JPH0698568A - Single phase reversible rotation electrostriction rotor motor - Google Patents
Single phase reversible rotation electrostriction rotor motorInfo
- Publication number
- JPH0698568A JPH0698568A JP3263349A JP26334991A JPH0698568A JP H0698568 A JPH0698568 A JP H0698568A JP 3263349 A JP3263349 A JP 3263349A JP 26334991 A JP26334991 A JP 26334991A JP H0698568 A JPH0698568 A JP H0698568A
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- JP
- Japan
- Prior art keywords
- electrodes
- motor
- rotor
- rotation
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【発明の詳細な説明】 [産業上の利用分野]本発明は超音波モータに係わり、
さらに詳しくは単相電源で駆動できる逆回転可能な電歪
公転子型モータに関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to an ultrasonic motor,
More specifically, the present invention relates to an electrostrictive revolution-type motor that can be driven by a single-phase power source and that can rotate in reverse.
[従来の技術]超音波モータは原理的に1)定常(在)
波型、2)進行波型、及び3)電歪公転子型の三種類に
大別される。いずれも超音波共振子からなり、共振子の
寸法Lと共振波長λの関係から、1)ではL=λ/2、
2)ではL>3λ、3)ではL=λと区別されている。
なお1)及び2)では共振時に共振子の重心は動かない
が、3)では重心が中心の回りを共振周波数で公転する
のが特徴である。電歪公転子モータには第4図に示すデ
ィスク形(a),シリンダ形(b),チューブ形(C)
の三種類があり、それぞれ単相または2相電源で駆動さ
れる。電極構造からは第5図に示す2極(a),単極
(b),4極(c)及び4極/共通(d)の四種類に分
類され、対称分極(a)及び(c)と非対称分極(b)
及び(d)とがある。本発明に関係する従来の単相電歪
公転子モータは非対称分極単電極型(b)か、対称分極
2電極型(a)かのいずれかであった。両者とも直径で
2分された2つの領域が非対称励振され公転トルクが発
生する点では同じである。この公転トルクの大きさは公
転子の円周に沿って四つ葉のクローバの形状に分布して
いる。励振領域境界線及びこれと直交する直径と交わる
四点の近くに節があり、節の両側は回転が互いに逆向き
になっている。この回転の向きは常に同じであるから、
時計など回転の向きが決まっているものを駆動するには
好都合である。一方、用途によっては電気信号によって
逆転させたい場合もあるが、このような場合には利用で
きなかった。電気信号によって逆回転させたい場合に
は、非対称分極された4電極/共通電極を有するASP
4/CE型(第5図d)か、対称分極された4極電極を
有するSP4E型(第5図c)のいずれかを用いて2相
電源で駆動することになる。SP4E型の場合は配線数
が8本になるので、その解決手段を特願平2−1962
02『電歪公転子の電極』で提案した。すなはち結線を
用いること無く、第3図に示すように、中心対称位の電
極膜を素子の内周面または外周面に沿って延長し、裏側
電極と結合した。その結果配線数を半分の4本に省略で
き、しかもいづれか片面だけから駆動できるようになっ
た。2相電源は2回路で構成されているので、複雑であ
り、小形化、1チップ化、低コスト化の点で不利であ
る。この点では単相モータは有利であり、しかも特願昭
59−173184『超音波モータの電力供給方式』で
提案したいわゆるH回路で駆動できるメリットをも有す
る。[Prior Art] The ultrasonic motor is in principle 1) steady (present)
Wave type, 2) traveling wave type, and 3) electrostrictive revolution type are roughly classified. Both of them are ultrasonic resonators, and in the case of 1), L = λ / 2, from the relationship between the resonator size L and the resonance wavelength λ.
In 2), L> 3λ and in 3) L = λ.
In 1) and 2), the center of gravity of the resonator does not move during resonance, but in 3), the center of gravity revolves around the center at the resonance frequency. The electrostrictive revolution motor has a disk type (a), a cylinder type (b), and a tube type (C) shown in FIG.
