JPH07131967A - Flat coil type linear actuator - Google Patents
Flat coil type linear actuatorInfo
- Publication number
- JPH07131967A JPH07131967A JP29385393A JP29385393A JPH07131967A JP H07131967 A JPH07131967 A JP H07131967A JP 29385393 A JP29385393 A JP 29385393A JP 29385393 A JP29385393 A JP 29385393A JP H07131967 A JPH07131967 A JP H07131967A
- Authority
- JP
- Japan
- Prior art keywords
- yoke
- permanent magnet
- flat coil
- magnetic flux
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、薄型化、大推力化およ
び推力のリニアリティーの向上等を可能とした偏平コイ
ル形リニア・アクチュエータに関するものであり、ハン
ドリング装置、キャッチング装置、検査装置（各種コン
タクトプローブ類）、光学装置（各種ミラー類、各種レ
ンズ類）、検出装置（各種センサ類）、記録装置（各種
ペン類）および記憶装置（各種磁気ヘッド類）等の全体
あるいは一部の駆動の用に供されるものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat coil type linear actuator capable of thinning, increasing thrust, and improving linearity of thrust, such as a handling device, a catching device, an inspection device (various contacts). Probes), optical devices (various mirrors, various lenses), detectors (various sensors), recording devices (various pens), storage devices (various magnetic heads), etc. It is used for.
【０００２】[0002]
【従来の技術】従来の偏平コイル形リニア・アクチュエ
ータの構造と動作を、図１および図２に示す第１の従来
例および図３に示す第２の従来例に基づいて説明する。2. Description of the Related Art The structure and operation of a conventional flat coil linear actuator will be described with reference to a first conventional example shown in FIGS. 1 and 2 and a second conventional example shown in FIG.
【０００３】図１は、偏平コイル形リニア・アクチュエ
ータの第１の従来例の構造説明を目的とした斜視図であ
り、偏平コイル形リニア・アクチュエータは、それぞれ
対向する平板状を成す一対のヨークおよび複数の永久磁
石より成る固定子２と、偏平コイルより成る可動子３と
を主に構成される。FIG. 1 is a perspective view for explaining the structure of a first conventional example of a flat coil linear actuator. The flat coil linear actuator includes a pair of opposed yokes and flat yokes. A stator 2 composed of a plurality of permanent magnets and a mover 3 composed of a flat coil are mainly configured.
【０００４】固定子２は、平板状を成す永久磁石５ａお
よび平板状を成す永久磁石５ｂの、それぞれ相反する極
性を有する磁極面が隣接して固着された平板状を成す第
１のヨーク４ａと、平板状を成す永久磁石６ａおよび平
板状を成す永久磁石６ｂの、それぞれ相反する極性を有
する磁極面が隣接して固着された平板状を成す第２のヨ
ーク４ｂとにより構成され、永久磁石５ａと永久磁石６
ａおよび永久磁石５ｂと永久磁石６ｂとが、それぞれ所
定の間隙を隔て異なる磁極面が対向するように、第１の
ヨーク４ａと第２のヨーク４ｂとは配設される。The stator 2 includes a flat plate-shaped permanent magnet 5a and a flat plate-shaped permanent magnet 5b, and a flat plate-shaped first yoke 4a to which adjacent magnetic pole surfaces having opposite polarities are fixed. A permanent magnet 5a composed of a flat plate-shaped permanent magnet 6a and a flat plate-shaped permanent magnet 6b, and a flat plate-shaped second yoke 4b to which magnetic pole surfaces having opposite polarities are fixedly adjoined to each other. And permanent magnet 6
The first yoke 4a and the second yoke 4b are arranged so that the a and the permanent magnet 5b and the permanent magnet 6b face each other with different magnetic pole faces facing each other with a predetermined gap.
【０００５】可動子３は、第１のヨーク４ａに固着され
た永久磁石５ａ、５ｂと、第２のヨーク４ｂに固着され
た永久磁石６ａ、６ｂとの、それぞれ所定の間隙を隔て
対向する磁極面が形成する空隙８内を、永久磁石５ａと
永久磁石５ｂおよび永久磁石６ａと永久磁石６ｂが隣接
される方向に円滑に移動し得る構造を成す偏平コイル７
を主に構成される。The mover 3 has magnetic poles of permanent magnets 5a and 5b fixed to the first yoke 4a and permanent magnets 6a and 6b fixed to the second yoke 4b, which are opposed to each other with a predetermined gap therebetween. The flat coil 7 having a structure capable of smoothly moving in the direction in which the permanent magnets 5a and 5b and the permanent magnets 6a and 6b are adjacent to each other in the space 8 formed by the surfaces.
Is mainly composed.
【０００６】図２は、図１に示す偏平コイル形リニア・
アクチュエータの第１の従来例の磁束の構成説明を目的
とした断面図であり、第１のヨーク４ａ、永久磁石５
ａ、５ｂ、第２のヨーク４ｂ、永久磁石６ａ、６ｂおよ
び偏平コイル７の断面を示すものである。FIG. 2 shows the flat coil type linear motor shown in FIG.
FIG. 9 is a cross-sectional view for explaining the configuration of magnetic flux of a first conventional example of the actuator, including a first yoke 4a and a permanent magnet 5;
2A, 2B, the second yoke 4b, the permanent magnets 6a, 6b, and the flat coil 7 are shown in cross section.
【０００７】永久磁石５ａ、５ｂと永久磁石６ａ、６ｂ
とは、それぞれ所定の間隙を隔て対向する磁極面が異な
る極性を有するように配置され、第１のヨーク４ａと第
２のヨーク４ｂとの間には、永久磁石５ａのＮ極の極性
を有する磁極面より第１のヨーク４ａ、永久磁石５ｂ、
永久磁石６ｂ、第２のヨーク４ｂ、永久磁石６ａ、永久
磁石５ａのＳ極の極性を有する磁極面へと磁束Φａが矢
印の方向に流れ、一つの閉磁路を形成する。磁束Φａ
は、永久磁石５ａ、５ａ、６ａ、６ｂより発生される全
磁束であり、第１のヨーク４ａおよび第２のヨーク４ｂ
は、磁束Φａを容易に流し得る厚さを有するものであ
る。Permanent magnets 5a, 5b and permanent magnets 6a, 6b
Are arranged such that the magnetic pole surfaces facing each other with a predetermined gap have different polarities, and the polarities of the N poles of the permanent magnets 5a are present between the first yoke 4a and the second yoke 4b. From the magnetic pole surface, the first yoke 4a, the permanent magnet 5b,
The magnetic flux Φa flows in the direction of the arrow to the magnetic pole surface of the permanent magnet 6b, the second yoke 4b, the permanent magnet 6a, and the permanent magnet 5a having the polarity of the S pole, and forms one closed magnetic path. Magnetic flux Φa
Is the total magnetic flux generated by the permanent magnets 5a, 5a, 6a, 6b, and is the first yoke 4a and the second yoke 4b.
Has a thickness that allows the magnetic flux Φa to easily flow.
【０００８】偏平コイル７に図２に示す方向に所定の大
きさを有する電流を流すと、Ｂｉｌ則に従い可動子３は
矢印Ａ方向に移動し、偏平コイル７に前記電流と異なる
方向に所定の大きさを有する電流を流すと、可動子３は
矢印Ｂ方向に移動する。When a current having a predetermined magnitude is applied to the flat coil 7 in the direction shown in FIG. 2, the mover 3 moves in the direction of arrow A according to the Bil's rule, and the flat coil 7 is moved in a predetermined direction in a direction different from the current. When a current having a magnitude is applied, the mover 3 moves in the arrow B direction.
【０００９】図３は、偏平コイル形リニア・アクチュエ
ータの第２の従来例の磁束の構成説明を目的とした断面
図であり、第１のヨーク４ａ、永久磁石５ａ、５ｂ、第
２のヨーク４ｂ、永久磁石６ａ、６ｂ、偏平コイル７お
よび第３のヨーク１０ａ、１０ｂの断面を示すものであ
る。FIG. 3 is a sectional view for explaining the configuration of the magnetic flux of the second conventional example of the flat coil type linear actuator. The first yoke 4a, the permanent magnets 5a and 5b, and the second yoke 4b are shown. The cross sections of the permanent magnets 6a and 6b, the flat coil 7, and the third yokes 10a and 10b are shown.
【００１０】偏平コイル形リニア・アクチュエータは、
それぞれ対向する平板状を成す一対のヨークおよび複数
の永久磁石より成る固定子２と、偏平コイルより成る可
動子３とを主に構成される。The flat coil type linear actuator is
A stator 2 composed of a pair of flat plate-shaped yokes and a plurality of permanent magnets facing each other, and a mover 3 composed of a flat coil are mainly configured.
