JPH0671797A - Heat insulating material - Google Patents

Heat insulating material

Info

Publication number
JPH0671797A
JPH0671797A JP25391792A JP25391792A JPH0671797A JP H0671797 A JPH0671797 A JP H0671797A JP 25391792 A JP25391792 A JP 25391792A JP 25391792 A JP25391792 A JP 25391792A JP H0671797 A JPH0671797 A JP H0671797A
Authority
JP
Japan
Prior art keywords
heat
heat insulating
insulating base
insulating material
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25391792A
Other languages
Japanese (ja)
Inventor
Tokuhisa Odaka
得央 小高
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAINICHI KASEI KOGYO KK
Original Assignee
DAINICHI KASEI KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAINICHI KASEI KOGYO KK filed Critical DAINICHI KASEI KOGYO KK
Priority to JP25391792A priority Critical patent/JPH0671797A/en
Publication of JPH0671797A publication Critical patent/JPH0671797A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00Thermal insulation in general
    • F16L59/08Means for preventing radiation, e.g. with metal foil

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Insulation (AREA)
  • Laminated Bodies (AREA)

Abstract

PURPOSE:To provide a heat insulating material which prevents the occurrence of the cracks of a heat insulating base and the lowering of mirror effect due to oxidation of a heat reflecting film. CONSTITUTION:In the heat insulating material having a heat reflecting film 12 formed on the surface of a heat insulating base 11 consisting of a heat resisting high-molecular material, a plurality of spacers 15 consisting of heat insulation resisting material for retaining spaces are provided independently of the heat insulating base 11 and a heat resisting anti-oxidative film 13 is formed on the surface of the heat reflecting film 12.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ポリイミド等の耐熱性
高分子材料を断熱ベ−スとして使用する断熱材に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat insulating material using a heat resistant polymer material such as polyimide as a heat insulating base.

【0002】[0002]

【従来の技術】断熱材には、従来、グラスウールが広く
利用されてきたが、これに代替する断熱材として、耐熱
性高分子材料を断熱ベースに使用するものがある。ポリ
イミドは、耐熱性高分子材料として非常に優れた特性を
持ち、最大耐熱温度が 800℃前後である上に、耐熱水性
が良く、対放射線性も良い。
2. Description of the Related Art Conventionally, glass wool has been widely used as a heat insulating material. As an alternative heat insulating material, there is one using a heat resistant polymer material for a heat insulating base. Polyimide has excellent properties as a heat-resistant polymer material, and has a maximum heat resistance temperature of around 800 ° C, good hot water resistance, and good radiation resistance.

【0003】そこで、このポリイミドの優れた特性を生
かし、各分野において断熱用として利用する技術が進み
つつある。例えば、図8及び図9に示すように、ポリイ
ミドから成る断熱ベ−ス1 の表面に、アルミ皮膜を蒸着
した熱反射皮膜2 を形成すると共に、これに四角錐状の
突出部3 を千鳥状に成形した断熱材が考えられている。
Therefore, a technique for utilizing it for heat insulation is being advanced in various fields by making use of the excellent characteristics of this polyimide. For example, as shown in FIGS. 8 and 9, a heat-reflecting coating 2 formed by vapor-depositing an aluminum coating is formed on the surface of a heat insulating base 1 made of polyimide, and quadrangular pyramidal protrusions 3 are formed in a zigzag pattern. A heat insulating material molded into is considered.

【0004】[0004]

【発明が解決しようとする課題】この断熱材は、断熱ベ
−ス1 に一体形成した四角錐状の突出部3 により、複数
枚の断熱材を積層する場合の各断熱材相互間の断熱空
間、或いは対象物に装着する際の対象物との間の断熱空
間を確保するようにしている。
This heat insulating material has a quadrangular pyramidal projection 3 formed integrally with the heat insulating base 1 so that the heat insulating space between the heat insulating materials is increased when a plurality of heat insulating materials are laminated. Alternatively, a heat insulating space is secured between the object and the object when the object is attached to the object.

