JPH0651848U - Air bleeding structure for differential pressure sensor - Google Patents
Air bleeding structure for differential pressure sensorInfo
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- JPH0651848U JPH0651848U JP9187292U JP9187292U JPH0651848U JP H0651848 U JPH0651848 U JP H0651848U JP 9187292 U JP9187292 U JP 9187292U JP 9187292 U JP9187292 U JP 9187292U JP H0651848 U JPH0651848 U JP H0651848U
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- pressure
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- differential pressure
- strain
- pressure sensor
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Abstract
(57)【要約】
【目的】 差圧センサにおいて、圧力検出部材の圧力導
入部から容易にエアーを抜き、センサ能力を高く保持す
る。
【構成】 差圧センサのエアー抜き構造は、少なくとも
２つの起歪部2,3 を有し、各起歪部の一方の面の側に圧
力導入部4,5 を有しかつ他方の面の上に感圧部6,7 を形
成した圧力検出部材１と、２つの圧力導入部のそれぞれ
に通じる２つの圧力導入孔11,12 が形成された本体10と
を当接させ、両者を組み合わせることにより構成された
差圧センサに適用され、前述の本体に、圧力検出部材と
の当接面10a の入り口13a,14a を設けたエアー抜き孔1
3,14 を形成すると共に、この入り口13a,14a と圧力導
入孔11,12 の口部11a,12a との間を接続するエアー抜き
溝15,16 を前記当接面に形成し、圧力検出部材と本体の
間に薄膜状のシール部材19を配置して両者を当接させ固
定するように構成される。エアー抜き孔13,14 の出口に
プラグ17,18 を取り付けることができる。
(57) [Summary] [Purpose] In a differential pressure sensor, air is easily evacuated from the pressure introducing portion of the pressure detecting member to maintain high sensor performance. [Structure] The air bleeding structure of the differential pressure sensor has at least two strain-flexing portions 2 and 3, and has pressure introducing portions 4,5 on one side of each strain-generating portion and on the other side. A pressure detecting member 1 having pressure sensitive portions 6 and 7 formed thereon and a main body 10 having two pressure introducing holes 11 and 12 communicating with the two pressure introducing portions are brought into contact with each other to combine them. It is applied to the differential pressure sensor constituted by the above, and the air vent hole 1 in which the inlets 13a and 14a of the contact surface 10a with the pressure detecting member are provided in the main body described above.
3 and 14 are formed, and air vent grooves 15 and 16 for connecting between the inlets 13a and 14a and the openings 11a and 12a of the pressure introducing holes 11 and 12 are formed on the abutting surface to form a pressure detecting member. A thin film-like sealing member 19 is arranged between the main body and the main body, and both are brought into contact with each other and fixed. Plugs 17 and 18 can be attached to the outlets of the air vent holes 13 and 14, respectively.
Description
【０００１】[0001]
本考案は差圧センサのエアー抜き構造に関し、特に、土木・建設機械等に設け られた油圧駆動系各部に組込まれる差圧センサに適したエアー抜き構造に関する ものである。 The present invention relates to an air bleeding structure for a differential pressure sensor, and more particularly to an air bleeding structure suitable for a differential pressure sensor incorporated in various parts of a hydraulic drive system provided in civil engineering and construction machinery.