【００１１】固定子２は、平板状を成す永久磁石５ａお
よび平板状を成す永久磁石５ｂの、それぞれ相反する極
性を有する磁極面が隣接して固着された平板状を成す第
１のヨーク４ａと、平板状を成す永久磁石６ａおよび平
板状を成す永久磁石６ｂの、それぞれ相反する極性を有
する磁極面が隣接して固着された平板状を成す第２のヨ
ーク４ｂと、第１のヨーク４ａおよび第２のヨーク４ａ
の両端部に、永久磁石５ａ、５ｂと永久磁石６ａ、６ｂ
とが所定の間隙を隔て対向するように磁気的および機械
的に固着された第３のヨーク１０ａおよび第３のヨーク
１０ｂとにより構成さる。The stator 2 is composed of a flat plate-shaped permanent magnet 5a and a flat plate-shaped permanent magnet 5b, and a flat plate-shaped first yoke 4a to which adjacent magnetic pole surfaces having opposite polarities are fixed. A second yoke 4b having a flat plate shape in which magnetic pole faces having opposite polarities of the permanent magnet 6a having a flat plate shape and the permanent magnet 6b having a flat plate shape are adjacently fixed to each other, and the first yoke 4a and Second yoke 4a
The permanent magnets 5a, 5b and the permanent magnets 6a, 6b at both ends of the
And a third yoke 10a and a third yoke 10b which are magnetically and mechanically fixed so as to face each other with a predetermined gap therebetween.
【００１２】永久磁石５ａ、５ｂと永久磁石６ａ、６ｂ
とは、それぞれ対向する磁極面が異なる極性を有するよ
うに配置され、永久磁石５ａのＮ極の極性を有する磁極
面より第１のヨーク４ａ、永久磁石５ｂ、永久磁石６
ｂ、第２のヨーク４ｂ、永久磁石６ａ、永久磁石５ａの
Ｓ極の極性を有する磁極面へと磁束Φａａが矢印の方向
に流れ、一つの閉磁路を形成し、永久磁石５ａのＮ極の
極性を有する磁極面より第１のヨーク４ａ、第３のヨー
ク１０ａ、第２のヨーク４ｂ、永久磁石６ａ、永久磁石
５ａのＳ極の極性を有する磁極面へと磁束Φａｂが矢印
の方向に流れ、一つの閉磁路を形成し、永久磁石６ｂの
Ｎ極の極性を有する磁極面より第２のヨーク４ｂ、第３
のヨーク１０ｂ、第１のヨーク４ａ、永久磁石５ｂ、永
久磁石６ｂのＳ極の極性を有する磁極面へと磁束Φａｃ
が矢印の方向に流れ、一つの閉磁路を形成する。Permanent magnets 5a, 5b and permanent magnets 6a, 6b
Are arranged so that the magnetic pole surfaces facing each other have different polarities, and the first yoke 4a, the permanent magnet 5b, and the permanent magnet 6 are arranged from the magnetic pole surface having the polarity of the N pole of the permanent magnet 5a.
b, the second yoke 4b, the permanent magnet 6a, and the permanent magnet 5a, the magnetic flux Φaa flows in the direction of the arrow to the magnetic pole surface having the polarity of the S pole, forming one closed magnetic path, and the N pole of the permanent magnet 5a. The magnetic flux Φab flows in the direction of the arrow from the magnetic pole surface having polarity to the magnetic pole surface having the S pole polarity of the first yoke 4a, the third yoke 10a, the second yoke 4b, the permanent magnet 6a, and the permanent magnet 5a. , One closed magnetic path is formed, and the second yoke 4b and the third magnet are formed from the magnetic pole surface of the permanent magnet 6b having the N-pole polarity.
Of the magnetic flux Φac toward the magnetic pole surface of the yoke 10b, the first yoke 4a, the permanent magnet 5b, and the permanent magnet 6b having the polarity of the S pole.
Flow in the direction of the arrow, forming a closed magnetic circuit.
【００１３】永久磁石５ａ、５ｂ、６ａ、６ｂより発生
される全磁束をΦａとすると、磁束Φａａは全磁束Φａ
の一部であり、磁束Φａｂは永久磁石５ａ、６ａより発
生される磁束の一部であり、磁束Φａｃは永久磁石５
ｂ、６ｂより発生される磁束の一部である。即ち、永久
磁石５ａ、５ｂ、６ａ、６ｂより発生される全磁束Φａ
は、磁束Φａａ、磁束Φａｂおよび磁束Φａｃにより構
成される。第１のヨーク４ａおよび第２のヨーク４ｂ
は、磁束Φａａ、磁束Φａｂあるいは磁束Φａｃを容易
に流し得る厚さを有するものである。When the total magnetic flux generated by the permanent magnets 5a, 5b, 6a, 6b is Φa, the magnetic flux Φaa is the total magnetic flux Φa.
, The magnetic flux Φab is a part of the magnetic flux generated by the permanent magnets 5a and 6a, and the magnetic flux Φac is the permanent magnet 5
It is a part of the magnetic flux generated from b and 6b. That is, the total magnetic flux Φa generated by the permanent magnets 5a, 5b, 6a, 6b.
Is composed of magnetic flux Φaa, magnetic flux Φab, and magnetic flux Φac. First yoke 4a and second yoke 4b
Has a thickness that allows the magnetic flux Φaa, the magnetic flux Φab, or the magnetic flux Φac to easily flow.
【００１４】前述のように、図１および図２に示す偏平
コイル形リニア・アクチュエータに対して、第１のヨー
ク４ａおよび第２のヨーク４ｂの薄型化が可能と成る。
しかし、図１および図２に示す偏平コイル形リニア・ア
クチュエータの偏平コイルには、磁束２Φａが鎖交する
が、図３に示す偏平コイル形リニア・アクチュエータに
おいては、磁束Φａａ＋磁束Φａａあるいは磁束Φａｃ
＋磁束Φａａが鎖交する。即ち、空隙８内の磁束密度が
減少し、推力が減少する。As described above, it is possible to reduce the thickness of the first yoke 4a and the second yoke 4b in the flat coil type linear actuator shown in FIGS.
However, the magnetic flux 2Φa interlinks with the flat coil of the flat coil linear actuator shown in FIGS. 1 and 2, but in the flat coil linear actuator shown in FIG. 3, the magnetic flux Φaa + the magnetic flux Φaa or the magnetic flux Φac.
+ Magnetic flux Φaa interlinks. That is, the magnetic flux density in the air gap 8 is reduced and the thrust is reduced.
【００１５】偏平コイル７に図３に示す方向に所定の大
きさを有する電流を流すと、Ｂｉｌ則に従い可動子３は
矢印Ａ方向に移動し、偏平コイル７に前記電流と異なる
方向に所定の大きさを有する電流を流すと、可動子３は
矢印Ｂ方向に移動する。When a current having a predetermined magnitude is applied to the flat coil 7 in the direction shown in FIG. 3, the mover 3 moves in the direction of arrow A according to the Bil's law, and the flat coil 7 is moved in a predetermined direction in a direction different from the current. When a current having a magnitude is applied, the mover 3 moves in the arrow B direction.
【００１６】一般に、永久磁石５ａと永久磁石５ｂは、
それぞれ相反する極性を有する磁極面が所定の間隔を隔
て、あるいは所定の幅を有する非磁性材料により構成さ
れるスペーサ等を介して隣接するように第１のヨーク４
ａに固着され得るものであり、永久磁石６ａと永久磁石
６ｂも同様に第２のヨーク４ｂに固着され得るものであ
る。Generally, the permanent magnets 5a and 5b are
The first yoke 4 is so arranged that the magnetic pole surfaces having opposite polarities are adjacent to each other with a predetermined gap or via a spacer or the like made of a non-magnetic material having a predetermined width.
The permanent magnet 6a and the permanent magnet 6b can be similarly fixed to the second yoke 4b.
【００１７】図１ないし図３に示す従来の偏平コイル形
リニア・アクチュエータは、機械加工および組み立て調
整の容易さ、効率の高さ、変位（振幅）および速度（振
動数）の制御の容易さから、高推力、高速度および少変
位を必要とする負荷の駆動源として広く利用されてい
る。The conventional flat coil type linear actuator shown in FIGS. 1 to 3 is easy to machine and assemble and adjust, high in efficiency, and easy to control displacement (amplitude) and speed (frequency). Widely used as a drive source for loads that require high thrust, high speed and small displacement.
【００１８】しかし、第１のヨーク４ａおよび第２のヨ
ーク４ｂの飽和磁束密度の問題から、推力のリニアリテ
ィー、推力、寸法およびストロークに対して限界値を有
するものであり、推力のリニアリティーの向上、大推力
化、長ストローク化および小型軽量化に困難を来すもの
であった。However, due to the problem of the saturation magnetic flux density of the first yoke 4a and the second yoke 4b, the thrust linearity has a limit value with respect to the thrust linearity, the thrust, the size and the stroke, and the thrust linearity is improved. It was difficult to increase thrust, increase stroke, and reduce size and weight.
【００１９】[0019]
【発明が解決しようとする課題】解決しようとする問題
点は、偏平コイル形リニア・アクチュエータを構成する
永久磁石の漏洩磁束を減少させ、ヨーク類を薄くし、さ
らに推力を増加させる点である。The problem to be solved is to reduce the magnetic flux leakage of the permanent magnets forming the flat coil linear actuator, thin the yokes, and increase the thrust force.
【００２０】[0020]
【課題を解決するための手段】本発明の偏平コイル形リ
ニア・アクチュエータは、前記問題点を解決するため
に、図１ないし図３に示す従来の偏平コイル形リニア・
アクチュエータの、固定子２を構成する第１のヨーク４
ａおよび第２のヨーク４ｂの、磁束密度の飽和による永
久磁石５ａ、５ｂ、６ａ、６ｂの漏洩磁束を減少させる
ために、第１のヨーク４ａを構成する可動子３の移動方
向に延びる側面の一つと、第２のヨーク４ｂを構成する
可動子３の移動方向に延びる側面の一つとを磁気的に接
続して、少なくとも三つ以上の閉磁路が形成されるよう
に、第１のヨーク４ａおよび第２のヨーク４ｂを配置す
る構成としている。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a flat coil linear actuator of the present invention is provided with a conventional flat coil linear actuator shown in FIGS.