【0005】そのため突出部3 の付け根部分の角部から
断熱ベ−ス1 自体に亀裂が入り易くなると言う欠点があ
る。また熱反射皮膜2 としてアルミ皮膜を蒸着している
が、このアルミ皮膜は酸化すれば透明になるので、熱を
反射するミラー効果が低下し、断熱材としての性能が損
なわれるという問題がある。
Therefore, there is a drawback that cracks are likely to be formed in the heat insulating base 1 itself from the corners of the base of the protrusion 3. Further, although an aluminum film is vapor-deposited as the heat reflection film 2, since the aluminum film becomes transparent when oxidized, there is a problem that the mirror effect for reflecting heat is lowered and the performance as a heat insulating material is impaired.

【0006】本発明は、かかる従来の課題に鑑み、断熱
ベ−スの亀裂の発生を防止できる断熱材を提供すること
を第1の目的とすると共に、亀裂の発生防止に加え、熱
反射皮膜の酸化によるミラー効果の低下を防止できる断
熱材を提供することを第2の目的とする。
In view of such conventional problems, the first object of the present invention is to provide a heat insulating material capable of preventing the generation of cracks in a heat insulating base, and in addition to preventing the generation of cracks, a heat reflection coating. A second object of the present invention is to provide a heat insulating material capable of preventing the reduction of the mirror effect due to the oxidation of the.

【0007】[0007]

【課題を解決するための手段】本発明は、耐熱性高分子
材料から成る断熱ベ−ス11の表面に熱反射皮膜12を形成
した断熱材において、断熱ベ−ス11とは別体でかつ耐断
熱材料から成る間隔保持用のスペ−サ15を取り付けたも
のである。スペ−サ15を取り付ける場合、断熱ベ−ス11
に取付孔14を形成し、この取付孔14にスペ−サ15を嵌着
する。熱反射皮膜12の表面には、耐熱性を有する酸化防
止皮膜13を形成している。
The present invention relates to a heat insulating material having a heat reflecting coating 12 formed on the surface of a heat insulating base 11 made of a heat resistant polymer material, which is separate from the heat insulating base 11. A spacer 15 made of a heat-resistant material is provided for holding a gap. Insulation base 11 when installing spacer 15
A mounting hole 14 is formed in the mounting hole 14 and a spacer 15 is fitted into the mounting hole 14. On the surface of the heat reflection coating 12, an antioxidant coating 13 having heat resistance is formed.

【0008】[0008]

【作用】断熱ベ−ス11に、これとは別体でかつ耐断熱材
料から成る間隔保持用のスペ−サ15を取り付けているた
め、断熱ベ−ス11に亀裂が発生することはない。断熱ベ
−ス11に取付孔14を形成し、この取付孔14にスペ−サ15
を嵌着すると、断熱ベ−ス11に簡単にスペ−サ15を取り
付け得る。熱反射皮膜12の表面に、耐熱性を有する酸化
防止皮膜13を形成すると、熱反射皮膜12の酸化によるミ
ラー効果の低下がない。
Since the space-keeping spacer 15 made of a heat insulating material, which is separate from the heat insulating base 11, is attached to the heat insulating base 11, the heat insulating base 11 is not cracked. A mounting hole 14 is formed in the heat insulating base 11, and a spacer 15 is formed in this mounting hole 14.
The spacer 15 can be easily attached to the heat insulating base 11 by fitting. By forming the heat-resistant anti-oxidation coating 13 on the surface of the heat-reflecting coating 12, the mirror effect does not decrease due to the oxidation of the heat-reflecting coating 12.

【0009】[0009]

【実施例】以下、本発明の実施例を図面に基づいて詳述
する。図1及び図2は、本発明の第1実施例を示す。図
1及び図2において、10は矩形板状の断熱材で、断熱ベ
−ス11と熱反射皮膜12と酸化防止皮膜13とにより三層構
造に構成されている。
Embodiments of the present invention will now be described in detail with reference to the drawings. 1 and 2 show a first embodiment of the present invention. In FIGS. 1 and 2, reference numeral 10 denotes a rectangular plate-shaped heat insulating material having a three-layer structure composed of a heat insulating base 11, a heat reflecting coating 12 and an antioxidant coating 13.

【0010】断熱ベ−ス11はポリイミドから構成されて
いる。熱反射皮膜12は熱をミラー効果により反射するた
めのもので、アルミ皮膜から成り、断熱ベ−ス11の表面
に蒸着法により形成されている。酸化防止皮膜13は、熱
反射皮膜12の酸化を防止するためのもので、熱反射皮膜
12の表面にコーティングされた皮膜により構成されてい
る。
The heat insulating base 11 is made of polyimide. The heat reflecting film 12 is for reflecting heat by the mirror effect, is made of an aluminum film, and is formed on the surface of the heat insulating base 11 by a vapor deposition method. The anti-oxidation film 13 is for preventing oxidation of the heat reflection film 12, and is a heat reflection film.
It is composed of a film coated on 12 surfaces.

【0011】断熱ベ−ス11及び皮膜12,13 には、所定間
隔で千鳥状に取付孔14が形成され、その各取付孔14に間
隔保持用のスペ−サ15が挿入され嵌着されている。スペ
−サ15は、耐熱性を有するゴム材料等から成り、円錐状
の突起部16と頭部17との間に小径の軸部18が一体形成さ
れており、取付孔14に突起部16側から挿入して軸部18が
取付孔14に内嵌する状態で固定されている。
Mounting holes 14 are formed in a zigzag pattern in the heat insulating base 11 and the films 12 and 13 at predetermined intervals, and spacers 15 for holding a space are inserted and fitted into the mounting holes 14. There is. The spacer 15 is made of a heat-resistant rubber material or the like, and a small-diameter shaft portion 18 is integrally formed between a conical protrusion 16 and a head 17, and the mounting hole 14 has a protrusion 16 side. The shaft portion 18 is fixed in a state of being inserted into the mounting hole 14 by being inserted.

【0012】上記構成の断熱材10によれば、断熱ベ−ス
11等に取付孔14を形成し、これに断熱ベ−ス11とは別体
のスペ−サ15を挿入して取付けているので、角部ができ
るように断熱ベ−ス11を成形する必要がない。従って、
断熱ベ−ス11の亀裂の発生を防止できるため、断熱材10
の耐久性が向上する。
According to the heat insulating material 10 having the above structure, the heat insulating base
Since a mounting hole 14 is formed in 11 etc., and a spacer 15 which is a separate body from the heat insulating base 11 is inserted into this hole, it is necessary to mold the heat insulating base 11 so that a corner portion is formed. There is no. Therefore,
Since it is possible to prevent cracks in the heat insulating base 11,
Durability is improved.

【0013】また熱反射皮膜12のミラー効果によって熱
を反射し、断熱ベ−ス11側への熱伝導を抑制するが、こ
の熱反射皮膜12の表面に酸化防止皮膜13があるので、例
えば熱反射皮膜12としてアルミ皮膜等を用いても、その
酸化を防止できる。このため熱反射皮膜12の酸化に伴う
ミラー効果の低下を防止できるので、断熱材10の断熱性
能を長期間にわたって維持できる利点がある。
Further, heat is reflected by the mirror effect of the heat reflection coating 12 to suppress heat conduction to the heat insulating base 11 side. However, since the surface of the heat reflection coating 12 has the antioxidant coating 13, for example, heat Even if an aluminum film or the like is used as the reflective film 12, its oxidation can be prevented. Therefore, the reduction of the mirror effect due to the oxidation of the heat reflection coating 12 can be prevented, and there is an advantage that the heat insulating performance of the heat insulating material 10 can be maintained for a long period of time.

