JP29690993A JPH07151738A JP H07151738 A JPH07151738 A JP H07151738A JP 5296909 A JP5296909 A JP 5296909A JP 29690993 A JP29690993 A JP 29690993A JP H07151738 A JPH07151738 A JP H07151738A
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- test piece
- gas
- thin film
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- environment
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- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Sampling And Sample Adjustment (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
- Gas Separation By Absorption (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は簡易環境雰囲気測定方法
および装置に係る。本発明は、大気中に存在するＳＯ
ｘ，ＮＯｘ，Ｈ2 Ｓ，Ｃｌ系ガス、湿度としての水蒸気
等の腐食性ガスを捕集し、その量を分析する方法に関す
る。近年、環境中に存在しているこれらのガスが問題に
なっており、コンピュータ等の精密電子機器を故障させ
る例がたびたび発生している。従って、コンピュータを
設置しようとする場所に存在している腐食性ガスを測定
する必要があり、得られた結果を元に対策を施す必要が
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a simple environmental atmosphere measuring method and apparatus. The present invention relates to SO existing in the atmosphere.
The present invention relates to a method of collecting a corrosive gas such as x, NOx, H 2 S, Cl-based gas and water vapor as humidity and analyzing the amount thereof. In recent years, these gases existing in the environment have become a problem, and cases in which precision electronic devices such as computers are broken often occur. Therefore, it is necessary to measure the corrosive gas existing in the place where the computer is to be installed, and it is necessary to take measures based on the obtained result.
【０００２】[0002]
【従来の技術】従来は、金属試験片やセラミックス試験
片を環境中に所定期間放置し、該試験片に吸着ないし吸
収されたガスを定量分析して該環境雰囲気中のガスを検
定していた。これは、特定のガスが特定の金属、セラミ
ックスに吸着、吸収して腐食生成物を生成することに着
目したものである。例えばＡｇを用いることでＨ2 Ｓを
検知でき、ＦｅＮｉを使えばＳＯ2 が検知できる。2. Description of the Related Art Conventionally, a metal test piece or a ceramic test piece is left in the environment for a predetermined period of time, and the gas adsorbed or absorbed by the test piece is quantitatively analyzed to verify the gas in the environment atmosphere. . This focuses on the fact that a specific gas is adsorbed and absorbed by a specific metal or ceramic to generate a corrosion product. For example, H 2 S can be detected by using Ag, and SO 2 can be detected by using FeNi.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記の試験片
は、環境中の湿度が５０％ＲＨ以下になると、ガスの吸
着、吸収能力が低下するという問題があった。図２にそ
の例を示す（ＩＴＯなし）。これは、疑似環境雰囲気に
Ａｇ試験片を放置し、１０ppm の硫化水素と水蒸気を混
合して導入し、一カ月間放置した。放置後、Ａｇ中に発
生した腐食生成物（Ａｇ2 Ｓ）中のＳ強度を、蛍光Ｘ線
分析により測定した。However, the above-mentioned test piece has a problem that when the environmental humidity is 50% RH or less, the adsorption and absorption ability of gas is lowered. The example is shown in FIG. 2 (without ITO). For this, an Ag test piece was left in a pseudo-environment, 10 ppm hydrogen sulfide and water vapor were mixed and introduced, and left for one month. After standing, the S intensity in the corrosion product (Ag 2 S) generated in Ag was measured by fluorescent X-ray analysis.
【０００４】その結果、環境湿度が５０％湿度以下にな
ると、Ｓ強度が急激に低下することがわかる。一般に大
気腐食は、環境中に存在している水蒸気が金属に吸着し
て水の膜を作り、腐食性ガスはこの水の膜に溶解し、金
属と電気化学反応を起こして腐食を起こすと解釈されて
いる。従って、従来の方法は、環境中の湿度を同時に測
定しないと、ガスの量を正確に測定できないという欠点
があった。As a result, it can be seen that when the environmental humidity is 50% or less, the S intensity drops sharply. In general, atmospheric corrosion is understood to be that water vapor existing in the environment is adsorbed by metal to form a water film, and corrosive gas dissolves in the water film, causing an electrochemical reaction with the metal to cause corrosion. Has been done. Therefore, the conventional method has a drawback that the amount of gas cannot be accurately measured unless the humidity in the environment is measured at the same time.
