JPH07122051A - Hermeticity measuring machine - Google Patents
Hermeticity measuring machineInfo
- Publication number
- JPH07122051A JPH07122051A JP28427893A JP28427893A JPH07122051A JP H07122051 A JPH07122051 A JP H07122051A JP 28427893 A JP28427893 A JP 28427893A JP 28427893 A JP28427893 A JP 28427893A JP H07122051 A JPH07122051 A JP H07122051A
- Authority
- JP
- Japan
- Prior art keywords
- closed container
- measuring
- valve
- pressure
- compressor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、密封度測定機に関し、
詳しくは小型の電子装置の密封度測定に適した密封度測
定機に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealing degree measuring machine,
Specifically, the present invention relates to a sealing degree measuring device suitable for measuring the sealing degree of a small electronic device.
【0002】[0002]
【従来の技術】従来、この種の密封度測定機は、例え
ば、内部の気密を必要とされる磁気ディスク装置の不良
品選別等に用いられている。そして、磁気ディスク装置
に密封度測定のための穴を設け、その穴から所定の圧力
をかけて、一定時間にリークによって生ずる圧力変化を
測定するようになっている。2. Description of the Related Art Conventionally, this type of hermeticity measuring machine has been used, for example, for selecting defective products of a magnetic disk device which requires airtightness inside. Then, a hole for measuring the degree of sealing is provided in the magnetic disk device, and a predetermined pressure is applied from the hole to measure a pressure change caused by a leak in a certain time.
【0003】[0003]
【発明が解決しようとする課題】この従来の密封度測定
機では、次のような問題があった。This conventional sealing degree measuring machine has the following problems.
【0004】密封度測定用の穴を設けるために、余計
なコストがかかっていた。An extra cost is required to provide the holes for measuring the degree of sealing.
【0005】小型の電子装置では測定用の穴を設ける
ことができず、密封度測定ができなかった。In a small electronic device, a measurement hole cannot be provided, and the degree of sealing cannot be measured.
【0006】[0006]
【発明の目的】そこで、密封度測定用の穴を不要とし、
製造コストを下げると共に、小型の電子装置でも測定可
能とする密封度測定機を提供することにある。SUMMARY OF THE INVENTION Therefore, a hole for measuring the degree of sealing is unnecessary,
An object of the present invention is to provide a hermeticity measuring machine which can reduce the manufacturing cost and can measure even a small electronic device.
【0007】[0007]
【課題を解決するための手段】本発明に係る密封度測定
機は、上記目的を達成するためになされたものであり、
第1の密閉容器と、この第1の密閉容器内の気圧を変化
させるコンプレッサと、このコンプレッサと前記第1の
密閉容器とを連通可能とする第1のバルブと、前記第1
の密閉容器内の気圧を測定する圧力計と、測定対象物を
内部に収容する第2の密閉容器と、この第2の密閉容器
と前記第1の密閉容器とを連通可能とする第2のバルブ
とを備えたものである。[Means for Solving the Problems] A sealing degree measuring machine according to the present invention is made to achieve the above object,
A first closed container; a compressor for changing the atmospheric pressure in the first closed container; a first valve that allows the compressor and the first closed container to communicate with each other;
A pressure gauge for measuring the atmospheric pressure in the closed container, a second closed container for accommodating an object to be measured, and a second closed container for allowing communication between the second closed container and the first closed container. It is equipped with a valve.
【0008】また、前記第2の密閉容器内の気圧を測定
する圧力計を備えたものとしてもよい。Further, a pressure gauge for measuring the atmospheric pressure in the second closed container may be provided.
【0009】[0009]
【作用】第1のバルブを開いて、コンプレッサと第1の
密閉容器とを連通させる。続いて、コンプレッサによ
り、第1の密閉容器内の気圧を変化させる。圧力計で第
1の密閉容器内の気圧を測定しつつ、第1の密閉容器内
の気圧がある値になったところで、第1のバルブを閉じ
てコンプレッサと第1の密閉容器との連通を解除する。
次に、測定対象物を内部に収容した第2の密閉容器と第
1の密閉容器とを、第2のバルブを開いて連通させる。
すると、第1の密閉容器内の気圧は、第2の密閉容器内
の気圧と瞬時に等しくなる。これにより、測定対象物内
の気圧と第1及び第2の密閉容器内の気圧とに差を生じ
る。その後、測定対象物内の密封の度合いによりリーク
が生じて、第1及び第2の密閉容器内の気圧が変化す
る。この変化を圧力計でとらえて、測定対象物の密封度
を測定する。The first valve is opened to connect the compressor to the first closed container. Subsequently, the air pressure inside the first closed container is changed by the compressor. While measuring the atmospheric pressure in the first closed container with a pressure gauge, when the atmospheric pressure in the first closed container reaches a certain value, the first valve is closed to establish communication between the compressor and the first closed container. To release.
