JPH0693449B2 - Drying device for hot water pull-up system - Google Patents
Drying device for hot water pull-up systemInfo
- Publication number
- JPH0693449B2 JPH0693449B2 JP33593889A JP33593889A JPH0693449B2 JP H0693449 B2 JPH0693449 B2 JP H0693449B2 JP 33593889 A JP33593889 A JP 33593889A JP 33593889 A JP33593889 A JP 33593889A JP H0693449 B2 JPH0693449 B2 JP H0693449B2
- Authority
- JP
- Japan
- Prior art keywords
- drying
- pure water
- dried
- cleaning
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、温純水引上方式に於ける乾燥装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a drying device in a hot pure water pulling system.
（従来の技術） 平板状であるレンズ、光ディスク、液晶パネル、太陽電
池等は、洗浄工程で洗浄された後に乾燥工程で乾燥され
る。乾燥させる方法としては、従来、フロン113等の蒸
気によって乾燥させていた。しかし、フロンはオゾン層
保護のために使用禁止の方向にあり、このため、フロン
を用いない乾燥方法が要望されていた。(Prior Art) Flat lenses, optical disks, liquid crystal panels, solar cells and the like are washed in a washing step and then dried in a drying step. As a method for drying, conventionally, steam such as Freon 113 was used for drying. However, the use of CFCs is prohibited in order to protect the ozone layer, and therefore, there has been a demand for a drying method that does not use CFCs.
そこで、かかる要望に応えて、次に示す乾燥装置が提案
されている。この乾燥装置は、温純水を利用したもの
で、第３図に示すように、洗浄後の洗浄乾燥対象物１を
昇降治具３′に設けられた保持具４′上にセットして温
純水に浸漬し、その後、昇降治具３′をゆっくりとほぼ
垂直に引き上げるものである。この場合、浸漬中は洗浄
乾燥対象物１の表面に付着した洗浄液等の水分は温純水
中に拡散され、一方、引き上げ後においては温純水は表
面張力が弱いために洗浄乾燥対象物１の表面に付着しに
くくなるとともに、温純水の熱によって洗浄乾燥対象物
１の表面が加熱され、これにより、洗浄乾燥対象物１を
乾燥させている。Therefore, in response to such a request, the following drying device has been proposed. This drying apparatus uses warm pure water, and as shown in FIG. 3, the cleaning and drying object 1 after cleaning is set on the holder 4'provided on the lifting jig 3'and immersed in warm pure water. After that, the lifting jig 3'is slowly pulled up substantially vertically. In this case, the water such as the cleaning liquid adhering to the surface of the object to be washed and dried 1 is diffused into the hot pure water during the immersion, while the hot pure water has a low surface tension after being pulled up and therefore adheres to the surface of the object to be washed and dried 1. It becomes difficult to do so, and the surface of the cleaning / drying target 1 is heated by the heat of the hot pure water, whereby the cleaning / drying target 1 is dried.
また、保持具４′に洗浄乾燥対象物１を保持するに際し
ては、保持具４′に略Ｖ字形状の保持溝５を形成し、該
保持溝５の互いに対向する各斜面部６に洗浄乾燥対象物
１の両面部各周縁を接地させることにより、該洗浄乾燥
対象物１の保持を良好なものとしている。Further, when holding the cleaning / drying target 1 in the holder 4 ', a holding groove 5 having a substantially V shape is formed in the holder 4', and cleaning and drying are performed on the respective inclined surface portions 6 of the holding groove 5 facing each other. By holding the peripheral edges of both sides of the object 1 to be grounded, the cleaning and drying object 1 can be held well.
しかしながら、かかる乾燥装置においては、該洗浄乾燥
対象物１を保持溝５で保持しているため、洗浄乾燥対象
物１の接地部近傍に水滴Ｂが溜まり易くなり、しかも、
保持溝５は外部への露出面積が少なく乾燥効率が他に比
べて悪いため、該接地部近傍で洗浄乾燥対象物１が乾燥
しにくくなってしみ等が残ってしまうという問題点があ
った。However, in such a drying device, since the cleaning / drying object 1 is held by the holding groove 5, the water droplets B are likely to be accumulated in the vicinity of the grounded portion of the cleaning / drying object 1, and moreover,
Since the holding groove 5 has a small exposed area to the outside and the drying efficiency is poorer than the others, there is a problem that the cleaning and drying object 1 becomes difficult to dry near the grounded portion and stains and the like remain.