【０００５】そこで、本発明は、低湿度環境下におい
て、強制的に水蒸気を吸着させる材料を試験片に被服す
ることで、高湿度環境下と同等のガス捕集能力を得るこ
とを目的とする。In view of the above, the present invention has an object to obtain a gas trapping ability equivalent to that in a high humidity environment by coating a test piece with a material for forcibly adsorbing water vapor in a low humidity environment. .
【０００６】[0006]
【課題を解決するための手段】本発明は、試験片の表面
に低湿度でも吸水性の高い材料、具体的には、酸化イン
ジウムおよび／又は酸化スズからなる材料、特に酸化イ
ンジウムスズ（ＩＴＯ）の薄膜を設けることによって、
上記目的を達成することができた。高吸水性の薄膜が試
験片の表面に水分を保持することによって環境雰囲気中
のガスが薄膜中の水に溶解し、試験片に吸着、吸収され
るようになると考えられる。DISCLOSURE OF THE INVENTION The present invention is directed to a material having a high water absorbency on the surface of a test piece even at low humidity, specifically, a material composed of indium oxide and / or tin oxide, particularly indium tin oxide (ITO). By providing a thin film of
The above objective was achieved. It is considered that the highly water-absorbent thin film retains water on the surface of the test piece, whereby the gas in the environmental atmosphere is dissolved in the water in the thin film and is absorbed and absorbed by the test piece.
【０００７】こうして、本発明は、金属又はセラミック
ス又は金属塩試験片を測定すべき環境雰囲気中に置き、
所定時間経過後、該特定のガスを吸着又は吸収した試験
片にもとづいて該環境雰囲気中の特定のガスを検定する
方法において、試験片の表面に酸化インジウムおよび／
または酸化スズからなる薄膜を形成した試験片を用いる
ことを特徴とする簡易環境雰囲気測定方法を提供する。
特定のガスを吸着又は吸収した試験片の検定は、特定の
ガスを定量分析するが、試験片の外観（色など）変化の
観察にもとづいてもよい。なお、ガスの吸着又は吸収は
物理的な吸着、吸収のみならず、化学的反応にもとづく
吸着又は吸収を含むものである。Thus, the present invention places the metal or ceramics or metal salt test piece in the ambient atmosphere to be measured,
In a method of assaying a specific gas in the environmental atmosphere based on a test piece that has adsorbed or absorbed the specific gas after a predetermined time has passed, indium oxide and / or
Alternatively, there is provided a simple environmental atmosphere measuring method characterized by using a test piece on which a thin film made of tin oxide is formed.
The assay of the test piece that adsorbs or absorbs the specific gas quantitatively analyzes the specific gas, but may be based on observation of a change in the appearance (color or the like) of the test piece. The adsorption or absorption of gas includes not only physical adsorption or absorption but also adsorption or absorption based on a chemical reaction.
【０００８】また、本発明によれば、この測定方法に用
いる金属又はセラミックス又は金属塩試験片の表面に酸
化インジウムおよび／または酸化スズからなる薄膜を有
する試験片も提供する。本発明の目的に用いる金属、セ
ラミックス又は金属塩の試験片は、これまでに本出願人
らが開示してきたものをそのまま使用できる。According to the present invention, there is also provided a test piece having a thin film made of indium oxide and / or tin oxide on the surface of the metal or ceramics or metal salt test piece used in this measuring method. As the test piece of metal, ceramics or metal salt used for the purpose of the present invention, those disclosed by the present applicants can be used as they are.
