JPH0651236A - Uniforming optical device - Google Patents
Uniforming optical deviceInfo
- Publication number
- JPH0651236A JPH0651236A JP4200799A JP20079992A JPH0651236A JP H0651236 A JPH0651236 A JP H0651236A JP 4200799 A JP4200799 A JP 4200799A JP 20079992 A JP20079992 A JP 20079992A JP H0651236 A JPH0651236 A JP H0651236A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- quartz tube
- intensity distribution
- uniform
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laser Beam Processing (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】近年、レーザビームを利用した加
工方法として、集光性を追求した微細な穴あけ・切断加
工方法以外に、大面積を一度に均一に加工する方法が要
求され、均一な強度分布のレーザビームを作成する光学
系が必要となってきている。[Industrial application] In recent years, as a processing method using a laser beam, a method for uniformly processing a large area at one time has been required in addition to a method for finely punching and cutting in pursuit of light converging property. There is a need for an optical system that creates a laser beam having an intensity distribution.
【0002】本発明は、レーザビームの強度分布を均一
にする均一化光学装置に関するものである。The present invention relates to a homogenizing optical device for uniformizing the intensity distribution of a laser beam.
【0003】[0003]
【従来の技術】以下に、従来のレーザビームの強度分布
を均一にする方法のうち、凸レンズと透明管を用いる方
法について説明する。2. Description of the Related Art Among conventional methods for making the intensity distribution of a laser beam uniform, a method using a convex lens and a transparent tube will be described below.
【0004】図4は従来の凸レンズと透明管を用いて、
レーザビームの強度分布を均一にする方法を示すもので
ある。図4において、1は四角柱の石英管でレーザ入出
力の端面は反射防止幕を付け側面は光学研磨を施したも
ので、2,3は両面反射防止膜付きの球面凸レンズであ
る。平行光で中央部の強度の大きいガウス分布の入射レ
ーザビーム4は、凸レンズ2により石英管1に入射直後
で集光されレーザビーム5となる。レーザビーム5の石
英管1の側面に対する入射角度が全反射角より大きい場
合、レーザビーム5はすべて石英管1の内部で多重反射
され強度分布が均一になり、出射端よりレーザビーム6
となって出力される。レーザビーム6は石英管1の出射
端より広がって出てくるため、凸レンズ3により平行に
して均一な強度分布の平行なレーザビーム7となり加工
に利用される。FIG. 4 shows a conventional convex lens and a transparent tube.
It shows a method of making the intensity distribution of the laser beam uniform. In FIG. 4, reference numeral 1 denotes a quadrangular prism quartz tube, an end face for laser input / output is provided with an antireflection screen, and side faces are optically polished, and 2 and 3 are spherical convex lenses with a double-sided antireflection film. An incident laser beam 4 having a Gaussian distribution with parallel light and a large intensity at the central portion is condensed by a convex lens 2 immediately after entering the quartz tube 1 and becomes a laser beam 5. When the incident angle of the laser beam 5 with respect to the side surface of the quartz tube 1 is larger than the total reflection angle, all the laser beams 5 are multiply reflected inside the quartz tube 1 and the intensity distribution becomes uniform, and the laser beam 6 is emitted from the emitting end.
Will be output. Since the laser beam 6 spreads out from the emission end of the quartz tube 1, it is made parallel by the convex lens 3 and becomes a parallel laser beam 7 having a uniform intensity distribution, which is used for processing.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、従来の
ような構成の均一化光学装置では、石英管と凸レンズ2
枚の光学部品が3点で、反射防止膜が6面であり部品点
数が多く高価であった。さらに、光軸調整が3部品であ
り調整点数が多く、装置が大きくなるという問題があっ
た。However, in the homogenizing optical device having the conventional structure, the quartz tube and the convex lens 2 are used.
The number of the optical components was 3 and the anti-reflection film was 6; therefore, the number of components was large and it was expensive. Further, there is a problem in that the optical axis adjustment is made up of three parts, the number of adjustment points is large, and the device becomes large.
【0006】本発明は上記問題に臨み、透明管の両端を
円筒面もしくは球面状にした透明管を用いて、さらには
前記透明管の一部を両端部より細くした光学系を用いる
ことにより、光学部品を1点と少なく、かつ、反射防止
膜も2面と少なくし、さらには調整点数も少なくし、均
一なレーザ強度分布を得ることのできる均一化光学装置
を提供することを目的とする。The present invention addresses the above-mentioned problems by using a transparent tube in which both ends of the transparent tube have a cylindrical surface or a spherical shape, and further, by using an optical system in which a part of the transparent tube is made thinner than both ends. It is an object of the present invention to provide a homogenizing optical device capable of obtaining a uniform laser intensity distribution by reducing the number of optical components to one, reducing the number of antireflection films to two, and reducing the number of adjustment points. .
