JPH0650981Y2 - Disc cleaning basket - Google Patents
Disc cleaning basketInfo
- Publication number
- JPH0650981Y2 JPH0650981Y2 JP1989143073U JP14307389U JPH0650981Y2 JP H0650981 Y2 JPH0650981 Y2 JP H0650981Y2 JP 1989143073 U JP1989143073 U JP 1989143073U JP 14307389 U JP14307389 U JP 14307389U JP H0650981 Y2 JPH0650981 Y2 JP H0650981Y2
- Authority
- JP
- Japan
- Prior art keywords
- basket
- storage groove
- cleaning
- disc
- ribs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、半導体ウエーハ，アルミディスク，その他の
ディスクを損傷、汚染から防いで安全に洗浄するために
用いられるバスケットの改良、特に半導体ウエーハなど
のディスクを担持する非晶性バスケットに関するもので
ある。[Detailed Description of the Invention] [Industrial field of application] The present invention relates to an improvement of a basket used for safe cleaning of semiconductor wafers, aluminum discs, and other discs from damage and contamination, especially semiconductor wafers. The present invention relates to an amorphous basket carrying a disc.
一般に半導体関連のウエーハ、或はその他のディスクは
極めてクリーンな状態であることが要求され洗浄作業に
よる損傷、汚染から守るために取扱上、バスケット内に
多数枚を安全に配列保持して洗浄することが知られてい
る。Generally, semiconductor-related wafers or other disks are required to be in an extremely clean state, and in order to protect them from damage and contamination due to cleaning work, in handling, a large number of wafers must be safely arranged and cleaned in a basket. It has been known.
従来、この洗浄作業では、各ウエーハを互いに接触しな
いように一定間隔をおいて個別にバスケットに収容する
のに保持溝を持った合成樹脂製バスケットにより弾性的
に保持して、多数枚を一度に洗浄し、作業性を良好にし
ている。Conventionally, in this cleaning work, each wafer is elastically held by a synthetic resin basket having a holding groove to store the wafers in a basket at regular intervals so that they do not come into contact with each other. Washed to improve workability.
ところが、従来のディスク洗浄用の合成樹脂製バスケッ
トはPP,PE,AS樹脂のみでの成形体とすると重量が不足し
て洗浄液槽内で浮かんでしまうし、結晶性樹脂では成形
歪が大きくて問題があるために重みづけと剛性を出すた
めにガラス繊維などの素材を混入して成形体とすること
が多いが、このバスケットでは洗浄すべきディスクに傷
がつきやすくディスク挿入、取出、作業に支障を来たし
たりディスクとの接触摩擦によって生ずる微粉によって
ディスクの汚染や損傷が多発しディスクをクリーン状態
に維持するという点では完全なものではなく洗浄精度に
不具合を生ずるし、作業取扱上の厳格さが要求され煩雑
な管理作業を強いられるなど問題があった。However, if a conventional synthetic resin basket for cleaning discs is made of only PP, PE, and AS resin, its weight will be insufficient and it will float in the cleaning liquid tank. Therefore, in order to give weight and rigidity, glass fibers and other materials are often mixed to form a molded body, but this basket easily scratches the disk to be cleaned, which hinders disk insertion, removal, and work. It is not perfect in terms of maintaining the disc in a clean state due to frequent contamination and damage of the disc due to fine powder generated by contact with the disc or friction with the disc, which causes a problem in cleaning accuracy and strictness in work handling. There was a problem that it was requested and complicated management work was forced.
本考案では、これら従来の諸問題を解決しようとするも
ので、バスケットの歪みが少なくディスクの安定した担
持が可能で、ディスクの損傷、汚染を防ぎ、その精度を
著しく向上でき、しかも担持させる取扱操作も簡便で洗
浄作業を安全に行ない得るディスク洗浄用バスケットを
提供することを目的としたものである。The present invention is intended to solve these problems of the related art, and the basket can be stably held with little distortion, the damage and contamination of the disk can be prevented, and the accuracy can be remarkably improved. It is an object of the present invention to provide a disk cleaning basket which is easy to operate and can be safely cleaned.
本考案は、上方にフランジ状の把手部８と底部に脚部９
とを対で備え、かつディスクＤをそれぞれ一定間隔にお
いて配列担持しうる収納溝１をリブ２で両内側の対向面
と底面に形成した傾斜受部3,3にまたがって複数並設
し、該傾斜受部3,3間に排液開口部４を形成したバスケ
ット５であって、このバスケット５を非晶性合成樹脂材
をもって構成し、前記収納溝１の下方側面から前記斜面
受部３にまたがって、水切り孔６を設けると共に、前記
把手部８と脚部９とに形成した嵌合用凹部10に係合リブ
11を介して剛性支杆７をそれぞれ着脱自在に配備したも
のである。According to the present invention, a flange-shaped handle portion 8 is provided on the upper side and a leg portion 9 is provided on the bottom portion.