Next, the second valve is opened so that the second closed container having the measurement object housed therein and the first closed container are in communication with each other.
Then, the atmospheric pressure in the first closed container instantly becomes equal to the atmospheric pressure in the second closed container. This causes a difference between the atmospheric pressure inside the object to be measured and the atmospheric pressure inside the first and second closed containers. After that, a leak occurs due to the degree of sealing inside the measurement object, and the atmospheric pressure inside the first and second sealed containers changes. By grasping this change with a pressure gauge, the degree of sealing of the measurement object is measured.
【0010】また、第2の密閉容器内の気圧を測定する
圧力計を備えてあれば、第2のバルブを開いて、第1と
第2の密閉容器内の気圧を等しくした後に、第2のバル
ブを閉じる。これにより、リークによる気圧の影響が第
2の密閉容器内に限定される。If a pressure gauge for measuring the atmospheric pressure in the second closed container is provided, the second valve is opened to equalize the atmospheric pressures in the first and second closed containers before the second Close the valve. Thereby, the influence of the atmospheric pressure due to the leak is limited to the inside of the second closed container.
【0011】[0011]
【実施例】図1は、請求項1記載の密封度測定機の一実
施例を示す概略断面図である。以下、この図面に基づき
説明する。FIG. 1 is a schematic sectional view showing an embodiment of the sealing degree measuring machine according to claim 1. Hereinafter, description will be given with reference to this drawing.
【0012】請求項1記載の密封度測定機は、第1の密
閉容器10と、密閉容器10内の気圧を変化させるコン
プレッサ12と、コンプレッサ12と密閉容器10とを
連通可能とする第1のバルブ14と、密閉容器10内の
気圧を測定する圧力計16と、測定対象物18を内部に
収容する第2の密閉容器20と、密閉容器20と密閉容
器10とを連通可能とする第2のバルブ22とを備えた
ものである。The hermeticity measuring machine according to the first aspect of the present invention is such that the first hermetic container 10, the compressor 12 for changing the air pressure in the hermetic container 10, and the first hermetic container 10 for making the compressor 12 and the hermetic container 10 communicate with each other. The valve 14, the pressure gauge 16 for measuring the atmospheric pressure in the closed container 10, the second closed container 20 for containing the measurement object 18 therein, and the second closed container 20 for allowing the closed container 10 and the closed container 10 to communicate with each other. And a valve 22 of.
【0013】すなわち、コンプレッサ12はバルブ14
を介して密閉容器10に接続され、密閉容器10はバル
ブ22を介して密閉容器20に接続されている。また、
密閉容器20には、測定対象物18を入れるための蓋部
20aが設けられている。That is, the compressor 12 has a valve 14
The closed container 10 is connected to the closed container 20 via a valve 22, and the closed container 10 is connected to the closed container 20 via a valve 22. Also,
The closed container 20 is provided with a lid 20 a for containing the measurement object 18.
【0014】次に、図1の密封度測定機の動作について
説明する。Next, the operation of the sealing degree measuring machine of FIG. 1 will be described.
【0015】まず、測定対象物18を密閉容器20に入
れ、空気が洩れないように密閉しておく。続いて、バル
ブ22を閉じると共にバルブ14を開けた状態で、コン
プレッサ12によって密閉容器10内の圧力を加圧又は
減圧して所定の値に変化させる。そして、密閉容器10
内が所定の圧力になったのを圧力計16で確認したら、
バルブ14を閉じる。次に、バルブ22を開けると、密
閉容器20及び密閉容器10の内部の圧力は、それぞれ
の容器の内容積,圧力及び測定対象物18の体積によっ
て決まる値に瞬時になる。そして、測定対象物18の内
部と密閉容器20の内部とで圧力差が生じるので、測定
対象物18の密封の度合によって、徐々に測定対象物1
8内でリークが起きる。このリークによる密閉容器20
及び密閉容器10内の圧力変化を圧力計16で測定し、
所定の圧力になる時間又は定められた時間経過後の圧力
を測定する。First, the object to be measured 18 is placed in a closed container 20 and sealed so that air does not leak. Subsequently, with the valve 22 closed and the valve 14 opened, the pressure in the closed container 10 is increased or decreased by the compressor 12 to be changed to a predetermined value. And the closed container 10
After confirming with the pressure gauge 16 that the inside has reached the predetermined pressure,
Close valve 14. Next, when the valve 22 is opened, the internal pressures of the closed container 20 and the closed container 10 instantly reach a value determined by the internal volume and pressure of the respective containers and the volume of the measuring object 18. Then, since a pressure difference occurs between the inside of the measuring object 18 and the inside of the closed container 20, the measuring object 1 gradually increases depending on the degree of sealing of the measuring object 18.