【0007】[0007]
【課題を解決するための手段】上記目的を達成するため
本発明の均一化光学装置は、透明管の両端を円筒面もし
くは球面状にした透明管を用いて、さらには前記透明管
の一部を両端部より細くした光学系を用いて、その片方
の端面にレーザ光を入射することにより、均一なレーザ
強度分布を作成することを特徴とする。In order to achieve the above object, the homogenizing optical device of the present invention uses a transparent tube in which both ends of the transparent tube are cylindrical or spherical, and further, a part of the transparent tube. It is characterized in that a uniform laser intensity distribution is created by using an optical system in which both ends are made thinner and making a laser beam incident on one end face thereof.
【0008】[0008]
【作用】本発明は上記のように構成した装置によって、
単一の光学部品によりガウス強度分布のレーザビーム
を、安価で簡単な調整により均一なレーザ強度分布を作
成することができる。According to the present invention, the device configured as described above provides
It is possible to create a laser beam having a Gaussian intensity distribution by a single optical component, and to make a uniform laser intensity distribution by inexpensive and simple adjustment.
【0009】[0009]
(実施例1)以下、本発明の一実施例における、単一の
光学部品による均一なレーザ強度分布を作成する装置に
ついて、図面を参照しながら説明する。(Embodiment 1) An apparatus for producing a uniform laser intensity distribution by a single optical component in one embodiment of the present invention will be described below with reference to the drawings.
【0010】図1は、透明管として両端が球面である四
角柱の石英管を用いて、レーザビームの強度分布を均一
にする場合の装置の構成を示したものである。図1にお
いて、1は両端が球面である四角柱の石英管で、両球面
の端面は反射防止膜を付け側面は光学研磨を施したもの
であり、4,5,7はレーザビームである。平行光で中
央部の強度の大きいガウス分布の入射レーザビーム4
は、石英管の球面端面2に入射され石英管1内で集光さ
れレーザビーム5となる。レーザビーム5の石英管1の
側面に対する入射角度が全反射角より大きい場合、レー
ザビーム5はすべて石英管1の内部で多重反射され強度
分布が均一になり、石英管1の出射端により均一な強度
分布でかつ平行なレーザビーム7となって出力され加工
に利用される。FIG. 1 shows the construction of an apparatus in which a quartz tube having a quadrangular prism whose both ends are spherical is used as the transparent tube to make the intensity distribution of the laser beam uniform. In FIG. 1, reference numeral 1 is a quadrangular prismatic quartz tube whose both ends are spherical surfaces, end surfaces of both spherical surfaces are provided with an antireflection film and side surfaces are optically polished, and 4, 5 and 7 are laser beams. Incident laser beam 4 with parallel light and Gaussian distribution with high intensity in the center
Is incident on the spherical end surface 2 of the quartz tube and condensed in the quartz tube 1 to become a laser beam 5. When the incident angle of the laser beam 5 with respect to the side surface of the quartz tube 1 is larger than the total reflection angle, all the laser beams 5 are multi-reflected inside the quartz tube 1 and the intensity distribution becomes uniform, and the laser beam 5 is more uniform at the exit end of the quartz tube 1. The parallel laser beam 7 having an intensity distribution is output and used for processing.
【0011】(実施例2)以下、本発明の第2の実施例
における、単一の光学部品による一方向だけ均一なレー
ザ強度分布を作成する装置について、図面を参照しなが
ら説明する。(Embodiment 2) An apparatus for producing a uniform laser intensity distribution in one direction by a single optical component according to a second embodiment of the present invention will be described below with reference to the drawings.