【０００２】[0002]
従来の差圧センサの機械的な構造として代表的に２つのタイプが存在する。 第１のタイプは、それぞれ１つの圧力を検出するように構成された圧力センサ を２つ用意し、それらの出力の差を演算するように構成される。このタイプの差 圧センサは、各圧力センサで検出特性が異なるので、差圧の検出精度が低くなり 、信号処理に調整を要するという不具合を有する。 第２のタイプは、ダイヤフラムの表裏の両面に２つの圧力を印加させる構造と し、一方の面に形成した差圧検出用成膜部の中にホイートストンブリッジ回路を 設け、このブリッジ回路を利用して差圧を直接に検出する。このタイプの差圧セ ンサでは、差圧に感応しこれを検出する成膜部が一方の圧力媒体に直接に接液す ることになり、当該成膜部の破損を保護する手段を講じる必要があるという不具 合を有する。実際上、差圧検出用成膜部を完全に保護することは困難である。 There are typically two types of mechanical structures of conventional differential pressure sensors. The first type is configured to provide two pressure sensors each configured to detect one pressure and to compute the difference between their outputs. Since this type of differential pressure sensor has different detection characteristics for each pressure sensor, the differential pressure detection accuracy is low, and there is a problem that adjustment is required for signal processing. The second type has a structure in which two pressures are applied to both the front and back sides of the diaphragm. A Wheatstone bridge circuit is provided in the film forming unit for differential pressure detection formed on one surface, and this bridge circuit is used. To directly detect the differential pressure. In this type of differential pressure sensor, the film forming section that is sensitive to and detects the differential pressure comes into direct contact with one pressure medium, and it is necessary to take measures to protect the film forming section from damage. There is a defect that there is. In practice, it is difficult to completely protect the film forming unit for detecting the differential pressure.
【０００３】[0003]
上記の従来の差圧センサに対して、本考案者らは、特願平３−３０６３８９号 で新規で且つ実用性の高い構造を有する差圧センサを提案した。この差圧センサ では、圧力を検出するための金属製圧力検出部材に、それぞれ異なる圧力を受け る受圧面を有した起歪部を少なくとも２か所形成し、各起歪部の他の面にそれぞ れの圧力に感応しこれを検出するための成膜部を同時に形成するように構成した ものである。圧力を検出するための成膜部は、半導体成膜技術を利用して歪みゲ ージを所定の配置パターンで作り、且つこれらの歪みゲージを所定の接続関係に 基づき接続することにより形成される。この圧力検出部材を利用すれば、検出特 性の線形性および検出精度を高めかつ動作信頼性を向上できる。 In contrast to the above-mentioned conventional differential pressure sensor, the present inventors have proposed a differential pressure sensor having a new and highly practical structure in Japanese Patent Application No. 3-306389. In this differential pressure sensor, at least two strain-generating parts having pressure-receiving surfaces that receive different pressures are formed on the metal pressure detecting member for detecting the pressure, and the other surface of each strain-generating part is formed. It is configured to simultaneously form film forming portions that are sensitive to and detect the respective pressures. The film formation unit for detecting the pressure is formed by using a semiconductor film formation technique to form strain gauges in a predetermined arrangement pattern and connecting these strain gauges based on a predetermined connection relationship. . By using this pressure detecting member, the linearity of the detection characteristic and the detection accuracy can be improved, and the operation reliability can be improved.
【０００４】 ところで上記の差圧センサについては、一般的な問題として、エアー抜きの構 造を配慮する必要がある。当該差圧センサを油圧駆動系の所定の箇所に組付け、 その２つの起歪部の近傍に形成された圧力導入部に作動油を導入するとき、圧力 導入部の奥は起歪部の受圧面となって閉じているので、通常の状態では、構造的 に、内部のエアーが自然に抜けることはない。圧力導入部の内部にエアーが存在 すると、キャビテーション等の不具合が起き、差圧センサの検出能力を低減させ る。そこで、エアー抜きの構造が必要となる。By the way, regarding the above-mentioned differential pressure sensor, as a general problem, it is necessary to consider the structure for removing air. When the differential pressure sensor is installed at a predetermined position of the hydraulic drive system and hydraulic oil is introduced into the pressure introducing section formed near the two strain-flexing sections, the pressure-introducing section is deep inside the pressure-receiving section. Since it is closed as a surface, the air inside does not naturally escape in a normal state. If air is present inside the pressure introducing part, problems such as cavitation will occur, reducing the detection capability of the differential pressure sensor. Therefore, a structure for removing air is required.
