JPH0674903A - Detection method and device for minute defect of curved material to be detected - Google Patents
Detection method and device for minute defect of curved material to be detectedInfo
- Publication number
- JPH0674903A JPH0674903A JP25226192A JP25226192A JPH0674903A JP H0674903 A JPH0674903 A JP H0674903A JP 25226192 A JP25226192 A JP 25226192A JP 25226192 A JP25226192 A JP 25226192A JP H0674903 A JPH0674903 A JP H0674903A
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- height
- minute
- stage
- detecting
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば自動車や家電製
品等のアウターパネルとして使用される鋼板表面の微小
表面欠陥を検出する方法及びその検出装置に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and a detection device for detecting minute surface defects on the surface of a steel sheet used as an outer panel for automobiles and home electric appliances.
【０００２】[0002]
【従来の技術】例えば自動車のボディに使用される外装
鋼板は、プレス成型等の加工が加わるので、図７に示す
ように、プレス成型時に、被成型板である被検出物１の
裏面側に付着した異物や被検出物１の表面側に発生した
微小表面欠陥２あるいはプレス金型３に付着した異物４
等によってプレス成型品に微小な欠陥を生じる。この微
小な欠陥は、高さ２〜３μｍ程度であっても、塗装後、
外観にあらわれるので外装鋼板としては使用できなくな
る。従って、プレス成型前、及びプレス成型後に前記微
小表面欠陥を検出することは、品質管理の重要な項目の
１つとなっている。2. Description of the Related Art For example, an exterior steel plate used for the body of an automobile is subjected to processing such as press molding. Therefore, as shown in FIG. Foreign matter adhering to the surface of the object to be detected 1 or microscopic surface defects 2 or foreign matter 4 adhering to the press die 3
As a result, minute defects occur in the press-molded product. Even if the minute defect has a height of about 2 to 3 μm, after coating,
Since it appears in appearance, it cannot be used as an exterior steel plate. Therefore, detecting the minute surface defects before and after press molding is one of the important items in quality control.
【０００３】この微小表面欠陥を検出する方法として、
触針で被検出物上をトレースし、触針の水平方向移動
と上下方向移動とから表面欠陥を検出する触針法や、
光ビームで被検出物上をトレースし、光ビームの水平方
向移動と光ビームの被検出物表面までの到達時間によっ
て求められる表面高さ変動とから表面欠陥を検出する光
切断法、等がある。As a method for detecting this minute surface defect,
A stylus method that traces the detected object with a stylus and detects surface defects from the horizontal and vertical movements of the stylus,
There is a light cutting method, etc. that traces the surface of the object with the light beam and detects surface defects from the horizontal movement of the light beam and the surface height fluctuation determined by the arrival time of the light beam to the surface of the object to be detected. .
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、高さが
２〜３μｍの微小表面欠陥の場合には、被成型板や成型
板等の被検出物の表面粗度の高さが前記微小欠陥と略同
じであるので両者の判別が困難である。すなわち、図８
に示すような、１ピッチ１０μｍで高さが２〜３μｍの
表面粗度１ａの被検出物１に略同じ高さの微小表面欠陥
１ｂが存在する場合、この微小表面欠陥１ｂをの触針
法で検出しようとしても、実際上は１０μｍ以下の径の
触針を製造できないので、表面粗度１ａと微小欠陥１ｂ
との区別がつかず、したがって、図９に示すような平滑
な面として検出してしまうことになる。However, in the case of a minute surface defect having a height of 2 to 3 μm, the height of the surface roughness of the object to be detected such as the molding plate or the molding plate is substantially the same as the minute defect. Since they are the same, it is difficult to distinguish them. That is, FIG.
In the case where there is a minute surface defect 1b having substantially the same height on the detected object 1 having a surface roughness 1a with a pitch of 10 μm and a height of 2 to 3 μm as shown in FIG. However, in practice, it is not possible to manufacture a stylus having a diameter of 10 μm or less.
Therefore, it cannot be distinguished from the other, and therefore, it is detected as a smooth surface as shown in FIG.
