JPH0641629B1 - - Google Patents

Info

Publication number: JPH0641629B1
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP3508781A

Other languages

Japanese (ja)

Inventor

Michio Satou

Takasi Yamanobe

Mituo Kawai

Tooru Komatu

Hiromi Shizu

Noriaki Yagi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Toshiba Corp

Original Assignee

Toshiba Corp

Tokyo Shibaura Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-05-15

Filing date

1991-05-15

Publication date

1994-06-01

1991-05-15 Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp

1991-05-15 Priority to JP3508781A priority Critical patent/JPH0641629B1/ja

1994-06-01 Publication of JPH0641629B1 publication Critical patent/JPH0641629B1/ja

Status Expired - Lifetime legal-status Critical Current

Links

JP3508781A 1990-05-15 1991-05-15 Expired - Lifetime JPH0641629B1 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP3508781A JPH0641629B1 (en)	1990-05-15	1991-05-15

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP12305490		1990-05-15
JP3508781A JPH0641629B1 (en)	1990-05-15	1991-05-15

Related Child Applications (1)

Application Number	Title	Priority Date	Filing Date
JP16923695A Division JPH0820863A (en)	1995-06-12	1995-06-12	Silicide film and semiconductor device using the same film

Publications (1)

Publication Number	Publication Date
JPH0641629B1 true JPH0641629B1 (en)	1994-06-01

Family

ID=26460071

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP3508781A Expired - Lifetime JPH0641629B1 (en)	1990-05-15	1991-05-15

Country Status (1)

Country	Link
JP (1)	JPH0641629B1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS61179534A (en) *	1985-01-16	1986-08-12	Mitsubishi Metal Corp	Compound target for sputtering equipment
JPS63219580A (en) *	1987-03-09	1988-09-13	Hitachi Metals Ltd	Sputtering target and its production
JPS63227771A (en) *	1987-03-16	1988-09-22	Tosoh Corp	High purity titanium silicide target for sputtering and production thereof

1991
- 1991-05-15 JP JP3508781A patent/JPH0641629B1/ja not_active Expired - Lifetime

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS61179534A (en) *	1985-01-16	1986-08-12	Mitsubishi Metal Corp	Compound target for sputtering equipment
JPS63219580A (en) *	1987-03-09	1988-09-13	Hitachi Metals Ltd	Sputtering target and its production
JPS63227771A (en) *	1987-03-16	1988-09-22	Tosoh Corp	High purity titanium silicide target for sputtering and production thereof

Legal Events

Date	Code	Title	Description
2006-09-25	S531	Written request for registration of change of domicile	Free format text: JAPANESE INTERMEDIATE CODE: R313531
2006-09-29	S111	Request for change of ownership or part of ownership	Free format text: JAPANESE INTERMEDIATE CODE: R313111 Free format text: JAPANESE INTERMEDIATE CODE: R313114
2006-10-03	R350	Written notification of registration of transfer	Free format text: JAPANESE INTERMEDIATE CODE: R350
2006-10-12	R371	Transfer withdrawn	Free format text: JAPANESE INTERMEDIATE CODE: R371
2006-10-17	S111	Request for change of ownership or part of ownership	Free format text: JAPANESE INTERMEDIATE CODE: R313111 Free format text: JAPANESE INTERMEDIATE CODE: R313114
2006-10-25	R350	Written notification of registration of transfer	Free format text: JAPANESE INTERMEDIATE CODE: R350
2008-05-20	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20090601 Year of fee payment: 15
2009-05-19	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20100601 Year of fee payment: 16
2010-05-13	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20100601 Year of fee payment: 16
2010-05-18	FPAY	Renewal fee payment (event date is renewal date of database)	Free format text: PAYMENT UNTIL: 20110601 Year of fee payment: 17
2011-05-15	EXPY	Cancellation because of completion of term

Publication	Publication Date	Title
DE9002844U1 (en)	1990-12-06
DE9001739U1 (en)	1991-06-13
DE9001360U1 (en)	1990-03-29
DE9003329U1 (en)	1990-07-19
DE9002409U1 (en)	1990-05-03
DE9001113U1 (en)	1990-04-05
DE9000240U1 (en)	1991-02-14
DE9003365U1 (en)	1991-07-18
DE9000697U1 (en)	1990-03-29
DE9002225U1 (en)	1990-06-21
DE9000252U1 (en)	1990-02-22
DE9001030U1 (en)	1990-05-31
DE9002058U1 (en)	1990-04-26
DE9002390U1 (en)	1990-09-27
DE9000391U1 (en)	1990-08-23
DE9002232U1 (en)	1990-05-10
DE9001226U1 (en)	1990-04-26
DE9014038U1 (en)	1992-08-06
DE9001786U1 (en)	1990-05-10
DE9007182U1 (en)	1990-11-08
DE9002143U1 (en)	1990-04-26
DE9002458U1 (en)	1990-05-17
DE9001469U1 (en)	1990-06-07
DE9002122U1 (en)	1990-05-31
DE9002661U1 (en)	1990-05-10