（発明が解決しようとする課題） 本発明はかかる不都合を解消するためになされたもので
あり、洗浄乾燥対象物を良好に保持できるのは勿論のこ
と、洗浄乾燥対象物の接地部近傍に溜まった水滴を確実
かつ素早く乾燥させて、しみ等を発生させない温純水引
上方式に於ける乾燥装置を提供することを目的とする。(Problems to be Solved by the Invention) The present invention has been made in order to eliminate such an inconvenience, and of course, the object to be washed and dried can be held well, and the object to be washed and dried is accumulated in the vicinity of the ground portion. It is an object of the present invention to provide a drying device in a warm pure water pull-up system that reliably and quickly drys water droplets and does not generate stains.
（課題を解決するための手段） 本発明は、かかる目的を達成するために、洗浄後の平板
状の洗浄乾燥対象物を昇降治具に設けられた保持具上に
セットして温純水に浸漬し、その後、前記昇降治具をゆ
っくりとほぼ垂直に引き上げ、温純水の表面張力を利用
して前記洗浄乾燥対象物を乾燥させる温純水引上方式に
於ける乾燥装置において、前記保持具には、前記洗浄乾
燥対象物の両面部の各周縁が互いに対向する斜面部にそ
れぞれ接地されて該洗浄乾燥対象物を保持する断面略Ｖ
字形状の保持溝が形成され、前記保持具の内部には、一
端が前記洗浄乾燥対象物の接地部の上方及び下方の各斜
面部にそれぞれれ開口する複数の第１吸引通路が形成さ
れ、前記昇降治具の内部には、その一端が各第１吸引通
路の他端に連通する第２吸引通路が形成され、該第２吸
引通路の他端には、前記第１及び第２吸引通路を介して
前記接地部近傍に溜まった水滴を外部に真空吸引する真
空吸引手段が接続されていることを特徴とするものであ
る。(Means for Solving the Problems) In order to achieve such an object, the present invention sets a flat plate-like object to be washed and dried after washing on a holder provided on an elevating jig and immerses it in warm pure water. After that, the lifting jig is slowly pulled up substantially vertically, and in the drying device in the warm pure water pulling-up method for drying the cleaning / drying target by using the surface tension of the warm pure water, the holder is A cross-section substantially V for holding the cleaning / drying target by grounding the respective peripheral edges of both sides of the cleaning / drying target to the slopes facing each other
A V-shaped holding groove is formed, and inside the holding tool, a plurality of first suction passages are formed, one end of which is open at the slopes above and below the grounding portion of the object to be washed and dried, respectively. Inside the lifting jig, a second suction passage is formed, one end of which communicates with the other end of each first suction passage, and the other end of the second suction passage has the first and second suction passages. It is characterized in that a vacuum suction means for vacuum suctioning the water droplets accumulated in the vicinity of the ground portion to the outside is connected via the.
（作用） 本発明によれば、真空吸引手段を駆動させることによ
り、洗浄乾燥対象物の接地部の上方及び下方に溜まった
水滴が第１及び第２吸引通路を介して素早く外部に吸引
除去される。(Operation) According to the present invention, by driving the vacuum suction means, water droplets accumulated above and below the ground portion of the object to be washed and dried are quickly sucked and removed to the outside through the first and second suction passages. It
（実施例） 以下、本発明の一実施例を第１図、第２図及び第４図を
参照して説明する。第１図は本発明の実施の一例である
温純水引上方式における乾燥装置の正面図、図２は図１
のＸ−Ｘ′線断面図、図４は図１のＹ−Ｙ′線断面図で
ある。(Embodiment) An embodiment of the present invention will be described below with reference to FIGS. 1, 2 and 4. FIG. 1 is a front view of a drying apparatus in a warm pure water pulling system which is an example of the embodiment of the present invention, and FIG.
4 is a sectional view taken along line XX 'of FIG. 4, and FIG.
乾燥装置１は角パイプからなる昇降治具３を備えてお
り、該昇降治具３は円形であるる光ディスク１を保持す
るために下部が湾曲形成され、該湾曲部からは把手が上
方に延びている。また、湾曲面には、光ディスク１をよ
り確実に保持し、かつ、接触面積をできるだけ小さくす
るために三個の保持具４が周方向に等間隔で配設されて
いる。The drying device 1 includes an elevating jig 3 made of a square pipe. The elevating jig 3 has a curved lower portion for holding the optical disc 1 having a circular shape, and a handle extends upward from the curved portion. ing. Further, on the curved surface, three holders 4 are arranged at equal intervals in the circumferential direction in order to hold the optical disk 1 more reliably and to minimize the contact area.
保持具４は、耐薬品性及び撥水性を有するテフロン製の
もので、その上端面には互いに対向する斜面部６と底面
部７とを有する断面路Ｖ字状の保持溝５が形成されてい
る。保持溝５の各斜面部６には、光ディスク１の両面部
の各周縁が接地されて良好に保持される。The holder 4 is made of Teflon having chemical resistance and water repellency, and a holding groove 5 having a V-shaped cross section having an inclined surface portion 6 and a bottom surface portion 7 facing each other is formed on the upper end surface thereof. There is. The respective peripheral edges of both surface portions of the optical disc 1 are grounded to the respective inclined surface portions 6 of the holding groove 5 and are favorably held.
保持具４の内部には、一端12が光ディスク１の接地部Ｃ
の上方及び下方の各斜面部６に開口する第１吸引通路13
がそれぞれ形成されている。各第１吸引通路13の他端は
昇降治具３の内部に連通されており、該昇降治具３の内
部は把手の先端に設けられた吸引ポンプ（図示せず。）
によって真空吸引できるように第２吸引通路14をなして
いる。Inside the holder 4, one end 12 has a ground portion C of the optical disc 1.
First suction passage 13 opening to the slopes 6 above and below
Are formed respectively. The other end of each first suction passage 13 communicates with the inside of the lifting jig 3, and the inside of the lifting jig 3 is a suction pump (not shown) provided at the tip of the handle.
The second suction passage 14 is formed so that vacuum suction can be performed.
次に、光ディスク１の乾燥方法について説明する。Next, a method of drying the optical disc 1 will be described.
第１図に示すように、洗浄後の光ディスク１は保持具４
の保持溝５に保持され、この状態で昇降治具３を下降さ
せて温度が60〜70℃位に設定された温純水２の中に垂直
に投入される。投入後、昇降治具３を上下に揺動させて
光ディスク１を温純水２になじませる。これにより、光
ディスク１の表面に付着した洗浄液等の水分が温純水中
に拡散されて除去される。次に、昇降治具３をゆっくり
と垂直に引き上げると、温純水は表面張力が弱いために
光ディスク１の表面から離脱しやすくなるとともに、温
純水の熱によって洗浄乾燥対象物１の表面が加熱されて
乾燥される。As shown in FIG. 1, the optical disc 1 after cleaning has a holder 4
Is held in the holding groove 5, and the elevating jig 3 is lowered in this state to vertically enter the warm pure water 2 whose temperature is set to about 60 to 70 ° C. After the insertion, the elevating jig 3 is swung up and down so that the optical disk 1 is made to adapt to the warm pure water 2. As a result, the water such as the cleaning liquid adhering to the surface of the optical disc 1 is diffused into the warm pure water and removed. Next, when the elevating jig 3 is slowly pulled up vertically, the hot pure water has a weak surface tension and is easily detached from the surface of the optical disc 1. At the same time, the surface of the cleaning and drying object 1 is heated and dried by the heat of the hot pure water. To be done.
このとき、光ディスク１は保持溝５に保持されているた
め、保持溝５の接地部Ｃ近傍において水滴Ｂが溜まり易
くなる。しかしながら、本実施例では、引き上げ後にお
いて吸引ポンプを作動させることにより第１及び第２吸
引通路13,14を介して該第１吸引通路13の一端開口12か
ら接地部Ｃの上方及び下方に溜まった水滴が素早く外部
に吸引除去される。なお、吸引に際しては、保持具５が
テフロン製で撥水性を有しているため、接地部Ｃの上方
及び下方で水滴になりやすく、従って、拡散している場
合に比べて開口12から吸引されやすくなる。このよう
に、本実施例では、光ディスク１全体から水滴を確実に
除去することができ、従来のように光ディスク１にしみ
等が発生するのを良好に防止することができる。At this time, since the optical disk 1 is held in the holding groove 5, the water droplet B is likely to collect near the ground contact portion C of the holding groove 5. However, in this embodiment, by operating the suction pump after the pulling up, the first suction passage 13 and the first suction passage 13 are accumulated through the first end opening 12 above and below the ground portion C through the first and second suction passages 13 and 14. Water drops are quickly sucked and removed to the outside. During suction, since the holder 5 is made of Teflon and has water repellency, water droplets are likely to be formed above and below the grounding portion C, and thus are sucked through the opening 12 as compared with the case of diffusion. It will be easier. As described above, in this embodiment, the water droplets can be reliably removed from the entire optical disc 1, and it is possible to favorably prevent the generation of spots and the like on the optical disc 1 as in the conventional case.
（発明の効果） 本発明によれば、真空吸引手段を作動させることにより
洗浄乾燥対象物の接地部の上方及び下方に溜まる水滴を
水滴真空吸引通路を介して確実かつ素早く外部に吸引除
去することができるため、洗浄乾燥対象物全体を良好に
乾燥させることができ、しみ等の原因を作りにくくする
ことができる。(Effect of the Invention) According to the present invention, by operating the vacuum suction means, water droplets accumulated above and below the ground portion of the object to be washed and dried can be reliably and quickly sucked and removed to the outside through the water droplet vacuum suction passage. Therefore, it is possible to satisfactorily dry the entire object to be washed and dried, and it is possible to make it difficult to cause causes such as stains.
