JPH0713287B2 - Induction plasma spraying equipment - Google Patents
Induction plasma spraying equipmentInfo
- Publication number
- JPH0713287B2 JPH0713287B2 JP3141164A JP14116491A JPH0713287B2 JP H0713287 B2 JPH0713287 B2 JP H0713287B2 JP 3141164 A JP3141164 A JP 3141164A JP 14116491 A JP14116491 A JP 14116491A JP H0713287 B2 JPH0713287 B2 JP H0713287B2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- gas supply
- gas
- sprayed
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Plasma Technology (AREA)
- Coating By Spraying Or Casting (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、誘導結合型プラズマ
内でセラミックスや金属等の粉末を効率よく加熱し、溶
解して噴射でき、主として溶射に使用されるインダクシ
ョンプラズマ溶射装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an induction plasma spraying apparatus mainly used for thermal spraying, which can efficiently heat and melt powders of ceramics, metals, etc. in an inductively coupled plasma, and spray them.
【０００２】[0002]
【従来の技術】従来、インダクションプラズマ溶射装置
としては、図３に示す構造のものが知られている。即
ち、透明石英で形成された外側管１、中間管２、キャリ
アガス導入管３からなる三重構造のトーチに水冷誘導コ
イル４を設けたものである。2. Description of the Related Art Conventionally, an induction plasma spraying apparatus having a structure shown in FIG. 3 is known. That is, a water-cooling induction coil 4 is provided on a torch having a triple structure composed of an outer tube 1, an intermediate tube 2, and a carrier gas introducing tube 3 made of transparent quartz.
【０００３】外側管１は、下端が開口し、上端が中間管
２の上部外周に結合することで閉じられ、その上端部内
に外側ガス供給路５が接線方向に開口している。中間管
２は下端が外側管１の下端よりも上方に位置し、その下
端部外径が拡大形成されていて、外側管１の内周面との
間にガスの速度を増して冷却効率を高めるため環状の約
１ｍｍの小間隙６を形成し、その上端がキャリアガス導
入管３の上部外周に結合することで閉じられ、その上端
部内に中間ガス供給路７が外側ガス供給路５と同じ周方
向に沿うように接線方向に開口している。The outer pipe 1 is closed at its lower end by being connected to the upper outer periphery of the intermediate pipe 2 at its upper end, and the outer gas supply passage 5 is tangentially opened in its upper end. The lower end of the intermediate pipe 2 is located above the lower end of the outer pipe 1, and the outer diameter of the lower end portion is enlarged so that the velocity of gas is increased between the inner pipe and the outer peripheral surface of the outer pipe 1 to improve cooling efficiency. An annular small gap 6 of about 1 mm is formed to increase the height, and the upper end of the small gap 6 is joined to the outer periphery of the upper portion of the carrier gas introduction pipe 3 to be closed. It opens tangentially along the circumferential direction.
【０００４】キャリアガス導入管３はその下端部が中間
管２内の下端近くに開口しており、上端部がキャリアガ
ス供給路８となっている。図中９はプラズマ炎である。The lower end of the carrier gas introducing pipe 3 is opened near the lower end in the intermediate pipe 2, and the upper end serves as a carrier gas supply passage 8. In the figure, 9 is a plasma flame.
【０００５】この装置は、プラズマ炎９による高温から
外側管１を冷却するために、外側ガス供給路５から外側
ガスとしてアルゴンまたは窒素ガスを供給し、中間ガス
供給路７からは中間ガスとしてアルゴンを、キャリアガ
ス供給路８からキャリアガスとしてアルゴンを夫々供給
して誘導コイル４を作動させて使用する。This apparatus supplies argon or nitrogen gas as an outer gas from the outer gas supply passage 5 and argon as an intermediate gas from the intermediate gas supply passage 7 in order to cool the outer pipe 1 from the high temperature caused by the plasma flame 9. Argon is supplied as a carrier gas from the carrier gas supply passage 8 to operate the induction coil 4 for use.