【０００９】具体的には、銅（Ｃｌ系ガス），Ａｇ（Ｈ
2 Ｓ），Ａｌ（Ｃｌ系ガス），Ｆｅ（湿度），ＦｅＮｉ
（ＳＯ2 ），Ｓｎ（ＳＯ2 ），Ｐｂ（ＳＯ2 ），Ａｕ
（ＳＯ 2 ，ＮＯ2 ），Ｚｎ（ＮＯ2 ），Ｃｕ−Ｚｎ（Ｎ
Ｏx ）などの金属、ＳｉＯ2 −Ａｌ2 Ｏ3 （ＮＯ2 ），
ＹＢａ2 Ｃｕ3 Ｏｙ（ＮＯ2 ），Ｃｒ2 Ｏ3 （Ｎ
Ｏ2 ），Ｆｅ2 Ｏ3 （ＮＯ2 ），Ｃｏ2 Ｏ3 （Ｎ
Ｏ2 ），ＳｎＯ2 （Ｈ2 Ｏ，ＳＯ2 ），Ａｌ2 Ｏ3 （Ｓ
Ｏ2 ）などのセラミックス、ＣｕＣｌ（ＳＯ2 ），Ａｇ
Ｃｌ（ＳＯ2 ）などの金属塩を挙げることができる。Specifically, copper (Cl-based gas), Ag (H
2S), Al (Cl-based gas), Fe (humidity), FeNi
(SO2), Sn (SO2), Pb (SO2), Au
(SO 2, NO2), Zn (NO2), Cu-Zn (N
Ox) And other metals, SiO2-Al2O3(NO2),
YBa2Cu3Oy (NO2), Cr2O3(N
O2), Fe2O3(NO2), Co2O3(N
O2), SnO2(H2O, SO2), Al2O3(S
O2) And other ceramics, CuCl (SO2), Ag
Cl (SO2) And other metal salts.
【００１０】ＮＯx ，ＣＯ2 用には多孔質又は微粒状の
試験片が好適で、またＮＯX にはＣｕ−Ｚｎを圧延して
内部応力を付加したものが好適である。また、表面を砥
石などで粗し、０．１μｍ程度の表面粗さをつけること
で、ガスと金属の接触面積が増え、反応促進に有効であ
ることがわかっている。（詳細は特開昭６３−３０５２
３２号、特願平０５−４４１２５号、同０５−１０４５
２４号、同０４−２１７０６９号、同０４−４６８９７
号、同５−１０４５２４号、同０３−９４０６２号など
参照）。Porous or finely divided test pieces are suitable for NO x and CO 2 , and those for which internal stress is added by rolling Cu--Zn are suitable for NO x . Further, it has been known that by roughening the surface with a grindstone or the like to provide a surface roughness of about 0.1 μm, the contact area between the gas and the metal is increased, and it is effective for promoting the reaction. (For details, see JP-A-63-3052.
No. 32, Japanese Patent Application Nos. 05-44125 and 05-1045
No. 24, No. 04-217069, No. 04-46897.
No. 5-104524, No. 03-94062, etc.).
【００１１】Ｉｎ酸化物、Ｓｎ酸化物はいずれも低湿度
下でも高吸水性であり、特に透明導電膜として知られる
ＩＴＯは吸水性が高い。これらの製膜は公知の方法、例
えば、真空蒸着、スパッタなどによることができる。薄
膜の厚さは５００Å以下が好ましい。厚みが大きすぎる
とガスの透過性が低下して好ましくないからである。Both In oxide and Sn oxide have high water absorbency even under low humidity, and particularly ITO known as a transparent conductive film has high water absorbency. These films can be formed by a known method such as vacuum deposition or sputtering. The thickness of the thin film is preferably 500 Å or less. This is because if the thickness is too large, the gas permeability decreases, which is not preferable.
【００１２】この様な試験片を用いて環境雰囲気を測定
する方法は、他に開示した態様によることができる。例
えば、通気性の透明容器に入れる、屋外では傘を付け
る、強制送風して加速試験する、ＸＰＳで定量測定す
る、などである。また、試験片の外観、特に腐食による
色の変化を予め調べておき、色見本を作成しておくと、
所定期間後、試験片を色見本と比較するだけで簡易に環
境中の特定ガスの濃度の大略を知ることができる。The method for measuring the environmental atmosphere using such a test piece can be according to the other disclosed embodiments. For example, it is put in a breathable transparent container, attached with an umbrella outdoors, forcedly blown to carry out an accelerated test, and quantitatively measured by XPS. In addition, if you examine the appearance of the test piece, especially the change in color due to corrosion, and create a color sample,
After a predetermined period of time, it is possible to easily know the approximate concentration of the specific gas in the environment simply by comparing the test piece with the color sample.
【００１３】[0013]
【作用】吸水性の薄膜が低湿度下でも吸水して薄膜中に
水分を保持するので、環境雰囲気中のガスが容易にその
水に溶解して試験片に吸着、吸収されるようになり、低
湿度下でも正確なガス濃度の容易な測定が可能になる。[Function] Since the water-absorbing thin film absorbs water even under low humidity and retains moisture in the thin film, the gas in the environmental atmosphere can be easily dissolved in the water and absorbed and absorbed in the test piece. It enables accurate and easy measurement of gas concentration even in low humidity.
