JPH0648330Y2 - Orifice diameter pass / fail discriminating device - Google Patents
Orifice diameter pass / fail discriminating deviceInfo
- Publication number
- JPH0648330Y2 JPH0648330Y2 JP1927889U JP1927889U JPH0648330Y2 JP H0648330 Y2 JPH0648330 Y2 JP H0648330Y2 JP 1927889 U JP1927889 U JP 1927889U JP 1927889 U JP1927889 U JP 1927889U JP H0648330 Y2 JPH0648330 Y2 JP H0648330Y2
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- orifice
- flow
- pressure
- orifice diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Description
【考案の詳細な説明】 技術分野 本考案は、微小な孔径を一定圧の空気流量変化として求
め、孔径が規定範囲内にあるか否かを判別するオリフィ
ス径合否判別装置に関する。TECHNICAL FIELD The present invention relates to an orifice diameter pass / fail determination device for determining whether a hole diameter is within a specified range by obtaining a minute hole diameter as a change in air flow rate at a constant pressure.
従来技術 孔加工は一般の機械加工において基本となるものである
が、技術の動向は小形精密化に向けていることから、こ
れに伴って孔加工も小口径、且つ高加工精度を要求され
ている。孔加工後の孔径の検査においては大口径の場
合、通常マイクロメータ等が使用されている。しかし、
マイクロメータは微小口径の孔径を計測することができ
ず、栓ゲージによる限界ゲージ拡大投影器とか空気マイ
クロメータ等が使用されている。空気マイマロメータの
場合は、基準の孔径のモデルの孔を流通する空気背圧と
被験孔を流通する空気背圧とを比較することにより孔径
を管理している。しかし、上述のものは、検査に時間を
要するのでより簡易な検査方法が要求されていた。簡易
な検査方法の一つとして一定の空気圧源から供給される
空気を孔（以後オリフィスと呼ぶ）を流路として流通
し、この流量からオリフィス孔径を検査する方法が試み
られてる。この流量計としては小形な面積流量計が用い
られ、テーパ管内のフロートの位置から流量を求めてい
る。Conventional technology Although hole drilling is the basis of general machining, the trend of technology is toward miniaturization, and accordingly, hole drilling requires a small diameter and high drilling accuracy. There is. In the inspection of the hole diameter after drilling, when the hole diameter is large, a micrometer or the like is usually used. But,
The micrometer cannot measure the diameter of a small aperture, and a limit gauge magnifying projector using a stopper gauge or an air micrometer is used. In the case of an air mimalometer, the hole diameter is managed by comparing the air back pressure flowing through the hole of the model with the standard hole diameter with the air back pressure flowing through the test hole. However, the above-mentioned ones require a simpler inspection method because the inspection takes time. As one of simple inspection methods, a method has been tried in which air supplied from a constant air pressure source is passed through a hole (hereinafter referred to as an orifice) as a flow path, and the orifice hole diameter is inspected from this flow rate. A small area flow meter is used as this flow meter, and the flow rate is obtained from the position of the float in the taper pipe.
従来技術の問題点 叙上の方法において面積流量計を用いる方法は、流量計
が小形で簡易であるが、流量は、空気密度が一定の条件
で、フローと前後の圧力差を一定とするようなテーパー
管内においてフロートに作用する揚力とフロート重量と
の釣合位置として求められるので、フロートの位置検知
精度も悪く、空気圧力、空気温度の影響も受け精度は±
２％程度である。即ち、オリフィス孔径の計測精度は±
1.4％である。しかも空気圧力、温度の管理を必要とす
る問題点があった。Problems of the prior art The method of using the area flowmeter in the above method is small and simple, but the flow rate is set so that the pressure difference before and after the flow is constant under the condition that the air density is constant. Since it is calculated as the balance position between the lift acting on the float and the float weight in a tapered pipe, the float position detection accuracy is poor, and the accuracy is also affected by the air pressure and air temperature.
It is about 2%. That is, the measurement accuracy of the orifice hole diameter is ±
It is 1.4%. Moreover, there is a problem that it is necessary to control the air pressure and temperature.