【０００６】外側ガスは、外側管１内に外側ガス供給路
５から接線方向に導入されるので、螺旋状に回転しなが
ら流出する。キャリアガスを流さない状態でプラズマ炎
を発生させると、扁平したフレーム状となるが、キャリ
アガスを流し流量を増加させると、プラズマ炎の中心が
凹状になってくる。この時、セラミックスあるいは金属
などの粉体をキャリアガス供給路内に投入すると、プラ
ズマ炎によって粉体が溶融され、プラズマ炎の下部に設
けられた被溶射物に溶融された粉体がキャリアガスの力
で溶射され、被膜が形成される。Since the outer gas is introduced into the outer tube 1 from the outer gas supply passage 5 in the tangential direction, it flows out while rotating in a spiral shape. When a plasma flame is generated without flowing the carrier gas, a flat flame shape is formed, but when the carrier gas is flowed and the flow rate is increased, the center of the plasma flame becomes concave. At this time, when powder such as ceramics or metal is put into the carrier gas supply path, the powder is melted by the plasma flame, and the powder melted on the sprayed object provided under the plasma flame is the carrier gas. It is sprayed by force and a film is formed.
【０００７】[0007]
【発明が解決しようとする課題】いま、被溶射物に銅の
粉体を溶射する場合、プラズマ炎は最高１００００℃に
もなるが、銅の粉体が入る部分は誘導コイルの中心部分
になっているため、プラズマ炎の温度が最高３０００℃
程度になっている。しかしながら、銅は融点が約１００
０℃、沸点が約２５００℃であるので銅の一部は気体化
（ヒューム）される。このヒュームの大部分はキャリア
ガス、中間ガス、外側ガスによって被溶射物に溶射され
るが、ヒュームの一部は外側管を外れて浮遊し、被溶射
物の溶射されていないところに付着する。この溶射され
ていないところに付着したヒュームは、被溶射物によっ
て冷却され固体化するが、大気中の酸素によって酸化さ
れてしまう。この固体化したヒュームの上に新しい溶融
した銅が溶射されるため、被溶射物には完全に溶射され
ない個所が点々と生じ、溶射不良となるという問題があ
った。When copper powder is sprayed onto the object to be sprayed, the plasma flame reaches a maximum of 10,000 ° C., but the part where the copper powder enters is the central part of the induction coil. Temperature of plasma flame is up to 3000 ℃
It has become a degree. However, copper has a melting point of about 100.
Since the temperature is 0 ° C. and the boiling point is about 2500 ° C., part of the copper is vaporized (fumes). Most of the fumes are sprayed onto the material to be sprayed by the carrier gas, the intermediate gas, and the outer gas, but part of the fumes floats off the outer tube and adheres to the non-sprayed surface of the material to be sprayed. The fumes adhering to the non-sprayed area are cooled and solidified by the material to be sprayed, but are oxidized by oxygen in the atmosphere. Since the new molten copper is sprayed onto the solidified fumes, there are spots where the sprayed object is not completely sprayed, resulting in poor spraying.
【０００８】[0008]
【課題を解決するための手段】この発明は、上記のよう
な従来の装置における問題点を解消するためになされた
もので、三重構造のトーチにおける外側管のさらに外側
にアルゴンガスを流出させるヒューム防止用ガス供給管
を設けたインダクションプラズマ溶射装置を提供するこ
とを目的とするものである。SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems in the conventional apparatus as described above, and a fume for causing an argon gas to flow out to the outside of the outer tube of a torch having a triple structure. An object of the present invention is to provide an induction plasma spraying device provided with a protective gas supply pipe.
【０００９】[0009]
【作用】この発明におけるインダクションプラズマ溶射
装置は、外側管のさらに外側に設けたヒューム防止用ガ
ス供給管からアルゴンガスを螺旋状に流出させることに
より、溶射中に発生するヒュームも酸化されることなく
完全に溶射することができる。In the induction plasma spraying apparatus according to the present invention, the fumes generated during the spraying are not oxidized even when the argon gas is spirally discharged from the fume preventing gas supply pipe provided outside the outer pipe. Can be completely sprayed.