【００１４】[0014]
【実施例】実施例１ 温泉地帯では、数十〜数百ppb のＨ2 Ｓが発生してい
る。このような環境で使用されている電子機器、例えば
温泉に隣接する旅館等で使用されている電子機器は、Ｈ
2 Ｓの被害を受けて故障することがたびたびある。 Example 1 In the hot spring area, H 2 S of tens to hundreds of ppb is generated. The electronic devices used in such an environment, for example, the electronic devices used at the inn adjacent to the hot spring, are
It is often to fail in response to the damage of 2 S.
【００１５】しかし、空調設備が十分完備されているよ
うな環境では、湿度は５０％以下に保たれている例が多
く、屋内でＨ2 Ｓが存在していても従来の測定方法では
検出が困難である。そこで、図１に示すように、Ｈ2 Ｓ
と反応性の高いＡｇ基板１の表面に、真空製膜によりＩ
ＴＯの薄膜２を５Å堆積させた。However, in an environment where the air conditioning equipment is fully equipped, the humidity is often kept at 50% or less, and even if H 2 S exists indoors, it cannot be detected by the conventional measuring method. Have difficulty. Therefore, as shown in FIG. 1, H 2 S
On the surface of Ag substrate 1 which has high reactivity with
A thin film 2 of TO was deposited in an amount of 5Å.
【００１６】この試験片をＨ2 Ｓ５０ppb の疑似環境に
１ヵ月間放置し、放置後、蛍光Ｘ線分析によりＳ強度を
測定した。湿度は、１０％〜９０％の間で１０％おきに
環境を変えて試験をおこなった。この結果を図２に示
す。従来、ＩＴＯを設けていないＡｇ試験片は、湿度が
５０％以下ではＳ強度が急激に低下していることがわか
る。これは、５０％以下ではＡｇ表面に水の膜が形成さ
れないため、腐食しにくくなっているためと思われる。This test piece was left in a simulated environment of H 2 S 50 ppb for 1 month, and after standing, the S intensity was measured by fluorescent X-ray analysis. The humidity was tested between 10% and 90% by changing the environment every 10%. The result is shown in FIG. Conventionally, it can be seen that the Ag strength of the Ag test piece not provided with ITO sharply decreases when the humidity is 50% or less. This is considered to be because when the content is 50% or less, a water film is not formed on the Ag surface, which makes corrosion less likely.
【００１７】一方、ＩＴＯを設けたＡｇの試験片は、低
湿度でもＩＴＯが水分を吸水するため、Ｓ強度の低下は
ほとんど見られない。ＩＴＯの腐食に対する膜厚依存性
を調べた。図４は、Ｈ2 Ｓ５０ppb の疑似環境に１ヵ月
間放置し、ＩＴＯの膜厚を変えたときの結果を示す。こ
の結果、ＩＴＯの膜厚が厚くなるほどＳの検出強度が小
さくなっている。これは、膜厚が厚くなるとＩＴＯがあ
るために、ガスがＡｇに到達できないためと思われる。
上記の結果、ＩＴＯ薄膜の膜厚限界を５００Åとした。On the other hand, in the Ag test piece provided with ITO, since the ITO absorbs water even at low humidity, the S strength is hardly reduced. The film thickness dependence of ITO corrosion was investigated. FIG. 4 shows the results when the film thickness of ITO was changed by leaving it in a simulated environment of H 2 S 50 ppb for 1 month. As a result, the detection intensity of S decreases as the film thickness of ITO increases. This seems to be because the gas cannot reach Ag when the film thickness becomes thick due to the presence of ITO.
As a result of the above, the film thickness limit of the ITO thin film was set to 500Å.
【００１８】実施例２ 砂漠気候やステップ気候など、いわゆる乾燥気候の地域
では、従来の方法では腐食性ガスの検知は困難な場合が
ある。例えば、米国コロラド州ロングモント市内で従来
の方法を用いて屋外環境を測定した。ここでは自動車等
数多く走っているにも関わらず、従来の方法では排ガス
の成分であるＳＯ2 やＮＯ2 は検知されなかった。（Ｓ
Ｏ2 はＦｅＮｉ，ＮＯ 2 はＣｕ−Ｚｎを使用）。[0018]Example 2 Areas with so-called dry climates, such as desert climates and steppe climates
Therefore, it may be difficult to detect corrosive gas by the conventional method.
is there. For example, in Longmont, Colorado, USA
The outdoor environment was measured using the above method. Here cars etc.