問題点解決のための手段 本考案は、叙上の問題点に鑑みなされたもので、オリフ
ィス径を空気流量によって求めるものであるが、従来例
において空気圧および温度変化によって流量測定値が変
化する変化量を、空気圧、温度を別に計測して補正する
という煩雑さをなくして直接に質量流量値からオリフィ
ス径を求めるもので、具体的には、流量計を熱式流量計
とし、高圧空気源から供給される空気を一定の１次圧力
に調圧する第１の圧力コントローラと、前記１次圧力の
空気を被測オリフィスに流通し、流通する全空気量を前
記被測オリフィスの下限オリフィス径より僅かに小径の
オリフィスを流通する流量より僅かに小さい一定の流量
に流量制御する流量コントローラを配設した第１流路
と、オリフィス径の許容偏差範囲に相当する流量よりも
僅かに大きい流量を測定する流量計および該流量計の流
出側の２次圧力を一定に調圧する第２の圧力コントロー
ラを具備した第２流路とに分流し、該第２流路を流通す
る流量が規定値内であるか否かによりオリフィス径が規
定値内であるか否かを判別するオリフィス径合否判別装
置を提供するものである。Means for Solving Problems The present invention has been made in view of the above problems, in which the orifice diameter is determined by the air flow rate. In the conventional example, the flow rate measurement value changes due to changes in air pressure and temperature. The orifice diameter is obtained directly from the mass flow rate value without the complexity of measuring and correcting the air pressure and temperature separately. Specifically, the flow meter is a thermal type flow meter and the A first pressure controller that regulates the supplied air to a constant primary pressure, and the air having the primary pressure is circulated to the measured orifice, and the total amount of air flowing is smaller than the lower limit orifice diameter of the measured orifice. The first flow path is equipped with a flow controller that controls the flow rate to a constant flow rate that is slightly smaller than the flow rate flowing through the small-diameter orifice, and the flow rate corresponding to the allowable deviation range of the orifice diameter. The flow path is divided into a flow meter for measuring a slightly larger flow rate and a second flow path provided with a second pressure controller for adjusting the secondary pressure on the outflow side of the flow meter to a constant value, and the second flow path is separated from the second flow path. Provided is an orifice diameter acceptance / rejection determination device that determines whether or not an orifice diameter is within a specified value depending on whether or not a flowing flow rate is within a specified value.
実施例 第１図は、本考案のオリフィス径合否判別装置の構成を
示すブロック図で、図において、１は主流路を示し、図
示しない高圧空気源から、高圧空気を流通する。２は第
１圧力コントローラ（PC−１）で、これは主流路を流通
する高圧空気を設定圧力に調整する周知のコントローラ
で、設定圧力を基準電圧として与え、一方、弁手段にお
ける弁開度を所定の電圧値に変換し、該電圧値が基準電
圧に等しくするように弁開度を制御することにより高圧
空気を設定圧力とするものである。３は第１圧力計
（P1）で、第１圧力コントローラ２により調整された圧
力（ここでは１次圧力P1と呼ぶ）を指示する。４は被測
オリフィスで、図示しない介装手段によって着脱可能に
主流路１に装着される。介装された被測オリフィス４に
は主流路１の１次圧空気が流路１外に漏洩することなく
流通する。５は第１流路、６は第２流路で、これらは主
流路１の流量を分流する分流路である。７は質量流量コ
ントローラ（MFC）で、周知のものであり、熱式質量流
量計と圧力コントローラとを直列に接続して構成され、
熱式質量流量計の質量流量信号を前記圧力コントローラ
２と同一原理の圧力コントローラにより設定された質量
流量となるように圧力コントローラ２を制御するもので
ある。８は周知の分流形熱式流量計からなる質量流量計
（MFM）で、層流で流通する被測空気流を加熱した場
合、加熱された流体の上下流温度は下流側が高く、上下
流の温度差は流体の質量流量に比例することを利用した
センサ管と分流比の定められた層流管とからなりセンサ
管の流量値に基づいて被測空気の質量流量を検知する。
９は流量偏差計で、質量流量計８の設定流量値に対して
許容上下限値を設定し、許容範囲内であるときは合格表
示91を点灯し、範囲外のときは不合格表示92を点灯し、
不合格信号を出力する。10は第２圧力計（P2）、11は第
２圧力コントローラ（PC−２）で、前記第１圧力計３
（P1）及び第１圧力コントローラ２（PC−１）と各々同
一のもので、第２流路６の質量流量計８下流に介装され