【0014】図3及び図4は、本発明の第2実施例を示
し、3枚の断熱材10a,10b,10c を積層し、その外周にコ
字状の外枠19を嵌め込んで1枚の断熱パネル20としたも
のである。この場合、各断熱材10a,10b,10c 相互の間隔
は、スペ−サ15の突起部16の突出量により確保し、また
スペ−サ15にゴム等を用いておけば、その突起部16の先
端によって断熱ベ−ス11を傷めることもなく、しかも断
熱パネル20としても厚さ方向に適度な弾力性を持たせる
こともできる。なお、この積層枚数は、3枚以外でも良
く、用途に応じて1枚、2枚、4枚等にその数を決めれ
ば良い。
FIG. 3 and FIG. 4 show a second embodiment of the present invention, in which three heat insulating materials 10a, 10b, 10c are laminated and a U-shaped outer frame 19 is fitted on the outer periphery thereof to form one sheet. This is the heat insulating panel 20. In this case, the distance between the heat insulating materials 10a, 10b, 10c is ensured by the protrusion amount of the protruding portion 16 of the spacer 15, and if the spacer 15 is made of rubber or the like, the protruding portion 16 is The tip does not damage the heat insulating base 11, and the heat insulating panel 20 can also have appropriate elasticity in the thickness direction. The number of stacked layers may be other than three, and the number may be set to one, two, four or the like depending on the application.

【0015】図5は本発明の第3実施例を示し、各断熱
材10a,10b,10c の断熱ベ−ス11の材質を変えたものであ
る。例えば、上側の断熱材10a の断熱ベ−ス11は、最も
耐熱性に優れたポリイミドとし、中間の断熱材10b の断
熱ベ−ス11は、上側の断熱ベ−ス11よりも若干耐熱性の
下がるポリエーテルイミドとし、下側の断熱材10c の断
熱ベ−ス11は更に耐熱性の下がるポリエチレンテレフタ
レートとしている。
FIG. 5 shows a third embodiment of the present invention in which the material of the heat insulating base 11 of each heat insulating material 10a, 10b, 10c is changed. For example, the heat insulating base 11 of the upper heat insulating material 10a is made of polyimide having the highest heat resistance, and the heat insulating base 11 of the middle heat insulating material 10b is slightly heat resistant than the upper heat insulating base 11. The heat-insulating base 11 of the lower heat insulating material 10c is made of polyethylene terephthalate, which has a further lower heat resistance.

【0016】このようにすれば、熱源から遠ざかるに従
って耐熱性の下がる材料を用いているので、熱分布に応
じた設計ができ、材料コストの低減を図りつつ、所定の
断熱性能を確保できる。
In this case, since the material whose heat resistance is lowered as the distance from the heat source is used, it is possible to design according to the heat distribution, and it is possible to secure the predetermined heat insulation performance while reducing the material cost.

【0017】第6図は本発明の第4実施例を示し、スペ
−サ15の頭部17の中央に凹部21を形成したものである。
このようにすれば、断熱材10を複数枚積層する場合、上
側のスペ−サ15の凹部21で下側のスペ−サ15の突起部16
の先端を受けることができるので、その突起部16の先端
で断熱ベ−ス11を損傷することがなく、また断熱材10も
各スペ−サ15が対応する一種類のもので良くなり、量産
によるコストの低下を図ることができる。
FIG. 6 shows a fourth embodiment of the present invention in which a recess 21 is formed in the center of a head 17 of a spacer 15.
With this configuration, when a plurality of heat insulating materials 10 are stacked, the recessed portion 21 of the upper spacer 15 and the protruding portion 16 of the lower spacer 15 are formed.
Since the tip of the protrusion 16 does not damage the heat insulating base 11, the heat insulating material 10 may be one kind corresponding to each spacer 15, and mass production is possible. Therefore, the cost can be reduced.