【０００５】一方、の光切断法で検出した場合には、
被検出物１の表面を鮮明にトレースでき、図８に示すよ
うに、被検出物１の表面状態と同じように検出できる
が、これを定量化する際に、どれが微小欠陥かを判断す
るのが難しい。また、表面粗度は、被検出物１の材質
（成分）によって異なるが、光切断法では、焦点範囲が
固定であるので、異なる表面粗度ごとに異なる焦点範囲
の装置を用意しなければならない。On the other hand, in the case of detection by the light section method,
The surface of the object to be detected 1 can be clearly traced and can be detected in the same manner as the surface state of the object to be detected 1 as shown in FIG. 8, but when quantifying this, it is judged which is a micro defect. Is difficult. Further, the surface roughness varies depending on the material (component) of the object to be detected 1, but in the light section method, since the focus range is fixed, it is necessary to prepare a device having a different focus range for each different surface roughness. .
【０００６】従って、現在では、作業者が目視検査によ
って前記微小欠陥を検出しているのが実情であるが、こ
れでは、作業者の熟練度が介在し易く、検査の均一性に
問題がある。加えて、検査に手間や時間を費やすことに
なるので能率が悪くなる。Therefore, at present, it is the actual situation that the operator detects the minute defects by visual inspection, but this tends to involve the skill of the operator and there is a problem in the uniformity of the inspection. . In addition, the labor and time required for the inspection deteriorates the efficiency.
【０００７】本発明は、上記した従来の問題点に鑑みて
なされたものであり、上記した表面粗度と略同じ高さ程
度の微小欠陥を、高精度にかつ作業者の熟練度を必要と
することなく高能率に検出できる平板状被検出材の微小
欠陥検出方法及び装置を提供することを目的としてい
る。The present invention has been made in view of the above-mentioned problems of the prior art, and requires high precision and the skill level of the operator for minute defects having approximately the same height as the surface roughness described above. An object of the present invention is to provide a method and an apparatus for detecting minute defects in a flat plate-shaped material to be detected, which can be detected with high efficiency.
【０００８】[0008]
【課題を解決するための手段】上記した目的を達成する
ために、本発明の平板状被検出材の微小欠陥検出方法
は、被検出材を載置してあるステージを被検出材の水平
面方向に所定距離だけ移動させつつ、それぞれの位置で
焦点法により被検出材の表面高さを検出する動作を繰り
返し行うことで、被検出材表面の微細形状を３次元で検
出し、微小欠陥を検出する方法において、平板状被検出
材の表面粗度より大きく、かつ微小表面欠陥より小さく
なした焦点範囲で被検出材表面の微細形状を検出し、こ
の検出値を、検出した被検出材の表面高さに基づいて算
出する被検出材の基準平面に基づいて補正することとし
ているのである。In order to achieve the above-mentioned object, a method for detecting micro defects in a flat plate-shaped material to be detected according to the present invention includes a stage on which the material to be detected is mounted in a horizontal direction of the material to be detected. By repeating the operation of detecting the surface height of the material to be detected by the focus method at each position while moving for a predetermined distance, the fine shape of the surface of the material to be detected can be detected three-dimensionally and minute defects can be detected. In the method, the fine shape of the surface of the material to be detected is detected in the focus range that is larger than the surface roughness of the flat material to be detected and smaller than the minute surface defects, and the detected value is the surface of the detected material to be detected. The correction is based on the reference plane of the detected material calculated based on the height.