And a plurality of storage grooves 1 each of which is capable of carrying the disks D arrayed at a constant interval and arranged side by side with the ribs 2 over the inclined receiving portions 3 and 3 formed on the inner surface and the bottom surface. A basket (5) having a drainage opening (4) formed between the inclined receiving parts (3, 3), wherein the basket (5) is made of an amorphous synthetic resin material, and the slope receiving part (3) extends from the lower side surface of the storage groove (1). Further, the drainage hole 6 is provided, and an engaging rib is formed in the fitting recess 10 formed in the handle portion 8 and the leg portion 9.
Rigid supporting rods 7 are detachably arranged via 11 respectively.
本考案のディスク洗浄用のバスケット５はディスクＤを
リブ2,2間の収納溝１に沿って個別に挿入する際、その
下縁がバスケット５の底部に対向する傾斜受部3,3上に
支持され開口部４に嵌り込んで座りが良く担持され、緩
衝性も良好となって洗浄液中に浸漬してもバスケット内
での保持維持が適確で安定した状態で収容でき、しかも
超音波洗浄時のバスケット５の歪み発生も複数の剛性支
杆７の存在によって防ぐことができるし、この剛性支杆
７がバランスウエイトの機能を果たすので液浸漬性が保
持でき安全性が大幅に高められディスクと接触し微粉を
発生したり、損傷を受ける恐れがなく用いられるし、洗
浄取扱も簡便安全で多量作業に適し、作業性を著しく良
好にできるものである。The basket 5 for cleaning the disc of the present invention is placed on the inclined receiving portions 3, 3 whose lower edges face the bottom of the basket 5 when the disc D is individually inserted along the receiving groove 1 between the ribs 2, 2. It is supported and fits into the opening 4 and sits well, and the buffering property is also good, and even if it is immersed in the cleaning liquid, it can be held and maintained in the basket accurately and stably, and it can be ultrasonically cleaned. The occurrence of distortion of the basket 5 at the time can be prevented by the existence of the plurality of rigid supporting rods 7. The rigid supporting rods 7 function as a balance weight, so that the liquid immersion property can be maintained and the safety is greatly improved. It is used without the risk of contacting with, generating fine powder, or being damaged, and it is easy and safe to wash and handle, suitable for a large amount of work, and can significantly improve workability.
本考案の詳細を第１〜６図に示す実施例に基づいて説明
すると、ウエーハ，アルミディスクなどのディスクＤを
それぞれ一定間隔をおいて配列担持しうる収納溝１をリ
ブ２で複数対向面に備え、底面には傾斜受部３と排液開
口部４とを形成したバスケット５を非晶性合成樹脂材を
もって構成し、前記収納溝１の下方側面に水切り孔６を
設けると共に、バスケット長手方向に複数の剛性支杆７
を脱着自在に嵌装配備したディスク洗浄バスケットとし
てある。この場合前記バスケット５としては、断面Ｕ字
状のトレイであって、上方にフランジ状の把手部８と底
部に脚部９とを対で備えているが取扱上便利であり、前
記支杆７は、バランスウエイト用のステンレス丸棒その
他洗浄液に対して耐薬品性（不働体）を有する金属棒を
用いバスケット５の把手部８及び脚部９の略全長にわた
って形成した嵌挿用凹部10に挿入保持されているもので
適宜間隔で凹部内に設けた係合リブ11に保持してある。
また弾性リブ２はバスケット５の対向側壁の内側面に略
Ｖ字溝の収納溝１が形成されるように突設され、該収納
溝１が前記傾斜受部３上にもまたがって形成され排液開
口部４に連らなっており、傾斜受部３と側壁にまたがっ
て水切り孔６が収納溝底面に設けてあり、バスケット５
の内底面との間に隙間をあけてディスクＤを空間部に保
持しやすくしてある。The details of the present invention will be described with reference to the embodiments shown in FIGS. 1 to 6. A plurality of storage grooves 1 for carrying and holding disks D such as wafers and aluminum disks at regular intervals are formed by ribs 2 on a plurality of opposing surfaces. A basket 5 having an inclined receiving portion 3 and a drainage opening 4 formed on the bottom surface is made of an amorphous synthetic resin material, a draining hole 6 is provided on the lower side surface of the storage groove 1, and a basket longitudinal direction is provided. Multiple rigid supports 7
It is a disk cleaning basket that is detachably fitted and deployed. In this case, the basket 5 is a tray having a U-shaped cross section, and is provided with a pair of a flange-shaped grip portion 8 on the upper side and a leg portion 9 on the bottom portion, but it is convenient for handling, and the supporting rod 7 is provided. Is a stainless steel rod for balance weight or other metal rod having chemical resistance (passive body) against the cleaning liquid, and is inserted into the fitting recess 10 formed over substantially the entire length of the handle portion 8 and the leg portion 9 of the basket 5. It is held, and is held by engaging ribs 11 provided in the recess at appropriate intervals.