First yoke 4 of the actuator, which constitutes the stator 2.
a and the second yoke 4b, in order to reduce the leakage flux of the permanent magnets 5a, 5b, 6a, 6b due to the saturation of the magnetic flux density, the side surfaces of the movable element 3 forming the first yoke 4a extending in the moving direction are reduced. The first yoke 4a is magnetically connected to one of the side surfaces extending in the moving direction of the mover 3 which constitutes the second yoke 4b so that at least three or more closed magnetic paths are formed. And the second yoke 4b is arranged.
【００２１】[0021]
【作用】従って、本発明の偏平コイル形リニア・アクチ
ュエータによれば、所定の間隔を隔て対向して配置され
る第１のヨーク４ａと第２のヨーク４ｂとの一部を、磁
気的に接続することにより、固定子２に複数の閉磁路を
形成させ、ヨーク４ａおよびヨーク４ｂを流れる磁束を
分路させることにより、ヨーク４ａおよびヨーク４ｂを
薄く構成すること、即ち、偏平コイル形リニア・アクチ
ュエータの薄型化および小型軽量化が可能と成り、更
に、偏平コイル形リニア・アクチュエータの高磁束密度
運転による長ストローク化、高推力化および低電流運転
による推力のリニアリティーの向上を可能とするもので
ある。Therefore, according to the flat coil type linear actuator of the present invention, a part of the first yoke 4a and the second yoke 4b, which are opposed to each other with a predetermined gap, are magnetically connected. By forming a plurality of closed magnetic paths in the stator 2 and shunting the magnetic flux flowing through the yokes 4a and 4b, the yokes 4a and 4b are made thin, that is, a flat coil linear actuator. Can be made thinner and smaller and lighter, and further, the flat coil type linear actuator can have a longer stroke due to high magnetic flux density operation, higher thrust, and improved linearity of thrust due to low current operation. .
【００２２】[0022]
【実施例】図４および図５に基づいて、本発明の偏平コ
イル形リニア・アクチュエータの第１の実施例を説明す
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A flat coil type linear actuator according to a first embodiment of the present invention will be described with reference to FIGS.
【００２３】図４は、本発明の偏平コイル形リニア・ア
クチュエータの第１の実施例の斜視図を示すものであ
り、偏平コイル形リニア・アクチュエータは、それぞれ
所定の間隔を隔て対向する平板状を成す一対のヨークお
よび複数の永久磁石より成る固定子２と、偏平コイルよ
り成る可動子３とを主に構成される。FIG. 4 is a perspective view of a flat coil type linear actuator according to a first embodiment of the present invention. The flat coil type linear actuators are flat plate-shaped and are opposed to each other at a predetermined interval. The stator 2 is composed mainly of a pair of yokes and a plurality of permanent magnets, and the mover 3 is composed of a flat coil.
【００２４】固定子２は、それぞれ平板状を成す第１の
ヨーク４ａ、第２のヨーク４ｂおよび第４のヨーク４ｃ
と、それぞれ平板状を成す永久磁石５ａ、５ｂ、６ａ、
６ｂとを主に構成され、第１のヨーク４ａ、第２のヨー
ク４ｂおよび第４のヨーク４ｃは、コの字状に配置さ
れ、所定の間隔を隔て対向する第１のヨーク４ａと第２
のヨークとのれぞれの対向面には、それぞれ相反する極
性を有する磁極面が隣接するように、永久磁石５ａおよ
び永久磁石５ｂと、永久磁石６ａおよび永久磁石６ｂと
が固着される。第１のヨーク４ａ、第２のヨーク４ｂお
よび第４のヨーク４ｃは、所定の間隙を隔て対向する永
久磁石５ａおよび永久磁石６ａと、所定の間隙を隔て対
向する永久磁石５ｂおよび永久磁石６ｂとのそれぞれの
対向面が形成する空隙８を介して、固定磁気回路を形成
する。The stator 2 has a first yoke 4a, a second yoke 4b and a fourth yoke 4c, each of which has a flat plate shape.
And permanent magnets 5a, 5b, 6a each having a flat plate shape,
6b, and the first yoke 4a, the second yoke 4b, and the fourth yoke 4c are arranged in a U shape and face each other with a predetermined gap therebetween.
The permanent magnet 5a and the permanent magnet 5b, and the permanent magnet 6a and the permanent magnet 6b are fixed to the respective surfaces of the yoke facing each other so that the magnetic pole surfaces having opposite polarities are adjacent to each other. The first yoke 4a, the second yoke 4b, and the fourth yoke 4c include a permanent magnet 5a and a permanent magnet 6a that face each other with a predetermined gap, and a permanent magnet 5b and a permanent magnet 6b that face each other with a predetermined gap. A fixed magnetic circuit is formed through the space 8 formed by each of the facing surfaces of.
【００２５】可動子３は、偏平コイル７を主に構成さ
れ、所定の間隙を隔て対向する永久磁石５ａおよび永久
磁石６ａと、所定の間隙を隔て対向する永久磁石５ｂお
よび永久磁石６ｂとのそれぞれの対向面が形成する空隙
８内を、永久磁石５ａおよび永久磁石６ａと、永久磁石
５ｂおよび永久磁石６ｂとが、それぞれ隣接する方向に
円滑に移動し得るように配置される。The mover 3 mainly comprises a flat coil 7, and comprises a permanent magnet 5a and a permanent magnet 6a facing each other with a predetermined gap, and a permanent magnet 5b and a permanent magnet 6b facing each other with a predetermined gap. The permanent magnet 5a and the permanent magnet 6a, and the permanent magnet 5b and the permanent magnet 6b are arranged so as to be able to move smoothly in the respective adjacent directions in the space 8 formed by the opposing surfaces of.
【００２６】第１のヨーク４ａ、第２のヨーク４ｂおよ
び第４のヨーク４ｃは、優れた磁気特性を有する各種磁
性材料により形成され、必要に応じては、磁気特性を向
上させるために熱処理が施される。第１のヨーク４ａ、
第２のヨーク４ｂおよび第４のヨーク４ｃは、磁気特性
の優れた各種磁性材料のロスト・ワックス法等により一
体に形成され得るものである。The first yoke 4a, the second yoke 4b, and the fourth yoke 4c are made of various magnetic materials having excellent magnetic characteristics, and are heat-treated as necessary to improve the magnetic characteristics. Is given. The first yoke 4a,
The second yoke 4b and the fourth yoke 4c can be integrally formed by a lost wax method or the like of various magnetic materials having excellent magnetic characteristics.
【００２７】図５（ａ）は、図４に示す本発明の偏平コ
イル形リニア・アクチュエータの第１の実施例のＤーＤ
断面図を示し、図５（ｂ）は、図４に示す本発明の偏平
コイル形リニア・アクチュエータの第１の実施例のＥー
Ｅ断面図を示し、図５（ｃ）は、図４に示す本発明の偏
平コイル形リニア・アクチュエータの第１の実施例のＦ
ーＦ断面図を示す。FIG. 5A is a sectional view taken along line DD of the first embodiment of the flat coil linear actuator of the present invention shown in FIG.
5B is a sectional view, FIG. 5B is a sectional view taken along line EE of the first embodiment of the flat coil linear actuator of the present invention shown in FIG. 4, and FIG. F of the first embodiment of the flat coil type linear actuator of the present invention shown
-F sectional view is shown.
【００２８】図５（ａ）において、永久磁石５ａ、５ｂ
と永久磁石６ａ、６ｂとは、それぞれ対向する磁極面が
異なる極性を有するように配置され、第１のヨーク４ａ
と第２のヨーク４ｂとの間には、永久磁石５ａのＮ極の
極性を有する磁極面より第１のヨーク４ａ、永久磁石５
ｂ、永久磁石６ｂ、第２のヨーク４ｂ、永久磁石６ａ、
永久磁石５ａのＳ極の極性を有する磁極面へと磁束Φｂ
ａが矢印の方向に流れ、一つの閉磁路を形成する。In FIG. 5A, permanent magnets 5a and 5b are provided.
And the permanent magnets 6a and 6b are arranged such that the magnetic pole surfaces facing each other have different polarities, and the first yoke 4a
And the second yoke 4b between the first yoke 4a and the permanent magnet 5 due to the magnetic pole surface of the permanent magnet 5a having the N-pole polarity.
b, the permanent magnet 6b, the second yoke 4b, the permanent magnet 6a,
The magnetic flux Φb is transferred to the magnetic pole surface having the polarity of the S pole of the permanent magnet 5a.
a flows in the direction of the arrow to form one closed magnetic circuit.
【００２９】図５（ｂ）において、第１のヨーク４ａ、
第２のヨーク４ｂと第４のヨーク４ｃとの間には、永久
磁石５ａのＮ極の極性を有する磁極面より第１のヨーク
４ａ、第４のヨーク４ｃ、第２のヨーク４ｂ、永久磁石
６ａ、永久磁石５ａのＳ極の極性を有する磁極面へと磁
束Φｂｂが矢印の方向に流れ、一つの閉磁路を形成す
る。In FIG. 5B, the first yoke 4a,
Between the second yoke 4b and the fourth yoke 4c, the first yoke 4a, the fourth yoke 4c, the second yoke 4b, and the permanent magnet are arranged from the magnetic pole surface of the permanent magnet 5a having the polarity of the N pole. 6a, the magnetic flux Φbb flows in the direction of the arrow to the magnetic pole surface having the polarity of the S pole of the permanent magnet 5a, forming one closed magnetic path.
