JPH06735A - Guide support device for slide body - Google Patents
Guide support device for slide bodyInfo
- Publication number
- JPH06735A JPH06735A JP18577192A JP18577192A JPH06735A JP H06735 A JPH06735 A JP H06735A JP 18577192 A JP18577192 A JP 18577192A JP 18577192 A JP18577192 A JP 18577192A JP H06735 A JPH06735 A JP H06735A
- Authority
- JP
- Japan
- Prior art keywords
- guide
- slide
- pressure
- bearing
- guide surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、工作機械のスライドテ
ーブル等に用いられる摺動体の案内支持装置に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a guide support device for a sliding body used for a slide table or the like of a machine tool.
【０００２】[0002]
【従来の技術】工作機械において、ベッド（ガイド体）
に直線運動可能に案内支持したスライドテーブル（摺動
体）は、図６で示すように、上案内面２ａ、下案内面２
ｂ、左案内面２ｃ、右案内面２ｄを有するガイド体１
と、前記各案内面２ａ〜２ｄに対向する上スライド面４
ａ、下スライド面４ｂ、左スライド面４ｃ、右スライド
面４ｄを有し、この各スライド面４ａ〜４ｄに設けた静
圧軸受の軸受ポケット５ａ〜５ｄによる静圧案内面で前
記ガイド体１に完全に非接触で案内する構造（公知例
１）のものと、図７で示すように、ガイド体１の左右上
面に凹凸面６を形成し、この凹凸面６に摺動体３の左右
下面７を接触支持させ、前記摺動体３の左右下面７に静
圧軸受８を設けた構造（公知例２）のものが用いられて
いる。2. Description of the Related Art Beds (guides) in machine tools
As shown in FIG. 6, the slide table (sliding body) which is linearly movable and supported on the upper guide surface 2a and the lower guide surface 2 is shown in FIG.
b, a guide body 1 having a left guide surface 2c and a right guide surface 2d
And an upper slide surface 4 facing the guide surfaces 2a to 2d.
a, a lower slide surface 4b, a left slide surface 4c, and a right slide surface 4d, and the guide body 1 is a static pressure guide surface formed by bearing pockets 5a to 5d of static pressure bearings provided on the slide surfaces 4a to 4d. As shown in FIG. 7, a structure that guides completely in a non-contact manner (known example 1) and uneven surfaces 6 are formed on the left and right upper surfaces of the guide body 1, and the left and right lower surfaces 7 of the sliding body 3 are formed on the uneven surface 6. Of the sliding body 3 and the hydrostatic bearings 8 are provided on the left and right lower surfaces 7 of the sliding body 3 (known example 2).
【０００３】[0003]
【発明が解決しようとする課題】上記公知例１の構造の
ものは、ガイド体１と摺動体３とは各静圧軸受の軸受ポ
ケット５ａ〜５ｄによる静圧案内面で完全に非接触の案
内であるため、摺動体３の送り方向に作用する外力が大
きい場合や断続的に外力が作用する場合は摺動体３が送
り方向に振動することがある。In the structure of the known example 1 described above, the guide body 1 and the sliding body 3 are guided in a completely non-contact manner by the static pressure guide surfaces of the bearing pockets 5a to 5d of the static pressure bearings. Therefore, the sliding body 3 may vibrate in the feeding direction when the external force acting in the feeding direction of the sliding body 3 is large or when the external force intermittently acts.
【０００４】上記公知例２の構造のものは、スライド重
量の一部を接触によって支持し、残りを静圧軸受８によ
って支持する半浮上の静圧案内であり、減衰効果を付与
するため上記公知例１の問題点を解消している。The structure of the publicly known example 2 is a semi-floating static pressure guide in which a part of the slide weight is supported by contact and the rest is supported by a static pressure bearing 8, and the publicly known static pressure guide is provided for providing a damping effect. The problem of Example 1 is solved.
