JPH066163A - Piezoelectric component - Google Patents
Piezoelectric componentInfo
- Publication number
- JPH066163A JPH066163A JP16118692A JP16118692A JPH066163A JP H066163 A JPH066163 A JP H066163A JP 16118692 A JP16118692 A JP 16118692A JP 16118692 A JP16118692 A JP 16118692A JP H066163 A JPH066163 A JP H066163A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- internal
- electrode
- container
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、フィルタ回路、発振回
路等に使用される圧電部品に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric component used in a filter circuit, an oscillator circuit, etc.
【０００２】[0002]
【従来の技術と課題】従来、この種の圧電部品として
は、圧電体基板と、圧電体基板を収納するための凹部を
有する容器と、容器の開口部を塞ぐ蓋とで構成されたも
のが知られている。図６は従来の圧電部品に用いられて
いる容器の一例を示すものである。2. Description of the Related Art Heretofore, as a piezoelectric component of this type, there has been used a piezoelectric substrate, a container having a recess for accommodating the piezoelectric substrate, and a lid for closing an opening of the container. Are known. FIG. 6 shows an example of a container used for a conventional piezoelectric component.
【０００３】絶縁性容器４０は凹部４１を有し、この凹
部４１の両端部にはそれぞれ切込み部４２ａ，４２ｂが
設けられている。凹部４１の底壁中央部には台座部４３
が設けられている。圧電体基板は切込み部４２ａ，４２
ｂをガイドにして、横長の状態で水平に凹部４１内に収
納され、切込み部４２ａ，４２ｂ及び台座部４３にて振
動部分が凹部４１の底壁に接触しないように支持され
る。容器４０の両端部及び中央部には、スパッタあるい
は蒸着等の薄膜形成方法により内部入出力電極４６，４
７及び内部グランド電極４８が形成されている。すなわ
ち、内部入出力電極４６，４７はそれぞれ切込み部４２
ａ，４２ｂの部分に設けられ、内部グランド電極４８は
台座部４３の部分に設けられている。The insulating container 40 has a recess 41, and both ends of the recess 41 are provided with notches 42a and 42b, respectively. A pedestal portion 43 is provided at the center of the bottom wall of the recess 41.
Is provided. The piezoelectric substrate has notches 42a, 42
Using b as a guide, it is horizontally accommodated in the recess 41 in a horizontally long state, and is supported by the notches 42a and 42b and the pedestal part 43 so that the vibrating portion does not contact the bottom wall of the recess 41. Internal input / output electrodes 46, 4 are formed on both ends and the center of the container 40 by a thin film forming method such as sputtering or vapor deposition.
7 and an internal ground electrode 48 are formed. That is, the internal input / output electrodes 46 and 47 are respectively provided with the cutouts 42.
The internal ground electrode 48 is provided in the portions a and 42b, and the pedestal portion 43 is provided.
【０００４】ところで、電極４６〜４８は、図７に示す
ように、容器４０の凹部４１形成面にステンレス製マス
ク５０をセットした後、蒸着あるいはスパッタ処理によ
り形成される。マスク５０には所望の位置に穴５１ａ，
５１ｂ，５１ｃが設けられており、蒸着源あるいはスパ
ッタ源から飛散してきた蒸着金属やスパッタ金属がこの
穴５１ａ〜５１ｃを通過して容器４０の切込み部４２
ａ，４２ｂ及び台座部４３に達することにより、切込み
部４２ａ，４２ｂ及び台座部４３に電極４６〜４８が形
成される。By the way, the electrodes 46 to 48 are formed by vapor deposition or sputtering after a stainless mask 50 is set on the surface of the container 40 on which the recess 41 is formed, as shown in FIG. The mask 50 has holes 51a at desired positions,
51b and 51c are provided, and the vapor-deposited metal or sputtered metal scattered from the vapor-deposition source or the sputter source passes through the holes 51a to 51c, and the cut portion 42 of the container 40 is provided.
The electrodes 46 to 48 are formed in the cut portions 42a and 42b and the pedestal portion 43 by reaching the a and 42b and the pedestal portion 43.
【０００５】ところが、蒸着金属やスパッタ金属は穴５
１ａ〜５１ｃを通過した後、その一部がマスク５０の裏
側において回り込み現象を生じ、図中点線で示した領域
Ｉ，II，IIIに付着するという問題があった。このた
め、電極４６と４８の間、あるいは電極４７と４８間の
絶縁信頼性が低く、最悪の場合には電極４６と４８、あ
るいは電極４７と４８の間で短絡するおそれがあった。However, the vapor-deposited metal and sputtered metal have holes 5.