【０００５】 本考案の目的は、圧力検出部材の閉じた圧力導入部から容易にエアーを抜くこ とのできる差圧センサのエアー抜き構造を提供することにある。An object of the present invention is to provide an air bleeding structure for a differential pressure sensor, which can easily bleed air from a closed pressure introducing portion of a pressure detecting member.
【０００６】[0006]
本考案に係る差圧センサのエアー抜き構造は、少なくとも２つの起歪部を有し 、各起歪部の一方の面の側に圧力導入部を有しかつ他方の面の上に感圧部を形成 した圧力検出部材と、２つの圧力導入部のそれぞれに通じる２つの圧力導入孔が 形成された本体とを当接させ、両者を組み合わせることにより構成された差圧セ ンサに適用されるものであり、前述の本体に、圧力検出部材との当接面に入り口 を設けたエアー抜き孔を形成すると共に、この入り口と圧力導入孔の口部との間 を接続するエアー抜き溝を前記当接面に形成し、圧力検出部材と本体の間に薄膜 状のシール部材を配置して両者を当接させ固定するように構成される。 また好ましくは、エアー抜き孔の出口にプラグを取り付けることができる。 An air bleeding structure of a differential pressure sensor according to the present invention has at least two strain-generating portions, a pressure introducing portion on one surface side of each strain-generating portion, and a pressure-sensitive portion on the other surface. Applied to a differential pressure sensor formed by abutting a pressure detecting member having a pressure-sensitive member and a body having two pressure-introducing holes communicating with each of the two pressure-introducing portions, and combining the two. In addition, an air vent hole with an inlet is formed in the contact surface with the pressure detection member, and an air vent groove connecting the inlet and the inlet of the pressure introduction hole is provided in the main body. It is formed on the contact surface, and a thin film sealing member is arranged between the pressure detecting member and the main body so that they are brought into contact with each other and fixed. Further, preferably, a plug can be attached to the outlet of the air vent hole.
【０００７】[0007]
本考案による差圧センサでは、本体に形成されるエアー抜き孔の入り口を、圧 力検出部材に最も近い位置にある本体上面すなわち圧力検出部材との当接面に形 成し、さらに当該本体上面に形成した溝を介して圧力導入孔に接続するようにし 、可能な限り圧力検出部材の圧力導入部に近い箇所からその内部のエアーを抜く ように構成している。これにより、閉じた空間である圧力導入部内に溜まってい るエアーを完全に抜くことが可能となる。また圧力検出部材と本体の間にシール 部材を設け、作動油が外部に漏れないようにしている。 In the differential pressure sensor according to the present invention, the inlet of the air vent hole formed in the main body is formed on the upper surface of the main body at the position closest to the pressure detecting member, that is, the contact surface with the pressure detecting member. It is configured to be connected to the pressure introducing hole through the groove formed in the above, and the air inside the pressure detecting member is evacuated from the portion as close as possible to the pressure introducing portion. This makes it possible to completely remove the air accumulated in the pressure introducing portion, which is a closed space. In addition, a seal member is provided between the pressure detection member and the main body to prevent hydraulic oil from leaking to the outside.