【００３０】図５（ｃ）において、第１のヨーク４ａ、
第２のヨーク４ｂと第４のヨーク４ｃとの間には、永久
磁石６ｂのＮ極の極性を有する磁極面より第２のヨーク
４ｂ、第４のヨーク４ｃ、第１のヨーク４ａ、永久磁石
５ｂ、永久磁石６ｂのＳ極の極性を有する磁極面へと磁
束Φｂｃが矢印の方向に流れ、一つの閉磁路を形成す
る。In FIG. 5C, the first yoke 4a,
Between the second yoke 4b and the fourth yoke 4c, the second yoke 4b, the fourth yoke 4c, the first yoke 4a, and the permanent magnet are arranged from the magnetic pole surface of the permanent magnet 6b having the polarity of the N pole. 5b, the magnetic flux Φbc flows in the direction of the arrow to the magnetic pole surface having the polarity of the S pole of the permanent magnet 6b, forming one closed magnetic path.
【００３１】図５（ａ）、図５（ｂ）および図５（ｃ）
より、空隙８の永久磁石５ａと永久磁石６ａとの対向面
が形成する部分には、磁束Φｂａ＋磁束Φｂｂが流れ、
空隙８の永久磁石５ｂと永久磁石６ｂとの対向面が形成
する部分には、磁束Φｂａ＋磁束Φｂｃが流れる。5 (a), 5 (b) and 5 (c)
As a result, the magnetic flux Φba + the magnetic flux Φbb flows in the portion formed by the facing surfaces of the permanent magnet 5a and the permanent magnet 6a in the air gap 8,
The magnetic flux Φba + the magnetic flux Φbc flows in a portion of the void 8 formed by the facing surfaces of the permanent magnets 5b and 6b.
【００３２】磁束Φｂａ＋磁束Φｂｂおよび磁束Φｂａ
＋磁束Φｂｃは、永久磁石５ａ、５ｂ、６ａ、６ｂより
発生する全磁束Φａであり、空隙８内を流れる磁束はΦ
ａであり、第１のヨーク４ａ、第２のヨーク４ｂおよび
と第４のヨーク４ｃに流れる磁束のみがが、磁束Φｂａ
とΦｂｂおよび磁束ΦｂａとΦｂｃに分路する。Magnetic flux Φba + magnetic flux Φbb and magnetic flux Φba
The + magnetic flux Φbc is the total magnetic flux Φa generated by the permanent magnets 5a, 5b, 6a, 6b, and the magnetic flux flowing in the air gap 8 is Φ.
a, and only the magnetic flux flowing through the first yoke 4a, the second yoke 4b, and the fourth yoke 4c is the magnetic flux Φba.
And Φbb and magnetic fluxes Φba and Φbc.
【００３３】第１のヨーク４ａおよび第２のヨーク４ｂ
は、磁束Φｂａ−磁束Φｂｂ、磁束Φｂａ−磁束Φｂｃ
を、第４のヨーク４ｃは磁束Φｂｂ、磁束Φｂｃを、そ
れぞれ容易に流し得る厚さを有するものであり、図１に
示す偏平コイル形リニア・アクチュエータに対して、第
１のヨーク４ａおよび第２のヨーク４ｂの内部を流れる
磁束が減少する。First yoke 4a and second yoke 4b
Is the magnetic flux Φba-the magnetic flux Φbb, and the magnetic flux Φba-the magnetic flux Φbc.
The fourth yoke 4c has a thickness that allows the magnetic flux Φbb and the magnetic flux Φbc to easily flow, and is different from that of the flat coil linear actuator shown in FIG. The magnetic flux flowing inside the yoke 4b is reduced.
【００３４】第１のヨーク４ａおよび第２のヨーク４ｂ
の内部を流れる磁束の減少は、第１のヨーク４ａおよび
第２のヨーク４ｂを薄くし得ることであり、更に、空隙
８内の磁束密度を大きくし得ることである。即ち、小型
軽量化、高推力化および長ストローク化を可能とするも
のである。First yoke 4a and second yoke 4b
The reduction of the magnetic flux flowing inside is that the first yoke 4a and the second yoke 4b can be made thin, and further the magnetic flux density in the air gap 8 can be made large. That is, it is possible to reduce the size and weight, increase the thrust, and increase the stroke.
【００３５】偏平コイル７に図５（ａ）に示す方向に所
定の大きさを有する電流を流すと、Ｂｉｌ則に従い可動
子３は矢印Ａ方向に移動し、偏平コイル７に前記電流と
異なる方向に所定の大きさを有する電流を流すと、可動
子３は矢印Ｂ方向に移動する。When a current having a predetermined magnitude is applied to the flat coil 7 in the direction shown in FIG. 5A, the mover 3 moves in the direction of arrow A according to the Bil's rule, and the flat coil 7 is moved in a direction different from the above current. When a current having a predetermined magnitude is applied to the mover 3, the mover 3 moves in the arrow B direction.
【００３６】図６および図７に基づいて、本発明の偏平
コイル形リニア・アクチュエータの第２の実施例を説明
する。A second embodiment of the flat coil linear actuator of the present invention will be described with reference to FIGS. 6 and 7.
【００３７】図６は、本発明の偏平コイル形リニア・ア
クチュエータの第２の実施例の斜視図を示すものであ
り、偏平コイル形リニア・アクチュエータは、それぞれ
所定の間隔を隔て対向する平板状を成す一対のヨークお
よび複数の永久磁石より成る固定子２と、偏平コイルよ
り成る可動子３とを主に構成される。FIG. 6 is a perspective view of a flat coil type linear actuator according to a second embodiment of the present invention. The flat coil type linear actuators have flat plate shapes facing each other with a predetermined interval. The stator 2 is composed mainly of a pair of yokes and a plurality of permanent magnets, and the mover 3 is composed of a flat coil.
【００３８】固定子２は、それぞれ平板状を成す第１の
ヨーク４ａ、第２のヨーク４ｂおよび第４のヨーク４ｃ
と、それぞれ平板状をなす永久磁石５ａ、５ｂ、６ａ、
６ｂと、第３のヨーク１０ａ、１０ｂとを主に構成さ
れ、第１のヨーク４ａ、第２のヨーク４ｂおよび第４の
ヨーク４ｃは、コの字状に配置され、所定の間隔を隔て
対向する第１のヨーク４ａと第２のヨークとのれぞれの
対向面には、それぞれ相反する極性を有する磁極面が隣
接するように、永久磁石５ａおよび永久磁石５ｂと、永
久磁石６ａおよび永久磁石６ｂとが固着される。第１の
ヨーク４ａ、第２のヨーク４ｂおよび第４のヨーク４ｃ
が可動子３の移動方向に形成する二つの開口部には、第
３のヨーク１０ａおよび第３のヨーク１０ｂがそれぞれ
固着される。第１のヨーク４ａ、第２のヨーク４ｂ、第
４のヨーク４ｃおよび第３のヨーク１０ａ、１０ｂは、
所定の間隙を隔て対向する永久磁石５ａおよび永久磁石
６ａと、所定の間隙を隔て対向する永久磁石５ｂおよび
永久磁石６ｂとのそれぞれの対向面が形成する空隙８を
介して、固定磁気回路を形成する。The stator 2 has a first yoke 4a, a second yoke 4b and a fourth yoke 4c, each of which has a flat plate shape.
And the permanent magnets 5a, 5b, 6a each having a flat plate shape,
6b and the third yokes 10a and 10b are mainly configured, and the first yoke 4a, the second yoke 4b and the fourth yoke 4c are arranged in a U shape and face each other with a predetermined interval. The permanent magnet 5a and the permanent magnet 5b, the permanent magnet 6a and the permanent magnet 6a and the permanent magnet 5b are disposed so that magnetic pole surfaces having opposite polarities are adjacent to the facing surfaces of the first yoke 4a and the second yoke, respectively. The magnet 6b is fixed. First yoke 4a, second yoke 4b and fourth yoke 4c
A third yoke 10a and a third yoke 10b are fixed to the two openings formed in the moving direction of the mover 3, respectively. The first yoke 4a, the second yoke 4b, the fourth yoke 4c, and the third yokes 10a and 10b are
A fixed magnetic circuit is formed through a gap 8 formed by respective facing surfaces of the permanent magnet 5a and the permanent magnet 6a facing each other with a predetermined gap and the permanent magnet 5b and the permanent magnet 6b facing each other with a predetermined gap. To do.
【００３９】可動子３は、偏平コイル７を主に構成さ
れ、所定の間隙を隔て対向する永久磁石５ａおよび永久
磁石６ａと、所定の間隙を隔て対向する永久磁石５ｂお
よび永久磁石６ｂとのそれぞれの対向面が形成する空隙
８内を、永久磁石５ａおよび永久磁石６ａと、永久磁石
５ｂおよび永久磁石６ｂとが、それぞれ隣接する方向に
円滑に移動し得るように配置される。The mover 3 mainly comprises a flat coil 7, and comprises a permanent magnet 5a and a permanent magnet 6a facing each other with a predetermined gap, and a permanent magnet 5b and a permanent magnet 6b facing each other with a predetermined gap. The permanent magnet 5a and the permanent magnet 6a, and the permanent magnet 5b and the permanent magnet 6b are arranged so as to be able to move smoothly in the respective adjacent directions in the space 8 formed by the opposing surfaces of.