【０００５】しかしながら、摺動体３上の負荷重量が変
化したり、外力が加わった時に、接触量が変化し、摺動
抵抗が変化してしまう。剛性を上げるために、静圧軸受
８の供給圧力を上げると浮いてしまい、摺動抵抗が減少
する。また、摺動体３の偏重心に対して、軽い負荷重量
側の案内面が浮き上がってしまい、圧力調整ができな
い。従って、前記接触量の調整が非常に困難である。However, when the load weight on the sliding body 3 changes or when an external force is applied, the amount of contact changes and the sliding resistance changes. If the supply pressure of the hydrostatic bearing 8 is increased in order to increase the rigidity, it floats and the sliding resistance decreases. Further, the guide surface on the side of a lightly loaded weight is lifted up with respect to the eccentric center of gravity of the sliding body 3, and the pressure cannot be adjusted. Therefore, it is very difficult to adjust the contact amount.
【０００６】本発明の目的は、負荷重量の変化や外力に
対して一定の摺動抵抗を保持し、接触量の調整を容易に
して希望通りの摺動抵抗を設定可能とした摺動体の案内
支持装置を提供することである。An object of the present invention is to guide a sliding body which maintains a constant sliding resistance against a change in load weight and external force, facilitates adjustment of a contact amount, and can set a desired sliding resistance. A support device is provided.
【０００７】[0007]
【課題を解決するための手段】上記の目的を達成するた
めの本発明の特徴とする構成は、上下、左右に案内面を
有するガイド体と、前記各案内面に対向するスライド面
を有し静圧軸受によって前記ガイド体の案内面に案内支
持される摺動体と、前記ガイド体の案内面又は前記摺動
体のスライド面の何れか一方の面に形成した微細な凹凸
面と、前記上下、左右の静圧軸受に供給する圧力をそれ
ぞれ独立に調整可能とした圧力供給手段とを備えたもの
である。A feature of the present invention for achieving the above object is to provide a guide body having upper and lower and left and right guide surfaces, and a slide surface facing each of the guide surfaces. A slide body guided and supported by a guide surface of the guide body by a hydrostatic bearing, a fine uneven surface formed on one of the guide surface of the guide body or the slide surface of the slide body, the top and bottom, The pressure supply means is capable of independently adjusting the pressures supplied to the left and right static pressure bearings.
【０００８】[0008]
【作用】上記の構成により、上下、左右の案内面と対向
した各スライド面の静圧軸受に供給する圧力を調整し
て、全面非接触の半浮上バランス状態での案内や、片面
を半浮上し、もう片面を凹凸面に接触させ、その接触量
の調整により摺動抵抗を設定した案内を可能とし、ま
た、前記全面非接触の半浮上バランス状態で供給圧力を
上げて剛性のアップや、摺動体の偏重心に対してバラン
ス調整を可能とするものである。With the above structure, the pressure supplied to the hydrostatic bearings on the slide surfaces facing the upper, lower, left and right guide surfaces is adjusted to provide guidance in a semi-floating balance state with no contact on the entire surface, or one surface is semi-floating. Then, the other surface is brought into contact with the uneven surface, and it is possible to guide by setting the sliding resistance by adjusting the amount of contact.In addition, the supply pressure is increased in the semi-floating balance state where the entire surface is non-contact to increase the rigidity, The balance can be adjusted with respect to the eccentric center of gravity of the sliding body.
【０００９】[0009]
【実施例】以下本発明の実施例を図面に基づいて説明す
る。図１において、１はガイド体であり、上案内面２
ａ、下案内面２ｂ、左案内面２ｃ、右案内面２ｄを有し
ている。３は前記ガイド体１に直線運動可能に案内支持
された摺動体であり、前記上案内面２ａ、下案内面２
ｂ、左案内面２ｃ、右案内面２ｄに対向する上スライド
面４ａ、下スライド面４ｂ、左スライド面４ｃ、右スラ
イド面４ｄを有している。この各スライド面４ａ〜４ｄ
には摺動体３の移動方向に複数に分割した静圧軸受の軸
受ポケット５ａ〜５ｄが設けられている。Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, reference numeral 1 is a guide body, and an upper guide surface 2
a, a lower guide surface 2b, a left guide surface 2c, and a right guide surface 2d. Reference numeral 3 denotes a sliding body which is guided and supported by the guide body 1 so as to be linearly movable, and includes the upper guide surface 2a and the lower guide surface 2
b, the left guide surface 2c, the upper slide surface 4a facing the right guide surface 2d, the lower slide surface 4b, the left slide surface 4c, and the right slide surface 4d. These slide surfaces 4a to 4d
Is provided with bearing pockets 5a to 5d of the hydrostatic bearing which are divided into a plurality in the moving direction of the sliding body 3.