ている。12は弁手段である。Embodiment FIG. 1 is a block diagram showing the configuration of an orifice diameter pass / fail determination device of the present invention. In the figure, reference numeral 1 denotes a main flow passage, and high pressure air is circulated from a high pressure air source (not shown). Reference numeral 2 is a first pressure controller (PC-1), which is a well-known controller that adjusts the high-pressure air flowing through the main flow path to a set pressure, which gives the set pressure as a reference voltage, and the valve opening degree in the valve means. The high-pressure air is set to a set pressure by converting it into a predetermined voltage value and controlling the valve opening so that the voltage value becomes equal to the reference voltage. A first pressure gauge (P 1 ) 3 indicates a pressure adjusted by the first pressure controller 2 (referred to as a primary pressure P 1 here). Denoted by 4 is an orifice to be measured, which is detachably attached to the main flow path 1 by an interposing means (not shown). The primary pressure air in the main flow path 1 flows through the inserted orifice 4 without leaking out of the flow path 1. Reference numeral 5 is a first flow path, 6 is a second flow path, and these are branch flow paths that divide the flow rate of the main flow path 1. 7 is a mass flow controller (MFC), which is well known, and is configured by connecting a thermal mass flow meter and a pressure controller in series,
The pressure controller 2 is controlled so that the mass flow rate signal of the thermal mass flowmeter becomes the mass flow rate set by the pressure controller of the same principle as the pressure controller 2. Reference numeral 8 is a mass flow meter (MFM) consisting of a well-known split-flow type thermal flow meter, and when the measured air flow flowing in a laminar flow is heated, the upstream and downstream temperatures of the heated fluid are high on the downstream side, The temperature difference is proportional to the mass flow rate of the fluid, and is composed of a sensor tube and a laminar flow tube with a predetermined diversion ratio. The mass flow rate of the measured air is detected based on the flow rate value of the sensor tube.
9 is a flow deviation meter, which sets the allowable upper and lower limit values for the set flow rate value of the mass flow meter 8, lights the pass indicator 9 1 when it is within the allowable range, and displays the fail indicator 9 when it is out of the range. Light up 2 ,
Output a fail signal. 10 is the second pressure gauge (P 2 ), 11 is the second pressure controller (PC-2), and the first pressure gauge 3
(P 1 ) and the first pressure controller 2 (PC-1), which are the same as the first pressure controller 2 and are provided downstream of the mass flowmeter 8 in the second flow path 6. 12 is a valve means.
次に上に述べた本考案のオリフィス径合否判別装置の原
理を述べる。まず、被測オリフィス４を基準内径をもっ
た基準オリフィスとし主流路１に介装後、該基準オリフ
ィス４の上流圧力を第１圧力コントローラ２により圧力
P1に調整する。第１流路５には被測オリフィス４のオリ
フィス径の基準値に対して許容され下限値よりも僅かに
小さいオリフィス径に相当する流量が流通するように、
第２流路６の弁手段12を概略調整し、以後、常に第１流
路には一定流量の空気が流通するよう質量流量コントロ
ーラ７を作動させる。次に、第１流路５の流量を一定に
した状態で第２圧力計10の値P2を読み、第１圧力計３の
値P1との圧力差ΔＰ＝P1−P2を一定に調整しておく。こ
の場合、質量流量計８に流通する流量は基準流量であ
り、流量偏差計９は合格表示91が点灯し、基準値信号を
出力する。上述した基準オリフィス４から被測オリフィ
ス４に換えると、第１流路流量および圧力差ΔＰは一定
であるから質量流量計８を流通する空気流量はオリフィ
ス径の２乗に比例した流量となる。この流量を予め定め
られたオリフィス径の許容偏差に設定することにより合
格91、不合格92の判別表示がなされ、判別信号が出力さ
れる。Next, the principle of the above-described orifice diameter pass / fail determination device of the present invention will be described. First, the measured orifice 4 is used as a reference orifice having a reference inner diameter and is inserted in the main flow path 1, and then the upstream pressure of the reference orifice 4 is adjusted by the first pressure controller 2.