【００４０】第１のヨーク４ａ、第２のヨーク４ｂ、第
４のヨーク４ｃおよび第３のヨーク１０ａ、１０ｂは、
優れた磁気特性を有する各種磁性材料により形成され、
必要に応じては、磁気特性を向上させるために熱処理が
施される。第１のヨーク４ａ、第２のヨーク４ｂおよび
第４のヨーク４ｃあるいは第１のヨーク４ａ、第２のヨ
ーク４ｂ、第４のヨーク４ｃおよび第３のヨーク１０
ａ、１０ｂは、磁気特性の優れた各種磁性材料のロスト
・ワックス法等により一体に形成され得るものである。The first yoke 4a, the second yoke 4b, the fourth yoke 4c and the third yokes 10a and 10b are
Made of various magnetic materials with excellent magnetic properties,
If necessary, heat treatment is performed to improve magnetic properties. 1st yoke 4a, 2nd yoke 4b and 4th yoke 4c or 1st yoke 4a, 2nd yoke 4b, 4th yoke 4c and 3rd yoke 10
A and 10b can be integrally formed by the lost wax method or the like of various magnetic materials having excellent magnetic characteristics.
【００４１】図７（ａ）は、図６に示す本発明の偏平コ
イル形リニア・アクチュエータの第２の実施例のＤーＤ
断面図を示し、図７（ｂ）は、図６に示す本発明の偏平
コイル形リニア・アクチュエータの第２の実施例のＥー
Ｅ断面図を示し、図７（ｃ）は、図６に示す本発明の偏
平コイル形リニア・アクチュエータの第２の実施例のＦ
ーＦ断面図を示す。FIG. 7A shows a second embodiment of the flat coil type linear actuator of the present invention shown in FIG.
7B is a sectional view, FIG. 7B is a sectional view taken along line EE of the second embodiment of the flat coil linear actuator of the present invention shown in FIG. 6, and FIG. 7C is shown in FIG. F of the second embodiment of the flat coil type linear actuator of the present invention shown
-F sectional view is shown.
【００４２】図７（ａ）において、永久磁石５ａ、５ｂ
と永久磁石６ａ、６ｂとは、それぞれ所定の間隙を隔て
対向する磁極面が異なる極性を有するように配置され、
永久磁石５ａのＮ極の極性を有する磁極面より第１のヨ
ーク４ａ、永久磁石５ｂ、永久磁石６ｂ、第２のヨーク
４ｂ、永久磁石６ａ、永久磁石５ａのＳ極の極性を有す
る磁極面へと磁束Φｃａが矢印の方向に流れ、一つの閉
磁路を形成し、永久磁石５ａのＮ極の極性を有する磁極
面より第１のヨーク４ａ、第３のヨーク１０ａ、第２の
ヨーク４ｂ、永久磁石６ａ、永久磁石５ａのＳ極の極性
を有する磁極面へと磁束Φｃｂが矢印の方向に流れ、一
つの閉磁路を形成し、永久磁石６ｂのＮ極の極性を有す
る磁極面より第２のヨーク４ｂ、第３のヨーク１０ｂ、
第１のヨーク４ａ、永久磁石５ｂ、永久磁石６ｂのＳ極
の極性を有する磁極面へと磁束Φｃｃが矢印の方向に流
れ、一つの閉磁路を形成する。In FIG. 7A, permanent magnets 5a and 5b are provided.
And the permanent magnets 6a and 6b are arranged such that the magnetic pole surfaces facing each other with a predetermined gap have different polarities,
From the magnetic pole surface of the permanent magnet 5a having the N pole polarity to the magnetic pole surface of the first yoke 4a, the permanent magnet 5b, the permanent magnet 6b, the second yoke 4b, the permanent magnet 6a, and the S pole of the permanent magnet 5a. And a magnetic flux Φca flow in the direction of the arrow to form one closed magnetic circuit, and the first yoke 4a, the third yoke 10a, the second yoke 4b, and the permanent magnet 5a have a magnetic pole surface having the polarity of the N pole. The magnetic flux Φcb flows in the direction of the arrow to the magnetic pole surface of the magnet 6a and the permanent magnet 5a having the polarity of the S pole to form one closed magnetic path, and the magnetic pole surface of the permanent magnet 6b having the polarity of the N pole has the second polarity. A yoke 4b, a third yoke 10b,
The magnetic flux Φcc flows in the direction of the arrow to the magnetic pole surface of the first yoke 4a, the permanent magnet 5b, and the permanent magnet 6b having the polarity of the S pole, and forms one closed magnetic path.
【００４３】図７（ｂ）において、第１のヨーク４ａ、
第２のヨーク４ｂと第４のヨーク４ｃとの間には、永久
磁石５ａのＮ極の極性を有する磁極面より第１のヨーク
４ａ、第４のヨーク４ｃ、第２のヨーク４ｂ、永久磁石
６ａ、永久磁石５ａのＳ極の極性を有する磁極面へと磁
束Φｃｄが矢印の方向に流れ、一つの閉磁路を形成す
る。In FIG. 7B, the first yoke 4a,
Between the second yoke 4b and the fourth yoke 4c, the first yoke 4a, the fourth yoke 4c, the second yoke 4b, and the permanent magnet are arranged from the magnetic pole surface of the permanent magnet 5a having the polarity of the N pole. 6a, the magnetic flux Φcd flows in the direction of the arrow to the magnetic pole surface having the polarity of the S pole of the permanent magnet 5a, forming one closed magnetic path.
【００４４】図７（ｃ）において、第１のヨーク４ａ、
第２のヨーク４ｂと第４のヨーク４ｃとの間には、永久
磁石６ｂのＮ極の極性を有する磁極面より第２のヨーク
４ｂ、第４のヨーク４ｃ、第１のヨーク４ａ、永久磁石
５ｂ、永久磁石６ｂのＳ極の極性を有する磁極面へと磁
束Φｃｅが矢印の方向に流れ、一つの閉磁路を形成す
る。In FIG. 7C, the first yoke 4a,
Between the second yoke 4b and the fourth yoke 4c, the second yoke 4b, the fourth yoke 4c, the first yoke 4a, and the permanent magnet are arranged from the magnetic pole surface of the permanent magnet 6b having the polarity of the N pole. 5b, the magnetic flux Φce flows in the direction of the arrow to the magnetic pole surface having the polarity of the S pole of the permanent magnet 6b, forming one closed magnetic path.
【００４５】図７（ａ）、図７（ｂ）および図７（ｃ）
より、空隙８の永久磁石５ａと永久磁石６ａとの対向面
が形成する部分には、磁束Φｃａ＋磁束Φｃｂが流れ、
空隙８の永久磁石５ｂと永久磁石６ｂとの対向面が形成
する部分には、磁束Φｃａ＋磁束Φｃｃが流れる。7 (a), 7 (b) and 7 (c)
As a result, the magnetic flux Φca + the magnetic flux Φcb flows in the portion of the gap 8 formed by the facing surfaces of the permanent magnets 5a and 6a,
The magnetic flux Φca + the magnetic flux Φcc flows in the portion of the gap 8 formed by the facing surfaces of the permanent magnets 5b and 6b.
【００４６】永久磁石５ａ、５ｂ、６ａ、６ｂより発生
される全磁束をΦａとすると、磁束Φｃａは、永久磁石
５ａ、５ｂ、６ａ、６ｂより発生される全磁束Φａの一
部であり、磁束Φｃｂは、永久磁石５ａ、６ａより発生
される磁束（Φａ／２）の一部であり、磁束Φｃｃは、
永久磁石５ｂ、６ｂより発生される磁束（Φａ／２）の
一部である。即ち、永久磁石５ａ、５ａ、６ａ、６ｂよ
り発生される全磁束Φａは、磁束Φｃａ、磁束Φｃｂお
よび磁束Φｃｃにより構成される。When the total magnetic flux generated by the permanent magnets 5a, 5b, 6a, 6b is Φa, the magnetic flux Φca is a part of the total magnetic flux Φa generated by the permanent magnets 5a, 5b, 6a, 6b. Φcc is a part of the magnetic flux (Φa / 2) generated by the permanent magnets 5a and 6a, and the magnetic flux Φcc is
It is a part of the magnetic flux (Φa / 2) generated by the permanent magnets 5b and 6b. That is, the total magnetic flux Φa generated by the permanent magnets 5a, 5a, 6a, 6b is composed of the magnetic flux Φca, the magnetic flux Φcb, and the magnetic flux Φcc.
【００４７】磁束Φｃａ＋磁束Φｃｂ＋磁束Φｃｃは、
永久磁石５ａ、５ｂ、６ａ、６ｂより発生する全磁束Φ
ａであり、空隙８内を流れる磁束はΦａである。第１の
ヨーク４ａ、第２のヨーク４ｂ、第３のヨーク１０ａ、
第３のヨーク１０ｂおよび第４のヨーク４ｃに流れる磁
束のみがが、磁束Φｃａ、磁束Φｃｂ、磁束Φｃｄと磁
束Φｃａ、磁束Φｃｃ、Φｃｅに分路する。The magnetic flux Φca + the magnetic flux Φcb + the magnetic flux Φcc is
Total magnetic flux Φ generated from the permanent magnets 5a, 5b, 6a, 6b
and the magnetic flux flowing in the gap 8 is Φa. The first yoke 4a, the second yoke 4b, the third yoke 10a,
Only the magnetic fluxes flowing in the third yoke 10b and the fourth yoke 4c are shunted into the magnetic flux Φca, the magnetic flux Φcb, the magnetic flux Φcd and the magnetic flux Φca, and the magnetic fluxes Φcc and Φce.