Further, the elastic ribs 2 are provided so as to project on the inner surface of the opposite side wall of the basket 5 so as to form a storage groove 1 having a substantially V-shaped groove. The basket 5 is connected to the liquid opening 4, and a draining hole 6 is provided on the bottom surface of the storage groove across the inclined receiving portion 3 and the side wall.
A space is provided between the inner bottom surface and the inner bottom surface of the disk to facilitate holding the disk D in the space.
図中12は切欠部でバスケット５の一方の対向壁に形成さ
れ収納されたディスクの中心孔に棒材を通して引き上げ
て多数のディスクを一括して取出しができるようにした
ものである。Reference numeral 12 in the drawing denotes a notch portion which is formed on one of the opposing walls of the basket 5 and which allows a large number of discs to be collectively taken out by pulling up a rod through the center hole of the disc accommodated therein.
また、このバスケット５は内外圧（空気圧差および内外
応力）の変化に対応できるように適所にリブを備えた強
靱な構造体とし、その製作には内容物が好ましくは透視
可能なポリエチレン、ポリプロピレン、アクリル樹脂な
どのプラスチックからなる剛性の高い合成樹脂材質で非
晶性合成樹脂が採用される。Further, the basket 5 is a tough structure having ribs at appropriate positions so as to cope with changes in internal and external pressures (air pressure difference and internal and external stress), and the contents thereof are preferably transparent, polyethylene, polypropylene, Amorphous synthetic resin is adopted as a highly rigid synthetic resin material made of plastic such as acrylic resin.
本考案は、バスケットを非晶性合成樹脂材をもって構成
し、前記収納溝の下方側面から前記斜面受部にまたがっ
て、水切り孔を設けると共に、前記把手部と脚部とに形
成した嵌合用凹部に係合リブを介して剛性支杆をそれぞ
れ着脱自在に配備したことにより、化学的安定であるが
反りや歪みを生じやすい非晶性樹脂で応力の集中しやす
い形状、例えばＵ字形バスケットとして水切孔を備えた
状態としても変形防止に役立ち、かつ洗浄時にバスケッ
トを安定化させるし、バランスウエイトにも役立つと共
に、ディスクの収納溝に残液することなく水切りはけが
著しく良好で、洗浄精度を向上させ、バスケットに設け
た剛性支杆にディスクが接触せずに保持され安全で、し
かも支杆はワンタッチでバスケット上下に分けてバラン
スよく着脱できて、ディスクのバスケットへの挿入が迅
速かつ容易で単純作業での多量処理を安全に行うことが
可能となり、挿入時および挿入後の洗浄取扱中におい
て、ディスクがバスケット内の支持弾性係止片から外れ
て他の部品と接触して微粉を発生することが少なく損傷
を受ける恐れがなく、しかも剛性支杆によってバスケッ
トの歪みを可及的に少なく十分安定した状態で対応でき
るし、バランスウエイトの機能もあって液浸漬性から保
持でき安全性を高め、この各弾性片が所定の間隙を保持
して独立に機能するため、洗浄作業の取扱い中における
振動への対応性に優れ、ディスクなどの被洗浄品のバス
ケット内で安定した担持が可能で、洗浄に不具合がなく
精度を著しく向上できる実用上の効果がある。According to the present invention, the basket is made of an amorphous synthetic resin material, and a draining hole is formed from the lower side surface of the storage groove to the slope receiving portion, and a fitting recess formed in the handle portion and the leg portion. Rigid support rods are detachably arranged through engaging ribs on each side, so that the amorphous resin is chemically stable but easily warps or distorts. Even if it has holes, it helps prevent deformation, stabilizes the basket during cleaning, helps balance weight, and significantly drains water without remaining liquid in the storage groove of the disk, improving cleaning accuracy. The disc is held without coming into contact with the rigid support rod provided on the basket, which is safe, and the support rod can be divided into the top and bottom of the basket with one touch, and can be attached and removed in a well-balanced manner. Inserting the disc into the basket is quick and easy, and it is possible to safely carry out a large amount of processing by simple work, and the disc will not come off the supporting elastic locking pieces in the basket during insertion and during cleaning after insertion. It does not generate fine powder when it comes into contact with other parts and is unlikely to be damaged. In addition, the rigid supporting rod minimizes distortion of the basket and allows it to be handled in a stable condition, and also has a balance weight function. Since it can be held from the liquid immersion property to improve safety, each elastic piece maintains a predetermined gap and functions independently, so it is excellent in response to vibration during handling of cleaning work, and items to be cleaned such as disks It has a practical effect that it can be stably supported in the basket and that cleaning can be performed without any trouble and the accuracy can be remarkably improved.