There are three types, each driven by a single-phase or two-phase power supply. The electrode structure is classified into four types of two poles (a), single pole (b), four poles (c) and four poles / common (d) shown in FIG. 5, and symmetrical polarizations (a) and (c). And asymmetric polarization (b)
And (d). Conventional single-phase electrostrictive revolution motors related to the present invention are either asymmetrically polarized single electrode type (b) or symmetrically polarized two electrode type (a). Both of them are the same in that two regions divided by the diameter are asymmetrically excited and a revolution torque is generated. The magnitude of this revolution torque is distributed in the shape of a four-leaf clover along the circumference of the revolution element. There are knots near the excitation region boundary line and four points intersecting the diameter orthogonal thereto, and the rotations are opposite to each other on both sides of the knot. The direction of this rotation is always the same,
It is convenient to drive a clock whose rotation direction is fixed. On the other hand, depending on the application, there may be a case where it is desired to reverse the direction by an electric signal, but it could not be used in such a case. ASP with asymmetrically polarized 4-electrode / common electrode, when it is desired to reverse rotation by an electric signal
Either the 4 / CE type (Fig. 5d) or the SP4E type with symmetrically polarized quadrupole electrodes (Fig. 5c) will be used to drive with a two-phase power supply. In the case of the SP4E type, the number of wirings is eight, so the solution is to be found in Japanese Patent Application No. 1962/1990.
02 Proposed in “Electrostrictive Orbiter Electrode”. That is, as shown in FIG. 3, the electrode film at the central symmetry position was extended along the inner peripheral surface or the outer peripheral surface of the device without using a wire connection, and was bonded to the back electrode. As a result, the number of wires could be reduced to half, that is, four wires, and it was possible to drive from only one side. Since the two-phase power supply is composed of two circuits, it is complicated and is disadvantageous in terms of downsizing, one chip, and cost reduction. In this respect, the single-phase motor is advantageous, and has a merit that it can be driven by a so-called H circuit proposed in Japanese Patent Application No. 59-173184 "Power supply system for ultrasonic motor".
[発明が解決しようとする課題]この発明は、上記従来
製品が持っていた単相電歪公転子モータは電気信号によ
って容易に逆転できないという欠点を解決し、以って小
形化、1チップ化、低コスト化に優れた単相可逆回転型
電歪公転子モータを提供することを目的とする。なお電
歪公転子モータ以外の従来超音波モータには、単相で駆
動できる機種もあり、その中には駆動周波数を変えるこ
とによって回転の向きをスイッチできるものもある。し
かし周波数を変えると共振モードが変わるので、回転の
向きが変わるだけでなく回転特性まで変わってしまうと
いう欠点があった。或いは例え回転特性が変わらないと
しても、周波数は一般に回転特性を制御するのに用いる
ので、回転の向きを変える目的で用いるのは不便であ
る。[Problems to be Solved by the Invention] The present invention solves the drawback that the single-phase electrostrictive revolution motor, which the above-mentioned conventional products have, cannot be easily reversed by an electric signal. An object of the present invention is to provide a single-phase reversible rotation type electrostrictive revolution motor having excellent cost reduction. Some conventional ultrasonic motors other than the electrostrictive revolution motor can be driven in a single phase, and among them, the direction of rotation can be switched by changing the driving frequency. However, when the frequency is changed, the resonance mode changes, so that not only the direction of rotation changes but also the rotation characteristics change. Alternatively, even if the rotation characteristic does not change, the frequency is generally used to control the rotation characteristic, and thus it is inconvenient to use it for the purpose of changing the direction of rotation.