【０００９】また、本発明の平板状被検出材の微小欠陥
検出装置は、上記した本発明検出方法に使用する装置で
あって、被検出材を載置するステージと、このステージ
の水平面方向における移動機構と、この移動機構による
ステージの水平面方向移動量を出力する水平面方向スケ
ーラと、前記ステージ上の被検出材の表面高さ量検出装
置と、この表面高さ量検出装置による検出量を出力する
高さ方向スケーラと、この高さ方向スケーラからの検出
量のうち、任意の３点以上の検出高さ平面を算出するこ
とを複数回繰り返してそれらの算出値の平均値から基準
平面を求め、かつ前記両出力信号に基づいて被検出材表
面の３次元図を作成した後、この作成した３次元図を前
記基準平面に基づいて補正し、この補正値から検出しよ
うとする微小表面欠陥の面積、体積等を演算する信号処
理装置を具備させているのである。The flat defect detection device for a flat material to be detected according to the present invention is an apparatus used in the above-described detection method according to the present invention. The stage is provided with the material to be detected and the stage is arranged in a horizontal plane direction. A moving mechanism, a horizontal scaler that outputs the amount of movement of the stage in the horizontal direction by this moving mechanism, a surface height detection device for the material to be detected on the stage, and a detection amount by this surface height detection device. Of the height direction scaler and the detection amount from the height direction scaler, calculation of detection height planes of three or more arbitrary points is repeated a plurality of times, and the reference plane is obtained from the average value of the calculated values. After creating a three-dimensional drawing of the surface of the material to be detected based on both the output signals, the created three-dimensional drawing is corrected based on the reference plane, and a micro surface to be detected from this correction value. Area of Recessed is're is provided a signal processing apparatus for calculating the volume and the like.
【００１０】[0010]
【作用】本発明の平板状被検出材の微小欠陥検出装置
は、先ず、平板状被検出材の表面粗度を測定し、測定し
た表面粗度の１０〜５００倍となるように、表面高さ量
検出装置の焦点範囲を決定する。これは１０倍以上でな
いと表面粗度の影響を受けるためである。次に、ステー
ジ上に被検出材を載置し、ステージを水平面方向に移動
させつつ、それぞれの位置において表面高さ量検出装置
で被検出材の表面高さを検出する。なお、ステージの水
平面方向の移動量は、前記決定した焦点範囲が重なら
ず、かつ、隙間ができないような移動量である。In the apparatus for detecting minute defects of a flat plate-shaped material to be detected according to the present invention, first, the surface roughness of the flat plate-shaped material to be detected is measured, and the surface height is adjusted to 10 to 500 times the measured surface roughness. The focus range of the volume detection device is determined. This is because the surface roughness is affected unless it is 10 times or more. Then, the material to be detected is placed on the stage, and the surface height of the material to be detected is detected by the surface height amount detecting device at each position while moving the stage in the horizontal plane direction. The amount of movement of the stage in the horizontal plane direction is such that the determined focal ranges do not overlap and no gap is formed.
【００１１】そして、信号処理装置において、前記高さ
方向スケーラからの検出量のうち、任意の３点以上の検
出高さ平面を算出することを複数回繰り返してそれらの
算出値の平均値から基準平面を求めるとともに、前記ス
テージの水平面方向の移動量と表面高さ量から被検出材
表面の３次元図を作成し、その後、作成した３次元図を
前記算出した基準平面に基づいて補正し、この補正値か
ら検出しようとする微小表面欠陥の面積、体積等を演算
する。Then, in the signal processing device, among the detection amounts from the height scaler, calculation of detection height planes of arbitrary three or more points is repeated a plurality of times, and the average value of the calculated values is used as a reference. A plane is obtained, and a three-dimensional view of the surface of the material to be detected is created from the amount of movement of the stage in the horizontal direction and the amount of surface height, and then the created three-dimensional view is corrected based on the calculated reference plane, The area, volume, and the like of the minute surface defect to be detected are calculated from this correction value.
【００１２】[0012]
【実施例】以下、本発明の平板状被検出材の微小欠陥検
出方法及び検出装置を図１〜図６に示す１実施例に基づ
いて説明する。図１は本発明装置の全体構成を示す概略
図、図２は本発明に使用する表面高さ量検出装置の自動
焦点法の説明図、図３は本発明装置を用いて本発明方法
を実施した場合の微小欠陥を含むプレス成型品の基準平
面補正する前の断面形状の３次元図、図４は図３の基準
平面補正をした後の断面形状の３次元図、図５は微小欠
陥を含むプレス成型品の実際の断面形状を示す図面、図
６は本発明方法の概略を示すフローチャートである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method and apparatus for detecting minute defects in a flat plate-like material to be detected according to the present invention will be described below based on an embodiment shown in FIGS. FIG. 1 is a schematic diagram showing the overall configuration of the device of the present invention, FIG. 2 is an explanatory view of an autofocus method of a surface height amount detecting device used in the present invention, and FIG. 3 is a method of implementing the present invention using the device of the present invention. 3D diagram of the cross-sectional shape of the press-molded product including the micro defects before the correction of the reference plane, FIG. 4 is a 3D diagram of the cross-sectional shape of the pressed product after the correction of the reference plane, and FIG. Drawing which shows the actual cross-sectional shape of the press-molded article containing it, FIG. 6 is a flowchart which shows the outline of the method of this invention.