【００４８】第１のヨーク４ａおよび第２のヨーク４ｂ
は、磁束Φｃａ＋磁束ｃｂ−磁束Φｃｄ、磁束Φｃａ＋
Φｃｃ−磁束Φｃｅを、第３のヨーク４ａは、磁束Φｃ
ｂ−磁束Φｃｄ（一部）を、第３のヨーク１０ｂは、磁
束Φｃｃ−磁束Φｃｅ（一部）を、第４のヨーク４ｃ
は、磁束Φｃｄ、磁束Φｃｅを、それぞれ容易に流し得
る厚さを有するものであり、図３に示す偏平コイル形リ
ニア・アクチュエータに対して、第１のヨーク４ａおよ
び第２のヨーク４ｂの内部を流れる磁束が減少する。First yoke 4a and second yoke 4b
Is the magnetic flux Φca + the magnetic flux cb−the magnetic flux Φcd, the magnetic flux Φca +
Φcc-magnetic flux Φce, and the third yoke 4a generates magnetic flux Φc.
b-magnetic flux Φcd (partial), third yoke 10b, magnetic flux Φcc-magnetic flux Φce (partial), fourth yoke 4c.
Has a thickness that allows each of the magnetic flux Φcd and the magnetic flux Φce to easily flow. In the flat coil linear actuator shown in FIG. 3, the inside of the first yoke 4a and the second yoke 4b is The flowing magnetic flux is reduced.
【００４９】第１のヨーク４ａおよび第２のヨーク４ｂ
の内部を流れる磁束の減少は、第１のヨーク４ａおよび
第２のヨーク４ｂを薄くし得ることであり、更に、空隙
８内の磁束密度を大きくし得ることである。即ち、小型
軽量化、高推力化および長ストローク化を可能とするも
のである。First yoke 4a and second yoke 4b
The reduction of the magnetic flux flowing inside is that the first yoke 4a and the second yoke 4b can be made thin, and further the magnetic flux density in the air gap 8 can be made large. That is, it is possible to reduce the size and weight, increase the thrust, and increase the stroke.
【００５０】偏平コイル７に図７（ａ）に示す方向に所
定の大きさを有する電流を流すと、Ｂｉｌ則に従い可動
子３は矢印Ａ方向に移動し、偏平コイル７に前記電流と
異なる方向に所定の大きさを有する電流を流すと、可動
子３は矢印Ｂ方向に移動する。When a current having a predetermined magnitude is applied to the flat coil 7 in the direction shown in FIG. 7A, the mover 3 moves in the direction of arrow A in accordance with the Bil's law, and the flat coil 7 is moved in a direction different from the above current. When a current having a predetermined magnitude is applied to the mover 3, the mover 3 moves in the arrow B direction.
【００５１】図８および図９は、可動子支持装置および
位置検出センサーを内蔵した本発明の偏平コイル形リニ
ア・アクチュエータの第３の実施例を示すものである。FIGS. 8 and 9 show a flat coil type linear actuator according to a third embodiment of the present invention which incorporates a mover supporting device and a position detecting sensor.
【００５２】図８は、本発明の偏平コイル形リニア・ア
クチュエータの第３の実施例の固定子の斜視図であり、
図９は、本発明の偏平コイル形リニア・アクチュエータ
の第３の実施例の可動子の斜視図である。FIG. 8 is a perspective view of a stator of a flat coil type linear actuator according to a third embodiment of the present invention.
FIG. 9 is a perspective view of a mover of a third embodiment of the flat coil linear actuator of the present invention.
【００５３】固定子２は、図４に示す本発明の偏平コイ
ル形リニア・アクチュエータを、並列に対向させ、それ
ぞれ第２のヨーク４ｂを磁気的かつ機械的に接続した構
造を有し、Ｃの字状断面を有するヨークと、それぞれ平
板状をなす永久磁石５ａ、５ｂ、５ｃ、５ｄ、６ａ、６
ｂ、６ｃ、６ｄと、可動子支持装置９の固定部とを主に
構成される。The stator 2 has a structure in which the flat coil linear actuators of the present invention shown in FIG. 4 are opposed in parallel and the second yokes 4b are magnetically and mechanically connected to each other. A yoke having a V-shaped cross section, and permanent magnets 5a, 5b, 5c, 5d, 6a, 6 each having a flat plate shape.
b, 6c, 6d and a fixed portion of the mover support device 9 are mainly configured.
【００５４】ヨークは、内側に平滑な平面を有するヨー
ク１４ａ、１４ｂ、１４ｃ、１４ｄ、１４ｅの部分より
構成される。ヨーク１４ａの内側平面には、永久磁石５
ａおよび永久磁石５ｂがそれぞれ相反する極性を有する
磁極面が所定の間隔を隔て隣接するように固着され、ヨ
ーク１４ｂの内側平面には、永久磁石５ｃおよび永久磁
石５ｄがそれぞれ相反する極性を有する磁極面が所定の
間隔を隔て隣接するように固着され、ヨーク１４ｃのヨ
ーク１４ａに対向する内側平面には、永久磁石６ａおよ
び永久磁石６ｂがそれぞれ相反する極性を有する磁極面
が所定の間隔を隔て隣接するように固着され、ヨーク１
４ｃのヨーク１４ｂに対向する内側平面には、永久磁石
６ｃおよび永久磁石６ｄがそれぞれ相反する極性を有す
る磁極面が所定の間隔を隔て隣接するように固着され
る。The yoke is composed of the portions of the yokes 14a, 14b, 14c, 14d and 14e which have a smooth plane inside. The permanent magnet 5 is provided on the inner plane of the yoke 14a.
a and the permanent magnet 5b are fixed so that the magnetic pole surfaces having opposite polarities are adjacent to each other with a predetermined gap, and the permanent magnet 5c and the permanent magnet 5d have magnetic poles having opposite polarities on the inner plane of the yoke 14b. The surfaces are fixed so as to be adjacent to each other with a predetermined gap, and the magnetic pole surfaces having opposite polarities of the permanent magnet 6a and the permanent magnet 6b are adjacent to the inner plane of the yoke 14c facing the yoke 14a with a predetermined gap. Fixed so that the yoke 1
The permanent magnet 6c and the permanent magnet 6d are fixed to the inner plane facing the yoke 14b of the magnet 4c so that magnetic pole surfaces having opposite polarities are adjacent to each other with a predetermined gap.
【００５５】それぞれ所定の間隙を隔て対向する永久磁
石５ａと永久磁石６ａ、永久磁石５ｂと永久磁石６ｂ、
永久磁石５ｃと永久磁石６ｃおよび永久磁石５ｄと永久
磁石６ｄとは、それぞれ相反する極性を有する磁極面が
対向するように、それぞれヨーク１４ａ、１４ｂ、１４
ｃ、１４ｄ、１４ｅの部分に固着される。The permanent magnet 5a and the permanent magnet 6a, the permanent magnet 5b and the permanent magnet 6b, which face each other with a predetermined gap, respectively,
The permanent magnet 5c and the permanent magnet 6c, and the permanent magnet 5d and the permanent magnet 6d are arranged so that their magnetic pole faces having opposite polarities face each other, respectively.
It is fixed to the portions c, 14d and 14e.
【００５６】ヨーク１４ａ、１４ｂ、１４ｃ、１４ｄ、
１４ｅの部分より成るヨークは、各種磁性材料の板材を
Ｃ字状に曲げ加工し一体に構成し得るものであり、更
に、磁気特性の優れた各種磁性材料のロスト・ワックス
法等により一体に形成され得るものである。Yokes 14a, 14b, 14c, 14d,
The yoke composed of the portion 14e can be integrally formed by bending a plate material of various magnetic materials into a C shape, and is integrally formed by the lost wax method of various magnetic materials having excellent magnetic characteristics. It can be done.
【００５７】可動子３は、偏平コイル７、コイル支持部
材成１３および可動子支持装置９の可動部を主に構成さ
れる。偏平コイル７を構成する対向する二つのコイル辺
の中央部は、偏平コイル７の内側側面が形成する空間１
５内に収納される可動子支持装置９の可動部に装着され
たコイル支持部材１３の一部に固着される。偏平コイル
７の端末は、コイル支持部材１３の一部に装着される端
子１１に電気的に接続され、端子１１を介して偏平コイ
ル７に所定の方向に所定の大きさを有する電流を流す
と、Ｂｉｌ則に従い可動子３は、可動子支持装置９の可
動部と共に、永久磁石５ａ、５ｂと永久磁石６ａ、６ｂ
とのそれぞれの対向面が形成する空間内と、永久磁石５
ｃ、５ｄと永久磁石６ｃ、６ｄのそれぞれの対向面が形
成する空間内を円滑に移動する。The mover 3 mainly comprises the flat coil 7, the coil support member 13, and the movable portion of the mover support device 9. The central portion of the two opposing coil sides forming the flat coil 7 is the space 1 formed by the inner side surface of the flat coil 7.
It is fixed to a part of the coil support member 13 mounted on the movable portion of the mover support device 9 housed in the unit 5. The end of the flat coil 7 is electrically connected to a terminal 11 mounted on a part of the coil support member 13, and when a current having a predetermined magnitude is applied to the flat coil 7 through the terminal 11 in a predetermined direction. In accordance with the Bil rule, the mover 3 together with the movable part of the mover support device 9 includes permanent magnets 5a and 5b and permanent magnets 6a and 6b.
In the space formed by the opposing surfaces of the permanent magnet 5 and
c, 5d and the permanent magnets 6c, 6d move smoothly in the space formed by the facing surfaces.
【００５８】固定子２を構成するヨーク１４ｅの一部に
は、位置検出装置を構成する各種磁電変換素子等より成
るセンサー１８が装着され、偏平コイル７を構成する一
つのコイル辺には、位置検出装置のスケール１７を装着
したスケール取付け部材１９が固着される。A sensor 18 composed of various magnetoelectric conversion elements and the like which form a position detecting device is mounted on a part of the yoke 14e which forms the stator 2, and one coil side which forms the flat coil 7 has a position. The scale mounting member 19 to which the scale 17 of the detection device is attached is fixed.
【００５９】即ち、可動子支持装置９とスケール１７お
よびセンサー１８より成る位置検出装置の内蔵を容易に
し、小型軽量、高推力および長ストロークの偏平コイル
形リニア・アクチュエータの総合的なユニット化を可能
とするものである。That is, the position detecting device including the mover supporting device 9, the scale 17, and the sensor 18 can be easily incorporated, and a flat coil type linear actuator of small size, light weight, high thrust and long stroke can be integrated into a unit. It is what
【００６０】[0060]
【発明の効果】以上説明したように本発明の偏平コイル
形リニア・アクチュエータは、固定子を構成するヨーク
の薄型化を可能としたものであり、下記のような効果を
有するものである。 （１）固定子を構成するヨークの薄型化は、偏平コイル
形リニア・アクチュエータの薄型化および小型軽量化を
実現するものである。 （２）それぞれ所定の間隙を隔て対向する永久磁石が形
成する空間内の高磁束密度化が可能と成り、高推力化を
実現するものである。 （３）高磁束密度化により、偏平コイルに流す電流値を
減少させることが可能と成り、推力のリニアリティーの
向上を実現するものである。 （４）偏平コイルに流す電流値を減少させることが可能
と成り、消費電力の減少を実現するものである。 （５）本来、偏平コイル形リニア・アクチュエータは、
負荷の少変位の移動に供されるものであったが、高磁束
密度運転が可能と成り、長ストローク化を実現するもの
である。 （６）可動子支持装置および位置検出装置の装着を容易
にし、偏平コイル形リニア・アクチュエータの総合的な
ユニット化が図れる。As described above, the flat coil type linear actuator of the present invention enables the yoke constituting the stator to be thin, and has the following effects. (1) The thinning of the yoke forming the stator realizes the flattened coil type linear actuator in a thin shape and a small size. (2) It is possible to increase the magnetic flux density in the space formed by the permanent magnets facing each other with a predetermined gap therebetween, and to achieve high thrust. (3) By increasing the magnetic flux density, it is possible to reduce the value of the current flowing in the flat coil, and to improve the linearity of thrust. (4) It becomes possible to reduce the value of the current flowing through the flat coil, thereby reducing the power consumption. (5) Originally, the flat coil type linear actuator is
Although it was used for moving the load with a small displacement, it enables high magnetic flux density operation and achieves a long stroke. (6) The mover supporting device and the position detecting device can be easily mounted, and the flat coil linear actuator can be integrated into a unit.
【図１】図１は、偏平コイル形リニア・アクチュエータ
の第１の従来例の構造説明を目的とした斜視図である。FIG. 1 is a perspective view for explaining the structure of a first conventional example of a flat coil linear actuator.
【図２】図２は、図１の磁束の構成説明を目的とした断
面図である。FIG. 2 is a cross-sectional view for the purpose of explaining the configuration of magnetic flux in FIG.
【図３】図３は、偏平コイル形リニア・アクチュエータ
の第２の従来例の磁束の構成説明を目的とした断面図で
ある。FIG. 3 is a cross-sectional view for explaining the configuration of magnetic flux of a second conventional example of a flat coil type linear actuator.
【図４】図４は、本発明の偏平コイル形リニア・アクチ
ュエータの第１の実施例の構造説明を目的とした斜視図
である。FIG. 4 is a perspective view for the purpose of explaining the structure of a flat coil type linear actuator according to a first embodiment of the present invention.
【図５】図５は、図４の磁束の構成説明を目的とした断
面図である。図５（ａ）は、図４のＤ−Ｄ断面図であ
り、図５（ｂ）は、図４のＥ−Ｅ断面図であり、図５
（Ｃ）は、図４のＦ−Ｆ断面図である。5 is a sectional view for the purpose of explaining the configuration of the magnetic flux of FIG. 5A is a sectional view taken along the line DD of FIG. 4, and FIG. 5B is a sectional view taken along the line EE of FIG.
(C) is a FF sectional view of FIG.
【図６】図６は、本発明の偏平コイル形リニア・アクチ
ュエータの第２の実施例の構造説明を目的とした斜視図
である。FIG. 6 is a perspective view for the purpose of explaining the structure of a flat coil type linear actuator according to a second embodiment of the present invention.
【図７】図７は、図６の磁束の構成説明を目的とした断
面図である。図７（ａ）は、図６のＤ−Ｄ断面図であ
り、図７（ｂ）は、図６のＥ−Ｅ断面図であり、図７
（Ｃ）は、図６のＦ−Ｆ断面図である。FIG. 7 is a cross-sectional view for explaining the configuration of the magnetic flux of FIG. 7A is a sectional view taken along the line DD of FIG. 6, and FIG. 7B is a sectional view taken along the line EE of FIG.
(C) is a FF sectional view of FIG.
【図８】図８は、本発明の偏平コイル形リニア・アクチ
ュエータの第３の実施例の構造説明を目的とした固定子
の斜視図である。FIG. 8 is a perspective view of a stator for the purpose of explaining the structure of a flat coil type linear actuator according to a third embodiment of the present invention.
【図９】図９は、本発明の偏平コイル形リニア・アクチ
ュエータの第３の実施例の構造説明を目的とした可動子
の斜視図である。FIG. 9 is a perspective view of a mover for the purpose of explaining the structure of a flat coil linear actuator according to a third embodiment of the invention.
２ 固定子 ３ 可動子 ４ａ 第１のヨーク ４ｂ 第２のヨーク ４ｃ 第４のヨーク ５ａ、５ｂ、５ｃ、５ｄ 永久磁石 ６ａ、６ｂ、６ｃ、６ｄ 永久磁石 ７ 偏平コイル ８ 空隙 ９ 可動子支持装置 １０ａ、１０ｂ 第３のヨーク １１ 端子 １２ 負荷取付けネジ孔 １３ コイル支持部材 １４ａ、１４ｂ、１４ｃ、１４ｄ、１４ｅ ヨーク １５ 空間 １７ スケール １８ センサー １９ スケール取付け部材 2 stator 3 mover 4a first yoke 4b second yoke 4c fourth yoke 5a, 5b, 5c, 5d permanent magnets 6a, 6b, 6c, 6d permanent magnet 7 flat coil 8 air gap 9 mover support device 10a 10b Third yoke 11 Terminal 12 Load attachment screw hole 13 Coil support member 14a, 14b, 14c, 14d, 14e Yoke 15 Space 17 Scale 18 Sensor 19 Scale attachment member
Claims (2)
極性を有する磁極面を、隣接あるいは所定の間隔を隔て
隣接させて固着した平板状を成す磁性材料により形成さ
れる第１のヨークと、二つの平板状を成す永久磁石の相
反する極性を有する磁極面を、隣接あるいは所定の間隔
を隔て隣接させて固着した平板状を成す磁性材料により
形成された第２のヨークとを、一つの閉磁路が形成され
るように所定の間隔を隔て対向させ構成される固定子
と、前記第１のヨークに固着される永久磁石と前記第２
のヨークに固着される永久磁石との、所定の間隙を隔て
対向するそれぞれの磁極面が形成する空隙内を、前記永
久磁石の隣接する方向に円滑に移動し得る構造を有する
偏平コイルを主に構成される可動子とにより成る偏平コ
イル形リニア・アクチュエータにおいて、前記第１のヨ
ークを構成する前記可動子の移動方向に延びる側面の一
つと、前記第２のヨークを構成する前記可動子の移動方
向に延びる側面の一つとを磁気的に接続し、少なくとも
三つ以上の閉磁路を形成することを特徴とする偏平コイ
ル形リニア・アクチュエータ。1. A first yoke formed of a magnetic material having a flat plate shape, in which magnetic pole surfaces having opposite polarities of two flat plate-shaped permanent magnets are fixed adjacent to each other or at a predetermined interval. A second yoke formed of a flat plate-shaped magnetic material, in which magnetic pole surfaces having opposite polarities of two flat plate-shaped permanent magnets are fixed adjacent to each other or at a predetermined interval. A stator configured to face each other with a predetermined gap so as to form a closed magnetic path, a permanent magnet fixed to the first yoke, and the second magnet.
