JPH0675655U - Polishing machine - Google Patents
Polishing machineInfo
- Publication number
- JPH0675655U JPH0675655U JP1929093U JP1929093U JPH0675655U JP H0675655 U JPH0675655 U JP H0675655U JP 1929093 U JP1929093 U JP 1929093U JP 1929093 U JP1929093 U JP 1929093U JP H0675655 U JPH0675655 U JP H0675655U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- polishing
- dresser
- polishing machine
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
(57)【要約】
【目的】 安価でしかも部分的な交換が可能な研磨布用
のドレッサーを提供する。
【構成】 ドレッサー１は板状本体２とこの板状本体２
の一方の面に設けられる複数のセラミック製凸状部材３
からなり、この凸状部材３の基部には雄ネジ部３ａが刻
設され、この雄ネジ部３ａをもって板状本体２に穿設し
た雌ネジ部２ａにネジ込み式に取り付けられる。更に凸
状部材３の先端面は平坦面とされ、この平坦面にはドラ
イバー等の治具先端が入り込む溝３ｂが形成されてい
る。
(57) [Summary] [Purpose] To provide a dresser for polishing cloth, which is inexpensive and can be partially replaced. [Structure] The dresser 1 includes a plate-shaped main body 2 and the plate-shaped main body 2.
A plurality of ceramic convex members 3 provided on one surface of the
A male screw portion 3a is engraved on the base of the convex member 3, and the male screw portion 3a is screwed to the female screw portion 2a formed in the plate-shaped body 2. Furthermore, the tip end surface of the convex member 3 is a flat surface, and a groove 3b into which the tip end of a jig such as a driver is inserted is formed in this flat surface.
Description
【０００１】[0001]
本考案はスェードタイプまたは発泡ポリウレタンタイプの研磨布のドレッシン グ（目立て）に用いる研磨機治具に関する。 The present invention relates to a polishing machine jig used for dressing a suede type or polyurethane foam type polishing cloth.
【０００２】[0002]
例えばガラス基板の表面に磁性膜を形成するような場合には、ガラス基板表面 を所定の平坦度にすべく予め研磨しておく必要がある。この研磨には通常スェー ドタイプまたは発泡ポリウレタンタイプの研磨布が用いられる。 ところで、研磨布による研磨を継続して行っていると研磨布の目が潰れたりし て研磨能力が低下する。そこで、従来から研磨の開始或いは所定時間研磨したら 研磨布をドレッシングして研磨能力の回復を図っている。 For example, when a magnetic film is formed on the surface of the glass substrate, it is necessary to polish the surface of the glass substrate in advance so that the surface has a predetermined flatness. For this polishing, a suede type or polyurethane foam type polishing cloth is usually used. By the way, if the polishing with the polishing cloth is continuously performed, the polishing cloth may be crushed and the polishing ability may be lowered. Therefore, conventionally, the polishing ability is restored by dressing a polishing cloth after starting polishing or polishing for a predetermined time.
【０００３】 このとき、使用するドレッサーとしては、図５（ａ）および（ｂ）に示すよう な片面に溝１０を放射状に形成したセラミック製の研磨皿１１が用いられる。即 ち、台の上に研磨布をセットし、研磨機の回転体にこの研磨皿１１を溝１０が研 磨布に対向するように取り付け、所定の圧で研磨皿１１を研磨布に接触させなが ら回転させ、溝１０のエッジ部分で研磨布をドレッシングする。At this time, as a dresser to be used, a ceramic polishing plate 11 having grooves 10 radially formed on one surface as shown in FIGS. 5A and 5B is used. Immediately, set the polishing cloth on the table, attach the polishing plate 11 to the rotating body of the polishing machine so that the groove 10 faces the polishing plate, and bring the polishing plate 11 into contact with the polishing plate at a predetermined pressure. While rotating, the polishing cloth is dressed at the edge portion of the groove 10.
【０００４】[0004]
しかしながら上記ドレッサーは、研磨皿全体をセラミック製としているため、 非常に高価なものとなってしまい、また研磨面の一部が摩耗したり欠けた場合に 修正することが困難で、研磨皿全体を交換しなければならない。 However, the dresser is very expensive because the entire polishing dish is made of ceramic, and it is difficult to correct it if part of the polishing surface is worn or chipped. Must be replaced.
【０００５】[0005]
上記課題を解決するため本考案に係る研磨機は、ドレッサーを構成する板状本 体の一面側を回転体に取り付け、また板状本体の他面側にドレッシングを行う複 数の凸状部材を着脱可能に設けた。 In order to solve the above-mentioned problems, the polishing machine according to the present invention is provided with a plurality of convex-shaped members for mounting one surface side of a plate-shaped body constituting a dresser to a rotating body and for dressing the other surface side of the plate-shaped body. It is detachable.
【０００６】[0006]
回転体に板状本体を取り付け、板状本体に装着した凸状部材の先端部を所定の 圧で台上に載置した研磨布に接触させ、板状本体を回転させることで凸状部材の エッジ部によりドレッシングが行なわれる。 The plate-shaped main body is attached to the rotating body, and the tip of the convex member attached to the plate-shaped main body is brought into contact with the polishing cloth placed on the table with a predetermined pressure, and the plate-shaped main body is rotated to make the convex member Dressing is performed by the edge portion.
【０００７】[0007]
以下に本考案の実施例を添付図面に基づいて説明する。ここで、図１は本考案 に係る研磨機に装着するドレッサーの正面図、図２は同ドレッサーの底面図、図 ３は凸状部材の拡大図、図４は研磨布をドレッシングしている状態の研磨機を示 す図である。 Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is a front view of a dresser attached to the polishing machine according to the present invention, FIG. 2 is a bottom view of the dresser, FIG. 3 is an enlarged view of a convex member, and FIG. 4 is a state in which a polishing cloth is dressed. It is a figure which shows the grinder of this.
【０００８】 図１及び図２に示すようにドレッサー１は、板状本体２とこの板状本体２の一 方の面に設けられる複数の凸状部材３からなる。板状本体２は従来の研磨皿に相 当するものであり、使用する材料は価格、耐久性の点からアルミニウム、ステン レス、鉄等とし、その形状は、円盤状とするのが最適であるが、これに限るもの ではなく、角板状等であってもよい。更に、板状本体２の大きさも使用する研磨 機に適した大きさに適したものであればこれに拘泥するものではない。As shown in FIGS. 1 and 2, the dresser 1 includes a plate-shaped main body 2 and a plurality of convex-shaped members 3 provided on one surface of the plate-shaped main body 2. The plate-shaped main body 2 is equivalent to a conventional polishing dish, and the material used is aluminum, stainless steel, iron or the like in terms of price and durability, and the shape of the disc is optimal. However, the shape is not limited to this, and may be a rectangular plate or the like. Further, the size of the plate-shaped main body 2 is not limited to this as long as it is suitable for the size of the polishing machine used.
【０００９】 一方、凸状部材３はセラミック製とする。そして、本願のようなドレッシング に使用されるセラミックとしては、窒化ケイ素および炭化ケイ素も考えられるが 、価格、強度、耐久性の面から、アルミナ（Ａl2Ｏ3）を用いるのが好ましい。On the other hand, the convex member 3 is made of ceramic. Although silicon nitride and silicon carbide can be considered as the ceramic used for the dressing as in the present application, alumina (Al 2 O 3 ) is preferably used from the viewpoints of cost, strength and durability.
【００１０】 また、凸状部材３は円柱形とされ、基部には雄ネジ部３ａが刻設され、この雄 ネジ部３ａをもって板状本体２に穿設した雌ネジ部２ａにネジ込み式に取り付け られる。更に凸状部材３の先端面は平坦面とされ、この平坦面にはドライバー等 の治具先端が入り込む溝３ｂが形成されている。尚、溝の形状は＋形状に限るも のではなく−形状等でもよく、深さおよび幅も任意に設定することができる。Further, the convex member 3 has a cylindrical shape, a male screw portion 3a is engraved on the base portion, and the male screw portion 3a is screwed into the female screw portion 2a formed in the plate-shaped body 2. It is attached. Furthermore, the tip end surface of the convex member 3 is a flat surface, and a groove 3b into which the tip end of a jig such as a driver is inserted is formed on this flat surface. The shape of the groove is not limited to the positive shape, but may be a negative shape, and the depth and width can be set arbitrarily.
【００１１】 以上の構成からなるドレッサー１を用いたドレッシング方法を図４に基づいて 説明すると、先ずドレッサー１を回転体４の下面に取り付ける。この回転体４は モータにて回転せしめられる軸５に固着され、この軸５には研磨の際に水等の冷 却液を供給する孔５ａが形成されている。尚、回転体４及び板状本体２にも孔５ ａに連通する孔が形成されている。A dressing method using the dresser 1 having the above structure will be described with reference to FIG. 4. First, the dresser 1 is attached to the lower surface of the rotating body 4. The rotating body 4 is fixed to a shaft 5 which is rotated by a motor, and the shaft 5 has a hole 5a for supplying a cooling liquid such as water during polishing. It should be noted that the rotating body 4 and the plate-shaped main body 2 also have holes communicating with the holes 5a.
【００１２】 上記のように回転体４にドレッサー１を取り付けるとともに、回転体４の下方 に配置される台６上にドレッシングすべき研磨布７をセットする。そしてこの後 、回転体４とともにドレッサー１を回転させつつ下降させ、研磨布７表面にドレ ッサー１の凸状部材３を所定圧で接触せしめ、冷却液を供給しつつ凸状部材３の エッジ部及び溝３ｂで研磨布７の変形の修正を行なう。The dresser 1 is attached to the rotating body 4 as described above, and the polishing cloth 7 to be dressed is set on the table 6 arranged below the rotating body 4. Then, after this, the dresser 1 is rotated and lowered together with the rotating body 4, the convex member 3 of the dresser 1 is brought into contact with the surface of the polishing cloth 7 at a predetermined pressure, and the edge portion of the convex member 3 is supplied while supplying the cooling liquid. Also, the deformation of the polishing cloth 7 is corrected by the groove 3b.
【００１３】 以上の構成におけるドレッサーを研磨対象物がガラス（大きさ１５０ｍｍ×１ ５０ｍｍ、厚さ１．１ｍｍ）である研磨機（直径２５０ｍｍの上皿、直径３００ ｍｍの下皿を有するオスカー式研磨機）を用いて研磨布（スェードタイプ）をド レッシングした結果、研磨皿全体をセラミック製とし、研削面と対向する面に放 射状の溝を設けた従来構成のドレッサーと同等のドレッシング能力を発揮できる ことがわかった。The dresser having the above-mentioned structure is an Oscar type polishing machine having a polishing object (glass 150 mm × 150 mm, thickness 1.1 mm) whose polishing target is glass (diameter 250 mm upper plate, diameter 300 mm lower plate) As a result of dressing a polishing cloth (suede type) using a machine, the entire polishing dish is made of ceramic, and the dressing ability equivalent to that of the dresser with the conventional structure in which a radial groove is provided on the surface facing the grinding surface is obtained. It turns out that it can be demonstrated.
【００１４】 このときのドレッサーの仕様は以下のとおりである。 板状本体の材質： 鉄 板状本体の形状： 円盤 板状本体の直径： ２５０ｍｍ 板状本体の厚み： １５０ｍｍ 凸状部材の材質： セラミック 凸状部材の形状： 円柱形 凸状部材の直径： ３０ｍｍ 凸状部材の厚み： ３ｍｍ 溝の幅： ２〜５ｍｍ 溝の深さ： １ｍｍThe specifications of the dresser at this time are as follows. Material of plate body: Iron Shape of plate body: Disk Diameter of plate body: 250mm Thickness of plate body: 150mm Material of convex member: Ceramic Shape of convex member: Cylindrical shape Diameter of convex member: 30mm Thickness of convex member: 3 mm Width of groove: 2 to 5 mm Depth of groove: 1 mm
【００１５】 なお、研磨対象物（ガラス等）の大きさに合わせてドレッサーの形状を定め、 回転体４を研磨対象物取付治具として共用するようにすれば、ドレッシングとガ ラス研磨とを交互に行なうことが可能になり、作業効率が大巾に向上する。If the shape of the dresser is determined according to the size of the object to be polished (glass, etc.) and the rotating body 4 is used as a jig for attaching the object to be polished, dressing and glass polishing are alternately performed. Therefore, the work efficiency can be greatly improved.