[課題を解決するための手段]電歪公転子が単相電源で
駆動できることについては既に本発明者が「電歪公転子
及び単相超音波モータ」(特願63−88160)で提
案している。ここでは非対称分極された単極モータだけ
を対象にしていたが、対称分極後電極を2分割したSP
2Eモータ(第5図a)を非対称励振しても同じ結果の
得られることは類推可能であり、事実として正しいこと
が確認されている。そこで対称分極後電極を4分割した
SP4Eモータの表裏両面の4分割電極を,それぞれ隣
同志接続し非対称励振するとSP2Eモータとなる。た
だし右隣と接続した場合と左隣と接続した場合とでは、
非対称励振境界をなす直径が互いに直交するため、SP
2Eモータの周面上に誘起される回転トルクの向きが互
いに逆向きになる。この現象を利用すれば、2相駆動の
SP4Eモータを単相駆動のSP2Eモータに変換する
際の電極の接続の仕方を切り替えるだけで、モータの回
転の向きを切り替えることができる。この場合モータ側
に切り替え回路が余分に必要にはなるが、駆動電源側は
1回路だけで良いので、実用上のメリットは大きい。以
下実施例に基づいて説明する。[Means for Solving the Problems] Regarding the fact that the electrostrictive revolution rotor can be driven by a single-phase power source, the present inventor has already proposed it in “Electrostrictive revolution rotor and single-phase ultrasonic motor” (Japanese Patent Application No. 63-88160). There is. Here, only the asymmetrically polarized single pole motor was targeted, but after the symmetrical polarization, the electrode is divided into two SP
It can be inferred that the same result can be obtained by asymmetrically exciting the 2E motor (Fig. 5a), and it has been confirmed that the fact is correct. Therefore, the SP4E motor is a SP2E motor in which the four-divided electrodes on the front and back surfaces of the SP4E motor in which the electrodes are divided into four after symmetric polarization are connected adjacent to each other and asymmetrically excited. However, when connecting with the right neighbor and connecting with the left neighbor,
Since the diameters of the asymmetrical excitation boundaries are orthogonal to each other, SP
The directions of the rotational torques induced on the peripheral surface of the 2E motor are opposite to each other. If this phenomenon is utilized, the direction of rotation of the motor can be switched only by switching the connection method of the electrodes when converting the 2-phase drive SP4E motor to the single-phase drive SP2E motor. In this case, an extra switching circuit is required on the motor side, but since only one circuit is required on the drive power source side, there are great practical advantages. A description will be given below based on examples.
[実施例](実施例1)第1図は本発明に係わる単相可
逆回転型電歪公転子モータの実施例を示す説明図であ
る。本実施例に用いた電歪公転子はPb(Zr−Ti)
O3系圧電セラミックからなるディスク状モータであ
り、直径30mm内径12mm厚さ1mmの円板1の両
主面2,3に4等分割の扇形電極A,B,C,Dおよび
a,b,c,dが施され、厚みに沿って一様に分極され
ている。これら8個の扇形電極は点対称の位置に配置さ
れている電極同志が等電位になるように電気的に接続さ
れて、(AC),(Bd),(Ca)及び(Db)の4
組に分けられSP4Eモータを構成している。さて、モ
ータとして駆動するには、非対称励振励振をしなければ
ならないので、(Ac)と(Ca)及び(Bd)と(D
b)にはそれぞれ逆極性の電圧が印加されることにな
り、2回路が必要である。一方1回路だけで単相駆動す
るには、第5図(a)に示すように、両主面上に直径で
2等分された2電極AB及びabが施され、(Ab)及
び(Ba)がそれぞれ等電位をなすごとく電気的に接続
すればSP2Eモータとなり、回路の配線2本をそれぞ
れ(Ab)及び(Ba)に結線すれば、単相電圧で非対
称励振をすることができる。この場合配線2本の結線を
それぞれ入れ替えても、モータの回転の向きは変わらな
い。本実施例では、第1図(b)に示すようにSP4E
モータの構成のまま、電極A及びCに単相回路の配線を
結線する。端子BDには連投スイッチ7が設けられてお
り、上に倒すとACに下に倒すとCAに接続される。上
に倒すと(BA)及び(DC)がそれぞれ等電位面にな
り{第1図(c)に斜線で示す}、下に倒すと(BC)
及び(DA)がそれぞれ等電位面になる{第1図(d)
に斜線で示す}。上に倒した場合と下に倒した場合とで
は、非対称励振境界9が90゜回転するので、ロータシ
ャフト8の回転の向きが矢印で示すように逆転する。す
なわち単相モータの回転を任意の向きに制御できた。[Embodiment] (Embodiment 1) FIG. 1 is an explanatory view showing an embodiment of a single-phase reversible rotation type electrostrictive revolution motor according to the present invention. The electrostrictive orbiter used in this example is Pb (Zr-Ti).
A disk-shaped motor made of O 3 -based piezoelectric ceramic, which is divided into four equally divided fan-shaped electrodes A, B, C, D and a, b, on both main surfaces 2, 3 of a disk 1 having a diameter of 30 mm, an inner diameter of 12 mm and a thickness of 1 mm. c and d are applied and are uniformly polarized along the thickness. These eight fan-shaped electrodes are electrically connected so that the electrodes arranged at point-symmetrical positions are equipotential, and the four (AC), (Bd), (Ca), and (Db) are connected.
The SP4E motor is divided into groups. In order to drive as a motor, asymmetrical excitation and excitation must be performed. Therefore, (Ac) and (Ca) and (Bd) and (D
Voltages of opposite polarities are applied to b), and two circuits are required. On the other hand, in order to perform single-phase driving with only one circuit, as shown in FIG. 5 (a), two electrodes AB and ab equally divided by the diameter are provided on both main surfaces, and (Ab) and (Ba) are provided. ) Are electrically connected to each other so as to form an equipotential, and an SP2E motor is provided, and if two wirings of the circuit are respectively connected to (Ab) and (Ba), asymmetrical excitation can be performed with a single-phase voltage. In this case, the direction of rotation of the motor does not change even if the connections of the two wires are exchanged. In this embodiment, as shown in FIG. 1 (b), SP4E
The wiring of the single-phase circuit is connected to the electrodes A and C with the motor structure maintained. The terminal BD is provided with a continuous throw switch 7, which is connected to AC when tilted upward and to CA when tilted downward. When tilted up, (BA) and (DC) become equipotential surfaces, respectively {shown by diagonal lines in Fig. 1 (c)}, and tilted down (BC).
And (DA) become equipotential surfaces, respectively {Fig. 1 (d)
Are indicated by diagonal lines. Since the asymmetrical excitation boundary 9 rotates 90 ° when tilted upward and downward, the direction of rotation of the rotor shaft 8 is reversed as indicated by the arrow. That is, the rotation of the single-phase motor could be controlled in any direction.
(実施例2)第2図は本発明に係わる単相可逆回転型電
歪公転子モータの別の実施例を示す説明図である。本実
施例に用いた電歪公転子はPb(Zr−Ti)O3系圧
電セラミックからなるシリンダ状モータであり、直径4
0mm内径38mm厚さ1mmの円筒21の両主面2
2,23に4等分割の扇形電極A,B,C,Dおよび
a,b,c,dが施され、厚みに沿って放射状に一様に
分極されている。これら8電極は(Ac),(Bd),
(Ca)及び(Db)の4組に分けられ、特願平2−1
96202「電歪公転子の電極」での提案に従って結線
を用いること無く、第2図(a)に示すように、外周の
電極膜を素子の側面に沿って延長し、裏側電極と結合し
た。その結果配線数を半分の4本に省略でき、しかも外
周または内周いづれか片面だけから駆動できるSP4E
モータを構成している。さてモータとして駆動するには
非対称励振をしなければならないので、電極AとC及び
BとDにはそれぞれ逆極性の電圧が印加されることにな
り、2回路が必要である。本実施例では、第2図(b)
に示すSP4Eモータの構成のまま、電極A及びCに単
相回路の配線を結線する。端子BDには連投スイッチ2
7が設けられており、上25に倒すと(BA)及び(D
C)が等電位面になり、下26に倒すと(BC)及び
(DA)が等電位面になり、ロータ24の向きが矢印で
示すように逆転する。すなわち単相モータの回転を任意
の向きに制御できた。なお単相モータを逆転するための
電子回路としては様々な方法があり、用途によって選択
できるが、第6図にその1例を示す。(a)図は表面、
(b)図は裏面であり、電力を供給する端子を62とす
るか62′とするかで回転方向が変わる。(Embodiment 2) FIG. 2 is an explanatory view showing another embodiment of the single-phase reversible rotation type electrostrictive revolution motor according to the present invention. The electrostrictive orbiter used in this example is a cylindrical motor made of Pb (Zr-Ti) O 3 -based piezoelectric ceramic and has a diameter of 4 mm.