【００１０】[0010]
【実施例】以下、この発明の一実施例を図１について説
明する。図１において、１０は石英製トーチであり、外
側管１、中間管２、キャリアガス導入管３とヒューム防
止用ガス供給管１１とからなっている。４は水冷誘導コ
イルである。また５は外側ガス供給路、７は中間ガス供
給路、８はキャリアガス供給路、９はプラズマ炎であ
る。この発明は外側管１の外側にさらにヒューム防止用
ガス供給管１１を設けたことが要旨であり、このヒュー
ム防止用ガス供給管１１は上端が外側管１の上部外周に
結合して閉じられている。そしてその上端部内にヒュー
ム防止用ガス供給路１２が接線方向に開口している。下
部は水冷誘導コイル４と外側管１の間を通って外側管１
より下方で外方向に弧状に開口し、その下端は被溶射物
（図示せず）近くまで延びている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. In FIG. 1, 10 is a quartz torch, which comprises an outer tube 1, an intermediate tube 2, a carrier gas introduction tube 3 and a fume prevention gas supply tube 11. 4 is a water-cooled induction coil. Further, 5 is an outer gas supply passage, 7 is an intermediate gas supply passage, 8 is a carrier gas supply passage, and 9 is a plasma flame. The gist of the present invention is that a fume-preventing gas supply pipe 11 is further provided outside the outer pipe 1, and the fume-preventing gas supply pipe 11 is closed at its upper end by being joined to the outer periphery of the upper portion of the outer pipe 1. There is. The gas supply passage 12 for fume prevention is tangentially opened in the upper end portion thereof. The lower part passes between the water-cooled induction coil 4 and the outer pipe 1, and the outer pipe 1
It opens downward in an arc shape outward, and its lower end extends to the vicinity of the object to be sprayed (not shown).
【００１１】このような構造としたことにより、この発
明のインダクションプラズマ溶射装置では、ヒューム防
止用ガス供給路１２からアルゴンガスを供給すると、ヒ
ューム防止用ガス供給管１１と外側管１との間を該ガス
が螺旋状に回転しながら流出するので、溶射中に発生し
たヒュームはこのアルゴンガスによって被溶射物の溶射
されている個所近傍に付着することとなり、酸化される
ことなく完全に溶射することができるのである。With such a structure, in the induction plasma spraying apparatus of the present invention, when the argon gas is supplied from the fume prevention gas supply passage 12, the space between the fume prevention gas supply pipe 11 and the outer pipe 1 is made. Since the gas flows while rotating spirally, the fumes generated during the thermal spray adhere to the vicinity of the sprayed portion of the sprayed object by the argon gas, and the fumes are completely sprayed without being oxidized. Can be done.
【００１２】図２は、この発明の他の実施例を示す装置
の概略縦断側面図であって、ヒューム防止用ガス供給管
１１の内径を大きくして、水冷誘導コイル４を外側管１
とヒューム防止用ガス供給管１１との間に設けるように
したものである。これは図１に示す構造の装置では外側
管１の外側に設けたヒューム防止用ガス供給管１１の外
周に水冷誘導コイル４を配置するので、該コイルの径が
大きくなることからインダクションプラズマを発生させ
るのに大電力を必要とするという問題があり、この問題
をなくすために水冷誘導コイル４をヒューム防止用ガス
供給管１１の内部に設けたものである。FIG. 2 is a schematic vertical sectional side view of an apparatus showing another embodiment of the present invention, in which the inner diameter of the fume prevention gas supply pipe 11 is increased so that the water cooling induction coil 4 is connected to the outer pipe 1.
Is provided between the gas supply pipe 11 and the fume prevention gas supply pipe 11. In the apparatus having the structure shown in FIG. 1, this is because the water cooling induction coil 4 is arranged on the outer circumference of the fume prevention gas supply pipe 11 provided outside the outer pipe 1, so that the diameter of the coil becomes large, so that induction plasma is generated. However, there is a problem that a large amount of electric power is required for the operation, and in order to eliminate this problem, the water cooling induction coil 4 is provided inside the fume prevention gas supply pipe 11.
【００１３】[0013]
【発明の効果】以上のように、この発明によれば外側管
の外側にヒューム防止用ガス供給管を設け、溶射時に該
供給管と外側管との間にアルゴンガスを螺旋状に回転し
ながら流出するようにしたので、溶射中に発生したヒュ
ームが酸化することなく被溶射物の溶射個所近傍に溶射
することができるのである。As described above, according to the present invention, the gas supply pipe for fume prevention is provided outside the outer pipe, and the argon gas is spirally rotated between the supply pipe and the outer pipe during thermal spraying. Since it is made to flow out, the fumes generated during the thermal spraying can be sprayed in the vicinity of the sprayed portion of the sprayed object without being oxidized.