Adjust to P 1 . In the first flow path 5, a flow rate corresponding to an orifice diameter allowed for the reference value of the orifice diameter of the measured orifice 4 and slightly smaller than the lower limit value flows,
The valve means 12 of the second flow path 6 is roughly adjusted, and thereafter, the mass flow rate controller 7 is operated so that a constant flow rate of air always flows through the first flow path. Next, the value P 2 of the second pressure gauge 10 is read while the flow rate of the first flow path 5 is constant, and the pressure difference ΔP = P 1 −P 2 from the value P 1 of the first pressure gauge 3 is constant. Adjust to. In this case, the flow rate flowing to the mass flow meter 8 is a reference flow rate, flow rate difference meter 9 display 9 1 lights pass, and outputs a reference value signal. When the reference orifice 4 described above is replaced with the measured orifice 4, the flow rate of the first flow path and the pressure difference ΔP are constant, so the flow rate of the air flowing through the mass flowmeter 8 becomes a flow rate proportional to the square of the orifice diameter. By setting this flow rate to a predetermined allowable deviation of the orifice diameter, the discrimination display of pass 9 1 and fail 9 2 is made, and a discrimination signal is output.
効果 叙上の本考案になるオリフィス径合否判別装置によれ
ば、オリフィスを流通する空気流量を質量流量として検
知するので、オリフィス径を計測するに当って上流圧力
を一定とすることにより温度補正を施こす煩雑さが省
け、且つ、オリフィスを流通する流量の許容下限値近傍
の流量を分流する第１流路の流量は、オリフィス流量の
殆どが流れる流量となり、質量流量コントローラにより
制御された一定値に保たれるため、質量流量精度は低く
ても制御偏差は小さいので、とくにオリフィス孔径が微
小な場合でも一定値の精度は高く、偏差分の流量が流通
する第２流路においての質量流量計の流量精度は低くて
も、その誤差は偏差分の流量に対するものであり、例え
ば１％のオリフィス径偏差に対し１％の流量偏差がある
場合では3.3×10-5の高精度の判別が可能となり、しか
も被測オリフィスの着脱のみで判別できるので、安価な
装置で高精度、高速な検査を可能とする。Effect According to the orifice diameter pass / fail determination device according to the present invention, the flow rate of air flowing through the orifice is detected as a mass flow rate. Therefore, the temperature is corrected by keeping the upstream pressure constant when measuring the orifice diameter. The flow rate of the first flow path, which saves the complexity of application and divides the flow rate in the vicinity of the allowable lower limit of the flow rate through the orifice, is the flow rate at which most of the orifice flow rate flows, and is a constant value controlled by the mass flow rate controller. Therefore, even if the mass flow rate accuracy is low, the control deviation is small. Therefore, even if the orifice hole diameter is very small, the accuracy of the constant value is high, and the mass flow meter in the second flow path through which the deviation flow rate flows. even if the flow rate accuracy is low, the error is for a flow rate of deviations, for example, 1% of 3.3 × 10 -5 in the case where the orifice radially polarized difference to have 1% of the flow rate difference It is possible to determine with high accuracy, and since it can be determined only by attachment and detachment of the measuring orifice, the high-precision equipment is inexpensive and allows fast inspection.
第１図は、本考案のオリフィス径合否判別装置の一実施
例を説明するための図である。 １……主流路、２……第１圧力コントローラ、３……第
１圧力計、４……被測オリフィス、５……第１流路、６
……第２流路、７……質量流量コントローラ、８……質
量流量計、９……流量偏差計、10……第２圧力計、11…
…第２圧力コントローラ、12……弁。FIG. 1 is a view for explaining an embodiment of the orifice diameter pass / fail determination device of the present invention. 1 ... Main flow path, 2 ... First pressure controller, 3 ... First pressure gauge, 4 ... Measured orifice, 5 ... First flow path, 6
...... Second flow path, 7 ... Mass flow controller, 8 ... Mass flow meter, 9 ... Flow deviation meter, 10 ... Second pressure gauge, 11 ...
… Second pressure controller, 12 …… valve.