【００１３】図１において、１１は被検出材１２を載置
するステージであり、例えば親ねじ送り機構等の周知の
正逆移動機構によって、水平面方向に所定のピッチで間
欠的に移動できるように構成されている。この移動ピッ
チは、検出しようとする被検出材１２の表面粗度を予め
測定し、この測定した表面粗度の１０〜５００倍となる
ように後述する表面高さ量検出装置の焦点範囲を決定し
た後、この決定した焦点範囲が重ならず、かつ、隙間が
できないような移動量とする。すなわち、この移動ピッ
チを前記決定した焦点範囲に等しくすることで、被検出
材１２の表面を連続的に検出したのと同じ結果を得るこ
とができるのである。In FIG. 1, reference numeral 11 denotes a stage on which the material 12 to be detected is placed, which can be intermittently moved at a predetermined pitch in the horizontal direction by a well-known forward / reverse moving mechanism such as a lead screw feeding mechanism. It is configured. The movement pitch is obtained by previously measuring the surface roughness of the detected material 12 to be detected, and determining the focus range of the surface height amount detection device described later so as to be 10 to 500 times the measured surface roughness. After that, the movement amounts are set so that the determined focus ranges do not overlap and no gap is formed. That is, by making this movement pitch equal to the determined focus range, the same result as when the surface of the detected material 12 is continuously detected can be obtained.
【００１４】前記正逆移動機構によって所定のピッチで
移動するステージ１１の移動量は、マグネスケール等の
水平面方向スケーラ１３から信号処理装置１４に、例え
ばデジタル通信によって送信される。１５は前記ステー
ジ１１の上方位置に、鉛直方向に配置され、ステージ１
１上の被検出材１２の表面高さ量を検出する表面高さ量
検出装置であり、オートフォーカスカメラ等のように焦
点を自動的に合わせる装置とほぼ同じ自動焦点法によっ
て被検出材１２の高さを求める。The amount of movement of the stage 11 which moves at a predetermined pitch by the forward / reverse moving mechanism is transmitted from the horizontal scaler 13 such as a magnescale to the signal processing device 14 by, for example, digital communication. 15 is disposed vertically above the stage 11, and
1 is a surface height amount detecting device for detecting the amount of surface height of the detected material 12 on the detection target 1. The automatic detection method is almost the same as an automatic focusing device such as an autofocus camera. Find the height.
【００１５】すなわち、図２に示すように、まず、ター
ゲット１６を可視光線等で被検出材１２上に投影すると
ターゲット１６の陰１６ａが検出器１７に入力される。
被検出材１２は単色の場合が多く、単色であると焦点が
合わせにくいので、被検出材１２に陰をつけるためにタ
ーゲット１６がある。そして、この検出器入力信号のう
ち予め設定しておいた面積の画像処理を行う（焦点範
囲）。ここで行う画像処理とは、ターゲット１６の陰１
６ａの境界線が最もはっきりする波長別に画素度数分布
位置へ対物レンズ１８を移動させ、そのときの対物レン
ズ１８の位置から距離を導くことをいう。したがって、
自動焦点法による測定距離は画素色調全部で判断するた
め焦点範囲内の平均値となる。なお、図２中の１９は接
眼レンズ、２０はターゲット１６の陰１６ａを被検出材
１２へ投影するスプリットプリズムである。That is, as shown in FIG. 2, first, when the target 16 is projected onto the material 12 to be detected with visible light or the like, the shadow 16a of the target 16 is input to the detector 17.
In many cases, the material 12 to be detected has a single color, and when it is a single color, it is difficult to focus. Therefore, the target 16 is provided to shade the material 12 to be detected. Then, image processing of a preset area of the detector input signal is performed (focus range). The image processing performed here is the shadow 1 of the target 16.