【0012】図2は、透明管として両端が円筒面である
四角柱の石英管を用いて、レーザビームの強度分布を均
一にする場合の装置の構成を示したものである。図2に
おいて、1は両端が円筒面である四角柱の石英管で、両
円筒面の端面は反射防止膜を付け側面は光学研磨を施し
たものであり、4,5,7はレーザビームである。平行
光で中央部の強度の大きいガウス分布の入射レーザビー
ム4は、石英管の球面端面に入射され石英管1内で直線
状に集光されレーザビーム5となる。レーザビーム5の
石英管1の側面に対する入射角度が全反射角より大きい
場合、レーザビーム5はすべて石英管1の内部で多重反
射され集光された方向の強度分布のみが均一になり、出
射端よりレーザビーム7となって出力される。レーザビ
ーム7は石英管1の出射端により一方向のみ均一な強度
分布でかつ平行なレーザビームであり加工に利用され
る。さらに、異なる曲率円筒面の石英管を使用して、レ
ーザビーム7の均一な強度分布にされなかった方向の強
度分布を均一化することにより、実施例1のような均一
な強度分布のレーザビームを作成することもできる。FIG. 2 shows the structure of an apparatus in which the intensity distribution of a laser beam is made uniform by using a quartz tube having a square pole shape whose both ends are cylindrical surfaces as a transparent tube. In FIG. 2, 1 is a quadrangular prismatic quartz tube whose both ends are cylindrical surfaces, the end surfaces of both cylindrical surfaces are antireflection films and the side surfaces are optically polished, and 4, 5 and 7 are laser beams. is there. An incident laser beam 4 having a Gaussian distribution, which is parallel light and has a large intensity in the central portion, is incident on the spherical end surface of the quartz tube and is linearly condensed in the quartz tube 1 to become a laser beam 5. When the incident angle of the laser beam 5 with respect to the side surface of the quartz tube 1 is larger than the total reflection angle, all the laser beams 5 are multiple-reflected inside the quartz tube 1 and only the intensity distribution in the converged direction becomes uniform, and the exit end. Then, the laser beam 7 is output. The laser beam 7 is a parallel laser beam having a uniform intensity distribution in only one direction due to the emission end of the quartz tube 1, and is used for processing. Further, by using a quartz tube having a different curvature cylindrical surface to make the intensity distribution of the laser beam 7 in a direction not uniform, a laser beam having a uniform intensity distribution as in Example 1 is obtained. Can also be created.
【0013】(実施例3)以下、本発明の第3の実施例
における、単一の光学部品による均一なレーザ強度分布
を作成する装置について、図面を参照しながら説明す
る。(Embodiment 3) An apparatus for producing a uniform laser intensity distribution by a single optical component in a third embodiment of the present invention will be described below with reference to the drawings.
【0014】図3は、本発明の一実施例の構成を示した
ものである。図3において、1は両端が球面である四角
柱の石英管で、両球面の端面は反射防止膜を付け側面は
光学研磨を施したもので、四角柱の長手方向の途中をテ
ーパー状に細くしたあとテーパー状に太くしており、
4,5,7はレーザビームである。四角柱が細くなるこ
とにより、四角柱内部を通過するレーザビーム5の反射
回数は、細くない場合に比べてより多くなる。このた
め、細くない場合に比べてレーザビームの強度分布がよ
り均一化され、また、石英管の長手方向の寸法が短くで
きることにより小型化が図れる。FIG. 3 shows the configuration of an embodiment of the present invention. In FIG. 3, reference numeral 1 denotes a quadrangular prismatic quartz tube whose both ends are spherical surfaces. The end faces of both spheres are provided with an antireflection film and the side surfaces are optically polished. After that, it is thickened in a taper shape,
4, 5 and 7 are laser beams. Since the quadrangular prism becomes thin, the number of reflections of the laser beam 5 passing through the quadrangular prism becomes larger than that in the case where the laser beam 5 is not thin. Therefore, the intensity distribution of the laser beam is made more uniform as compared with the case where the quartz tube is not thin, and the size in the longitudinal direction of the quartz tube can be shortened, so that the size can be reduced.
【0015】[0015]
【発明の効果】本発明は上記のように構成した装置によ
って、単一の光学部品によりガウス強度分布のレーザビ
ームを均一なレーザ強度分布を作成することができるた
め、装置が安価になり、かつ、調整も簡単にすることが
できる。The present invention makes it possible to produce a uniform laser intensity distribution of a laser beam having a Gaussian intensity distribution by means of a single optical component by means of the apparatus constructed as described above. , The adjustment can be easy.
【図1】本発明の実施例1における、透明管の両端を球
面状にし、その片方の球面にレーザ光を入射することに
より、均一なレーザ強度分布を作成する装置の構成図FIG. 1 is a configuration diagram of an apparatus for creating a uniform laser intensity distribution by making both ends of a transparent tube spherical and making laser light incident on one spherical surface in Example 1 of the present invention.