Claims (2)
次圧力に調圧する第１の圧力コントローラと、前記１次
圧力の空気を被測オリフィスに流通し、流通する全空気
量を前記被測オリフィスの下限オリフィス径より僅かに
小径のオリフィスを流通する流量より僅かに小さい一定
の流量に流量制御する流量コントローラを配設した第１
流路と、オリフィス径の許容偏差範囲に相当する流量よ
りも僅かに大きい流量を測定する流量計および該流量計
の流出側の２次圧力を一定に調圧する第２の圧力コント
ローラを具備した第２流路とに分流し、該第２流路を流
通する流量が規定値内であるか否かによりオリフィス径
が規定値内であるか否かを判別することを特徴とするオ
リフィス径合否判別装置。1. A constant amount of air supplied from a high pressure air source.
A first pressure controller that regulates the secondary pressure, and a flow rate in which the primary pressure air is circulated through the measured orifice and the total amount of the circulated air is circulated through an orifice whose diameter is slightly smaller than the lower limit orifice diameter of the measured orifice. A first flow rate controller that controls the flow rate to a slightly smaller constant flow rate
A flow path, a flow meter for measuring a flow rate slightly larger than a flow rate corresponding to the allowable deviation range of the orifice diameter, and a second pressure controller for adjusting the secondary pressure on the outflow side of the flow meter to a constant value. Orifice diameter pass / fail determination, characterized in that the orifice diameter is divided into two flow paths, and whether or not the orifice diameter is within the specified value is determined by whether or not the flow rate flowing through the second flow path is within the specified value. apparatus.
項１記載のオリフィス径合否判別装置。2. An orifice diameter pass / fail determination device according to claim 1, wherein said flow meter is a split flow type thermal flow meter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1927889U JPH0648330Y2 (en) | 1989-02-20 | 1989-02-20 | Orifice diameter pass / fail discriminating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1927889U JPH0648330Y2 (en) | 1989-02-20 | 1989-02-20 | Orifice diameter pass / fail discriminating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02110807U JPH02110807U (en) | 1990-09-05 |
| JPH0648330Y2 true JPH0648330Y2 (en) | 1994-12-12 |
Family
ID=31234646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1927889U Expired - Lifetime JPH0648330Y2 (en) | 1989-02-20 | 1989-02-20 | Orifice diameter pass / fail discriminating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648330Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5276070B2 (en) * | 2010-09-13 | 2013-08-28 | 東海挾範株式会社 | Air micrometer |
| CN112414328A (en) * | 2020-11-24 | 2021-02-26 | 湖北科技学院 | Engine oil rail joint oil hole fault detection system and method |
-
1989
- 1989-02-20 JP JP1927889U patent/JPH0648330Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02110807U (en) | 1990-09-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20170199529A1 (en) | System for and method of monitoring flow through mass flow controllers in real time | |
| US9952078B2 (en) | Upstream volume mass flow verification systems and methods | |
| US7610117B2 (en) | System and method for flow monitoring and control | |
| JP6677646B2 (en) | System and method for monitoring mass flow controller flow in real time | |
| CN106104402B (en) | System and method for providing a pressure insensitive self-verifying mass flow controller | |
| JPH0648330Y2 (en) | Orifice diameter pass / fail discriminating device | |
| CN111103020A (en) | Flow detection device, flow control system and flow detection method | |
| EP0973080B1 (en) | Gas flow rate control apparatus | |
| JPH09182534A (en) | Apparatus for mixing liquid fertilizer for irrigation | |
| CN112327948B (en) | Mass flow controller | |
| JPH0887335A (en) | Mass flow rate controller | |
| CN210601070U (en) | Command performance test platform | |
| JPS6319805B2 (en) | ||
| JP2008139254A (en) | Flow measuring device and flow controlling device | |
| KR100455309B1 (en) | Solenoid valve flow measuring device and method for obtaining an accurate flow value by selecting automatically a flow tube and a flow meter according to the size of flow and the compensation of differential pressure | |
| JP2001027555A (en) | Flowrate-measuring device and leak tester | |
| TW201231940A (en) | Testing of flow meters | |
| JPS61202120A (en) | Flow rate measuring apparatus | |
| JPH0140014Y2 (en) | ||
| JPS60159624A (en) | Calibrating device of pressure measuring device | |
| JPH08101176A (en) | Gas chromatograph | |
| JPH04235611A (en) | Mass flow controller | |
| JPS5926269Y2 (en) | Pressure flow rate automatic measuring device | |
| CN109085110A (en) | Check device and its check method during a kind of single step ventilation rate master bar | |
| JPH0334652Y2 (en) |