【０００８】[0008]
以下に、本考案の実施例を添付図面に基づいて説明する。 図１において１は圧力検出部材であり、圧力を受けることで変形し内部に歪み を生じる少なくとも２つの起歪部２，３を有する。圧力検出部材１は、平面形状 が円形であり、全体として偏平な形態を有する。起歪部２，３は、圧力検出部材 １の図中下部に穴形態の圧力導入部４，５を形成することにより薄肉状に形成さ れている。圧力導入部４，５は、起歪部の受圧面を底として閉じている。圧力検 出部材１は、金属材を用いて単一体として形成される。また圧力検出部材１の各 起歪部２，３の上面には、例えば４つの歪みゲージが所定の配置関係で形成され 、これらの歪みゲージとこれらの間を接続する配線とにより感圧部６，７が形成 される。４つの歪みゲージはホイートストンブリッジ回路を構成し、このブリッ ジ回路において、各歪みゲージは抵抗要素として作用する。すなわち起歪部に圧 力が加わって歪みが発生すると、各歪みゲージの抵抗値が変化する。歪みゲージ と配線は、例えば半導体成膜技術を利用して形成される。こうして各起歪部２， ３に圧力が印加され起歪部２，３に歪みが発生すると、歪みゲージの作用に基づ き感圧部６，７によって印加圧力が検出される。 Embodiments of the present invention will be described below with reference to the accompanying drawings. In FIG. 1, reference numeral 1 denotes a pressure detecting member, which has at least two strain-generating portions 2 and 3 which are deformed by receiving pressure and generate strain inside. The pressure detecting member 1 has a circular planar shape, and has a flat shape as a whole. The strain-flexing portions 2 and 3 are formed thin by forming hole-shaped pressure introducing portions 4 and 5 in the lower portion of the pressure detecting member 1 in the figure. The pressure introducing portions 4 and 5 are closed with the pressure receiving surface of the strain generating portion as the bottom. The pressure detection member 1 is formed as a single body using a metal material. Further, for example, four strain gauges are formed in a predetermined arrangement relationship on the upper surfaces of the respective strain generating portions 2 and 3 of the pressure detecting member 1, and the pressure sensitive portion 6 is formed by these strain gauges and the wiring connecting them. , 7 are formed. The four strain gauges form a Wheatstone bridge circuit, in which each strain gauge acts as a resistance element. That is, when pressure is applied to the strain-flexing portion to generate strain, the resistance value of each strain gauge changes. The strain gauge and the wiring are formed by using, for example, a semiconductor film forming technique. When pressure is applied to the strain-flexing portions 2 and 3 in this way and strain is generated in the strain-generating portions 2 and 3, the pressure-sensing portions 6 and 7 detect the applied pressure based on the action of the strain gauge.
【０００９】 １０は本体であり、その上に前述の圧力検出部材１が配置される。本体１０も 例えば金属材で形成される。本体１０には、少なくとも２つの圧力導入孔１１， １２が形成される。圧力導入孔１１，１２は、平行に形成され、それぞれ圧力検 出部材１の圧力導入部４，５に対応している。圧力導入孔１１，１２に入ってき た作動油は、それぞれ圧力導入部４，５に導かれる。本体１０には、さらにエア ー抜き孔１３，１４が形成される。エアー抜き孔１３，１４の入り口は、本体１ ０の上面１０ａすなわち圧力検出部材１との当接面に形成され、その出口は例え ば周面１０ｂに形成される。エアー抜き孔１３，１４の出口には、それぞれ、ネ ジ結合にてプラグ１７，１８が着脱自在に取付けられる。また、本体１０の上面 １０ａに溝１５，１６が形成される。溝１５の一端は圧力導入孔１１の一方の口 部に通じており、他端はエアー抜き孔１３の入り口に通じている。また溝１６の 一端は圧力導入孔１２の一方の口部に通じており、他端はエアー抜き孔１４の入 り口に通じている。Reference numeral 10 denotes a main body, on which the above-mentioned pressure detection member 1 is arranged. The main body 10 is also formed of, for example, a metal material. At least two pressure introducing holes 11 and 12 are formed in the body 10. The pressure introducing holes 11 and 12 are formed in parallel and correspond to the pressure introducing portions 4 and 5 of the pressure detecting member 1, respectively. The hydraulic oil that has entered the pressure introducing holes 11 and 12 is guided to the pressure introducing portions 4 and 5, respectively. The body 10 is further formed with air vent holes 13 and 14. The inlets of the air vent holes 13 and 14 are formed on the upper surface 10a of the main body 10, that is, the contact surface with the pressure detecting member 1, and the outlets are formed on the peripheral surface 10b, for example. Plugs 17 and 18 are removably attached to the outlets of the air vent holes 13 and 14, respectively, by a screw connection. Further, grooves 15 and 16 are formed on the upper surface 10a of the main body 10. One end of the groove 15 communicates with one opening of the pressure introduction hole 11, and the other end communicates with the entrance of the air vent hole 13. Further, one end of the groove 16 communicates with one opening of the pressure introduction hole 12, and the other end communicates with an entrance of the air vent hole 14.