After passing through 1a to 51c, there is a problem that a part of the wraparound phenomenon occurs on the back side of the mask 50 and adheres to the regions I, II, and III shown by dotted lines in the figure. Therefore, the insulation reliability between the electrodes 46 and 48 or between the electrodes 47 and 48 is low, and in the worst case, there is a risk of short circuit between the electrodes 46 and 48 or between the electrodes 47 and 48.
【０００６】そこで、本発明の課題は、内部入力電極、
内部出力電極及び内部グランド電極を形成する際、電極
間の絶縁を充分確保できる構造を有する圧電部品を提供
することにある。Therefore, an object of the present invention is to provide an internal input electrode,
It is an object of the present invention to provide a piezoelectric component having a structure capable of sufficiently ensuring insulation between electrodes when forming an internal output electrode and an internal ground electrode.
【０００７】[0007]
【課題を解決するための手段と作用】以上の課題を解決
するため、本発明に係る圧電部品は、容器の凹部端部に
内部入力電極と内部出力電極を設け、前記容器の凹部の
所定の位置に内部グランド電極を表面に設けた台座部を
配設し、かつ、前記台座部と前記内部入力電極との間及
び前記台座部と前記内部出力電極との間の前記容器の凹
部に短絡防止用突起を配設したことを特徴とする。In order to solve the above problems, a piezoelectric component according to the present invention is provided with an internal input electrode and an internal output electrode at an end of a recess of a container, and a predetermined recess of the container is provided. A pedestal portion provided with an internal ground electrode on its surface is disposed at a position, and a short circuit is prevented in the concave portion of the container between the pedestal portion and the internal input electrode and between the pedestal portion and the internal output electrode. It is characterized in that a projection for use is provided.
【０００８】以上の構成において、隣接する内部入力電
極と内部グランド電極との間及び内部出力電極と内部グ
ランド電極との間に設けられた短絡防止用突起によっ
て、内部入力電極と内部グランド電極の間及び内部出力
電極と内部グランド電極の間の沿面距離が長くなる。し
かも、これらの電極を形成する際、蒸着原子やスパッタ
原子のマスク裏側における回り込み量が、短絡防止用突
起によって制限される。In the above structure, a short-circuit preventing protrusion is provided between the internal input electrode and the internal ground electrode and between the internal output electrode and the internal ground electrode which are adjacent to each other. Also, the creepage distance between the internal output electrode and the internal ground electrode becomes long. In addition, when forming these electrodes, the amount of vapor deposition atoms or sputtered atoms that wrap around on the back side of the mask is limited by the short-circuit preventing projections.
【０００９】[0009]
【実施例】以下、本発明に係る圧電部品の実施例を添付
図面を参照して説明する。 ［第１実施例、図１〜図４］図１に示すように、圧電部
品は圧電体基板１、この圧電体基板１を収納している絶
縁性容器１０及び封止蓋２０から構成されている。圧電
体基板１はＰＺＴ等のセラミック材からなり、表面に振
動電極２ａ，２ｂ、振動電極３ａ，３ｂが設けられ、裏
面に振動電極２ｃ，３ｃ（図２参照）が設けられてい
る。振動電極２ａ，３ｂは、それぞれ圧電体基板１の表
面の端部に設けた引出し電極４ａ，４ｂに電気的に接続
し、振動電極２ｂと３ａは導体路を介して電気的に接続
している。さらに、図２に示すように、基板１の裏面の
端部には接続用補助電極６ａ，６ｂが設けられ、中央部
には引出し電極７が設けられている。Embodiments of the piezoelectric component according to the present invention will be described below with reference to the accompanying drawings. [First Embodiment, FIGS. 1 to 4] As shown in FIG. 1, a piezoelectric component comprises a piezoelectric substrate 1, an insulating container 10 housing the piezoelectric substrate 1 and a sealing lid 20. There is. The piezoelectric substrate 1 is made of a ceramic material such as PZT, has vibrating electrodes 2a, 2b and vibrating electrodes 3a, 3b on the front surface, and vibrating electrodes 2c, 3c (see FIG. 2) on the back surface. The vibrating electrodes 2a and 3b are electrically connected to the lead-out electrodes 4a and 4b provided at the ends of the surface of the piezoelectric substrate 1, respectively, and the vibrating electrodes 2b and 3a are electrically connected to each other via conductor paths. . Further, as shown in FIG. 2, auxiliary electrodes 6a and 6b for connection are provided at the ends of the back surface of the substrate 1, and a lead electrode 7 is provided at the center.