【0018】図7の(A)(B)は本発明の第5実施例を示
し、スペ−サ15に、頭部17側から突起部16の中間にわた
ってスリット22を形成したものである。このようにすれ
ば、スペ−サ15自体が径方向に拡縮するため、取付孔14
への挿入が容易になり、その挿入時に断熱ベ−ス11或い
は各皮膜12,13 を損傷することがなくなる。
FIGS. 7A and 7B show a fifth embodiment of the present invention, in which the spacer 22 is formed in the spacer 15 from the head 17 side to the middle of the protrusion 16. By doing so, the spacer 15 itself expands and contracts in the radial direction, so that the mounting hole 14
It becomes easy to insert into the heat insulating base 11 and the heat insulating base 11 or the coatings 12 and 13 are not damaged.

【0019】なお、実施例では、断熱ベ−ス11の耐熱性
高分子材料としてポリイミド等を例示したが、芳香族ポ
リアミド、ポリスルホン、ポリフェニレンオキシドをは
じめ、フッ素化ポリマー等、その他の耐熱性高分子材料
を用いても良い。要するに耐熱性高分子材料として何を
採用するかは、断熱材10を使用する箇所の条件に応じて
適宜決定すれば良い。
In the examples, polyimide was used as the heat-resistant polymer material for the heat insulating base 11. However, other heat-resistant polymers such as aromatic polyamide, polysulfone, polyphenylene oxide, fluorinated polymer, etc. Materials may be used. In short, what is adopted as the heat-resistant polymer material may be appropriately determined according to the conditions of the place where the heat insulating material 10 is used.

【0020】またスペ−サ15には、耐熱性ゴムの他、木
材、金属材、或いは耐熱性高分子材料等を用いても良
い。更にその取付構造は、取付孔14に一部を嵌着して耐
熱性接着剤で固定しても良い。
In addition to the heat resistant rubber, the spacer 15 may be made of wood, a metal material, a heat resistant polymer material, or the like. Further, the mounting structure may be partially fitted in the mounting hole 14 and fixed with a heat resistant adhesive.

【0021】[0021]

【発明の効果】本発明によれば、断熱ベ−ス11とは別体
でかつ耐断熱材料から成る間隔保持用のスペ−サ15を取
り付けているので、従来のような断熱ベ−ス11の亀裂の
発生を防止できる。また断熱ベ−ス11に取付孔14を形成
し、この取付孔14にスペ−サ15を嵌着すると、断熱ベ−
ス11にスペ−サ15を簡単に取り付けることができる。
According to the present invention, since the spacer 15 for holding the gap, which is separate from the heat insulating base 11 and is made of a heat resistant material, is attached, the heat insulating base 11 of the conventional type is used. It is possible to prevent the occurrence of cracks. Further, when a mounting hole 14 is formed in the heat insulating base 11 and a spacer 15 is fitted in the mounting hole 14, the heat insulating base 11 is formed.
The spacer 15 can be easily attached to the space 11.

【0022】更に熱反射皮膜12の表面に、耐熱性を有す
る酸化防止皮膜13を形成すると、亀裂の発生防止の他
に、熱反射皮膜12の酸化によるミラー効果の低下を防止
でき、断熱性能を長期間にわたって維持できる利点があ
る。
Further, by forming an anti-oxidizing film 13 having heat resistance on the surface of the heat reflecting film 12, in addition to preventing cracks from occurring, it is possible to prevent the reduction of the mirror effect due to the oxidation of the heat reflecting film 12 and to improve the heat insulation performance. There is an advantage that it can be maintained for a long period of time.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例を示す断面図である。FIG. 1 is a cross-sectional view showing a first embodiment of the present invention.

【図2】本発明の第1実施例を示す平面図である。FIG. 2 is a plan view showing a first embodiment of the present invention.

【図3】本発明の第2実施例を示す断熱パネルの斜視図
である。
FIG. 3 is a perspective view of a heat insulation panel showing a second embodiment of the present invention.