Despite a large number of running exhaust gas with the conventional method
Is an ingredient of SO2And NO2Was not detected. (S
O2Is FeNi, NO 2Uses Cu-Zn).
【００１９】図４，５に一週間毎のＳとＮの変化を蛍光
Ｘ線分析により調べた。その結果、従来の方法ではＮ，
Ｓのいずれも、変化はほとんど見られなかった。その原
因として、この地域の湿度は３０〜４０％と低いため、
上述の理由によるものと思われる。そこで、ＦｅＮｉと
Ｃｕ−Ｚｎに５ÅのＩＴＯを製膜した結果、ＳＯ2 の成
分であるＳおよびＮＯ2 の成分であるＮが検出された。4 and 5, changes in S and N every week were examined by fluorescent X-ray analysis. As a result, N,
Almost no change was observed in any of S. As the cause, the humidity in this area is as low as 30-40%,
This is probably due to the above reason. Then, as a result of depositing 5Å ITO on FeNi and Cu-Zn, S which is a component of SO 2 and N which is a component of NO 2 were detected.
【００２０】[0020]
【発明の効果】本発明の方法は、従来低湿度環境で腐食
性ガスの測定が困難であった欠点を、高吸水性薄膜（Ｉ
ＴＯ薄膜）を設けることによって改善した。これによ
り、従来腐食性ガスの測定の信頼性が不十分であった湿
度５０％以下の環境においても、本発明によりガスを検
知することが可能となった。EFFECTS OF THE INVENTION The method of the present invention has the disadvantage that it has been difficult to measure corrosive gas in a low humidity environment, but it has a drawback that
It was improved by providing a TO thin film). As a result, the present invention makes it possible to detect a gas even in an environment with a humidity of 50% or less, where the reliability of conventional corrosive gas measurement was insufficient.
【図１】実施例１のＡｇ／ＩＴＯ試験片を示す。1 shows the Ag / ITO test piece of Example 1. FIG.
【図２】Ａｇ／ＩＴＯ及びＡｇ試験片のＳ吸着量と湿度
との関係を示す。FIG. 2 shows the relationship between the S adsorption amount of Ag / ITO and Ag test pieces and humidity.
【図３】Ａｇ／ＩＴＯ試験片のＳ吸着量とＩＴＯ膜厚の
関係を示す。FIG. 3 shows the relationship between the amount of S adsorbed on an Ag / ITO test piece and the ITO film thickness.
【図４】ＦｅＮｉ／ＩＴＯ及びＦｅＮｉ試験片のＳ吸着
量を示す。FIG. 4 shows the S adsorption amount of FeNi / ITO and FeNi test pieces.
【図５】ＣｕＺｎ／ＩＴＯ及びＣｕＺｎ試験片のＮ吸着
量を示す。FIG. 5 shows the N adsorption amount of CuZn / ITO and CuZn test pieces.
【図６】Ａｇ試験片のＳ吸着量と湿度との関係を示す。FIG. 6 shows the relationship between the S adsorption amount of Ag test pieces and humidity.
１…Ａｇ試験片 ２…ＩＴＯ薄膜 1 ... Ag test piece 2 ... ITO thin film
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 // Ｂ０１Ｄ 53/04 ＺＡＢ Ａ 53/14 ＺＡＢ Ａ Ｇ０１Ｎ 17/00 (72)発明者 中山 正夫 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 (72)発明者 山▲崎▼ 詩織 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification number Internal reference number FI technical display location // B01D 53/04 ZAB A 53/14 ZAB A G01N 17/00 (72) Inventor Masao Nakayama Kanagawa 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Fukuoka Prefecture Fujitsu Limited (72) Inventor Yama ▲ Saki ▼ Shiori 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Fujitsu Limited
Claims (7)
を測定すべき環境雰囲気中に置き、所定時間経過後、該
試験片に吸着または吸収された特定のガスを定量分析し
て該環境雰囲気中の特定のガスを検定する方法におい
て、前記試験片の表面に酸化インジウムおよび／または
酸化スズからなる薄膜を形成した試験片を用いることを
特徴とする簡易環境雰囲気測定方法。1. A metal or ceramics or metal salt test piece is placed in an environment atmosphere to be measured, and after a predetermined time has passed, a specific gas adsorbed or absorbed by the test piece is quantitatively analyzed to determine whether the test piece is in the environment atmosphere. In a method for assaying a specific gas, a simple environmental atmosphere measuring method is characterized in that a test piece in which a thin film made of indium oxide and / or tin oxide is formed on the surface of the test piece is used.