【図１】この発明の一実施例を示すインダクションプラ
ズマ溶射装置の概略縦断側面図である。FIG. 1 is a schematic vertical sectional side view of an induction plasma spraying apparatus showing an embodiment of the present invention.
【図２】この発明の他の実施例を示すインダクションプ
ラズマ溶射装置の概略縦断側面図である。FIG. 2 is a schematic vertical sectional side view of an induction plasma spraying apparatus showing another embodiment of the present invention.
【図３】従来のインダクションプラズマ溶射装置の縦断
側面図である。FIG. 3 is a vertical sectional side view of a conventional induction plasma spraying apparatus.
１ 外側管 ２ 中間管 ３ キャリアガス導入管 ４ 水冷誘導コイル ５ 外側ガス供給路 ６ 小間隙 ７ 中間ガス供給路 ８ キャリアガス供給路 ９ プラズマ炎 １０ トーチ １１ ヒューム防止用ガス供給管 １２ ヒューム防止用ガス供給路 1 Outer Pipe 2 Intermediate Pipe 3 Carrier Gas Inlet Pipe 4 Water Cooling Induction Coil 5 Outer Gas Supply Channel 6 Small Gap 7 Intermediate Gas Supply Channel 8 Carrier Gas Supply Channel 9 Plasma Flame 10 Torch 11 Fume Prevention Gas Supply Pipe 12 Fume Prevention Gas Supply route
Claims (2)
他端の開口から放出する外側管、該外側管内に同軸的に
設けられ、一端から中間ガスを接線方向に導入し、他端
の開口から放出する中間管およびその中間管内に同軸的
に設けられ、一端から供給されるキャリアガスを他端の
開口から放出するキャリアガス導入管とからなる三重構
造のトーチと、そのトーチの開口部外周に設けた誘導コ
イルとから構成され、この誘導コイルから高周波を印加
してプラズマを発生させて溶射するインダクションプラ
ズマ溶射装置において、外側ガスを通す外側管の外側に
ヒューム防止用ガス供給管を設けたことを特徴とするイ
ンダクションプラズマ溶射装置。1. An outer gas is introduced tangentially from one end,
An outer pipe discharged from the opening at the other end, coaxially provided inside the outer pipe, and provided coaxially in the intermediate pipe and the intermediate pipe that introduces an intermediate gas tangentially from one end and discharges from the opening at the other end , A torch having a triple structure composed of a carrier gas introduction pipe for discharging the carrier gas supplied from one end through an opening at the other end, and an induction coil provided on the outer periphery of the opening of the torch, and a high frequency wave is generated from this induction coil. An induction plasma spraying apparatus for applying an electric field to generate plasma for thermal spraying, wherein a fumes-preventing gas supply pipe is provided outside the outer pipe through which the outer gas passes.
外方向に弧状に開口していることを特徴とする請求項１
記載のインダクションプラズマ溶射装置。2. The fume-preventing gas supply pipe is characterized in that the lower part thereof is opened in an arc shape in the outward direction.
Induction plasma spraying apparatus as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141164A JPH0713287B2 (en) | 1991-05-16 | 1991-05-16 | Induction plasma spraying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141164A JPH0713287B2 (en) | 1991-05-16 | 1991-05-16 | Induction plasma spraying equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04341552A JPH04341552A (en) | 1992-11-27 |
| JPH0713287B2 true JPH0713287B2 (en) | 1995-02-15 |
Family
ID=15285627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3141164A Expired - Lifetime JPH0713287B2 (en) | 1991-05-16 | 1991-05-16 | Induction plasma spraying equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713287B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008027657A (en) * | 2006-07-19 | 2008-02-07 | Tokyo Institute Of Technology | Plasma source, treatment device, and treatment method |
| CA2796819C (en) * | 2010-05-05 | 2018-08-21 | Perkinelmer Health Sciences, Inc. | Oxidation resistant induction devices |
| US10995406B2 (en) * | 2016-04-01 | 2021-05-04 | Universities Space Research Association | In situ tailoring of material properties in 3D printed electronics |
| US20180006223A1 (en) * | 2016-05-31 | 2018-01-04 | Universities Space Research Association | Method to print organic electronics without changing its properties |
-
1991
- 1991-05-16 JP JP3141164A patent/JPH0713287B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04341552A (en) | 1992-11-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19960109 |