図面は本考案の実施例を示し、第１図は正面図、第２図
は平面図、第３図は側面図、第４図は第２図I-I線にお
ける切断正面図、第５図は底面図、第６図は斜視図であ
る。 １…収納溝、２…リブ、３…傾斜受部、４…排液開口
部、５…バスケット、６…水切り孔、７…支杆、８…把
手部、９…脚部、10…凹部、11…係合リブ。The drawings show an embodiment of the present invention. Fig. 1 is a front view, Fig. 2 is a plan view, Fig. 3 is a side view, Fig. 4 is a sectional front view taken along line II of Fig. 2, and Fig. 5 is a bottom view. 6 and 6 are perspective views. DESCRIPTION OF SYMBOLS 1 ... Storage groove, 2 ... Rib, 3 ... Inclined receiving part, 4 ... Drainage opening part, 5 ... Basket, 6 ... Drainage hole, 7 ... Support rod, 8 ... Handle part, 9 ... Leg part, 10 ... Recessed part, 11 ... Engaging ribs.
Claims (1)
脚部（９）とを対で備え、かつディスク（Ｄ）をそれぞ
れ一定間隔をおいて配列担持しうる収納溝（１）をリブ
（２）で両内側の対向面と底面に形成した傾斜受部
（３）（３）にまたがって複数並設し、該傾斜受部
（３）（３）間に排液開口部（４）を形成したバスケッ
ト（５）であって、このバスケット（５）を非晶性合成
樹脂材をもって構成し、前記収納溝（１）の下方側面か
ら前記斜面受部（３）にまたがって、水切り孔（６）を
設けると共に、前記把手部（８）と脚部（９）とに形成
した嵌合用凹部（10）に係合リブ（11）を介して剛性支
杆（７）をそれぞれ着脱自在に配備したことを特徴とす
るディスク洗浄用バスケット。1. A storage groove (1) having a pair of flange-shaped grips (8) on the upper side and legs (9) on the bottom, and capable of carrying discs (D) arranged at regular intervals. A plurality of ribs (2) are installed side by side over the inclined receiving portions (3) (3) formed on the inner and outer facing surfaces and the bottom surface, and the drainage opening (() is formed between the inclined receiving portions (3) (3). 4) in which the basket (5) is formed of an amorphous synthetic resin material and extends from the lower side surface of the storage groove (1) to the slope receiving portion (3). A drainage hole (6) is provided, and a rigid support rod (7) is attached to and detached from a fitting recess (10) formed in the handle portion (8) and the leg portion (9) via an engaging rib (11). A disk cleaning basket characterized by being freely deployed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989143073U JPH0650981Y2 (en) | 1989-12-13 | 1989-12-13 | Disc cleaning basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989143073U JPH0650981Y2 (en) | 1989-12-13 | 1989-12-13 | Disc cleaning basket |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0381628U JPH0381628U (en) | 1991-08-21 |
| JPH0650981Y2 true JPH0650981Y2 (en) | 1994-12-21 |
Family
ID=31689873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989143073U Expired - Lifetime JPH0650981Y2 (en) | 1989-12-13 | 1989-12-13 | Disc cleaning basket |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650981Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8931331B2 (en) | 2011-05-18 | 2015-01-13 | 3M Innovative Properties Company | Systems and methods for volumetric metering on a sample processing device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6186929U (en) * | 1984-11-12 | 1986-06-07 | ||
| JPH0171448U (en) * | 1987-10-30 | 1989-05-12 | ||
| JPH0711469Y2 (en) * | 1988-02-08 | 1995-03-15 | 富士通株式会社 | Semiconductor manufacturing equipment |
-
1989
- 1989-12-13 JP JP1989143073U patent/JPH0650981Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8931331B2 (en) | 2011-05-18 | 2015-01-13 | 3M Innovative Properties Company | Systems and methods for volumetric metering on a sample processing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0381628U (en) | 1991-08-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |