JPH07128167A - Component force measuring apparatus - Google Patents
Component force measuring apparatusInfo
- Publication number
- JPH07128167A JPH07128167A JP5297409A JP29740993A JPH07128167A JP H07128167 A JPH07128167 A JP H07128167A JP 5297409 A JP5297409 A JP 5297409A JP 29740993 A JP29740993 A JP 29740993A JP H07128167 A JPH07128167 A JP H07128167A
- Authority
- JP
- Japan
- Prior art keywords
- load
- sides
- beams
- load receiving
- strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Force In General (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、供試体の鉛直方向荷
重(Z軸方向)、水平方向荷重(X,Y軸方向)、さら
には各軸回りのモーメント検出に用いる分力測定装置に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vertical force (Z axis direction), a horizontal load (X, Y axis direction) of a test piece, and a component force measuring device used for detecting a moment around each axis.
【0002】[0002]
【従来の技術】従来のこの種の測定装置としては、特開
平2−163627号公報に記載のものが知られてい
る。これは、荷重がかかる受荷重板の対向する2辺と受
荷重板を取囲む内枠の2辺とを少なくとも4ヶ所の内側
梁で連結し、内枠を取囲む外枠の対向する2辺と内枠の
2辺とを前記内側梁に交叉する方向で少なくとも4ヶ所
の外側梁で連結して受荷重板及び内枠を外枠で支持し、
内側梁及び外側梁に歪ゲージを設け、歪ゲージで検出し
た各梁の歪量を電気的に処理増幅して検出測定するよう
に構成したものである。この従来例によれば、受荷重板
に対する鉛直方向、即ちZ軸方向と受荷重板の水平方向
における互いに直交するX軸方向及びY軸方向の歪量を
検出することで、水平方向における2つの方向の荷重及
び鉛直方向即ち重量を測定することができる。2. Description of the Related Art As a conventional measuring device of this type, the one described in Japanese Patent Application Laid-Open No. 2-163627 is known. This is to connect two opposite sides of a load receiving plate to which a load is applied and two sides of an inner frame surrounding the load receiving plate with at least four inner beams to face two opposite sides of an outer frame surrounding the inner frame. And two sides of the inner frame are connected by at least four outer beams in a direction crossing the inner beam to support the load bearing plate and the inner frame by the outer frame,
A strain gauge is provided on the inner beam and the outer beam, and the strain amount of each beam detected by the strain gauge is electrically processed and amplified to be detected and measured. According to this conventional example, two strains in the horizontal direction are detected by detecting the strain amounts in the vertical direction with respect to the load receiving plate, that is, in the Z axis direction and the X axis direction and the Y axis direction that are orthogonal to each other in the horizontal direction of the load receiving plate. The directional load and the vertical or weight can be measured.
【0003】[0003]
【発明が解決しようとする課題】従来の測定装置は、二
重枠構造であり、受荷重板が二重枠(内枠,外枠)の内
部に位置するため、大きな供試体を測定する場合、受荷
重板を囲めるに十分な、より大きな外枠を持った装置に
する必要があり、そのため設置スペースを小さくするこ
とは難しかった。このような従来装置の受荷重板上にこ
れよりも大きな受板を取付けることも考えられるが、受
荷重板の周囲から外方へ大きく張り出した受板は供試体
の重量によって破壊されるおそれがあり、受板の取付け
には制限があった。The conventional measuring device has a double-frame structure, and since the load-bearing plate is located inside the double frame (inner frame, outer frame), when measuring a large specimen. However, it was necessary to make the device with a larger outer frame sufficient to enclose the load bearing plate, which made it difficult to reduce the installation space. It is conceivable to install a larger receiving plate on the load receiving plate of such a conventional device, but the receiving plate that largely projects outward from the periphery of the load receiving plate may be destroyed by the weight of the specimen. There was a limit to the mounting of the backing plate.
【0004】そこで、この発明は、大きな供試体を測定
する場合でも設置スペースが小さくてすみ、荷重を受け
る部分の破壊も生じにくい分力測定装置を提供すること
を目的とする。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a component force measuring apparatus which requires a small installation space even when measuring a large test piece and which is less likely to break a portion receiving a load.
【0005】[0005]
【課題を解決するための手段】上述の目的を達成するた
め、この発明は、荷重がかかる枠形状の受荷重部と接地
面等に設置固定され力を支える枠形状の接地部とを所定
の間隔で上下に重ねて配置し、前記受荷重部と前記接地
部との中央を上下に貫くようにかつ底面が接地部の底面
よりも上方に位置された中央部において前記受荷重部の
対向する2辺と相対する中央部の2辺とを1辺に2本合
計4本の上部梁で連結し、また上部梁に直交する方向で
前記接地部の対向する2辺と相対する中央部の2辺とを
1辺に2本合計4本の下部梁で連結して受荷重部と接地
部とを中央部で支持し、上部梁及び下部梁に歪ゲージを
設け、該歪ゲージで検出した各梁の歪量を電気的に処理
して検出測定するように構成したものである。In order to achieve the above-mentioned object, the present invention provides a frame-shaped load receiving portion to which a load is applied and a frame-shaped grounding portion which is installed and fixed on a grounding surface or the like to support a force. The load receiving parts are arranged one above the other at intervals and vertically pass through the centers of the load receiving part and the ground contacting part, and the bottom face is opposed to the load receiving part at the central part located above the bottom surface of the ground contacting part. The two sides and the two sides of the central portion facing each other are connected to each other by two upper beams, one on each side, and a total of four upper beams, and two of the central portions facing the two opposite sides of the grounding portion in the direction orthogonal to the upper beams. Each side is connected to one side by four lower beams in total to support the load bearing part and the grounding part in the central part, and strain gauges are provided on the upper beam and the lower beam. It is configured such that the strain amount of the beam is electrically processed and detected and measured.
【0006】[0006]
【作用】この発明においては、荷重がかかる受荷重部と
中央部を上部梁で連結し、接地部と中央部を前記の上部
梁とは直交する方向に下部梁で連結しているので、即
ち、受荷重部と接地部を中央部の上部梁と下部梁とで連
結している構造となったことで、装置全体に対する受荷
重部の面積の割合が大きくなる。逆に言えば受荷重部面
積に対して装置は小さく作ることが可能となり、試験機
等へ設置、組み込みをする場合、そのスペースは小さく
てすむことになり、試験機のダウンサイズ化に寄与する
ことになる。さらに上部梁及び下部梁の上下面及び又は
側面に歪ゲージを設けたことにより、受荷重板に対する
鉛直方向即ちZ軸方向の荷重、受荷重板の水平方向にお
けるお互いに直交するX軸及びY軸の各軸方向の荷重の
みならず、X軸,Y軸,Z軸の各軸回りのモーメントも
検出できるようになった。In the present invention, since the load receiving portion to which a load is applied and the central portion are connected by the upper beam, and the ground portion and the central portion are connected by the lower beam in the direction orthogonal to the upper beam, Since the load bearing portion and the ground contact portion are connected by the upper beam and the lower beam in the central portion, the ratio of the area of the load bearing portion to the entire device increases. Conversely, the device can be made smaller than the area of the load-bearing part, and when it is installed and installed in a testing machine, the space can be small, which contributes to downsizing of the testing machine. It will be. Further, by providing strain gauges on the upper and lower surfaces and / or side surfaces of the upper beam and the lower beam, the load in the vertical direction, that is, the Z-axis direction with respect to the load-bearing plate, the X-axis and the Y-axis orthogonal to each other in the horizontal direction of the load-bearing plate. Not only the load in each axis direction but also the moment around each axis of X-axis, Y-axis, and Z-axis can be detected.
【0007】[0007]
【実施例】以下に、この発明の好適な実施例を図面を参
照にして説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the drawings.
【0008】図1ないし図3に示す実施例において、荷
重がかかる枠形状の受荷重部1と接地面等に設置固定さ
れ力を支える同じく枠形状の接地部2とを所定の間隔で
上下に重ねて配置してある。受荷重部1と接地部2の中
央を上下に貫くように位置して中央部3を設けてある。
この中央部3の受荷重部2の対向する2辺と相対する2
辺とを1辺に2本合計4本の上部梁4で連結し、これら
上部梁4に直交する方向で接地部2の対向する2辺と相
対する中央部3の2辺とを1辺に2本合計4本の下部梁
5で連結して受荷重部1と接地部2とを中央部3で支持
してある。このように構成された測定装置をセットした
とき、接地部2の下面が接地し、中央部3は下部梁5に
よって接地しないよう浮いた状態で支持されている。ま
た、受荷重部1の内周側に受溝6が形成してあり、この
受溝6に図3に示すような受荷重板7を嵌込んで取付け
る。この受溝6のコーナー部にはねじ孔8が形成してあ
り、受荷重板7をねじ止めできるようになっている。受
荷重部1,接地部2,中央部3,上部梁4及び下部梁5
から成る部材は削出しによる一体成形で作られる。削り
出される材料としては、鉄板,アルミニウム,ジュラル
ミン,セラミック,プラスチック等の材料が好適に使用
できる。さらに、上部梁4及び下部梁5の断面形状は四
角形状をしており、荷重が加えられたときに撓むような
構造と取付け個所等を適宜選択した上で設けられてい
る。In the embodiment shown in FIGS. 1 to 3, a frame-shaped load receiving portion 1 to which a load is applied and a frame-shaped grounding portion 2 which is fixedly installed on a ground surface or the like and supports a force are vertically arranged at predetermined intervals. They are arranged on top of each other. A central portion 3 is provided so as to vertically pass through the centers of the load bearing portion 1 and the grounding portion 2.
2 facing the opposite two sides of the load bearing portion 2 of the central portion 3
Two sides are connected to one side by a total of four upper beams 4, and two sides of the central part 3 facing each other in the direction orthogonal to these upper beams 4 and two sides of the central part 3 which face each other are set to one side. Two of them are connected by a total of four lower beams 5, and the load bearing portion 1 and the ground contact portion 2 are supported by the central portion 3. When the measuring device configured as described above is set, the lower surface of the ground portion 2 is grounded, and the central portion 3 is supported by the lower beam 5 in a floating state so as not to be grounded. Further, a receiving groove 6 is formed on the inner peripheral side of the load receiving portion 1, and a load receiving plate 7 as shown in FIG. A screw hole 8 is formed in a corner portion of the receiving groove 6 so that the load receiving plate 7 can be screwed. Load bearing part 1, ground contact part 2, central part 3, upper beam 4 and lower beam 5
The member consisting of is made by one-piece molding by cutting. As the material to be cut out, materials such as iron plate, aluminum, duralumin, ceramics and plastics can be preferably used. Further, the cross-sectional shapes of the upper beam 4 and the lower beam 5 are quadrangular, and they are provided after appropriately selecting a structure and a mounting portion that bend when a load is applied.
【0009】前記上部梁4と下部梁5には歪ゲージA〜
Lが取付けられるが、これら歪ゲージA〜Lの取付け状
態を図4ないし図6に基づいて説明する。上部梁4の上
面には中央に歪ゲージA、両端に歪ゲージC及びDが取
付けてある。上部梁4の下面には、中央に歪ゲージB、
両端に歪ゲージE及びFが取付けてある。上部梁4の側
面には、中央に歪ゲージH及びG、両端に歪ゲージI〜
Lを取付けてある。下部梁5の上面には、中央に歪ゲー
ジA、両端に歪ゲージC及びDを取付けてある。下部梁
4の下面には、中央に歪ゲージB、両端に歪ゲージE及
びFを取付けてある。受荷重部1の水平方向における位
置方向即ちX軸方向の荷重の測定は、図4に示す〜
の個所の歪ゲージA及びBで下部梁5の歪を検出して測
定する。また、水平方向におけるX軸方向と直交するY
軸方向の荷重は、ないしの個所における歪ゲージA
及びBで上部梁4の歪を検出し測定する。受荷重部1に
対する鉛直方向即ちZ軸方向の荷重は、ないしの個
所の歪ゲージG及びHで上部梁4の歪を検出し測定す
る。さらに、X軸回りのモーメントMxは、〜の個
所の歪ゲージC,D,E,Fで下部梁5の歪を検出し測
定する。また、Y軸回りのモーメントMyは、〜の
個所の歪ゲージC,D,E,Fで上部梁4の歪を検出し
測定する。さらにまた、Z軸回りのモーメントMzは
〜の個所の歪ゲージI,J,K,Lで上部梁4の歪を
検出し測定する。The upper beam 4 and the lower beam 5 have strain gauges A to
Although L is attached, the attachment state of these strain gauges A to L will be described with reference to FIGS. A strain gauge A is attached to the center of the upper surface of the upper beam 4, and strain gauges C and D are attached to both ends thereof. The lower surface of the upper beam 4 has a strain gauge B in the center,
Strain gauges E and F are attached to both ends. On the side surface of the upper beam 4, strain gauges H and G are provided at the center, and strain gauges I to
L is attached. On the upper surface of the lower beam 5, a strain gauge A is attached at the center and strain gauges C and D are attached at both ends. On the lower surface of the lower beam 4, strain gauges B are attached at the center and strain gauges E and F are attached at both ends. The measurement of the load in the horizontal position direction of the load receiving portion 1, that is, the load in the X-axis direction is shown in FIG.
The strain of the lower beam 5 is detected and measured by the strain gauges A and B at the points. In addition, Y that is orthogonal to the X-axis direction in the horizontal direction
Axial load is strain gauge A at or
And B, the strain of the upper beam 4 is detected and measured. The load in the vertical direction, that is, the Z-axis direction on the load receiving portion 1 is measured by detecting the strain of the upper beam 4 with the strain gauges G and H at the points. Further, the moment Mx about the X-axis is measured by detecting the strain of the lower beam 5 with the strain gauges C, D, E and F at the positions. Further, the moment My about the Y axis is measured by detecting the strain of the upper beam 4 with the strain gauges C, D, E, and F at the positions. Furthermore, the moment Mz about the Z axis is measured by detecting the strain of the upper beam 4 with the strain gauges I, J, K, and L at the positions of.
【0010】図7ないし図10に示す各歪ゲージは、上
部梁4のの個所における上面,下面,両側面に取付け
られたものを示す。両端には上部梁4と同じ方向の曲げ
歪ゲージを、中央には荷重方向に対して45°の角度を
なす抵抗を配置したせん断歪ゲージを夫々取付けてあ
る。The strain gauges shown in FIGS. 7 to 10 are attached to the upper surface, the lower surface and both side surfaces of the upper beam 4 at the points. A bending strain gauge in the same direction as the upper beam 4 is attached to both ends, and a shear strain gauge having a resistance forming an angle of 45 ° with the load direction is attached to the center.
【0011】図11及び図12は、下部梁5のの個所
における歪ゲージを示し、それぞれ上面と下面とに取付
けられた例を示す。FIG. 11 and FIG. 12 show strain gauges at the location of the lower beam 5, showing examples attached to the upper surface and the lower surface, respectively.
【0012】図13ないし図18は歪ゲージの結線図を
示し、歪ゲージはホイートストンブリッジを形成してX
軸,Y軸,Z軸方向の荷重及びX軸,Y軸,Z軸の回り
のモーメントを測定できるようになっている。例えば、
図14の水平方向における一方向即ちX軸方向の荷重の
測定は、上部梁4(〜の個所)のせん断歪ゲージA
及びBを図14に示すホイートストンブリッジで結線
し、上部梁4の歪による抵抗値変化を出力し、SIG
(+),SIG(−)で電圧値として検出している。13 to 18 show wiring diagrams of strain gauges, which form a Wheatstone bridge and form X
The load in the directions of the axes, Y-axis and Z-axis and the moment around the X-axis, Y-axis and Z-axis can be measured. For example,
The measurement of the load in one direction in the horizontal direction of FIG.
And B are connected by the Wheatstone bridge shown in FIG. 14, and the resistance value change due to the strain of the upper beam 4 is output.
(+) And SIG (-) are detected as voltage values.
【0013】[0013]
【発明の効果】以上説明したように、この発明によれ
ば、装置全体に対する受荷重部の面積の割合が大きくな
り、反対に受荷重部面積に対して装置は小さく作ること
が可能となるので、装置全体のコンパクト化が図れる。
また、受荷重部面積の割合が大きくなるので、荷重を受
ける部分の破壊も生じにくい。As described above, according to the present invention, the ratio of the area of the load receiving part to the entire device is increased, and conversely, the device can be made smaller than the area of the load receiving part. The overall size of the device can be made compact.
Further, since the ratio of the area of the load receiving portion becomes large, the portion receiving the load is not easily broken.
【図1】この発明の好適な実施例を示す平面図。FIG. 1 is a plan view showing a preferred embodiment of the present invention.
【図2】図1における横方向の半断面図。FIG. 2 is a lateral half sectional view of FIG.
【図3】図1における縦方向の半断面図。FIG. 3 is a vertical half sectional view of FIG.
【図4】歪ゲージの取付け個所を示す平面図。FIG. 4 is a plan view showing an attachment point of a strain gauge.
【図5】歪ゲージの取付け個所を示す正面図。FIG. 5 is a front view showing a mounting portion of a strain gauge.
【図6】歪ゲージの取付け個所を示す側面図。FIG. 6 is a side view showing a mounting portion of a strain gauge.
【図7】上部梁の上面に取付けられた歪ゲージを示す
図。FIG. 7 is a diagram showing a strain gauge attached to the upper surface of an upper beam.
【図8】上部梁の下面に取付けられた歪ゲージを示す
図。FIG. 8 is a diagram showing a strain gauge attached to the lower surface of the upper beam.
【図9】上部梁の一方の側面に取付けられた歪ゲージを
示す図。FIG. 9 is a diagram showing a strain gauge attached to one side surface of an upper beam.
【図10】上部梁の他方の側面に取付けられた歪ゲージ
を示す図。FIG. 10 is a view showing a strain gauge attached to the other side surface of the upper beam.
【図11】下部梁の上面に取付けられた歪ゲージを示す
図。FIG. 11 is a diagram showing a strain gauge attached to the upper surface of a lower beam.
【図12】下部梁の下面に取付けられた歪ゲージを示す
図。FIG. 12 is a view showing a strain gauge attached to the lower surface of a lower beam.
【図13】Z軸方向の荷重を測定するための歪ゲージの
結線図。FIG. 13 is a wiring diagram of a strain gauge for measuring a load in the Z-axis direction.
【図14】X軸方向の荷重を測定するための歪ゲージの
結線図。FIG. 14 is a wiring diagram of a strain gauge for measuring a load in the X-axis direction.
【図15】Y軸方向の荷重を測定するための歪ゲージの
結線図。FIG. 15 is a wiring diagram of a strain gauge for measuring a load in the Y-axis direction.
【図16】Z軸回りのモーメントを測定するための歪ゲ
ージの結線図。FIG. 16 is a connection diagram of a strain gauge for measuring a moment about the Z axis.
【図17】X軸回りのモーメントを測定するための歪ゲ
ージの結線図。FIG. 17 is a connection diagram of a strain gauge for measuring a moment about the X axis.
【図18】Y軸回りのモーメントを測定するための歪ゲ
ージの結線図。FIG. 18 is a connection diagram of a strain gauge for measuring a moment around the Y axis.
1 受荷重部 2 接地部 3 中央部 4 上部梁 5 下部梁 A〜L 歪ゲージ 1 Load-bearing part 2 Grounding part 3 Central part 4 Upper beam 5 Lower beam A to L Strain gauge
Claims (2)
等に設置固定され力を支える枠形状の接地部とを所定の
間隔で上下に重ねて配置し、 前記受荷重部と前記接地部との中央を上下に貫くように
かつ底面が接地部の底面よりも上方に位置された中央部
において前記受荷重部の対向する2辺と相対する中央部
の2辺とを1辺に2本合計4本の上部梁で連結し、 また上部梁に直交する方向で前記接地部の対向する2辺
と相対する中央部の2辺とを1辺に2本合計4本の下部
梁で連結して受荷重部と接地部とを中央部で支持し、 上部梁及び下部梁に歪ゲージを設け、 該歪ゲージで検出した各梁の歪量を電気的に処理して検
出測定するように構成した分力測定装置。1. A frame-shaped load receiving part to which a load is applied and a frame-shaped grounding part installed and fixed on a grounding surface or the like to support a force are vertically stacked at a predetermined interval, and the load receiving part and the grounding are arranged. In the central part, which vertically penetrates the center of the load-bearing part, and whose bottom face is located above the bottom face of the grounding part, two sides of the central part facing each other and two sides of the central part facing each other are two sides. Connected with a total of four upper beams, and with two lower side beams in a direction perpendicular to the upper beams, two sides facing the grounding part and two sides of the central part facing each other are connected with a total of four lower beams. The load bearing part and the grounding part are supported by the central part, strain gauges are provided on the upper beam and the lower beam, and the strain amount of each beam detected by the strain gauge is electrically processed and detected and measured. Component force measuring device configured.