A flat coil having a structure capable of smoothly moving in a direction adjacent to the permanent magnet in a gap formed by respective magnetic pole surfaces facing each other with a predetermined gap between the permanent magnet fixed to the yoke of In a flat coil linear actuator including a movable element configured to move, one of side surfaces extending in a moving direction of the movable element configuring the first yoke and movement of the movable element configuring the second yoke. A flat coil linear actuator characterized in that at least three or more closed magnetic paths are formed by magnetically connecting to one of the side surfaces extending in the direction.
極性を有する磁極面を、隣接あるいは所定の間隔を隔て
隣接させて固着した平板状を成す磁性材料により形成さ
れる第１のヨークと、二つの平板状を成す永久磁石の相
反する極性を有する磁極面を、隣接あるいは所定の間隔
を隔て隣接させて固着した平板状を成す磁性材料により
形成された第２のヨークとを、三つの閉磁路が形成され
るように、前記第１のヨークおよび前記第２のヨークの
それぞれの両端部を構成する第３のヨークを介して所定
の間隔を隔て対向するように構成される固定子と、前記
第１のヨークに固着される永久磁石と前記第２のヨーク
に固着される永久磁石との、所定の間隙を隔て対向する
それぞれの磁極面が形成する空隙内を、前記永久磁石の
隣接する方向に円滑に移動し得る構造を有する偏平コイ
ルを主に構成される可動子とにより成る偏平コイル形リ
ニア・アクチュエータにおいて、前記第１のヨークを構
成する前記可動子の移動方向に延びる側面の一つと、前
記第２のヨークを構成する前記可動子の移動方向に延び
る側面の一つとを磁気的に接続し、少なくとも四つ以上
の閉磁路を形成することを特徴とする偏平コイル形リニ
ア・アクチュエータ。2. A first yoke formed of a magnetic material in the form of a flat plate, in which magnetic pole surfaces having opposite polarities of two flat plate-shaped permanent magnets are fixed adjacent to each other or at a predetermined interval. A second yoke formed of a flat plate-shaped magnetic material, in which magnetic pole surfaces having opposite polarities of two flat plate-shaped permanent magnets are fixed adjacent to each other or at a predetermined interval. A stator configured so as to face each other with a predetermined distance therebetween via third yokes forming both ends of each of the first yoke and the second yoke so that a closed magnetic circuit is formed; , The permanent magnets fixed to the first yoke and the permanent magnets fixed to the second yoke are adjacent to each other in a gap formed by respective magnetic pole surfaces facing each other with a predetermined gap. Smooth toward In a flat coil linear actuator including a movable element mainly composed of a flat coil having a movable structure, one of side surfaces extending in a moving direction of the movable element forming the first yoke, and A flat coil linear actuator characterized in that at least four or more closed magnetic paths are formed by magnetically connecting to one of the side surfaces of the second yoke extending in the moving direction, which constitutes the second yoke.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29385393A JPH07131967A (en) | 1993-11-01 | 1993-11-01 | Flat coil type linear actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29385393A JPH07131967A (en) | 1993-11-01 | 1993-11-01 | Flat coil type linear actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07131967A true JPH07131967A (en) | 1995-05-19 |
Family
ID=17800008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29385393A Pending JPH07131967A (en) | 1993-11-01 | 1993-11-01 | Flat coil type linear actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07131967A (en) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008120195A1 (en) * | 2007-03-30 | 2008-10-09 | Opgal Optronic Industries Ltd. | Electromagnetic shutter for imaging sensors |
| US7535148B2 (en) | 2003-08-28 | 2009-05-19 | University Of Southampton | Electromagnetic device for converting mechanical vibrational energy into electrical energy, and manufacture thereof |
| CN103472139A (en) * | 2013-09-06 | 2013-12-25 | 苏州凯欧机械科技有限公司 | Double-track axial positioning device of ultrasonic testing equipment |
| WO2014004589A1 (en) * | 2012-06-25 | 2014-01-03 | Neff Edward A | Low-cost, reduced diameter linear actuator |
| US9375848B2 (en) | 2012-06-25 | 2016-06-28 | Systems Machine Automation Components Corporation | Robotic finger |
| US9731418B2 (en) | 2008-01-25 | 2017-08-15 | Systems Machine Automation Components Corporation | Methods and apparatus for closed loop force control in a linear actuator |
| US9780634B2 (en) | 2010-09-23 | 2017-10-03 | Systems Machine Automation Components Corporation | Low cost multi-coil linear actuator configured to accommodate a variable number of coils |
| US9871435B2 (en) | 2014-01-31 | 2018-01-16 | Systems, Machines, Automation Components Corporation | Direct drive motor for robotic finger |
| US10215802B2 (en) | 2015-09-24 | 2019-02-26 | Systems, Machines, Automation Components Corporation | Magnetically-latched actuator |
| US10429211B2 (en) | 2015-07-10 | 2019-10-01 | Systems, Machines, Automation Components Corporation | Apparatus and methods for linear actuator with piston assembly having an integrated controller and encoder |
| US10675723B1 (en) | 2016-04-08 | 2020-06-09 | Systems, Machines, Automation Components Corporation | Methods and apparatus for inserting a threaded fastener using a linear rotary actuator |
| US10807248B2 (en) | 2014-01-31 | 2020-10-20 | Systems, Machines, Automation Components Corporation | Direct drive brushless motor for robotic finger |
| US10865085B1 (en) | 2016-04-08 | 2020-12-15 | Systems, Machines, Automation Components Corporation | Methods and apparatus for applying a threaded cap using a linear rotary actuator |
| WO2021000087A1 (en) * | 2019-06-29 | 2021-01-07 | 瑞声声学科技(深圳)有限公司 | Vibration motor |
| WO2021000090A1 (en) * | 2019-06-29 | 2021-01-07 | 瑞声声学科技(深圳)有限公司 | Vibration electric motor |
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-
1993
- 1993-11-01 JP JP29385393A patent/JPH07131967A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7535148B2 (en) | 2003-08-28 | 2009-05-19 | University Of Southampton | Electromagnetic device for converting mechanical vibrational energy into electrical energy, and manufacture thereof |
| WO2008120195A1 (en) * | 2007-03-30 | 2008-10-09 | Opgal Optronic Industries Ltd. | Electromagnetic shutter for imaging sensors |
| US8137013B2 (en) | 2007-03-30 | 2012-03-20 | Opgal Optronic Industries Ltd. | Electromagnetic shutter for imaging sensors |
| US9731418B2 (en) | 2008-01-25 | 2017-08-15 | Systems Machine Automation Components Corporation | Methods and apparatus for closed loop force control in a linear actuator |
| US9780634B2 (en) | 2010-09-23 | 2017-10-03 | Systems Machine Automation Components Corporation | Low cost multi-coil linear actuator configured to accommodate a variable number of coils |
| US9375848B2 (en) | 2012-06-25 | 2016-06-28 | Systems Machine Automation Components Corporation | Robotic finger |
| US10005187B2 (en) | 2012-06-25 | 2018-06-26 | Systems, Machines, Automation Components Corporation | Robotic finger |
| WO2014004589A1 (en) * | 2012-06-25 | 2014-01-03 | Neff Edward A | Low-cost, reduced diameter linear actuator |
| US9748823B2 (en) | 2012-06-25 | 2017-08-29 | Systems Machine Automation Components Corporation | Linear actuator with moving central coil and permanent side magnets |
| US9748824B2 (en) | 2012-06-25 | 2017-08-29 | Systems Machine Automation Components Corporation | Linear actuator with moving central coil and permanent side magnets |
| US9381649B2 (en) | 2012-06-25 | 2016-07-05 | Systems Machine Automation Components Corporation | Robotic finger |
| CN103472139A (en) * | 2013-09-06 | 2013-12-25 | 苏州凯欧机械科技有限公司 | Double-track axial positioning device of ultrasonic testing equipment |
| US9871435B2 (en) | 2014-01-31 | 2018-01-16 | Systems, Machines, Automation Components Corporation | Direct drive motor for robotic finger |
| US10807248B2 (en) | 2014-01-31 | 2020-10-20 | Systems, Machines, Automation Components Corporation | Direct drive brushless motor for robotic finger |
| US10429211B2 (en) | 2015-07-10 | 2019-10-01 | Systems, Machines, Automation Components Corporation | Apparatus and methods for linear actuator with piston assembly having an integrated controller and encoder |
| US10215802B2 (en) | 2015-09-24 | 2019-02-26 | Systems, Machines, Automation Components Corporation | Magnetically-latched actuator |
| US10675723B1 (en) | 2016-04-08 | 2020-06-09 | Systems, Machines, Automation Components Corporation | Methods and apparatus for inserting a threaded fastener using a linear rotary actuator |
| US10865085B1 (en) | 2016-04-08 | 2020-12-15 | Systems, Machines, Automation Components Corporation | Methods and apparatus for applying a threaded cap using a linear rotary actuator |
| WO2021000087A1 (en) * | 2019-06-29 | 2021-01-07 | 瑞声声学科技(深圳)有限公司 | Vibration motor |
| WO2021000090A1 (en) * | 2019-06-29 | 2021-01-07 | 瑞声声学科技(深圳)有限公司 | Vibration electric motor |
| CN113473328A (en) * | 2020-03-31 | 2021-10-01 | 歌尔股份有限公司 | Speaker and electronic apparatus |
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