JPH0654315U - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPH0654315U JPH0654315U JP27093U JP27093U JPH0654315U JP H0654315 U JPH0654315 U JP H0654315U JP 27093 U JP27093 U JP 27093U JP 27093 U JP27093 U JP 27093U JP H0654315 U JPH0654315 U JP H0654315U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- insulating substrate
- base
- piezoelectric oscillator
- piezoelectric vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
(57)【要約】
【目的】ベースに圧電発振片を直接固定した圧電振動子
を落下させた持、圧電発振片が欠けたり、折れたり、周
波数が大きく変化していた。本考案はこの圧電発振片へ
の衝撃を緩和し、圧電発振片の欠け、折れ、周波数変化
をおさえたり、かつ、圧電発振片と絶縁基板との熱膨張
差を少なくして、長期のエージング変化量をも小さくな
るようにする。
【構成】ベースと圧電発振片の間に絶縁基板を設け、ベ
ースにその中央部を固定したり、絶縁基板に段差を設け
て、ベース、圧電発振動片への固定をやりやすくする。
かつ、圧電発振片と絶縁基板の熱膨張係数を近似させ
て、周波数のエージング変化量を押えるようにした。
(57) [Abstract] [Purpose] When a piezoelectric vibrator with a piezoelectric oscillator directly fixed to the base was dropped, the piezoelectric oscillator was chipped or broken, and the frequency was greatly changed. The present invention alleviates the impact on the piezoelectric oscillator, suppresses chipping, breakage, and frequency change of the piezoelectric oscillator, and reduces the thermal expansion difference between the piezoelectric oscillator and the insulating substrate to change the long-term aging. Try to keep the amount small. [Structure] An insulating substrate is provided between a base and a piezoelectric oscillating piece, and a central portion thereof is fixed to the base, or a step is provided on the insulating substrate to facilitate fixing to the base and the piezoelectric oscillating piece.
In addition, the thermal expansion coefficients of the piezoelectric oscillator and the insulating substrate are approximated to suppress the amount of aging change in frequency.
Description
【０００１】[0001]
本考案は圧電振動子の耐衝撃性の改善の構造に関する。 The present invention relates to a structure for improving the impact resistance of a piezoelectric vibrator.
【０００２】[0002]
従来の圧電振動子は図５の平面図に示すようにセラミック等で作られた絶縁物 のベース５１に印刷等でマウント台５２、枕５３を形成し、外部への導通パター ン（図示せず）も印刷等で形成していた。圧電発振片５４は蒸着等の手段を用い てＡｇ等の金属で電極パターン５５を形成してある。この圧電発振片５４をマウ ント台５２、枕５３に乗せ、導電性接着５６等で固定していた。この後、Ａｇ等 を用いて真空中で周波数調整を行い、フタ５７をかぶせ、Ｎ2 雰囲気中で低融点ガラス５８等を用いて気密封止を行い圧電振動子５９としてい た。As shown in the plan view of FIG. 5, a conventional piezoelectric vibrator has a mount base 52 and a pillow 53 formed by printing or the like on an insulating base 51 made of ceramic or the like, and a conductive pattern (not shown) to the outside. ) Was also formed by printing or the like. The piezoelectric oscillation piece 54 has an electrode pattern 55 made of a metal such as Ag using a method such as vapor deposition. The piezoelectric oscillation piece 54 was placed on the mount base 52 and the pillow 53, and fixed with a conductive adhesive 56 or the like. After that, the frequency was adjusted in vacuum using Ag or the like, the lid 57 was covered, and airtight sealing was performed using a low melting point glass 58 or the like in an N 2 atmosphere to form a piezoelectric vibrator 59.
【０００３】 図６は従来の圧電振動子５９の上面図を示す。FIG. 6 shows a top view of a conventional piezoelectric vibrator 59.
【０００４】 電極パターン５５の形成された圧電発振片５４はマウント台５２と枕５３に置 き、導電性接着剤５６等でマウント台５２に片持支持で固定されていた。The piezoelectric oscillation piece 54 on which the electrode pattern 55 is formed is placed on the mount base 52 and the pillow 53, and is fixed to the mount base 52 by cantilever support with a conductive adhesive 56 or the like.