Both major surfaces 2 of a cylinder 21 having a 0 mm inner diameter 38 mm and a thickness 1 mm
2, 23 are provided with four equally divided fan-shaped electrodes A, B, C, D and a, b, c, d, and are uniformly polarized radially along the thickness. These 8 electrodes are (Ac), (Bd),
It is divided into four sets of (Ca) and (Db), and Japanese Patent Application No. 2-1
As shown in FIG. 2A, the electrode film on the outer periphery was extended along the side surface of the device and bonded to the back electrode without using any connection according to the proposal of 96202 “Electrostrictive Orbiter Electrode”. As a result, the number of wires can be reduced to half, that is, four, and the SP4E can be driven from either the outer or inner circumference or only one side.
It constitutes a motor. Since asymmetrical excitation must be performed in order to drive the motor, voltages of opposite polarities are applied to the electrodes A and C and B and D, and two circuits are required. In this embodiment, FIG. 2 (b)
The single-phase circuit wiring is connected to the electrodes A and C with the SP4E motor configuration shown in FIG. Continuous throw switch 2 on terminal BD
7 is provided, and when it is defeated to the upper 25, (BA) and (D
C) becomes an equipotential surface, and when tilted downward 26, (BC) and (DA) become equipotential surfaces, and the direction of the rotor 24 is reversed as shown by the arrow. That is, the rotation of the single-phase motor could be controlled in any direction. There are various methods for reversing the electric power of the single-phase motor, and various methods can be selected according to the intended use. One example is shown in FIG. (A) The figure shows the surface,
(B) The figure is the back side, and the rotation direction changes depending on whether the terminal for supplying power is 62 or 62 '.
[発明の効果]以上説明したように本発明では、円板、
円環、円筒、またはチューブ形状を有する電歪公転子を
用ちいた単相駆動のモータにおいて、素材の両表面にそ
れぞれ円周に沿って4等分され独立に励振できる電極を
施し、これら4対の電極A,B,C,Dを右隣の電極対
と等電位をなすごとく接続した2つの領域(AB)/
(CD)を非対称励振するか、または左隣の電極対と等
電位をなすごとく接続した2つの領域(AD)/(C
B)を非対称励振するかの電極同志の接続の組合わせを
切り替えることによって、モータの回転の向きを反転す
る構成をとったから、2相の2回路電源でなく単相一回
路電源を用いて可逆回転型電歪公転子モータを実現でき
たなど実用上の顕著な効果がある。[Effects of the Invention] As described above, in the present invention, the disc,
In a single-phase drive motor using an electrostrictive revolution element having a ring shape, a cylinder shape, or a tube shape, electrodes on each surface of the material are separately divided into four equal parts along the circumference and independently excited. Two regions (AB) / where the paired electrodes A, B, C, D are connected to the electrode pair on the right side so as to be equipotential.
(CD) is asymmetrically excited, or two regions (AD) / (C) are connected so as to form an equipotential with the electrode pair on the left side.
Since the configuration in which the direction of rotation of the motor is reversed by switching the combination of the electrodes that are asymmetrically excited in (B), the reversal is achieved by using a single-phase single-circuit power supply instead of a two-phase two-circuit power supply. It has significant practical effects such as the realization of a rotary electrostrictive revolution motor.