【００１０】前記軸受ポケット５ａ〜５ｄに供給する圧
力をそれぞれ独立に調整可能とした圧力供給手段９を備
えている。この圧力供給手段９は図１及び図２で示すよ
うに、油圧ポンプ１１から吐出する圧力を一定圧に制御
するレリーフ弁１３と、このレリーフ弁１３で一定圧に
制御した圧力を手動によって調整して前記各静圧軸受５
ａ〜５ｄの各ポケットに供給する減圧弁１２とから構成
されている。The pressure supply means 9 is provided so that the pressure supplied to the bearing pockets 5a-5d can be adjusted independently. As shown in FIGS. 1 and 2, the pressure supply means 9 manually adjusts the relief valve 13 for controlling the pressure discharged from the hydraulic pump 11 to a constant pressure and the pressure controlled by the relief valve 13 to a constant pressure. Each of the above hydrostatic bearings 5
The pressure reducing valve 12 supplies the respective pockets a to 5d.
【００１１】さらに、図１で示すように。ガイド体１の
下案内面２ｂには微細な凹凸面１０が形成されている。
この凹凸面１０は図例ではガイド体１の下案内面２ｂに
形成されているが、上案内面２ａ、左案内面２ｃ、右案
内面２ｄの何れかに形成してもよいし、上案内面２ａ、
下案内面２ｂ、左案内面２ｃ、右案内面２ｄの全面に形
成してもよい。Further, as shown in FIG. A fine uneven surface 10 is formed on the lower guide surface 2b of the guide body 1.
Although the uneven surface 10 is formed on the lower guide surface 2b of the guide body 1 in the illustrated example, it may be formed on any of the upper guide surface 2a, the left guide surface 2c, and the right guide surface 2d. Surface 2a,
It may be formed on the entire surface of the lower guide surface 2b, the left guide surface 2c, and the right guide surface 2d.
【００１２】また、前記凹凸面１０は、図５の（イ）で
示すように、ガイド体１の右案内面２ｄ（又は左案内面
２ｃ）、図５の（ロ）で示すように、ガイド体１の上案
内面２ａ（又は下案内面２ｂ）、図５の（ハ）で示すよ
うに、上案内面２ａ、下案内面２ｂ、左案内面２ｃ、右
案内面２ｄの全面に形成してもよい。さらに、摺動体３
の上スライド面４ａ、下スライド面４ｂ、左スライド面
４ｃ、右スライド面４ｄのいずれか、又は全面に凹凸面
１０を形成しても良い。Further, the uneven surface 10 is, as shown in FIG. 5A, a right guide surface 2d (or left guide surface 2c) of the guide body 1, and a guide as shown in FIG. The upper guide surface 2a (or the lower guide surface 2b) of the body 1 is formed on the entire surface of the upper guide surface 2a, the lower guide surface 2b, the left guide surface 2c, and the right guide surface 2d, as shown in FIG. May be. Furthermore, the sliding body 3
The uneven surface 10 may be formed on any one of the upper slide surface 4a, the lower slide surface 4b, the left slide surface 4c, the right slide surface 4d, or the entire surface.
【００１３】前記凹凸面１０は図３のＡ−Ａ方向並びに
Ｂ−Ｂ方向の何れにおいても同一の凹凸断面形状であ
り、図４（イ）で示すように、きさげ加工の波形状の凹
凸、図４（ロ）で示すように、エッチングの角形状の凹
凸である。The concavo-convex surface 10 has the same concavo-convex cross-sectional shape in both AA direction and BB direction in FIG. 3, and as shown in FIG. As shown in FIG. 4 (b), it is an irregular square shape of etching.