It means that the objective lens 18 is moved to the pixel frequency distribution position for each wavelength where the boundary line of 6a is most clear, and the distance is derived from the position of the objective lens 18 at that time. Therefore,
The distance measured by the autofocus method is an average value within the focus range because it is determined by all pixel tones. In FIG. 2, 19 is an eyepiece lens, and 20 is a split prism for projecting the shadow 16a of the target 16 onto the material 12 to be detected.
【００１６】前記した表面高さ量検出装置１５による各
測定点での高さ検出量は、高さ方向スケーラ２１によっ
て信号処理装置１４に例えばデジタル通信で送信され
る。このようにして水平方向スケーラ１３と高さ方向ス
ケーラ２１とから送信された両出力信号に基づいて、信
号処理装置１４では次のような処理を行う。The height detection amount at each measurement point by the surface height amount detection device 15 is transmitted to the signal processing device 14 by the height direction scaler 21 by, for example, digital communication. In this way, the signal processing device 14 performs the following processing based on both output signals transmitted from the horizontal scaler 13 and the height scaler 21.
【００１７】すなわち、信号処理装置１４では、先ず、
前記高さ方向スケーラ２１から送信されてきた検出量の
うち、例えば任意の３点の検出高さ平面を平面の方程式
（ａｘ＋ｂｙ＋ｃｚ＝ｄ）から算出することを複数回繰
り返してそれらの算出値の平均値から基準平面を求める
のである。ここで、ｄの値は任意で、ａ、ｂ、ｃの値の
比率を求める。そして、さらに、前記水平方向スケーラ
１３と高さ方向スケーラ２１から出力されてきたステー
ジ１１の水平面方向の移動量と表面高さ量から被検出材
１２表面の３次元図を作成するのである。その後、作成
した３次元図を前記算出した基準平面に基づいて補正
し、この補正値から検出しようとする微小表面欠陥の面
積、体積等を演算するのである。以上の本発明方法の、
概略フローチャートを図６に示す。また、前記信号処理
装置１４で作成した基準平面補正前の３次元図の１例を
図３に、また基準平面補正後の３次元図の１例を図４に
示す。なお、図５は被検出材１２表面の実際の形状であ
る。That is, in the signal processing device 14, first,
Of the detected quantities transmitted from the height scaler 21, for example, calculating the detected height planes of three arbitrary points from the plane equation (ax + by + cz = d) is repeated a plurality of times, and the average of those calculated values is calculated. The reference plane is obtained from the values. Here, the value of d is arbitrary, and the ratio of the values of a, b, and c is calculated. Further, a three-dimensional drawing of the surface of the material 12 to be detected is created from the amount of movement of the stage 11 in the horizontal plane direction and the amount of surface height output from the horizontal scaler 13 and the height scaler 21. Then, the created three-dimensional drawing is corrected based on the calculated reference plane, and the area, volume, etc. of the minute surface defect to be detected are calculated from this correction value. In the above method of the present invention,
A schematic flowchart is shown in FIG. 3 shows an example of a three-dimensional diagram before correction of the reference plane created by the signal processing device 14, and FIG. 4 shows an example of a three-dimensional diagram after correction of the reference plane. Note that FIG. 5 shows an actual shape of the surface of the detected material 12.
【００１８】本発明装置を使用した本発明方法によれ
ば、図５に示すように、被検出材１２表面の実際の形状
では、表面粗さ１２ａと判別しにくい微小欠陥１２ｂ
を、図３に示すように、表面高さ量検出装置１５の焦点
範囲を、被検出材１２の表面粗度（表面粗さ１２ａ）よ
り大きく、かつ微小欠陥１２ｂより小さくなしているの
で、検出したい微小欠陥１２ｂの判別が極めて容易とな
り、かつ図４に示すように、検出したい微小欠陥１２ｂ
の大きさも正確に求めることができる。なお、図１中の
２２は表示装置を示す。According to the method of the present invention using the apparatus of the present invention, as shown in FIG. 5, in the actual shape of the surface of the material 12 to be detected, it is difficult to distinguish the surface roughness 12a from the minute defects 12b.