【００１０】絶縁性容器１０は凹部１１を有し、この凹
部１１の両端部には切込み部１２ａ，１２ｂが設けられ
ている。凹部１１の底壁１１ａ中央部には台座部１３が
設けられている。さらに、凹部１１の底壁１１ａ及び側
壁１１ｂには短絡防止用突起１４が台座部１３と並行に
配設されている。突起１４は台座部１３と切込み部１２
ａの間及び台座部１３と切込み部１２ｂの間にそれぞれ
３箇所設けられている。凹部１１の底壁１１ａから突起
１４の水平面１４ａまでの高さ寸法は台座部１３の高さ
寸法より低く設定されており、圧電体基板１の振動部分
に突起１４の水平面１４ａが接触するのを防いでいる。
同様に、凹部１１の側壁１１ｂから突起１４の垂直面１
４ｂまでの突出寸法も、圧電体基板１の縁部の振動部分
に突起１４の垂直面１４ｂが接触しないように設定され
ている。容器１０の両端部及び中央部にはスパッタ、あ
るいは蒸着等の薄膜形成方法により内部入出力電極１
６，１７及び内部グランド電極１８が形成されている。The insulative container 10 has a recess 11, and notches 12a and 12b are provided at both ends of the recess 11. A pedestal 13 is provided at the center of the bottom wall 11 a of the recess 11. Further, short-circuit preventing projections 14 are arranged on the bottom wall 11 a and the side walls 11 b of the recess 11 in parallel with the pedestal portion 13. The protrusion 14 has a base portion 13 and a notch portion 12.
It is provided in three places between a and between the pedestal 13 and the cut 12b. The height dimension from the bottom wall 11a of the concave portion 11 to the horizontal surface 14a of the protrusion 14 is set lower than the height dimension of the pedestal portion 13, so that the horizontal portion 14a of the protrusion 14 contacts the vibrating portion of the piezoelectric substrate 1. It is preventing.
Similarly, from the side wall 11b of the recess 11 to the vertical surface 1 of the protrusion 14.
The protrusion size up to 4b is also set so that the vertical surface 14b of the protrusion 14 does not contact the vibrating portion at the edge of the piezoelectric substrate 1. The internal input / output electrodes 1 are formed on both ends and the center of the container 10 by a thin film forming method such as sputtering or vapor deposition.
6, 17 and the internal ground electrode 18 are formed.
【００１１】ここに、内部入出力電極１６，１７及び内
部グランド電極１８の形成方法を、図３を参照して説明
する。まず、図３に示すように、容器１０の凹部１０ａ
形成面に、ステンレス製マスク２５をセットする。マス
ク２５には所望の位置に電極形成のための穴２６ａ，２
６ｂ，２６ｃが設けられている。次に、蒸着あるいはス
パッタ処理等が行なわれ、蒸着源あるいはスパッタ源か
ら飛散してきた蒸着金属やスパッタ金属は穴２６ａ〜２
６ｃを通過して容器１０の切込み部１２ａ，１２ｂ及び
台座部１３に達し、切込み部１２ａ，１２ｂ及び台座部
１３にそれぞれ内部入出力電極１６，１７及び内部グラ
ンド電極１８を形成する。このとき、蒸着金属やスパッ
タ金属の一部は穴２６ａ〜２６ｃを通過した後、マスク
２５の裏側において回り込み現象を生じる。しかしなが
ら、凹部１１の底壁１１ａ及び側壁１１ｂに設けた短絡
防止用突起１４によって、蒸着金属やスパッタ金属の回
り込み量は、図中点線で示されている領域Ｉ，II，III
に制限される。さらに、電極１６と１８の間及び電極１
７と１８の間の沿面距離が、短絡防止用突起１４によっ
て従来の圧電部品と比較して長くなっている。以上の結
果から、電極１６−１８間及び１７−１８間の絶縁は充
分に確保される。Here, a method for forming the internal input / output electrodes 16 and 17 and the internal ground electrode 18 will be described with reference to FIG. First, as shown in FIG. 3, the recess 10a of the container 10
A stainless mask 25 is set on the formation surface. The mask 25 has holes 26a, 2 for forming electrodes at desired positions.