【００１４】本発明は上記の通りの構造であるから、摺
動体３は案内面をガイド体１の凹凸面１０に接触させる
ことにより摺動抵抗が付与される。また、静圧軸受の軸
受ポケット５ａ〜５ｄには圧力供給手段９によってそれ
ぞれ独立に調整して圧力が供給可能である。Since the present invention has the structure as described above, sliding resistance is imparted by bringing the guide surface of the sliding body 3 into contact with the uneven surface 10 of the guide body 1. Further, the pressure can be supplied to the bearing pockets 5a to 5d of the hydrostatic bearing by the pressure supply means 9 independently adjusting each other.
【００１５】従って、摺動体３の上スライド面４ａ又は
下スライド面４ｂの片面を接触案内し、もう片面を半浮
上の静圧案内とすることができ、また、両面とも半浮上
の静圧案内とすることができる。Therefore, one side of the upper slide surface 4a or the lower slide surface 4b of the sliding body 3 can be guided as a contact, and the other side can be used as a semi-floating static pressure guide. Can be
【００１６】さらに、上スライド面４ａ及び下スライド
面４ｂの両面の軸受ポケット５ａ、５ｂに供給される圧
力を加減調整して接触量を調整し、凹凸面１０による摺
動抵抗の加減設定することができる。Further, the contact amount is adjusted by adjusting the pressure supplied to the bearing pockets 5a, 5b on both the upper slide surface 4a and the lower slide surface 4b to adjust the sliding resistance by the uneven surface 10. You can
【００１７】また、上スライド面４ａ及び下スライド面
４ｂをバランスさせた状態で、両面の軸受ポケット５
ａ、５ｂに供給される圧力を上げることにより剛性を大
きくすることが可能であり、偏重心により浮き上がる上
スライド面４ａを下向きの面圧を高めることによりバラ
ンス調整することが可能である。Further, with the upper slide surface 4a and the lower slide surface 4b being balanced, the bearing pockets 5 on both sides are formed.
The rigidity can be increased by increasing the pressure supplied to a and 5b, and the balance can be adjusted by increasing the downward surface pressure of the upper slide surface 4a lifted by the eccentricity.
【００１８】上記は摺動体３の上スライド面４ａ及び下
スライド面４ｂの案内支持調整であるが、左スライド面
４ｃ及び右スライド面４ｄについても同様に案内支持調
整が可能である。さらに、上述した実施例は、図２に示
すように送り方向に複数設けた軸受ポケット５ａ〜５ｄ
に対し、１つの圧力供給手段９によって調整された圧油
を供給する例について述べたが、送り方向に複数設けた
軸受ポケット５ａ〜５ｄ毎に圧力供給手段９を設け、個
々に調整された圧油を各軸受ポケット５ａ〜５ｄに供給
しても良い。このようにすれば、摺動体３の送り方向の
重量アンバランスを補正することができる。Although the above is the guide support adjustment of the upper slide surface 4a and the lower slide surface 4b of the slide body 3, the guide support adjustment can be similarly performed for the left slide surface 4c and the right slide surface 4d. Further, in the above-described embodiment, as shown in FIG. 2, a plurality of bearing pockets 5a to 5d provided in the feed direction.
On the other hand, the example in which the pressure oil adjusted by one pressure supply means 9 is supplied has been described, but the pressure supply means 9 is provided for each of the plurality of bearing pockets 5a to 5d provided in the feed direction, and the individually adjusted pressure is provided. Oil may be supplied to each bearing pocket 5a-5d. By doing so, the weight imbalance of the sliding body 3 in the feeding direction can be corrected.