を測定すべき環境雰囲気中に置き、所定時間経過後、該
試験片の色などの外観変化にもとづいて該環境雰囲気中
の腐食性ガスを検定する方法において、前記試験片の表
面に酸化インジウムおよび／または酸化スズからなる薄
膜を形成した試験片を用いることを特徴とする簡易環境
雰囲気測定方法。2. A metal or ceramics or metal salt test piece is placed in an environment atmosphere to be measured, and after a predetermined time has passed, a corrosive gas in the environment atmosphere is checked based on a change in appearance such as color of the test piece. In the method, a test piece having a thin film of indium oxide and / or tin oxide formed on the surface of the test piece is used.
の表面に酸化インジウムおよび／または酸化スズからな
る薄膜を有することを特徴とする簡易環境雰囲気測定用
試験片。3. A test piece for simple environmental atmosphere measurement, comprising a thin film of indium oxide and / or tin oxide on the surface of a metal, ceramics or metal salt test piece.
求項３記載の試験片。4. The test piece according to claim 3, wherein the thin film has a thickness of 500 Å or less.
ｅＮｉ，Ｓｎ，Ｐｂ，Ａｕ，Ｚｎ又はＣｕ−Ｚｎである
請求項３又は４記載の試験片。5. The metal is Cu, Ag, Al, Fe, F
The test piece according to claim 3 or 4, which is eNi, Sn, Pb, Au, Zn or Cu-Zn.
3 ，ＹＢａ2 Ｃｕ3Ｏｙ，Ｃｒ2 Ｏ3 ，Ｆｅ2 Ｏ3 ，Ｃ
ｏ2 Ｏ3 ，ＳｎＯ2 又はＡｌ2 Ｏ3 である請求項３又は
４記載の試験片。6. The ceramic is SiO 2 —Al 2 O
3 , YBa 2 Cu 3 Oy, Cr 2 O 3 , Fe 2 O 3 , C
The test piece according to claim 3 or 4, which is o 2 O 3 , SnO 2 or Al 2 O 3 .
る請求項３又は４記載の試験片。7. The test piece according to claim 3, wherein the metal salt is CuCl or AgCl.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5296909A JPH07151738A (en) | 1993-11-26 | 1993-11-26 | Handy method and device for measuring simple environment atmosphere |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5296909A JPH07151738A (en) | 1993-11-26 | 1993-11-26 | Handy method and device for measuring simple environment atmosphere |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07151738A true JPH07151738A (en) | 1995-06-16 |
Family
ID=17839740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5296909A Withdrawn JPH07151738A (en) | 1993-11-26 | 1993-11-26 | Handy method and device for measuring simple environment atmosphere |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07151738A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015017998A (en) * | 2014-10-30 | 2015-01-29 | シオノギ分析センター株式会社 | Contaminated state checking method for pharmaceuticals |
| JP2020030128A (en) * | 2018-08-23 | 2020-02-27 | 株式会社日立製作所 | Corrosion environment monitoring method and corrosion environment monitoring system |
-
1993
- 1993-11-26 JP JP5296909A patent/JPH07151738A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015017998A (en) * | 2014-10-30 | 2015-01-29 | シオノギ分析センター株式会社 | Contaminated state checking method for pharmaceuticals |
| JP2020030128A (en) * | 2018-08-23 | 2020-02-27 | 株式会社日立製作所 | Corrosion environment monitoring method and corrosion environment monitoring system |
| WO2020039611A1 (en) * | 2018-08-23 | 2020-02-27 | 株式会社日立製作所 | Corrosive environment monitoring method and corrosive environment monitoring system |
| US11460394B2 (en) | 2018-08-23 | 2022-10-04 | Hitachi, Ltd. | Corrosive environment monitoring method and corrosive environment monitoring system |
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| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20010130 |