6b and 26c are provided. Next, vapor deposition or sputter treatment is performed, and the vapor deposition metal or the sputtered metal scattered from the sputter source has holes 26a-2.
After passing through 6c, the cuts 12a and 12b and the pedestal 13 of the container 10 are reached, and the internal input / output electrodes 16 and 17 and the internal ground electrode 18 are formed in the cuts 12a and 12b and the pedestal 13, respectively. At this time, a part of the vapor-deposited metal or sputtered metal passes through the holes 26a to 26c, and then a wraparound phenomenon occurs on the back side of the mask 25. However, due to the short-circuit preventing projections 14 provided on the bottom wall 11a and the side wall 11b of the recess 11, the amount of the deposited metal or sputtered metal that wraps around the regions I, II, and III indicated by dotted lines in the figure.
Limited to. In addition, between electrodes 16 and 18 and electrode 1
The creepage distance between 7 and 18 is increased by the short-circuit prevention protrusion 14 as compared with the conventional piezoelectric component. From the above results, the insulation between the electrodes 16-18 and 17-18 is sufficiently secured.
【００１２】封止蓋２０は、両端部及び中央部に導体２
１，２２，２３がスパッタあるいは蒸着等の方法により
形成されている。次に、以上の構成品の組立て手順につ
いて説明する。まず、容器１０の切込み部１２ａ，１２
ｂ及び台座部１３の部分の３箇所にペースト状の導電性
接着剤を塗布する。圧電体基板１は容器１０の切込み部
１２ａ，１２ｂをガイドにして横長の状態で水平に収納
され、振動部分が凹部１１ａの底壁に接触しないように
切込み部１２ａ，１２ｂ及び台座部１３にて支持され
る。この後、ペースト状の導電性接着剤を硬化させるこ
とにより圧電体基板１と容器１０が導電性接着剤を介し
て固定され、電気的に接続される。さらに、封止蓋２０
が容器１０の開口端面に接着剤によって固着され、内部
に密閉された振動空間を有する圧電部品が得られる。The sealing lid 20 has conductors 2 at both ends and the center.
1, 22, 23 are formed by a method such as sputtering or vapor deposition. Next, a procedure for assembling the above components will be described. First, the cutouts 12a, 12 of the container 10
A paste-like conductive adhesive is applied to three portions of b and the pedestal portion 13. The piezoelectric substrate 1 is horizontally stored in a horizontally long state with the cutouts 12a and 12b of the container 10 as guides, and the cutouts 12a and 12b and the pedestal 13 prevent the vibrating portion from contacting the bottom wall of the recess 11a. Supported. After that, by curing the paste-like conductive adhesive, the piezoelectric substrate 1 and the container 10 are fixed and electrically connected via the conductive adhesive. Furthermore, the sealing lid 20
Is fixed to the open end surface of the container 10 with an adhesive to obtain a piezoelectric component having a vibration space sealed inside.
【００１３】次に、図４に示すように、この圧電部品の
両端部及び中央部にそれぞれ外部入出力電極２７，２８
及び外部グランド電極２９を設けて製品とする。 ［第２実施例、図５］図５は第２実施例の圧電部品に使
用される絶縁性容器３０を示すものである。この容器３
０は蒸着金属やスパッタ金属の回り込み現象が凹部の側
壁と底壁の接した部分で特に顕著に発生するという経験
に基づき、局所的に短絡防止用突起を設けたものであ
る。絶縁性容器３０は凹部３１を有し、この凹部３１の
両端部には切込み部３２ａ，３２ｂが設けられている。
凹部３１の底壁３１ａ中央部には台座部３３が設けられ
ている。さらに、凹部３１の底壁３１ａと側壁３１ｂが
接した部分に短絡防止用小突起３４が並設されている。
小突起３４は台座部３３と切込み部３２ａ，３２ｂの間
にそれぞれ６箇所（手前側の側壁３１ｂと底壁３１ａが
接する部分に配設された小突起３４は図示せず）設けら
れている。凹部３１の底壁３１ａから小突起３４の水平
面３４ａまでの高さ寸法は台座部３３の高さ寸法より低
く設定されており、圧電体基板の振動部分に小突起３４
が接触するのを防止している。同様に、凹部３１の側壁
３１ｂから小突起３４の垂直面３４ｂまでの突出寸法
も、圧電体基板の縁部の振動部分に小突起３４が接触し
ないように設定されている。この容器３０の両端部及び
中央部には内部入出力電極３６，３７及び内部グランド
電極３８が形成されている。電極３６〜３８は第１実施
例の形成方法と同様の方法により形成される。この電極
３６〜３８の形成の際、小突起３４は第１実施例の突起
１４と同様の作用、効果を奏する。Next, as shown in FIG. 4, external input / output electrodes 27 and 28 are provided at both ends and the center of the piezoelectric component, respectively.