第1図は本発明によるディスク型単相可逆回転電歪公転
子モータの一実施例を示す説明図、第2図はシリンダ型
単相可逆回転電歪公転子モータの一実施例を示す説明
図、第3図はディスク型単相可逆回転電歪公転子モータ
の電極構造を示す構成説明図、第4図はディスク,シリ
ンダー,チューブ状電歪公転子の形状を示す説明図、第
5図は電歪公転子モータの分極方法及び電極の構成方法
をディスク状公転子で例示した説明図、第6図は逆転回
路説明図である。 1,21,31,41,42,43,51,53,5
5,57…電歪公転子、 2,3,22,23,32,33,52,54,56,
58,59………電極、 7,27…回転切替スイッチ、8,24………ロータ、 9,………非対称励振境界、FIG. 1 is an explanatory view showing an embodiment of a disk type single-phase reversible rotary electrostrictive revolution rotor motor according to the present invention, and FIG. 2 is an explanatory view showing an embodiment of a cylinder type single-phase reversible rotation electrostrictive revolution rotor motor. FIG. 3 is a structural explanatory view showing an electrode structure of a disk type single-phase reversible rotary electrostrictive revolution rotor motor, FIG. 4 is an explanatory view showing shapes of a disk, a cylinder and a tubular electrostrictive revolution rotor, and FIG. FIG. 6 is an explanatory view exemplifying a method of polarization of the electrostrictive revolution rotor motor and a method of configuring the electrodes with a disc-shaped revolution rotor, and FIG. 6 is an explanatory diagram of a reverse rotation circuit. 1, 21, 31, 41, 42, 43, 51, 53, 5
5, 57 ... Electrostrictive revolution element, 2, 3, 22, 23, 32, 33, 52, 54, 56,
58, 59 ... Electrodes, 7, 27 ... Rotation switch, 8, 24 ... Rotor, 9, ... Asymmetric excitation boundary,
Claims (1)
ラミック素材を直径で2等分した2つの領域が互いに逆
位相になるごとく非対称励振する電歪公転子を用いた単
相駆動のモータにおいて、当該2領域をさらに2等分し
た4領域の両主面それぞれに施した合計8個の電極を、
片面の4電極だけで非対称励振できるように構成し、こ
れら4電極A,B,C,DのA及びCをそれぞれ右隣の
電極と等電位をなすごとく接続した2つの領域(AB)
/(CD)を非対称励振するか、または左隣の電極と等
電位をなすごとく接続した2つの領域(AD)/(C
B)を非対称励振するかの電極同志の接続の組合わせを
切り替えることによって、モータの回転の向きを反転す
ることを特徴とする単相可逆回転型電歪公転子モータ。A single-phase drive motor using an electrostrictive revolving rotor that asymmetrically excites as if two regions bisected by a diameter of a piezoelectric ceramic material having a disk, ring, cylinder, or tube shape are in opposite phases to each other, A total of 8 electrodes applied to both main surfaces of 4 regions obtained by dividing the 2 regions into two equal parts,
Two regions (AB) are constructed so that they can be asymmetrically excited by only four electrodes on one side, and A and C of these four electrodes A, B, C, D are connected to the electrodes on the right side so as to be equipotential.
/ (CD) is asymmetrically excited or is connected to the electrode on the left side so as to be equipotential and two areas (AD) / (C
A single-phase reversible rotation type electrostrictive revolution motor, characterized in that the direction of rotation of the motor is reversed by switching the combination of the connection of the electrodes for asymmetrical excitation of B).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3263349A JPH0698568A (en) | 1991-07-08 | 1991-07-08 | Single phase reversible rotation electrostriction rotor motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3263349A JPH0698568A (en) | 1991-07-08 | 1991-07-08 | Single phase reversible rotation electrostriction rotor motor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0698568A true JPH0698568A (en) | 1994-04-08 |
Family
ID=17388241
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3263349A Pending JPH0698568A (en) | 1991-07-08 | 1991-07-08 | Single phase reversible rotation electrostriction rotor motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0698568A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020027713A (en) * | 2000-10-04 | 2002-04-15 | 황상문 | Vibration moter for cellular phone |
JP2007306775A (en) * | 2006-05-15 | 2007-11-22 | Canon Inc | Laminated piezoelectric element, production method and vibration wave driving device |
JP2010246347A (en) * | 2009-04-09 | 2010-10-28 | Sumida Corporation | Ultrasonic motor |
-
1991
- 1991-07-08 JP JP3263349A patent/JPH0698568A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020027713A (en) * | 2000-10-04 | 2002-04-15 | 황상문 | Vibration moter for cellular phone |
JP2007306775A (en) * | 2006-05-15 | 2007-11-22 | Canon Inc | Laminated piezoelectric element, production method and vibration wave driving device |
US8371005B2 (en) | 2006-05-15 | 2013-02-12 | Canon Kabushiki Kaisha | Stacked piezoelectric element, manufacturing method thereof and vibration wave driving apparatus |
JP2010246347A (en) * | 2009-04-09 | 2010-10-28 | Sumida Corporation | Ultrasonic motor |
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