【００１６】[0016]
以上に説明したように本考案によれば、従来のように研磨皿全体を高価なセラ ミック製とせず、ドレッシングを行なう複数の凸状部材だけセラミック製とする ことができるのでコストダウンを図れる。 また、凸状部材を板状本体にネジ込み式とすることで、特定の凸状部材だけ交 換できるので、片減りや欠けが生じてもその部分のみを交換することができ、ま た凸状部材の高さ調整も個々に且つ簡単に行うことができる。 更に、凸状部材の先端面にドライバー等の回転治具を差込む溝を形成すること で、当該溝がドレッシングにも寄与することになり、ドレッシング効果が大巾に 向上する。 As described above, according to the present invention, it is possible to reduce the cost because the polishing plate as a whole does not have to be made of expensive ceramic, but only the plurality of convex members for dressing can be made of ceramic. Also, by making the convex member screw-type into the plate-shaped body, only a specific convex member can be exchanged, so even if unevenness or chipping occurs, only that part can be exchanged. The heights of the strip members can be adjusted individually and easily. Furthermore, by forming a groove into which the rotary jig such as a driver is inserted on the tip end surface of the convex member, the groove also contributes to dressing, and the dressing effect is greatly improved.
【図１】本考案に係る研磨機に装着するドレッサーの正
面図FIG. 1 is a front view of a dresser mounted on a polishing machine according to the present invention.
【図２】同ドレッサーの底面図[Fig. 2] Bottom view of the dresser
【図３】凸状部材の拡大図FIG. 3 is an enlarged view of a convex member.
【図４】研磨布をドレッシングしている研磨機を示す図FIG. 4 is a view showing a polishing machine dressing a polishing cloth.
【図５】（ａ）は従来のドレッサーの底面図、（ｂ）は
正面図5A is a bottom view of a conventional dresser, and FIG. 5B is a front view.
１…ドレッサー、２…板状本体、２ａ…雌ネジ部、３…
凸状部材、３ａ…雄ネジ部、３ｂ…溝、４…回転体、７
…研磨布。DESCRIPTION OF SYMBOLS 1 ... Dresser, 2 ... Plate-shaped main body, 2a ... Female screw part, 3 ...
Convex member 3a ... Male screw portion, 3b ... Groove, 4 ... Rotating body, 7
... abrasive cloth.
Claims (3)
いて、この研磨機は回転体に着脱自在とされたドレッサ
ーを備え、このドレッサーは一面側を前記回転体への取
り付け面とした板状本体と、この板状本体の他面側に設
けられる複数の凸状部材とからなることを特徴とする研
磨機。1. A polishing machine for dressing a polishing cloth, the polishing machine includes a dresser detachably attached to a rotating body, and the dresser has a plate-shaped main body whose one surface side is a mounting surface to the rotating body. A polishing machine comprising a plurality of convex members provided on the other surface side of the plate-shaped main body.
み式とされ、その先端面には溝が形成されていることを
特徴とする請求項１に記載の研磨機治具。2. The polishing machine jig according to claim 1, wherein the convex member is of a screw type with respect to the plate-shaped main body, and a groove is formed on a tip end surface thereof.
物の取り付けが可能とされていることを特徴とする請求
項１に記載の研磨機治具。3. The polishing machine jig according to claim 1, wherein an object to be polished such as a glass substrate can be attached to the rotating body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1929093U JPH0675655U (en) | 1993-04-15 | 1993-04-15 | Polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1929093U JPH0675655U (en) | 1993-04-15 | 1993-04-15 | Polishing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0675655U true JPH0675655U (en) | 1994-10-25 |
Family
ID=11995314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1929093U Withdrawn JPH0675655U (en) | 1993-04-15 | 1993-04-15 | Polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0675655U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11731240B2 (en) | 2014-08-26 | 2023-08-22 | Ebara Corporation | Substrate processing apparatus |
-
1993
- 1993-04-15 JP JP1929093U patent/JPH0675655U/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11731240B2 (en) | 2014-08-26 | 2023-08-22 | Ebara Corporation | Substrate processing apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19970703 |