Leak occurs within 8. Closed container 20 due to this leak
And the pressure change in the closed container 10 is measured by the pressure gauge 16,
The pressure is measured when the pressure reaches a predetermined pressure or after a lapse of a predetermined time.
【0016】図2は、請求項2記載の密封度測定機の一
実施例を示す概略断面図である。以下、この図面に基づ
き説明する。但し、図1と同一部分には同一符号を付し
説明を省略する。FIG. 2 is a schematic sectional view showing an embodiment of the sealing degree measuring machine according to the present invention. Hereinafter, description will be given with reference to this drawing. However, the same parts as those in FIG.
【0017】請求項2記載の密封度測定機では、密閉容
器20内の気圧を測定する圧力計24が設けられてい
る。測定対象物18から圧力のリークが起こるときに、
測定対象物18を密閉している容積が大きいと、そのリ
ークによる圧力変化への影響が小さくなってしまうとい
う問題がある。そこで、バルブ22を開けて密閉容器2
0と密閉容器10との内部の圧力が等しくなった後に、
バルブ22を閉めしまう。これにより、リークによる圧
力変化が密閉容器20内に限定されるので、その圧力変
化を圧力計24で測定することにより、さらに精密な測
定が可能となる。In the sealing degree measuring machine according to the second aspect, a pressure gauge 24 for measuring the atmospheric pressure in the closed container 20 is provided. When a pressure leak occurs from the measuring object 18,
If the volume in which the measurement target 18 is sealed is large, there is a problem that the influence of the leak on the pressure change becomes small. Therefore, the valve 22 is opened and the closed container 2 is opened.
After the internal pressures of 0 and the closed container 10 become equal,
Close the valve 22. As a result, the pressure change due to the leak is limited to the closed container 20, so that the pressure change can be measured with the pressure gauge 24, which enables more precise measurement.
【0018】[0018]
【発明の効果】以上説明したように、本発明による密封
度測定機によれば、測定対象物内の圧力を変化させるの
ではなく、測定環境の圧力を変化させることによって密
封度を測定するようにしたので、密封度測定用の穴を不
要にできる。したがって、密封度測定用の穴を設けるこ
とに伴うコストを不要にできると共に、穴を設けること
のできない超小型磁気ディスク装置等の密封度も測定で
きる。As described above, according to the sealing degree measuring machine of the present invention, the sealing degree is measured by changing the pressure of the measurement environment, not by changing the pressure inside the object to be measured. Therefore, the hole for measuring the degree of sealing can be eliminated. Therefore, the cost associated with providing the hole for measuring the degree of sealing can be eliminated, and the degree of sealing of a microminiature magnetic disk device or the like in which no hole can be provided can be measured.
【図1】請求項1記載の密封度測定機の一実施例を示す
概略断面図である。FIG. 1 is a schematic sectional view showing an embodiment of a sealing degree measuring machine according to claim 1.
【図2】請求項2記載の密封度測定機の一実施例を示す
概略断面図である。FIG. 2 is a schematic sectional view showing an embodiment of the sealing degree measuring machine according to claim 2;
10 第1の密閉容器 12 コンプレッサ 14 第1のバルブ 16 圧力計(第1の圧力計) 18 測定対象物 20 第2の密閉容器 22 第2のバルブ 24 第2の圧力計 10 1st airtight container 12 Compressor 14 1st valve 16 Pressure gauge (1st pressure gauge) 18 Measurement object 20 2nd airtight container 22 2nd valve 24 2nd pressure gauge
Claims (2)
内の気圧を変化させるコンプレッサと、このコンプレッ
サと前記第1の密閉容器とを連通可能とする第1のバル
ブと、前記第1の密閉容器内の気圧を測定する圧力計
と、測定対象物を内部に収容する第2の密閉容器と、こ
の第2の密閉容器と前記第1の密閉容器とを連通可能と
する第2のバルブとを備えたことを特徴とする密封度測
定機。1. A first closed container, a compressor for changing the atmospheric pressure in the first closed container, a first valve for allowing the compressor and the first closed container to communicate with each other, and A pressure gauge for measuring the atmospheric pressure in the first closed container, a second closed container for accommodating an object to be measured, and a second closed container for allowing communication between the second closed container and the first closed container. A sealing degree measuring machine, which is equipped with a valve.