【００１９】[0019]
【発明の効果】以上のように本発明は、ガイド体に設け
られている上下、左右の案内面に、この各案内面に対向
するスライド面を有する摺動体を静圧軸受によって案内
支持し、前記ガイド体の案内面又は前記摺動体のスライ
ド面の何れか一方の面に形成した微細な凹凸面と、前記
上下、左右の静圧軸受に供給する圧力をそれぞれ独立に
調整可能とした圧力供給手段とを備えた構成であるか
ら、摺動体の案内支持剛性が向上し、摺動体の負荷重量
の変化や外力に対して摺動抵抗が変化せず、一定の摺動
抵抗値で案内支持する。また、接触量の調整が容易であ
り、摺動抵抗を希望通りの値に設定することが可能とな
り、スライドの偏重心に対してバランスの取れた状態を
保持させることができる。As described above, according to the present invention, the slide body having the slide surfaces facing the respective guide surfaces on the upper and lower guide surfaces provided on the guide body is guided and supported by the hydrostatic bearing, Pressure supply capable of independently adjusting the pressure to be supplied to the fine concavo-convex surface formed on either the guide surface of the guide body or the slide surface of the slide body and the upper and lower and left and right hydrostatic bearings. The guide supporting rigidity of the sliding body is improved, and the sliding resistance does not change with respect to the change of the load weight of the sliding body and the external force, and the guide is supported with a constant sliding resistance value. . In addition, the contact amount can be easily adjusted, the sliding resistance can be set to a desired value, and a state in which the slide eccentricity is balanced can be maintained.
【図１】本発明装置の断面図FIG. 1 is a sectional view of the device of the present invention.
【図２】本発明装置の要部断面図FIG. 2 is a sectional view of an essential part of the device of the present invention.
【図３】凹凸面の平面図FIG. 3 is a plan view of an uneven surface.
【図４】図３のＡ−Ａ及びＢ−Ｂ断面図4 is a sectional view taken along line AA and BB of FIG.
【図５】凹凸面形成位置の各種の例を示す説明図5A and 5B are explanatory views showing various examples of uneven surface forming positions.
【図６】従来の非接触案内支持構造の断面図FIG. 6 is a sectional view of a conventional non-contact guide support structure.
【図７】従来の接触案内支持構造の断面図FIG. 7 is a sectional view of a conventional contact guide support structure.
１ ガイド体 ２ａ 上案内面 ２ｂ 下案内面 ２ｃ 左案内面 ２ｄ 右案内面 ３ 摺動体 ４ａ 上スライド面 ４ｂ 下スライド面 ４ｃ 左スライド面 ４ｄ 右スライド面 ５ａ 軸受ポケット ５ｂ 軸受ポケット ５ｃ 軸受ポケット ５ｄ 軸受ポケット ９ 圧力調整手段 １０ 凹凸面 １１ 油圧ポンプ １２ 減圧弁 １３ レリーフ弁 1 guide body 2a upper guide surface 2b lower guide surface 2c left guide surface 2d right guide surface 3 sliding body 4a upper slide surface 4b lower slide surface 4c left slide surface 4d right slide surface 5a bearing pocket 5b bearing pocket 5c bearing pocket 5d bearing pocket 9 Pressure adjusting means 10 Uneven surface 11 Hydraulic pump 12 Pressure reducing valve 13 Relief valve
Claims (1)
と、前記各案内面に対向するスライド面を有し静圧軸受
によって前記ガイド体の案内面に案内支持される摺動体
と、前記ガイド体の案内面又は前記摺動体のスライド面
の何れか一方の面に形成した微細な凹凸面と、前記上
下、左右の静圧軸受に供給する圧力をそれぞれ独立に調
整可能とした圧力供給手段とを備えたことを特徴とする
摺動体の案内支持装置1. A guide body having upper and lower, left and right guide surfaces, a slide body having slide surfaces facing the respective guide surfaces and being supported by a guide surface of the guide body by a hydrostatic bearing, and the guide. A fine concavo-convex surface formed on either the guide surface of the body or the slide surface of the sliding body, and pressure supply means capable of independently adjusting the pressure supplied to the upper and lower and left and right hydrostatic bearings. Guide supporting device for a sliding body, characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18577192A JPH06735A (en) | 1992-06-22 | 1992-06-22 | Guide support device for slide body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18577192A JPH06735A (en) | 1992-06-22 | 1992-06-22 | Guide support device for slide body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06735A true JPH06735A (en) | 1994-01-11 |
Family