び又は曲げ歪ゲージを上部梁及び下部梁の上下面及び又
は側面に設けたことを特徴とする請求項1記載の分力測
定装置。2. The component force measuring device according to claim 1, wherein shear strain gauges and / or bending strain gauges are provided on the upper and lower surfaces and / or side surfaces of the upper beam and the lower beam as the strain gauges.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29740993A JP3348941B2 (en) | 1993-11-02 | 1993-11-02 | Component force measuring device |
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JP29740993A JP3348941B2 (en) | 1993-11-02 | 1993-11-02 | Component force measuring device |
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JPH07128167A true JPH07128167A (en) | 1995-05-19 |
JP3348941B2 JP3348941B2 (en) | 2002-11-20 |
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JP29740993A Expired - Fee Related JP3348941B2 (en) | 1993-11-02 | 1993-11-02 | Component force measuring device |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016061605A (en) * | 2014-09-16 | 2016-04-25 | ティアック株式会社 | Load cell and method for manufacturing load cell |
JP2016070673A (en) * | 2014-09-26 | 2016-05-09 | 株式会社レプトリノ | Force sensor |
CN106124111A (en) * | 2016-08-19 | 2016-11-16 | 国网河南省电力公司电力科学研究院 | Transformer high-voltage bushing end Cornu Caprae seu Ovis type gold utensil static tensile force measures system and method |
JP2017129586A (en) * | 2016-01-21 | 2017-07-27 | 国立大学法人 東京大学 | Sensor, measuring apparatus, and walking robot |
CN108267254A (en) * | 2018-04-21 | 2018-07-10 | 蚌埠日月仪器研究所有限公司 | Track fixing bolt forces testing sensor |
US11733113B2 (en) | 2018-06-14 | 2023-08-22 | Sintokogio, Ltd. | Strain element, strain element manufacturing method, and physical quantity measuring sensor |
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CN108955969B (en) | 2018-08-31 | 2021-03-02 | 纳恩博(北京)科技有限公司 | Resistance strain gauge, induction component, force sensor and slide |
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1993
- 1993-11-02 JP JP29740993A patent/JP3348941B2/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016061605A (en) * | 2014-09-16 | 2016-04-25 | ティアック株式会社 | Load cell and method for manufacturing load cell |
JP2016070673A (en) * | 2014-09-26 | 2016-05-09 | 株式会社レプトリノ | Force sensor |
JP2017129586A (en) * | 2016-01-21 | 2017-07-27 | 国立大学法人 東京大学 | Sensor, measuring apparatus, and walking robot |
CN106124111A (en) * | 2016-08-19 | 2016-11-16 | 国网河南省电力公司电力科学研究院 | Transformer high-voltage bushing end Cornu Caprae seu Ovis type gold utensil static tensile force measures system and method |
CN108267254A (en) * | 2018-04-21 | 2018-07-10 | 蚌埠日月仪器研究所有限公司 | Track fixing bolt forces testing sensor |
CN108267254B (en) * | 2018-04-21 | 2024-03-19 | 蚌埠日月仪器研究所有限公司 | Sensor for testing stress of track fixing bolt |
US11733113B2 (en) | 2018-06-14 | 2023-08-22 | Sintokogio, Ltd. | Strain element, strain element manufacturing method, and physical quantity measuring sensor |
Also Published As
Publication number | Publication date |
---|---|
JP3348941B2 (en) | 2002-11-20 |
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