【図4】本発明の第2実施例を示す断熱パネルの断面図
である。
FIG. 4 is a sectional view of a heat insulation panel showing a second embodiment of the present invention.

【図5】本発明の第3実施例を示す断面図である。FIG. 5 is a sectional view showing a third embodiment of the present invention.

【図6】本発明の第4実施例を示す断面図である。FIG. 6 is a sectional view showing a fourth embodiment of the present invention.

【図7】(A) は本発明の第5実施例を示す断面図、(B)
はその底面図である。
7A is a sectional view showing a fifth embodiment of the present invention, FIG.
Is a bottom view thereof.

【符合の説明】[Explanation of sign]

10 断熱材 11 断熱ベ−ス 12 熱反射皮膜 13 酸化防止皮膜 14 取付孔 15 スペ−サ 10 Insulation material 11 Insulation base 12 Heat reflection film 13 Antioxidation film 14 Mounting hole 15 Spacer

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成5年3月29日[Submission date] March 29, 1993

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図8[Correction target item name] Figure 8

【補正方法】追加[Correction method] Added

【補正内容】[Correction content]

【図8】従来例を示す断面図である。FIG. 8 is a cross-sectional view showing a conventional example.

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図9[Correction target item name] Figure 9

【補正方法】追加[Correction method] Added

【補正内容】[Correction content]

【図9】従来例を示す平面図である。FIG. 9 is a plan view showing a conventional example.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 耐熱性高分子材料から成る断熱ベ−ス11
の表面に熱反射皮膜12を形成した断熱材において、断熱
ベ−ス11とは別体でかつ耐断熱材料から成る間隔保持用
のスペ−サ15を取り付けたことを特徴とする断熱材。
1. A heat insulating base 11 made of a heat-resistant polymer material.
A heat insulating material having a heat reflection coating 12 formed on the surface of the heat insulating material, wherein a space maintaining spacer 15 made of a heat insulating material, which is separate from the heat insulating base 11, is attached.
【請求項2】 断熱ベ−ス11に取付孔14を形成し、この
取付孔14にスペ−サ15を嵌着したことを特徴とする請求
項1に記載の断熱材。
2. The heat insulating material according to claim 1, wherein a mounting hole 14 is formed in the heat insulating base 11, and a spacer 15 is fitted in the mounting hole 14.
【請求項3】 熱反射皮膜12の表面に、耐熱性を有する
酸化防止皮膜13を形成したことを特徴とする請求項1又
は2に記載の断熱材。
3. The heat insulating material according to claim 1, wherein a heat-resistant antioxidant film 13 is formed on the surface of the heat reflective film 12.
JP25391792A 1992-08-29 1992-08-29 Heat insulating material Pending JPH0671797A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25391792A JPH0671797A (en) 1992-08-29 1992-08-29 Heat insulating material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25391792A JPH0671797A (en) 1992-08-29 1992-08-29 Heat insulating material

Publications (1)

Publication Number Publication Date
JPH0671797A true JPH0671797A (en) 1994-03-15

Family

ID=17257832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25391792A Pending JPH0671797A (en) 1992-08-29 1992-08-29 Heat insulating material

Country Status (1)

Country Link
JP (1) JPH0671797A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006283761A (en) * 2005-04-01 2006-10-19 General Electric Co <Ge> Reflective and electrically resistant coating and method for applying to composite structure
KR20180014437A (en) * 2015-06-29 2018-02-08 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. Thermal Shield for Electrostatic Chuck

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006283761A (en) * 2005-04-01 2006-10-19 General Electric Co <Ge> Reflective and electrically resistant coating and method for applying to composite structure
KR20180014437A (en) * 2015-06-29 2018-02-08 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. Thermal Shield for Electrostatic Chuck
CN107810548A (en) * 2015-06-29 2018-03-16 瓦里安半导体设备公司 Heat shielding for electrostatic chuck
JP2018525812A (en) * 2015-06-29 2018-09-06 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド Thermal shielding for electrostatic chucks

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