【００１０】 本体１０の外観斜視図を図２に示し、図２では、本体１０の上面１０ａおよび 周囲面１０ｂが明示される。本体１０はほぼ円柱状の形態を有する。１１ａは圧 力導入孔１１の上側の口部、１２ａは圧力導入孔１２の上側の口部、１３ａはエ アー抜き孔１３の入り口、１４ａはエアー抜き孔１４の入り口、１５，１６は溝 である。１７は、圧力導入孔１３の出口に取付けられたプラグである。An external perspective view of the main body 10 is shown in FIG. 2, in which the upper surface 10 a and the peripheral surface 10 b of the main body 10 are clearly shown. The main body 10 has a substantially cylindrical shape. 11a is an upper opening of the pressure introducing hole 11, 12a is an upper opening of the pressure introducing hole 12, 13a is an inlet of the air vent hole 13, 14a is an inlet of the air vent hole 14, and 15 and 16 are grooves. is there. Reference numeral 17 is a plug attached to the outlet of the pressure introducing hole 13.
【００１１】 図１において、本体１０の上面にはシール部材１９を配置し、このシール部材 １９を介設して本体１０の上に圧力検出部材１を配置する。シール部材１９は、 図３に示すごとく薄膜状であり、円形をしている。シール部材１９は、本体１０ の上面全体を覆うように配置される。シール部材１９には、圧力導入孔１１，１ ２の位置に対応して孔２０，２１が形成される。シール部材１９は、例えばニト リルゴムのようなゴム材で形成される。また金属製薄板の両面にゴムシートを張 り付けてシール部材を形成することもできる。２２は押え部材であり、この押え 部材２２は、複数のボルト２３で本体１０の上に固定される。押え部材２２と本 体１０との間に前述のシール部材１９が位置する。図２において２４はボルト２ ３が結合されるネジ孔である。また図３において、２５はボルト２２を挿通させ る孔である。押え部材２２を本体１０の上に取付けることにより、圧力検出部材 １を押え付け、圧力検出部材１を本体１０に当接させながら固定する。このとき シール部材１９は、作動油が外部に漏れないように保護している。また２つの作 動油が相互に混り合うのを防止する。In FIG. 1, a seal member 19 is arranged on the upper surface of the main body 10, and the pressure detection member 1 is arranged on the main body 10 via the seal member 19. As shown in FIG. 3, the seal member 19 is in the shape of a thin film and has a circular shape. The seal member 19 is arranged so as to cover the entire upper surface of the main body 10. Holes 20 and 21 are formed in the seal member 19 so as to correspond to the positions of the pressure introducing holes 11 and 12. The seal member 19 is formed of a rubber material such as nitrile rubber. Alternatively, a rubber sheet may be attached to both sides of a thin metal plate to form a seal member. A pressing member 22 is fixed to the main body 10 with a plurality of bolts 23. The above-mentioned seal member 19 is located between the pressing member 22 and the main body 10. In FIG. 2, reference numeral 24 is a screw hole into which the bolt 23 is coupled. Further, in FIG. 3, reference numeral 25 is a hole through which the bolt 22 is inserted. By mounting the pressing member 22 on the main body 10, the pressure detecting member 1 is pressed and fixed while abutting the pressure detecting member 1 on the main body 10. At this time, the seal member 19 protects the hydraulic oil from leaking to the outside. It also prevents the two hydraulic oils from mixing with each other.
【００１２】 次に上記の構造に基づくエアー抜き作用について説明する。圧力検出部材１、 本体１０、押え部材２２を図１に示すごとく組み付けた状態において、圧力導入 孔１１，１２のそれぞれに作動油を入れ、圧力導入孔１１，１２のそれぞれを通 して圧力Ａ，Ｂを導入する。作動油を入れるとき、エアー抜き孔１３，１４の出 口に取付けられたプラグ１７，１８の結合状態を緩めておく。このため、圧力導 入孔１１，１２および圧力導入部４，５に溜まっているエアーは、溝１５，１６ およびエアー抜き孔１３，１４を通り、その出口から外部へ出ていく。エアーが 完全に抜けたときに、プラグ１７，１８を締める。このようにエアー抜き孔１３ ，１４の入り口１３ａ，１４ａおよびその近傍に位置する溝１５，１６を本体１ ０の上面に形成し、可能限り圧力導入部４，５に近い箇所からエアーを抜くよう に構成したため、圧力導入孔１１，１２および圧力導入部４，５に溜まっている エアーを完全に排出することができる。Next, the air bleeding action based on the above structure will be described. With the pressure detecting member 1, the main body 10 and the pressing member 22 assembled as shown in FIG. 1, hydraulic oil is put into each of the pressure introducing holes 11 and 12, and the pressure A is passed through each of the pressure introducing holes 11 and 12. , B are introduced. When the hydraulic oil is added, the connection state of the plugs 17 and 18 attached to the outlets of the air vent holes 13 and 14 is loosened. Therefore, the air accumulated in the pressure introducing holes 11 and 12 and the pressure introducing portions 4 and 5 passes through the grooves 15 and 16 and the air vent holes 13 and 14, and exits from the outlet thereof. Tighten plugs 17 and 18 when the air is completely exhausted. In this way, the inlets 13a and 14a of the air vent holes 13 and 14 and the grooves 15 and 16 located in the vicinity thereof are formed on the upper surface of the main body 10 so that air is vented from the locations as close as possible to the pressure introducing portions 4 and 5. With this configuration, the air accumulated in the pressure introducing holes 11 and 12 and the pressure introducing portions 4 and 5 can be completely discharged.
【００１３】 上記実施例では、２つの起歪部を有する圧力検出部材と本体とからなる差圧セ ンサについて説明したが、類似した構造を有する各種の圧力センサに本考案の構 造を適用できるのは勿論である。Although the differential pressure sensor including the pressure detecting member having the two strain generating portions and the main body has been described in the above embodiment, the structure of the present invention can be applied to various pressure sensors having a similar structure. Of course.
【００１４】[0014]
以上の説明で明らかなように本考案によれば、圧力導入部を有する圧力検出部 材と圧力導入孔を有する本体とを組み合わせてなる差圧センサにおいて、本体に おける圧力検出部材との当接面を利用して前記圧力導入部に対し可能な限り近い 箇所からエアー抜きを行えるエアー抜き孔を本体に形成したため、閉じた空間で ある圧力導入部内のエアーを完全に抜くことができる。このため、センサの検出 能力を安定して高い状態に保持することができ、高い測定信頼性を有する。また 圧力検出部材と本体との間にシール部材を設けたため、作動油が外部に漏れるの を防止でき、加えて各部品が損傷を受けるのを防止できる。 As is apparent from the above description, according to the present invention, in the differential pressure sensor including the pressure detecting member having the pressure introducing portion and the main body having the pressure introducing hole, the contact with the pressure detecting member in the main body is made. Since the air vent hole is formed in the main body so that the air can be vented from a position as close as possible to the pressure inlet using the surface, the air in the pressure inlet, which is a closed space, can be completely vented. Therefore, the detection capability of the sensor can be stably maintained in a high state, and the measurement reliability is high. Further, since the seal member is provided between the pressure detecting member and the main body, it is possible to prevent the hydraulic oil from leaking to the outside, and also to prevent each component from being damaged.