Also, an external ground electrode 29 is provided to complete the product. [Second Embodiment, FIG. 5] FIG. 5 shows an insulating container 30 used for the piezoelectric component of the second embodiment. This container 3
No. 0 is based on the experience that the wraparound phenomenon of vapor-deposited metal or sputtered metal occurs remarkably particularly at the portion where the side wall and the bottom wall of the recess are in contact with each other, and the short-circuit preventing protrusion is locally provided. The insulating container 30 has a concave portion 31, and cut portions 32a and 32b are provided at both ends of the concave portion 31.
A pedestal 33 is provided at the center of the bottom wall 31a of the recess 31. Further, small short-circuit preventing projections 34 are provided in parallel at the portion where the bottom wall 31a and the side wall 31b of the recess 31 are in contact with each other.
The small protrusions 34 are provided at six positions between the pedestal portion 33 and the notches 32a and 32b (the small protrusions 34 provided at the portion where the front side wall 31b and the bottom wall 31a are in contact are not shown). The height dimension from the bottom wall 31a of the recess 31 to the horizontal surface 34a of the small protrusion 34 is set lower than the height dimension of the pedestal portion 33, and the small protrusion 34 is formed on the vibrating portion of the piezoelectric substrate.
To prevent contact. Similarly, the protrusion size from the side wall 31b of the recess 31 to the vertical surface 34b of the small protrusion 34 is also set so that the small protrusion 34 does not contact the vibrating portion of the edge portion of the piezoelectric substrate. Internal input / output electrodes 36 and 37 and an internal ground electrode 38 are formed at both ends and the center of the container 30. The electrodes 36 to 38 are formed by the same method as the forming method of the first embodiment. When the electrodes 36 to 38 are formed, the small protrusion 34 has the same action and effect as the protrusion 14 of the first embodiment.
【００１４】［他の実施例］なお、本発明に係る圧電部
品は前記実施例に限定されるものではなく、その要旨の
範囲内で種々に変形することができる。特に、短絡防止
用突起の数量、あるいは形状等は任意であって、仕様に
合わせて種々選択される。[Other Embodiments] The piezoelectric component according to the present invention is not limited to the above-mentioned embodiment, but can be variously modified within the scope of the invention. In particular, the number, shape, etc. of the short-circuit preventing projections are arbitrary and can be selected variously according to the specifications.
【００１５】[0015]
【発明の効果】以上の説明で明らかなように、本発明に
よれば、内部入力電極と内部グランド電極との間及び内
部出力電極と内部グランド電極との間に短絡防止用突起
を配設したので、内部入力電極、内部出力電極及び内部
グランド電極を蒸着やスパッタ等の薄膜形成法によって
形成する際、マスクの裏側における蒸着金属やスパッタ
金属の回り込み量が短絡防止用突起によって制限され
る。また、短絡防止用突起によって内部入力電極と内部
グランド電極との間及び内部出力電極と内部グランド電
極との間の沿面距離が長くなる。As is apparent from the above description, according to the present invention, the short-circuit preventing protrusion is provided between the internal input electrode and the internal ground electrode and between the internal output electrode and the internal ground electrode. Therefore, when the internal input electrode, the internal output electrode, and the internal ground electrode are formed by a thin film forming method such as vapor deposition or sputtering, the amount of the deposited metal or sputtered metal on the back side of the mask is limited by the short-circuit preventing protrusion. Further, the short-circuit preventing protrusions increase the creeping distance between the internal input electrode and the internal ground electrode and between the internal output electrode and the internal ground electrode.