As shown in FIG. 3, since the focus range of the surface height amount detection device 15 is set to be larger than the surface roughness (surface roughness 12a) of the detected material 12 and smaller than the minute defect 12b, the detection is performed. It is extremely easy to identify the minute defect 12b to be detected, and as shown in FIG. 4, the minute defect 12b to be detected is detected.
The size of can also be accurately determined. Reference numeral 22 in FIG. 1 indicates a display device.
【００１９】[0019]
【発明の効果】以上説明したように、本発明によれば、
表面高さ量検出装置の焦点範囲を、被検出材の表面粗度
より大きく、かつ検出しようとする微小欠陥より小さく
なしているので、表面粗さによる凹凸を平準化し、検出
しようとする微小欠陥を顕在化させることができ、か
つ、この顕在化させた微小欠陥を表面高さ量検出値を用
いて算出した基準平面に基づいて補正することで正確な
大きさを求めることができる。したがって、本発明によ
れば、触針法で検出不可能な微小欠陥や、光切断法で検
出したデータに基づき判定が困難な表面粗さと略同じ程
度の微小欠陥を明瞭に検出でき、正確な大きさを求める
ことができる。また、目視による検出のような個人差も
ない。As described above, according to the present invention,
Since the focus range of the surface height detection device is set to be larger than the surface roughness of the material to be detected and smaller than the minute defect to be detected, the unevenness due to the surface roughness is leveled to detect the minute defect to be detected. Can be made visible, and an accurate size can be obtained by correcting the exposed microdefects based on the reference plane calculated using the surface height amount detection value. Therefore, according to the present invention, it is possible to clearly detect a minute defect that cannot be detected by the stylus method or a minute defect that has a surface roughness that is almost the same as the surface roughness that is difficult to determine based on the data detected by the light-section method, and the accurate The size can be calculated. Further, there is no individual difference such as visual detection.
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明装置の全体構成を示す概略図である。FIG. 1 is a schematic diagram showing the overall configuration of a device of the present invention.
【図２】本発明に使用する表面高さ量検出装置の自動焦
点法の説明図である。FIG. 2 is an explanatory diagram of an automatic focusing method of the surface height amount detection device used in the present invention.
【図３】本発明装置を用いて本発明方法を実施した場合
の微小欠陥を含むプレス成型品の基準平面補正する前の
断面形状の３次元図である。FIG. 3 is a three-dimensional view of a cross-sectional shape of a press-molded article including micro defects before the reference plane correction when the method of the present invention is performed using the apparatus of the present invention.
【図４】図３の基準平面補正をした後の断面形状の３次
元図である。FIG. 4 is a three-dimensional view of the cross-sectional shape after the reference plane correction of FIG.
【図５】微小欠陥を含むプレス成型品の実際の断面形状
を示す図面である。FIG. 5 is a drawing showing an actual cross-sectional shape of a press-molded product containing minute defects.
【図６】本発明方法の概略を示すフローチャートであ
る。FIG. 6 is a flowchart showing an outline of the method of the present invention.
【図７】プレス成型時における微小欠陥の発生の説明図
である。FIG. 7 is an explanatory diagram of generation of minute defects during press molding.
【図８】本発明によって検出しようとする微小欠陥の略
式図である。FIG. 8 is a schematic diagram of micro defects to be detected by the present invention.
【図９】図７に示す微小欠陥を触針法によって検出した
時のデータの略式図である。9 is a schematic diagram of data when the microdefect shown in FIG. 7 is detected by a stylus method.