【図１】本考案に係る差圧センサのエアー抜き構造の一
例を示す縦断面図である。FIG. 1 is a vertical sectional view showing an example of an air bleeding structure of a differential pressure sensor according to the present invention.
【図２】本体の上面形態を示すための本体の斜視図であ
る。FIG. 2 is a perspective view of the main body for showing a top surface form of the main body.
【図３】シール部材の斜視図である。FIG. 3 is a perspective view of a seal member.
１ …圧力検出部材 ２，３ …起歪部 ４，５ …圧力導入部 ６，７ …感圧部 １０ …本体 １１，１２ …圧力導入孔 １３，１４ …エアー抜き孔 １５，１６ …溝 １７，１８ …プラグ １９ …シール部材 ２０，２１ …孔 ２２ …押え部 DESCRIPTION OF SYMBOLS 1 ... Pressure detection member 2, 3 ... Straining part 4, 5 ... Pressure introduction part 6, 7 ... Pressure sensing part 10 ... Main body 11, 12 ... Pressure introduction hole 13, 14 ... Air vent hole 15, 16 ... Groove 17, 18 ... Plug 19 ... Sealing member 20, 21 ... Hole 22 ... Holding part
Claims (2)
部の一方の面の側に圧力導入部を備えかつ他方の面の上
に感圧部を設けた圧力検出部材と、前記圧力導入部のそ
れぞれに通じる少なくとも２つの圧力導入孔が形成され
た本体とを組み合わせてなる差圧センサにおいて、 前記本体は、前記圧力検出部材との当接面に入り口が形
成されたエアー抜き孔を有し、前記当接面に前記入り口
と前記圧力導入孔の口部とを接続する溝を形成し、前記
圧力検出部材と前記本体の間にシール部材を介設して両
者を当接させ固定したことを特徴とする差圧センサのエ
アー抜き構造。1. A pressure detection member having at least two strain-generating parts, comprising a pressure introducing part on one surface side of each strain-generating part and a pressure-sensitive part on the other surface, In a differential pressure sensor formed by combining a main body having at least two pressure introducing holes communicating with each of the pressure introducing portions, the main body is an air vent hole having an inlet formed on a contact surface with the pressure detecting member. A groove that connects the inlet and the mouth of the pressure introducing hole is formed on the contact surface, and a seal member is provided between the pressure detection member and the main body to bring them into contact with each other. Air bleed structure for differential pressure sensor characterized by being fixed.
構造において、前記エアー抜き孔の出口にプラグを取り
付けたことを特徴とする差圧センサのエアー抜き構造。2. The air bleeding structure for the differential pressure sensor according to claim 1, wherein a plug is attached to the outlet of the air bleeding hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9187292U JPH0651848U (en) | 1992-12-18 | 1992-12-18 | Air bleeding structure for differential pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9187292U JPH0651848U (en) | 1992-12-18 | 1992-12-18 | Air bleeding structure for differential pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0651848U true JPH0651848U (en) | 1994-07-15 |
Family
ID=14038656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9187292U Pending JPH0651848U (en) | 1992-12-18 | 1992-12-18 | Air bleeding structure for differential pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0651848U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005091166A (en) * | 2003-09-17 | 2005-04-07 | Matsushita Electric Works Ltd | Semiconductor pressure sensor |
| KR20140126602A (en) * | 2013-04-23 | 2014-10-31 | 한국단자공업 주식회사 | Pressure sensor |
-
1992
- 1992-12-18 JP JP9187292U patent/JPH0651848U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005091166A (en) * | 2003-09-17 | 2005-04-07 | Matsushita Electric Works Ltd | Semiconductor pressure sensor |
| KR20140126602A (en) * | 2013-04-23 | 2014-10-31 | 한국단자공업 주식회사 | Pressure sensor |
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