内の気圧を変化させるコンプレッサと、このコンプレッ
サと前記第1の密閉容器とを連通可能とする第1のバル
ブと、前記第1の密閉容器内の気圧を測定する第1の圧
力計と、測定対象物を内部に収容する第2の密閉容器
と、この第2の密閉容器と前記第1の密閉容器とを連通
可能とする第2のバルブと、前記第2の密閉容器内の気
圧を測定する第2の圧力計とを備えたことを特徴とする
密封度測定機。2. A first closed container, a compressor for changing the atmospheric pressure in the first closed container, a first valve for allowing the compressor and the first closed container to communicate with each other, and A first pressure gauge for measuring the atmospheric pressure in the first closed container, a second closed container for accommodating an object to be measured, and a communication between the second closed container and the first closed container. And a second pressure gauge for measuring the atmospheric pressure in the second closed container.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28427893A JPH07122051A (en) | 1993-10-19 | 1993-10-19 | Hermeticity measuring machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28427893A JPH07122051A (en) | 1993-10-19 | 1993-10-19 | Hermeticity measuring machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07122051A true JPH07122051A (en) | 1995-05-12 |
Family
ID=17676468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28427893A Pending JPH07122051A (en) | 1993-10-19 | 1993-10-19 | Hermeticity measuring machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07122051A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60242576A (en) * | 1984-05-15 | 1985-12-02 | Fujitsu Ltd | Magnetic disk device |
JPS62231127A (en) * | 1986-03-22 | 1987-10-09 | ソシエテ デ プロデユイ ネツスル ソシエテ アノニム | Airtight control and controller for package |
JPS6363742B2 (en) * | 1981-12-29 | 1988-12-08 |
-
1993
- 1993-10-19 JP JP28427893A patent/JPH07122051A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6363742B2 (en) * | 1981-12-29 | 1988-12-08 | ||
JPS60242576A (en) * | 1984-05-15 | 1985-12-02 | Fujitsu Ltd | Magnetic disk device |
JPS62231127A (en) * | 1986-03-22 | 1987-10-09 | ソシエテ デ プロデユイ ネツスル ソシエテ アノニム | Airtight control and controller for package |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8127615B2 (en) | Method for embossing a separating membrane of a pressure transfer means | |
US5239859A (en) | Method and apparatus for leak testing a hollow body | |
US6848318B2 (en) | Pressure sensor having metallic diaphragm seal joint | |
KR100290792B1 (en) | Container test method and container test device | |
JPH09237847A (en) | Hermetic structure for electronic component | |
JP2583880B2 (en) | Pack airtightness inspection method and apparatus | |
JPH05188076A (en) | Acceleration-sensor manufacturing method and acceleration sensor | |
JP2020144064A (en) | Leakage inspection method and leakage inspection device of battery pack | |
US11199461B2 (en) | Pressure sensor stacking arrangement, measuring device and method for the production thereof | |
US5034848A (en) | Low pressure sensor | |
JPH11304633A (en) | Air-leak detecting apparatus | |
JPH07122051A (en) | Hermeticity measuring machine | |
JP3983479B2 (en) | Battery leakage inspection device | |
JPH07104224B2 (en) | Leak inspection device | |
JP2007132875A (en) | Air leak inspection device | |
US3273376A (en) | Static and dynamic calibration vessel for pressure gages | |
JPS6111625A (en) | Liquid sealed type pressure sensor and its manufacture | |
JP2518472B2 (en) | Density meter for powder | |
JPH0634664Y2 (en) | Differential pressure indicator | |
JP3386626B2 (en) | Leak tester | |
JP2964045B2 (en) | Slow leak measurement method for envelopes | |
CN116728803A (en) | Pressure sensor production method | |
JP2000352539A (en) | Method for correcting measured value of and apparatus for correcting measured value of gas pressure, and method for detecting and apparatus for detecting air leak of sealed container using the same | |
JP3349489B2 (en) | Pressure sensor and method of manufacturing the same | |
JPS62163946A (en) | Airtightness inspection of capsule |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 19961203 |