【図面の簡単な説明】 第１図は本発明の実施の一例である乾燥装置の正面図、
第２図は第１図のＸ−Ｘ′線断面図、第３図は従来の乾
燥装置の縦断面図、第４図は図１のＹ−Ｙ′線断面図で
ある。 １……ウェハー、２……温純水、３……昇降治具、４…
…保持具、５……保持溝、６……斜面部、13……第１吸
引通路、14……第２吸引通路BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view of a drying device which is an example of an embodiment of the present invention,
2 is a sectional view taken along the line XX 'of FIG. 1, FIG. 3 is a longitudinal sectional view of a conventional dryer, and FIG. 4 is a sectional view taken along the line YY' of FIG. 1 ... Wafer, 2 ... Hot pure water, 3 ... Lifting jig, 4 ...
... Holder, 5 ... Holding groove, 6 ... Slope, 13 ... First suction passage, 14 ... Second suction passage
Claims (1)
具に設けられた保持具上にセットして温純水に浸漬し、
その後、前記昇降治具をゆっくりとほぼ垂直に引き上
げ、温純水の表面張力を利用して前記洗浄乾燥対象物を
乾燥させる温純水引上方式に於ける乾燥装置において、 前記保持具には、前記洗浄乾燥対象物の両面部の各周縁
が互いに対向する斜面部にそれぞれ接地されて該洗浄乾
燥対象物を保持する断面路Ｖ字形状の保持溝が形成さ
れ、前記保持具の内部には、一端が前記洗浄乾燥対象物
の接地部の上方及び下方の各斜面部にそれぞれ開口する
複数の第１吸引通路が形成され、前記昇降治具の内部に
は、その一端が各第１吸引通路の他端に連通する第２吸
引通路が形成され、該第２吸引通路の他端には、前記第
１及び第２吸引通路を介して前記接地部近傍に溜まった
水滴を外部に真空吸引する真空吸引手段が接続されてい
ることを特徴とする温純水引上方式に於ける乾燥装置。1. A flat plate-like object to be washed and dried after washing is set on a holder provided on a lifting jig and immersed in warm pure water,
Then, in the drying apparatus in the warm pure water pull-up method, in which the lifting jig is slowly pulled up substantially vertically and the cleaning / drying target is dried by using the surface tension of the warm pure water, Retaining grooves each having a V-shaped cross section for holding the cleaning / drying object are formed by grounding respective peripheral edges of both sides of the drying target object to the inclined surfaces facing each other, and one end is formed inside the holder. A plurality of first suction passages are formed on the slopes above and below the grounding portion of the object to be washed and dried, and one end of each first suction passage is formed inside the lifting jig. A second suction passage communicating with the second suction passage, and at the other end of the second suction passage, vacuum suction means for vacuum suctioning water droplets collected near the grounding portion via the first and second suction passages to the outside. Is characterized by being connected to Drying device in the pure water pulling system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33593889A JPH0693449B2 (en) | 1989-12-25 | 1989-12-25 | Drying device for hot water pull-up system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33593889A JPH0693449B2 (en) | 1989-12-25 | 1989-12-25 | Drying device for hot water pull-up system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03195021A JPH03195021A (en) | 1991-08-26 |
| JPH0693449B2 true JPH0693449B2 (en) | 1994-11-16 |
Family
ID=18294025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33593889A Expired - Lifetime JPH0693449B2 (en) | 1989-12-25 | 1989-12-25 | Drying device for hot water pull-up system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0693449B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023074933A1 (en) * | 2021-10-27 | 2023-05-04 | 주식회사 세정로봇 | Wafer vacuum pickup device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3838227B2 (en) * | 2002-08-06 | 2006-10-25 | セイコーエプソン株式会社 | Lens holding jig |
| US7089687B2 (en) * | 2004-09-30 | 2006-08-15 | Lam Research Corporation | Wafer edge wheel with drying function |
| US7946303B2 (en) * | 2006-09-29 | 2011-05-24 | Lam Research Corporation | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus |
| KR101290398B1 (en) * | 2009-01-09 | 2013-07-26 | 호야 가부시키가이샤 | Lens holding jig and method of manufacturing lens base material using same |
-
1989
- 1989-12-25 JP JP33593889A patent/JPH0693449B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| 発明協会公開技報公技番号８７−７１５５ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023074933A1 (en) * | 2021-10-27 | 2023-05-04 | 주식회사 세정로봇 | Wafer vacuum pickup device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03195021A (en) | 1991-08-26 |
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