１１ ステージ １２ 被検出材 １２ａ 表面粗さ １２ｂ 微小欠陥 １３ 水平面方向スケーラ １４ 信号処理装置 １５ 表面高さ量検出装置 ２１ 高さ方向スケーラ 11 Stage 12 Detected Material 12a Surface Roughness 12b Small Defect 13 Horizontal Plane Scaler 14 Signal Processor 15 Surface Height Detecting Device 21 Height Scaler
Claims (2)
出材の水平面方向に所定距離だけ移動させつつ、それぞ
れの位置で焦点法により被検出材の表面高さを検出する
動作を繰り返し行うことで、被検出材表面の微細形状を
３次元で検出し、微小欠陥を検出する方法において、平
板状被検出材の表面粗度より大きく、かつ微小表面欠陥
より小さくなした焦点範囲で被検出材表面の微細形状を
検出し、この検出値を、検出した被検出材の表面高さに
基づいて算出する被検出材の基準平面に基づいて補正す
ることを特徴とする平板状被検出材の微小欠陥検出方
法。1. An operation of detecting a surface height of a material to be detected by a focusing method at each position while moving a stage on which the material to be detected is moved by a predetermined distance in a horizontal plane direction of the material to be detected. By performing the three-dimensional detection of the fine shape of the surface of the material to be detected and detecting the minute defects, in the focus range which is larger than the surface roughness of the plate-shaped material to be detected and smaller than the minute surface defects. A flat plate-like detected material characterized by detecting a fine shape on the surface of the detected material and correcting the detected value based on a reference plane of the detected material calculated based on the detected surface height of the detected material. Method for detecting micro defects.
であって、平板状被検出材を載置するステージと、この
ステージの水平面方向における移動機構と、この移動機
構によるステージの水平面方向移動量を出力する水平面
方向スケーラと、前記ステージ上の被検出材の表面高さ
量検出装置と、この表面高さ量検出装置による検出量を
出力する高さ方向スケーラと、この高さ方向スケーラか
らの検出量のうち、任意の３点以上の検出高さ平面を算
出することを複数回繰り返してそれらの算出値の平均値
から基準平面を求め、かつ前記両出力信号に基づいて被
検出材表面の３次元図を作成した後、この作成した３次
元図を前記基準平面に基づいて補正し、この補正値から
検出しようとする微小表面欠陥の面積、体積等を演算す
る信号処理装置を具備したことを特徴とする平板状被検
出材の微小欠陥検出装置。2. The apparatus used in the detection method according to claim 1, wherein a stage on which a flat plate-shaped material to be detected is placed, a moving mechanism of the stage in a horizontal plane direction, and a horizontal direction of the stage by the moving mechanism. A horizontal scaler that outputs the movement amount, a surface height amount detection device for the material to be detected on the stage, a height direction scaler that outputs the detection amount by the surface height amount detection device, and this height direction scaler Among the detected amounts from the above, the calculation of the detection height planes of three or more arbitrary points is repeated a plurality of times to obtain the reference plane from the average value of the calculated values, and the detected material is based on the both output signals. After a three-dimensional drawing of the surface is created, the created three-dimensional drawing is corrected based on the reference plane, and a signal processing device for calculating the area, volume, etc. of the minute surface defect to be detected from the correction value is provided. An apparatus for detecting microdefects in a flat plate-shaped material to be detected, which is characterized by being provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25226192A JPH0674903A (en) | 1992-08-26 | 1992-08-26 | Detection method and device for minute defect of curved material to be detected |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25226192A JPH0674903A (en) | 1992-08-26 | 1992-08-26 | Detection method and device for minute defect of curved material to be detected |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0674903A true JPH0674903A (en) | 1994-03-18 |
Family
ID=17234775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25226192A Pending JPH0674903A (en) | 1992-08-26 | 1992-08-26 | Detection method and device for minute defect of curved material to be detected |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0674903A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100862174B1 (en) * | 2000-07-06 | 2008-10-09 | 와이어쓰 | Pharmaceutical compositions of estrogenic agents |
| JP2015064318A (en) * | 2013-09-26 | 2015-04-09 | 株式会社日本触媒 | Method of inspecting ceramic sheet for solid electrolyte of solid oxide fuel cell and method of manufacturing ceramic sheet |
-
1992
- 1992-08-26 JP JP25226192A patent/JPH0674903A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100862174B1 (en) * | 2000-07-06 | 2008-10-09 | 와이어쓰 | Pharmaceutical compositions of estrogenic agents |
| JP2015064318A (en) * | 2013-09-26 | 2015-04-09 | 株式会社日本触媒 | Method of inspecting ceramic sheet for solid electrolyte of solid oxide fuel cell and method of manufacturing ceramic sheet |
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