【０００５】 枕５３はベース５１と圧電発振片５４の間にスキマを作る為に設けられている 。The pillow 53 is provided to create a gap between the base 51 and the piezoelectric oscillation piece 54.
【０００６】[0006]
しかし、従来の技術では圧電発振片がベースに直接固定されている為に、圧電 振動子が落下等で衝撃を受けた時、ベースから直接、圧電発振片に衝撃が伝わる 為、圧電発振片が欠けたり、折れたりしていた。欠により圧電発振片の周波数ズ レが生じ、折れれば当然圧電発振片の発振が止まり、圧電振動子としては不良と なる等悪影響がでていた。また、ベースと圧電発振片が直接固定されている為、 ベースと圧電発振片の熱膨張係数の差により、長期にわたると周波数がシフトし ていく等エージングに悪影響を与えた。 However, in the conventional technology, since the piezoelectric oscillator is directly fixed to the base, when the piezoelectric vibrator receives an impact such as a drop, the impact is directly transmitted from the base to the piezoelectric oscillator, so It was chipped or broken. Due to the lack, a frequency deviation of the piezoelectric oscillation piece occurred, and if it was broken, the oscillation of the piezoelectric oscillation piece naturally stopped, and there was a bad effect such as a defective piezoelectric vibrator. In addition, since the base and the piezoelectric oscillator are directly fixed, the difference in thermal expansion coefficient between the base and the piezoelectric oscillator adversely affected the aging, such as the frequency shifting over a long period of time.
【０００７】[0007]
そこで本考案はこのような欠点を解決するもので １．ベースに圧電振動子を固定する際にベースにまず、絶縁基板の中央部を固定 し、その上に圧電発振片を固定したことを特徴とする。 Therefore, the present invention solves such a drawback. When fixing the piezoelectric vibrator to the base, the central part of the insulating substrate is first fixed to the base, and the piezoelectric oscillation piece is fixed thereon.
【０００８】 ２．絶縁基板の上に圧電発振片を片持支持にしたことを特徴とする。2. It is characterized in that the piezoelectric oscillation piece is cantileveredly supported on the insulating substrate.
【０００９】 ３．絶縁基板の熱膨張係数を圧電発振片の熱膨張係数に近似させたことを特徴と する。3. It is characterized in that the thermal expansion coefficient of the insulating substrate is approximated to that of the piezoelectric oscillator.
【００１０】 ４．絶縁基板に段差を設けたことを特徴とする。[0010] 4. It is characterized in that a step is provided on the insulating substrate.
【００１１】[0011]
本考案の実施例を図１の平面図により説明する。 An embodiment of the present invention will be described with reference to the plan view of FIG.
【００１２】 セラミック等で作られた絶縁物のベース１に印刷等で導通パターン（図示せず ）を形成していた。このベース１に電極パターン２３を形成した絶縁基板２を導 電性接着剤４等で固定する。ベース１に絶縁基板２を固定する時は絶縁基板２の 中央部を固定するようにした方が良く、できれば絶縁基板２の長手方向の長さの １／３以内の中央部で固定した方が良い。次に蒸着等でＡｇ等の金属で形成され た電極パターン６をつけた圧電発振片５を絶縁基板２に導電性接着剤７等を用い て固定する。この後、Ａｇ等を用いて真空中で周波数調整を行い、フタ８をかぶ せ、Ｎ2 雰囲気中で低融点ガラス９等を用いて気密封止を行い圧電振動子１０と している。A conductive pattern (not shown) was formed by printing or the like on an insulating base 1 made of ceramic or the like. The insulating substrate 2 having the electrode pattern 23 formed thereon is fixed to the base 1 with a conductive adhesive 4 or the like. When fixing the insulating substrate 2 to the base 1, it is better to fix the central portion of the insulating substrate 2, and if possible, it is preferable to fix it at the central portion within 1/3 of the longitudinal length of the insulating substrate 2. good. Next, the piezoelectric oscillation piece 5 provided with the electrode pattern 6 made of a metal such as Ag is fixed to the insulating substrate 2 with a conductive adhesive 7 or the like by vapor deposition or the like. After that, the frequency is adjusted in a vacuum using Ag or the like, the lid 8 is covered, and the piezoelectric vibrator 10 is hermetically sealed in the N 2 atmosphere using the low melting point glass 9 or the like.
【００１３】 図２は本考案の他の実施例の平面図を示し、図３は蒸面上面図を示す。ベース １に電極パターン３を形成した絶縁基板２を導電性接着剤４で固定するまでは図 １の実施例と同じである。電極パターン６を形成した圧電発振片５を片持支持で 絶縁基板２に導電性接着剤７等で固定する。耐衝撃性から考えれば図１のような 両持支持で圧電発振片５を固定した方が有利となるが圧電発振片の特性、温度特 性やエージング性は悪くなる。特にエージング性で数ＰＰＭレベルの特性を出す となると図２の片持支持の方が有利りなってくる。絶縁基板２の材質としては水 晶板やガラス等で圧電発振片５と熱膨張を近似させておくと特性は更に向上し、 両持支持においても温度特性、エージング性は格段によくなる。更にエージング 性を要求する場合は片持支持にする事により特性向上をはかれる。絶縁基板２の 厚みは厚すぎると耐衝撃に対する効果はなくなる。ベース１で受けた衝撃を絶縁 基板２の中央部で受け分散させる為にある程度の弾力性が要求される。かといっ て薄ければ絶縁基板２自体が破壊するため、厚みとしては０．０５ｍｍから０． １８ｍｍの間で選択するのが望ましい。FIG. 2 is a plan view of another embodiment of the present invention, and FIG. 3 is a top view of a steaming surface. It is the same as the embodiment of FIG. 1 until the insulating substrate 2 having the electrode pattern 3 formed on the base 1 is fixed with the conductive adhesive 4. The piezoelectric oscillation piece 5 on which the electrode pattern 6 is formed is cantilevered and fixed to the insulating substrate 2 with a conductive adhesive 7 or the like. From the viewpoint of impact resistance, it is more advantageous to fix the piezoelectric oscillation piece 5 by supporting both ends as shown in FIG. 1, but the characteristics, temperature characteristics and aging property of the piezoelectric oscillation piece deteriorate. In particular, the cantilever support shown in FIG. 2 is more advantageous when it comes to aging characteristics of several PPM level. If the thermal expansion of the insulating substrate 2 is made similar to that of the piezoelectric oscillation piece 5 by using a crystal plate, glass or the like, the characteristics will be further improved, and the temperature characteristics and the aging characteristics will be significantly improved even in the case of supporting both ends. If aging is required, cantilever support can be used to improve the characteristics. If the thickness of the insulating substrate 2 is too thick, the impact resistance is lost. In order to receive and disperse the shock received by the base 1 at the central portion of the insulating substrate 2, some elasticity is required. However, if the thickness is too thin, the insulating substrate 2 itself will be destroyed, so the thickness is from 0.05 mm to 0. It is desirable to select between 18 mm.
【００１４】 絶縁基板２の長手方向の長さを長くすれば耐衝撃性に対する効果は出るが圧電 振動子１０の全体の長さも長くなっていまうため、圧電発振片５の長さに合わせ た選択が必要となる。ベース１と絶縁基板２とは導電接着剤４で固定する際にス キマを作っておく必要がある。スキマがなければベース１に直接固定したのと同 じになる為、絶縁基板２を設ける意味がなくなる。When the length of the insulating substrate 2 in the longitudinal direction is increased, the impact resistance is improved, but the entire length of the piezoelectric vibrator 10 is also increased. Therefore, the length of the insulating substrate 2 is selected according to the length of the piezoelectric oscillation piece 5. Is required. It is necessary to make a gap when fixing the base 1 and the insulating substrate 2 with the conductive adhesive 4. If there is no clearance, it is the same as when it is fixed directly to the base 1, so there is no point in providing the insulating substrate 2.
【００１５】 図４は本考案の他の実施例を示す平面図である。ベース１に電極パターン１１ を形成した段差のある絶縁基板１２を導電性接着剤４等で固定する。絶縁基板１ ２の底に長手方向の１／３以内の長さの段差部を設けてある為、導電性接着剤４ 等で固定する際にスキマを作る必要がなく、簡単に処理できる。電極パターン６ を形成した圧電発振片５は片持支持で絶縁基板１２に導電性接着剤７等で固定す る。絶縁基板１２には圧電発振片５の振動する主電極部（中央部）に空間を持た せる為に両端部を高くして、段差を設けてある。絶縁基板１２の底面、上面に段 差を設ける事により、ベース１との固定、圧電発振片５との固定がたいへんやり やすくなり、寸法も安定するようになる。FIG. 4 is a plan view showing another embodiment of the present invention. The stepped insulating substrate 12 having the electrode pattern 11 formed on the base 1 is fixed with a conductive adhesive 4 or the like. Since the stepped portion having a length within 1/3 of the longitudinal direction is provided on the bottom of the insulating substrate 12, there is no need to make a gap when fixing with the conductive adhesive 4 or the like, and the treatment can be easily performed. The piezoelectric oscillation piece 5 on which the electrode pattern 6 is formed is cantilevered and fixed to the insulating substrate 12 with a conductive adhesive 7 or the like. The insulating substrate 12 is provided with a step by raising both ends so as to have a space in the vibrating main electrode portion (central portion) of the piezoelectric oscillating piece 5. By providing a step difference on the bottom surface and the top surface of the insulating substrate 12, the fixing to the base 1 and the piezoelectric oscillating piece 5 become very easy, and the dimension becomes stable.
【００１６】[0016]
本考案はベースに圧電発振片を固定する際に間に絶縁基板をはさみ、かつ、絶 縁基板の熱膨張係数を圧電発振片に近似させたり、段差を設けたり、圧電発振片 を片持固定とする。これにより圧電振動子に衝撃が加わった時に絶縁基板でまず 衝撃力を緩和し圧電発振片に伝わるようにしたため、圧電発振片の折れやカケを 防ぐ事ができ、周波数の停止や周波数シフトを抑える効果を有する。 The present invention sandwiches an insulating substrate between when fixing a piezoelectric oscillator to the base, and approximates the coefficient of thermal expansion of the insulating substrate to that of the piezoelectric oscillator, provides a step, and fixes the piezoelectric oscillator on a cantilever. And As a result, when a shock is applied to the piezoelectric vibrator, the insulating substrate first absorbs the shock force so that it is transmitted to the piezoelectric oscillator, so it is possible to prevent the piezoelectric oscillator from breaking or chipping, and suppressing frequency stoppage and frequency shift. Have an effect.
【００１７】 更に、絶縁基板と圧電発振片の熱膨張係数を近似させる事により、圧電発振片 の固定時の歪を減少させる事ができ、衝撃による影響が軽減し、かつ、長期にわ たる周波数シフトのエージングに対し、効果を有する。Further, by approximating the thermal expansion coefficients of the insulating substrate and the piezoelectric oscillation piece, the strain at the time of fixing the piezoelectric oscillation piece can be reduced, the influence of shock is reduced, and the frequency over a long period of time is reduced. It has an effect on shift aging.
【図１】本考案の実施例の平面図。FIG. 1 is a plan view of an embodiment of the present invention.
【図２】本考案の他の実施例の平面図。FIG. 2 is a plan view of another embodiment of the present invention.
【図３】本考案の他の実施例の上面図。FIG. 3 is a top view of another embodiment of the present invention.
【図４】本考案の他の実施例の平面図。FIG. 4 is a plan view of another embodiment of the present invention.
【図５】従来の圧電振動子の平面図。FIG. 5 is a plan view of a conventional piezoelectric vibrator.
【図６】従来の圧電振動子の上面図。FIG. 6 is a top view of a conventional piezoelectric vibrator.
１・・ベース ２・・絶縁基板 ３・・電極パターン ４・・導電性接着剤 ５・・圧電発振片 ６・・電極パターン ７・・導電性接着剤 ８・・フタ ９・・低融点ガラス １０・圧電振動子 １１・電極パターン １２・絶縁基板 ５１・ベース ５２・マウント台 ５３・枕 ５４・圧電発振片 ５５・電極パターン ５６・導電性接着剤 ５７・フタ ５８・低融点ガラス ５９・圧電振動子 1 ... Base 2 ... Insulating substrate 3 ... Electrode pattern 4 ... Conductive adhesive 5 ... Piezoelectric oscillation piece 6 ... Electrode pattern 7 ... Conductive adhesive 8 ... Lid 9 ... Low melting point glass 10・ Piezoelectric vibrator 11 ・ Electrode pattern 12 ・ Insulating substrate 51 ・ Base 52 ・ Mount base 53 ・ Pillow 54 ・ Piezoelectric oscillation piece 55 ・ Electrode pattern 56 ・ Conductive adhesive 57 ・ Lid 58 ・ Low melting point glass 59 ・ Piezoelectric vibrator
Claims (4)
にまず、絶縁基板の中央部を固定し、その上に圧電発振
片を固定したことを特徴とする圧電振動子。1. When fixing a piezoelectric vibrator to a base, the central portion of an insulating substrate is first fixed to the base, and the piezoelectric oscillation piece is fixed on the central portion of the piezoelectric vibrator.
たことを特徴とする請求項１記載の圧電振動子。2. The piezoelectric vibrator according to claim 1, wherein the piezoelectric oscillation piece on the insulating substrate is cantilevered.
張係数に近似させたことを特徴とする請求項１記載の圧
電振動子。3. The piezoelectric vibrator according to claim 1, wherein the thermal expansion coefficient of the insulating substrate is approximated to the thermal expansion coefficient of the piezoelectric oscillation piece.
請求項１記載の圧電振動子。4. The piezoelectric vibrator according to claim 1, wherein a step is provided on the insulating substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27093U JPH0654315U (en) | 1993-01-08 | 1993-01-08 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27093U JPH0654315U (en) | 1993-01-08 | 1993-01-08 | Piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0654315U true JPH0654315U (en) | 1994-07-22 |
Family
ID=11469222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27093U Pending JPH0654315U (en) | 1993-01-08 | 1993-01-08 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0654315U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002246869A (en) * | 2000-12-12 | 2002-08-30 | Toyo Commun Equip Co Ltd | Surface mounted piezoelectric device |
| JP2006262100A (en) * | 2005-03-17 | 2006-09-28 | Daishinku Corp | Piezoelectric vibrator |
| JP2009253883A (en) * | 2008-04-10 | 2009-10-29 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrating device |
| JP2015039162A (en) * | 2013-07-19 | 2015-02-26 | 日本電波工業株式会社 | Surface-mounted crystal device |
-
1993
- 1993-01-08 JP JP27093U patent/JPH0654315U/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002246869A (en) * | 2000-12-12 | 2002-08-30 | Toyo Commun Equip Co Ltd | Surface mounted piezoelectric device |
| JP4701536B2 (en) * | 2000-12-12 | 2011-06-15 | エプソントヨコム株式会社 | Surface mount type piezoelectric device |
| JP2006262100A (en) * | 2005-03-17 | 2006-09-28 | Daishinku Corp | Piezoelectric vibrator |
| JP4715252B2 (en) * | 2005-03-17 | 2011-07-06 | 株式会社大真空 | Piezoelectric vibrator |
| JP2009253883A (en) * | 2008-04-10 | 2009-10-29 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrating device |
| EP2109219A3 (en) * | 2008-04-10 | 2011-03-09 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating devices and methods for manufacturing same |
| JP2015039162A (en) * | 2013-07-19 | 2015-02-26 | 日本電波工業株式会社 | Surface-mounted crystal device |
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