【００１６】この結果、内部入力電極、内部出力電極及
び内部グランド電極を形成する際、電極間の絶縁を充分
確保することができる構造の圧電部品が得られる。As a result, when forming the internal input electrode, the internal output electrode, and the internal ground electrode, a piezoelectric component having a structure capable of ensuring sufficient insulation between the electrodes is obtained.
【図１】本発明に係る圧電部品の第１実施例を示す分解
斜視図。FIG. 1 is an exploded perspective view showing a first embodiment of a piezoelectric component according to the present invention.
【図２】図１に示されている圧電体基板を裏面から見た
斜視図。FIG. 2 is a perspective view of the piezoelectric substrate shown in FIG. 1 as viewed from the back side.
【図３】図１に示されている容器の電極形成について説
明するための断面図。FIG. 3 is a sectional view for explaining electrode formation of the container shown in FIG.
【図４】圧電部品の外観を示す斜視図。FIG. 4 is a perspective view showing the external appearance of a piezoelectric component.
【図５】本発明に係る圧電部品の第２実施例に使用され
る容器の斜視図。FIG. 5 is a perspective view of a container used in a second embodiment of the piezoelectric component according to the present invention.
【図６】従来の圧電部品に用いられる容器の斜視図。FIG. 6 is a perspective view of a container used for a conventional piezoelectric component.
【図７】図６に示された容器の電極形成について説明す
るための断面図。7 is a cross-sectional view for explaining electrode formation of the container shown in FIG.
１…圧電体基板 ２ａ，２ｂ，２ｃ，３ａ，３ｂ，３ｃ…振動電極 １０…容器 １１…凹部 １３…台座部 １４…短絡防止用突起 １６，１７…内部入出力電極 １８…内部グランド電極 ３０…容器 ３１…凹部 ３４…短絡防止用小突起 ３６，３７…内部入出力電極 ３８…内部グランド電極 DESCRIPTION OF SYMBOLS 1 ... Piezoelectric substrate 2a, 2b, 2c, 3a, 3b, 3c ... Vibrating electrode 10 ... Container 11 ... Recess 13 ... Pedestal 14 ... Short-circuit prevention projections 16, 17 ... Internal input / output electrode 18 ... Internal ground electrode 30 ... Container 31 ... Recessed portion 34 ... Small projection for preventing short circuit 36, 37 ... Internal input / output electrode 38 ... Internal ground electrode
Claims (1)
と、この圧電体基板を収納するための凹部を有する容器
とを備えた圧電部品において、 前記容器の凹部端部に内部入力電極と内部出力電極を設
け、前記容器の凹部の所定の位置に内部グランド電極を
表面に設けた台座部を配設し、かつ、前記台座部と前記
内部入力電極との間及び前記台座部と前記内部出力電極
との間の前記容器の凹部に短絡防止用突起を配設したこ
とを特徴とする圧電部品。1. A piezoelectric component comprising a piezoelectric substrate having vibrating electrodes on the front and back surfaces thereof, and a container having a recess for accommodating the piezoelectric substrate, wherein an internal input electrode is provided at an end of the recess of the container. An internal output electrode is provided, and a pedestal portion having an internal ground electrode on its surface is provided at a predetermined position of the concave portion of the container, and between the pedestal portion and the internal input electrode and between the pedestal portion and the interior. A piezoelectric component, characterized in that a short-circuit preventing projection is provided in a recess of the container between the output electrode and the output electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04161186A JP3109248B2 (en) | 1992-06-19 | 1992-06-19 | Piezo components |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04161186A JP3109248B2 (en) | 1992-06-19 | 1992-06-19 | Piezo components |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH066163A true JPH066163A (en) | 1994-01-14 |
| JP3109248B2 JP3109248B2 (en) | 2000-11-13 |
Family
ID=15730228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04161186A Expired - Fee Related JP3109248B2 (en) | 1992-06-19 | 1992-06-19 | Piezo components |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3109248B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6150903A (en) * | 1995-01-19 | 2000-11-21 | Matsushita Electric Industrtial Co., Ltd. | Piezoelectric filter, its manufacturing method, and intermediate frequency filter |
-
1992
- 1992-06-19 JP JP04161186A patent/JP3109248B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6150903A (en) * | 1995-01-19 | 2000-11-21 | Matsushita Electric Industrtial Co., Ltd. | Piezoelectric filter, its manufacturing method, and intermediate frequency filter |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3109248B2 (en) | 2000-11-13 |
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