【図2】本発明の実施例2における、透明管の両端を円
筒面状にし、その片方の円筒面にレーザ光を入射するこ
とにより、一方向だけ均一なレーザ強度分布を作成する
装置の構成図FIG. 2 is a configuration of an apparatus for forming a uniform laser intensity distribution in only one direction by making both ends of a transparent tube into a cylindrical surface and injecting a laser beam into one of the cylindrical surfaces in Example 2 of the present invention. Figure
【図3】本発明の実施例2における、透明管の両端を円
筒面もしくは球面状にした、請求項1もしくは請求項2
の透明管の一部を両端部より細くし、その片方の端面に
レーザ光を入射することにより、均一なレーザ強度分布
を作成する装置の構成図FIG. 3 is a diagram illustrating a transparent tube according to a second embodiment of the present invention, wherein both ends of the transparent tube have a cylindrical surface or a spherical surface.
Part of the transparent tube of 2 is made thinner than both ends, and a laser beam is incident on one end surface of the transparent tube to create a uniform laser intensity distribution.
【図4】透明管と凸レンズ2枚を用いて、均一なレーザ
強度分布を作成する従来例の構成図FIG. 4 is a configuration diagram of a conventional example in which a uniform laser intensity distribution is created using a transparent tube and two convex lenses.
1 四角柱の透明石英管 2,3 凸レンズ 4 レーザビーム(入射光:平行光) 5 レーザビーム(透明石英管内で多重反射) 6 レーザビーム(出射光:広がり光) 7 レーザビーム(出射光:平行光) 1 square prism transparent quartz tube 2, 3 convex lens 4 laser beam (incident light: parallel light) 5 laser beam (multiple reflection in transparent quartz tube) 6 laser beam (emitted light: spread light) 7 laser beam (emitted light: parallel light) light)
───────────────────────────────────────────────────── フロントページの続き (72)発明者 植杉 雄二 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yuji Uesugi 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (3)
球面にレーザ光を入射してなる均一化光学装置。1. A homogenizing optical device in which both ends of a transparent tube are spherical and laser light is incident on one of the spherical surfaces.
の円筒面にレーザ光を入射することにより、一方向だけ
均一なレーザ強度分布を作成する均一化光学装置。2. A homogenizing optical device for producing a uniform laser intensity distribution in only one direction by making both ends of a transparent tube into a cylindrical surface and injecting laser light into one of the cylindrical surfaces.
した、請求項1記載の透明管の一部を両端部より細く
し、その片方の端面レーザ光を入射することにより、均
一なレーザ強度分布を作成する均一化光学装置。3. A uniform laser is provided by making both ends of the transparent tube into a cylindrical surface or a spherical shape, and making a part of the transparent tube thinner than both ends and injecting one end surface laser beam. A homogenizing optical device that creates an intensity distribution.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4200799A JPH0651236A (en) | 1992-07-28 | 1992-07-28 | Uniforming optical device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4200799A JPH0651236A (en) | 1992-07-28 | 1992-07-28 | Uniforming optical device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0651236A true JPH0651236A (en) | 1994-02-25 |
Family
ID=16430388
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4200799A Pending JPH0651236A (en) | 1992-07-28 | 1992-07-28 | Uniforming optical device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0651236A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005057271A1 (en) * | 2003-12-10 | 2005-06-23 | Matsushita Electric Industrial Co., Ltd. | Optical element, laser beam source, and 2-d image forming device |
JP2007065016A (en) * | 2005-08-29 | 2007-03-15 | Seiko Epson Corp | Illuminator and projector |
JP2007072059A (en) * | 2005-09-06 | 2007-03-22 | Seiko Epson Corp | Illuminating apparatus and projector |
CN117031744A (en) * | 2023-10-07 | 2023-11-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | Imaging optical system and method based on quartz circular tube |
-
1992
- 1992-07-28 JP JP4200799A patent/JPH0651236A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005057271A1 (en) * | 2003-12-10 | 2005-06-23 | Matsushita Electric Industrial Co., Ltd. | Optical element, laser beam source, and 2-d image forming device |
JPWO2005057271A1 (en) * | 2003-12-10 | 2007-12-13 | 松下電器産業株式会社 | Optical element, laser light source, and two-dimensional image forming apparatus |
US7522792B2 (en) | 2003-12-10 | 2009-04-21 | Panasonic Corporation | Optical element, laser light source, and two-dimensional image forming apparatus |
JP2007065016A (en) * | 2005-08-29 | 2007-03-15 | Seiko Epson Corp | Illuminator and projector |
JP2007072059A (en) * | 2005-09-06 | 2007-03-22 | Seiko Epson Corp | Illuminating apparatus and projector |
CN117031744A (en) * | 2023-10-07 | 2023-11-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | Imaging optical system and method based on quartz circular tube |
CN117031744B (en) * | 2023-10-07 | 2023-12-15 | 中国空气动力研究与发展中心超高速空气动力研究所 | Imaging optical system and method based on quartz circular tube |
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