ID=16176604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18577192A Pending JPH06735A (en) | 1992-06-22 | 1992-06-22 | Guide support device for slide body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06735A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0932855A (en) * | 1995-07-19 | 1997-02-04 | Toshiba Mach Co Ltd | Hydraulic device for static pressure bearing |
| US7101080B2 (en) | 2004-01-06 | 2006-09-05 | Okamoto Machine Tool Works Ltd. | Hydrostatic pressure linear guide device |
| JP2009108888A (en) * | 2007-10-26 | 2009-05-21 | Jtekt Corp | Slide-type semi-levitation guiding device |
| CN102856491A (en) * | 2011-06-29 | 2013-01-02 | 中芯国际集成电路制造(上海)有限公司 | Method for forming bottom electrode and phase-change resistor |
| EP2740952A2 (en) | 2012-12-04 | 2014-06-11 | Jtekt Corporation | Hydrostatic guide device and machine tool using the hydrostatic guide device |
| KR20160049754A (en) * | 2014-10-28 | 2016-05-10 | 현대위아 주식회사 | Hydrostatic linear motion bearing of moving system for machine tool |
| CN106438702A (en) * | 2016-11-22 | 2017-02-22 | 江苏工大金凯高端装备制造有限公司 | Aerostatic air-floating bearing |
-
1992
- 1992-06-22 JP JP18577192A patent/JPH06735A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0932855A (en) * | 1995-07-19 | 1997-02-04 | Toshiba Mach Co Ltd | Hydraulic device for static pressure bearing |
| US7101080B2 (en) | 2004-01-06 | 2006-09-05 | Okamoto Machine Tool Works Ltd. | Hydrostatic pressure linear guide device |
| JP2009108888A (en) * | 2007-10-26 | 2009-05-21 | Jtekt Corp | Slide-type semi-levitation guiding device |
| CN102856491A (en) * | 2011-06-29 | 2013-01-02 | 中芯国际集成电路制造(上海)有限公司 | Method for forming bottom electrode and phase-change resistor |
| EP2740952A2 (en) | 2012-12-04 | 2014-06-11 | Jtekt Corporation | Hydrostatic guide device and machine tool using the hydrostatic guide device |
| US8888366B2 (en) | 2012-12-04 | 2014-11-18 | Jtekt Corporation | Hydrostatic guide device and machine tool using the hydrostatic guide device |
| EP2740952A3 (en) * | 2012-12-04 | 2018-01-31 | Jtekt Corporation | Hydrostatic guide device and machine tool using the hydrostatic guide device |
| KR20160049754A (en) * | 2014-10-28 | 2016-05-10 | 현대위아 주식회사 | Hydrostatic linear motion bearing of moving system for machine tool |
| CN106438702A (en) * | 2016-11-22 | 2017-02-22 | 江苏工大金凯高端装备制造有限公司 | Aerostatic air-floating bearing |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH06735A (en) | Guide support device for slide body | |
| EP2251556A1 (en) | Self-compensating hydrostatic planar bearing device and the method thereof | |
| JP4228819B2 (en) | Guidance device | |
| JP6030205B2 (en) | Grinder | |
| WO2017057548A1 (en) | Grinding machine | |
| CN204819154U (en) | Frock clamp of floating gripper | |
| JPS6117613B2 (en) | ||
| JP4935623B2 (en) | Slide type semi-levitation guide device | |
| US3266854A (en) | Machine system | |
| JP4356385B2 (en) | Sliding guide device | |
| JP2001088012A (en) | Polishing device | |
| CN205600316U (en) | Workstation of digit control machine tool | |
| WO2021100857A1 (en) | Machine tool | |
| MX2023005361A (en) | Support body and paper machine comprising such a support body. | |
| JP2001248643A (en) | Static pressure slide table device | |
| JPS62241629A (en) | Complex guide mechanism | |
| JPH09155664A (en) | Attitude control type slip guide device | |
| JP2001219358A (en) | Polishing device | |
| CN219852642U (en) | Focusing device of laser marking machine | |
| JPH0251618A (en) | Bearing for linear slide | |
| CN217291941U (en) | Polishing device for machine-building | |
| JP2631396B2 (en) | Static pressure gas bearing XY stage | |
| JPS6362628A (en) | Balancer for machine tool | |
| CN210616199U (en) | Wide tool of flat grinder head | |
| CN208496352U (en) | Adjustable combined type inner cavity support jig |